CN1151554C - Semiconductor device, making method and composition type semiconductor device - Google Patents

Semiconductor device, making method and composition type semiconductor device Download PDF

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Publication number
CN1151554C
CN1151554C CNB971102023A CN97110202A CN1151554C CN 1151554 C CN1151554 C CN 1151554C CN B971102023 A CNB971102023 A CN B971102023A CN 97110202 A CN97110202 A CN 97110202A CN 1151554 C CN1151554 C CN 1151554C
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China
Prior art keywords
lead
wire
semiconductor device
semiconductor element
resin
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Expired - Fee Related
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CNB971102023A
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Chinese (zh)
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CN1167339A (en
Inventor
大内伸仁
白石靖
河野博
山田悦夫
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Oki Electric Industry Co Ltd
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Oki Electric Industry Co Ltd
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    • H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
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  • Engineering & Computer Science (AREA)
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  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Geometry (AREA)
  • Lead Frames For Integrated Circuits (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Wire Bonding (AREA)

Abstract

A resin sealing type semiconductor device, a manufacturing method thereof and a packaging structure thereof are capable of downsizing the semiconductor device and attaining high-density packaging. For this, the resin sealing type semiconductor device with leads exposed in an outer surface, is provided with spot leads adhered to a circuit forming surface of a semiconductor element with an insulating adhesive tape interposed therebetween, each independently regularly arrayed, and exposed to outside with the semiconductor element disposed inside.

Description

Semiconductor device, its manufacture method and composition type semiconductor device
Technical field
The present invention relates to resin-encapsulated semiconductor device, its manufacture method with and encapsulating structure.
Background technology
In recent years,, required to do the resin-encapsulated semiconductor device that is installed in the described card thinlyyer along with the quick progress of IC-card and storage card.Respond this demand, proposed many method of described semiconductor device attenuate.
One in these suggestions relates to a kind of like this structure, and wherein, as disclosed in Japanese patent application 6-273262 number, the upper surface of chip carrier and the lower surface of semiconductor element expose to the open air.According to this structure, can adjust to about 0.5 millimeter to the gross thickness of encapsulation.
In addition, openly announce in 5-309983 number (Japanese patent application 4-119133 number) as Japan Patent disclosed, by lead-in wire being curved the L shaped technology that realizes reducing package area.
But, in the molding semiconductor device of above-mentioned prior art, even the encapsulation attenuation, package area does not still become.In other words, it is very long that lead-in wire reaches the moulded resin outside, and therefore, the package area on printed circuit board (PCB) is compared big significantly with the area of semiconductor element.For realizing high-density packages, this structure is not enough.
Summary of the invention
The objective of the invention is to reduce the size of resin-encapsulated semiconductor device and realize high-density packages, and eliminate the problems referred to above.
The invention provides a kind of semiconductor device, it is characterized in that comprising: the semiconductor element that forms semiconductor circuit; Comprise the insulating barrier that is arranged on the lip-deep insulating cement adhesive tape that forms with described semiconductor circuit; Be fixed on a plurality of somes lead-in wire on the above-mentioned insulating cement adhesive tape, their each comfortablely be independently on electric and be arranged in regularly on the described insulating barrier that their surface is exposed to the open air externally; At least the moulded resin part that on the side of described insulating barrier and described semiconductor element, forms; The metal bump thing, it is arranged on described some lead-in wire and the part between the surface that described semiconductor circuit forms, that do not possess described insulating barrier, is used to realize the electrical connection of semiconductor chip and some lead-in wire.
Preferably, the surface of exposing to the open air at least externally of described some lead-in wire is coated with the coat of metal.
The support part is set on described insulating barrier, this support sector divide comprise with the identical member of described some lead-in wire, but be independent of described some lead-in wire.Wherein, can make described some lead-in wire and described support partly independently of one another by the lead frame that cut-out forms from the continuity of described some lead-in wire.
Described some lead-in wire comprise extend lead-in wire and on electric by being connected to described semiconductor element at the front end of described extension lead-in wire or the described metal bump thing of mid portion.
The present invention also provides a kind of method of making resin-encapsulated semiconductor device, described semiconductor device comprises semiconductor element, insulating barrier, some lead-in wire, metal bump thing and moulded resin part, described method may further comprise the steps successively: the step of preparation lead frame, described lead frame comprise the support of frame member, partition member, connection partition member and a plurality of lead-in wires that extend internally from partition member; Front end plating coating at described a plurality of lead-in wires; Carry out shrink fit, lead-in wire is adhered on the adhesive tape; With the noncontact part between lead-in wire and the adhesive tape, promptly the part between partition member and the lead-in wire front end thrusts, and forms the outside link of lead-in wire; Semiconductor element is adhered to the another side of adhesive tape; The metal bump thing is set in the zone that does not have adhesive tape realizes the electrical connection of semiconductor element and some lead-in wire; With moulded resin above-mentioned semiconductor device is sealed; It is characterized in that the described shrink fit of carrying out is further comprising the steps of with the step that lead-in wire adheres on the adhesive tape: (a) utilize the insulating cement adhesive tape to adhere on the described insulating barrier regularly and be independent of described point and go between, and (b) described a plurality of somes lead-in wires are separated with described lead frame to the part of the support in the lead frame.
Wherein, the described insulating cement adhesive tape that utilizes is the step that the part of the support in the lead frame adheres on the described insulating barrier regularly to utilize the insulating cement adhesive tape to adhere to a face with a plurality of some lead-in wires of the described insulating barrier in the lead frame regularly, and is independent of described some lead-in wire; With the another side that semiconductor element is adhered to described adhesive tape and with resin-sealed described semiconductor element; And described described a plurality of somes lead-in wire is comprised with the step that described lead frame separates: described a plurality of points are gone between separate with described lead frame, and the leading edge of described some lead-in wire is bent downwardly from the outside of the lateral parts of described semiconductor element to be become L shapedly, and on described some lead-in wire and part between the surface that described semiconductor circuit forms, that do not possess described insulating barrier the metal bump thing is set.
The present invention provides a kind of semiconductor device again, it is characterized in that comprising: the semiconductor element that forms semiconductor circuit, comprise the insulating barrier that is arranged on the lip-deep insulating cement adhesive tape that forms with described semiconductor circuit, independently and regularly be arranged in a plurality of somes lead-in wires on the described insulating barrier on electric separately, expose to the open air externally on the surface of described a plurality of some lead-in wires, and their front end extends into to L shaped from outer the facing down of the lateral parts of described semiconductor element, the metal bump thing, it is arranged on described some lead-in wire and between the surface that described semiconductor circuit forms, do not possess on the part of described insulating barrier, and form the moulded resin part in the side of described insulating barrier and described semiconductor element at least.
The invention provides a kind of method that encapsulates a plurality of semiconductor device, it is characterized in that may further comprise the steps: a plurality of semiconductor device with some L shaped lead-in wires are set with side by side relation, the upper surface of described lead-in wire semiconductor element from the moulded resin part exposes to the outside, simultaneously, their front end is from the outer extension that faces down of the lateral parts of this semiconductor element, and, described L shaped lead-in wire is connected to each other, and the coupling part of described L shaped lead-in wire is connected on same the dot pattern that is arranged on the terminal block.
The present invention also provides a kind of composition type semiconductor device, it is characterized in that comprising: a plurality of semiconductor device with some L shaped lead-in wires, the upper surface of described lead-in wire semiconductor element from the moulded resin part exposes to the outside, simultaneously, their front end is from the outer extension that faces down of the lateral parts of described semiconductor element, and wherein, described a plurality of semiconductor device dispose with aspectant relation, make described L shaped lead-in wire front end toward each other, and described L shaped lead-in wire is connected to each other; Wherein, in described a plurality of semiconductor device, each resin-encapsulated is respectively the moulded resin encapsulation, and, together fixed to one another with adhesive the lower surface of described resin-encapsulated.
The present invention also provides a kind of composition type semiconductor device, it is characterized in that comprising: a plurality of semiconductor device with some L shaped lead-in wires, the upper surface of described lead-in wire semiconductor element from the moulded resin part exposes to the outside, simultaneously, their front end is from the outer extension that faces down of the lateral parts of described semiconductor element, wherein, stacked by this way described a plurality of semiconductor device, make the front end of described L shaped lead-in wire arrange with mutually the same direction; In described a plurality of stacked semiconductor device, the front end of the described L shaped lead-in wire of described upper strata semiconductor device is connected to the sweep of the described L shaped lead-in wire of described lower floor semiconductor device; In described a plurality of semiconductor device, each resin-encapsulated is respectively the moulded resin encapsulation, and, utilize adhesive the lower surface of the resin-encapsulated of described upper strata semiconductor device to be fixed to the upper surface of the resin-encapsulated of described lower floor semiconductor device.
Based on this structure, just might reduce the size of molding semiconductor device and realize its high-density packages.Wherein with the application that not only relates to the metal bump thing that is connected of semiconductor element, and relate to the application of insulating cement adhesive tape, thereby eliminate the stress on the described metal bump thing that the difference by thermal expansion causes.Therefore, might avoid occurring following situation: owing to breaking of metal bump thing or the like degenerates electric property or descend.
The outer surface that exposes to the open air at described some lead-in wire is coated with the coat of metal.This coat of metal can be plated in the described outer surface facing surfaces that exposes to the open air on, that is, on the surface of semiconductor element one side, but should not be plated on the side of some this lines.More particularly, be formed on the contact portion on the described side, that have mold pressing resin part not plating coating, thereby might avoiding breaking of resin after the mold pressing.Can be under the situation of the position that needn't depend on very much the interface that is used for forming circuit, the form with array on semiconductor element forms described external cabling terminal (some lead-in wire).
Form described support part with this method of the present invention, and the structure that can reinforce described semiconductor device, thereby can obtain firm and highly reliable semiconductor device.Can utilize lead frame and form described some lead-in wire simultaneously and support part, therefore, the semiconductor device that obtains reinforcing on the structure with less processing step.
Because described support part and some lead-in wire form simultaneously, so can improve production line efficiency.After electroplating, utilize the insulating cement adhesive tape that described some lead-in wire is adhered to regularly, and its perforation (perforate) is stretched out.Therefore, the some lead-in wire is fixed on the mould cursor position, and has predetermined size.In addition, carried out metal plating in advance, therefore, backward even when the assembled semiconductor device, do not need re-plating.In addition, described semiconductor element is stably held on by adhesive tape, and, can obtain firm resin-encapsulated semiconductor device by means of described support part.
Like this, L shaped lead-in wire exposes to the open air in the outside along the side of semiconductor element, therefore, might improve and is used for described external cabling terminal is connected to the bond strength of the solder joint on the dot pattern of printed circuit board (PCB).
In the solution of the present invention, after being processed to form lead frame, do not carry out moulded resin and seal and form described some lead-in wire, form that described point goes between but after the moulded resin sealing step of the described semiconductor device of assembling, described this wire frame is carried out processed.Therefore, might make can high-density packages resin-encapsulated semiconductor device.And, can be connected to two L shaped lead-in wires together on the dot pattern of same printed substrate.
Top resin-encapsulated semiconductor device is layered on the following resin-encapsulated semiconductor device that is encapsulated on the described wiring board with being inverted, and the front end of the L shaped lead-in wire of each resin-encapsulated semiconductor device is connected.Because of the higher level may obtain highdensity encapsulation on described wiring board.
Utilize adhesive fixed to one another being in the same place of top lower surface, therefore, can access the composition type semiconductor device of firm compactness with following resin-encapsulated semiconductor device.
Structure according to composition type semiconductor device of the present invention, prepare a plurality of semiconductor device with some L shaped lead-in wires, the upper surface of described lead-in wire semiconductor element from the moulded resin part exposes to the outside, and simultaneously, their front end is from the outer extension that faces down of the lateral parts of this semiconductor element.Then, stacked together like this described a plurality of semiconductor device, make described L shaped lead-in wire have mutually the same direction.That is, top semiconductor device also is layered on the following semiconductor device with identical direction.Carry out according to identical direction stacked more frequently, with the composition type semiconductor device that obtains having more multi-layered time.For example, described semiconductor device is superimposed as three layers form by a stacked resin-encapsulated semiconductor device again, and, connect L shaped lead-in wire altogether, thereby might on described wiring board, obtain more highdensity encapsulation.
The upper strata semiconductor device is layered on the lower floor's semiconductor device that is encapsulated on the described wiring board according to identical direction, and the front end of the L shaped lead-in wire of each semiconductor device and sweep are connected to each other.Therefore, by according to the sequentially stacked described resin-encapsulated semiconductor device of identical direction, just can on described wiring board, obtain more highdensity encapsulation simply.Utilize described adhesive to be in the same place with following semiconductor device is fixed to one another, thereby can access the semiconductor device of firm compactness top.
In discussion, will understand other purpose of the present invention and advantage below in conjunction with accompanying drawing.
Description of drawings
Fig. 1 is the profile of the resin-encapsulated semiconductor device of explanation first embodiment of the invention;
Fig. 2 is the fragmentary, perspective view of the resin-encapsulated semiconductor device of explanation first embodiment of the invention.
Fig. 3 is the profile of resin-encapsulated semiconductor device of embodiment of the modification of explanation first embodiment of the invention;
Fig. 4 is the fragmentary, perspective view of resin-encapsulated semiconductor device of embodiment of the modification of explanation first embodiment of the invention;
Fig. 5 is the explanatory view that problem intrinsic in the resin-encapsulated semiconductor device is described;
Fig. 6 is the step of lead frame is made in explanation in first embodiment of the invention a plane graph;
Fig. 7 is the perspective view of major part of resin-encapsulated semiconductor device of embodiment of second modification of explanation first embodiment of the invention;
Fig. 8 is the profile of the resin-encapsulated semiconductor device of explanation second embodiment of the invention;
Fig. 9 is the profile of resin-encapsulated semiconductor device of embodiment of the modification of explanation second embodiment of the invention;
Figure 10 is the fragmentary, perspective view of resin-encapsulated semiconductor device of embodiment of the modification of explanation second embodiment of the invention;
Figure 11 is the profile of first Application Example of explanation second embodiment of the invention;
Figure 12 is the profile of second Application Example of explanation second embodiment of the invention;
Figure 13 is the profile of the 3rd Application Example of explanation second embodiment of the invention;
Figure 14 is the profile of the 4th Application Example of explanation second embodiment of the invention;
Embodiment
Go through embodiments of the invention below with reference to the accompanying drawings.
Fig. 1 is the profile of the resin-encapsulated semiconductor device of explanation first embodiment of the invention.Fig. 2 is office's perspective view of resin-encapsulated semiconductor device.
As shown in figs. 1 and 2, a lead-in wire 7 and semiconductor element support 4 are adhered on the face of insulating cement adhesive tape (abbreviating " adhesive tape " as) 2 together.In addition, semiconductor element 1 is adhered to the another side of adhesive tape 2, the circuit formation face of semiconductor element 1 is arranged to have aspectant relation with described some lead-in wire.
Realize the electrical connection of semiconductor element 1 and some lead-in wire 7 by the metal bump thing 9 that is arranged on the zone that does not have adhesive tape 2 these Jie's things.Metal bump thing 9 comprises the conducting metal such as solder or the like, and is arranged on the unshowned electrode surface of the side that is formed at semiconductor element 1.
Point lead-in wire 7 coats of metal 8 that are coated with as external terminal (upper surface among the figure) and interior contacts (lower surface among the figure).The side that should be pointed out that described some lead-in wire is plating coating not.
At least the Outboard Sections of lead-in wire 7, support 4 and semiconductor element 1 and lower part are sealed with moulded resin 6.
By the way, the above-mentioned point of present embodiment lead-in wire 7 be arranged in the zone of semiconductor element 1 regularly, promptly, in the width range of semiconductor element 1.
In addition, the height of metal bump thing 9 is identical with adhesive tape 2 thickness basically.
This shows that the thickness of described semiconductor device is the thickness of semiconductor element 1, the height of metal bump thing 9 and the thickness sum of some lead-in wire 7.In addition, according to present embodiment, the described some lead-in wire that constitutes external terminal basically with the flush of described semiconductor device.
More particularly, described semiconductor device is thinned to the 0.4-0.5 millimeter, and wherein, the thickness of some lead-in wire 7 is that about 0.125 millimeter, the height of metal bump thing 9 are that the thickness of 0.5 millimeter and semiconductor element 1 is 0.250 millimeter.In addition, semiconductor element 1 can adapt to various structural elements.Also have, be connected the application that not only relates to metal bump thing 9 between some lead-in wire 7 and the semiconductor element 1, and relate to the application of insulating cement adhesive tape 2, thus the stress on the described metal bump thing 9 that elimination is caused by the difference of thermal expansion.Therefore, might avoid occurring following situation: owing to breaking of metal bump thing 9 or the like degenerates electric property or descend.
In addition, the structure of describing among Fig. 1 and 2 is such: the fore-and-aft direction of support 4 in Fig. 2 stretches, runs through the core of this semiconductor device, therefore, can realize perpendicular solid encapsulating structure.
By the way, described semiconductor element support is being effectively aspect the rigidity that improves semiconductor device, but is not requisite.Certainly, also can utilize the resin-encapsulated semiconductor device that removes support 4 as shown in Fig. 3 and 4.
In addition, as shown in Figure 5, some lead-in wire 7 is being different aspect the thermal coefficient of expansion with moulded resin 6, therefore, when returning to normal temperature after with moulded resin 6 sealings, formation slit 101 between each border.In addition, can estimate that this may develop into crack 102.Then, as shown in Fig. 1 and 3, the joint that the enhancing of the tight contact performance of these boundaries may be such, the side that makes invocation point lead-in wire 7 does not contact with the coat of metal 8 as external terminal and interior contacts.This is because the coat of metal 8 causes the tight degeneration that contacts with moulded resin 6.Then, the contact-making surface between the moulded resin 6 and the coat of metal 8 is separated.
Use this structure, owing to do not have the contact between the moulded resin 6 and the coat of metal 8, so, can avoid breaking of molded described moulded resin afterwards or the like.
Fig. 6 (A) and 6 (b) are the plane graphs that the step of the lead frame of making the first embodiment of the present invention is described.Fig. 6 (A) is the plane graph of the lead frame before explanation is cut off.Fig. 6 (b) is the plane graph of the lead frame after explanation is cut off.
At first, as shown in Fig. 6 (a), preparation lead frame 10, it comprises: frame member 10a; Partition member 10b; Be used for the support 4 of connection box member 10a; And a plurality of lead-in wire 7A that extend internally from partition member 10b.The front end of described a plurality of lead-in wire 7A is coated with the coat of metal 8, and after this carries out shrink fit like this, so that it is adhered on the adhesive tape 2.
After this, as shown in Fig. 6 (B), instruct noncontact part between lead-in wire 7A and the adhesive tape 2, that is, the part between the front end of partition member 10b and lead-in wire 7A thrusts (punched out), like this, forms some lead-in wire 7 at last.That is, carry out described thrusting, make invocation point lead-in wire 7 become external terminal with such size.The point lead-in wire 7 that thrusts like this is fixed on the adhesive tape 2, and described processing procedure directly enters the number of assembling steps of this semiconductor device.
As mentioned above, according to first embodiment, after having electroplated the coat of metal 8, described a plurality of lead-in wires are sticked with glue is with 2 to fix, and then, forms a lead-in wire 7 for described part is thrust, a lead-in wire according to the fixed size of being scheduled in the target location.In addition, owing to carried out metal plating in advance, so, do not need to carry out again metal plating backward even in the step of this semiconductor device of assembling.
The embodiment of second modification of the first embodiment of the present invention will be described below.
Fig. 7 is the perspective view of major part of resin-encapsulated semiconductor device of embodiment of second modification of explanation first embodiment of the invention.
With reference to figure 7, do not go out moulded resin 6, some lead-in wire 7 among the figure, extend lead-in wire 7-1, electroplate on a lead-in wire 7 and extend the lip-deep coat of metal 8 and the metal bump thing 9 of lead-in wire 7-1.
In first embodiment, will put lead-in wire 7 and arrange, and correspondingly be welded to the (not shown) on the dot pattern that props up of printed circuit board (PCB) (not shown).The interface of semiconductor element 1 is on the position identical with some lead-in wire 7, this means that described semiconductor does not have the degree of freedom, and may suffer restraints aspect the circuit forming.Therefore, according to present embodiment,, also can arrange an external terminal of lead-in wire 7 by means of extending lead-in wire 7-1 even there is to a certain degree skew in the interface on this semiconductor element in orientation.
That is, have as the point of external terminal lead-in wire 7 and to extend lead-in wire 7-1, the latter extends to interface on the semiconductor element as the lead that extends, and metal bump thing 9 is connected to the front end that extends lead-in wire 7-1.
Therefore, can under the situation of the position that does not depend on very much the interface that is used for forming circuit on the semiconductor element, form described external terminal by the tabular form with array.
Various details second embodiment.
Fig. 8 is the profile of the resin-encapsulated semiconductor device of explanation second embodiment of the invention.
As shown in FIG., though described structure be basically the same as those in the first embodiment basically,, above-mentioned some lead-in wire is exposed, and until the side of semiconductor element 1, and bends to L shaped lead-in wire 12 L shaped.
Therefore, different with first embodiment, the forming process of described some lead-in wire is such; Not after being processed to form lead frame, to carry out the moulded resin sealing, but after the moulded resin sealing step of assembled semiconductor device, be processed to form described lead-in wire.
Like this, L shaped lead-in wire 12 exposed, until the side of semiconductor element 1, therefore can strengthen the bond strength that is used for the solder joint that props up the dot pattern (not shown) of external cabling terminal criminals of being connected to printed circuit board (not shown).
By the way, certainly under the situation of saving the support 4 shown in Fig. 8, constitute described resin-encapsulated semiconductor device.
Figure 10 is the perspective view of the major part of explanation resin-encapsulated semiconductor device, described resin-encapsulated semiconductor device is to constitute like this, make the semiconductor element support shown in Fig. 9 be removed, wherein, the L shaped lead-in wire that is coated with the coat of metal 8 is arranged in and is used for the both sides of moulded resin 6 of sealing semiconductor element.
Fig. 1 is the profile of first Application Example of explanation second embodiment of the invention.
According to the resin-encapsulated semiconductor device shown in second embodiment with moulded resin 6 sealings, because L shaped lead-in wire 12 is present in the side, so, can interconnect the L shaped lead-in wire 12b of resin-encapsulated semiconductor device B adjacent one another are and the L shaped lead-in wire 12a of resin-encapsulated semiconductor device A.
In addition, can be connected to a dot pattern 15 on the same printed circuit board 13 to L shaped lead-in wire 12a and L shaped lead-in wire 12b together by solder joint 14.That is, can be common to L shaped lead-in wire 12a and L shaped lead-in wire 12b on same the dot pattern 15.Can see this method of attachment in the occasion of many semiconductor device as memory, wherein, the circuit of semiconductor element adjacent one another are is to form with reverse form, and the I/O of terminal also is reverse.
Like this, on the side of resin-encapsulated semiconductor device, form L shaped lead-in wire 12, therefore, might on same printed circuit board 13, the form with series connection encapsulate described resin-encapsulated semiconductor device compactly.
In addition, can simplify wiring on the printed circuit board (PCB).
Figure 12 is the profile of second Application Example of explanation second embodiment of the invention.
Resin-encapsulated semiconductor device according to a second embodiment of the present invention with moulded resin 6 sealings, L shaped lead-in wire 12 extends to opposite one side always along the side, therefore, as shown in Figure 12, build up two-layer if described resin-encapsulated semiconductor device is reverse (making its bottom surface toward each other) and tegillum, so, by solder joint 14 front end of the L shaped lead-in wire 12a of resin-encapsulated semiconductor device B is fixed to the front end of the L shaped lead-in wire 12b of resin-encapsulated semiconductor device A.The front end of the L shaped lead-in wire 12a of resin-encapsulated semiconductor device A also is fixed to the front end of the L shaped lead-in wire 12b of resin-encapsulated semiconductor device B by solder joint 14.In addition, the bottom surface of described semiconductor device (resin-encapsulated) is together fixed to one another with adhesive 16.
Like this, L shaped lead-in wire stretches out until described bottom surface along the side of described resin-encapsulated, makes resin-encapsulated semiconductor device A and can be connected to each other by solder joint with the front end of each L shaped lead-in wire 12 of its reverse resin-encapsulated semiconductor device B.In addition, the bottom surface of described semiconductor element is together fixed to one another with adhesive 16, therefore, can improve the packaging density on the fierce printed circuit board 13.
Should be pointed out that resin-encapsulated semiconductor device used herein is anti-phase at aspect the circuit structure of each semiconductor element 1 and I/O aspect of terminal.
Figure 13 is the profile of the 3rd Application Example of explanation second embodiment of the invention.
According to the 3rd Application Example, as shown in Figure 13, stacked again one deck on above-mentioned two-layer shown in Figure 12 and form three layers structure.More particularly, as the 3rd layer resin-encapsulated semiconductor device C according to being layered on the resin-encapsulated semiconductor device B as the second layer with the identical direction of ground floor, wherein, each L shaped lead-in wire 12 is linked together.
Like this, build up three layers form, therefore, can further improve the packaging density on the printed circuit board (PCB) 13 according to the resin-encapsulated semiconductor device tegillum of second embodiment of the invention.
Can further increase the number of layer, for example, be increased to four layers, five layers or the like.
Figure 14 is the profile of the 4th Application Example of explanation second embodiment of the invention.
Because L shaped lead-in wire 12 stretches out along the side of described resin-encapsulated, near the part the bottom surface, so, as shown in Figure 14, can be stacked according to the identical direction that makes progress the resin-encapsulated semiconductor device shown in the of the present invention second real hedge example with moulded resin 6 sealings.More particularly, resin-encapsulated semiconductor device A is encapsulated on the printed circuit board (PCB) 13, and resin-encapsulated semiconductor device B is stacked on it according to equidirectional.Then, by at the front end of L shaped lead-in wire 12 and the solder joint 14 of L shaped change pars convoluta office, the L shaped lead-in wire 12a of resin-encapsulated semiconductor device A is connected to the L shaped lead-in wire 12a of resin-encapsulated semiconductor device B.Equally, the L shaped lead-in wire 12b of resin-encapsulated semiconductor device A is connected to the L shaped lead-in wire 12b of resin-encapsulated semiconductor device B.In addition, be in the same place resin-encapsulated semiconductor device A and B are fixed to one another with adhesive 16.
Therefore, can improve packaging density on the printed circuit board (PCB) 13.In many occasions, can see such method of attachment with semiconductor memory that can be laminated into sandwich construction of identical circuit structure element.
Should be pointed out that to the invention is not restricted to the foregoing description that revise but can use based on the various methods of main points of the present invention, these modifications are not excluded outside scope of the present invention.

Claims (11)

1. semiconductor device is characterized in that comprising:
Form the semiconductor element of semiconductor circuit;
Comprise the insulating barrier that is arranged on the lip-deep insulating cement adhesive tape that forms with described semiconductor circuit;
Be fixed on a plurality of somes lead-in wire on the above-mentioned insulating cement adhesive tape, their each comfortablely be independently on electric and be arranged in regularly on the described insulating barrier that their surface is exposed to the open air externally;
At least the moulded resin part that on the side of described insulating barrier and described semiconductor element, forms;
The metal bump thing, it is arranged on described some lead-in wire and the part between the surface that described semiconductor circuit forms, that do not possess described insulating barrier, is used to realize the electrical connection of semiconductor chip and some lead-in wire.
2. according to the semiconductor device of claim 1, it is characterized in that:
The surface of exposing to the open air at least externally of described some lead-in wire is coated with the coat of metal.
3. according to the semiconductor device of claim 1, it is characterized in that:
The support part is set on described insulating barrier, this support sector divide comprise with the identical member of described some lead-in wire, but be independent of described some lead-in wire.
4. according to the semiconductor device of claim 3, it is characterized in that:
The lead frame that forms from the continuity of described some lead-in wire by cut-out makes described some lead-in wire and described support partly independently of one another.
5. according to the semiconductor device of claim 1, it is characterized in that:
Described some lead-in wire comprise extend lead-in wire and on electric by being connected to described semiconductor element at the front end of described extension lead-in wire or the described metal bump thing of mid portion.
6. method of making resin-encapsulated semiconductor device, described semiconductor device comprise semiconductor element, insulating barrier, some lead-in wire, metal bump thing and moulded resin part, and described method may further comprise the steps successively:
The step of preparation lead frame, described lead frame comprise the support of frame member, partition member, connection partition member and a plurality of lead-in wires that extend internally from partition member;
Front end plating coating at described a plurality of lead-in wires;
Carry out shrink fit, lead-in wire is adhered on the adhesive tape;
With the noncontact part between lead-in wire and the adhesive tape, promptly the part between partition member and the lead-in wire front end thrusts, and forms the outside link of lead-in wire;
Semiconductor element is adhered to the another side of adhesive tape;
The metal bump thing is set in the zone that does not have adhesive tape realizes the electrical connection of semiconductor element and some lead-in wire;
With moulded resin above-mentioned semiconductor device is sealed;
It is characterized in that the described shrink fit of carrying out is further comprising the steps of with the step that lead-in wire adheres on the adhesive tape:
(a) utilize the insulating cement adhesive tape to adhere to the part of the support in the lead frame on the described insulating barrier regularly and be independent of described point and go between, and
(b) described a plurality of some lead-in wires are separated with described lead frame.
7. according to the method for the manufacturing semiconductor device of claim 6, it is characterized in that:
The described insulating cement adhesive tape that utilizes is the step that the part of the support in the lead frame adheres on the described insulating barrier regularly to utilize the insulating cement adhesive tape to adhere to a face with a plurality of some lead-in wires of the described insulating barrier in the lead frame regularly, and is independent of described some lead-in wire; With the another side that semiconductor element is adhered to described adhesive tape and with resin-sealed described semiconductor element, and
Described described a plurality of somes lead-in wire is comprised with the step that described lead frame separates: described a plurality of points are gone between separate with described lead frame, and the leading edge of described some lead-in wire is bent downwardly from the outside of the lateral parts of described semiconductor element to be become L shapedly, and on described some lead-in wire and part between the surface that described semiconductor circuit forms, that do not possess described insulating barrier the metal bump thing is set.
8. semiconductor device is characterized in that comprising:
Form the semiconductor element of semiconductor circuit,
Comprise the insulating barrier that is arranged on the lip-deep insulating cement adhesive tape that forms with described semiconductor circuit,
Independently and regularly be arranged in a plurality of somes lead-in wires on the described insulating barrier on electric separately, expose to the open air externally on the surface of described a plurality of somes lead-in wires and their front end extends into to L shaped from outer the facing down of the lateral parts of described semiconductor element,
The metal bump thing, it is arranged on described some lead-in wire and the part between the surface that described semiconductor circuit forms, that do not possess described insulating barrier, and
At least form the moulded resin part in the side of described insulating barrier and described semiconductor element.
9. encapsulate the method for a plurality of semiconductor device, it is characterized in that may further comprise the steps:
With side by side relation a plurality of semiconductor device with some L shaped lead-in wires are set, the upper surface of described lead-in wire semiconductor element from the moulded resin part exposes to the outside, simultaneously, their front end is from the outer extension that faces down of the lateral parts of this semiconductor element, and, described L shaped lead-in wire is connected to each other, and
The coupling part of described L shaped lead-in wire is connected on same the dot pattern that is arranged on the terminal block.
10. composition type semiconductor device is characterized in that comprising:
A plurality of semiconductor device with some L shaped lead-in wires, the upper surface of described lead-in wire semiconductor element from moulded resin part exposes to the outside, and simultaneously, their front end is from the outer extension that faces down of the lateral parts of described semiconductor element,
Wherein, described a plurality of semiconductor device dispose with aspectant relation, make described L shaped lead-in wire front end toward each other, and described L shaped lead-in wire is connected to each other;
Wherein, in described a plurality of semiconductor device, each resin-encapsulated is respectively the moulded resin encapsulation, and, together fixed to one another with adhesive the lower surface of described resin-encapsulated.
11. a composition type semiconductor device is characterized in that comprising:
A plurality of semiconductor device with some L shaped lead-in wires, the upper surface of described lead-in wire semiconductor element from moulded resin part exposes to the outside, and simultaneously, their front end is from the outer extension that faces down of the lateral parts of described semiconductor element,
Wherein, stacked by this way described a plurality of semiconductor device, make the front end of described L shaped lead-in wire arrange with mutually the same direction;
In described a plurality of stacked semiconductor device, the front end of the described L shaped lead-in wire of described upper strata semiconductor device is connected to the sweep of the described L shaped lead-in wire of described lower floor semiconductor device;
In described a plurality of semiconductor device, each resin-encapsulated is respectively the moulded resin encapsulation, and, utilize adhesive the lower surface of the resin-encapsulated of described upper strata semiconductor device to be fixed to the upper surface of the resin-encapsulated of described lower floor semiconductor device.
CNB971102023A 1996-03-27 1997-03-27 Semiconductor device, making method and composition type semiconductor device Expired - Fee Related CN1151554C (en)

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JP8070829A JPH09260538A (en) 1996-03-27 1996-03-27 Resin sealed semiconductor device manufacturing method and its mounting structure
JP070829/96 1996-03-27
JP070829/1996 1996-03-27

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