CN115346960A - Alignment mark structure and semiconductor device - Google Patents
Alignment mark structure and semiconductor device Download PDFInfo
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- CN115346960A CN115346960A CN202210924558.3A CN202210924558A CN115346960A CN 115346960 A CN115346960 A CN 115346960A CN 202210924558 A CN202210924558 A CN 202210924558A CN 115346960 A CN115346960 A CN 115346960A
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 9
- 238000005452 bending Methods 0.000 claims abstract description 42
- 239000000758 substrate Substances 0.000 claims abstract description 41
- 238000001514 detection method Methods 0.000 claims description 10
- 238000005259 measurement Methods 0.000 claims description 7
- 238000000034 method Methods 0.000 description 13
- 230000009286 beneficial effect Effects 0.000 description 4
- 238000000059 patterning Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 238000005389 semiconductor device fabrication Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/544—Marks applied to semiconductor devices or parts, e.g. registration marks, alignment structures, wafer maps
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
- H01L2223/544—Marks applied to semiconductor devices or parts
- H01L2223/54426—Marks applied to semiconductor devices or parts for alignment
Abstract
The invention discloses an alignment mark structure and a semiconductor device, the structure can comprise a substrate, a first alignment mark and a second alignment mark which are positioned on the substrate and are arranged in central symmetry based on a preset center, and a third alignment mark and a fourth alignment mark which are positioned on the substrate and are arranged in central symmetry based on the preset center, wherein the first alignment mark comprises a plurality of first gratings which are arranged in a first direction, the third alignment mark comprises a plurality of second gratings which are arranged in a second direction, the second direction is vertical to the first direction, the first gratings comprise first bending patterns and/or the second gratings comprise second bending patterns, and a plurality of mutually independent fine grating structures are changed into the bending patterns which are arranged integrally, so that the structural deformation of the gratings can be avoided, and the accuracy of positioning based on the alignment mark structure or the alignment between layers can be improved.
Description
Technical Field
The present application is a divisional application with application number CN202110693253.1 entitled "an alignment mark structure and semiconductor device".
Background
In the conventional semiconductor device fabrication process, it is generally required to transfer a target circuit pattern to a specific position on a substrate using a photolithography process. In order to ensure accurate positioning of the target circuit pattern on the substrate and accurate alignment of various circuit patterns between different layers on the substrate, an alignment mark structure may be formed in a predetermined region of the substrate to perform positioning or alignment between layers based on the alignment mark structure.
In the prior art, a self-aligned double patterning (SADP) process or a self-aligned reverse double patterning (SARP) process is usually used to form a plurality of smaller-sized fins, and a trench between adjacent fins can be used as a grating to form a refined alignment mark structure. However, the smaller size of the fin has poor stability, and the fin is prone to toppling in subsequent grinding processes, which results in structural changes of the grating, and further results in reduced positioning accuracy or alignment accuracy between layers based on the alignment mark structure.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: the structure of the grating in the existing alignment mark structure is easy to deform, so that the accuracy of positioning or alignment between layers based on the alignment mark structure is reduced.
In order to solve the above technical problems, the present invention provides an alignment mark structure and a semiconductor device.
In a first aspect of the present invention, there is provided an alignment mark structure, comprising:
a substrate;
a first alignment mark on the substrate, the first alignment mark including a plurality of first gratings arranged at intervals in a first direction;
a second alignment mark on the substrate, the second alignment mark being arranged in a central symmetry with the first alignment mark based on a preset midpoint;
a third alignment mark on the substrate, the third alignment mark including a plurality of second gratings arranged at intervals in a second direction, the first direction being perpendicular to the second direction; and the number of the first and second groups,
and the fourth alignment mark is arranged in a central symmetry manner with the third alignment mark based on the preset midpoint, and the first grating comprises a first bending pattern and/or the second grating comprises a second bending pattern.
In some embodiments, the first bending pattern comprises:
a plurality of first bar-shaped portions extending along the second direction, the plurality of first bar-shaped portions being arranged in parallel and spaced apart in the first direction;
the first connecting parts extend in the first direction and are alternately arranged on two sides of the first strip-shaped parts so as to connect two adjacent first strip-shaped parts.
In some embodiments, the first grating constant between two adjacent first stripe portions is smaller than the wavelength of the detection light wave.
In some embodiments, the second bending pattern comprises:
a plurality of second bar-shaped portions extending along the second direction, the plurality of second bar-shaped portions being arranged in parallel and spaced apart in the first direction;
the second connecting parts extend in the first direction and are alternately arranged on two sides of the second strip-shaped parts to connect two adjacent second strip-shaped parts.
The alignment mark structure of claim 4, wherein a second grating constant between two adjacent second strip portions is smaller than a wavelength of a detection light wave.
In some embodiments, the first grating constant corresponding to the first alignment mark is equal to the second grating constant corresponding to the third alignment mark.
In some embodiments, the first alignment mark, the second alignment mark, the third alignment mark, and the fourth alignment mark constitute a measurement alignment mark, and the alignment mark structure further includes: a reference alignment mark, the reference alignment mark and the measurement alignment mark being provided in different layers on the substrate.
In some embodiments, the contrasting alignment marks comprise:
a fifth alignment mark, which is spaced apart from and parallel to the first alignment mark in the second direction, and includes a plurality of third gratings arranged at intervals in the first direction;
the sixth alignment marks are arranged in a centrosymmetric manner with the fifth alignment marks on the basis of the preset midpoint;
a seventh alignment mark, which is parallel to and spaced apart from the third alignment mark in the first direction, and includes a plurality of fourth gratings arranged at intervals in the second direction; and the number of the first and second groups,
and the eighth alignment marks are arranged in a centrosymmetric manner with the seventh alignment marks on the basis of the preset midpoint.
In some embodiments, the third grating comprises a third meander pattern and/or the fourth grating comprises a fourth meander pattern.
In a second aspect of the invention, there is provided a semiconductor device comprising an alignment mark structure as defined in any one of the above.
Compared with the prior art, one or more embodiments in the scheme can have the following advantages or beneficial effects:
the alignment mark structure provided by the invention can comprise a substrate, a first alignment mark and a second alignment mark which are positioned on the substrate and are arranged in a central symmetry mode based on a preset center, and a third alignment mark and a fourth alignment mark which are positioned on the substrate and are arranged in a central symmetry mode based on the preset center, wherein the first alignment mark comprises a plurality of first gratings which are arranged in a first direction, the third alignment mark comprises a plurality of second gratings which are arranged in a second direction, the second direction is vertical to the first direction, the first gratings comprise first bending patterns and/or the second gratings comprise second bending patterns, and through changing a plurality of mutually independent fine grating structures into the integrally arranged bending patterns, the structural deformation of the gratings can be avoided, and the accuracy of positioning based on the alignment mark structure or alignment between layers can be improved.
Drawings
The scope of the present disclosure may be better understood by reading the following detailed description of exemplary embodiments in conjunction with the accompanying drawings. Wherein the included drawings are:
fig. 1 is a schematic top view illustrating an alignment mark structure according to an embodiment of the present invention;
FIG. 2 is a schematic diagram illustrating a top view of a first alignment mark according to an embodiment of the present invention;
fig. 3 is a schematic top view illustrating a third alignment mark according to an embodiment of the present invention;
FIG. 4 is a schematic top view of another alignment mark structure provided in an embodiment of the present invention;
FIG. 5 isbase:Sub>A schematic cross-sectional view of an alignment mark structure taken along line A-A' in FIG. 4 according to an embodiment of the present invention;
fig. 6 is a schematic top view illustrating a fifth alignment mark according to an embodiment of the present invention;
fig. 7 is a schematic top view illustrating a seventh alignment mark according to an embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention clearer, the following will describe in detail an implementation method of the present invention with reference to the accompanying drawings and embodiments, so that how to apply technical means to solve the technical problems and achieve the technical effects can be fully understood and implemented.
In the conventional semiconductor device fabrication process, a photolithography process is usually required to transfer a target circuit pattern to a specific position on a substrate. In order to ensure accurate positioning of the target circuit pattern on the substrate and accurate alignment of various circuit patterns between different layers on the substrate, an alignment mark structure may be formed in a predetermined region of the substrate to perform positioning or alignment between layers based on the alignment mark structure.
In the prior art, a self-aligned double patterning (SADP) process or a self-aligned reverse double patterning (SARP) process is usually used to form a plurality of smaller-sized fins, and trenches between adjacent fins can be used as gratings to form a fine alignment mark structure. However, the smaller size of the fin has poor stability, and the fin is prone to toppling in subsequent grinding processes, which results in structural changes of the grating, and further results in reduced positioning accuracy or alignment accuracy between layers based on the alignment mark structure.
In view of the above, the present invention provides an alignment mark structure, which may include a substrate, a first alignment mark and a second alignment mark that are located on the substrate and are arranged in a central symmetry manner based on a preset center, and a third alignment mark and a fourth alignment mark that are located on the substrate and are arranged in a central symmetry manner based on a preset center, wherein the first alignment mark includes a plurality of first gratings arranged in a first direction, the third alignment mark includes a plurality of second gratings arranged in a second direction, the second direction is perpendicular to the first direction, the first gratings include first bending patterns and/or the second gratings include second bending patterns, and by changing a plurality of fine grating structures that are independent of each other into bending patterns that are integrally arranged, structural deformation of the gratings may be avoided, which is beneficial to improving accuracy of positioning based on the alignment mark structure or alignment between layers.
Referring to fig. 1, fig. 1 is a schematic top view illustrating an alignment mark structure according to an embodiment of the present invention, which may include:
a substrate 10;
a first alignment mark 11 on the substrate 10, the first alignment mark 11 including a plurality of first gratings arranged at intervals in a first direction D1;
a second alignment mark 12 on the substrate 10, the second alignment mark 12 being arranged in a central symmetry with the first alignment mark 11 based on a predetermined midpoint;
a third alignment mark 13 located on the substrate 10, where the third alignment mark 13 includes a plurality of second gratings arranged at intervals in a second direction D2, and the first direction D1 is perpendicular to the second direction D2; and (c) a second step of,
and a fourth alignment mark 14 on the substrate 10, wherein the fourth alignment mark 14 is arranged in a central symmetry manner with the third alignment mark 13 based on a preset midpoint, the first grating includes a first bending pattern 111, and the second grating includes a second bending pattern 131.
In the embodiment of the present invention, the plurality of first gratings of the first alignment mark 11 may be distributed at equal intervals in the first direction D1, and the first pitch corresponding to the first alignment mark 11 may be denoted as a1; the plurality of second gratings of the third alignment mark 13 may be distributed at equal intervals in the second direction D2, and a second pitch corresponding to the third alignment mark 13 may be denoted by a2. In some embodiments, the first pitch a1 and the second pitch a2 may be equal. In other embodiments, the first distance a1 and the second distance a2 may not be equal.
In some embodiments, as shown in fig. 1, the first bending pattern 111 may have a smaller size in the first direction D1 than in the second direction D2, and the second bending pattern 131 may have a larger size in the first direction D1 than in the second direction D2. The first alignment center y1 in the y-axis direction may be obtained based on the first alignment mark 11 and the second alignment mark 12, and the second alignment center x1 in the x-axis direction may be obtained based on the third alignment mark 13 and the fourth alignment mark 14, with the first direction D1 as the y-axis direction and the second direction D2 as the x-axis direction.
The first bending pattern 111 may include a plurality of first strip portions 1111, the first strip portions 1111 extend along the second direction D2, and the plurality of first strip portions 1111 are disposed in parallel and spaced apart in the first direction D1; a plurality of first connection parts 1112, the first connection parts 1112 extending in the first direction D1 and being alternately disposed at both sides of the first strip parts 1111 to connect two adjacent first strip parts 1111. In some embodiments, the first bending pattern 111 may include a plurality of first strip portions 1111 arranged at equal intervals, and accordingly, a plurality of first connection portions 1112 for connecting adjacent two first strip portions 1111 have the same size in the first direction D1; in other embodiments, the first bending pattern 111 may include a plurality of first strip portions 1111 arranged at unequal intervals, and accordingly, a plurality of first connection portions 1112 for connecting two adjacent first strip portions 1111 may have different sizes in the first direction D1.
Specifically, as shown in fig. 2, by setting the first grating constant d1 between two adjacent first strip portions 1111 to be smaller than the wavelength of the detection light wave, the first bending pattern 111 with higher density can be formed.
In the embodiment of the present invention, the second bending pattern 131 may include a plurality of second bar portions 1311, the second bar portions 1311 extend along the second direction D2, and the plurality of second bar portions 1311 are disposed in parallel and are arranged at intervals in the first direction D1; and a plurality of second connection parts 1312, the second connection parts 1312 extending in the first direction D1 and being alternately disposed at both sides of the second bar-shaped parts 1212 to connect adjacent two second bar-shaped parts 1311. In some embodiments, the second bending pattern 131 may include a plurality of second bar portions 1311 arranged at equal intervals, and accordingly, the second connection portions 1312 for connecting two adjacent second bar portions 1311 have the same size in the first direction D1; in other embodiments, the second bending pattern 131 may include a plurality of second bar portions 1311 arranged at unequal intervals, and accordingly, the second connection portions 1312 for connecting two adjacent second bar portions 1311 may have different sizes in the first direction D1.
Specifically, as shown in fig. 3, by setting the second grating constant d2 between two adjacent second strip portions 1311 to be smaller than the wavelength of the detection light wave, the second bending pattern 131 with higher density can be formed.
It should be noted that, in the embodiment of the present invention, the first grating may further include the first bending pattern 111, and the second grating includes the stripe pattern, or the second grating may include the second bending pattern 131, and the first grating includes the stripe pattern. In the embodiment of the present invention, the first alignment mark, the second alignment mark, the third alignment mark, and the fourth alignment mark may be manufactured by using an SADP process or an SARP process.
In order to detect the alignment deviation, alignment marks may also be provided in different layers on the substrate to reduce alignment errors by measuring the relative positions between the alignment marks of the different layers, as can be seen in particular in fig. 4.
Fig. 4 is a schematic top view illustrating another alignment mark structure provided in an embodiment of the present invention, which may further include a contrast alignment mark, and the contrast alignment mark and the measurement alignment mark are disposed in different layers on the substrate. Among them, the measurement alignment mark may be composed of a first alignment mark 11, a second alignment mark 12, a third alignment mark 13, and a fourth alignment mark 14.
In some embodiments, the contrasting alignment marks may include:
a fifth alignment mark 15, in the second direction D2, the fifth alignment mark 15 is spaced from and parallel to the first alignment mark 11, and the fifth alignment mark 15 includes a plurality of third gratings arranged at intervals in the first direction D1;
a sixth alignment mark 16, wherein the sixth alignment mark 16 is arranged in a central symmetry manner with the fifth alignment mark 15 based on a preset midpoint;
a seventh alignment mark 17, in the first direction D1, the seventh alignment mark 17 and the third alignment mark 13 are arranged in parallel and at an interval, and the seventh alignment mark 17 includes a plurality of fourth gratings arranged at an interval in the second direction D2; and (c) a second step of,
and the eighth alignment mark 18, the eighth alignment mark 18 being arranged in central symmetry with the seventh alignment mark 13 based on a preset midpoint.
In the embodiment of the present invention, the comparison alignment mark and the measurement alignment mark are disposed in different layers on the substrate, and the projections on the substrate do not overlap, as shown in fig. 5, fig. 5 isbase:Sub>A schematic cross-sectional structure diagram of the alignment mark structure alongbase:Sub>A-base:Sub>A' in fig. 4 provided in the embodiment of the present invention. In some embodiments, the third grating of the fifth alignment mark 15 and the first grating of the first alignment mark 11 may be arranged in a one-to-one correspondence in the second direction D2; in other embodiments, the third grating of the fifth alignment mark 15 and the first grating of the first alignment mark 11 may be arranged in a staggered manner in the second direction D2.
In some embodiments, referring to fig. 4, the fifth alignment mark 15 may include a plurality of third gratings arranged at equal intervals in the first direction D1, and the third pitch a3 corresponding to the fifth alignment mark 15 may be equal to the first pitch a 1. The plurality of fourth gratings of the seventh alignment mark 17 may be arranged at equal intervals in the second direction D2, and the fourth pitch a4 corresponding to the seventh alignment mark 17 may be equal to the second pitch a2.
It should be noted that, in the embodiment of the present invention, the first pitch a1, the second pitch a2, the third pitch a3, and the fourth pitch a4 may be larger than the wavelength of the detection light wave, so that the alignment position can be detected by using the boundary of each meander pattern.
In some embodiments, the third grating and the fourth grating may be bar gratings. In other embodiments, the third grating may include a third bending pattern 151, the third bending pattern 151 may include a plurality of third strip portions 1511, the third strip portions 1511 extend along the second direction D2, and the plurality of third strip portions 1511 are disposed in parallel and are arranged at intervals in the first direction D1; and a plurality of third connection parts 1512, the third connection parts 1512 extending in the first direction D1 and being alternately disposed on both sides of the third strip parts 1511 to connect two adjacent third strip parts 1511. In some embodiments, the third bending pattern 151 may include a plurality of third strip portions 1511 arranged at equal intervals, and accordingly, the plurality of third connecting portions 1512 for connecting two adjacent third strip portions 1511 have the same size in the first direction D1; in other embodiments, the third bending pattern 151 may include a plurality of third strip portions 1511 arranged at unequal intervals, and accordingly, the plurality of third connecting portions 1512 for connecting two adjacent third strip portions 1511 may have different sizes in the first direction D1.
A third grating constant between two adjacent third strip portions 1511 is smaller than the wavelength of the detection light wave, and the third grating constant may be represented as d3, specifically, as shown in fig. 6, by setting the third grating constant d3 between two adjacent third strip portions 1511 to be smaller than the wavelength of the detection light wave, the third bending pattern 151 with high density ratio is favorably formed.
In the embodiment of the present invention, the fourth grating may include a fourth bending pattern 171, the fourth bending pattern 171 may include a plurality of fourth bar-shaped portions 1711, the fourth bar-shaped portions 1711 extend along the second direction D2, and the plurality of fourth bar-shaped portions 1711 are disposed in parallel and are arranged at intervals in the first direction D1; and a plurality of fourth connecting portions 1712, wherein the fourth connecting portions 1712 extend in the first direction D1 and are alternately arranged on both sides of the fourth connecting portions 1712 to connect two adjacent fourth bar portions 1711. In some embodiments, the fourth bending pattern 171 may include a plurality of equally spaced fourth bar portions 1711, and correspondingly, a plurality of fourth connecting portions 1712 for connecting two adjacent fourth bar portions 1711 have the same size in the first direction D1; in other embodiments, the fourth bending pattern 171 may include a plurality of fourth bar portions 1711 arranged at unequal intervals, and correspondingly, a plurality of fourth connecting portions 1712 for connecting two adjacent fourth bar portions 1711 may have different sizes in the first direction D1.
Specifically, as shown in fig. 7, the fourth grating constant d4 between two adjacent fourth strip portions 1711 is smaller than the wavelength of the detection light wave, which is beneficial to forming the fourth bending pattern 171 with higher density.
In some embodiments, the fifth alignment mark 15 may be disposed in the same manner as the first alignment mark 11, and the seventh alignment mark 17 may be disposed in the same manner as the third alignment mark 13. The third alignment center y2 in the y-axis direction can be obtained by the fifth alignment mark 15 and the sixth alignment mark 16, and the fourth alignment center x2 in the x-axis direction can be obtained by the seventh alignment mark 17 and the eighth alignment mark 18. And then through comparing third alignment center y2 and first alignment center y1, and/or comparing fourth alignment center x2 and second alignment center x1, can detect out whether have the alignment deviation, and then be favorable to reducing the alignment error and improve semiconductor device's performance.
The alignment mark structure provided by the embodiment of the present invention may include a substrate 10, a first alignment mark 11 and a second alignment mark 12 located on the substrate 10 and arranged in a central symmetry manner based on a preset center, and a third alignment mark 13 and a fourth alignment mark 14 located on the substrate 10 and arranged in a central symmetry manner based on the preset center, wherein the first alignment mark 11 includes a plurality of first gratings arranged in a first direction D1, the third alignment mark includes a plurality of second gratings arranged in a second direction D2, the second direction D2 is perpendicular to the first direction D1, the first gratings include first bending patterns 111 and/or the second gratings include second bending patterns 131, and by changing a plurality of fine grating structures independent from each other into bending patterns arranged integrally, structural deformation of the gratings may be avoided, which is beneficial to improving precision of positioning based on the alignment mark structure or alignment between layers.
Another aspect of the present invention also provides a semiconductor device, which may include the alignment mark structure as shown above.
Although the embodiments of the present invention have been described above, the above description is only for the convenience of understanding the present invention, and is not intended to limit the present invention. It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims.
Claims (10)
1. An alignment mark structure, comprising:
a substrate;
a first alignment mark on the substrate, the first alignment mark including a plurality of first gratings arranged at intervals in a first direction;
a second alignment mark on the substrate, the second alignment mark including a plurality of second gratings arranged at intervals in a first direction;
wherein the first pair of mark marks and the second pair of mark marks are respectively positioned in different layers on the substrate;
at least one of the first grating or the second grating includes a first bending pattern, wherein the first bending pattern includes: a plurality of first bar-shaped portions extending in the second direction, the plurality of first bar-shaped portions being arranged in parallel and spaced apart in the first direction; the first connecting parts extend in the first direction and are alternately arranged on two sides of the first strip-shaped parts so as to connect two adjacent first strip-shaped parts.
2. The alignment mark structure of claim 1, wherein the second alignment mark is arranged in a central symmetry manner with the first alignment mark based on a preset midpoint, and the alignment mark structure further comprises:
a third alignment mark on the substrate, the third alignment mark including a plurality of second gratings arranged at intervals in a second direction, the first direction being perpendicular to the second direction;
and the fourth alignment marks are positioned on the substrate and are arranged in a centrosymmetric manner with the third alignment marks on the basis of the preset midpoint.
3. The alignment mark structure of claim 2, wherein a first grating constant between two adjacent first stripe portions is smaller than a wavelength of a detection light wave.
4. The alignment mark structure of claim 1, wherein at least one of the first grating or the second grating comprises a second meander pattern, the second meander pattern comprising:
a plurality of second bar-shaped portions extending along the second direction, the plurality of second bar-shaped portions being arranged in parallel and spaced apart in the first direction;
the second connecting parts extend in the first direction and are alternately arranged on two sides of the second strip-shaped parts to connect two adjacent second strip-shaped parts.
5. The alignment mark structure of claim 4, wherein a second grating constant between two adjacent second stripe portions is smaller than a wavelength of a detection light wave.
6. The alignment mark structure of claim 2, wherein a first grating constant corresponding to the first alignment mark is equal to a second grating constant corresponding to the third alignment mark.
7. The alignment mark structure of claim 2, wherein the first alignment mark, the second alignment mark, the third alignment mark, and the fourth alignment mark constitute a measurement alignment mark, the alignment mark structure further comprising: a reference alignment mark, the reference alignment mark and the measurement alignment mark being provided in different layers on the substrate.
8. The alignment mark structure of claim 7, wherein the contrasting alignment mark comprises:
a fifth alignment mark, which is spaced apart from and parallel to the first alignment mark in the second direction, and includes a plurality of third gratings arranged at intervals in the first direction;
the sixth alignment marks are arranged in a centrosymmetric manner with the fifth alignment marks on the basis of the preset middle points;
a seventh alignment mark, which is parallel to and spaced apart from the third alignment mark in the first direction, and includes a plurality of fourth gratings arranged at intervals in the second direction; and the number of the first and second groups,
and the eighth alignment marks are arranged in a centrosymmetric manner with the seventh alignment marks on the basis of the preset midpoint.
9. The alignment mark structure of claim 8, wherein the third grating comprises a third meander pattern and/or the fourth grating comprises a fourth meander pattern.
10. A semiconductor device characterized in that it comprises an alignment mark structure according to any one of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210924558.3A CN115346960A (en) | 2021-06-22 | 2021-06-22 | Alignment mark structure and semiconductor device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110693253.1A CN113270392B (en) | 2021-06-22 | 2021-06-22 | Alignment mark structure and semiconductor device |
| CN202210924558.3A CN115346960A (en) | 2021-06-22 | 2021-06-22 | Alignment mark structure and semiconductor device |
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| CN202110693253.1A Division CN113270392B (en) | 2021-06-22 | 2021-06-22 | Alignment mark structure and semiconductor device |
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| US6699624B2 (en) * | 2001-02-27 | 2004-03-02 | Timbre Technologies, Inc. | Grating test patterns and methods for overlay metrology |
| WO2004090979A2 (en) * | 2003-04-08 | 2004-10-21 | Aoti Operating Company, Inc | Overlay metrology mark |
| KR100746619B1 (en) * | 2006-06-28 | 2007-08-08 | 주식회사 하이닉스반도체 | Overlay vernier key and the method for fabricating overlay vernier key |
| NL2006451A (en) * | 2010-05-06 | 2011-11-08 | Asml Netherlands Bv | Production of an alignment mark. |
| NL2010734A (en) * | 2012-05-29 | 2013-12-02 | Asml Netherlands Bv | Metrology method and apparatus, substrate, lithographic system and device manufacturing method. |
| US8908181B2 (en) * | 2012-06-28 | 2014-12-09 | Taiwan Semiconductor Manufacturing Company, Ltd. | Overlay mark and method of measuring the same |
| KR20150134493A (en) * | 2014-05-21 | 2015-12-02 | 삼성전자주식회사 | Method of forming pattern of a semiconductor device |
| CN105573049A (en) * | 2014-11-07 | 2016-05-11 | 西南科技大学 | Proximity nano-lithography double grating automatic alignment marks |
| TWI730050B (en) * | 2017-02-15 | 2021-06-11 | 聯華電子股份有限公司 | Overlay mark and method for evaluating stability of semiconductor manufacturing process |
| US11222851B2 (en) * | 2017-12-28 | 2022-01-11 | Fuji Electric Co., Ltd. | Method of manufacturing semiconductor device |
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