CN111239905A - Coupling element and lithium niobate thin film waveguide coupling device - Google Patents
Coupling element and lithium niobate thin film waveguide coupling device Download PDFInfo
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- CN111239905A CN111239905A CN202010173189.XA CN202010173189A CN111239905A CN 111239905 A CN111239905 A CN 111239905A CN 202010173189 A CN202010173189 A CN 202010173189A CN 111239905 A CN111239905 A CN 111239905A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/262—Optical details of coupling light into, or out of, or between fibre ends, e.g. special fibre end shapes or associated optical elements
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/30—Optical coupling means for use between fibre and thin-film device
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/30—Optical coupling means for use between fibre and thin-film device
- G02B6/305—Optical coupling means for use between fibre and thin-film device and having an integrated mode-size expanding section, e.g. tapered waveguide
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Abstract
The invention provides a coupling element and a lithium niobate thin film waveguide coupling device, which can obtain the lithium niobate thin film waveguide coupling device meeting the practical application requirements based on the coupling element provided by the invention and can improve the coupling efficiency. The coupling element comprises a containing tube, a single-mode optical fiber and a spot size converter, wherein the containing tube is provided with a containing cavity; the spot size converter is positioned in the accommodating cavity of the accommodating tube, and one end of the single-mode optical fiber is inserted into the accommodating cavity of the accommodating tube and connected with the spot size converter; the spot size converter and the single-mode optical fiber are both fixedly bonded to the accommodating tube; the template converter is provided with a tapered ridge waveguide, the tapered ridge waveguide comprises two tail ends, one end of the tapered ridge waveguide is a wide end, and the other end of the tapered ridge waveguide is a narrow end; the wide end is coupled with the fiber core of the single-mode optical fiber, and the narrow end is used for coupling the lithium niobate thin film waveguide.
Description
Technical Field
The invention relates to a coupling structure of a lithium niobate thin film waveguide, in particular to a coupling element for coupling the lithium niobate thin film waveguide and a coupling device of the lithium niobate thin film waveguide.
Background
With the steady advance of optical communication technology towards the fields of short-distance and ultrashort-distance data centers and on-chip optical interconnection and the development of microwave photonics from discrete devices to integrated devices, the demand for microminiature electro-optical modulators which are high in bandwidth, low in half-wave voltage, insensitive to polarization and easy to integrate is increasing day by day. The traditional lithium niobate electro-optical modulator has the defects of large volume, difficulty in integration and difficulty in bandwidth improvement. Fortunately, in recent years, the technology of lithium niobate thin film on insulator (LNOI) has matured, high-quality lithium niobate thin film chips have been commercialized, 2018, the lithium niobate thin film structure has made a major breakthrough in high-speed modulation, the bandwidth reaches 110GHZ, and hybrid integration using a silicon-based lithium niobate thin film and a silicon-based waveguide has been primarily realized in a laboratory, but has a certain distance from practical use.
The coupling of the lithium niobate thin film waveguide mainly has the following problems at present: the mode field size (about 1 micron wide) of lithium niobate optical waveguides is too small compared to the mode field size (about 6-10 microns wide) of optical fibers, and if simple optical fiber and waveguide butt coupling packaging is directly adopted, mode field mismatch exists, and devices face larger coupling loss of 5-8 dB/end.
At present, grating vertical coupling, conical small mode field optical fiber alignment, a double-layer mode field conversion structure and the like are commonly adopted in coupling, and the above coupling scheme has the problems of being not beneficial to fixation, high in process precision requirement, complex in manufacturing process and the like, and is not beneficial to practical sample manufacturing.
Disclosure of Invention
In view of the above, the present invention provides a coupling element for coupling a lithium niobate thin film waveguide and a lithium niobate thin film waveguide coupling device based on the coupling element, which can improve the coupling efficiency with the lithium niobate thin film waveguide and obtain a lithium niobate thin film waveguide coupling device meeting the practical application requirements.
The invention provides a coupling element for coupling lithium niobate thin film waveguide, which comprises a containing tube, a single mode fiber and a spot size converter, wherein,
the accommodating tube is provided with an accommodating cavity;
the spot size converter is positioned in the accommodating cavity of the accommodating tube, and one end of the single-mode optical fiber is inserted into the accommodating cavity of the accommodating tube and connected with the spot size converter; the spot size converter and the single-mode optical fiber are both fixedly bonded to the accommodating tube;
the template converter is provided with a tapered ridge waveguide, the tapered ridge waveguide comprises two tail ends, one end of the tapered ridge waveguide is a wide end, and the other end of the tapered ridge waveguide is a narrow end; the wide end is coupled with the fiber core of the single-mode optical fiber, and the narrow end is used for coupling the lithium niobate thin film waveguide.
Further, the refractive index of the tapered ridge waveguide is 1.6-1.9. The tapered ridge waveguide with the refractive index between the optical fiber (the refractive index is about 1.45) and the lithium niobate thin film (the refractive index is about 2.2) is adopted as a buffer transition structure, the coupling loss is low, the coupling process is easy to implement, and the cost is reduced. If the mode field structure is realized only on the lithium niobate film, direct conversion can cause multiple modes due to large refractive index difference, if a multilayer buffer structure is made, the narrowest part of the conversion structure needs to meet the order of magnitude of dozens of nm, the precision required by the photoetching manufacturing process is very high, the process is very complicated, the yield is low, the cost is overhigh, and the practical application and popularization are not facilitated; the coupling structure of the present invention overcomes these problems.
Furthermore, the material of the tapered ridge waveguide is germanium-doped silicon dioxide, the mode spot converter comprises a body and the tapered ridge waveguide arranged in the body, and the material of the body is silicon dioxide. The germanium-doped silica tapered ridge waveguide has been prepared in the field, and the germanium-doped silica material is adopted, so that the transmission loss is low and is about 0.03-0.08 dB/cm.
In some embodiments, the length of the tapered ridge waveguide is 200-500 μm, the width of the narrow end of the tapered ridge waveguide is 0.5-1.5 μm, and the width of the wide end is 4-5 μm. The length of the mode field conversion structure adopted by the invention is in the sub-millimeter level, and meanwhile, the germanium-doped silicon dioxide material is adopted, so that the transmission loss is very low.
In some embodiments, the single mode optical fiber has a mode field diameter of 6 to 10 μm.
In some embodiments, there are a plurality of single mode optical fibers, and a corresponding number of the plurality of tapered ridge waveguides are disposed within the spot-size converter. Therefore, the spot-size converter can be manufactured into an array waveguide structure, multi-channel high-efficiency coupling is realized, and the application requirement of multi-channel chip integration in the future optical communication market is met.
In some embodiments, the space between the single-mode optical fiber and the spot size converter and the inner wall of the accommodating tube is filled with an adhesive, that is, the single-mode optical fiber and the spot size converter are bonded and fixed in the accommodating tube by the adhesive to form an integrated structure, which is easy for batch application.
The invention also provides a lithium niobate thin film waveguide coupling device, which comprises a lithium niobate thin film waveguide and the coupling element, wherein the narrow end of the tapered ridge waveguide of the spot size converter is coupled with the lithium niobate thin film waveguide.
In some embodiments, the lithium niobate thin film waveguide is a lithium niobate thin film ridge waveguide, the length of the lithium niobate thin film ridge waveguide is 5000-10000 μm, the width of the widest part is 0.9-1.2 μm, and the height is 0.2-0.5 μm;
the two ends of the lithium niobate thin film ridge waveguide are both in a tapered structure, and the width of the coupling part of the lithium niobate thin film ridge waveguide and the tapered ridge waveguide is 0.4-0.6 mu m.
In some embodiments, both ends of the lithium niobate thin-film ridge waveguide are in a tapered structure, the length and the height of the tapered portions at both ends are respectively 300-500 μm and 0.2-0.5 μm in sequence, and the width of the end of the tapered portion is 0.4-0.6 μm.
In some embodiments, the bottom of the lithium niobate thin film waveguide is laminated with a silicon dioxide layer, the bottom of the silicon dioxide layer is laminated with a silicon substrate, and the periphery of the lithium niobate thin film waveguide is coated with silicon dioxide.
The technical scheme provided by the invention has the following beneficial effects:
1. the coupling element provided by the invention is of an integrated structure, is easy to manufacture in large batch, has higher reliability, and can improve the coupling efficiency with the lithium niobate thin film waveguide.
2. The lithium niobate thin film waveguide belongs to a strong-restriction ridge waveguide, the optical mode field is about 1 μm, however, the mode field of the optical fiber is about 6-10 times of that of the optical fiber, and the coupling efficiency is very low; the invention designs a coupling element for integrating single-mode fibers, and introduces a material mode field conversion structure with the refractive index between that of lithium niobate and silicon dioxide, so that the mode field is gradually enlarged, and the coupling efficiency is improved.
3. The direct coupling loss of the lithium niobate thin film and the optical fiber is nearly 6 dB/end, however, the coupling element provided by the invention can reduce the integral single-end coupling loss to 1.5-2dB by virtue of a mode field conversion structure therein, and the coupling efficiency is improved.
Drawings
FIG. 1 is a schematic diagram of a coupling device in one embodiment;
FIG. 2 is a schematic end view of a lithium niobate thin film waveguide in one embodiment;
FIG. 3 is a schematic end view of a single mode optical fiber of a coupling element in one embodiment;
FIG. 4 is a schematic diagram of a wide-end face of a tapered ridge waveguide in a spot-size converter of a coupling element according to one embodiment;
FIG. 5 is a schematic diagram of a narrow end face of a tapered ridge waveguide in a spot-size converter of a coupling element according to one embodiment.
Detailed Description
In order to better understand the technical solution of the present invention, the following examples are further provided to illustrate the present invention, but the present invention is not limited to the following examples.
Referring to fig. 1, 3-5, the present invention provides a coupling element 100 for coupling lithium niobate thin film waveguides, which mainly comprises a containing tube 101, a single mode fiber 102 and a spot size converter 103. Wherein the accommodating tube 101 may be a capillary glass tube. The accommodating tube 101 is hollow and provided with an accommodating cavity. The spot size converter 103 is disposed in the accommodating cavity of the accommodating tube 101, and one end of the single-mode optical fiber 102 is inserted into the accommodating cavity of the accommodating tube 101 and connected to the spot size converter 103, for example, by using ultraviolet glue. Specifically, a tapered ridge waveguide 104 is provided in the spot size converter 103, and the tapered ridge waveguide 104 has two ends, a wide end 104a and a narrow end 104 b. Wherein the wide end 104a of the tapered ridge waveguide 104 is coupled to the core 106 of the single-mode optical fiber 102, and the narrow end 104b of the tapered ridge waveguide 104 is used for coupling the lithium niobate thin film waveguide 200. Namely, the single-mode optical fiber 102 and the lithium niobate thin film waveguide 200 are coupled through the tapered ridge waveguide 104 of the spot size converter 103. A space exists between the single-mode optical fiber 102 and the inner wall of the accommodating tube 101, and a space also exists between the spot size converter 103 and the inner wall of the accommodating tube 101, and the spaces are filled with an adhesive 105, such as a flexible adhesive, so that the single-mode optical fiber 102 and the spot size converter 103 are bonded and fixed with the accommodating tube 101, that is, an integrated structure is formed.
Specifically, the refractive index of the tapered ridge waveguide 104 in the spot size converter 103 is 1.6 to 1.9. Specifically, the tapered ridge waveguide 104 is preferably germanium-doped silica, which is also known in the art, and the refractive index of the germanium-doped silica can be adjusted by adjusting the concentration of the germanium, as is well known to those skilled in the art.
The single mode fiber 102 has a mode field diameter of 6-10 μm, which is well known in the art and has a refractive index of about 1.45. In the coupling element of the present invention, the mode field converting structure (i.e. the mode spot converter) adopts a tapered structure (i.e. is provided with a tapered ridge waveguide), to realize the gradual expansion of the mode field, specifically, the length of the tapered ridge waveguide 104 is 200 μm and the width of the tapered ridge waveguide is transited from 0.5-1.5 μm (specifically, 1 μm, etc.) to 4-5 μm, i.e. the width of the narrow end (i.e. the width of the lateral 104b in fig. 5) is 0.5-1.5 μm, and the width of the wide end (i.e. the width of the lateral 104a in fig. 4) is 4-5 μm, so as to avoid the multimode phenomenon caused by too wide.
In some embodiments, there may be a plurality of single-mode optical fibers 102 as required, and thus, a corresponding number of the tapered ridge waveguides 104 may be disposed in the spot-size converter 103 to form a one-to-one coupling, that is, a spot-size converter with an array structure of tapered ridge waveguides may be used.
In some embodiments, the spot size converter 103 comprises a body 103a and the tapered ridge waveguide 104 disposed in the body 103a, wherein the material of the body is silica, and the material of the tapered ridge waveguide is germanium-doped silica as mentioned above.
The above-described coupling element for coupling a lithium niobate thin film waveguide of the present invention is particularly suitable for coupling the lithium niobate thin film waveguide 200 and the single mode optical fiber 102. Based on this, the present invention also provides a lithium niobate thin film waveguide coupling device, see fig. 1-2, which comprises a lithium niobate thin film waveguide 200 and the above-mentioned coupling element 100 for coupling the lithium niobate thin film waveguide 200, wherein in the mode spot converter 103 of the coupling element 100, the narrow end 104b of the tapered ridge waveguide 104 is coupled with the lithium niobate thin film waveguide 200.
Specifically, referring to fig. 2, the bottom of the lithium niobate thin film waveguide 200 is stacked with a silicon dioxide layer 300, and the bottom of the silicon dioxide layer 300 is stacked with a silicon substrate 400. The height of the silicon dioxide layer may be, for example, 2 μm. The thickness of the silicon substrate is, for example, 0.5 mm. The periphery of the lithium niobate thin film waveguide is coated with silicon dioxide 300 a.
Specifically, the lithium niobate thin film waveguide 200 is a lithium niobate thin film ridge waveguide, and has a length of 5000-. In order to further improve the high-efficiency coupling, Taper structures (namely conical structures) are arranged at two ends of the lithium niobate thin film ridge waveguide, and the coupling element provided by the invention provides a spot-size converter with a specific structure, so that the spot-size converter can play a good role in coupling and buffering; therefore, when the Taper structure is arranged at the two ends of the lithium niobate thin film ridge waveguide, the requirement on the width of the Taper can be relaxed, for example, the width W of the coupling end of the lithium niobate thin film ridge waveguide and the Taper ridge waveguide in the coupling element can be 0.4-0.6 μm, and the process is better realized. However, in the prior art, in order to realize high-efficiency coupling, the taper width of the lithium niobate thin film ridge waveguide is made to be narrow, about 200nm, the requirement on a photoetching machine is very high, the process is complex, and the cost is high; the narrower the taper is made, the larger the mode field is, the effective refractive index is reduced to be close to that of the optical fiber, but the process difficulty is higher, and the practical manufacturing is not facilitated; the present invention overcomes these disadvantages. Meanwhile, the periphery of the lithium niobate thin film waveguide is coated with silica 300a, namely, the evaporated silica is used as an upper cladding, so that the mode spot size is expanded and the effective refractive index is reduced. In a preferred embodiment, the length and height of the tapered waveguide at both ends of the lithium niobate thin-film ridge-type waveguide in the coupling device of the present invention are 300-.
In some embodiments, the coupling device may be formed by bonding and fixing the coupling element 100 and other parts of the lithium niobate thin film waveguide 200 by a suitable coupling adhesive, and the coupling adhesive may be any adhesive that is allowed in the art, such as, without limitation, an ultraviolet adhesive.
The coupling element provided by the invention is particularly a coupling structure body with an integrated optical fiber end, the optical fiber and the mode field conversion waveguide (namely, the mode spot converter 103) are simultaneously fixed in the accommodating tube 101 (such as a capillary tube), the mass production is convenient, the reliability is high, and the coupling efficiency with the lithium niobate film can be improved. In addition, according to actual needs, the spot size converter 103 in the coupling element can be made to have a plurality of tapered ridge waveguides, for example, an arrayed waveguide structure is formed, so that multichannel high-efficiency coupling is realized, and the application requirements of multichannel chip integration in the future optical communication market are met.
The lithium niobate thin film waveguide belongs to a strong confinement ridge waveguide, the optical mode field of the lithium niobate thin film waveguide is about 1 μm, and the mode field of the optical fiber is about 6-10 times of that of the lithium niobate thin film waveguide, and the lithium niobate thin film waveguide and the optical fiber are directly coupled to cause very low coupling efficiency. The refractive index of lithium niobate is 2.2, the refractive index of silicon dioxide (corresponding to single mode fiber) is 1.45, the invention realizes the gradual expansion of the mode field and improves the coupling efficiency by introducing a material mode field conversion structure with the refractive index between the lithium niobate and the silicon dioxide and adopting the tapered ridge waveguide 104 with the refractive index of 1.6-1.9 in the coupling element 100. Compared with the direct coupling loss of the lithium niobate film and the optical fiber of nearly 6 dB/end, the coupling element of the invention reduces the integral single-end coupling loss energy to 1.5-2dB and improves the coupling efficiency.
In addition, the coupling element of the present invention, wherein the spot size converter 103 employs a tapered ridge waveguide 104 having a refractive index of 1.6-1.9 as a buffer transition structure; compared with the mode field structure only realized on the lithium niobate film, the multimode caused by direct conversion due to large refractive index difference can be avoided, if a multilayer buffer structure is adopted, the narrowest part of the conversion structure needs to meet the order of magnitude of dozens of nm, so the coupling element of the invention can avoid the following defects: the precision required by the photoetching process is very high, the process is very complicated, the yield is low, the cost is overhigh, and the practical application and popularization are not facilitated. Therefore, the coupling device provided by the coupling element of the invention is easier to be put into practical use.
For ease of understanding, the following examples illustrate the principles of the coupling device of the present invention, but should not be construed as limiting the invention thereto: the size of an optical mode field transmitted in the single-mode fiber 102 is about 6-10 μm, and then the optical mode field enters the wide end (referred to as end a) of the tapered ridge waveguide 104 of the spot-size converter 103, and the end a is matched with the optical mode field, so that the coupling loss is reduced; then, the light is transited to the narrow end (end b for short) of the tapered ridge waveguide 104 through the tapered structure, and the end b is matched with the lithium niobate waveguide mode field; the whole coupling process realizes high-efficiency coupling by introducing the spot-size converter. Meanwhile, the spot size converter and the optical fiber are integrated into a whole, so that a high-reliability coupling structure body is realized, and the manufacturing requirement of a practical product is met.
Where not otherwise stated, all that is understood or known to those skilled in the art based on the knowledge or prior art in the field is not repeated here.
It will be appreciated by those skilled in the art that modifications or adaptations to the invention may be made in light of the teachings of the present specification. Such modifications or adaptations are intended to be within the scope of the present invention as defined in the claims.
Claims (10)
1. A coupling element for coupling lithium niobate thin film waveguides, comprising a containment tube, a single mode optical fiber and a spot size converter, wherein,
the accommodating tube is provided with an accommodating cavity;
the spot size converter is positioned in the accommodating cavity of the accommodating tube, and one end of the single-mode optical fiber is inserted into the accommodating cavity of the accommodating tube and connected with the spot size converter; the spot size converter and the single-mode optical fiber are both fixedly bonded to the accommodating tube;
the template converter is provided with a tapered ridge waveguide, the tapered ridge waveguide comprises two tail ends, one end of the tapered ridge waveguide is a wide end, and the other end of the tapered ridge waveguide is a narrow end; the wide end is coupled with the fiber core of the single-mode optical fiber, and the narrow end is used for coupling the lithium niobate thin film waveguide.
2. The coupling element of claim 1, wherein the tapered ridge waveguide has a refractive index of 1.6-1.9.
3. The coupling element of claim 2, wherein the tapered ridge waveguide is germanium-doped silica, the spot-size converter comprises a body and the tapered ridge waveguide disposed in the body, and the body is silica.
4. The coupling element according to claim 2, wherein the length of said tapered ridge waveguide is 200-500 μm, the width of said narrow end of said tapered ridge waveguide is 0.5-1.5 μm, and the width of said wide end is 4-5 μm.
5. The coupling element of claim 4, wherein the single mode fiber has a mode field diameter of 6-10 μm.
6. The coupling element of any one of claims 1-5, wherein there are a plurality of said single mode optical fibers, and a corresponding number of said tapered ridge waveguides are provided in said spot-size converter.
7. The coupling element according to any of claims 1 to 5, wherein the space between both the single mode optical fiber, the spot-size converter and the inner wall of the containment tube is filled with an adhesive.
8. A lithium niobate thin film waveguide coupling device comprising a lithium niobate thin film waveguide and the coupling element of any one of claims 1 to 7, the narrow end of the tapered ridge waveguide of the spot size converter being coupled to the lithium niobate thin film waveguide.
9. The coupling device of claim 8, wherein the lithium niobate thin film waveguide is a lithium niobate thin film ridge waveguide, the length of the lithium niobate thin film ridge waveguide is 5000-10000 μm, the width of the widest part is 0.9-1.2 μm, and the height is 0.2-0.5 μm;
the two ends of the lithium niobate thin film ridge waveguide are both in a tapered structure, and the width of the coupling part of the lithium niobate thin film ridge waveguide and the tapered ridge waveguide is 0.4-0.6 mu m;
and/or, both ends of the lithium niobate thin film ridge waveguide are in a tapered structure, the length and the height of the tapered parts at both ends are respectively 300-500 μm and 0.2-0.5 μm in sequence, and the width of the tail end of the tapered part is 0.4-0.6 μm.
10. The coupling device of the lithium niobate thin film waveguide of claim 8 or 9, wherein a silicon dioxide layer is stacked on the bottom of the lithium niobate thin film waveguide, a silicon substrate is stacked on the bottom of the silicon dioxide layer, and the periphery of the lithium niobate thin film waveguide is coated with silicon dioxide.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112630888A (en) * | 2020-12-22 | 2021-04-09 | 光越科技(深圳)有限公司 | Mode field conversion system |
| CN113777711A (en) * | 2021-08-04 | 2021-12-10 | 华中科技大学 | Large-spot horizontal end face coupler based on lithium niobate film |
| CN115061291A (en) * | 2022-07-18 | 2022-09-16 | 中国电子科技集团公司第四十三研究所 | Broadband low-loss electro-optical modulator |
| CN115220158A (en) * | 2022-06-06 | 2022-10-21 | 上海图灵智算量子科技有限公司 | Photoelectric conversion module based on lithium niobate optical chip |
| CN116626923A (en) * | 2023-07-24 | 2023-08-22 | 福建玻尔光电科技有限责任公司 | Waveguide matrix film lithium niobate electro-optic modulator |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112630888A (en) * | 2020-12-22 | 2021-04-09 | 光越科技(深圳)有限公司 | Mode field conversion system |
| CN113777711A (en) * | 2021-08-04 | 2021-12-10 | 华中科技大学 | Large-spot horizontal end face coupler based on lithium niobate film |
| CN113777711B (en) * | 2021-08-04 | 2022-09-16 | 华中科技大学 | Large-mode-spot horizontal end face coupler based on lithium niobate film |
| CN115220158A (en) * | 2022-06-06 | 2022-10-21 | 上海图灵智算量子科技有限公司 | Photoelectric conversion module based on lithium niobate optical chip |
| CN115061291A (en) * | 2022-07-18 | 2022-09-16 | 中国电子科技集团公司第四十三研究所 | Broadband low-loss electro-optical modulator |
| CN116626923A (en) * | 2023-07-24 | 2023-08-22 | 福建玻尔光电科技有限责任公司 | Waveguide matrix film lithium niobate electro-optic modulator |
| CN116626923B (en) * | 2023-07-24 | 2023-10-27 | 福建玻尔光电科技有限责任公司 | Waveguide matrix film lithium niobate electro-optic modulator |
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