CN115113328B - Low-loss single-mode spot-size converter based on polymer waveguide and preparation method thereof - Google Patents
Low-loss single-mode spot-size converter based on polymer waveguide and preparation method thereof Download PDFInfo
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- CN115113328B CN115113328B CN202210780192.7A CN202210780192A CN115113328B CN 115113328 B CN115113328 B CN 115113328B CN 202210780192 A CN202210780192 A CN 202210780192A CN 115113328 B CN115113328 B CN 115113328B
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- G—PHYSICS
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/14—Mode converters
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12133—Functions
- G02B2006/12152—Mode converter
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12166—Manufacturing methods
- G02B2006/12176—Etching
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Abstract
The utility model provides a low-loss single-mode spot-size converter based on a polymer waveguide and a preparation method thereof, and the low-loss single-mode spot-size converter comprises a substrate, a lower cladding structure and a conical core structure, wherein the lower cladding structure is arranged on the substrate, the conical core structure is arranged on the lower cladding structure, a first upper cladding structure and a second upper cladding structure are arranged on the conical core structure, the first upper cladding structure and the second upper cladding structure are arranged in parallel, the end face of the first upper cladding structure is connected with a silicon optical chip, and the end face of the second upper cladding structure is connected with a single-mode optical fiber. The utility model can realize the conversion of the mode field size under the strict single-mode condition by the change of the width of the cone-shaped structure of the core layer and the change of the upper cladding material, improves the coupling efficiency of the standard single-mode optical fiber of the silicon optical chip, is compatible with the photoetching technology, does not need a multi-layer structure or accurate relative position relation, has low technology complexity and has low requirement on the alignment precision of the technology.
Description
Technical Field
The utility model relates to the technical field of optical communication, in particular to a low-loss single-mode spot-size converter based on a polymer waveguide and a preparation method thereof.
Background
Under the push of new generation communication and calculation demands, silicon-based photoelectron technology is greatly developed, and the advanced blending of photoelectrons and microelectronics is characterized as a core technology in the latter molar age. Silicon-based materials with higher refractive index differences, while achieving high integration, also present challenges for coupling silicon optical chips to standard single-mode optical fibers. There are two orders of magnitude differences between the mode field area of a silicon waveguide and that of a standard single-mode fiber, and direct coupling results in very high coupling losses.
Conventional coupling schemes with grating couplers, end-face couplers and fiber-end-face structures as the main implementation form often have limitations in practical applications. The grating coupler is based on the interference effect of light due to the implementation principle, and the coupling efficiency is sensitive to wavelength and polarization, so that the coupling efficiency is high in loss and is not suitable for application scenes with large bandwidth. The emergent mode field of the end-face coupler taking the silicon inverted cone structure as the core is difficult to directly couple with a standard single-mode fiber under the influence of the thickness of the buried oxide layer of the silicon on the insulator and the silicon substrate. Lensed fibers are often used in experimental studies, but are expensive and difficult to achieve multi-channel coupling.
According to the search of the prior art, the Chinese patent publication number is CN207780304U, and a high-coupling-ratio optical waveguide spot-transferring device is disclosed. The method is characterized in that a conical silicon waveguide is manufactured on a silicon substrate on an insulator layer, then a combined conical optical waveguide with three layers of SU-8 photoresist materials is continuously sleeved on the insulator layer by utilizing a photoetching technology, and finally a silicon dioxide upper cladding layer is deposited to realize the manufacture of the mode spot converter. The disadvantage of this prior art compared to the present utility model is that not only is the process steps cumbersome, the process complexity high, but also certain parts of the waveguide inevitably have to be operated in multimode conditions, which will introduce problems such as multimode interference and reduced coupling efficiency.
Therefore, the intermediate transitional coupling scheme based on the polymer waveguide has the advantages of low loss, good polarization maintaining property, good compatibility, easiness in realizing high-density coupling and the like, and is an effective solution of the novel optical interface.
Disclosure of Invention
Aiming at the defects in the prior art, the utility model aims to provide a low-loss single-mode spot-size converter based on a polymer waveguide and a preparation method thereof.
The utility model provides a low-loss single-mode spot-size converter based on a polymer waveguide, which comprises a substrate, a lower cladding structure and a conical core layer structure, wherein the lower cladding structure is arranged on the substrate, the conical core layer structure is arranged on the lower cladding structure, a first upper cladding structure and a second upper cladding structure are arranged on the conical core layer structure, the first upper cladding structure and the second upper cladding structure are arranged in parallel, the end face of the first upper cladding structure is connected with a silicon optical chip, and the end face of the second upper cladding structure is connected with a single-mode optical fiber.
In some embodiments, the refractive index of the material of the lower cladding structure is lower than the refractive index of the material of the tapered core structure, the refractive index of the material of the first upper cladding structure and the refractive index of the material of the second upper cladding structure are both greater than or equal to the refractive index of the lower cladding structure, the refractive index of the material of the first upper cladding structure and the refractive index of the material of the second upper cladding structure are both smaller than the refractive index of the material of the tapered core structure, and the refractive index of the material of the first upper cladding structure is smaller than the refractive index of the material of the second upper cladding structure.
In some embodiments, the materials of the lower cladding layer structure, the conical core layer structure, the first upper cladding layer structure and the second upper cladding layer structure are respectively organic-inorganic hybridization polysiloxane type materials, the lower cladding layer structure is arranged by adopting the same materials as the first upper cladding layer structure, the refractive index of the lower cladding layer structure and the first upper cladding layer structure is 1.561/1310nm, the refractive index of the conical core layer structure is 1.579/1310nm, and the refractive index of the second upper cladding layer structure is 1.569/1310nm.
In some embodiments, the tapered core structure is set by the material of the tapered core structure and the mode field of the tapered core structure near the silicon optical end, and the mode field size of the silicon optical chip, the initial width of the tapered core structure is 2-4 μm, the height of the tapered core structure is 2-4 μm, and the termination width of the tapered core structure is 6-9 μm.
In some embodiments, the thicknesses of the first upper cladding layer structure, the second upper cladding layer structure, and the lower cladding layer structure are set by the material of the tapered core layer structure and the mode field of the tapered core layer structure near the silicon optical end, and the mode field size of the silicon optical chip, and the thicknesses of the first upper cladding layer structure, the second upper cladding layer structure, and the lower cladding layer structure are greater than 20 μm.
In some embodiments, the tapered core structure comprises two tapered structural waveguides and one straight waveguide, wherein the two tapered structural waveguides are arranged at two ends of the straight waveguide, and the width of the straight waveguide is 4.1 μm.
In some embodiments, the tapered core structure adopts two sections of nonlinear taper, the shape of the nonlinear taper is set by the refractive index of the material and the size of the waveguide, and the taper structure length of the tapered core structure is set by the mode field conversion loss, the material absorption loss and the process.
In some embodiments, the two sections of the nonlinear cone structure are optimized according to respective materials and structural parameters, and the length of the nonlinear cone is 5mm.
The utility model also provides a preparation method of the low-loss single-mode spot-size converter based on the polymer waveguide, which comprises the following steps: step 1, ultrasonically cleaning a substrate, spin-coating, ultraviolet curing lower cladding photoresist with lower refractive index on the substrate, and thermally curing to manufacture a uniform lower cladding structure;
step 2, spin-coating photoresist with higher refractive index on the existing lower cladding structure, manufacturing the conical core layer structure of the polymer waveguide by using a mask photoetching process, developing and thermally curing;
step 3, spin-coating a first upper cladding photoresist on the existing conical core layer structure, forming the first upper cladding structure by ultraviolet curing through a cladding mask process, developing and thermally curing;
and 4, spin coating or dispensing to directly write the second upper cladding photoresist, ultraviolet curing, developing and thermally curing to form the second upper cladding structure.
Compared with the prior art, the utility model has the following beneficial effects:
1. according to the utility model, as the refractive index of the upper cladding material of the polymer waveguide near the single-mode fiber end is improved, and the binding capacity of the core layer to the optical field is reduced, the mode field size of the waveguide fundamental mode can be further enlarged, and the matching degree of the output mode field and the standard single-mode fiber mode field is higher, so that the coupling loss is reduced;
2. after the upper cladding material is changed, the relative refractive index difference of the waveguide is reduced, and the waveguide can still work under a larger core layer size to keep a single mode, so that the structure can enable the whole device to work under a strict single mode condition at 1310nm wavelength, and multimode interference is avoided;
3. the utility model can realize the conversion of the mode field size under the strict single-mode condition by the change of the width of the cone-shaped structure of the core layer and the change of the upper cladding material, improves the coupling efficiency of the standard single-mode optical fiber of the silicon optical chip, is compatible with the photoetching technology, does not need a multi-layer structure or accurate relative position relation, has low technology complexity and has low requirement on the alignment precision of the technology.
Drawings
Other features, objects and advantages of the present utility model will become more apparent upon reading of the detailed description of non-limiting embodiments, given with reference to the accompanying drawings in which:
FIG. 1 is a schematic diagram of the use of a polymer waveguide based low loss single mode spot-size converter according to the present utility model;
FIG. 2 is a schematic diagram of an intermediate structure obtained in step 1 of the preparation method of the low-loss single-mode spot-size converter based on polymer waveguides;
FIG. 3 is a schematic diagram of an intermediate structure obtained in step 2 of the preparation method of the low-loss single-mode spot-size converter based on polymer waveguides according to the present utility model;
FIG. 4 is a schematic diagram of an intermediate structure obtained in step 3 of the preparation method of the low-loss single-mode spot-size converter based on polymer waveguides according to the present utility model;
FIG. 5 is a schematic diagram of an intermediate structure obtained in step 4 of the preparation method of the low-loss single-mode spot-size converter based on polymer waveguides according to the present utility model;
FIG. 6 is a schematic diagram of a tapered core structure of an embodiment 2 of a polymer waveguide-based low-loss single-mode spot-size converter according to the present utility model;
FIG. 7 is a schematic diagram of an application scenario of an embodiment 2 of a low-loss single-mode spot-size converter based on a polymer waveguide according to the present utility model;
FIG. 8 is a schematic diagram of a tapered core structure of an embodiment 3 of a polymer waveguide-based low-loss single-mode spot-size converter according to the present utility model;
FIG. 9 is a top view of the tapered core structure of example 3 of a polymer waveguide-based low loss single mode spot-size converter according to the utility model;
FIG. 10 is a schematic diagram of an application scenario of an embodiment 3 of a polymer waveguide-based low-loss single-mode spot-size converter according to the present utility model;
FIG. 11 is a graph showing the variation of mode field diameter with waveguide size for different refractive index differences according to the present utility model;
reference numerals:
Detailed Description
The present utility model will be described in detail with reference to specific examples. The following examples will assist those skilled in the art in further understanding the present utility model, but are not intended to limit the utility model in any way. It should be noted that variations and modifications could be made by those skilled in the art without departing from the inventive concept. These are all within the scope of the present utility model.
Example 1
The use schematic diagram of a low-loss single-mode spot-size converter based on a polymer waveguide is shown in fig. 1, and the use schematic diagram comprises a substrate 1, a lower cladding structure 2 and a conical core structure 3, wherein the lower cladding structure 2 is arranged on the substrate 1, the conical core structure 3 is arranged on the lower cladding structure 2, a first upper cladding structure 4 and a second upper cladding structure 5 are arranged on the conical core structure 3, the first upper cladding structure 4 and the second upper cladding structure 5 are arranged in parallel, the end face of the first upper cladding structure 4 is connected with a silicon optical chip 6, and the end face of the second upper cladding structure 5 is connected with a single-mode optical fiber 7. The polymer spot-size converter is used as a middle transition stage to realize the mutual conversion and efficient coupling of the mode fields at two ends.
The refractive index of the material of the lower cladding structure 2 is lower than that of the material of the conical core structure 3, the refractive indexes of the material of the first upper cladding structure 4 and the material of the second upper cladding structure 5 are both greater than or equal to that of the lower cladding structure 2, the refractive indexes of the material of the first upper cladding structure 4 and the material of the second upper cladding structure 5 are both smaller than that of the material of the conical core structure 3, and the refractive index of the material of the first upper cladding structure 4 is smaller than that of the material of the second upper cladding structure 5.
The materials of the lower cladding structure, the conical core structure 3, the first upper cladding structure 4 and the second upper cladding structure 5 are respectively SUNCONNECT series polymer materials of Nissan chemical company, and the materials are organic-inorganic hybrid polysiloxane type materials, and have excellent optical characteristics, hot blood characteristics and oxidation resistance. The lower cladding layer structure 2 and the first upper cladding layer structure 4 are arranged by adopting model NP-216 materials, the refractive index of the lower cladding layer structure 2 and the first upper cladding layer structure 4 is 1.561/1310nm, the conical core layer structure 3 is arranged by adopting model NP-846MF materials, the refractive index of the conical core layer structure 3 is 1.579/1310nm, the second upper cladding layer structure 5 is arranged by adopting model NP-847MF materials, and the refractive index of the second upper cladding layer structure 5 is 1.569/1310nm.
The conical core layer structure 3 is arranged through the material of the conical core layer structure 3 and the mode field of the conical core layer structure 3 near the silicon optical end and the mode field size of the silicon optical chip 6, the initial width of the conical core layer structure 3 is 2-4 mu m, the height of the conical core layer structure 3 is 2-4 mu m, and the termination width of the conical core layer structure 3 is 6-9 mu m. In this embodiment, the starting width of the tapered core structure 3 is 2.6 μm, the height of the tapered core structure 3 is 2.6 μm, and the ending width of the tapered core structure 3 is 7.6 μm.
As shown in fig. 11, the mode field diameter changes with the waveguide size at different refractive index differences, after the refractive index of the material of the tapered core structure 3 is determined, the initial width and the width are scanned to find the optimal value, so that the mode field of the tapered core structure 3 near the silicon optical end is matched with the mode field of the silicon optical chip 6, the coupling efficiency is highest, and the final width is scanned, so that the mode field of the tapered core structure 3 near the optical fiber end is matched with the optical fiber mode field, and the coupling efficiency is highest.
The thicknesses of the first upper cladding layer structure 4, the second upper cladding layer structure 5 and the lower cladding layer structure 2 are set by the material of the conical core layer structure 3 and the mode field size of the conical core layer structure 3 near the silicon optical end and the mode field size of the silicon optical chip 6, and the thicknesses need to be thick enough so that light can be effectively restrained. The thickness of the first upper cladding layer structure 4, the second upper cladding layer structure 5 and the lower cladding layer structure 2 is larger than 20 μm.
A method of manufacturing a low loss single mode spot-size converter based on a polymer waveguide comprising the steps of: step 1, as shown in fig. 2, a schematic diagram of an intermediate structure obtained in the step 1 of the preparation method of the low-loss single-mode spot-size converter based on a polymer waveguide is shown, a substrate 1 is ultrasonically cleaned, spin-coating and ultraviolet curing lower cladding photoresist with a lower refractive index are performed on the substrate 1, and thermal curing is performed, so that a uniform lower cladding structure 2 is manufactured;
step 2, as shown in fig. 3, a schematic diagram of an intermediate structure obtained in the step 2 of the preparation method of the low-loss single-mode spot-size converter based on the polymer waveguide is shown, photoresist with higher refractive index is spin-coated on the existing lower cladding structure 2, and a conical core layer structure 3 of the polymer waveguide is manufactured by using a mask photoetching process, and is developed and thermally cured;
step 3, as shown in fig. 4, a schematic diagram of an intermediate structure obtained in step 3 of a preparation method of a low-loss single-mode spot-size converter based on a polymer waveguide is shown, a first type of upper cladding photoresist is spin-coated on an existing conical core structure 3, and a first upper cladding structure 4 is formed by ultraviolet curing through a cladding mask process, development and thermal curing;
step 4. As shown in fig. 5, the intermediate structure obtained in step 4 of the preparation method of the low-loss single-mode spot-size converter based on the polymer waveguide is schematically shown, and the second upper cladding layer photoresist is spin-coated or spot-glued and directly written, ultraviolet cured, developed and thermally cured to form the second upper cladding layer structure 5.
Example 2
This example 2 is formed on the basis of example 1, except that the tapered core structure 3 comprises two sections of tapered structure waveguides and one section of straight waveguide, and as shown in fig. 6, a schematic diagram of the tapered core structure 3 of example 2 of a low-loss single-mode spot-size converter based on polymer waveguides is shown, and the three sections of structures all use the same core material. Two sections of tapered structure waveguides are arranged at two ends of the straight waveguide, and the width of the straight waveguide is 4.1 mu m.
The straight waveguide width is the optimal width for the upper cladding material to change, as determined by the waveguide material. Where the upper cladding material is changed, the waveguide with the first upper cladding structure still operates in single mode condition and the two sections have the lowest coupling loss at the interface. The length of the straight waveguide is determined by the process accuracy and process feasibility, ensuring that the change in upper cladding structure occurs in the straight waveguide section at the current process accuracy.
The starting width, ending width and height of the tapered core structure 3 are determined by the polymer waveguide material and the two end mode field dimensions, as in example 1. The length of the polymer waveguide core taper structure is determined by the mode field switching loss, the material absorption loss and the process feasibility, as in example 1. The thickness of the upper cladding and lower cladding features 2 is determined by the polymer waveguide material and mode field dimensions, as in example 1.
As shown in fig. 7, which is a schematic diagram of an application scenario of an embodiment 2 of a low-loss single-mode spot-size converter based on a polymer waveguide, the end face of the first upper cladding structure 4 is used for connecting with a silicon optical chip 6, and the end face of the second upper cladding structure 5 is used for connecting with a standard single-mode optical fiber 7. The change of the upper cladding material occurs in the straight waveguide portion, and the device performance is not changed. According to the embodiment, the transition straight waveguide is additionally arranged, so that the accurate requirement of the cladding mask process in the preparation step 3 on the position change of the cladding is reduced, the requirement of the device on the process accuracy is further reduced, and the large-scale production and the application of the device are facilitated.
Example 3
This example 3 is formed on the basis of example 1, with the difference that: the tapered core structure 3 adopts two sections of nonlinear tapers, a schematic diagram of the tapered core structure 3 of the low-loss single-mode spot-size converter embodiment 3 based on the polymer waveguide is shown in fig. 8, a top view of the tapered core structure 3 of the low-loss single-mode spot-size converter embodiment 3 based on the polymer waveguide is shown in fig. 9, the shape of the nonlinear taper is set by the refractive index of the material and the size of the waveguide, and the taper structure length of the tapered core structure 3 is set by the mode field conversion loss, the material absorption loss and the process.
The optimal nonlinear taper shape is determined by the material refractive index and waveguide dimensions. The two-section conical structure is optimized according to the respective material and structural parameters. In this embodiment, the two-section nonlinear cone structure is optimized according to the respective material and structural parameters, and the nonlinear cone has a length of 5mm. The length of the polymer waveguide core taper structure is determined by the mode field switching loss, material absorption loss and process feasibility, and is redesigned according to the nonlinear taper structure, which can be different from embodiment 1.
In the embodiment, the shape of the polymer waveguide conical core layer structure 3 is further optimized, and the nonlinear conical shape is adopted, so that the mode field conversion loss is reduced, and the total loss of the device is reduced. A schematic diagram of an application scenario of embodiment 3 of a low-loss single-mode spot-size converter based on a polymer waveguide is shown in fig. 10.
In the description of the present utility model, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model.
The foregoing describes specific embodiments of the present utility model. It is to be understood that the utility model is not limited to the particular embodiments described above, and that various changes or modifications may be made by those skilled in the art within the scope of the appended claims without affecting the spirit of the utility model. The embodiments of the utility model and the features of the embodiments may be combined with each other arbitrarily without conflict.
Claims (6)
1. The low-loss single-mode spot-size converter based on the polymer waveguide is characterized by comprising a substrate (1), a lower cladding structure (2) and a conical core layer structure (3), wherein the lower cladding structure (2) is arranged on the substrate (1), the conical core layer structure (3) is arranged on the lower cladding structure (2), a first upper cladding structure (4) and a second upper cladding structure (5) are arranged on the conical core layer structure (3), the first upper cladding structure (4) and the second upper cladding structure (5) are arranged in parallel, the end face of the first upper cladding structure (4) is connected with a silicon optical chip (6), and the end face of the second upper cladding structure (5) is connected with a single-mode optical fiber (7);
the refractive index of the material of the lower cladding structure (2) is lower than that of the conical core structure (3), the refractive index of the material of the first upper cladding structure (4) and the refractive index of the material of the second upper cladding structure (5) are both larger than or equal to that of the lower cladding structure (2), the refractive index of the material of the first upper cladding structure (4) and the refractive index of the material of the second upper cladding structure (5) are both smaller than that of the material of the conical core structure (3), and the refractive index of the material of the first upper cladding structure (4) is smaller than that of the material of the second upper cladding structure (5);
the materials of the lower cladding structure, the conical core layer structure (3), the first upper cladding structure (4) and the second upper cladding structure (5) are respectively organic-inorganic hybridization polysiloxane type materials, the lower cladding structure (2) is arranged by adopting the same materials as the first upper cladding structure (4), the refractive index of the lower cladding structure (2) and the first upper cladding structure (4) is 1.561/1310nm, the refractive index of the conical core layer structure (3) is 1.579/1310nm, and the refractive index of the second upper cladding structure (5) is 1.569/1310nm;
the conical core layer structure (3) comprises two sections of conical structure waveguides and one section of straight waveguide, the two sections of conical structure waveguides are arranged at two ends of the straight waveguide, and the width of the straight waveguide is 4.1 mu m;
the change in upper cladding material occurs in the straight waveguide section.
2. The polymer waveguide based low loss single mode spot-size converter according to claim 1, characterized in that the tapered core structure (3) is arranged by the material of the tapered core structure (3) and the mode field of the tapered core structure (3) near the silicon optical end, the mode field size of the silicon optical chip (6), the starting width of the tapered core structure (3) is 2-4 μm, the height of the tapered core structure (3) is 2-4 μm, and the ending width of the tapered core structure (3) is 6-9 μm.
3. The polymer waveguide based low loss single mode spot-size converter according to claim 2, characterized in that the thickness of the first upper cladding structure (4), the second upper cladding structure (5) and the lower cladding structure (2) is set by the material of the tapered core structure (3) and the mode field of the tapered core structure (3) near the silicon optical end, the mode field size of the silicon optical chip (6), the thickness of the first upper cladding structure (4), the second upper cladding structure (5) and the lower cladding structure (2) being larger than 20 μm.
4. The polymer waveguide-based low-loss single-mode spot-size converter according to claim 1, characterized in that the two-section tapered structure waveguide adopts two-section nonlinear taper, the shape of which is set by the refractive index of the material and the waveguide dimensions, and the tapered structure length of the tapered core structure (3) is set by the mode field conversion loss, the material absorption loss and the process.
5. The polymer waveguide based low loss single mode spot-size converter according to claim 4, wherein the two sections of said nonlinear tapered structure are optimized according to respective material and structural parameters, respectively, said nonlinear taper having a length of 5mm.
6. A method of manufacturing a polymer waveguide based low loss single mode spot-size converter according to any one of claims 1-5, comprising the steps of: step 1, ultrasonically cleaning a substrate (1), spin-coating, ultraviolet curing lower cladding photoresist with lower refractive index on the substrate (1), and thermally curing to manufacture a uniform lower cladding structure (2);
step 2, spin-coating photoresist with higher refractive index on the existing lower cladding structure (2), manufacturing the conical core structure (3) of the polymer waveguide by using a mask photoetching process, developing and thermally curing;
step 3, spin-coating a first upper cladding photoresist on the existing conical core layer structure (3), forming a first upper cladding structure (4) by ultraviolet curing through a cladding masking process, developing and thermally curing;
and 4, spin coating or dispensing to directly write the second upper cladding photoresist, ultraviolet curing, developing and thermally curing to form the second upper cladding structure (5).
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