CN216351509U - Microscope objective - Google Patents
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- CN216351509U CN216351509U CN202123145937.2U CN202123145937U CN216351509U CN 216351509 U CN216351509 U CN 216351509U CN 202123145937 U CN202123145937 U CN 202123145937U CN 216351509 U CN216351509 U CN 216351509U
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Abstract
The utility model relates to a microscope objective lens, which comprises the following components in sequence from an object side to an image side along an optical axis: a first lens group (T1) having positive optical power and a second lens group (T2) having positive optical power, characterized by further comprising: a third lens group (T3) with negative or positive focal power, wherein the first lens group (T1) at least comprises a lens with positive focal power; the second lens group (T2) comprises at least one cemented lens group; the third lens group (T3) comprises a lens group with positive optical power and a lens group with negative optical power. The microscope objective lens has a long working distance, uses near-infrared band imaging to reduce the damage to a sample and the light scattering of the sample, adopts a low-autofluorescence material as the lens, improves the signal transmittance, reduces the noise, and simultaneously adopts a lens group adjustable structure to realize thick sample observation.
Description
Technical Field
The utility model relates to the technical field of microscopes, in particular to a microscope objective.
Background
The biological sample observation in the fields of life science and industry requires no toxicity and pollution, and the sample is slightly damaged. And when a plurality of biological samples are observed, tissue characteristics with certain thickness need to be observed, namely, the objective lens is required to have high resolution capability, and the biological tissue characteristics with certain thickness can be observed only by having extra focal depth. In addition, biological liquid in which a biological sample and a tissue are located has high scattering to light, so that the problems of insufficient energy, high noise and the like are caused in observation, and the real morphological characteristics of the sample cannot be observed due to low signal-to-noise ratio. Finally, the working distance of the objective lens is also high, and particularly in the research of cell biology, the working distance of the lens is required to be long enough to meet the operation requirement of workers on cells.
SUMMERY OF THE UTILITY MODEL
In order to overcome the defects in the prior art, the utility model provides the microscope objective lens which has a long working distance, uses near-infrared band imaging to reduce the damage to a sample and the light scattering of the sample, adopts a low-autofluorescence material to improve the signal transmittance and reduce the noise, and simultaneously adopts a lens group adjustable structure to realize thick sample observation.
To achieve the above object, the present invention provides a microscope objective lens, comprising, in order from an object side to an image side along an optical axis: the lens comprises a first lens group with positive focal power, a second lens group with positive focal power and a third lens group with negative or positive focal power, wherein the first lens group at least comprises a lens with positive focal power; the second lens group at least comprises a cemented lens group; the third lens group comprises a lens group with positive focal power and a lens group with negative focal power.
According to an aspect of the present invention, in a direction from an object side to an image side along an optical axis,
the first lens group comprises a first lens group and a second lens group, and the first lens group is a cemented lens group or a plano-convex lens;
the second lens group comprises one or two lenses with positive focal power;
according to an aspect of the present invention, in a direction from an object side to an image side along an optical axis,
the rear surface of the first lens group is bent to the object plane;
the lenses of the second lens group are meniscus lenses, plano-convex lenses or biconvex lenses;
according to an aspect of the present invention, the cemented lens group of the second lens group is a double cemented lens group formed by two cemented lenses or a triple cemented lens group formed by three cemented lenses;
according to an aspect of the present invention, the lens group of the third lens group with negative optical power is close to the object plane;
according to an aspect of the utility model, both lens groups of the third lens group are single lens and/or cemented lens groups;
according to one aspect of the present invention, in a direction from an object side to an image side along an optical axis, a distance D from an object plane to a last plane of the microscope objective lens and a focal length fobj of the microscope objective lens satisfy a relation: 9< D/fobj < 14;
according to one aspect of the utility model, the objective numerical aperture NA of the microscope objective satisfies the relation: 0.8< NA < 1.2;
according to one aspect of the present invention, the central field edge rays satisfy the relationship between the highest projection height of lens surfaces in all lens groups H1 and the central field edge rays satisfy the relationship between the lowest projection height of lens surfaces in all lens groups H2: 0.1< | H2/H1| < 0.8;
the projection height of the central field edge ray between the lowest projection height H2 of the lens surfaces in all the lens groups and the projection height H3 of the central field edge ray of the lens surfaces farthest from the object plane satisfy the following relation: 0.3< | H2/H3| < 1;
according to an aspect of the present invention, in a direction from an object side to an image side along an optical axis, a concave surface of the first lens group faces an object plane, and a focal length fL1 of the first lens and a focal length fobj of the microscope objective lens satisfy a relation: 1< | fL1/fobj |;
the value of the radius RL1 of the surface of the first lens facing the object side and the focal length fobj of the microscope objective lens satisfy the relation: l RL1/fobj | ═ infinity;
according to an aspect of the utility model, a combined focal length fT1 of the first lens group and a focal length fobj of the microscope objective lens satisfy the relation: 1< | fT1/fobj |;
according to an aspect of the utility model, a combined focal length fT2 of the second lens group and a focal length fobj of the microscope objective lens satisfy the relation: 1< | fT2/fobj | < 25;
according to an aspect of the present invention, a combined focal length fT3 of the third lens group and a focal length fobj of the microscope objective lens satisfy the relation: 1< | fT3/fobj |;
according to one aspect of the utility model, the microscope objective has a working distance of up to 2mm and above, including a working distance of 0mm-2 mm.
According to the scheme of the utility model, the multiplying power of the microscope objective ranges from 20 to 30. The first lens group consists of a double cemented lens group and one or two single lenses and is used for improving the numerical aperture of an object space. The second lens group is composed of at least two cemented lens groups and is used for eliminating chromatic aberration. The third lens group consists of a positive focal power lens group and a negative focal power lens group and is used for realizing the effects of flat field and field of view enlargement. The maximum field number can reach 20, and the maximum numerical aperture can reach 1.1. The objective lens can be used for biological sample scanning technology, and the lens group in the second lens group can perform translation in the direction vertical to the sample so as to realize the purpose of clear imaging when thick samples are observed. Meanwhile, the method can be applied to a multi-photon scanning technology, and the near-infrared band has good imaging performance. Generally speaking, the microscope objective has a long working distance, near infrared band imaging is used, damage to a sample is reduced, scattering of the sample to light is reduced, all lenses in the microscope objective are made of low-autofluorescence materials, signal transmittance can be improved, noise is reduced, and thick sample observation is achieved by means of a lens group adjustable structure.
According to one scheme of the utility model, the working wavelength band of the microscope objective can be 486-656nm, and the apochromatism effect is optimal in the 700-1400nm wavelength band interval.
Drawings
FIG. 1 schematically shows a schematic plan view of a microscope objective lens according to example 1 of the present invention;
FIG. 2 is a schematic representation of a transverse aberration diagram of the 0 field of view of a microscope objective lens according to example 1 of the present invention;
FIG. 3 schematically shows a 1-field transverse aberration diagram of a microscope objective lens according to example 1 of the present invention;
FIG. 4 is a field curvature distortion plot schematically illustrating a microscope objective lens according to example 1 of the present invention;
FIG. 5 shows schematically a chromatic aberration diagram of a microscope objective lens according to example 1 of the present invention;
FIG. 6 shows schematically a plan view of a microscope objective lens according to example 2 of the present invention;
FIG. 7 is a diagram schematically showing the transverse aberration of field 0 of the microscope objective lens of example 2 of the present invention;
FIG. 8 is a schematic illustration of a 1-field transverse aberration diagram of a microscope objective lens according to example 2 of the present invention;
FIG. 9 is a schematic diagram showing the field curvature distortion of the microscope objective lens of example 2 of the present invention;
FIG. 10 is a graph schematically showing the chromatic aberration of the microscope objective lens of example 2 of the present invention;
FIG. 11 shows schematically a plan view of a microscope objective lens according to example 3 of the present invention;
FIG. 12 is a diagram schematically showing the transverse aberration of 0 field of view of a microscope objective lens according to example 3 of the present invention;
FIG. 13 is a schematic illustration of a 1-field transverse aberration diagram of a microscope objective lens according to example 3 of the present invention;
FIG. 14 is a schematic diagram showing the field curvature distortion of the microscope objective lens of example 3 of the present invention;
FIG. 15 is a graph schematically showing the chromatic aberration of a microscope objective lens according to example 3 of the present invention;
FIG. 16 shows schematically a plan view of a microscope objective lens according to example 4 of the present invention;
FIG. 17 is a diagram schematically showing the transverse aberration of field 0 of the microscope objective lens of example 4 of the present invention;
FIG. 18 is a schematic illustration of a 1-field transverse aberration diagram of a microscope objective lens according to example 4 of the present invention;
FIG. 19 is a schematic representation of the field curvature distortion plot of the microscope objective lens of example 4 of the present invention;
FIG. 20 is a graph schematically showing the chromatic aberration of the microscope objective lens of example 4 of the present invention;
FIG. 21 shows schematically a plan view of a microscope objective lens according to example 5 of the present invention;
FIG. 22 is a transverse aberration diagram schematically illustrating the field of view 0 of the microscope objective lens of example 5 of the present invention;
FIG. 23 is a schematic illustration of a 1-field transverse aberration diagram of a microscope objective lens according to example 5 of the present invention;
FIG. 24 is a schematic representation of the field curvature distortion plot of the microscope objective lens of example 5 of the present invention;
FIG. 25 is a schematic illustration of a chromatic aberration plot for a microscope objective lens of example 5 of the present invention.
Detailed Description
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the embodiments will be briefly described below. It is obvious that the drawings in the following description are only some embodiments of the utility model, and that for a person skilled in the art, other drawings can be derived from them without inventive effort.
In describing embodiments of the present invention, the terms "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in an orientation or positional relationship that is based on the orientation or positional relationship shown in the associated drawings, which is for convenience and simplicity of description only, and does not indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and thus, the above-described terms should not be construed as limiting the present invention.
The present invention is described in detail below with reference to the drawings and the specific embodiments, which are not repeated herein, but the embodiments of the present invention are not limited to the following embodiments.
In the present invention, the medium between the observation object and the objective lens may be air or liquid. When the medium is air, the numerical aperture is less than 1, and when the medium is liquid, the numerical aperture can reach the maximum value.
Since the ambient temperature or the thickness of the sample varies, or the cover glass used by the user varies, one lens group is required to correct the aberration, and the lens group used as the correction ring in the present invention is the triple cemented lens group of the second lens group T2. In some embodiments, the operating wavelength range of the microscope objective lens can be 486-.
The microscope objective of the utility model is an infinite conjugate objective. In the following specific embodiments, the cemented surface of the cemented lens is referred to as one surface, for example, a double cemented lens group consisting of 2 cemented lenses has 3 surfaces, and a triple cemented lens group consisting of 3 cemented lenses has 4 surfaces.
Example 1
Referring to fig. 1, the microscope objective lens of the present embodiment includes, in order from the object side to the image side along the optical axis, a first lens group T1, a second lens group T2, and a third lens group T3. Mainly consists of 7 lens groups, and totally comprises 14 lenses. In the present embodiment, the first lens group T1 includes a first lens group G1 and a second lens group G in sequence. The first lens group G1 is a plano-convex lens with positive refractive power, and is a cemented lens group formed by a first lens L1 cemented with a second lens L2. The first lens L1 close to the object is a plano-convex lens, and the second lens L2 far from the object is a thick meniscus lens. The second lens group is a third lens L3 of a biconvex lens. The first lens group T1 provides positive optical power.
The second lens group T2 includes a third lens group G2, a fourth lens group G3 and a fifth lens group G4 in this order. The third lens group G2 is a triple cemented lens group formed by a fourth lens element L4, a fifth lens element L5 and a sixth lens element L6 cemented together. Wherein two lenses have positive optical power and one lens has negative optical power. The specific materials of the two lenses with positive optical power can be the same or different, but both are low dispersion materials. The fourth lens group G3 is composed of two lenses with negative focal power and one lens with positive focal power, and comprises a double cemented lens group. The materials of the two lenses with negative focal power can be the same or different; the material of the lens having positive optical power is a low dispersion material. The fifth lens group G4 is a double cemented lens group formed by a tenth lens L10 and an eleventh lens L11 cemented together, in which the tenth lens L10 located closer to the object plane has positive power and the eleventh lens L11 has negative power. The second lens group T2 is mainly used to correct chromatic aberration.
The third lens group T3 includes a sixth lens group G5 and a seventh lens group in this order. The sixth lens group G5 is a double-lens combination formed by gluing the twelfth lens element L12 and the thirteenth lens element L13, and has a concave surface facing the concave surface formed by the fifth lens group G4. The seventh lens group is composed of a single lens, i.e., a fourteenth lens L14 with positive focal power. The third lens group T3 is mainly used to correct curvature of field and increase the field of view.
The microscope objective of the present embodiment comprises the following features:
d/fobj is 10.83; fobj ═ 7.2; NA 1.03; where D denotes the distance from the object plane to the last surface of the microscope objective lens (i.e., the surface S22 of the fourteenth lens L14 away from the object plane), fobj denotes the focal length of the microscope objective lens, and NA denotes the object-side numerical aperture of the microscope objective lens.
H2/H3| ═ 0.58; H2/H1| ═ 0.55; wherein H1 represents the highest projection height of the central field edge rays on the lens surfaces in all the lens groups, H2 represents the lowest projection height of the central field edge rays on the lens surfaces in all the lens groups, and H3 represents the projection height of the central field edge rays on the lens surface farthest from the object plane.
L fL1/fobj | ═ 2.416; l RL1/fobj | ═ infinity; wherein, fL1 represents the focal length of the first lens L1 of the first lens group T1, and the concave surface thereof faces the object plane; RL1 denotes the value of the radius of the surface facing the object; fobj denotes the focal length of the microscope objective.
I fT1/fobj i 1.632; i fT2/fobj i 4.218; 15.75, | fT3/fobj |; where fT1 denotes a combined focal length of the first lens group T1, fT2 denotes a combined focal length of the second lens group T2, fT3 denotes a combined focal length of the third lens group T3, and fobj denotes a focal length of the microscope objective lens.
The microscope objective lens of the present embodiment has a system focal length of 7.2mm, a working distance of 2.05mm, and a numerical aperture of 1.03.
From the object side, the first surface of the first lens L1 is S1, and the surface of the last lens L14 away from the object plane is S22. The parameters of each lens of the microscope objective of the present embodiment include: the surface, radius, thickness, refractive index Nd and Abbe number Vd satisfy the conditions as shown in the following table 1:
TABLE 1
Where radius refers to the radius of curvature of the lens surface and thickness refers to the on-axis distance from the current surface to the next surface, e.g., the thickness of surface S1 is the distance from S1 to S2, which may be the on-axis thickness of the medium or lens, or the on-axis air gap between them.
Fig. 2 is a transverse aberration diagram of the 0 field of view of the microscope objective lens of example 1, in which abscissa PY and PX represent normalized entrance pupil size, ordinate represents transverse aberration, scale is ± 5 μm, Y direction is a meridional direction, and X direction is a sagittal direction.
FIG. 3 is a transverse aberration diagram of field 1 of view of the microscope objective lens of example 1, with a scale of + -5 μm, with a better imaging performance as the plot of the image is close to the horizontal axis.
Fig. 4 is a field curvature distortion plot of the microscope objective lens of example 1, with the left plot being a field curvature plot in which the ordinate represents the field of view and the abscissa represents the field curvature in μm. The axial difference between the optimal focus point of the edge view field and the optimal focus point of the central view field is less than 2 lambda/NA2The theoretical value meets the requirement of clear full-field and flat-field objective lens. The ordinate in the figure is the normalized field of view; the abscissa represents the field curvature with a maximum value of 10 μm and a minimum value of-10 μm. The distortion graph is shown on the right, wherein the ordinate represents the visual field, and the abscissa represents the distortion (percentage), and the distortion of the full visual field is less than 0.1%. In the figure, the ordinate is the normalized field of view and the abscissa represents the distortion, with a maximum of 1% and a minimum of-1%.
FIG. 5 is a graph showing the chromatic aberration of the microscope objective lens of example 1, which is better corrected for the chromatic aberration of the full wavelength curve, and the difference is smaller than λ/NA2。
Example 2
Referring to fig. 6, the microscope objective lens of the present embodiment includes, in order from the object side to the image side along the optical axis, a first lens group T1, a second lens group T2, and a third lens group T3. Mainly comprises 8 lens groups, and totally comprises 14 lenses. In the present embodiment, the first lens group T1 includes a first lens group G1, a second lens group and a third lens group in sequence. The first lens group G1 is a plano-convex lens with positive refractive power, and is a cemented lens group formed by a first lens L1 cemented with a second lens L2. The first lens L1 close to the object is a plano-convex lens, and the second lens L2 far from the object is a thick meniscus hyper-hemispherical lens. The second lens group is a meniscus third lens L3 with positive focal power, and its concave surface faces the object plane. The third lens group is a meniscus-shaped, positive-focal-power fourth lens L4, which is a biconvex lens. The above-described respective lenses are configured such that the first lens group T1 has positive refractive power.
The second lens group T2 includes a fourth lens group G2, a fifth lens group G3 and a sixth lens group G4 in this order. The fourth lens group G2 is a three-cemented lens group formed by a fifth lens L5, a sixth lens L6 and a seventh lens L7 cemented together, wherein two lenses have positive focal power, and one lens has negative focal power. The specific materials of the two lenses with positive optical power may be the same or different, but are both low dispersion materials. The fifth lens group G3 is a three cemented lens group consisting of an eighth lens L8, a ninth lens L9 and a tenth lens L10 cemented together, two of which have negative refractive power and one of which has positive refractive power. The materials of the two lenses with negative focal power can be the same or different, and the lens with positive focal power is a low dispersion material. The sixth lens group G4 is a double cemented lens group formed by cementing an eleventh lens L11 and a twelfth lens L12, the eleventh lens L11 closer to the object plane has positive power, and the twelfth lens L12 has negative power. The second lens group T2 is mainly used to correct chromatic aberration.
The third lens group T3 includes a seventh lens group and an eighth lens group in this order. The seventh lens group is a thick meniscus thirteenth lens L13 with a concave surface facing the object plane and a negative focal power, and the eighth lens group is a meniscus fourteenth lens L14 with a concave surface facing the object plane and a positive focal power, and is used for correcting curvature of field and increasing the field of view.
The microscope objective of the present embodiment comprises the following features:
d/fobj is 10.83; fobj ═ 7.2; NA 1.03; where D denotes the distance from the object plane to the last surface of the microscope objective lens (i.e., the surface S23 of the fourteenth lens L14 away from the object plane), fobj denotes the focal length of the microscope objective lens, and NA denotes the object-side numerical aperture of the microscope objective lens.
H2/H3| ═ 0.351; H2/H1| ═ 0.536; wherein H1 represents the highest projection height of the central field edge rays on the lens surfaces in all the lens groups, H2 represents the lowest projection height of the central field edge rays on the lens surfaces in all the lens groups, and H3 represents the projection height of the central field edge rays on the lens surface farthest from the object plane.
L fL1/fobj | ═ 2.174; l RL1/fobj | ═ infinity; wherein, fL1 represents the focal length of the first lens L1 of the first lens group T1, and the concave surface thereof faces the object plane; RL1 denotes the value of the radius of the object-facing side surface of the first lens L1; fobj denotes the focal length of the microscope objective.
1.348, | fT1/fobj |; 17.94 | fT2/fobj |; 91.2, | fT3/fobj |; where fT1 denotes a combined focal length of the first lens group T1, fT2 denotes a combined focal length of the second lens group T2, fT3 denotes a combined focal length of the third lens group T3, and fobj denotes a focal length of the microscope objective lens.
The working distance of the microscope objective lens of the embodiment is 2.01mm, and the working distance is the distance from the cover glass to the edge of the first lens group of the microscope objective lens. The apochromatic microscope objective with large visual field and large numerical aperture of the embodiment has a spectral range of 700nm-1400nm, a visual field range of 18 and a numerical aperture of 1.03. Since the ambient temperature or the thickness of the sample varies, or the cover glass used by the user varies, a set of lens elements, which is the fifth lens element G3 in this embodiment, is required for correcting the aberration.
The microscope objective lens of the present embodiment has a system focal length of 7.2mm, a working distance of 2.05mm, and a numerical aperture of 1.03.
From the object side, the first surface of the first lens L1 is S1, and the surface of the last lens L14 away from the object plane is S23. The parameters of each lens of the microscope objective of the present embodiment include: the surface, radius, thickness, refractive index Nd and Abbe number Vd satisfy the following conditions shown in the following table 2:
| surface of | Radius (mm) | Thickness (mm) | Refractive index Nd | Abbe number Vd |
| S23 | 14.225 | 4.2 | 1.56-1.77 | 31.5-52.1 |
| S22 | -5.827 | 0.25 | ||
| S21 | -5.654 | 7.46 | 1.44-1.83 | 25.2-94.9 |
| S20 | -30.960 | 5.75 | ||
| S19 | -9.314 | 7.36 | 1.77-1.85 | 32.3-49.6 |
| S18 | -55.850 | 5.15 | 1.44-1.64 | 55.4-94.9 |
| S17 | 12.216 | 1.05 | ||
| S16 | -17.144 | 1.5 | 1.59-1.68 | 32.2-49.6 |
| S15 | -27.239 | 7.5 | 1.44 | 94.9 |
| S14 | 16.597 | 1.5 | 1.59-1.68 | 32.2-49.6 |
| S13 | -55.264 | 0.82 | ||
| S12 | 15.757 | 7.10 | 1.44 | 94.9 |
| S11 | -85.422 | 1.5 | 1.59-1.68 | 32.2-49.6 |
| S10 | 23.533 | 6.75 | 1.44 | 94.9 |
| S9 | -98.418 | 0.15 | ||
| S8 | 26.533 | 4 | 1.44-1.65 | 67.4-94.9 |
| S7 | -88.781 | 0.15 | ||
| S6 | 12.453 | 3.55 | 1.44-1.65 | 67.4-94.9 |
| S5 | 25.415 | 0.15 | ||
| S4 | 10.786 | 8.55 | 1.71-1.92 | 30.1-51.2 |
| S3 | 5.123 | 0.92 | 1.46 | 67.8 |
| S2 | Infinity | 2.05 | 1.33 | 55.9 |
| S1 | Infinity | 0.17 | 1.53 | 56.0 |
TABLE 2
Where radius refers to the radius of curvature of a surface and thickness refers to the on-axis distance from the current surface to the next surface, e.g., the thickness of surface S1 is the distance from S1 to S2, which may be the on-axis thickness of the medium or lens, or the on-axis air gap between them.
Fig. 7 is a transverse aberration diagram of the 0 field of view of the microscope objective lens of example 2, in which abscissa PY and PX represent normalized entrance pupil size, ordinate represents transverse aberration, scale is ± 5 μm, Y direction is a meridional direction, and X direction is a sagittal direction.
FIG. 8 is a transverse aberration diagram of field 1 of the microscope objective lens of example 2, with a scale of + -5 μm, with a better imaging performance as the plot is close to the horizontal axis.
Fig. 9 is a field curvature distortion plot of the microscope objective lens of example 2, with the left plot being a field curvature plot in which the ordinate represents the field of view and the abscissa represents the field curvature in μm. The axial difference between the optimal focus point of the edge view field and the optimal focus point of the central view field is less than 2 lambda/NA2The theoretical value meets the requirement of clear full-field and flat-field objective lens. The ordinate in the figure is the normalized field of view; the abscissa represents the field curvature with a maximum value of 2 μm and a minimum value of-2 μm. The distortion graph is shown on the right, wherein the ordinate represents the field of view and the abscissa represents the distortion (percentage), and the distortion of the full field of view is less than 1%. In the figure, the ordinate is the normalized field of view and the abscissa represents the distortion, with a maximum of 1% and a minimum of-1%.
FIG. 10 is a graph showing the chromatic aberration of the microscope objective lens of example 1, which is better corrected for the chromatic aberration of the full wavelength curve, and the difference is smaller than λ/NA2。
Example 3
Referring to fig. 11, the microscope objective lens of the present embodiment includes, in order from the object side to the image side along the optical axis, a first lens group T1, a second lens group T2, and a third lens group T3. Mainly comprises 8 lens groups, and totally comprises 14 lenses. In the present embodiment, the first lens group T1 includes a first lens group G1, a second lens group and a third lens group in sequence. The first lens group G1 is a plano-convex lens with positive refractive power, and is a cemented lens group formed by a first lens L1 cemented with a second lens L2. The first lens L1 close to the object is a plano-convex lens, and the second lens L2 far from the object is a thick meniscus lens. The second lens group is a meniscus third lens L3 with positive focal power, and its concave surface faces the object plane. The third lens group is a fourth lens L4 with positive focal power, which is a plano-convex lens. The first lens group T1 provides positive optical power.
The second lens group T2 includes a fourth lens group G2, a fifth lens group G3 and a sixth lens group G4 in this order. The fourth lens group G2 is a triple cemented lens group formed by a fifth lens element L5, a sixth lens element L6 and a seventh lens element L7 cemented together. Wherein two lenses have positive optical power and one lens has negative optical power. The specific materials of the two lenses with positive optical power can be the same or different, but both are low dispersion materials. The fifth lens group G3 is a triple cemented lens group formed by cementing an eighth lens element L8, a ninth lens element L9 and a tenth lens element L10. Wherein two lenses have negative optical power and one lens has positive optical power. The materials of the two lenses with negative focal power can be the same or different; the material of the lens having positive optical power is a low dispersion material. The sixth lens group G4 is a double cemented lens group formed by cementing an eleventh lens element L11 and a twelfth lens element L12, wherein the eleventh lens element L11 located closer to the object plane has positive optical power, and the twelfth lens element L12 has negative optical power. The second lens group T2 is mainly used to correct chromatic aberration.
The third lens group T3 includes a seventh lens group and an eighth lens group in this order. The seventh lens group is a thick meniscus thirteenth lens with the concave surface facing the object plane L13, and the eighth lens group is a meniscus fourteenth lens with the concave surface facing the image plane L14. The third lens group T3 is mainly used to correct curvature of field and increase the field of view.
The microscope objective of the present embodiment comprises the following features:
d/fobj is 10.83; fobj ═ 7.2; NA 1.08; where D denotes the distance from the object plane to the last surface of the microscope objective lens (i.e., the surface S23 of the fourteenth lens L14 away from the object plane), fobj denotes the focal length of the microscope objective lens, and NA denotes the object-side numerical aperture of the microscope objective lens.
H2/H3| ═ 0.53; H2/H1| ═ 0.33; wherein H1 represents the highest projection height of the central field edge rays on the lens surfaces in all the lens groups, H2 represents the lowest projection height of the central field edge rays on the lens surfaces in all the lens groups, and H3 represents the projection height of the central field edge rays on the lens surface farthest from the object plane.
L fL1/fobj | ═ 2.174; l RL1/fobj | ═ infinity; wherein, fL1 represents the focal length of the first lens L1 of the first lens group T1, and the concave surface thereof faces the object plane; RL1 denotes the value of the radius of the surface facing the object; fobj denotes the focal length of the microscope objective.
1.416, | fT1/fobj |; if fT2/fobj is 4.45; 14.83, | fT3/fobj |; where fT1 denotes a combined focal length of the first lens group T1, fT2 denotes a combined focal length of the second lens group T2, fT3 denotes a combined focal length of the third lens group T3, and fobj denotes a focal length of the microscope objective lens.
The microscope objective lens of the present example has a system focal length of 7.2mm, a working distance of 2.05mm, and a numerical aperture of 1.08.
From the object side, the first surface of the first lens L1 is S1, and the surface of the last lens L14 away from the object plane is S23. The parameters of each lens of the microscope objective of the present embodiment include: the surface, radius, thickness, refractive index Nd and Abbe number Vd satisfy the following conditions shown in the following table 3:
TABLE 3
Where radius refers to the radius of curvature of a surface and thickness refers to the on-axis distance from the current surface to the next surface, e.g., the thickness of surface S1 is the distance from S1 to S2, which may be the on-axis thickness of the media or lens, or the on-axis air gap between them.
Fig. 12 is a transverse aberration diagram of the 0 field of view of the microscope objective lens according to embodiment 3, in which abscissa PY and PX represent normalized entrance pupil size, ordinate represents transverse aberration, scale is ± 5 μm, Y direction is a meridional direction, and X direction is a sagittal direction.
FIG. 13 is a transverse aberration diagram of field 1 of view of the microscope objective of example 3, with a scale of + -5 μm, with a better imaging performance as the plot is plotted along the horizontal axis.
FIG. 14 is a field curvature distortion plot of the microscope objective lens of example 3, with the left plot being a field curvature plot in which the ordinate represents the field of view and the abscissa represents the field curvature in μm. The axial difference between the optimal focus point of the edge view field and the optimal focus point of the central view field is less than 2 lambda/NA2The theoretical value meets the requirement of clear full-field and flat-field objective lens. The ordinate in the figure is the normalized field of view; the abscissa represents the field curvature with a maximum value of 5 μm and a minimum value of-5 μm. The distortion graph is shown on the right, wherein the ordinate represents the visual field, and the abscissa represents the distortion (percentage), and the distortion of the full visual field is less than 0.5%. In the figure, the ordinate is the normalized field of view and the abscissa represents the distortion, with a maximum of 1% and a minimum of-1%.
FIG. 15 is a graph showing the chromatic aberration of the microscope objective lens of example 3, which is better corrected for the chromatic aberration of the full wavelength curve, and the difference is smaller than λ/NA2。
Example 4
Referring to fig. 16, the microscope objective lens of the present embodiment includes, in order from the object side to the image side along the optical axis, a first lens group T1, a second lens group T2, and a third lens group T3. Mainly comprises 8 lens groups, and totally comprises 14 lenses. In the present embodiment, the first lens group T1 includes a first lens group G1, a second lens group and a third lens group in sequence. The first lens group G1 is a plano-convex lens with positive refractive power, and is a cemented lens group formed by a first lens L1 cemented with a second lens L2. The first lens L1 close to the object is a plano-convex lens, and the second lens L2 far from the object is a thick meniscus lens. The second lens group is a meniscus third lens L3 with positive focal power, and its concave surface faces the object plane. The third lens group is a meniscus fourth lens L4 with positive focal power, and its concave surface faces the object plane. The first lens group T1 provides positive optical power.
The second lens group T2 includes a fourth lens group G2, a fifth lens group G3 and a sixth lens group G4 in this order. The fourth lens group G2 is a triple cemented lens group formed by a fifth lens element L5, a sixth lens element L6 and a seventh lens element L7 cemented together. Wherein two lenses have positive optical power and one lens has negative optical power. The specific materials of the two lenses with positive optical power can be the same or different, but both are low dispersion materials. The fifth lens group G3 is a triple cemented lens group formed by cementing an eighth lens element L8, a ninth lens element L9 and a tenth lens element L10. Wherein two lenses have negative optical power and one lens has positive optical power. The materials of the two lenses with negative focal power can be the same or different; the material of the lens having positive optical power is a low dispersion material. The sixth lens group G4 is a double cemented lens group formed by cementing an eleventh lens element L11 and a twelfth lens element L12, wherein the eleventh lens element L11 located closer to the object plane has positive optical power, and the twelfth lens element L12 has negative optical power. The second lens group T2 is mainly used to correct chromatic aberration.
The third lens group T3 includes a seventh lens group and an eighth lens group in this order. The seventh lens group is a thick meniscus thirteenth lens with the concave surface facing the object plane L13, and the eighth lens group is a meniscus fourteenth lens with the concave surface facing the image plane L14. The third lens group T3 is mainly used to correct curvature of field and increase the field of view.
The microscope objective of the present embodiment comprises the following features:
d/fobj is 13; fobj ═ 6; NA 1.08; where D denotes the distance from the object plane to the last surface of the microscope objective lens (i.e., the surface S23 of the fourteenth lens L14 away from the object plane), fobj denotes the focal length of the microscope objective lens, and NA denotes the object-side numerical aperture of the microscope objective lens.
H2/H3| ═ 0.5; H2/H1| ═ 0.288; wherein H1 represents the highest projection height of the central field edge rays on the lens surfaces in all the lens groups, H2 represents the lowest projection height of the central field edge rays on the lens surfaces in all the lens groups, and H3 represents the projection height of the central field edge rays on the lens surface farthest from the object plane.
L fL1/fobj | ═ 1.116; l RL1/fobj | ═ infinity; wherein, fL1 represents the focal length of the first lens L1 of the first lens group T1, and the concave surface thereof faces the object plane; RL1 denotes the value of the radius of the object-facing side surface of the first lens L1; fobj denotes the focal length of the microscope objective.
I fT1/fobj i 1.511; l fT2/fobj | ═ 3.896; 17.7, | fT3/fobj |; where fT1 denotes a combined focal length of the first lens group T1, fT2 denotes a combined focal length of the second lens group T2, fT3 denotes a combined focal length of the third lens group T3, and fobj denotes a focal length of the microscope objective lens.
The microscope objective lens of this example had a system focal length f of 6mm, a working distance of 2mm, and a numerical aperture of 1.08.
From the object side, the first surface of the first lens L1 is S1, and the surface of the last lens L14 away from the object plane is S23. The parameters of each lens of the microscope objective of the present embodiment include: the surface, radius, thickness, refractive index Nd and Abbe number Vd satisfy the following conditions shown in the following table 4:
| surface of | Radius (mm) | Thickness (mm) | Refractive index Nd | Abbe number Vd |
| S23 | -67.345 | 3 | 1.63-1.92 | 31.5-52.1 |
| S22 | -25.038 | 0.5 | ||
| S21 | 9.478 | 7 | 1.44-1.83 | 25.2-94.9 |
| S20 | 5.033 | 5.3 | ||
| S19 | -5.326 | 4.9 | 1.63-1.92 | 31.5-52.1 |
| S18 | -19.182 | 7.6 | 1.44-1.65 | 55.4-94.9 |
| S17 | -9.815 | 1 | ||
| S16 | -161.730 | 1.5 | 1.59-1.68 | 32.2-49.6 |
| S15 | 9.613 | 10 | 1.44 | 94.9 |
| S14 | -11.719 | 1.5 | 1.59-1.68 | 32.2-49.6 |
| S13 | -24.656 | 0.85 | ||
| S12 | 16.869 | 5.8 | 1.44 | 94.9 |
| S11 | 80.472 | 1.5 | 1.59-1.68 | 32.2-49.6 |
| S10 | 13.503 | 10 | 1.44 | 94.9 |
| S9 | -35.884 | 0.15 | ||
| S8 | 13.232 | 4.5 | 1.44-1.65 | 67.4-94.9 |
| S7 | 53.751 | 0.15 | ||
| S6 | 8.811 | 4.5 | 1.44-1.65 | 67.4-94.9 |
| S5 | 11.483 | 0.15 | ||
| S4 | 6.753 | 4.4 | 1.71-1.92 | 30.1-51.2 |
| S3 | 9.532 | 0.8 | 1.46 | 67.8 |
| S2 | Infinity | 2.05 | 1.33 | 55.9 |
| S1 | Infinity | 0.17 | 1.53 | 56.0 |
TABLE 4
Where radius refers to the radius of curvature of a surface and thickness refers to the on-axis distance from the current surface to the next surface, e.g., the thickness of surface S1 is the distance from S1 to S2, which may be the on-axis thickness of the media or lens, or the on-axis air gap between them.
Fig. 17 is a transverse aberration diagram of the 0 field of view of the microscope objective lens according to embodiment 4, in which abscissa PY and PX represent normalized entrance pupil size, ordinate represents transverse aberration, scale is ± 5 μm, Y direction is a meridional direction, and X direction is a sagittal direction.
FIG. 18 is a transverse aberration diagram of field 1 of view of the microscope objective of example 4, with a scale of + -5 μm, with a better imaging performance as the plot is plotted against the horizontal axis.
FIG. 19 is a field curvature distortion plot for the microscope objective lens of example 4, with the left plot being a field curvature plot in which the ordinate represents the field of view and the abscissa represents the field curvature in μm. The axial difference between the optimal focus point of the edge view field and the optimal focus point of the central view field is less than 2 lambda/NA2The theoretical value meets the requirement of clear full-field and flat-field objective lens. The ordinate in the figure is the normalized field of view; the abscissa represents the field curvature with a maximum value of 5 μm and a minimum value of-5 μm. The distortion graph is shown on the right, wherein the ordinate represents the visual field, and the abscissa represents the distortion (percentage), and the distortion of the full visual field is less than 0.5%. In the figure, the ordinate is the normalized field of view and the abscissa represents the distortion, with a maximum of 1% and a minimum of-1%.
FIG. 20 is a graph showing the chromatic aberration of the microscope objective lens of example 4, which is better corrected for the chromatic aberration of the full wavelength curve, and the difference is smaller than λ/NA2。
Since the ambient temperature or the thickness of the sample varies, or the cover glass used by the user varies, a set of lens elements, which is the fifth lens element G3 in this embodiment, is required for correcting the aberration.
Example 5
Referring to fig. 21, the microscope objective lens of the present embodiment includes, in order from the object side to the image side along the optical axis, a first lens group T1, a second lens group T2, and a third lens group T3. Mainly comprises 8 lens groups, and totally comprises 12 lenses. In the present embodiment, the first lens group T1 includes a first lens group G1, a second lens group and a third lens group in sequence. The first lens group G1 is a plano-convex lens L1 with positive focal power, and the surface close to the object side is a plane. The second lens group is a meniscus second lens L2 with positive focal power, and its concave surface faces the object plane. The third lens group is a double-convex lens L3 having positive refractive power. The first lens group T1 provides positive optical power.
The second lens group T2 includes a fourth lens group G2, a fifth lens group G3 and a sixth lens group in this order. The fourth lens group G2 is a triple cemented lens group formed by a fourth lens element L4, a fifth lens element L5 and a sixth lens element L6 cemented together. Wherein two lenses have positive optical power and one lens has negative optical power. The specific materials of the two lenses with positive optical power can be the same or different, but both are low dispersion materials. The fifth lens group G3 is a triple cemented lens group formed by a seventh lens element L7, an eighth lens element L8 and a ninth lens element L9 cemented together. Wherein two lenses have negative optical power and one lens has positive optical power. The materials of the two lenses with negative focal power can be the same or different; the material of the lens having positive optical power is a low dispersion material. The sixth lens group is a thick meniscus tenth lens L10 with the concave surface facing the image plane. The second lens group T2 is mainly used to correct chromatic aberration.
The third lens group T3 includes a seventh lens group and an eighth lens group in this order. The seventh lens group is an eleventh lens L11 with a thick meniscus shape and a concave surface facing the object plane, and the eighth lens group is a twelfth lens L12 with a meniscus shape and a concave surface facing the image plane. The third lens group T3 is mainly used to correct curvature of field and increase the field of view.
The microscope objective of the present embodiment comprises the following features:
d/fobj 8.667; fobj is 9; NA is 0.93; where D denotes the distance from the object plane to the last surface of the microscope objective lens (i.e., the surface S21 of the twelfth lens L12 away from the object plane), fobj denotes the focal length of the microscope objective lens, and NA denotes the object-side numerical aperture of the microscope objective lens.
H2/H3| ═ 0.5; H2/H1| ═ 0.39; wherein H1 represents the highest projection height of the central field edge rays on the lens surfaces in all the lens groups, H2 represents the lowest projection height of the central field edge rays on the lens surfaces in all the lens groups, and H3 represents the projection height of the central field edge rays on the lens surface farthest from the object plane.
1.68, | fL1/fobj |; l RL1/fobj | ═ infinity; wherein, fL1 represents the focal length of the first lens L1 of the first lens group T1, and the concave surface thereof faces the object plane; RL1 denotes the value of the radius of the object-facing side surface of the first lens L1; fobj denotes the focal length of the microscope objective.
1.296, | fT1/fobj |; 6.34, | fT2/fobj |; i fT3/fobj i 23.761; where fT1 denotes a combined focal length of the first lens group T1, fT2 denotes a combined focal length of the second lens group T2, fT3 denotes a combined focal length of the third lens group T3, and fobj denotes a focal length of the microscope objective lens.
The microscope objective lens of this example had a system focal length f of 9mm, a working distance of 2mm, and a numerical aperture of 0.93.
From the object side, the first surface of the first lens L1 is S1, and the surface of the last lens L12 away from the object plane is S21. The parameters of each lens of the microscope objective of the present embodiment include: the surface, radius, thickness, refractive index Nd and Abbe number Vd satisfy the following conditions shown in the following table 5:
| surface of | Radius (mm) | Thickness (mm) | Refractive index Nd | Abbe number Vd |
| S21 | -266.454 | 3 | 1.63-1.92 | 31.5-52.1 |
| S20 | -47.166 | 0.15 | ||
| S19 | 11.935 | 10 | 1.44-1.83 | 25.2-94.9 |
| S18 | 5.053 | 5 | ||
| S17 | -6.730 | 8.3 | 1.63-1.92 | 31.5-52.1 |
| S16 | -9.313 | 0.8 | ||
| S15 | -26.901 | 1.5 | 1.59-1.68 | 32.2-49.6 |
| S14 | 14.727 | 9 | 1.44 | 94.9 |
| S13 | -10.829 | 1.5 | 1.59-1.68 | 32.2-49.6 |
| S12 | -14.963 | 0.7 | ||
| S11 | 37.360 | 5 | 1.44 | 94.9 |
| S10 | -33.396 | 1.5 | 1.59-1.68 | 32.2-49.6 |
| S9 | 23.875 | 8 | 1.44 | 94.9 |
| S8 | -20.099 | 0.15 | ||
| S7 | 23.426 | 4.5 | 1.44-1.65 | 67.4-94.9 |
| S6 | -77.988 | 0.15 | ||
| S5 | 16.623 | 3.5 | 1.44-1.65 | 67.4-94.9 |
| S4 | 28.516 | 0.15 | ||
| S3 | 12.443 | 11 | 1.71-1.92 | 30.1-51.2 |
| S2 | Infinity | 2.05 | 1.33 | 55.9 |
| S1 | Infinity | 0.17 | 1.53 | 56.0 |
TABLE 5
Where radius refers to the radius of curvature of a surface and thickness refers to the on-axis distance from the current surface to the next surface, e.g., the thickness of surface S1 is the distance from S1 to S2, which may be the on-axis thickness of the media or lens, or the on-axis air gap between them.
Fig. 22 is a transverse aberration diagram of the 0 field of view of the microscope objective lens according to embodiment 5, in which abscissa PY and PX represent normalized entrance pupil size, ordinate represents transverse aberration, scale is ± 5 μm, Y direction is a meridional direction, and X direction is a sagittal direction.
FIG. 23 is a transverse aberration diagram of field 1 of view of the microscope objective of example 5, with a scale of + -5 μm, with a better imaging performance as the plot is plotted along the horizontal axis.
FIG. 24 is a field curvature distortion diagram of the microscope objective lens of example 5, in which the left is a field curvature diagram and the ordinate represents the viewThe field, the abscissa, represents the field curvature in μm. The axial difference between the optimal focus point of the edge view field and the optimal focus point of the central view field is less than 2 lambda/NA2The theoretical value meets the requirement of clear full-field and flat-field objective lens. The ordinate in the figure is the normalized field of view; the abscissa represents the field curvature with a maximum value of 5 μm and a minimum value of-5 μm. The distortion graph is shown on the right, wherein the ordinate represents the visual field, and the abscissa represents the distortion (percentage), and the distortion of the full visual field is less than 0.1%. In the figure, the ordinate is the normalized field of view and the abscissa represents the distortion, with a maximum of 1% and a minimum of-1%.
FIG. 25 is a graph showing the chromatic aberration of the microscope objective lens of example 5, which is better corrected for the chromatic aberration of the full wavelength curve, and the difference is smaller than λ/NA2。
Since the ambient temperature or the thickness of the sample varies, or the cover glass used by the user varies, a lens group, which is the fourth lens group G2 in this embodiment, is required to correct the aberration.
The above description is only one embodiment of the present invention, and is not intended to limit the present invention, and it will be apparent to those skilled in the art that various modifications and variations can be made in the present invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (14)
1. A microscope objective lens comprising, in order from an object side to an image side along an optical axis: a first lens group (T1) having positive optical power and a second lens group (T2) having positive optical power, characterized by further comprising: a third lens group (T3) having negative or positive power,
the first lens group (T1) at least comprises a lens with positive focal power;
the second lens group (T2) comprises at least one cemented lens group;
the third lens group (T3) comprises a lens group with positive optical power and a lens group with negative optical power.
2. Microscope objective according to claim 1, characterized in that, in the direction of the optical axis from the object side to the image side,
the first lens group (T1) comprises a first lens group (G1) and a second lens group, and the first lens group (G1) is a cemented lens group or a plano-convex lens;
the second lens group comprises one or two lenses with positive focal power.
3. Microscope objective according to claim 2, characterized in that, in the direction of the optical axis from the object side to the image side,
the rear surface of the first lens group (G1) is bent to the object plane;
the lenses of the second lens group are meniscus lenses, plano-convex lenses or biconvex lenses.
4. Microscope objective according to claim 1, characterized in that the cemented lens group of the second lens group (T2) is a double cemented lens group consisting of two cemented lenses or a triple cemented lens group consisting of three cemented lenses.
5. Microscope objective according to claim 1, characterized in that the lens group of the third lens group (T3) with negative optical power is close to the object plane.
6. Microscope objective according to claim 5, characterized in that the two lens groups of the third lens group (T3) are both single lens and/or cemented lens groups.
7. Microscope objective according to one of claims 1 to 6, characterized in that the distance D from the object plane to the rearmost surface of the microscope objective in the direction of the optical axis from the object side to the image side and the focal length fobj of the microscope objective satisfy the relation: 9< D/fobj < 14.
8. Microscope objective according to one of claims 1 to 6, characterized in that the objective-side numerical aperture NA of the microscope objective satisfies the relation: 0.8< NA < 1.2.
9. A microscope objective according to any one of claims 1 to 6, characterized in that the central field edge rays satisfy the relation between the highest projection height H1 of the lens surfaces in all the lens groups and the central field edge rays satisfy the relation H2 of the lowest projection height of the lens surfaces in all the lens groups: 0.1< | H2/H1| < 0.8;
the projection height of the central field edge ray between the lowest projection height H2 of the lens surfaces in all the lens groups and the projection height H3 of the central field edge ray of the lens surfaces farthest from the object plane satisfy the following relation: 0.3< | H2/H3| <1.
10. The microscope objective lens according to any one of claims 1 to 6, characterized in that, in a direction from an object side to an image side along an optical axis, a concave surface of the first lens (L1) of the first lens group (T1) faces an object plane, and a focal length fL1 of the first lens (L1) and a focal length fobj of the microscope objective lens satisfy the relation: 1< | fL1/fobj |;
the radius value RL1 of the surface of the first lens (L1) facing the object side and the focal length fobj of the microscope objective lens satisfy the relation: l RL1/fobj | ═ infinity.
11. The microscope objective of any one of claims 1 to 6, characterized in that the combined focal length fT1 of the first lens group (T1) and the focal length fobj of the microscope objective satisfy the relation: 1< | fT1/fobj |.
12. The microscope objective of any one of claims 1 to 6, characterized in that the combined focal length fT2 of the second lens group (T2) and the focal length fobj of the microscope objective satisfy the relation: 1< | fT2/fobj | < 25.
13. The microscope objective of any one of claims 1 to 6, characterized in that the combined focal length fT3 of the third lens group (T3) and the focal length fobj of the microscope objective satisfy the relation: 1< | fT3/fobj |.
14. Microscope objective according to any one of claims 1 to 6, characterized in that the working distance of the microscope objective is up to 2mm and above, including a working distance of 0mm to 2 mm.
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