CN209124504U - A kind of polysilicon chip Intelligent cleaning device - Google Patents

A kind of polysilicon chip Intelligent cleaning device Download PDF

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Publication number
CN209124504U
CN209124504U CN201821851550.4U CN201821851550U CN209124504U CN 209124504 U CN209124504 U CN 209124504U CN 201821851550 U CN201821851550 U CN 201821851550U CN 209124504 U CN209124504 U CN 209124504U
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CN
China
Prior art keywords
bottom plate
fixed
wall portion
protrusion
inside wall
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Expired - Fee Related
Application number
CN201821851550.4U
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Chinese (zh)
Inventor
何飞
张靖
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Jiangsu Derun Photoelectric Technology Co Ltd
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Jiangsu Derun Photoelectric Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Priority to CN201821851550.4U priority Critical patent/CN209124504U/en
Application granted granted Critical
Publication of CN209124504U publication Critical patent/CN209124504U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The utility model discloses a kind of polysilicon chip Intelligent cleaning devices, including wash bowl, cover and supporting part, the supporting part includes that the first splendid attire basket, the second splendid attire basket and third contain basket, there is ultrasonic generator in the wash bowl, the wash bowl is connected with inlet tube and outlet tube, there is the first valve at the inlet tube, there is the second valve at the outlet tube, there is inner cavity in the cover, there is blower in the inner cavity by piping connection, there is heating unit at the pipeline, be fixed with row nozzle in communication with the inner cavity below the cover.The cleaning device of the utility model, cleaning, drying are high-efficient.

Description

A kind of polysilicon chip Intelligent cleaning device
Technical field
The utility model relates to field polysilicons, and in particular to a kind of polysilicon chip Intelligent cleaning device.
Background technique
Polysilicon chip is a kind of form of elemental silicon.When the elemental silicon of melting solidifies under the conditions of supercooling, silicon atom is with gold Hard rock lattice morphologic arrangement grows up to the different crystal grain of high preferred orientation at many nucleus, such as these nucleus, then these crystal grain combine Come, just crystallizes into polysilicon.With the development of new energy technology, the technology of polysilicon chip also obtains significant progress, and by It is huge in the demand of photovoltaic power generation, therefore the yield of polysilicon chip, need higher production efficiency.Polysilicon is in process of production It needs by cleaning step.In cleaning efficiency and cleaning effect, there are certain contradictions.And it also requires by drying operation.
Utility model content
Purpose of utility model: the utility model is intended to overcome the deficiencies of existing technologies, and it is intelligent to provide a kind of polysilicon chip Cleaning device.
Technical solution: a kind of polysilicon chip Intelligent cleaning device, including wash bowl, cover and supporting part, the carrying Portion includes that the first splendid attire basket, the second splendid attire basket and third contain basket, and the first splendid attire basket includes the first bottom plate and the first bottom plate Cylindrical first lateral wall of fixed annulus and annulus cylindrical first inner sidewall fixed with first bottom plate, described first There are multiple the first vertical exterior bayonet slots, it is multiple vertical to have at the excircle of first inner sidewall at the inner periphery of lateral wall The first inner card cage, the quantity of first exterior bayonet slot is equal to the quantity of the first inner card cage, has at first bottom plate multiple First arc-shaped through-hole;The second splendid attire basket includes the second bottom plate, annulus cylindrical second lateral wall fixed with the second bottom plate With annulus cylindrical second inner sidewall fixed with second bottom plate, have at the inner periphery of second lateral wall multiple perpendicular The second straight exterior bayonet slot, with multiple the second vertical inner card cages, second wild card at the excircle of second inner sidewall The quantity of slot is equal to the quantity of the second inner card cage, has multiple second arc-shaped through-holes at second bottom plate;The third contains Basket includes third bottom plate, the annulus cylindrical third lateral wall fixed with third bottom plate and the annulus fixed with the third bottom plate Cylindrical third inner sidewall, has multiple vertical third exterior bayonet slots at the inner periphery of the third lateral wall, in the third There are multiple vertical third inner card cages, the quantity of the third exterior bayonet slot is equal to the number of third inner card cage at the excircle of side wall It measures, there are multiple third arc-shaped through-holes at the third bottom plate;The first shadoof is fixed at first bottom plate, described first mentions Bar passes through the first inside wall portion, the second bottom plate, the second inside wall portion, third bottom plate and third inside wall portion, and described second contains Basket and third contain basket and can slide relative to the shadoof, and first, second and third bottom plate is circle, first bottom plate Circumference at be fixed with the first fixed ring, the second fixed ring is fixed at the circumference of second bottom plate, the third bottom plate Third fixed ring is fixed at circumference, first fixed ring is fixedly connected with multiple first positioning columns, second fixed ring Multiple second positioning columns are fixedly connected with, second fixed ring has multiple the first positioning passed through by first positioning column Hole, the third fixed ring have multiple second location holes passed through by the second positioning column, the lower surface of second fixed ring With the first hemispherical protrusion of multiple ends, the lower surface of the third fixed ring has hemispherical the in multiple ends Two protrusions;The inner sidewall of the wash bowl is fixed with the first load-carrying ring of circular ring shape and the second loading plate of circular ring shape, and described The upper surface of one load-carrying ring has the first circular ring shape sliding slot for placing first protrusion, the upper table of second load-carrying ring Face has the second circular ring shape sliding slot for placing second protrusion, and the bottom of the wash bowl has shaft, the shaft It is connected with turntable, there is positioning protrusion at the turntable, the lower surface of first bottom plate has to be cooperated with the positioning protrusion Positioning groove, the positioning protrusion and positioning groove are cuboid;There are the interior of the wash bowl multiple ultrasounds to occur Device, the wash bowl also have the driving mechanism for driving the shaft rotation, and the wash bowl is connected with inlet tube and out liquid It manages, there is the first valve at the inlet tube, there is the second valve at the outlet tube, there is inner cavity in the cover, it is described There is a blower in inner cavity by piping connection, has heating unit at the pipeline, be fixed with below the cover row with it is described interior The nozzle of chamber connection.
Further, first protrusion has 4, and second protrusion has 4.
Further, the hemisphere that first and second protrusion includes cylindrical portion and is fixedly connected with cylindrical portion Body portion.
Further, first and second positioning column and the first and second location hole are 2.
Further, the top of the shadoof is fixed with rectangle frame portion.
Further, the outer diameter of second fixed ring less than the second load-carrying ring internal diameter, first fixed ring it is outer Internal diameter of the diameter less than the first load-carrying ring;When first bottom plate is abutted with the turntable, multiple first protrusions are respectively positioned on the first circle In annular groove and when multiple second protrusions are respectively positioned in the second circular ring shape sliding slot, the top of first inside wall portion with it is described The distance between lower surface of second bottom plate is greater than 10cm, the lower surface on the top of second inner sidewall and the third bottom plate The distance between be greater than 10cm.
Further, first inside wall portion, the second inside wall portion, third inside wall portion, the first external side wall, second The height of lateral wall and third external side wall is equal.
Further, the wash bowl is cylinder.
The utility model has the advantages that the cleaning device of the utility model, is able to achieve high-efficiency washing, and be conducive to dry.
Detailed description of the invention
Fig. 1 is cleaning device schematic diagram;
Fig. 2 is the second bearing basket schematic diagram.
Specific embodiment
Appended drawing reference: 1.1 first bottom plates;1.2 first external side walls;1.3 first inside wall portions;1.4 first fixed rings; 1.5 first positioning columns;2.1 second bottom plates;2.1.1 the second arc-shaped through-hole;2.2 second external side walls;2.3 second inside wall portions; 2.4 second fixed rings;2.5 second positioning columns;2.6 first protrusions;3.1 third bottom plates;3.2 third external side walls;In 3.3 thirds Sidewall portion;3.4 third fixed rings;3.6 second protrusions;4 shadoofs;5 rectangle frames;11 wash bowls;12 shafts;13 ultrasounds fill It sets;14 first load-carrying rings;15 second load-carrying rings;16 outlet tubes;17 inlet tubes;18 covers;19 inner cavities;20 blowers;21 heating are single Member;22 nozzles.
A kind of polysilicon chip Intelligent cleaning device, including wash bowl 11, cover and supporting part, the supporting part include the One, which contains basket, the second splendid attire basket and third, contains basket, and described first contains basket consolidates including the first bottom plate 1.1, with the first bottom plate 1.1 Cylindrical first lateral wall 1.2 of fixed annulus and annulus cylindrical first inner sidewall 1.3 fixed with first bottom plate, it is described There are multiple the first vertical exterior bayonet slots at the inner periphery of first lateral wall, have at the excircle of first inner sidewall multiple The first vertical inner card cage, the quantity of first exterior bayonet slot are equal to the quantity of the first inner card cage, have at first bottom plate Multiple first arc-shaped through-holes;The second splendid attire basket includes the second bottom plate 2.1, the annulus cylindrical second fixed with the second bottom plate Lateral wall 2.2 and annulus cylindrical second inner sidewall 2.3 fixed with second bottom plate, the inner periphery of second lateral wall Locate that there are multiple the second vertical exterior bayonet slots, there are multiple the second vertical inner card cages at the excircle of second inner sidewall, The quantity of second exterior bayonet slot is equal to the quantity of the second inner card cage, has multiple second arc-shaped through-holes at second bottom plate 2.1.1;The third contain basket include third bottom plate 3.1, the annulus cylindrical third lateral wall 3.2 fixed with third bottom plate and The fixed annulus cylindrical third inner sidewall 3.3 with the third bottom plate has at the inner periphery of the third lateral wall multiple Vertical third exterior bayonet slot, has multiple vertical third inner card cages at the excircle of the third inner sidewall, outside the third The quantity of card slot is equal to the quantity of third inner card cage, has multiple third arc-shaped through-holes at the third bottom plate;First bottom The first shadoof 4 is fixed at plate, first shadoof passes through the first inside wall portion, the second bottom plate, the second inside wall portion, third bottom Wall portion on the inside of plate and third, the second splendid attire basket and third contain basket and can slide relative to the shadoof, described first, Two, three bottom plates are circle, and the first fixed ring 1.4, the circumference of second bottom plate are fixed at the circumference of first bottom plate Place is fixed with the second fixed ring 2.4, and third fixed ring 3.4, first fixed ring are fixed at the circumference of the third bottom plate It is fixedly connected with multiple first positioning columns 1.5, second fixed ring is fixedly connected with multiple second positioning columns 2.5, and described Two fixed rings have multiple first positioning holes passed through by first positioning column, and the third fixed ring has multiple by second The second location hole that positioning column passes through, the first protrusion that the lower surface of second fixed ring has multiple ends hemispherical 2.6, the second protrusion 3.6 that the lower surface of the third fixed ring has multiple ends hemispherical;The inside of the wash bowl Wall is fixed with the first load-carrying ring of circular ring shape and the second loading plate of circular ring shape, and the upper surface of first load-carrying ring, which has, to be used for The first circular ring shape sliding slot of first protrusion is placed, the upper surface of second load-carrying ring has convex for placing described second The bottom of the second circular ring shape sliding slot risen, the wash bowl has shaft, and the shaft is connected with turntable, has at the turntable Positioning protrusion, the lower surface of first bottom plate have positioning groove cooperate with the positioning protrusion, the positioning protrusion with Positioning groove is cuboid;The interior of the wash bowl has multiple ultrasonic generators 13, and the wash bowl also has drive The driving mechanism of the shaft rotation is moved, the wash bowl is connected with inlet tube 17 and outlet tube, has at the inlet tube 16 First valve has the second valve at the outlet tube, has inner cavity in the cover, there is wind in the inner cavity by piping connection Machine 20 has heating unit 21 at the pipeline, is fixed with row nozzle 22 in communication with the inner cavity below the cover.
First protrusion has 4, and second protrusion has 4.It is described first and second protrusion include cylindrical portion and The hemisphere body portion being fixedly connected with cylindrical portion.First and second positioning column and the first and second location hole are 2.It is described The top of shadoof is fixed with rectangle frame portion.For the outer diameter of second fixed ring less than the internal diameter of the second load-carrying ring, described first is solid Determine internal diameter of the outer diameter less than the first load-carrying ring of ring;When first bottom plate is abutted with the turntable, the equal position of multiple first protrusions In in the first circular ring shape sliding slot and when multiple second protrusions are respectively positioned in the second circular ring shape sliding slot, the top of first inside wall portion The distance between end and the lower surface of second bottom plate are greater than 10cm, the top of second inner sidewall and the third bottom plate The distance between lower surface be greater than 10cm.First inside wall portion, the second inside wall portion, wall portion on the inside of third, outside first The height of sidewall portion, the second lateral wall and third external side wall is equal.The wash bowl is cylinder.
The cleaning device of the utility model, supporting part include that the first splendid attire basket, the second splendid attire basket and third contain basket, the One, two, three splendid attire baskets can place multiple silicon wafers, and by shadoof (suspension hook catches on rectangle frame), can once by first, Two, three splendid attire baskets disposably lift.And when supporting part is placed in wash bowl by boom hoisting, the first splendid attire basket is carried on On turntable, the second splendid attire basket is shelved on the first load-carrying ring, and third contains basket and is shelved on the second load-carrying ring, thus first and second, Three contain with biggish gap between basket, to can adequately be cleaned to each silicon wafer in ultrasonic cleaning.In addition, The setting of protrusion and sliding slot can reduce the resistance of sliding, drive first to contain the rotation of basket by the rotation of turntable, then drive Second and third contains the slow rotation of basket, so that the nozzle being arranged in a row can carry out hot-air blowing to all silicon wafers, thus fastly Speed drying, increases cleaning, drying efficiency.Cleaning is more complete simultaneously.
Although the utility model is illustrated and described with regard to preferred embodiment, those skilled in the art should be managed Solution, without departing from the claim limited range of the utility model, the utility model can be carried out various change and Modification.

Claims (8)

1. a kind of polysilicon chip Intelligent cleaning device, which is characterized in that including wash bowl, cover and supporting part, the carrying Portion includes that the first splendid attire basket, the second splendid attire basket and third contain basket, and the first splendid attire basket includes the first bottom plate and the first bottom plate Cylindrical first external side wall of fixed annulus and the annulus cylindrical first inside wall portion fixed with first bottom plate, it is described There are multiple the first vertical exterior bayonet slots at the inner periphery of first external side wall, have at the excircle of first inside wall portion Multiple the first vertical inner card cages, the quantity of first exterior bayonet slot are equal to the quantity of the first inner card cage, at first bottom plate With multiple first arc-shaped through-holes;The second splendid attire basket includes the second bottom plate, the annulus fixed with the second bottom plate cylindrical the Two external side walls and the annulus cylindrical second inside wall portion fixed with second bottom plate, the inner circle of second external side wall There are multiple the second vertical exterior bayonet slots at week, have in multiple second vertically at the excircle of second inside wall portion and block Slot, the quantity of second exterior bayonet slot are equal to the quantity of the second inner card cage, have multiple second arcs logical at second bottom plate Hole;It includes third bottom plate, the annulus cylindrical third lateral wall fixed with third bottom plate and with described that the third, which contains basket, Wall portion on the inside of the cylindrical third of the fixed annulus of three bottom plates, with multiple vertical the at the inner periphery of the third external side wall Three exterior bayonet slots have multiple vertical third inner card cages at the excircle of wall portion on the inside of the third, the third exterior bayonet slot Quantity is equal to the quantity of third inner card cage, has multiple third arc-shaped through-holes at the third bottom plate;Consolidate at first bottom plate Surely there is the first shadoof, first shadoof passes through the first inside wall portion, the second bottom plate, the second inside wall portion, third bottom plate and the Three inside wall portions, the second splendid attire basket and third contain basket and can slide relative to the shadoof, first, second and third bottom Plate is circle, and the first fixed ring is fixed at the circumference of first bottom plate, and is fixed at the circumference of second bottom plate Two fixed rings are fixed with third fixed ring at the circumference of the third bottom plate, and first fixed ring is fixedly connected with multiple One positioning column, second fixed ring are fixedly connected with multiple second positioning columns, and second fixed ring has multiple described The first positioning hole that first positioning column passes through, the third fixed ring have multiple the second positioning passed through by the second positioning column Hole, the first protrusion that the lower surface of second fixed ring has multiple ends hemispherical, the following table of the third fixed ring The second protrusion that face has multiple ends hemispherical;The inside wall portion of the wash bowl is fixed with the first load-carrying ring of circular ring shape With the second loading plate of circular ring shape, the upper surface of first load-carrying ring has the first annulus for placing first protrusion Shape sliding slot, the upper surface of second load-carrying ring has the second circular ring shape sliding slot for placing second protrusion, described clear The bottom of washing cylinder has shaft, and the shaft is connected with turntable, has positioning protrusion at the turntable, under first bottom plate Surface has the positioning groove cooperated with the positioning protrusion, and the positioning protrusion and positioning groove are cuboid;It is described The interior of wash bowl has multiple ultrasonic generators, and the wash bowl also has the driving mechanism for driving the shaft rotation, institute It states wash bowl and is connected with inlet tube and outlet tube, there is the first valve at the inlet tube, there is the second valve at the outlet tube Door, the cover is interior to have inner cavity, and there is blower in the inner cavity by piping connection, has heating unit at the pipeline, described Row nozzle in communication with the inner cavity is fixed with below cover.
2. polysilicon chip Intelligent cleaning device according to claim 1, which is characterized in that first protrusion has 4, Second protrusion has 4.
3. polysilicon chip Intelligent cleaning device according to claim 1, which is characterized in that first and second protrusion is Including cylindrical portion and the hemisphere body portion being fixedly connected with cylindrical portion.
4. polysilicon chip Intelligent cleaning device according to claim 1, which is characterized in that first and second positioning column It is 2 with the first and second location hole.
5. polysilicon chip Intelligent cleaning device according to claim 1, which is characterized in that the top of the shadoof is fixed There is rectangle frame portion.
6. polysilicon chip Intelligent cleaning device according to claim 1, which is characterized in that outside second fixed ring Internal diameter of the diameter less than the second load-carrying ring, the internal diameter of the outer diameter of first fixed ring less than the first load-carrying ring;When first bottom Plate is abutted with the turntable, multiple first protrusions are respectively positioned in the first circular ring shape sliding slot and multiple second protrusions are respectively positioned on the second circle When in annular groove, the distance between lower surface of the top of first inside wall portion and second bottom plate is greater than 10cm, The distance between the top of second inside wall portion and the lower surface of the third bottom plate are greater than 10cm.
7. polysilicon chip Intelligent cleaning device according to claim 1, which is characterized in that first inside wall portion, Second inside wall portion, wall portion on the inside of third, the first external side wall, the height of the second external side wall and third external side wall are homogeneous Deng.
8. polysilicon chip Intelligent cleaning device according to claim 1, which is characterized in that the wash bowl is cylinder Shape.
CN201821851550.4U 2018-11-09 2018-11-09 A kind of polysilicon chip Intelligent cleaning device Expired - Fee Related CN209124504U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201821851550.4U CN209124504U (en) 2018-11-09 2018-11-09 A kind of polysilicon chip Intelligent cleaning device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201821851550.4U CN209124504U (en) 2018-11-09 2018-11-09 A kind of polysilicon chip Intelligent cleaning device

Publications (1)

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CN209124504U true CN209124504U (en) 2019-07-19

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109158373A (en) * 2018-11-09 2019-01-08 江苏德润光电科技有限公司 A kind of polysilicon chip Intelligent cleaning device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109158373A (en) * 2018-11-09 2019-01-08 江苏德润光电科技有限公司 A kind of polysilicon chip Intelligent cleaning device
CN109158373B (en) * 2018-11-09 2023-10-10 江苏德润光电科技有限公司 Intelligent belt cleaning device of polycrystalline silicon piece

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GR01 Patent grant
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20190719

Termination date: 20211109

CF01 Termination of patent right due to non-payment of annual fee