CN114815134B - Flat field apochromatic microscope objective lens and optical system - Google Patents
Flat field apochromatic microscope objective lens and optical system Download PDFInfo
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- 230000003287 optical effect Effects 0.000 title claims abstract description 68
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- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 description 1
- 229910001634 calcium fluoride Inorganic materials 0.000 description 1
- 239000006059 cover glass Substances 0.000 description 1
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- 238000005516 engineering process Methods 0.000 description 1
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/001—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras
- G02B13/0055—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras employing a special optical element
- G02B13/006—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras employing a special optical element at least one element being a compound optical element, e.g. cemented elements
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/02—Objectives
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Abstract
The application provides a flat-field apochromatic microscope objective and an optical system, wherein the microscope objective comprises a first lens, a second lens, a third lens, a fourth lens, a fifth lens, a sixth lens, a seventh lens, an eighth lens, a ninth lens and a tenth lens which are sequentially arranged along an optical axis from an image side to an object side, the ninth lens has positive focal power, an image side surface of the ninth lens is a convex surface, the tenth lens has positive focal power, an image side surface of the tenth lens is a spherical surface, the first lens and the second lens are bonded to form a first bonding lens group with positive focal power, the fourth lens and the fifth lens are bonded to form a second bonding lens group with positive focal power, and the seventh lens is bonded to the sixth lens and the seventh lens is bonded to the eighth lens to form a third bonding lens group with positive focal power. The application can realize flat field apochromatic aberration, has stricter flat field constraint and smaller field curvature of the whole field of view, has large field of view and high resolution, and can clearly image the whole field of view at the same time.
Description
Technical Field
The application relates to the technical field of optical imaging, in particular to a flat field apochromatic microscope objective and an optical system.
Background
One of the core techniques for high-throughput gene sequencing is the high-throughput fluorescence microscopy imaging technique. The high-flux fluorescence microscopic imaging technology is to excite a biological sample by using illumination light to generate fluorescence, and separate relatively weak fluorescence signals for microscopic imaging, so as to convert invisible microscopic biological information into visual pictures and data information. The fluorescence microscope objective needs to have higher energy collection capability for fluorescence and higher resolution, so that the flat field apochromatic microscope objective needs to have larger numerical aperture; in order to improve the sequencing flux, the flat field apochromatic microscope objective lens should have a larger imaging field of view. In order to fully utilize the resolving power of a high numerical aperture, the high-performance microscope objective needs to be almost perfectly corrected in aberration, and according to Ma Leika mol criterion (Marechal criterion), when the root mean square wave aberration of the flat field apochromatic microscope objective is better than lambda/14, the performance of the flat field apochromatic microscope objective reaches the diffraction limit, so that the fluorescent microscope objective meets the requirements of a large field of view, a large numerical aperture and the like, and also meets the requirements of the wave aberration reaching the diffraction limit, a higher focal length, distortion, field curvature and other image quality in the whole field of view.
In the process of implementing the present application, the inventor finds that at least the following problems exist in the prior art: the fluorescent microscope objective needed in the ultra-high flux gene sequencer needs to have a large field of view and high resolution, and the optical flux is difficult to improve due to the limited size of the microscope objective, namely, the field of view of the low-magnification microscope objective is large and the numerical aperture is small, the numerical aperture of the high-magnification microscope objective is large and the field of view is small, and for the fluorescent microscope objective, the object side is a high-concentration biochip (a biological information microarray chip is manufactured on the surface of a glass slide or a silicon wafer), and the image side is an image sensor, so that strict requirements are set for a flat field, and the whole field of view needs to be clearly imaged at the same time.
Disclosure of Invention
In view of the foregoing, it is necessary to provide a flat field apochromatic microscope objective lens and an optical system having a large field of view and high resolution to solve the above problems.
The embodiment of the application provides a flat field apochromatic microscope objective lens, which consists of a first lens, a second lens, a third lens, a fourth lens, a fifth lens, a sixth lens, a seventh lens, an eighth lens, a ninth lens and a tenth lens which are sequentially arranged along an optical axis from an image side to an object side, wherein the ninth lens has positive focal power and the image side of the ninth lens is a convex surface, the tenth lens has positive focal power and the image side of the tenth lens is a spherical surface, the first lens has positive focal power, the image side of the first lens is a convex surface, and the object side of the first lens is a plane; the second lens has negative focal power, the image side surface of the second lens is a plane, and the object side surface of the second lens is a concave surface; the third lens has negative focal power, the image side surface of the third lens is a concave surface, and the object side surface of the third lens is a convex surface; the fourth lens is provided with negative focal power, the image side surface of the fourth lens is a plane, and the object side surface of the fourth lens is a concave surface; the fifth lens has positive focal power, the image side surface of the fifth lens is a convex surface, and the object side surface of the fifth lens is a convex surface; the sixth lens is provided with positive focal power, the image side surface of the sixth lens is a convex surface, and the object side surface of the sixth lens is a convex surface; the seventh lens is provided with negative focal power, the image side surface of the seventh lens is a concave surface, and the object side surface of the seventh lens is a concave surface; the eighth lens has positive focal power, the image side surface of the eighth lens is a convex surface, and the object side surface of the eighth lens is a convex surface; the object side surface of the ninth lens is a plane; the object side surface of the first lens and the image side surface of the second lens are glued to form a first gluing lens group with positive focal power, the object side surface of the fourth lens and the image side surface of the fifth lens are glued to form a second gluing lens group with positive focal power, the image side surface of the seventh lens is glued to the object side surface of the sixth lens, and the object side surface of the seventh lens is glued to the image side surface of the eighth lens to form a third gluing lens group with positive focal power;
The flat field apochromatic microscope objective lens meets the following conditional expression:
6.8 < fG2/fobj < 8.1, wherein fG2 is the effective focal length of the second cemented lens group, and fobj is the effective focal length of the flat field apochromatic microscope objective lens;
and 4.5 < fG3/fobj < 5, wherein fG3 is the effective focal length of the third cemented lens group.
In some embodiments, the flat field apochromatic microscope objective satisfies the following conditional expression:
0.057＜dL1/L＜0.087；
0.057＜dL2/L＜0.085；
dL1 is the distance from the object side surface of the first lens to the image side surface of the first lens in the optical axis direction, dL2 is the distance from the object side surface of the second lens to the image side surface of the second lens in the optical axis direction, and L is the total length of the planofield apochromatic microscope objective lens.
In some embodiments, the flat field apochromatic microscope objective satisfies the following conditional expression:
0.074＜dL3/L＜0.107；
wherein dL3 is the distance from the object side surface of the third lens to the image side surface of the third lens in the optical axis direction, and L is the total length of the flat-field apochromatic microscope objective lens;
0.052＜dL4/L＜0.090；
0.057＜dL5/L＜0.107；
Where dL4 is a distance from the object side surface of the fourth lens element to the image side surface of the fourth lens element in the optical axis direction, and dL5 is a distance from the object side surface of the fifth lens element to the image side surface of the fifth lens element in the optical axis direction.
In some embodiments, the flat field apochromatic microscope objective satisfies the following conditional expression:
0.082＜dL6/L＜0.123；
0.025＜dL7/L＜0.049；
0.082＜dL8/L＜0.118；
Where dL6 is a distance from the object side surface of the sixth lens to the image side surface of the sixth lens in the optical axis direction, dL7 is a distance from the object side surface of the seventh lens to the image side surface of the seventh lens in the optical axis direction, dL8 is a distance from the object side surface of the eighth lens to the image side surface of the eighth lens in the optical axis direction, and L is a total length of the plano-field apochromatic microscope objective lens.
In some embodiments, the flat field apochromatic microscope objective satisfies the following conditional expression:
0.082＜dL9/L＜0.108；
Where dL9 is a distance from an object side surface of the ninth lens to an image side surface of the ninth lens in an optical axis direction, and L is a total length of the flat field apochromatic microscope objective lens.
DL10/L is more than 0.164 and less than 0.184; dL10 is a distance from the object side surface of the tenth lens to the image side surface of the tenth lens in the optical axis direction.
In some embodiments, the flat field apochromatic microscope objective satisfies the following conditional expression:
-3.2＜fL3/fobj＜-2.8；
Wherein fL3 is the effective focal length of the third lens;
2.9 < fL9/fobj < 3.4, fL9 being the effective focal length of the ninth lens;
0.63 < RL10/fobj < 0.75, RL10 being the radius of curvature of the image side of the tenth lens.
In some embodiments, the fourth lens is a flint glass lens and the fifth lens is a dispersive glass lens; the sixth lens is a crown glass lens, the seventh lens is a flint glass lens, and the eighth lens is a crown glass lens.
The optical system of the flat-field apochromatic microscope objective can realize flat-field apochromatic, the imaging quality can reach diffraction limit, the optical system has stricter flat-field constraint, the field curvature of the whole field is smaller, and the optical system has large field and high resolution and can clearly image the whole field at the same time.
The embodiment of the application also provides a flat field apochromatic microscope objective optical system, which comprises the flat field apochromatic microscope objective, wherein the working wave band of the flat field apochromatic microscope objective optical system is 550-800 nm, and the field curvature of the full field is not more than 100nm.
Drawings
Fig. 1 is a schematic view of the structure and the optical path of a flat field apochromatic microscope objective lens according to an embodiment of the present application.
Fig. 2 is a schematic diagram of the field curvature of a flat field apochromatic microscope objective lens according to an embodiment of the present application.
Fig. 3 is a schematic diagram of the relative distortion of a flat field apochromatic microscope objective lens of an embodiment of the present application.
Fig. 4 is a schematic diagram of the optical transfer function of a flat field apochromatic microscope objective lens according to an embodiment of the present application.
Fig. 5 is an axial chromatic aberration schematic diagram of a flat field apochromatic microscope objective lens of an embodiment of the application.
Fig. 6 is a schematic wave aberration diagram of a flat field apochromatic microscope objective lens according to an embodiment of the present application.
Description of the main reference signs
Flat field apochromatic display 10
Micro objective lens
First lens L1
Second lens L2
Third lens L3
Fourth lens L4
Fifth lens L5
Sixth lens L6
Seventh lens L7
Eighth lens L8
Ninth lens L9
Tenth lens L10
First cemented lens group G1
Second cemented lens group G2
Third cemented lens group G3
Stop STO
Image sides S1, S2, S4, S6, S7, S9, S10, S11, S13, S15
Object side surfaces S3, S5, S8, S12, S13, S14, S16
Detailed Description
The present application will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present application more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the application. All other embodiments, which can be made by those skilled in the art based on the embodiments of the application without making any inventive effort, are intended to be within the scope of the application.
In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present application. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more of the described features. In the description of the present application, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.
In the description of the present application, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically connected, electrically connected or can be communicated with each other; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art according to the specific circumstances.
In the present application, unless expressly stated or limited otherwise, a first feature "above" or "below" a second feature may include both the first and second features being in direct contact, as well as the first and second features not being in direct contact but being in contact with each other through additional features therebetween. Moreover, a first feature being "above," "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is less level than the second feature.
The following disclosure provides many different embodiments, or examples, for implementing different features of the application. In order to simplify the present disclosure, components and arrangements of specific examples are described below. They are, of course, merely examples and are not intended to limit the application. Furthermore, the present application may repeat reference numerals and/or letters in the various examples, which are for the purpose of brevity and clarity, and which do not themselves indicate the relationship between the various embodiments and/or arrangements discussed. In addition, the present application provides examples of various specific processes and materials, but one of ordinary skill in the art will recognize the application of other processes and/or the use of other materials.
Referring to fig. 1, a flat field apochromatic microscope objective lens 10 provided in an embodiment of the application includes, in order along an optical axis from an image side to an object side, a first lens L1, a second lens L2, a third lens L3, a fourth lens L4, a fifth lens L5, a stop STO, a sixth lens L6, a seventh lens L7, an eighth lens L8, a ninth lens L9, and a tenth lens L10. The first lens L1 to the tenth lens L10 together constitute a fluorescent microscope objective lens 10 having a broad spectrum and a large numerical aperture, and which can be flat-field apochromatic.
The field of view of the imaging line of the flat field apochromatic microscope objective 10 can be increased to 1.25mm under the condition that the numerical aperture is 0.75; under the condition of 550-800nm of working wave band, the design of flat field apochromatic aberration can be realized more strictly, and the field curvature of the full field is not more than 100nm. It will be appreciated that, in order to obtain the above-described effects, a person skilled in the art will be able to make suitable modifications or improvements to the above-described plano-apochromatic microscope objective lens 10, for example, to add other optical devices such as lenses, or to adjust the optical parameters of the individual lenses appropriately, without departing from the spirit of the invention.
Specifically, the first lens L1 has positive optical power, the image side surface S1 of the first lens L1 is convex, and the object side surface of the first lens L1 is a plane.
The second lens element L2 has negative refractive power, the image-side surface S2 of the second lens element L2 is a plane, the object-side surface S3 of the second lens element L2 is a concave surface, and the object-side surface of the first lens element L1 and the image-side surface S2 of the second lens element L2 are cemented together to form a first cemented lens group G1 with positive refractive power.
In this embodiment, the object side surface of the first lens element L1 and the image side surface S2 of the second lens element L2 are glued together, i.e. the first lens element L1 and the second lens element L2 share a plane, S2 is the image side surface of the second lens element L2 and is also the object side surface of the first lens element L1, and for convenience of reference, only the image side surface of the second lens element L2 is denoted by S2, and the same will not be described in detail.
The third lens element L3 has negative refractive power, wherein an image-side surface S4 of the third lens element L3 is concave, and an object-side surface S5 of the third lens element L3 is convex, i.e., the third lens element L3 has a substantially meniscus shape.
The fourth lens element L4 has negative refractive power, wherein an image-side surface S6 of the fourth lens element L4 is planar, and an object-side surface of the fourth lens element L4 is concave, i.e., the fourth lens element L4 has a substantially meniscus shape. In the present embodiment, the material of the fourth lens L4 is flint glass.
The fifth lens element L5 has positive refractive power, the image-side surface S7 of the fifth lens element L5 is convex, the object-side surface S8 of the fifth lens element L5 is convex, and the object-side surface of the fourth lens element L4 and the image-side surface S7 of the fifth lens element L5 are cemented together to form a second cemented lens group G2 with positive refractive power. In this embodiment, the material of the fifth lens L5 is a special dispersion glass, such as calcium fluoride.
The sixth lens element L6 has positive refractive power, wherein an image-side surface S9 of the sixth lens element L6 is convex, and an object-side surface of the sixth lens element L6 is convex. In this embodiment, the sixth lens L6 is made of crown glass.
The seventh lens element L7 has negative refractive power, wherein an image-side surface S10 of the seventh lens element L7 is concave, and an object-side surface of the seventh lens element L7 is concave. In the present embodiment, the material of the seventh lens L7 is flint glass.
The eighth lens element L8 has positive refractive power, the image-side surface S11 of the eighth lens element L8 is convex, the object-side surface S12 of the eighth lens element L8 is convex, and the object-side surface of the sixth lens element L6 is cemented with the image-side surface S10 of the seventh lens element L7, the object-side surface of the seventh lens element L7 and the image-side surface S11 of the eighth lens element L8 to form a third cemented lens group G3 with positive refractive power. In this embodiment, the eighth lens L8 is made of crown glass.
The ninth lens element L9 has positive refractive power, wherein an image-side surface S13 of the ninth lens element L9 is convex, and an object-side surface S14 of the ninth lens element L9 is planar.
The tenth lens element L10 has positive refractive power, the image-side surface S15 of the tenth lens element L10 is spherical, and the object-side surface S16 of the tenth lens element L10 is concave at a paraxial region, so that spherical aberration and coma aberration can be effectively reduced, and a flat field effect can be generated.
The ninth lens L9 and the tenth lens L10 are close to the sample, and can bear large-angle deflection of light rays, so that spherical aberration and coma aberration can be effectively reduced. The second cemented lens group G2 and the third cemented lens group G3 use a dispersion material with an abnormal layout to correct spherical aberration, coma aberration and chromatic aberration of the flat field apochromatic microscope objective lens 10. The first cemented lens group G1 and the third lens L3 are positioned at the rear of the stop STO for correcting curvature of field, aberration, and chromatic aberration.
In some embodiments, the flat field apochromatic microscope objective lens 10 satisfies the following conditional expression:
0.057＜dL1/L＜0.087；
Where dL1 is a distance from the object side surface S1 of the first lens L1 to the image side surface of the first lens L1 in the optical axis direction, and L is the total length of the flat field apochromatic microscope objective lens 10. Thus, by reasonably matching the relation between the first lens L1 and the total optical length, the miniaturization and the weight reduction of the flat field apochromatic microscope objective lens 10 are facilitated.
In some embodiments, the flat field apochromatic microscope objective lens 10 satisfies the following conditional expression:
0.057＜dL2/L＜0.085；
Where dL2 is the distance between the object side surface S2 of the second lens L2 and the image side surface S3 of the second lens L2 in the optical axis direction, and L is the total length of the flat field apochromatic microscope objective lens 10. Thus, by reasonably matching the relationship between the second lens L2 and the total optical length, the miniaturization and the weight reduction of the flat field apochromatic microscope objective lens 10 are facilitated.
In some embodiments, the flat field apochromatic microscope objective lens 10 satisfies the following conditional expression:
0.074＜dL3/L＜0.107；
Where dL3 is a distance between the object side surface S4 of the third lens L3 and the image side surface S5 of the third lens L3 in the optical axis direction, and L is the total length of the flat field apochromatic microscope objective lens 10. Thus, by reasonably matching the relationship between the third lens L3 and the total optical length, the reduction in size and weight of the field apochromatic microscope objective lens 10 is facilitated.
In some embodiments, the flat field apochromatic microscope objective lens 10 satisfies the following conditional expression:
0.052＜dL4/L＜0.090；
Where dL4 is a distance between the object side surface S6 of the fourth lens L4 and the image side surface of the fourth lens L4 in the optical axis direction, and L is the total length of the flat field apochromatic microscope objective lens 10. Thus, by reasonably matching the relation between the fourth lens L4 and the total optical length, the reduction in size and weight of the flat field apochromatic microscope objective lens 10 is facilitated.
In some embodiments, the flat field apochromatic microscope objective lens 10 satisfies the following conditional expression:
0.057＜dL5/L＜0.107；
Where dL5 is a distance between the object side surface S7 of the fifth lens L5 and the image side surface S8 of the fifth lens L5 in the optical axis direction, and L is the total length of the flat field apochromatic microscope objective lens 10. Thus, by reasonably matching the relation between the fifth lens L5 and the total optical length, the miniaturization and the weight reduction of the flat field apochromatic microscope objective lens 10 are facilitated.
In some embodiments, the flat field apochromatic microscope objective lens 10 satisfies the following conditional expression:
0.082＜dL6/L＜0.123；
where dL6 is a distance between the object side surface S9 of the sixth lens L6 and the image side surface of the sixth lens L6 in the optical axis direction, and L is the total length of the flat field apochromatic microscope objective lens 10. Thus, by reasonably matching the relationship between the sixth lens L6 and the total optical length, the reduction in size and weight of the field apochromatic microscope objective lens 10 is facilitated.
In some embodiments, the flat field apochromatic microscope objective lens 10 satisfies the following conditional expression:
0.025＜dL7/L＜0.049；
Where dL7 is a distance between the object side surface S10 of the seventh lens L7 and the image side surface of the seventh lens L7 in the optical axis direction, and L is the total length of the flat field apochromatic microscope objective lens 10. Thus, by reasonably matching the relation between the seventh lens L7 and the total optical length, the reduction in size and weight of the flat field apochromatic microscope objective lens 10 is facilitated.
In some embodiments, the flat field apochromatic microscope objective lens 10 satisfies the following conditional expression:
0.082＜dL8/L＜0.118；
Where dL8 is a distance between the object side surface S11 of the eighth lens L8 and the image side surface S12 of the eighth lens L8 in the optical axis direction, and L is the total length of the flat field apochromatic microscope objective lens 10. Thus, by reasonably matching the relationship between the eighth lens L8 and the total optical length, the miniaturization and the weight reduction of the flat field apochromatic microscope objective lens 10 are facilitated.
In some embodiments, the flat field apochromatic microscope objective lens 10 satisfies the following conditional expression:
0.082＜dL9/L＜0.108；
where dL9 is a distance between the object side surface S13 of the ninth lens L9 and the image side surface S14 of the ninth lens L9 in the optical axis direction, and L is the total length of the flat field apochromatic microscope objective lens 10. Thus, by reasonably matching the relationship between the ninth lens L9 and the total optical length, the reduction in size and weight of the flat field apochromatic microscope objective lens 10 is facilitated.
In some embodiments, the flat field apochromatic microscope objective lens 10 satisfies the following conditional expression:
0.164＜dL10/L＜0.184；
where dL10 is a distance between the object side surface S15 of the tenth lens L10 and the image side surface S16 of the tenth lens L10 in the optical axis direction, and L is the total length of the flat field apochromatic microscope objective lens 10. Thus, by reasonably matching the relationship between the tenth lens L10 and the total optical length, the reduction in size and weight of the field apochromatic microscope objective lens 10 is facilitated.
In some embodiments, the flat field apochromatic microscope objective lens 10 satisfies the following conditional expression:
-3.2＜fL3/fobj＜-2.8；
Where fL3 is the effective focal length of the third lens L3 and fobj is the effective focal length of the flat-field apochromatic microscope objective lens 10. Therefore, the correction of the edge aberration is facilitated, and the imaging resolution is improved.
In some embodiments, the flat field apochromatic microscope objective lens 10 satisfies the following conditional expression:
6.8＜fG2/fobj＜8.1；
Where fG2 is the effective focal length of the second cemented lens group G2 and fobj is the effective focal length of the f-apochromatic microscope objective lens 10. Thus, by reasonably controlling the focal power distribution of the fourth lens L4 and the fifth lens L5, on one hand, the incident light height of the light beam emitted out of the flat-field apochromatic microscope objective lens 10 is favorably controlled, so that the advanced aberration of the flat-field apochromatic microscope objective lens 10 and the outer diameter of the lens are reduced, and on the other hand, the influence of field curvature generated by the front lens group on the resolution can be corrected.
In some embodiments, the flat field apochromatic microscope objective lens 10 satisfies the following conditional expression:
4.5＜fG3/fobj＜5；
Where fG3 is the effective focal length of the third cemented lens group G3 and fobj is the effective focal length of the f-apochromatic microscope objective lens 10. Thus, by reasonably controlling the focal power distribution of the sixth lens L6, the seventh lens L7 and the eighth lens L8, on one hand, the incident light height of the light beam emitted out of the flat-field apochromatic microscope objective lens 10 is favorably controlled, so that the advanced aberration of the flat-field apochromatic microscope objective lens 10 and the outer diameter of the lens are reduced, and on the other hand, the influence of field curvature generated by the front lens group on the resolution can be corrected.
In some embodiments, the flat field apochromatic microscope objective lens 10 satisfies the following conditional expression:
2.9＜fL9/fobj＜3.4；
Where fL9 is the effective focal length of the ninth lens L9 and fobj is the effective focal length of the flat-field apochromatic microscope objective lens 10. Therefore, the correction of the edge aberration is facilitated, and the imaging resolution is improved.
In some embodiments, the flat field apochromatic microscope objective lens 10 satisfies the following conditional expression:
0.63＜RL10/fobj＜0.75；
Where RL10/fobj is the radius of curvature of the image side surface S15 of the tenth lens L10, and fobj is the effective focal length of the flat field apochromatic microscope objective lens 10.
Further, the above-mentioned flat field apochromatic microscope objective lens 10 further includes a plate glass (not shown) located on the object side of the 10 th lens, whose image side is S17 and object side is S18.
Referring to table 1, table 1 shows the performance parameters of the flat field apochromatic microscope objective lens 10.
TABLE 1
| Operating band | Numerical aperture | Object field of view | Multiplying power | Working distance |
| 550nm-800nm | 0.75 | Line field of view 1.25mm | 20 | 0.677(mm) |
Referring to table 2, the specific parameters of the flat field apochromatic microscope objective lens 10 in this example are as follows, and the units of Y radius, spacing, thickness and half caliber are all millimeters (mm).
TABLE 2
FIG. 2 is a schematic diagram of the field curvature of a flat field apochromatic microscope objective lens 10 according to an embodiment of the present application, with the abscissas being defocus in micrometers (μm); the ordinate is the object field angle in degrees, as can be taken from fig. 2: the field curvature of the flat field apochromatic microscope objective lens 10 under the full field is less than 100nm.
Fig. 3 is a schematic diagram of the relative distortion of the flat field apochromatic microscope objective lens 10 according to the embodiment of the present application, the abscissa is the relative distortion, and the unit is; the ordinate is the object field angle, as can be taken from fig. 3: the maximum distortion of the flat field apochromatic microscope objective lens 10 is within 1 percent.
Fig. 4 is a graph of an optical transfer function of the flat-field apochromatic microscope objective 10 according to the embodiment of the present application, the cut-off frequency is 2700cycles/mm, and the diffraction limit of the flat-field apochromatic microscope objective indicated by TSDIF LIMIT in the graph is as follows from fig. 4, and MTF curves in the meridian direction and the sagittal direction of each field of view are close to the diffraction limit.
Fig. 5 is a schematic diagram of axial chromatic aberration of the flat field apochromatic microscope objective lens 10 according to the embodiment of the application, the ordinate is the normalized entrance pupil diameter, and the abscissa is the chromatic aberration, so that it can be seen that the axial chromatic aberration of the flat field apochromatic microscope objective lens 10 is well corrected. Band 712nm and band 561nm have an axial chromatic aberration ΔL λ712λ561 equal to 50nm at 0.707; the axial chromatic aberration DeltaL λ712λ633 of the wave band 712nm and the wave band 633nm at 0.707 is equal to 70nm; band 561nm and band 633nm have an axial chromatic aberration ΔL λ561λ633 equal to 110nm at 0.707. According to the focal depth delta formula:
lambda is the central wavelength of 633nm, NA is the numerical aperture of the flat-field apochromatic microscope objective lens 10, M is the total multiplying power of 20, e is the minimum resolution distance of the image plane detector of 600nm, n is the medium refractive index of 1 between the cover glass and the objective lens, and thus the focal depth of the flat-field apochromatic microscope objective lens 10 can be found to be 1.16 μm. The maximum value of the positional chromatic aberration between three wave bands of 0.707 band under the full aperture is 110nm, which is about 1/10 of the focal depth of the flat field apochromatic microscope objective lens 10, and can meet the apochromatic requirement.
Fig. 6 is a schematic wave aberration diagram of a flat field apochromatic microscope objective lens 10 according to an embodiment of the present application, the ordinate is the object field angle, the unit is the degree (deg), and the maximum value is 3.6 °; the abscissa is the RMS wave aberration value in wavelength λ, wave aberration of the entire field of view in the full spectrum is 0.02λ -0.05λ (λ=633 nm).
The embodiment of the application also provides a flat field apochromatic microscope objective optical system, which comprises the flat field apochromatic microscope objective 10, wherein the working wave band of the flat field apochromatic microscope objective optical system is 550-800 nm, and the field curvature of the full field is not more than 100nm.
The flat field apochromatic microscope objective lens 10 and the optical system can realize flat field apochromatic, the imaging quality can reach diffraction limit, the flat field restraint is stricter, the field curvature of the whole field is smaller, the large field and the high resolution are provided, and the whole field can be imaged clearly at the same time.
It will be evident to those skilled in the art that the application is not limited to the details of the foregoing illustrative embodiments, and that the present application may be embodied in other specific forms without departing from the spirit or essential characteristics thereof. The present embodiments are, therefore, to be considered in all respects as illustrative and not restrictive, the scope of the application being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein.
Finally, it should be noted that the above-mentioned embodiments are merely for illustrating the technical solution of the present application and not for limiting the same, and although the present application has been described in detail with reference to the preferred embodiments, it should be understood by those skilled in the art that modifications and equivalents may be made to the technical solution of the present application without departing from the spirit and scope of the technical solution of the present application.
Claims (8)
1. A flat-field apochromatic microscope objective lens, which consists of a first lens, a second lens, a third lens, a fourth lens, a fifth lens, a sixth lens, a seventh lens, an eighth lens, a ninth lens and a tenth lens which are sequentially arranged along an optical axis from an image side to an object side, wherein the ninth lens has positive focal power and the image side surface is a convex surface, the tenth lens has positive focal power and the image side surface is a spherical surface,
The first lens has positive focal power, the image side surface of the first lens is a convex surface, and the object side surface of the first lens is a plane; the second lens has negative focal power, the image side surface of the second lens is a plane, and the object side surface of the second lens is a concave surface; the third lens has negative focal power, the image side surface of the third lens is a concave surface, and the object side surface of the third lens is a convex surface; the fourth lens is provided with negative focal power, the image side surface of the fourth lens is a plane, and the object side surface of the fourth lens is a concave surface; the fifth lens has positive focal power, the image side surface of the fifth lens is a convex surface, and the object side surface of the fifth lens is a convex surface; the sixth lens is provided with positive focal power, the image side surface of the sixth lens is a convex surface, and the object side surface of the sixth lens is a convex surface; the seventh lens is provided with negative focal power, the image side surface of the seventh lens is a concave surface, and the object side surface of the seventh lens is a concave surface; the eighth lens has positive focal power, the image side surface of the eighth lens is a convex surface, and the object side surface of the eighth lens is a convex surface; the object side surface of the ninth lens is a plane;
the object side surface of the first lens and the image side surface of the second lens are cemented to form a first cemented lens group having positive optical power,
The object side surface of the fourth lens and the image side surface of the fifth lens are cemented to form a second cemented lens group having positive optical power,
An image side surface of the seventh lens is cemented with an object side surface of the sixth lens, and an object side surface of the seventh lens is cemented with an image side surface of the eighth lens to form a third cemented lens group having positive optical power;
The flat field apochromatic microscope objective lens meets the following conditional expression:
6.8 < fG2/fobj < 8.1, wherein fG2 is the effective focal length of the second cemented lens group, and fobj is the effective focal length of the flat field apochromatic microscope objective lens;
and 4.5 < fG3/fobj < 5, wherein fG3 is the effective focal length of the third cemented lens group.
2. The flat field apochromatic microscope objective of claim 1, wherein the flat field apochromatic microscope objective satisfies the following conditional expression:
0.057＜dL1/L＜0.087；
0.057＜dL2/L＜0.085；
dL1 is the distance from the object side surface of the first lens to the image side surface of the first lens in the optical axis direction, dL2 is the distance from the object side surface of the second lens to the image side surface of the second lens in the optical axis direction, and L is the total length of the planofield apochromatic microscope objective lens.
3. The flat field apochromatic microscope objective of claim 1, wherein the flat field apochromatic microscope objective satisfies the following conditional expression:
0.074＜dL3/L＜0.107；
wherein dL3 is the distance from the object side surface of the third lens to the image side surface of the third lens in the optical axis direction, and L is the total length of the flat-field apochromatic microscope objective lens;
0.052＜dL4/L＜0.090；
0.057＜dL5/L＜0.107；
Where dL4 is a distance from the object side surface of the fourth lens element to the image side surface of the fourth lens element in the optical axis direction, and dL5 is a distance from the object side surface of the fifth lens element to the image side surface of the fifth lens element in the optical axis direction.
4. The flat field apochromatic microscope objective of claim 1, wherein the flat field apochromatic microscope objective satisfies the following conditional expression:
0.082＜dL6/L＜0.123；
0.025＜dL7/L＜0.049；
0.082＜dL8/L＜0.118；
Where dL6 is a distance from the object side surface of the sixth lens to the image side surface of the sixth lens in the optical axis direction, dL7 is a distance from the object side surface of the seventh lens to the image side surface of the seventh lens in the optical axis direction, dL8 is a distance from the object side surface of the eighth lens to the image side surface of the eighth lens in the optical axis direction, and L is a total length of the plano-field apochromatic microscope objective lens.
5. The flat field apochromatic microscope objective of claim 1, wherein the flat field apochromatic microscope objective satisfies the following conditional expression:
0.082＜dL9/L＜0.108；
dL9 is the distance from the object side surface of the ninth lens to the image side surface of the ninth lens in the optical axis direction, and L is the total length of the flat-field apochromatic microscope objective lens;
0.164 < dL10/L < 0.184, dL10 being the distance between the object side surface of the tenth lens element and the image side surface of the tenth lens element in the direction of the optical axis.
6. The flat field apochromatic microscope objective of claim 1, wherein the flat field apochromatic microscope objective satisfies the following conditional expression:
-3.2＜fL3/fobj＜-2.8；
Wherein fL3 is the effective focal length of the third lens;
2.9 < fL9/fobj < 3.4, fL9 being the effective focal length of the ninth lens;
0.63 < RL10/fobj < 0.75, RL10 being the radius of curvature of the image side of the tenth lens.
7. The flat field apochromatic microscope objective of any one of claims 1-6, wherein the fourth lens is a flint glass lens and the fifth lens is a dispersive glass lens; the sixth lens is a crown glass lens, the seventh lens is a flint glass lens, and the eighth lens is a crown glass lens.
8. A flat-field apochromatic microscope objective optical system, characterized by comprising a flat-field apochromatic microscope objective according to any one of claims 1-7, the working band of which is 550nm-800nm, and the field curvature of the full field is not more than 100nm.
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| CN116909007B (en) * | 2023-09-13 | 2023-11-28 | 长春长光智欧科技有限公司 | Large-view-field flat-field apochromatic microscope objective lens |
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| CN117608068B (en) * | 2024-01-23 | 2024-04-30 | 茂莱（南京）仪器有限公司 | 10-Time NA large-view-field flat-field apochromatic microscope objective lens |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07287169A (en) * | 1994-04-19 | 1995-10-31 | Olympus Optical Co Ltd | Microscope objective |
| US5729391A (en) * | 1996-02-15 | 1998-03-17 | Nikon Corporation | Microscope objective lens |
| JP2006259548A (en) * | 2005-03-18 | 2006-09-28 | Olympus Corp | Microscope objective lens |
| JP2010197536A (en) * | 2009-02-24 | 2010-09-09 | Nikon Corp | Microscope objective lens |
| CN107505696A (en) * | 2017-09-15 | 2017-12-22 | 中国科学院长春光学精密机械与物理研究所 | Flat field apochromatic micro objective |
| CN108957718A (en) * | 2017-05-27 | 2018-12-07 | 南京理工大学 | A kind of wide spectrum flat field apochromatic micro objective |
-
2021
- 2021-01-20 CN CN202110076205.8A patent/CN114815134B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07287169A (en) * | 1994-04-19 | 1995-10-31 | Olympus Optical Co Ltd | Microscope objective |
| US5729391A (en) * | 1996-02-15 | 1998-03-17 | Nikon Corporation | Microscope objective lens |
| JP2006259548A (en) * | 2005-03-18 | 2006-09-28 | Olympus Corp | Microscope objective lens |
| JP2010197536A (en) * | 2009-02-24 | 2010-09-09 | Nikon Corp | Microscope objective lens |
| CN108957718A (en) * | 2017-05-27 | 2018-12-07 | 南京理工大学 | A kind of wide spectrum flat field apochromatic micro objective |
| CN107505696A (en) * | 2017-09-15 | 2017-12-22 | 中国科学院长春光学精密机械与物理研究所 | Flat field apochromatic micro objective |
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