CN114672784A - Flexible reel-to-reel CIGS evaporation plume control structure - Google Patents
Flexible reel-to-reel CIGS evaporation plume control structure Download PDFInfo
- Publication number
- CN114672784A CN114672784A CN202210310446.9A CN202210310446A CN114672784A CN 114672784 A CN114672784 A CN 114672784A CN 202210310446 A CN202210310446 A CN 202210310446A CN 114672784 A CN114672784 A CN 114672784A
- Authority
- CN
- China
- Prior art keywords
- evaporation
- coating
- basement
- roll
- source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0623—Sulfides, selenides or tellurides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/542—Controlling the film thickness or evaporation rate
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention relates to a flexible roll-to-roll CIGS evaporation plume control structure, which solves the problem of stable control of evaporation plumes in flexible roll-to-roll CIGS evaporation. This device includes the vacuum cavity, sets up unreel axle and rolling axle in the vacuum cavity, unreels and carries the basement along the conveying roller between axle and the rolling axle, the basement is through a plurality of coating by vaporization districts, and the coating by vaporization district sets up between adjacent conveying roller, the coating by vaporization district is equipped with the kuppe in the basement below, kuppe top surface opening, kuppe lower part set up selenium source and metal source, the coating by vaporization district is equipped with the upper shield in the top of basement, the upper shield seals with the kuppe in basement left and right sides lock, the overflow clearance is left with the basement bottom surface in both sides around to the kuppe top surface, is equipped with the suction clearance between the adjacent lateral wall around the kuppe in adjacent coating by vaporization district. The invention makes the orderly operation of the evaporation, the coating, the flow dispersion and the extraction of the plume through the ejection angle of the steam nozzle and the flow guide arrangement of the flow guide cover, thereby improving the stability of the control of the plume.
Description
Technical Field
The invention belongs to the field of solar cell production, relates to evaporation equipment for a continuous copper indium gallium selenide flexible solar cell, and particularly relates to a flexible roll-to-roll copper indium gallium selenide evaporation plume control structure.
Background
The flexible solar cell sheet is formed by forming a solar photovoltaic material coating on a flexible windable substrate. The Copper Indium Gallium Selenide (CIGS) thin film cell is a solar photovoltaic material with high mass-power ratio and good stability, and is generally considered as a flexible solar cell material with the greatest development prospect. The multi-element co-evaporation method is the most widely applied CIGS film coating method, film coating is completed in a vacuum environment, and a polycrystalline coating is formed on the surface of a substrate through reaction by co-evaporation of elements such as copper, indium, gallium and selenium. The vapor coating is finished in a vacuum, high-temperature and high-corrosion environment, and the coating process inside cannot be directly visible.
In order to improve the production efficiency and ensure the production continuity, the continuous coating is generally carried out on a continuous substrate in the CIGS coating process. The raw material of the continuous substrate is in a winding drum type, and the film-coated substrate is also wound into a winding drum, so that the substrate unwinding, film coating and winding processes are called as a roll-to-roll production process. In the roll-to-roll production process, a plurality of evaporation sources of copper, indium, gallium and selenium are arranged to complete film coating on a substrate, evaporation plumes of the evaporation sources rise and deposit on the substrate in a vacuum environment, the stability of the evaporation plumes is directly related to the uniformity of a coated finished product, and the evaporation plumes cannot be controlled in real time because the whole evaporation work is completed in a high-temperature and vacuum environment, so that how to arrange a plume control structure to ensure the stability of the evaporation plumes is a key content for ensuring the uniformity of film coating on the substrate.
Disclosure of Invention
The invention aims to provide a flexible roll-to-roll CIGS evaporation plume control structure aiming at the problem that the stability of evaporation plumes in flexible roll-to-roll CIGS evaporation is directly related to the uniformity of a coating film.
The technical scheme adopted by the invention for solving the technical problems is as follows: a flexible roll-to-roll CIGS evaporation plume control structure comprises a vacuum cavity, wherein an unwinding shaft and a winding shaft are arranged in the vacuum cavity, a plurality of conveying rollers are arranged between the unwinding shaft and the winding shaft, a substrate is wound and unwound along the conveying rollers and conveyed from front to back between the unwinding shaft and the winding shaft, the roll surface of the substrate is conveyed downwards and passes through a plurality of evaporation areas, for a single evaporation area, the evaporation area is arranged between adjacent conveying rollers, a flow guide sleeve is arranged below the substrate in the evaporation area, the top surface of the flow guide cover is provided with an opening, the lower part of the flow guide cover is provided with a selenium source and a metal source, the evaporation area is provided with an upper cover above the substrate, the upper cover and the flow guide cover are buckled and sealed at the left side and the right side of the substrate, overflow gaps are reserved at the front side and the rear side of the top surface of the flow guide cover and the bottom surface of the substrate, and a suction gap communicated with the vacuum cavity is reserved between the front adjacent side wall and the rear adjacent side wall of the flow guide cover of the adjacent evaporation area.
The working environment of the copper indium gallium selenide evaporation is a vacuum, high-temperature and high-corrosion environment, and the production process is in an invisible closed running state. The internal operation state information can be obtained only by limited means such as XRF detection, temperature monitoring and the like, and can be adjusted only by limited control means such as temperature control, winding and unwinding speed and the like. In the whole film coating process, the stability of the evaporation plume is the central importance of the uniformity of the film coating, the evaporation plume cannot be manually intervened, and the plume can only be guided by a fixed structure to flow orderly as much as possible. In the evaporation process, the amount of the evaporation plume reaching the surface of the substrate is necessarily more than the final deposition amount of the CIGS, so that the control of the plume in the vacuum cavity is not only the control of the plume evaporating to the substrate, but also the flow of the excessive evaporation plume is guided to be orderly dispersed, and the disorder caused by excessive accumulation is avoided. In the device, the plume of the rising evaporation is guided by the guide cover, the vacuum influence of the vacuum cavity is avoided, the steam plume is diffused disorderly to the periphery, after the evaporation is finished, the slits are reserved on the front side and the rear side of the guide cover and the substrate, the excessive plume is diffused from the slits, enters the suction gap of the adjacent evaporation area, is sucked and diffused into the vacuum cavity and is pumped out by the vacuum pumping equipment, the ordered operation of evaporation-coating-flow diffusion-pumping-out of the plume is formed, the stability of plume control is improved, and the uniformity of coating is improved. In this scheme, the overflow clearance sets up in the front and back side, and the side is sealed about the kuppe, and the front and back side not only needs carry the basement, and the space that the plume continued to rise has been sheltered from to the basement that has carried in the front and back side moreover, reduces the contact of plume to the basement back on upper portion, heating plate, conveying roller, receipts and unreels the structure, reduces the corruption.
Preferably, the conveying rollers are arranged in an arc shape below the unwinding shaft and the winding shaft, the substrate is conveyed in a concave arc shape along the conveying rollers, and the top surface of the air guide sleeve is parallel to the substrate of the corresponding section. Air guide sleeve and substrate
Preferably, the air guide sleeve is a square cover body.
Preferably, the evaporation region is provided with a heating plate for heating the substrate above the substrate, and the heating plate is arranged on the inner side or below the upper cover.
Preferably, the selenium source and the metal source are provided with upward steam nozzles, and the steam nozzles are bellmouths expanding from bottom to top. The steam nozzle can be a point nozzle or a linear nozzle extending from left to right, and is in an expanded horn mouth shape, so that the diffusion of the plume in the rising process is facilitated.
Preferably, the inclination angle of the bell mouth of the steam nozzle does not exceed the inclination angle of the connecting line of the steam nozzle and each side edge of the upper surface of the air guide sleeve. The self inclination angle of the steam nozzle is smaller than the inclination angle of a connecting line of the steam nozzle and each side edge of the upper surface of the air guide sleeve, and the inclination angle is an included angle with a vertical line. The arrangement can reduce the reflection flow formed by impacting the side wall of the air guide sleeve in the rising process of the plume, and ensure the order of the evaporation plume. Preferably, the inclination angle of the bell mouth of the steam nozzle is equal to the inclination angle of the connecting line of the steam nozzle and each side edge of the upper surface of the air guide sleeve.
Preferably, the metal source is one or more of a copper source, an indium source, a gallium source and an indium-gallium source.
Preferably, the selenium source and the metal source both adopt an upper heating and lower cooling mode to form an evaporation plume, that is, the upper parts of the selenium source and the metal source adopt electric heating plates for radiation heating, and the lower parts of the selenium source and the metal source adopt cooling liquid for cooling, so as to form a surface evaporation plume with upper heat and lower cold. The selenium source and the metal source are evaporated on the surface to form an evaporation plume, and the evaporation plume keeps an ordered state at the beginning of formation.
Preferably, the upper cover is arranged between the adjacent conveying rollers, and arc-shaped grooves for avoiding the conveying rollers are arranged on two sides of the upper cover. The upper cover shields the space between the conveying rollers as much as possible, so that a better heat preservation effect is achieved, and the conveying rollers are protected.
Preferably, the front side and the rear side of the vacuum cavity are respectively provided with a vacuumizing device.
The invention makes the orderly operation of plume evaporation, film coating, scattering and extraction through the ejection angle of the steam nozzle and the flow guide arrangement of the flow guide cover, improves the stability of plume control and improves the uniformity of film coating.
Drawings
The invention is further described below with reference to the accompanying drawings.
FIG. 1 is a schematic diagram of an embodiment of the present invention.
Fig. 2 is a schematic diagram of a single evaporation region structure of the present invention.
Fig. 3 is a schematic diagram of an inner evaporation source structure of the pod.
In the figure: 1. the device comprises a vacuum cavity, 2, an unwinding shaft, 3, a winding shaft, 4, a conveying roller, 5, a substrate, 6, an evaporation area, 7, a vacuumizing device, 8, an overflow gap, 9, a suction gap, 10, a flow guide sleeve, 11, an upper cover, 12, a heating plate, 13, a selenium source, 14, a metal source, 15 and a steam nozzle.
Detailed Description
The invention is further illustrated by the following specific examples in conjunction with the accompanying drawings.
Example (b): a flexible roll-to-roll cigs evaporation plume control structure, as shown in fig. 1. The device comprises a vacuum cavity 1, wherein vacuumizing equipment 7 is arranged on two sides of the vacuum cavity. Set up in the vacuum cavity 1 and unreel axle 2 and rolling shaft 3, unreel and be equipped with a plurality of conveying rollers 4 between axle and the rolling shaft, unreel between axle 2 and the rolling shaft 3 along conveying roller 4 receive and release and from the past backward transport base 5. The conveying rollers are arranged in an arc shape below the unreeling shaft and the reeling shaft, the substrate is conveyed in a concave arc shape along the conveying rollers, and the reeling surface of the substrate is conveyed downwards.
The substrate passes through several evaporation zones 6, as shown in fig. 2, for a single evaporation zone. The evaporation area 6 is arranged between the adjacent conveying rollers 4, a flow guide sleeve 10 is arranged below the substrate in the evaporation area, the top surface of the flow guide sleeve 10 is open, a selenium source 13 and a metal source 14 are arranged on the lower portion of the inner side of the flow guide sleeve 10, the metal source 14 is one or more of a copper source, an indium source, a gallium source and an indium-gallium source, and a plurality of same metal sources can be arranged for alternate use. The selenium source 13 and the metal source 14 both adopt an upper heating and lower cooling mode to form an evaporation plume, namely, the upper parts of the selenium source and the metal source are heated by adopting electric heating plate radiation, and the lower parts of the selenium source and the metal source are cooled by adopting cooling liquid to form a surface evaporation plume which is hot at the upper part and cold at the lower part. The selenium source 13 and the metal source 14 are provided with upward steam vents 15 which are bellmouths expanding from bottom to top. The inclination angle of the bell mouth of the steam nozzle is equal to the inclination angle of the connecting line of the steam nozzle and each side edge of the upper surface of the air guide sleeve.
The evaporation area 6 is equipped with upper shield 11 in the top of basement, and upper shield 11 sets up between adjacent conveying roller 4, and the upper shield both sides are equipped with the arc wall of dodging the conveying roller and lack. The upper shield 11 and the guide cover 10 are buckled and sealed on the left side and the right side of the substrate 11, overflow gaps 8 are reserved on the top surface of the guide cover 10 and the bottom surface of the substrate 5 on the front side and the rear side of the conveying direction, and a suction gap 9 communicated with a vacuum cavity is reserved between the front adjacent side walls and the rear adjacent side walls of the guide cover 10 of the adjacent evaporation area 6. The evaporation area 6 is provided with a heating plate 12 above the substrate for heating the substrate, and the heating plate 12 is arranged at the lower inner side of the upper cover 11.
After the evaporation plumes of the selenium source and the metal source of the device finish film coating along the substrate which rises by the flow guide cover, more plumes flow out from the overflow gaps at the front side and the rear side, enter the suction gap, enter the vacuum cavity, are sucked by the vacuum pumping equipment and are cooled for deposition.
Claims (10)
1. The utility model provides a flexible volume is to volume copper indium gallium selenide evaporation plume control structure, includes the vacuum cavity, sets up in the vacuum cavity and puts spool and rolling shaft, puts and is equipped with a plurality of conveying rollers between spool and the rolling shaft, puts and receive and release and carry the basement backward in the past along the conveying roller between spool and the rolling shaft, its characterized in that: the roll face of basement is carried down and is distinguished through a plurality of coating by vaporization, and to single coating by vaporization district, the coating by vaporization district sets up between adjacent conveying roller, the coating by vaporization district is equipped with the kuppe in basement below, kuppe top surface opening, kuppe lower part set up selenium source and metal source, the coating by vaporization district is equipped with the upper shield in the top of basement, the upper shield is sealed with the kuppe in basement left and right sides lock, the overflow clearance is left with the basement bottom surface in front and back both sides, leaves the suction clearance that the formation communicates with the vacuum cavity between the adjacent lateral wall around the kuppe in adjacent coating by vaporization district.
2. The flexible roll-to-roll CIGS evaporation plume control structure of claim 1, wherein: the conveying rollers are arranged in an arc shape below the unwinding shaft and the winding shaft, the substrate is conveyed in a concave arc shape along the conveying rollers, and the top surfaces of the air guide sleeves are parallel to the substrate of the corresponding sections.
3. The flexible roll-to-roll CIGS evaporation plume control structure of claim 1, wherein: the air guide sleeve is a square cover body.
4. The flexible roll-to-roll CIGS evaporation plume control structure of claim 1, wherein: the evaporation coating area is provided with a heating plate for heating the substrate above the substrate, and the heating plate is arranged on the inner side or below the upper cover.
5. The structure of claim 1, 2 or 3, wherein the structure comprises: the selenium source and the metal source are provided with upward steam nozzles which are bellmouths extending from bottom to top.
6. The flexible roll-to-roll CIGS evaporation plume control structure of claim 5, wherein: the inclination angle of the bell mouth of the steam nozzle does not exceed the inclination angle of the connecting line of the steam nozzle and each side edge of the upper surface of the air guide sleeve.
7. The structure of claim 1, 2 or 3, wherein the structure comprises: the metal source is one or more of a copper source, an indium source, a gallium source and an indium-gallium source.
8. The structure of claim 1, 2 or 3, wherein the structure comprises: the selenium source and the metal source both adopt an upper heating and lower cooling mode to form evaporation plumes, namely, the upper parts of the selenium source and the metal source are heated by adopting electric heating plate radiation, and the lower parts of the selenium source and the metal source are cooled by adopting cooling liquid to form surface evaporation plumes with upper heat and lower cold.
9. The structure of claim 1, 2 or 3, wherein the structure comprises: the upper cover is arranged between the adjacent conveying rollers, and arc-shaped grooves for avoiding the conveying rollers are formed in the two sides of the upper cover.
10. The structure of claim 1, 2 or 3, wherein the structure comprises: and the front side and the rear side of the vacuum cavity are respectively provided with a vacuumizing device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210310446.9A CN114672784A (en) | 2022-03-28 | 2022-03-28 | Flexible reel-to-reel CIGS evaporation plume control structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210310446.9A CN114672784A (en) | 2022-03-28 | 2022-03-28 | Flexible reel-to-reel CIGS evaporation plume control structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN114672784A true CN114672784A (en) | 2022-06-28 |
Family
ID=82075262
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210310446.9A Pending CN114672784A (en) | 2022-03-28 | 2022-03-28 | Flexible reel-to-reel CIGS evaporation plume control structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114672784A (en) |
Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009185325A (en) * | 2008-02-05 | 2009-08-20 | Panasonic Electric Works Co Ltd | Vapor deposition apparatus |
| CN205501406U (en) * | 2016-04-21 | 2016-08-24 | 京东方科技集团股份有限公司 | Evaporation source and have evaporation equipment of this evaporation source |
| CN206273839U (en) * | 2016-12-29 | 2017-06-23 | 浙江尚越新能源开发有限公司 | A kind of flexible evaporated device altogether of volume to volume |
| CN109161853A (en) * | 2018-09-25 | 2019-01-08 | 合肥京东方光电科技有限公司 | Evaporated device and evaporation coating method |
| CN110106471A (en) * | 2019-06-18 | 2019-08-09 | 京东方科技集团股份有限公司 | A kind of deflector, crucible device, evaporated device and evaporation coating method |
| CN112176288A (en) * | 2020-10-05 | 2021-01-05 | 许华清 | Metal film evaporation equipment for processing film capacitor |
| CN112626465A (en) * | 2020-12-29 | 2021-04-09 | 尚越光电科技股份有限公司 | External selenium source structure of CIGS co-evaporation method |
| CN112626455A (en) * | 2020-12-17 | 2021-04-09 | 尚越光电科技股份有限公司 | Vacuum system for controlling reactive sputtering plume of flexible CIGS (copper indium gallium selenide) film |
| CN112663019A (en) * | 2020-12-29 | 2021-04-16 | 尚越光电科技股份有限公司 | Synchronous control structure for reel-to-reel conveying of CIGS co-evaporation method |
| CN112877670A (en) * | 2021-02-06 | 2021-06-01 | 合肥市辉耀真空材料有限责任公司 | Bead-planted film vacuum evaporation equipment with crucible as evaporation source and film coating process |
| WO2022017422A1 (en) * | 2020-07-21 | 2022-01-27 | 宝山钢铁股份有限公司 | Vacuum coating device for uniformly distributing metal steam by using guide plate type structure |
-
2022
- 2022-03-28 CN CN202210310446.9A patent/CN114672784A/en active Pending
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009185325A (en) * | 2008-02-05 | 2009-08-20 | Panasonic Electric Works Co Ltd | Vapor deposition apparatus |
| CN205501406U (en) * | 2016-04-21 | 2016-08-24 | 京东方科技集团股份有限公司 | Evaporation source and have evaporation equipment of this evaporation source |
| CN206273839U (en) * | 2016-12-29 | 2017-06-23 | 浙江尚越新能源开发有限公司 | A kind of flexible evaporated device altogether of volume to volume |
| CN109161853A (en) * | 2018-09-25 | 2019-01-08 | 合肥京东方光电科技有限公司 | Evaporated device and evaporation coating method |
| CN110106471A (en) * | 2019-06-18 | 2019-08-09 | 京东方科技集团股份有限公司 | A kind of deflector, crucible device, evaporated device and evaporation coating method |
| WO2022017422A1 (en) * | 2020-07-21 | 2022-01-27 | 宝山钢铁股份有限公司 | Vacuum coating device for uniformly distributing metal steam by using guide plate type structure |
| CN112176288A (en) * | 2020-10-05 | 2021-01-05 | 许华清 | Metal film evaporation equipment for processing film capacitor |
| CN112626455A (en) * | 2020-12-17 | 2021-04-09 | 尚越光电科技股份有限公司 | Vacuum system for controlling reactive sputtering plume of flexible CIGS (copper indium gallium selenide) film |
| CN112626465A (en) * | 2020-12-29 | 2021-04-09 | 尚越光电科技股份有限公司 | External selenium source structure of CIGS co-evaporation method |
| CN112663019A (en) * | 2020-12-29 | 2021-04-16 | 尚越光电科技股份有限公司 | Synchronous control structure for reel-to-reel conveying of CIGS co-evaporation method |
| CN112877670A (en) * | 2021-02-06 | 2021-06-01 | 合肥市辉耀真空材料有限责任公司 | Bead-planted film vacuum evaporation equipment with crucible as evaporation source and film coating process |
Non-Patent Citations (1)
| Title |
|---|
| 田丽等: "微电子工艺原理与技术", 哈尔滨工业大学出版社, pages: 238 * |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5908513B2 (en) | Apparatus and method for manufacturing thin film solar cells | |
| CN102844838A (en) | Roll-to-roll evaporation system and method to manufacture group ibiiiavia photovoltaics | |
| US20110274838A1 (en) | System and process for the continuous vacuum coating of a material in web form | |
| US10367116B2 (en) | Method of reducing sodium concentration in a transparent conductive oxide layer of a semiconductor device | |
| CN107794510B (en) | Vertical vacuum coating production line for flexible film | |
| US20140131198A1 (en) | Solar cell formation apparatus and method | |
| US20030172873A1 (en) | Apparatus and method for the production of flexible semiconductor devices | |
| CN114672784A (en) | Flexible reel-to-reel CIGS evaporation plume control structure | |
| CN205803586U (en) | A kind of multifunctional single Double-face continuous winding magnetic-controlled sputtering coating equipment | |
| CN214572197U (en) | Take coiling formula vacuum coating machine of cryrogenic main roll | |
| CN201648516U (en) | Production device for flat-plate solar heat absorption film-coating plate | |
| CN117107196A (en) | Cadmium telluride thin film solar cell, manufacturing method and coating device | |
| US20200010948A1 (en) | Shielded sputter deposition apparatus and method | |
| CN102220559A (en) | Production method and production device of flat solar-energy heat-absorbing film-coated plate | |
| CN205152317U (en) | Vertical coiling formula strap paper tinsel vacuum ion coating machine | |
| CN106086822B (en) | Suitable for the roll-to-roll vacuum coating reaction unit of batch processing | |
| JP2005126757A (en) | Apparatus and method for producing compound thin film | |
| CN105980067B (en) | Solution containment during buffer layer deposition | |
| US20200010947A1 (en) | Shielded sputter deposition apparatus and method | |
| CN201648513U (en) | Device for producing a flat-plate solar-energy heat-absorption film-coating plate | |
| CN102206807A (en) | Method and device for producing flat panel solar heat-absorption coated board | |
| CN109957779A (en) | Electrode continous way magnetron sputtering coating single side production line before thin-film solar cells | |
| CN204825033U (en) | Vacuum sputtering machine | |
| CN204325487U (en) | A kind of continuous vacuum ion film coating machine | |
| CN106048562B (en) | Parallel roll-to-roll vacuum coating system and vacuum coating method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |