CN115304243B - 石英玻璃沉积装置以及石英玻璃的制备方法 - Google Patents
石英玻璃沉积装置以及石英玻璃的制备方法 Download PDFInfo
- Publication number
- CN115304243B CN115304243B CN202211085703.XA CN202211085703A CN115304243B CN 115304243 B CN115304243 B CN 115304243B CN 202211085703 A CN202211085703 A CN 202211085703A CN 115304243 B CN115304243 B CN 115304243B
- Authority
- CN
- China
- Prior art keywords
- furnace body
- quartz glass
- deposition
- deposition substrate
- support rod
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 206
- 230000008021 deposition Effects 0.000 title claims abstract description 123
- 238000004519 manufacturing process Methods 0.000 title claims description 14
- 239000000758 substrate Substances 0.000 claims abstract description 85
- 238000005507 spraying Methods 0.000 claims abstract description 32
- 238000002360 preparation method Methods 0.000 claims abstract description 14
- 238000000151 deposition Methods 0.000 claims description 120
- 239000002210 silicon-based material Substances 0.000 claims description 35
- 239000000377 silicon dioxide Substances 0.000 claims description 33
- 239000002245 particle Substances 0.000 claims description 31
- 235000012239 silicon dioxide Nutrition 0.000 claims description 31
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 30
- 239000001301 oxygen Substances 0.000 claims description 30
- 229910052760 oxygen Inorganic materials 0.000 claims description 30
- 239000001257 hydrogen Substances 0.000 claims description 27
- 229910052739 hydrogen Inorganic materials 0.000 claims description 27
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 25
- 238000000034 method Methods 0.000 claims description 14
- 238000005137 deposition process Methods 0.000 claims description 9
- 238000010438 heat treatment Methods 0.000 claims description 7
- 238000002485 combustion reaction Methods 0.000 claims description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 6
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 claims description 3
- -1 polysiloxane Polymers 0.000 claims description 3
- 229920001296 polysiloxane Polymers 0.000 claims description 3
- 239000005049 silicon tetrachloride Substances 0.000 claims description 3
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 29
- 230000003287 optical effect Effects 0.000 description 27
- 230000000052 comparative effect Effects 0.000 description 7
- 238000006460 hydrolysis reaction Methods 0.000 description 5
- 238000005482 strain hardening Methods 0.000 description 5
- 239000012159 carrier gas Substances 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 150000002431 hydrogen Chemical class 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 239000002912 waste gas Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 230000007062 hydrolysis Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 238000004017 vitrification Methods 0.000 description 2
- QSRINYFVPGFLSO-UHFFFAOYSA-N 2,2,4,4,6,6,8,8,10,10-decaethyl-1,3,5,7,9,2,4,6,8,10-pentaoxapentasilecane Chemical compound CC[Si]1(CC)O[Si](CC)(CC)O[Si](CC)(CC)O[Si](CC)(CC)O[Si](CC)(CC)O1 QSRINYFVPGFLSO-UHFFFAOYSA-N 0.000 description 1
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000002222 downregulating effect Effects 0.000 description 1
- 238000007688 edging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- HTDJPCNNEPUOOQ-UHFFFAOYSA-N hexamethylcyclotrisiloxane Chemical compound C[Si]1(C)O[Si](C)(C)O[Si](C)(C)O1 HTDJPCNNEPUOOQ-UHFFFAOYSA-N 0.000 description 1
- UQEAIHBTYFGYIE-UHFFFAOYSA-N hexamethyldisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)C UQEAIHBTYFGYIE-UHFFFAOYSA-N 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- HMMGMWAXVFQUOA-UHFFFAOYSA-N octamethylcyclotetrasiloxane Chemical compound C[Si]1(C)O[Si](C)(C)O[Si](C)(C)O[Si](C)(C)O1 HMMGMWAXVFQUOA-UHFFFAOYSA-N 0.000 description 1
- 125000005375 organosiloxane group Chemical group 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000012958 reprocessing Methods 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000011282 treatment Methods 0.000 description 1
- 238000009827 uniform distribution Methods 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
- C03B19/1415—Reactant delivery systems
- C03B19/1423—Reactant deposition burners
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/02—Pure silica glass, e.g. pure fused quartz
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/60—Relationship between burner and deposit, e.g. position
- C03B2207/64—Angle
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Glass Melting And Manufacturing (AREA)
Abstract
Description
Claims (6)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202211085703.XA CN115304243B (zh) | 2022-09-06 | 2022-09-06 | 石英玻璃沉积装置以及石英玻璃的制备方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202211085703.XA CN115304243B (zh) | 2022-09-06 | 2022-09-06 | 石英玻璃沉积装置以及石英玻璃的制备方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN115304243A CN115304243A (zh) | 2022-11-08 |
CN115304243B true CN115304243B (zh) | 2024-03-22 |
Family
ID=83865744
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202211085703.XA Active CN115304243B (zh) | 2022-09-06 | 2022-09-06 | 石英玻璃沉积装置以及石英玻璃的制备方法 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN115304243B (zh) |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1458097A (zh) * | 2003-04-23 | 2003-11-26 | 中国建筑材料科学研究院 | 立式四氯化硅汽相沉积合成石英玻璃的方法 |
CN104926087A (zh) * | 2015-07-16 | 2015-09-23 | 中国建筑材料科学研究总院 | 制备合成石英玻璃砣的沉积炉 |
CN204874269U (zh) * | 2015-07-16 | 2015-12-16 | 中国建筑材料科学研究总院 | 制备石英玻璃砣的沉积炉 |
CN106219949A (zh) * | 2016-08-08 | 2016-12-14 | 湖北菲利华石英玻璃股份有限公司 | 一种大规格光腌膜基板用合成石英玻璃锭的生产方法 |
CN108467184A (zh) * | 2018-01-30 | 2018-08-31 | 中国建筑材料科学研究总院有限公司 | 一种大尺寸高均匀石英玻璃的制备方法和装置 |
JP2021020818A (ja) * | 2019-07-24 | 2021-02-18 | クアーズテック徳山株式会社 | 合成シリカガラス製造装置、及びこの装置を用いた合成シリカガラスの製造方法 |
CN113683291A (zh) * | 2021-07-30 | 2021-11-23 | 江苏亨通智能科技有限公司 | 一种生产大尺寸、高均匀性合成石英玻璃砣的方法 |
JP2022032071A (ja) * | 2020-08-11 | 2022-02-25 | クアーズテック徳山株式会社 | 合成シリカガラス製造装置および当該製造装置を用いた合成シリカガラスの製造方法 |
-
2022
- 2022-09-06 CN CN202211085703.XA patent/CN115304243B/zh active Active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1458097A (zh) * | 2003-04-23 | 2003-11-26 | 中国建筑材料科学研究院 | 立式四氯化硅汽相沉积合成石英玻璃的方法 |
CN104926087A (zh) * | 2015-07-16 | 2015-09-23 | 中国建筑材料科学研究总院 | 制备合成石英玻璃砣的沉积炉 |
CN204874269U (zh) * | 2015-07-16 | 2015-12-16 | 中国建筑材料科学研究总院 | 制备石英玻璃砣的沉积炉 |
CN106219949A (zh) * | 2016-08-08 | 2016-12-14 | 湖北菲利华石英玻璃股份有限公司 | 一种大规格光腌膜基板用合成石英玻璃锭的生产方法 |
CN108467184A (zh) * | 2018-01-30 | 2018-08-31 | 中国建筑材料科学研究总院有限公司 | 一种大尺寸高均匀石英玻璃的制备方法和装置 |
JP2021020818A (ja) * | 2019-07-24 | 2021-02-18 | クアーズテック徳山株式会社 | 合成シリカガラス製造装置、及びこの装置を用いた合成シリカガラスの製造方法 |
JP2022032071A (ja) * | 2020-08-11 | 2022-02-25 | クアーズテック徳山株式会社 | 合成シリカガラス製造装置および当該製造装置を用いた合成シリカガラスの製造方法 |
CN113683291A (zh) * | 2021-07-30 | 2021-11-23 | 江苏亨通智能科技有限公司 | 一种生产大尺寸、高均匀性合成石英玻璃砣的方法 |
Also Published As
Publication number | Publication date |
---|---|
CN115304243A (zh) | 2022-11-08 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5550903B2 (ja) | 多結晶シリコンを作製するためのプラズマ堆積装置及び方法 | |
CA2281541C (en) | Method of making a tubular member for optical fiber production using plasma outside vapor deposition | |
KR100637027B1 (ko) | 합성 실리카로부터 유리 잉고트를 생산하는 방법 및 장치 | |
US7305852B2 (en) | Method for manufacturing quartz glass ingot | |
CN103755135B (zh) | 一种光纤预制棒外包层高效制备方法及其设备 | |
US7861557B2 (en) | Plasma torch for making synthetic silica | |
JP5749730B2 (ja) | シリコンの生産のための反応器および方法 | |
CN104926088B (zh) | 高均匀合成石英玻璃砣的制备方法 | |
CN106587590A (zh) | 一种ovd工艺沉积光纤预制棒的设备 | |
CN115304243B (zh) | 石英玻璃沉积装置以及石英玻璃的制备方法 | |
CN112689616A (zh) | 玻璃微粒沉积体的制造方法以及玻璃母材的制造方法 | |
CN102906038B (zh) | 制造带有透明的由合成石英制成的内壁的石英玻璃坩埚的方法 | |
CN1257049A (zh) | 通过无燃烧水解制备光学纤维预型体的方法和装置 | |
CN1286751C (zh) | 使用外部气相沉积法制造光纤预制棒的方法和设备 | |
CN117105513A (zh) | 石英玻璃沉积装置、石英玻璃的制备方法以及石英玻璃 | |
JP2010064934A (ja) | 合成シリカガラス製造用バーナ及びそのバーナを用いた合成シリカガラス製造装置 | |
JP3617153B2 (ja) | 合成石英粉の製造方法 | |
CN1367762A (zh) | 用火焰水解法制造玻璃预制品的装置 | |
CN203668234U (zh) | 一种光纤预制棒外包层高效制备设备 | |
JP4567017B2 (ja) | 合成シリカガラス製造装置及び合成シリカガラス製造方法 | |
JPS6283325A (ja) | 高純度石英ガラスの製造方法 | |
CN116375315A (zh) | 一种掺钛合成石英砂的制备方法 | |
CN116023010A (zh) | 一种低羟基高纯石英砣生产工艺 | |
CN117735829A (zh) | 光纤母材及其制造方法 | |
CN117023971A (zh) | 一种用于ovd工艺的变截面沉积腔 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20240131 Address after: 226000 No. 3, Zhongtian Road, Nantong Economic and Technological Development Zone, Jiangsu Province Applicant after: ZHONGTIAN TECHNOLOGY ADVANCED MATERIALS Co.,Ltd. Country or region after: China Applicant after: JIANGSU ZHONGTIAN TECHNOLOGY Co.,Ltd. Applicant after: Nantong Crystal Co.,Ltd. Address before: 226000 No. 3, Zhongtian Road, Nantong Economic and Technological Development Zone, Jiangsu Province Applicant before: ZHONGTIAN TECHNOLOGY ADVANCED MATERIALS Co.,Ltd. Country or region before: China Applicant before: JIANGSU ZHONGTIAN TECHNOLOGY Co.,Ltd. |
|
TA01 | Transfer of patent application right | ||
GR01 | Patent grant | ||
GR01 | Patent grant |