CN114815134A - Achromatic microscope objective and optical system - Google Patents
Achromatic microscope objective and optical system Download PDFInfo
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- CN114815134A CN114815134A CN202110076205.8A CN202110076205A CN114815134A CN 114815134 A CN114815134 A CN 114815134A CN 202110076205 A CN202110076205 A CN 202110076205A CN 114815134 A CN114815134 A CN 114815134A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/001—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras
- G02B13/0055—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras employing a special optical element
- G02B13/006—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras employing a special optical element at least one element being a compound optical element, e.g. cemented elements
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
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- G—PHYSICS
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/02—Objectives
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Abstract
The application provides a flat field apochromatic microobjective and an optical system, wherein the microobjective comprises a first lens, a second lens, a third lens, a fourth lens, a fifth lens, a sixth lens, a seventh lens, an eighth lens, a ninth lens and a tenth lens which are sequentially arranged from an image side to an object side along an optical axis, the ninth lens has positive focal power, an image side surface of the ninth lens is a convex surface, the tenth lens has positive focal power, the image side surface of the tenth lens is a spherical surface, the first lens and the second lens are glued to form a first cemented lens group with positive focal power, the fourth lens and the fifth lens are glued to form a second cemented lens group with positive focal power, the seventh lens and the sixth lens are glued, and the seventh lens and the eighth lens are glued to form a third cemented lens group with positive focal power. The full-field image capture device can achieve apochromatic flat field, has strict flat field constraint, has small field curvature of a full field, and can clearly image the full field at the same moment when having large field and high resolution.
Description
Technical Field
The application relates to the technical field of optical imaging, in particular to a flat field apochromatic microscope objective and an optical system.
Background
One of the core technologies for high-throughput gene sequencing is the high-throughput fluorescence microscopy imaging technology. The high-flux fluorescence microscopic imaging technology is characterized in that a biological sample is excited by illumination light to generate fluorescence, relatively weak fluorescence signals are separated to be used for microscopic imaging, and invisible microscopic biological information is converted into visual pictures and data information. The fluorescence microscope objective needs to have higher energy collection capability and higher resolution, so the flat field apochromatic microscope objective needs to have larger numerical aperture; to improve sequencing throughput, the field-flattened apochromatic microscope objective should have a larger imaging field of view. In order to fully utilize the resolving power of a high numerical aperture, the high-performance microscope objective needs to obtain almost perfect correction of aberration, and according to the Marechal criterion, when the root mean square wave aberration of the flat-field apochromatic microscope objective is better than lambda/14, the performance of the flat-field apochromatic microscope objective reaches the diffraction limit, so that the fluorescent microscope objective meets the requirements of large field of view, large numerical aperture and the like, and simultaneously meets the requirements of image quality such as high focal length, distortion, field curvature and the like when the wave aberration reaches the diffraction limit in the full field of view.
In the process of implementing the present application, the inventor finds that at least the following problems exist in the prior art: the fluorescence microscope objective needed in the ultrahigh-flux gene sequencer needs to have a large field of view and high resolution, and the size of the microscope objective is limited, so that the optical flux is difficult to improve, namely, the low-magnification microscope objective has a large field of view and a small numerical aperture, the high-magnification microscope objective has a large numerical aperture and a small field of view, and for the fluorescence microscope objective, an object side is a high-density biochip (a biological information microarray chip is manufactured on the surface of a slide or a silicon wafer), and an image side is an image sensor, so that strict requirements on flat fields are provided, and clear imaging of the full field of view is needed at the same time.
Disclosure of Invention
In view of the above, it is necessary to provide a flat field apochromatic microscope objective lens and an optical system having a large field of view and a high resolution to solve the above problems.
Embodiments of the present application provide a field apochromatic microscope objective lens, which includes a first lens, a second lens, a third lens, a fourth lens, a fifth lens, a sixth lens, a seventh lens, an eighth lens, a ninth lens, and a tenth lens arranged in order from an image side to an object side along an optical axis, the ninth lens has positive focal power and the image side surface of the ninth lens is a convex surface, the tenth lens has positive focal power and the image side surface of the tenth lens is a spherical surface, the object side surface of the first lens and the image side surface of the second lens are cemented to form a first cemented lens group with positive focal power, the object side surface of the fourth lens and the image side surface of the fifth lens are cemented to form a second cemented lens group with positive focal power, the image side surface of the seventh lens is cemented with the object side surface of the sixth lens, and the object side surface of the seventh lens is cemented with the image side surface of the eighth lens to form a third cemented lens group with positive optical power.
In some embodiments, the first lens has positive optical power, the image-side surface of the first lens is convex, and the object-side surface of the first lens is planar;
the second lens has negative focal power, the image side surface of the second lens is a plane, and the object side surface of the second lens is a concave surface;
the third lens has negative focal power, the image side surface of the third lens is a concave surface, and the object side surface of the third lens is a convex surface;
the fourth lens has negative focal power, the image side surface of the fourth lens is a plane, and the object side surface of the fourth lens is a concave surface;
the fifth lens has positive focal power, the image side surface of the fifth lens is a convex surface, and the object side surface of the fifth lens is a convex surface;
the sixth lens has positive focal power, the image side surface of the sixth lens is a convex surface, and the object side surface of the sixth lens is a convex surface;
the seventh lens has negative focal power, the image side surface of the seventh lens is a concave surface, and the object side surface of the seventh lens is a concave surface;
the eighth lens has positive focal power, the image side surface of the eighth lens is a convex surface, and the object side surface of the eighth lens is a convex surface;
the object side surface of the ninth lens is a plane.
In some embodiments, the apochromatic microscope objective satisfies the following conditional expression:
0.057＜dL1/L＜0.087；
0.057＜dL2/L＜0.085；
dL1 is the distance in the optical axis direction from the object-side surface of the first lens to the image-side surface of the first lens, dL2 is the distance in the optical axis direction from the object-side surface of the second lens to the image-side surface of the second lens, and L is the total length of the apochromatic field microscope objective.
In some embodiments, the apochromatic microscope objective satisfies the following conditional expression:
0.074＜dL3/L＜0.107；
dL3 is the distance from the object-side surface of the third lens to the image-side surface of the third lens in the optical axis direction, and L is the total length of the flat field apochromatic microscope objective;
preferably, 0.052 < dL4/L < 0.090;
0.057＜dL5/L＜0.107；
dL4 is the distance in the optical axis direction between the object-side surface of the fourth lens element and the image-side surface of the fourth lens element, and dL5 is the distance in the optical axis direction between the object-side surface of the fifth lens element and the image-side surface of the fifth lens element.
In some embodiments, the apochromatic microscope objective satisfies the following conditional expression:
0.082＜dL6/L＜0.123；
0.025＜dL7/L＜0.049；
0.082＜dL8/L＜0.118；
dL6 is the distance in the optical axis direction from the object-side surface of the sixth lens to the image-side surface of the sixth lens, dL7 is the distance in the optical axis direction from the object-side surface of the seventh lens to the image-side surface of the seventh lens, dL8 is the distance in the optical axis direction from the object-side surface of the eighth lens to the image-side surface of the eighth lens, and L is the total length of the aplanatic microscope objective lens.
In some embodiments, the apochromatic microscope objective satisfies the following conditional expression:
0.082＜dL9/L＜0.108；
dL9 is the distance between the object-side surface of the ninth lens and the image-side surface of the ninth lens in the optical axis direction, and L is the total length of the field apochromatic microscope objective.
Preferably, 0.164 < dL10/L < 0.184; dL10 is the distance in the optical axis direction between the object-side surface of the tenth lens and the image-side surface of the tenth lens.
In some embodiments, the apochromatic microscope objective satisfies the following conditional expression:
44.1＜fG1/fobj＜45.5；
wherein fG1 is the effective focal length of the first cemented lens group, and fobj is the effective focal length of the apochromatic microscope objective lens;
preferably, 6.8 < fG2/fobj < 8.1; fG2 is the effective focal length of the second cemented lens group.
In some embodiments, the apochromatic microscope objective satisfies the following conditional expression:
-3.2＜fL3/fobj＜-2.8；
wherein, fL3 is the effective focal length of the third lens, and fobj is the effective focal length of the optical system of the apochromatic microscope objective;
preferably, 4.5 < fG3/fobj < 5, fG3 being the effective focal length of the third cemented lens group;
preferably, 2.9 < fL9/fobj < 3.4, fL9 being the effective focal length of the ninth lens;
further, 0.63 < RL10/fobj < 0.75, RL10 is the radius of curvature of the image-side surface of the tenth lens.
In some embodiments, the fourth lens is a flint glass lens and the fifth lens is a dispersive glass lens; preferably, the sixth lens is a crown glass lens, the seventh lens is a flint glass lens, and the eighth lens is a crown glass lens.
The optical system of the flat-field apochromatic microscope objective can achieve flat-field apochromatic, the imaging quality of the optical system can reach a diffraction limit, the optical system has strict flat-field constraint, the field curvature of the full field is small, the optical system has a large field of view and high resolution, and the full field of view can be clearly imaged at the same time.
The embodiment of the application also provides an optical system of the flat field apochromatic microobjective, which comprises the flat field apochromatic microobjective, wherein the working wavelength band of the optical system of the flat field apochromatic microobjective is 550nm-800nm, and the total field curvature of field is not more than 100 nm.
Drawings
Fig. 1 is a schematic diagram of a structure and an optical path of a flat field apochromatic microscope objective according to an embodiment of the present application.
FIG. 2 is a field curvature diagram of a field-flattened apochromatic microscope objective according to an embodiment of the present application.
FIG. 3 is a schematic diagram of the relative distortion of a flat field apochromatic microscope objective lens according to an embodiment of the present application.
FIG. 4 is a graph showing the optical transfer function curves of a flat field apochromatic microscope objective lens according to an embodiment of the present application.
FIG. 5 is a schematic axial chromatic aberration diagram of a flat field apochromatic microscope objective lens according to an embodiment of the present application.
FIG. 6 is a schematic diagram of the wave aberration of a flat field apochromatic microscope objective lens according to an embodiment of the present application.
Description of the main elements
Flat field apochromatic display 10
Micro objective lens
First lens L1
Second lens L2
Third lens L3
Fourth lens L4
Fifth lens L5
Sixth lens L6
Seventh lens L7
Eighth lens L8
Ninth lens L9
Tenth lens L10
The first cemented lens group G1
Second cemented lens group G2
Third cemented lens group G3
Diaphragm STO
Image sides S1, S2, S4, S6, S7, S9, S10, S11, S13, S15
Object side surfaces S3, S5, S8, S12, S13, S14 and S16
Detailed Description
In order to make the objects, technical solutions and advantages of the present application more apparent, the present application is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present application and are not intended to limit the present application. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
In the description of the present application, it is to be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the application and for simplicity in description, and are not intended to indicate or imply that the referenced device or element must have a particular orientation, be constructed in a particular orientation, and be operated in a particular manner, and thus should not be considered limiting. Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, features defined as "first" and "second" may explicitly or implicitly include one or more of the described features. In the description of the present application, "a plurality" means two or more unless specifically limited otherwise.
In the description of the present application, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; may be mechanically connected, may be electrically connected or may be in communication with each other; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate.
In this application, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may comprise direct contact of the first and second features, or may comprise contact of the first and second features not directly but through another feature in between. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly above and obliquely above the second feature, or simply meaning that the first feature is at a lesser level than the second feature.
The following disclosure provides many different embodiments or examples for implementing different features of the application. In order to simplify the disclosure of the present application, specific example components and arrangements are described below. Of course, they are merely examples and are not intended to limit the present application. Moreover, the present application may repeat reference numerals and/or letters in the various examples, such repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the various embodiments and/or configurations discussed. In addition, examples of various specific processes and materials are provided herein, but one of ordinary skill in the art may recognize applications of other processes and/or use of other materials.
Referring to fig. 1, the field apochromatic microscope objective lens 10 according to the embodiment of the present application includes, in order along an optical axis from an image side to an object side, a first lens L1, a second lens L2, a third lens L3, a fourth lens L4, a fifth lens L5, a stop STO, a sixth lens L6, a seventh lens L7, an eighth lens L8, a ninth lens L9, and a tenth lens L10. The first lens L1 to the tenth lens L10 collectively constitute the fluorescence microscope objective lens 10 which has a broad spectrum and a large numerical aperture and can be apochromatically achromatized.
Under the condition that the numerical aperture of the flat field apochromatic microscope objective 10 is 0.75, the imaging line field of view can be increased to 1.25 mm; under the condition of the working wave band of 550-800nm, the planar apochromatism design can be realized more strictly, and the field curvature of the full field is not more than 100 nm. It is to be understood that in order to obtain the above-mentioned effects, those skilled in the art can make appropriate modifications or improvements to the above-mentioned apochromatic microscope objective 10, for example, adding other optical devices such as lenses or adjusting optical parameters of the respective lenses appropriately, without departing from the spirit of the present invention.
Specifically, the first lens L1 has positive power, the image-side surface S1 of the first lens L1 is convex, and the object-side surface of the first lens L1 is planar.
The second lens L2 has negative power, the image-side surface S2 of the second lens L2 is a plane, the object-side surface S3 of the second lens L2 is a concave surface, and the object-side surface of the first lens L1 and the image-side surface S2 of the second lens L2 are cemented together to form the first cemented lens group G1 having positive power.
In this embodiment, the object-side surface of the first lens L1 and the image-side surface S2 of the second lens L2 are cemented together, that is, the first lens L1 and the second lens L2 share a plane, S2 is the image-side surface of the second lens L2 and is also the object-side surface of the first lens L1, for convenience of reference, only the image-side surface of the second lens L2 is labeled as S2, and the same cases will not be described one by one hereinafter.
The third lens L3 has negative power, the image-side surface S4 of the third lens L3 is concave, and the object-side surface S5 of the third lens L3 is convex, that is, the third lens L3 is substantially meniscus-shaped.
The fourth lens L4 has negative power, the image-side surface S6 of the fourth lens L4 is a flat surface, and the object-side surface of the fourth lens L4 is a concave surface, i.e., the fourth lens L4 is substantially meniscus-shaped. In this embodiment, the material of the fourth lens L4 is flint glass.
The fifth lens L5 has positive power, the image-side surface S7 of the fifth lens L5 is a convex surface, the object-side surface S8 of the fifth lens L5 is a convex surface, and the object-side surface of the fourth lens L4 and the image-side surface S7 of the fifth lens L5 are cemented together to form the second cemented lens group G2 having positive power. In this embodiment, the material of the fifth lens L5 is a special dispersion glass, such as calcium fluoride.
The sixth lens element L6 has positive refractive power, and the image-side surface S9 of the sixth lens element L6 is convex, and the object-side surface of the sixth lens element L6 is convex. In this embodiment, the material of the sixth lens L6 is crown glass.
The seventh lens L7 has negative power, and the image-side surface S10 of the seventh lens L7 is concave, and the object-side surface of the seventh lens L7 is concave. In this embodiment, the material of the seventh lens L7 is flint glass.
The eighth lens L8 has positive power, the image-side surface S11 of the eighth lens L8 is a convex surface, the object-side surface S12 of the eighth lens L8 is a convex surface, and the object-side surface of the sixth lens L6 is cemented with the image-side surface S10 of the seventh lens L7, the object-side surface of the seventh lens L7, and the image-side surface S11 of the eighth lens L8 to form the third cemented lens group G3 having positive power. In this embodiment, the material of the eighth lens L8 is crown glass.
The ninth lens L9 has positive refractive power, and the image-side surface S13 of the ninth lens L9 is convex, and the object-side surface S14 of the ninth lens L9 is planar.
The tenth lens L10 has positive power, the image-side surface S15 of the tenth lens L10 is spherical, and the object-side surface S16 of the tenth lens L10 is concave at the paraxial region, so that spherical aberration and coma aberration can be effectively reduced, and a flat-field effect is generated.
The ninth lens L9 and the tenth lens L10 are close to the sample, can bear large-angle deflection of light rays, and can effectively reduce spherical aberration and coma aberration. The second cemented lens group G2 and the third cemented lens group G3 are made of a dispersion material with an abnormal arrangement for correcting spherical aberration, coma aberration and chromatic aberration of the apochromatic microscope objective lens 10. The first cemented lens group G1 and the third lens L3 are located at the rear of the stop STO to correct curvature of field, aberration, and chromatic aberration.
In some embodiments, the apochromatic microscope objective 10 satisfies the following conditional expression:
0.057＜dL1/L＜0.087；
dL1 is the distance in the optical axis direction between the object-side surface S1 of the first lens L1 and the image-side surface of the first lens L1, and L is the total length of the apochromatic microscope objective 10. Thus, by properly matching the relationship between the first lens L1 and the total optical length, the apochromatic microscope objective lens 10 can be advantageously reduced in size and weight.
In some embodiments, the apochromatic microscope objective 10 satisfies the following conditional expression:
0.057＜dL2/L＜0.085；
dL2 is the distance in the optical axis direction between the object-side surface S2 of the second lens L2 and the image-side surface S3 of the second lens L2, and L is the total length of the apochromatic microscope objective lens 10. Thus, by properly matching the relationship between the second lens L2 and the total optical length, the apochromatic microscope objective lens 10 can be made smaller and lighter.
In some embodiments, the apochromatic microscope objective 10 satisfies the following conditional expression:
0.074＜dL3/L＜0.107；
dL3 is the distance in the optical axis direction from the object-side surface S4 of the third lens L3 to the image-side surface S5 of the third lens L3, and L is the total length of the apochromatic microscope objective lens 10. Thus, by properly matching the relationship between the third lens L3 and the total optical length, the apochromatic microscope objective lens 10 can be made smaller and lighter.
In some embodiments, the apochromatic microscope objective 10 satisfies the following conditional expression:
0.052＜dL4/L＜0.090；
dL4 is the distance in the optical axis direction between the object-side surface S6 of the fourth lens L4 and the image-side surface of the fourth lens L4, and L is the total length of the apochromatic microscope objective 10. In this way, by properly matching the relationship between the fourth lens L4 and the total optical length, the apochromatic microscope objective lens 10 can be advantageously downsized and lightened.
In some embodiments, the apochromatic microscope objective 10 satisfies the following conditional expression:
0.057＜dL5/L＜0.107；
dL5 is the distance in the optical axis direction from the object-side surface S7 of the fifth lens L5 to the image-side surface S8 of the fifth lens L5, and L is the total length of the field apochromatic microscope objective lens 10. Thus, by properly matching the relationship between the fifth lens L5 and the total optical length, the apochromatic microscope objective lens 10 can be made smaller and lighter.
In some embodiments, the apochromatic microscope objective 10 satisfies the following conditional expression:
0.082＜dL6/L＜0.123；
dL6 is the distance in the optical axis direction between the object-side surface S9 of the sixth lens L6 and the image-side surface of the sixth lens L6, and L is the total length of the apochromatic field microscope objective lens 10. Thus, by properly matching the relationship between the sixth lens L6 and the total optical length, the apochromatic microscope objective lens 10 can be made smaller and lighter.
In some embodiments, the apochromatic microscope objective 10 satisfies the following conditional expression:
0.025＜dL7/L＜0.049；
dL7 is the distance in the optical axis direction between the object-side surface S10 of the seventh lens L7 and the image-side surface of the seventh lens L7, and L is the total length of the apochromatic microscope objective 10. Thus, by properly matching the relationship between the seventh lens L7 and the total optical length, the apochromatic microscope objective lens 10 can be made smaller and lighter.
In some embodiments, the apochromatic microscope objective 10 satisfies the following conditional expression:
0.082＜dL8/L＜0.118；
dL8 is the distance in the optical axis direction between the object-side surface S11 of the eighth lens L8 and the image-side surface S12 of the eighth lens L8, and L is the total length of the field apochromatic microscope objective lens 10. Thus, by properly matching the relationship between the eighth lens L8 and the total optical length, the objective lens 10 is advantageously reduced in size and weight.
In some embodiments, the apochromatic microscope objective 10 satisfies the following conditional expression:
0.082＜dL9/L＜0.108；
dL9 is the distance in the optical axis direction between the object-side surface S13 of the ninth lens L9 and the image-side surface S14 of the ninth lens L9, and L is the total length of the field apochromatic microscope objective lens 10. Thus, by properly matching the relationship between the ninth lens L9 and the total optical length, the objective lens 10 is advantageously reduced in size and weight.
In some embodiments, the apochromatic microscope objective 10 satisfies the following conditional expression:
0.164＜dL10/L＜0.184；
dL10 is the distance in the optical axis direction between the object-side surface S15 of the tenth lens L10 and the image-side surface S16 of the tenth lens L10, and L is the total length of the field apochromatic microscope objective lens 10. Thus, by properly matching the relationship between the tenth lens L10 and the total optical length, the apochromatic microscope objective lens 10 can be advantageously reduced in size and weight.
In some embodiments, the apochromatic microscope objective 10 satisfies the following conditional expression:
44.1＜fG1/fobj＜45.5；
wherein, fG1 is the effective focal length of the first cemented lens group G1, and fobj is the effective focal length of the apochromatic microscope objective lens 10. Thus, by properly controlling the power distribution of the first lens L1 and the second lens L2, it is advantageous to control the height of the incident light beam exiting the apochromatic microscope objective 10 to reduce the high-order aberrations of the apochromatic microscope objective 10 and the outer diameter of the lens, and to correct the influence of curvature of field generated by the front lens group on the resolving power.
In some embodiments, the apochromatic microscope objective 10 satisfies the following conditional expression:
-3.2＜fL3/fobj＜-2.8；
wherein, fL3 is the effective focal length of the third lens L3, and fobj is the effective focal length of the apochromatic micro-objective lens 10. Therefore, the method is favorable for correcting the edge aberration and improving the imaging resolution.
In some embodiments, the apochromatic microscope objective 10 satisfies the following conditional expression:
6.8＜fG2/fobj＜8.1；
wherein, fG2 is the effective focal length of the second cemented lens group G2, and fobj is the effective focal length of the apochromatic microscope objective lens 10. Thus, by properly controlling the power distribution of the fourth lens L4 and the fifth lens L5, it is advantageous to control the height of the incident light beam exiting the apochromatic microscope objective lens 10 to reduce the high-order aberrations of the apochromatic microscope objective lens 10 and the outer diameter of the lens, and to correct the influence of curvature of field generated by the front lens group on the resolving power.
In some embodiments, the apochromatic microscope objective 10 satisfies the following conditional expression:
4.5＜fG3/fobj＜5；
wherein, fG3 is the effective focal length of the third cemented lens group G3, and fobj is the effective focal length of the apochromatic microscope objective lens 10. Thus, by properly controlling the power distribution of the sixth lens L6, the seventh lens L7, and the eighth lens L8, it is advantageous to control the height of the incident light beam exiting the apochromatic micro-objective 10 to reduce the high-order aberration of the apochromatic micro-objective 10 and the outer diameter of the lens, and to correct the influence of curvature of field generated by the front lens group on the resolving power.
In some embodiments, the apochromatic microscope objective 10 satisfies the following conditional expression:
2.9＜fL9/fobj＜3.4；
wherein, fL9 is the effective focal length of the ninth lens L9, and fobj is the effective focal length of the apochromatic micro-objective lens 10. Therefore, the method is favorable for correcting the edge aberration and improving the imaging resolution.
In some embodiments, the apochromatic microscope objective 10 satisfies the following conditional expression:
0.63＜RL10/fobj＜0.75；
where RL10/fobj is the radius of curvature of the image-side surface S15 of the tenth lens L10, and fobj is the effective focal length of the apochromatic microscope objective lens 10.
Further, the apochromatic field microscope objective 10 further includes a flat glass (not shown) on the object side of the 10 th lens, and the flat glass has an image side surface S17 and an object side surface S18.
Referring to table 1, table 1 shows the performance parameters of the apochromatic microscope objective 10.
TABLE 1
| Operating band | Numerical aperture | Object space field of view | Multiplying power | Working distance |
| 550nm-800nm | 0.75 | Line field of view 1.25mm | 20 | 0.677(mm) |
Referring to table 2, the parameters of the apochromatic microscope objective 10 in this embodiment are as follows, and the units of the Y radius, the interval, the thickness and the half aperture are all millimeters (mm).
TABLE 2
FIG. 2 is a field curvature diagram of a flat field apochromatic microscope objective 10 of an embodiment of the present application, with defocus on the abscissa in units of micrometers (μm); the ordinate is the field angle of the object, and the unit is degree, which can be obtained from fig. 2: the field curvature of the flat field apochromatic microscope objective 10 under the full field of view is less than 100 nm.
FIG. 3 is a schematic diagram of the relative distortion of a flat field apochromatic microscope objective 10 of an embodiment of the present application, with the abscissa being the relative distortion in units; the ordinate is the field angle of the object, and can be obtained from fig. 3: the maximum distortion of the flat field apochromatic microscope objective 10 is within 1 percent.
Fig. 4 is a graph of the optical transfer function of the apochromatic field microscope objective 10 according to the embodiment of the present application, and the cutoff frequency is 2700cycles/mm, and TS DIF LIMIT in the graph indicates the diffraction limit of the apochromatic field microscope objective, and it can be obtained from fig. 4 that the MTF curves in the meridional direction and the sagittal direction of each field are close to the diffraction limit.
Fig. 5 is a schematic diagram of axial chromatic aberration of the apochromatic microscope objective 10 according to the embodiment of the present application, where the ordinate is normalized entrance pupil diameter and the abscissa is chromatic spherical aberration, and it can be seen that the axial chromatic aberration of the apochromatic microscope objective 10 is well corrected. Axial chromatic aberration DeltaL of the waveband 712nm and the waveband 561nm at 0.707 λ712λ561 Equal to 50 nm; axial chromatic aberration DeltaL of wave band 712nm and wave band 633nm at 0.707 λ712λ633 Equal to 70 nm; axial chromatic aberration DeltaL of wave band 561nm and wave band 633nm at 0.707 λ561λ633 Equal to 110 nm. According to the focal depth delta formula:
λ is 633nm of central wavelength, NA is 0.75 of numerical aperture of the apochromatic microobjective 10, M is 20 of total magnification, e is 600nm of minimum resolution distance of the image plane detector, and n is 1 of refractive index of medium between the cover glass and the objective, so that the focal depth of the apochromatic microobjective 10 is 1.16 μ M. The maximum value of the position chromatic aberration between three wave bands of 0.707 band under the full aperture is 110nm, which is about 1/10 of the focal depth of the flat field apochromatic microscope objective 10, and can meet the requirement of apochromatic aberration.
FIG. 6 is a schematic diagram of the wave aberration of a flat field apochromatic microscope objective 10 of an embodiment of the present application, with the ordinate being the object field angle in degrees (deg) and a maximum of 3.6 °; the abscissa is the RMS wave aberration value in wavelength λ, with wave aberration over the entire field of view at the full spectral range of 0.02 λ -0.05 λ (λ 633 nm).
The embodiment of the application also provides an optical system of the flat field apochromatic microscope objective, which comprises the flat field apochromatic microscope objective 10, wherein the working wavelength band of the optical system of the flat field apochromatic microscope objective is 550nm-800nm, and the total field curvature of field is not more than 100 nm.
The flat field apochromatic microscope objective 10 and the optical system can achieve flat field apochromatic, the imaging quality can reach the diffraction limit, the flat field constraint is strict, the field curvature of the full field is small, the large field and the high resolution are achieved, and the full field can be clearly imaged at the same time.
It will be evident to those skilled in the art that the present application is not limited to the details of the foregoing illustrative embodiments, and that the present application may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the application being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein.
Finally, it should be noted that the above embodiments are only used for illustrating the technical solutions of the present application and not for limiting, and although the present application is described in detail with reference to the preferred embodiments, it should be understood by those skilled in the art that modifications or equivalent substitutions can be made on the technical solutions of the present application without departing from the spirit and scope of the technical solutions of the present application.
Claims (10)
1. A flat field apochromatic microobjective comprises a first lens, a second lens, a third lens, a fourth lens, a fifth lens, a sixth lens, a seventh lens, an eighth lens, a ninth lens and a tenth lens which are sequentially arranged from an image side to an object side along an optical axis, wherein the ninth lens has positive focal power, the image side surface of the ninth lens is a convex surface, the tenth lens has positive focal power, the image side surface of the tenth lens is a spherical surface, and the flat field apochromatic microobjective is characterized in that,
the object side surface of the first lens and the image side surface of the second lens are cemented to form a first cemented lens group with positive focal power,
the object side surface of the fourth lens and the image side surface of the fifth lens are cemented to form a second cemented lens group with positive focal power,
the image side surface of the seventh lens is cemented with the object side surface of the sixth lens, and the object side surface of the seventh lens is cemented with the image side surface of the eighth lens to form a third cemented lens group with positive optical power.
2. The apochromatic microscope objective of claim 1,
the first lens has positive focal power, the image side surface of the first lens is a convex surface, and the object side surface of the first lens is a plane;
the second lens has negative focal power, the image side surface of the second lens is a plane, and the object side surface of the second lens is a concave surface;
the third lens has negative focal power, the image side surface of the third lens is a concave surface, and the object side surface of the third lens is a convex surface;
the fourth lens has negative focal power, the image side surface of the fourth lens is a plane, and the object side surface of the fourth lens is a concave surface;
the fifth lens has positive focal power, the image side surface of the fifth lens is a convex surface, and the object side surface of the fifth lens is a convex surface;
the sixth lens has positive focal power, the image side surface of the sixth lens is a convex surface, and the object side surface of the sixth lens is a convex surface;
the seventh lens has negative focal power, the image side surface of the seventh lens is a concave surface, and the object side surface of the seventh lens is a concave surface;
the eighth lens has positive focal power, the image side surface of the eighth lens is a convex surface, and the object side surface of the eighth lens is a convex surface;
the object side surface of the ninth lens is a plane.
3. The apochromatic microscope objective of claim 1, wherein the apochromatic microscope objective satisfies the following conditional expression:
0.057＜dL1/L＜0.087；
0.057＜dL2/L＜0.085；
dL1 is the distance in the optical axis direction from the object-side surface of the first lens to the image-side surface of the first lens, dL2 is the distance in the optical axis direction from the object-side surface of the second lens to the image-side surface of the second lens, and L is the total length of the apochromatic field microscope objective.
4. The apochromatic microscope objective of claim 1, wherein the apochromatic microscope objective satisfies the following conditional expression:
0.074＜dL3/L＜0.107；
dL3 is the distance from the object-side surface of the third lens to the image-side surface of the third lens in the optical axis direction, and L is the total length of the flat field apochromatic microscope objective;
preferably, 0.052 < dL4/L < 0.090;
0.057＜dL5/L＜0.107；
dL4 is the distance in the optical axis direction between the object-side surface of the fourth lens element and the image-side surface of the fourth lens element, and dL5 is the distance in the optical axis direction between the object-side surface of the fifth lens element and the image-side surface of the fifth lens element.
5. The apochromatic microscope objective of claim 1, wherein the apochromatic microscope objective satisfies the following conditional expression:
0.082＜dL6/L＜0.123；
0.025＜dL7/L＜0.049；
0.082＜dL8/L＜0.118；
dL6 is the distance in the optical axis direction from the object-side surface of the sixth lens to the image-side surface of the sixth lens, dL7 is the distance in the optical axis direction from the object-side surface of the seventh lens to the image-side surface of the seventh lens, dL8 is the distance in the optical axis direction from the object-side surface of the eighth lens to the image-side surface of the eighth lens, and L is the total length of the aplanatic microscope objective lens.
6. The apochromatic microscope objective of claim 1, wherein the apochromatic microscope objective satisfies the following conditional expression:
0.082＜dL9/L＜0.108；
dL9 is the distance from the object-side surface of the ninth lens to the image-side surface of the ninth lens in the optical axis direction, and L is the total length of the apochromatic microscope objective lens;
preferably, 0.164 < dL10/L < 0.184, dL10 is a distance in the optical axis direction from an object-side surface of the tenth lens to an image-side surface of the tenth lens.
7. The apochromatic microscope objective of claim 1, wherein the apochromatic microscope objective satisfies the following conditional expression:
44.1＜fG1/fobj＜45.5；
wherein fG1 is the effective focal length of the first cemented lens group, and fobj is the effective focal length of the apochromatic microscope objective lens;
preferably, 6.8 < fG2/fobj < 8.1, fG2 is the effective focal length of the second cemented lens group.
8. The apochromatic microscope objective of claim 1, wherein the apochromatic microscope objective satisfies the following conditional expression:
-3.2＜fL3/fobj＜-2.8；
wherein, fL3 is the effective focal length of the third lens, and fobj is the effective focal length of the apochromatic microscope objective;
preferably, 4.5 < fG3/fobj < 5, fG3 being the effective focal length of the third cemented lens group;
preferably, 2.9 < fL9/fobj < 3.4, fL9 is the effective focal length of the ninth lens;
further, 0.63 < RL10/fobj < 0.75, RL10 is the radius of curvature of the image-side surface of the tenth lens.
9. The apochromatic microscope objective of any one of claims 1 to 8, wherein the fourth lens is a flint glass lens and the fifth lens is a dispersive glass lens; preferably, the sixth lens is a crown glass lens, the seventh lens is a flint glass lens, and the eighth lens is a crown glass lens.
10. An apochromatic microobjective optical system comprising an apochromatic microobjective as claimed in any one of claims 1 to 9, the apochromatic microobjective optical system having a wavelength of 550nm to 800nm and a field curvature of full field of no more than 100 nm.
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| CN117130166A (en) * | 2023-10-26 | 2023-11-28 | 江西联昊光电有限公司 | Optical system and near-eye display device |
| CN117608068A (en) * | 2024-01-23 | 2024-02-27 | 茂莱（南京）仪器有限公司 | 10-time NA large-view-field flat-field apochromatic microscope objective lens |
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| CN117608068A (en) * | 2024-01-23 | 2024-02-27 | 茂莱（南京）仪器有限公司 | 10-time NA large-view-field flat-field apochromatic microscope objective lens |
| CN117608068B (en) * | 2024-01-23 | 2024-04-30 | 茂莱（南京）仪器有限公司 | 10-Time NA large-view-field flat-field apochromatic microscope objective lens |
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