CN205193347U - Microscope objective lens - Google Patents

Microscope objective lens Download PDF

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Publication number
CN205193347U
CN205193347U CN201520499557.4U CN201520499557U CN205193347U CN 205193347 U CN205193347 U CN 205193347U CN 201520499557 U CN201520499557 U CN 201520499557U CN 205193347 U CN205193347 U CN 205193347U
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Prior art keywords
micro objective
mirror group
fobj
eyeglass
focal length
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CN201520499557.4U
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Chinese (zh)
Inventor
李伸朋
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Ningbo Sunny Instruments Co Ltd
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Ningbo Sunny Instruments Co Ltd
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Abstract

The utility model discloses a microscope objective lens, it is from the object space in proper order including first lens, the first mirror group that has positive refractive power that has positive refractive power, the second mirror group that has positive refractive power, the third mirror group that has negative optical power, the fourth mirror group that has negative optical power and the 5th mirror group that has negative optical power. First mirror group is used for following microscope objective lens's optical axis removes and changes microscope objective lens's focus. The utility model discloses embodiment's microscope objective lens can be through removing first mirror group changes microscope objective lens's focus to thickness and refracting index that the compensation covered the medium change the formation of image that obtains the clarity.

Description

Micro objective
Technical field
The utility model relates to microscopy, particularly a kind of micro objective.
Background technology
At present, when using microscopic examination sample, generally on sample, cover the media such as cover glass, double dish or particular liquid, in other words, medium is set between sample and micro objective.So, sample be incident upon medium upper surface on after by microscope amplification imaging.Because microscope generally has fixing focal length, therefore, the thickness of medium and refractive index also need to fix.Certainly, according to the multiplying power of micro objective and the difference of numerical aperture, the thickness of medium and refractive index can have small change.But, if the thickness of medium and variations in refractive index excessive, the quality of microscope imaging will be affected.The multiplying power of micro objective is higher, numerical aperture is larger, and thickness and variations in refractive index affect more obvious on microscopical image quality, such as, for the micro objective of high magnification high-NA, the variation in thickness of medium 0.02mm just can produce impact greatly to microscopical image quality.
Utility model content
The utility model is intended at least to solve one of technical matters existed in prior art.For this reason, the utility model needs to provide a kind of micro objective.
The micro objective of the utility model embodiment comprises successively from object space:
There is the first eyeglass of positive light coke;
There is the first mirror group of positive light coke;
There is the second mirror group of positive light coke;
There is the 3rd mirror group of negative power;
There is the 4th mirror group of negative power; And
There is the 5th mirror group of negative power; Described first mirror group is used for moving along the optical axis of described micro objective the focal length changing described micro objective.
In some embodiments, described micro objective meets:
2<〡fL1/fobj〡<2.5;
Wherein, fL1 is the focal length of described first eyeglass, and fobj is the focal length of described micro objective.
In some embodiments, described micro objective meets:
10<〡fG1/fobj〡<14;
Wherein, fG1 is the focal length of described first mirror group, and fobj is the focal length of described micro objective.
In some embodiments, described micro objective meets:
10<〡fG2/fobj〡<25;
Wherein, fG2 is the focal length of described 3rd mirror group, and fobj is the focal length of described micro objective.
In some embodiments, described micro objective meets:
1.6<〡fG5/fobj〡<4;
FG5 is the focal length of described second mirror group G5, and fobj is the focal length of described micro objective.
In some embodiments, described micro objective meets:
3mm<D3+D4<5mm;
Wherein, D3 is the distance between described first eyeglass and described first mirror group, and D4 is the distance between described first mirror group and described second mirror group.
In some embodiments, described micro objective meets:
1.7<nd1; And
50<Vd1;
Wherein, nd1 is spectrum at the light of 546.07nm through the refractive index of described first eyeglass, and Vd is spectrum at the light of 546.07nm at the Abbe number of described first eyeglass.
In some embodiments, described first eyeglass has meniscus shape, and the object space of concave surface facing micro objective
In some embodiments, described 4th mirror group comprises biconvex positive light coke eyeglass and the concave-concave minus power lens of gummed mutually from object space, and described 5th mirror group comprises at least a slice eyeglass, and comprises the object space concave surface towards the 4th mirror group.
The micro objective of the utility model embodiment can change the focal length of micro objective thus the thickness of compensation overwrite media and variations in refractive index by mobile described first mirror group, obtains imaging clearly.
Additional aspect of the present utility model and advantage will part provide in the following description, and part will become obvious from the following description, or be recognized by practice of the present utility model.
Accompanying drawing explanation
Above-mentioned and/or additional aspect of the present utility model and advantage will become obvious and easy understand from accompanying drawing below combining to the description of embodiment, wherein:
Fig. 1 is the floor map of the micro objective of the utility model embodiment 1.
Fig. 2 is 0 field-of-view lateral aberration diagram of the micro objective of embodiment 1.
Fig. 3 is 1 field-of-view lateral aberration diagram of the micro objective of embodiment 1.
Fig. 4 is the axial aberration figure of the micro objective of embodiment 1.
Fig. 5 is the curvature of field distortion figure of the micro objective of embodiment 1.
Fig. 6 is the floor map of the micro objective of the utility model embodiment 2.
Fig. 7 is 0 field-of-view lateral aberration diagram of the micro objective of embodiment 2.
Fig. 8 is 1 field-of-view lateral aberration diagram of the micro objective of embodiment 2.
Fig. 9 is the axial aberration figure of the micro objective of embodiment 2.
Figure 10 is the curvature of field distortion figure of the micro objective of embodiment 2.
Figure 11 is the floor map of the micro objective of the utility model embodiment 3.
Figure 12 is 0 field-of-view lateral aberration diagram of the micro objective of embodiment 3.
Figure 13 is 1 field-of-view lateral aberration diagram of the micro objective of embodiment 3.
Figure 14 is the axial aberration figure of the micro objective of embodiment 3.
Figure 15 is the curvature of field distortion figure of the micro objective of embodiment 3.
Embodiment
Be described below in detail embodiment of the present utility model, the example of described embodiment is shown in the drawings, and wherein same or similar label represents same or similar element or has element that is identical or similar functions from start to finish.Being exemplary below by the embodiment be described with reference to the drawings, only for explaining the utility model, and can not being interpreted as restriction of the present utility model.
In description of the present utility model, it will be appreciated that, term " " center ", " longitudinal direction ", " transverse direction ", " length ", " width ", " thickness ", " on ", D score, " front ", " afterwards ", " left side ", " right side ", " vertically ", " level ", " top ", " end ", " interior ", " outward ", " clockwise ", orientation or the position relationship of the instruction such as " counterclockwise " are based on orientation shown in the drawings or position relationship, only the utility model and simplified characterization for convenience of description, instead of indicate or imply that the device of indication or element must have specific orientation, with specific azimuth configuration and operation, therefore can not be interpreted as restriction of the present utility model.In addition, term " first ", " second " only for describing object, and can not be interpreted as instruction or hint relative importance or imply the quantity indicating indicated technical characteristic.Thus, be limited with " first ", the feature of " second " can express or impliedly comprise one or more described features.In description of the present utility model, the implication of " multiple " is two or more, unless otherwise expressly limited specifically.
In description of the present utility model, it should be noted that, unless otherwise clearly defined and limited, term " installation ", " being connected ", " connection " should be interpreted broadly, and such as, can be fixedly connected with, also can be removably connect, or connect integratedly; Can be mechanical connection, also can be electrical connection or can communication mutually; Can be directly be connected, also indirectly can be connected by intermediary, can be the connection of two element internals or the interaction relationship of two elements.For the ordinary skill in the art, the concrete meaning of above-mentioned term in the utility model can be understood as the case may be.
In the utility model, unless otherwise clearly defined and limited, fisrt feature second feature it " on " or D score can comprise the first and second features and directly contact, also can comprise the first and second features and not be directly contact but by the other characterisation contact between them.And, fisrt feature second feature " on ", " top " and " above " comprise fisrt feature directly over second feature and oblique upper, or only represent that fisrt feature level height is higher than second feature.Fisrt feature second feature " under ", " below " and " below " comprise fisrt feature directly over second feature and oblique upper, or only represent that fisrt feature level height is less than second feature.
Disclosing hereafter provides many different embodiments or example is used for realizing different structure of the present utility model.Of the present utility model open in order to simplify, hereinafter the parts of specific examples and setting are described.Certainly, they are only example, and object does not lie in restriction the utility model.In addition, the utility model can in different example repeat reference numerals and/or reference letter, this repetition is to simplify and clearly object, itself does not indicate the relation between discussed various embodiment and/or setting.In addition, the various specific technique that the utility model provides and the example of material, but those of ordinary skill in the art can recognize the application of other techniques and/or the use of other materials.
Embodiment 1
Refer to Fig. 1, the micro objective of the utility model embodiment 1 comprises the first eyeglass L1 with positive light coke, the first mirror group G1 with positive light coke successively, has the second mirror group G5 of positive light coke, has the 3rd mirror group G2 of negative power, has the 4th mirror group G3 of negative power and have the 5th mirror group G4 of negative power from object space.First mirror group G1 is used for moving along the optical axis of object lens the focal length changing object lens.
During use, sample is arranged on the object space face S1 of medium O (such as cover glass), the ray cast of sample reflection is at the image space face S2 of medium O, and the Guan Jing then entering micro objective and be arranged on micro objective image space enters (not shown) on the eyes of observer or imageing sensor.When measuring different samples, different medium O may be adopted, therefore, cause the refractive index of medium O or thickness to change, microscopical image distance will be caused to change, thus cause image blur.Particularly for the micro objective of high magnification high-NA, affect larger.But, because the first mirror group G1 is variable, therefore, the focal length of micro objective can be changed by mobile first mirror group G1, thus compensate thickness and the variations in refractive index of overwrite media, obtain imaging clearly.
In embodiment 1, the first eyeglass L1 has meniscus shape, and the object space of concave surface facing micro objective.First eyeglass L comprises object space face S3 and image space face S4.
First mirror group G1 comprises concave-concave minus power lens and the biconvex positive light coke eyeglass of gummed mutually from object space.First mirror group G1 comprises object space face S5, cemented surface S6 and image space face S7 from object space.
Second mirror group G5 comprises at least a slice eyeglass, and in embodiment 1, the second mirror group G5 comprises the second eyeglass L2 and the 3rd eyeglass L3 from object space.Second eyeglass L2 comprises object space face S8 and image space face S9, and the 3rd eyeglass L3 comprises object space face S10 and image space face S11.
3rd mirror group G2 comprises biconvex positive light coke eyeglass and the concave-concave minus power lens of gummed mutually from object space.3rd mirror group G2 comprises object space face S12, cemented surface S13 and image space face S14 from object space.
4th mirror group G3 comprises biconvex positive light coke eyeglass and the concave-concave minus power lens of gummed mutually from object space.4th mirror group G3 comprises object space face S15, cemented surface S16 and image space face S17 from object space.
5th mirror group G4 comprises at least a slice eyeglass, and in embodiment 1, the 5th mirror group G4 comprises concave-concave minus power lens and the biconvex positive light coke eyeglass of gummed mutually from object space.5th mirror group G4 comprises object space face S18, cemented surface S19 and image space face S20 from object space.
4th mirror group G3 is relative with the concave surface of the 5th mirror group G4, effectively can correct the curvature of field, makes picture plane more smooth.
Micro objective meets:
2<〡fL1/fobj〡<2.5。
Wherein, fL1 is the focal length of the first eyeglass L1, and fobj is the focal length of micro objective.
So, the first eyeglass L1 is generally without the need to sharing too much focal power, and in addition, if focal power is excessive, focal length is less, and by causing, the tolerance sensitivities of the first eyeglass L1 is high, more difficult processing, therefore sets 2< 〡 fL1/fobj 〡.On the other hand, focal power is too small, causes again mirror group or eyeglass below need share too much focal power, in addition, focal length also can be caused longer, thus increases the camera lens overall length of micro objective, and therefore She Dings 〡 fL1/fobj 〡 <2.5.
Micro objective meets:
10<〡fG1/fobj〡<14。
Wherein, fG1 is the focal length of the first mirror group G1.
So, first mirror group G1 is moving lens group, if, the focal power of the first mirror group G1 is excessive, changes excessive, namely to motion sensitive when moving causing the first mirror group G1 to the focal length of micro objective, bad adjustment, tolerance can be caused on the other hand too responsive, processing difficulties, therefore set 10< 〡 fG1/fobj 〡.On the other hand, if focal power is too small, when the first mirror group G1 can be caused again to move, the focal length of micro objective changes little, regulates insensitive, therefore sets
〡fG1/fobj〡<14。
Micro objective meets:
10<〡fG2/fobj〡<25。
Wherein, fG2 is the focal length of the 3rd mirror group G2.
So, the 3rd mirror group G2 is mainly used in controlling the curvature of field, and focal power is excessive and too smallly all better cannot control the curvature of field, therefore, controls at 10< 〡 fG2/fobj 〡 <25.
Micro objective meets:
1.6<〡fG5/fobj〡<4。
Wherein, fG5 is the focal length of the second mirror group G5.
So, second mirror group G5 is generally the highest position of image height, therefore need to share more focal power, therefore, if focal power is less, other eyeglass and mirror group will be shared too much focal power and cause more difficult processing, therefore She Dings 〡 fG5/fobj 〡 <4, on the other hand, if the focal power of the second mirror group G5 is excessive, more difficult processing itself can be caused again, therefore set 1.6< 〡 fG5/fobj 〡.
Micro objective meets:
3mm<D3+D4<5mm。
Wherein, D3 is the distance between the first eyeglass L1 and the first mirror group G1, and D4 is the distance between the first mirror group G1 and the second mirror group G5.
So, D3+D4 is actually the scope that the first mirror group G1 can regulate, if too small, to cause regulating too responsive, if and excessive, the camera lens overall length of micro objective can be caused again excessive, so range of control is 3mm<D3+D4<5mm.Micro objective meets:
1.7<nd1; And
50<Vd1。
Wherein, nd1 is the refractive index of spectrum first eyeglass L1 when 546.07nm, and Vd is the Abbe number of spectrum first eyeglass L1 when 546.07nm.
So, the ability that the first eyeglass L1 controls aberration and controls aberration can be balanced.If nd1 is too small, aberration cannot better correct, and if vd1 is too small, cause again aberration to correct.
Setting like this, micro objective focal range is 8-11mm, and image space linear field is 22mm.Cover-glass thickness range of adjustment is 0-2mm.The pipe mirror focal length that micro objective collocation uses is 160-220mm.Micro objective peripheral field best focal point and central vision best focal point axial difference are less than 2 λ/NA 2, F light and C light achromatism, d light and g optical axis direction aberration are less than 2 λ/NA 2.Wherein wavelength centered by λ, NA is numerical aperture of objective, and F represents the light that wavelength is 0.4861 μm, and d represents the light that wavelength is 0.5876 μm, and C represents the light that wavelength is 0.6563 μm, and g represents the light that wavelength is 0.436 μm.
In embodiment 1, micro objective meets the condition of form below:
Table 1
Wherein, radius refers to the radius-of-curvature on surface, and thickness refers to distance on Current surface to the axle on next surface, and such as the thickness of surperficial S1 is the distance of S1 to S2, its may be medium or eyeglass axle on thickness, also clearance on possible axle between them.The micro objective of present embodiment also meets:
Table 2
D1 0-0.215
D2 0.7-0.615
D3 0.318-0.054
D4 0.054-0.318
Wherein, fobj=1; NA=0.45.〡 fL1/fobj 〡=2.4; 〡 fG1/fobj 〡=13.1; Ji 〡 fG5/fobj 〡=2.1, 〡 fG2/fobj 〡=24.8.
Fig. 2 is 0 field-of-view lateral aberration diagram of the micro objective of embodiment 1, wherein horizontal ordinate PY, PX represents entrance pupil, and ordinate EY, EX represent lateral aberration (Y represents meridian direction, and X represents sagitta of arc direction), aberration balancing is better as seen from the figure, and image quality is high.In figure, horizontal ordinate is normalization entrance pupil, and ± 5 μm represent that ordinates are 5 μm to the maximum, are minimumly-5 μm.
Fig. 3 is 1 field-of-view lateral aberration diagram of the micro objective of embodiment 1, and aberration balancing is better as seen from the figure, and image quality is high.
Fig. 4 is the axial aberration figure of the micro objective of embodiment 1.In figure, ordinate represents entrance pupil, and horizontal ordinate represents longitudinal aberration (unit mm), as seen from the figure F light and C light achromatism, and d light and g optical axis direction aberration are less than 2 λ/NA 2.Close to half apochromatism level.In figure, ordinate is normalization entrance pupil; Horizontal ordinate represents longitudinal aberration, is 0.005mm to the maximum, and minimum is-0.005mm.
Fig. 5 is curvature of field distortion figure.Left figure is that in curvature of field figure, figure, ordinate represents visual field, and horizontal ordinate represents the curvature of field (unit μm).Peripheral field best focal point and central vision best focal point axial difference are less than 2 λ/NA 2, it is clear that theoretical value meets full filed, reaches flat-field objective requirement.In figure, ordinate is normalization visual field; Horizontal ordinate represents the curvature of field, is 2 μm to the maximum, is minimumly-2 μm.Right figure is distortion figure, and in figure, ordinate represents visual field, horizontal ordinate representative distortion (number percent), and distortion is less than 0.3% as seen from the figure.In figure, ordinate is normalization visual field; Horizontal ordinate representative distortion, be 0.5% to the maximum, minimum is-0.5%.
Embodiment 2
Please refer to the drawing 6, the micro objective of the utility model embodiment 2 is substantially identical with the micro objective of embodiment 1, but the 5th mirror group G4 of the micro objective of embodiment 2 comprises the 4th eyeglass L4, corresponding, the surface number of micro objective changes.
In addition, in embodiment 2, micro objective meets the condition of form below:
Table 3
Surface Radius (mm) Thickness (mm) Nd Vd
S1 Infinite distance D1 1.52 64.2
S2 Infinite distance D2
S3 -2.1 0.4 1.82 60
S4 -0.98 D3
S5 -2 25 0.111 1 58 57.1
S6 1.365 0.443 1.52 70
S7 -2.86 D4
S8 3.73 0.3 1.43 95
S9 -2.16 0.022
S10 3.19 0.3 1.43 95
S11 -2.46 0.022
S12 1.45 0.443 1.43 95
S13 -1.833 0.133 1.71 35.6
S14 2.9 0.47
S15 1.7 0.33 1.43 95
S16 1 0.173 1.69 31
S17 0.644 0.32
S18 -0.58 0.665 1.6 24.2
S19 -0.88
In addition, micro objective also meets:
Table 4
D1 0-0.2215
D2 0.72-0.557
D3 0.288-0.055
D4 0.055-0.288
Wherein, fobj=1; NA=0.45.〡 fL1/fobj 〡=2.1; 〡 fG1/fobj 〡=10.2; Ji 〡 fG5/fobj 〡=2.6, 〡 fG2/fobj 〡=16.6.
Fig. 7 is 0 field-of-view lateral aberration diagram of the micro objective of embodiment 2, wherein horizontal ordinate PY, PX represents entrance pupil, and ordinate EY, EX represent lateral aberration (Y represents meridian direction, and X represents sagitta of arc direction), aberration balancing is better as seen from the figure, and image quality is high.In figure, horizontal ordinate is normalization entrance pupil, and ± 5 μm represent that ordinates are 5 μm to the maximum, are minimumly-5 μm.
Fig. 8 is 1 field-of-view lateral aberration diagram of the micro objective of embodiment 2, and aberration balancing is better as seen from the figure, and image quality is high.
Fig. 9 is the axial aberration figure of the micro objective of embodiment 2.In figure, ordinate represents entrance pupil, and horizontal ordinate represents longitudinal aberration (unit mm), as seen from the figure F light and C light achromatism, and d light and g optical axis direction aberration are less than 2 λ/NA 2.Close to half apochromatism level.In figure, ordinate is normalization entrance pupil; Horizontal ordinate represents longitudinal aberration, is 0.005mm to the maximum, and minimum is-0.005mm.
Figure 10 is the curvature of field distortion figure of the micro objective of embodiment 2.Left figure is that in curvature of field figure, figure, ordinate represents visual field, and horizontal ordinate represents the curvature of field (unit μm).Peripheral field best focal point and central vision best focal point axial difference are less than 2 λ/NA 2, it is clear that theoretical value meets full filed, reaches flat-field objective requirement.In figure, ordinate is normalization visual field; Horizontal ordinate represents the curvature of field, is 2 μm to the maximum, is minimumly-2 μm.Right figure is distortion figure, and in figure, ordinate represents visual field, horizontal ordinate representative distortion (number percent), and distortion is less than 0.3% as seen from the figure.In figure, ordinate is normalization visual field; Horizontal ordinate representative distortion, be 0.5% to the maximum, minimum is-0.5%.
Embodiment 3
Please refer to the drawing 11, the micro objective of the utility model embodiment 3 is substantially identical with the micro objective of embodiment 1, but the second mirror group G5 of the micro objective of embodiment 3 comprises the second eyeglass L2, corresponding, the surface number of micro objective changes.
In addition, in embodiment 3, micro objective meets the condition of form below:
Table 5
Surface Radius (mm) Thickness (mm) Nd Vd
S1 Infinite distance D1 1.52 64.2
S2 Infinite distance D2
S3 -2.1 0.462 1.73 52.3
S4 -0.98 D3
S5 -4.275 0.11 1.57 58.8
S6 1.469 0.44 1.49 85.2
S7 -1.94 D4
S8 2.55 0.55 1.7 57.7
S9 -2.9 .022
S10 1.4 0.442 1.4 95
S11 -2.943 0.132 1.71 32
S12 1.44 0.156
S13 1.49 0.33 1.43 95
S14 -1.22 0.662 1.59 32
S15 0.863 0.32
S16 -0.59 0.167 1.49 85.2
S17 -5.8 0.33 1.74 32.4
S18 -0.9758
In addition, micro objective also meets:
Table 6
D1 0-0.2208
D2 0.72-0.6
D3 0.287-0.055
D4 0.055-0.287
Wherein, fobj=1; NA=0.45.〡 fL1/fobj 〡=2.2; 〡 fG1/fobj 〡=13.4; Ji 〡 fG5/fobj 〡=3.8, 〡 fG2/fobj 〡=11.
Figure 12 is 0 field-of-view lateral aberration diagram of the micro objective of embodiment 3, wherein horizontal ordinate PY, PX represents entrance pupil, and ordinate EY, EX represent lateral aberration (Y represents meridian direction, and X represents sagitta of arc direction), aberration balancing is better as seen from the figure, and image quality is high.In figure, horizontal ordinate is normalization entrance pupil, and ± 5 μm represent that ordinates are 5 μm to the maximum, are minimumly-5 μm.
Figure 13 is 1 field-of-view lateral aberration diagram of the micro objective of embodiment 3, and aberration balancing is better as seen from the figure, and image quality is high.
Figure 14 is the axial aberration figure of the micro objective of embodiment 3.In figure, ordinate represents entrance pupil, and horizontal ordinate represents longitudinal aberration (unit mm), as seen from the figure F light and C light achromatism, and d light and g optical axis direction aberration are less than 2 λ/NA 2.Close to half apochromatism level.In figure, ordinate is normalization entrance pupil; Horizontal ordinate represents longitudinal aberration, is 0.005mm to the maximum, and minimum is-0.005mm.
Figure 15 is the curvature of field distortion figure of the micro objective of embodiment 3.Left figure is that in curvature of field figure, figure, ordinate represents visual field, and horizontal ordinate represents the curvature of field (unit μm).Peripheral field best focal point and central vision best focal point axial difference are less than 2 λ/NA 2, it is clear that theoretical value meets full filed, reaches flat-field objective requirement.In figure, ordinate is normalization visual field; Horizontal ordinate represents the curvature of field, is 2 μm to the maximum, is minimumly-2 μm.Right figure is distortion figure, and in figure, ordinate represents visual field, horizontal ordinate representative distortion (number percent), and distortion is less than 0.3% as seen from the figure.In figure, ordinate is normalization visual field; Horizontal ordinate representative distortion, be 0.5% to the maximum, minimum is-0.5%.
In the description of this instructions, specific features, structure, material or feature that the description of reference term " embodiment ", " some embodiments ", " exemplary embodiment ", " example ", " concrete example " or " some examples " etc. means to describe in conjunction with described embodiment or example are contained at least one embodiment of the present utility model or example.In this manual, identical embodiment or example are not necessarily referred to the schematic representation of above-mentioned term.And the specific features of description, structure, material or feature can combine in an appropriate manner in any one or more embodiment or example.
Although illustrate and described embodiment of the present utility model, those having ordinary skill in the art will appreciate that: can carry out multiple change, amendment, replacement and modification to these embodiments when not departing from principle of the present utility model and aim, scope of the present utility model is by claim and equivalents thereof.

Claims (9)

1. a micro objective, is characterized in that, comprises successively from object space:
There is the first eyeglass of positive light coke;
There is the first mirror group of positive light coke;
There is the second mirror group of positive light coke;
There is the 3rd mirror group of negative power;
There is the 4th mirror group of negative power; And
There is the 5th mirror group of negative power; Described first mirror group is used for moving along the optical axis of described micro objective the focal length changing described micro objective.
2. micro objective as claimed in claim 1, is characterized in that, described micro objective meets:
2<〡fL1/fobj〡<2.5;
Wherein, fL1 is the focal length of described first eyeglass, and fobj is the focal length of described micro objective.
3. micro objective as claimed in claim 1, is characterized in that, described micro objective meets:
10<〡fG1/fobj〡<14;
Wherein, fG1 is the focal length of described first mirror group, and fobj is the focal length of described micro objective.
4. micro objective as claimed in claim 1, is characterized in that, described micro objective meets:
10<〡fG2/fobj〡<25;
Wherein, fG2 is the focal length of described 3rd mirror group, and fobj is the focal length of described micro objective.
5. micro objective as claimed in claim 1, is characterized in that, described micro objective meets:
1.6<〡fG5/fobj〡<4;
FG5 is the focal length of described second mirror group G5, and fobj is the focal length of described micro objective.
6. micro objective as claimed in claim 1, is characterized in that, described micro objective meets:
3mm<D3+D4<5mm;
Wherein, D3 is the distance between described first eyeglass and described first mirror group, and D4 is the distance between described first mirror group and described second mirror group.
7. micro objective as claimed in claim 1, is characterized in that, described micro objective meets:
1.7<nd1; And
50<Vd1;
Wherein, nd1 is spectrum at the light of 546.07nm through the refractive index of described first eyeglass, and Vd is spectrum at the light of 546.07nm at the Abbe number of described first eyeglass.
8. micro objective as claimed in claim 1, it is characterized in that, described first eyeglass has meniscus shape, and the object space of concave surface facing micro objective.
9. micro objective as claimed in claim 1, it is characterized in that, described 4th mirror group comprises biconvex positive light coke eyeglass and the concave-concave minus power lens of gummed mutually from object space, and described 5th mirror group comprises at least a slice eyeglass, and comprises the object space concave surface towards the 4th mirror group.
CN201520499557.4U 2015-07-08 2015-07-08 Microscope objective lens Withdrawn - After Issue CN205193347U (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105137583A (en) * 2015-07-08 2015-12-09 宁波舜宇仪器有限公司 Object lens of microscope
CN111239996A (en) * 2020-03-03 2020-06-05 上海御微半导体技术有限公司 Microscope objective and automatic optical detection system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105137583A (en) * 2015-07-08 2015-12-09 宁波舜宇仪器有限公司 Object lens of microscope
CN111239996A (en) * 2020-03-03 2020-06-05 上海御微半导体技术有限公司 Microscope objective and automatic optical detection system

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