CN107505696A - Flat field apochromatic micro objective - Google Patents

Flat field apochromatic micro objective Download PDF

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Publication number
CN107505696A
CN107505696A CN201710831242.9A CN201710831242A CN107505696A CN 107505696 A CN107505696 A CN 107505696A CN 201710831242 A CN201710831242 A CN 201710831242A CN 107505696 A CN107505696 A CN 107505696A
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lens
flat field
micro objective
obj
focal length
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CN107505696B (en
Inventor
薛金来
陈长征
张星祥
聂婷
毕国玲
任建岳
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/02—Objectives

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
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Abstract

The present invention relates to a kind of flat field apochromatic micro objective, belongs to optical technical field, including from the first lens that object space to image space sequentially coaxially arranges to the tenth lens；First lens are the packaged lens with positive light coke；Second lens are the concave-convex lens with positive light coke；3rd lens and the 5th lens are biconvex lens, and the 4th lens are biconcave lens, and the 3rd lens, the 4th lens and the 5th lens composition have three balsaming lens groups of positive light coke；6th lens are the biconvex lens with positive light coke；7th lens are biconvex lens, and the 8th lens are biconcave lens, and the 7th lens and the 8th lens composition have the double agglutination lens group of negative power；9th lens are the meniscus lens with negative power；Tenth lens are the concave-convex lens with negative power.The microcobjective has large-numerical aperture and field range, realizes more proper flat field apochromatism design, and simple in construction, reasonable in design, easily fabricated.

Description

Flat field apochromatic micro objective
Technical field
The present invention relates to optical technical field, more particularly to a kind of flat field apochromatic micro objective.
Background technology
Microcobjective is the important component of light microscope, while is also the major contributing portion of microscope imaging performance Part, at present, large aperture, high-resolution microcobjective are burnt in Fluorescent intravital microscopy, utilizing total internal reflection fluorescence microscope and copolymerization Suffer from important application in microscope, and the development trend of current micro-imaging technique have to microcobjective bigger visual field, It is higher as the requirement of matter.Current all kinds of microcobjectives existing in the world, but the numerical aperture for the dry mirror that can technically reach at present Footpath can not also meet requirement of each field to the high imaging quality and large-numerical aperture of microcobjective typically 0.65 or so, because This further improves the research of the image quality of microcobjective and numerical aperture for every field and is all of great significance.
The content of the invention
Based on this, it is necessary to it is smaller for the numerical aperture of microcobjective in the prior art, every field pair can not be met The problem of requirement of the high imaging quality of microcobjective and large-numerical aperture, there is provided a kind of flat field apochromatic micro objective, this Invent the large aperture flat field apochromatic micro objective proposed and disclosure satisfy that requirement of each field to microcobjective.
To solve the above problems, the present invention takes following technical scheme：
A kind of flat field apochromatic micro objective, including sequentially coaxially arranged from object space to image space the first lens, second Lens, the 3rd lens, the 4th lens, the 5th lens, the 6th lens, the 7th lens, the 8th lens, the 9th lens and the tenth are saturating Mirror, first lens to the tenth lens collectively form flat field apochromatic micro objective,
First lens are the packaged lens with positive light coke；Second lens are the bumps with positive light coke Lens；3rd lens and the 5th lens are biconvex lens, and the 4th lens are biconcave lens, and described 3rd saturating Mirror, the three balsaming lens groups of the 4th lens and the 5th lens composition with positive light coke；6th lens are tool There is the biconvex lens of positive light coke；7th lens are biconvex lens, and the 8th lens are biconcave lens, and the described 7th The double agglutination lens group of lens and the 8th lens composition with negative power；9th lens are with negative power Meniscus lens；Tenth lens are the concave-convex lens with negative power；
Depth of focus δ, numerical aperture N.A. and the enlargement ratio M of the flat field apochromatic micro objective meet following relation Formula：
Wherein, ω is discernable by eye rate, wavelength centered on λ.
Above-mentioned flat field apochromatic micro objective is a kind of new large-numerical aperture micro objective, is realized more strict Flat field apochromatism design in meaning, solves the small problem of middle low magnification microscope numerical aperture and field range, so as to Can meet the needs of each field is to large-numerical aperture micro objective, and the flat field apochromatic micro objective of the present invention is whole Using spheric glass, it is fully able in existing processing and under characterization processes realize, and it is simple in construction, it is reasonable in design, it is easy to make Make, meet the requirement produced in enormous quantities.
Brief description of the drawings
Fig. 1 is the structural representation of flat field apochromatic micro objective in the one of embodiment of the present invention；
Fig. 2 is the full filed lateral aberration curve map of flat field apochromatic micro objective in example one；
Fig. 3 is the chromosphere dygoram (a) of flat field apochromatic micro objective in example one, astigmatism curve map (b) and abnormal Varied curve figure (c)；
Fig. 4 is the transfer curve figure of flat field apochromatic micro objective in example one；
Fig. 5 is the diffraction energy scatter chart of flat field apochromatic micro objective in example one；
Fig. 6 is the ripple difference figure of flat field apochromatic micro objective in example one.
Embodiment
Technical scheme is described in detail below in conjunction with accompanying drawing and preferred embodiment.
In one of the embodiments, as shown in figure 1, flat field apochromatic micro objective includes the first lens L1, second Lens L2, the 3rd lens L3, the 4th lens L4, the 5th lens L5, the 6th lens L6, the 7th lens L7, the 8th lens L8, the 9th Lens L9 and the tenth lens L10, and the first lens L1 to the tenth lens L10 optical axis coincidence, the first lens L1 to the tenth are saturating Mirror L10 sequentially coaxially arranges from object space to image space, and the first lens L1 together constitutes the flat field of the present embodiment to the tenth lens L10 Apochromatic micro objective.
In the present embodiment, the first lens L1 is the packaged lens (or thick meniscus lens) with positive light coke, before formation Bright face is prepared, the present embodiment not only produces field using packaged lens (or thick meniscus lens) and causes flat effect, and can effectively reduce Spherical aberration and coma；Second lens L2 is the concave-convex lens with positive light coke, and it is that concave surface is leaned on close to the surface of image space side, closely The surface of object space side is convex surface, and the second lens L2 is mainly used in correcting coma；3rd lens L3 and the 5th lens L5 is biconvex Lens, the 4th lens L4 is biconcave lens, and the 3rd lens L3, the 4th lens L4 and the 5th lens L5 compositions have positive light focus Three balsaming lens group G1 of degree；6th lens L6 is the biconvex lens with positive light coke；7th lens L7 is biconvex lens, the Eight lens L8 are biconcave lens, and the 7th lens L7 and the 8th lens L8 compositions have the double agglutination lens group G2 of negative power； 9th lens L9 is the meniscus lens with negative power；Tenth lens L10 is the concave-convex lens with negative power.Double gluings Lens group G2, the 9th lens L9 and the tenth lens L10 are mainly used in correcting the curvature of field and distortion.
Meanwhile in the present embodiment, depth of focus δ, numerical aperture N.A. and the enlargement ratio M of flat field apochromatic micro objective Meet relationship below：
Wherein, ω is the discernable by eye rate of human eye, and λ is centre wavelength when flat field apochromatic micro objective works.
The flat field apochromatic micro objective that the present embodiment is proposed is to spherical aberration, coma, astigmatism, the curvature of field, distortion, position color Difference and ratio chromatism, have good correction, and the axial chromatic aberration between full aperture C ' light, e light, F ' light and g light is less than or equal to
Above-mentioned flat field apochromatic micro objective is a kind of new large-numerical aperture micro objective, is realized more strict Flat field apochromatism design in meaning, solves the small problem of middle low magnification microscope numerical aperture and field range, so as to Can meet the needs of each field is to large-numerical aperture micro objective, and the flat field apochromatic micro objective of the present invention is whole Using spheric glass, it is fully able in existing processing and under characterization processes realize, and it is simple in construction, it is reasonable in design, it is easy to make Make, meet the requirement produced in enormous quantities.
As a kind of specific embodiment, the first lens L1 meets relationship below：
0.45 ＜ r1/fobj＜ 0.6
Wherein, r1For the radius of curvature of the first lens L1 object space side surface, fobjFor flat field apochromatic micro objective Focal length.
As a kind of specific embodiment, the second lens L2 meets relationship below：
1.67 ＜ fL2/fobj＜ 2.33
Wherein, fL2For the second lens L2 focal length, fobjFor the focal length of flat field apochromatic micro objective.
As a kind of specific embodiment, meet relationship below in the 4th lens L4：
1.6 ＜ ne＜ 1.63
35 ＜ ve＜ 45
Wherein, neFor refractive indexes of the 4th lens L4 in spectrum line e=546.074nm, veIt is the 4th lens L4 in spectrum Abbe number during line e=546.074nm.
As a kind of specific embodiment, the 6th lens L6 meets relationship below：
3.18 ＜ fL6/fobj＜ 4.71
Wherein, fL6For the 6th lens L6 focal length, fobjFor the focal length of flat field apochromatic micro objective.
As a kind of specific embodiment, double agglutination lens group G2 meets relationship below：
0.8 ＜ fG2/fobj＜ 2.5
Wherein, fG2For double agglutination lens group G2 focal length, fobjFor the focal length of flat field apochromatic micro objective.
As a kind of specific embodiment, the 9th lens L9 meets relationship below：
- 3 ＜ fL9/fobj＜ -2.1
Wherein, fL9For the 9th lens L9 focal length, fobjFor the focal length of flat field apochromatic micro objective.
As a kind of specific embodiment, the tenth lens L10 meets relationship below：
2.44 ＜ fL10/fobj＜ 4.1
Wherein, fL10For the tenth lens L10 focal length, fobjFor the focal length of flat field apochromatic micro objective.
Pass through each embodiment more than implementing, it is possible to achieve the optimization to flat field apochromatic micro objective, and And keep the structure type of flat field apochromatic micro objective constant in optimization process, so as to effectively eliminate aberration.
Flat field apochromatic micro objective proposed by the invention is carried out specifically with reference to specific structural parameters It is bright.
Example one：Since the tenth lens L10 image space, by each lens being arranged in order from image space to object space or thoroughly The surface of microscope group is numbered, and concrete structure parameter is as shown in table 1.
Table 1
Number in face Radius of curvature/mm Thickness/mm Refractive index Abbe number
1 11.9308 3.4693 1.75 27.58
2 36.1812 0.4449
3 16.9237 2 1.68 31.18
4 7.3102 5.0796
5 -8.1232 1.8 1.73 28.25
6 29.7912 3.893 1.43 95.16
7 -10.1394 0.0996
8 22.4724 2.66 1.75 27.58
9 -149.0062 0.1
10 14.8331 4.7229 1.43 95.16
11 -13.1687 1.5 1.61 44.09
12 13 3.8663 1.43 95.16
13 -19.9569 0.1
14 9.2056 3.594 1.52 76.98
15 55.3775 0.1
16 8.341 6.8 1.78 47.49
17 5.3642 0.6
18 Plane 0.17 1.52 59.48
It is disappearing for 180mm that flat field apochromatic micro objective based on the concrete structure parameter listed by table 1, which can match somebody with somebody complex focus, Aberration Guan Jing is used.
The parameter of flat field apochromatic micro objective based on the concrete structure parameter listed by table 1 is as follows：
Numerical aperture (N.A.)=0.75；
Focal length fobj=9mm；
Enlargement ratio M=20 ×；
Linear field diameter D=26.5mm.
Fig. 2 is the full filed lateral aberration curve map of flat field apochromatic micro objective in example one, and abscissa is in figure Entrance pupil aperture is normalized, ordinate represents lateral aberration, and it is 0.02mm that ordinate ± 0.02mm, which represents ordinate maximum, minimum Value is -0.02mm.Left hand view (a) is the meridian direction aberration of (1.00,0.8,0.71,0.5,0) under each relative visual field in Fig. 2 Curve, right part of flg (b) are the sagitta of arc direction aberration curve that relative visual field is corresponding with left hand view (a).Wavelength used in Fig. 2 Respectively C ' light, e light, F ' light and g light, wavelength 643.8469nm are C ' light, and wavelength 546.0740nm is e light, wavelength 479.9914nm is F ' light, and wavelength 435.8343nm is g light.
Fig. 3 be the chromosphere dygoram (a) of the flat field apochromatic micro objective in example one, astigmatism curve map (b) and Distortion curve figure (c).Figure (a) is chromosphere dygoram, and its ordinate is normalization Entry pupil diameters, and abscissa is spherochromatism, by Figure (a) understands that the axial chromatic aberration between each wavelength has obtained well-corrected, and second order spectrum is worth much smaller than as defined in apochromatism；Figure (b) it is astigmatism, curvature of field curve map, its ordinate is visual field, and abscissa is meridian light and sagitta of arc deviation of light amount；Figure (c) is distortion Curve map, its ordinate are visual field, and abscissa is distortion ratio, are known by scheming (c), the micro- thing of flat field apochromatism in example one The distortion of mirror is less than 0.9%.
Fig. 4 is the transfer curve figure of the flat field apochromatic micro objective in example one, and ordinate is optics in figure The value of transmission function (MTF), abscissa are spatial frequency, and as seen from the figure, optical design cut-off frequency reaches 3355lp/mm, light Transfer curve is learned close to diffraction limit, shows that flat field apochromatic micro objective has excellent image quality.
Fig. 5 is the diffraction energy scatter chart of the flat field apochromatic micro objective in example one, and ordinate is in figure Disc of confusion energy percentage, abscissa are disperse spot diameter, and as seen from the figure, disc of confusion energy 90% concentrates on 2.3 μm of energy In circle, show that flat field apochromatic micro objective has very high encircled energy.
Fig. 6 is the ripple difference figure of the flat field apochromatic micro objective in example one, and the ripple difference figure is characterized at entrance pupil Actual wavefront face and the deviation on preferable corrugated, with wavelength (λ) for unit.The ripple difference about λ of flat field apochromatic micro objective/ 13, close to preferable corrugated.
Example two：Since the tenth lens L10 image space, by each lens being arranged in order from image space to object space or thoroughly The surface of microscope group is numbered, and concrete structure parameter is as shown in table 2.
Table 2
Number in face Radius of curvature/mm Thickness/mm Refractive index Abbe number
1 14.8203 3.2988 1.75 27.58
2 118.6351 0.1
3 15.0857 2 1.68 31.11
4 7.7327 5.0115
5 -8.2178 1.8 1.73 28.25
6 58 3.6156 1.43 95.16
7 -9.5534 0.9936
8 15.8585 3.132 1.75 27.58
9 31.575 0.5
10 15.1442 5 1.43 95.16
11 -11.7758 1.5 1.61 44.09
12 13 3.4705 1.43 95.16
13 -20.6979 0.1
14 9.7224 2.8077 1.52 76.98
15 94.0141 0.1
16 7.0081 6.8 1.78 47.49
17 4.765 0.6
18 Plane 0.17 1.52 59.48
It is disappearing for 180mm that flat field apochromatic micro objective based on the concrete structure parameter listed by table 2, which can match somebody with somebody complex focus, Aberration Guan Jing is used.
The parameter of flat field apochromatic micro objective based on the concrete structure parameter listed by table 2 is as follows：
Numerical aperture (N.A.)=0.75；
Focal length fobj=9mm；
Enlargement ratio M=20 ×；
Linear field diameter D=26.5mm.
Example three：Since the tenth lens L10 image space, by each lens being arranged in order from image space to object space or thoroughly The surface of microscope group is numbered, and concrete structure parameter is as shown in table 3.
Table 3
Number in face Radius of curvature/mm Thickness/mm Refractive index Abbe number
1 12.6642 3.4924 1.75 27.58
2 52.01904 0.7217
3 21.9365 2 1.65 33.65
4 7.5837 4.8807
5 -8.3361 2.0701 1.73 28.25
6 24.6259 4.1392 1.43 95.16
7 -10.039 0.1
8 19.9966 5.07586 1.75 27.58
9 1044.295 0.5
10 14.4643 4.9432 1.43 95.16
11 -13.5973 1.5 1.61 44.09
12 13 4 1.43 95.16
13 -20 0.1
14 9.1288 3.5564 1.52 76.98
15 30 0.1
16 7.8062 6.8 1.78 47.49
17 5.4503 0.6
18 Plane 0.17 1.52 59.48
It is disappearing for 180mm that flat field apochromatic micro objective based on the concrete structure parameter listed by table 3, which can match somebody with somebody complex focus, Aberration Guan Jing is used.
The parameter of flat field apochromatic micro objective based on the concrete structure parameter listed by table 3 is as follows：
Numerical aperture (N.A.)=0.75；
Focal length fobj=9mm；
Enlargement ratio M=20 ×；
Linear field diameter D=26.5mm.
The invention provides a kind of new large-numerical aperture micro objective, realizes more proper flat field and answers Achromat-design, solves the small problem of middle low magnification microscope numerical aperture and field range, to meet each field to big number It is worth the demand of aperture micro objective.The numerical aperture of flat field apochromatic micro objective provided by the present invention is 0.75, amplification Multiplying power is 20 times, and a diameter of 26.5mm of image space linear field, pipe mirror focal length is 180mm workable for the micro objective, and this is micro- Object lens are all using spheric glass, and in existing processing with being fully able to realize under characterization processes, and the present invention is simple in construction, if Meter is reasonable, easily fabricated, meets the requirement produced in enormous quantities.
Each technical characteristic of embodiment described above can be combined arbitrarily, to make description succinct, not to above-mentioned reality Apply all possible combination of each technical characteristic in example to be all described, as long as however, the combination of these technical characteristics is not deposited In contradiction, the scope that this specification is recorded all is considered to be.
Embodiment described above only expresses the several embodiments of the present invention, and its description is more specific and detailed, but simultaneously Can not therefore it be construed as limiting the scope of the patent.It should be pointed out that come for one of ordinary skill in the art Say, without departing from the inventive concept of the premise, various modifications and improvements can be made, these belong to the protection of the present invention Scope.Therefore, the protection domain of patent of the present invention should be determined by the appended claims.

Claims (8)

  1. A kind of 1. flat field apochromatic micro objective, it is characterised in that including sequentially coaxially arranged from object space to image space first Lens (L1), the second lens (L2), the 3rd lens (L3), the 4th lens (L4), the 5th lens (L5), the 6th lens (L6), Seven lens (L7), the 8th lens (L8), the 9th lens (L9) and the tenth lens (L10), first lens (L1) to described the Ten lens (L10) collectively form flat field apochromatic micro objective,
    First lens (L1) are the packaged lens with positive light coke；Second lens (L2) are with positive light coke Concave-convex lens；3rd lens (L3) and the 5th lens (L5) are biconvex lens, and the 4th lens (L4) are concave-concave Lens, and the 3rd lens (L3), the 4th lens (L4) and the 5th lens (L5) composition have positive light coke Three balsaming lens groups (G1)；6th lens (L6) are the biconvex lens with positive light coke；7th lens (L7) are Biconvex lens, the 8th lens (L8) are biconcave lens, and the 7th lens (L7) and the 8th lens (L8) form Double agglutination lens group (G2) with negative power；9th lens (L9) are the meniscus lens with negative power；It is described Tenth lens (L10) are the concave-convex lens with negative power；
    Depth of focus δ, numerical aperture N.A. and the enlargement ratio M of the flat field apochromatic micro objective meet relationship below：
    <mrow> <mi>&amp;delta;</mi> <mo>&amp;le;</mo> <mfrac> <mrow> <mi>&amp;omega;</mi> <mo>&amp;times;</mo> <mn>25000</mn> </mrow> <mrow> <mi>N</mi> <mo>.</mo> <mi>A</mi> <mo>.</mo> <mo>&amp;times;</mo> <mi>M</mi> </mrow> </mfrac> <mo>+</mo> <mfrac> <mi>&amp;lambda;</mi> <mrow> <mn>2</mn> <msup> <mrow> <mo>(</mo> <mi>N</mi> <mo>.</mo> <mi>A</mi> <mo>.</mo> <mo>)</mo> </mrow> <mn>2</mn> </msup> </mrow> </mfrac> </mrow>
    Wherein, ω is discernable by eye rate, wavelength centered on λ.
  2. 2. flat field apochromatic micro objective according to claim 1, it is characterised in that first lens (L1) meet Relationship below：
    0.45 ＜ r1/fobj＜ 0.6
    Wherein, r1For the radius of curvature of the object space side surface of first lens (L1), fobjIt is micro- for the flat field apochromatism The focal length of object lens.
  3. 3. flat field apochromatic micro objective according to claim 1 or 2, it is characterised in that second lens (L2) Meet relationship below：
    1.67 ＜ fL2/fobj＜ 2.33
    Wherein, fL2For the focal length of second lens (L2), fobjFor the focal length of the flat field apochromatic micro objective.
  4. 4. flat field apochromatic micro objective according to claim 1 or 2, it is characterised in that the 4th lens (L4) Inside meet relationship below：
    1.6 ＜ ne＜ 1.63
    35 ＜ ve＜ 45
    Wherein, neFor refractive index of the 4th lens (L4) in spectrum line e=546.074nm, veFor the 4th lens (L4) Abbe number in spectrum line e=546.074nm.
  5. 5. flat field apochromatic micro objective according to claim 1 or 2, it is characterised in that the 6th lens (L6) Meet relationship below：
    3.18 ＜ fL6/fobj＜ 4.71
    Wherein, fL6For the focal length of the 6th lens (L6), fobjFor the focal length of the flat field apochromatic micro objective.
  6. 6. flat field apochromatic micro objective according to claim 1 or 2, it is characterised in that the double agglutination lens group (G2) relationship below is met：
    0.8 ＜ fG2/fobj＜ 2.5
    Wherein, fG2For the double agglutination lens group (G2) focal length, fobjFor the focal length of the flat field apochromatic micro objective.
  7. 7. flat field apochromatic micro objective according to claim 1 or 2, it is characterised in that the 9th lens (L9) Meet relationship below：
    - 3 ＜ fL9/fobj＜ -2.1
    Wherein, fL9For the focal length of the 9th lens (L9), fobjFor the focal length of the flat field apochromatic micro objective.
  8. 8. flat field apochromatic micro objective according to claim 1 or 2, it is characterised in that the tenth lens (L10) Meet relationship below：
    2.44 ＜ fL10/fobj＜ 4.1
    Wherein, fL10For the focal length of the tenth lens (L10), fobjFor the focal length of the flat field apochromatic micro objective.
CN201710831242.9A 2017-09-15 2017-09-15 Flat field apochromatic micro objective Expired - Fee Related CN107505696B (en)

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CN108873289A (en) * 2018-09-04 2018-11-23 中国科学院长春光学精密机械与物理研究所 Microcobjective optical system and optical device
JP2019191555A (en) * 2018-04-19 2019-10-31 オリンパス株式会社 Dry system objective lens
CN110859585A (en) * 2019-11-11 2020-03-06 深圳市中达瑞和科技有限公司 Hyperspectral endoscopic imaging system
CN114815134A (en) * 2021-01-20 2022-07-29 长春长光华大智造测序设备有限公司 Achromatic microscope objective and optical system
CN116300031A (en) * 2023-04-07 2023-06-23 苏州矽行半导体技术有限公司 High NA large view field multi-interface microscope objective and wafer defect detection system
CN116880053A (en) * 2023-06-30 2023-10-13 中国科学院生物物理研究所 Microscope objective and mechanical structure
CN116909007A (en) * 2023-09-13 2023-10-20 长春长光智欧科技有限公司 Large-view-field flat-field apochromatic microscope objective lens

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CN102959450A (en) * 2010-08-25 2013-03-06 株式会社尼康 Microscope objective lens

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JP2003075724A (en) * 2001-09-03 2003-03-12 Olympus Optical Co Ltd Microscope objective lens
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Cited By (11)

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JP2019191555A (en) * 2018-04-19 2019-10-31 オリンパス株式会社 Dry system objective lens
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