CN205501406U - Evaporation source and have evaporation equipment of this evaporation source - Google Patents
Evaporation source and have evaporation equipment of this evaporation source Download PDFInfo
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- CN205501406U CN205501406U CN201620341052.XU CN201620341052U CN205501406U CN 205501406 U CN205501406 U CN 205501406U CN 201620341052 U CN201620341052 U CN 201620341052U CN 205501406 U CN205501406 U CN 205501406U
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- evaporation source
- plate body
- evaporation
- jet
- heater strip
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Abstract
The utility model provides an evaporation source and have evaporation equipment of this evaporation source. This evaporation source includes the shell body that has the accommodation space, wherein be provided with the jet on the shell body, an evaporation source body for setting up the evaporation material, the evaporation source body set up in in the accommodation space with the position that the jet is relative, just the evaporation source body with be formed with the evaporation gaseous flowing space that the material evaporates between the jet, first heater strip, set up in among the flowing space. The evaporation source is through setting up flowing space in evaporation source body top, and sets up the evaporation material that first heater strip is used for being passing through among the flowing space and carry out secondary heating, makes steam temperature improve to be difficult for forming the crystallization at the jet, avoid the jam problem.
Description
Technical field
This utility model relates to display manufacture technology field, refers in particular to a kind of evaporation source and has this evaporation
The evaporated device in source.
Background technology
Vacuum evaporation refers to heat Coating Materials under high vacuum environment so that it is distil and on substrate
Film forming.Existing large scale linear evaporation source, crucible is deposited in evaporation source, during evaporation outside crucible
Crucible is heated by portion, and the Coating Materials steam of formation sprays from injection equipment.
Generally realize the control to evaporation rate by Discrete control source temperature, but owing to large scale is steamed
The crucible size of coating apparatus is relatively big, and evaporation source internal material is heated inequality, and the material vapor in crucible there will be
Phenomenon pockety, so when evaporating material and spraying from injection equipment, owing to jet temperature is relatively low,
Material easily forms recrystallization, blocks jet.
Utility model content
The purpose of technical solutions of the utility model is to provide a kind of evaporation source and has the evaporation of this evaporation source and set
Problem that is standby, that solve to use the evaporation source of prior art to easily cause jet blocking.
A kind of evaporation source of this utility model offer, wherein, including:
There is the shell body of accommodation space, wherein said shell body is provided with jet；
For arranging the evaporation source body of evaporation material, described evaporation source body is arranged in described accommodation space
It is formed with evaporation material between the position relative with described jet, and described evaporation source body and described jet
The flowing space of material institute boil-off gas；
First heater strip, is arranged in the described flowing space.
Preferably, evaporation source described above, wherein, described evaporation source also includes:
Air-flow guide frame, is arranged in the described flowing space, and described first heater strip is fixed on described air-flow
On guide frame.
Preferably, evaporation source described above, wherein, described air-flow guide frame includes at least two plate bodys,
Wherein it is respectively arranged with through hole on the first plate body and the second plate body, and described first plate body and described second plate body
Being obliquely installed relative to the material surface of described evaporation material, described evaporation material institute evaporation section gas passes through
Described jet is arrived after through hole on described first plate body or described second plate body.
Preferably, evaporation source described above, wherein, described air-flow guide frame also includes the 3rd plate body,
Between described first plate body and described second plate body, and erect relative to the material surface of described evaporation material
Straight setting.
Preferably, evaporation source described above, wherein, described first plate body and described second plate body phase respectively
Described 3rd plate body is symmetrical arranged.
Preferably, evaporation source described above, wherein, described first plate body, described second plate body and described
The inside of the 3rd plate body is respectively arranged with described first heater strip.
Preferably, evaporation source described above, wherein, described 3rd plate body include respectively with multiple described sprays
The prominent structure that loophole is corresponding, each of which highlights structure and extends into wherein in jet described in accordingly,
And described first heater strip being arranged at described 3rd plate body includes the inside that extends into described prominent structure
Part.
Preferably, evaporation source described above, wherein, described evaporation source body includes crucible and for placing
The fixed structure of crucible, wherein said fixed structure arranges the second heater strip.
Preferably, evaporation source described above, wherein, described crucible is multiple, on described fixed structure
Arrangement is string successively, and wherein said jet is also multiple, along parallel with described crucible arragement direction
Direction is arranged as string.
This utility model also provides for a kind of evaporated device, including the evaporation source described in as above any one.
At least one in this utility model specific embodiment technique scheme has the advantages that
Described evaporation source is by being provided above in the flowing space, and the flowing space arranging first at evaporation source body
Heater strip, for carrying out post bake by the evaporation material passed through, makes steam temperature improve, thus is difficult to
Jet forms crystallization, it is to avoid blockage problem.
Accompanying drawing explanation
Fig. 1 represents the in-built Facad structure schematic diagram of evaporation source described in this utility model embodiment；
Fig. 2 represents the in-built side structure schematic diagram of evaporation source described in this utility model embodiment；
Fig. 3 represents in gas-flow deflector set by evaporation source described in this utility model embodiment, the first plate body or
The structural representation of the second plate body；
Fig. 4 represents in gas-flow deflector set by evaporation source described in this utility model embodiment, the 3rd plate body
Structural representation.
Detailed description of the invention
For making the technical problems to be solved in the utility model, technical scheme and advantage clearer, below will knot
Close specific embodiment and accompanying drawing is described in detail.
Evaporation source described in this utility model specific embodiment, including:
There is the shell body of accommodation space, wherein said shell body is provided with jet；
For arranging the evaporation source body of evaporation material, described evaporation source body is arranged in described accommodation space
It is formed with evaporation material between the position relative with described jet, and described evaporation source body and described jet
The flowing space of material institute boil-off gas；
First heater strip, is arranged in the described flowing space.
Evaporation source described in the utility model by being provided above space, namely the flowing space at evaporation source body,
And the flowing space arranges heater strip (the first heater strip) add for carrying out secondary by the evaporation material passed through
Heat, makes steam temperature improve, thus is difficult to form crystallization at jet, it is to avoid blockage problem.
It is preferred that evaporation source described in said structure also includes air-flow guide frame, it is arranged in the flowing space,
Wherein the first heater strip is fixed on this air-flow guide frame.
By air-flow guide frame, air-flow is guided, control the flowing space is evaporated material institute boil-off gas
Flowing, make evaporation material more uniform when jet sprays, thus the film forming reaching to improve evaporation source be equal
The purpose of even property.
Below in conjunction with accompanying drawing, the concrete structure of evaporation source described in this utility model embodiment is described in detail.
Refering to Fig. 1 and Fig. 2, described in this utility model specific embodiment, the concrete structure of evaporation source includes:
There is the shell body 10 of accommodation space 11, be wherein provided with jet 12 on shell body 10；
For arranging the evaporation source body 20 of evaporation material, wherein evaporation source body 20 is arranged at accommodation space
Position relative with jet 12 in 11, and it is formed with evaporation between evaporation source body 20 and jet 12
The flowing space 30 of material institute boil-off gas.
In this utility model specific embodiment, evaporation source is formed as linear evaporation source, namely jet 12 is
Multiple, it is arranged in order as string along a direction.Specifically, evaporation source body 20 includes that crucible is (in figure not
Display) and for placing the fixed structure 21 of crucible, fixed structure 21 is provided with the second heater strip 22,
For heating for crucible, form material vapor after making the evaporation material in crucible be heated, spray from jet 12
Go out the plated film for substrate.
Specifically, in linear evaporation source, as it is shown in figure 1, it is length that fixed structure 21 arranges the end face of crucible
Elongated shape, crucible is multiple, and on fixed structure 21, arrangement is institute on string, and shell body 10 successively
The jet 12 arranged also is multiple, is arranged as string, base along the direction paralleled with crucible arragement direction
In this kind of structure, each jet 12 is sprayed the boil-off gas of evaporation material and is formed as the linear alignment.
Further, evaporation source described in this utility model specific embodiment, at evaporation source body 20 and jet
In the flowing space 30 formed between 12, it is additionally provided with air-flow guide frame, including at least two plate bodys,
The through hole passed through for boil-off gas it is provided with on plate body.By air-flow guide frame by evaporation source body 20
The flowing space 30 of top is divided into multiple space, makes evaporation source body be formed the boil-off gas of evaporation material
Body is evenly divided in the flowing space 30, so makes to arrive the boil-off gas at each jet and knows from experience more
Adding uniformly, evaporation material is more uniform when jet sprays, thus the film forming reaching to improve evaporation source is uniform
The purpose of property.
Refering to Fig. 1, Fig. 2, Fig. 3 and Fig. 4, the air-flow guide frame in the flowing space 30 specifically includes:
First plate body 41, the length direction along the first plate body 41 is evenly distributed with multiple through hole 44；
Second plate body 42, the length direction along the second plate body 42 is evenly distributed with multiple through hole 44；
3rd plate body 43, between the first plate body 41 and the second plate body 42, and relative to evaporation material
Material surface be vertically arranged；
Additionally, as Fig. 2, the first plate body 41 and the second plate body 42 evaporate relative on evaporation source body 20
The material surface of material is obliquely installed, so evaporation material institute evaporation section gas through the first plate body 41 or
Through hole on person's the second plate body 42, arrives jet 12 after making air current flow more uniformly.Utilize the first plate
The flowing space 30 is divided into four spaces by body the 41, second plate body 42 and the 3rd plate body 43, evaporates material
The air current flow that institute's boil-off gas is divided in four parts, and every part is more uniform so that arrive each
Boil-off gas at jet is known from experience more uniform.
It is preferred that the first plate body 41 and the second plate body 42 are respectively relative to the 3rd plate body 43 and are symmetrical arranged,
So that the space that the flowing space 30 is divided is more uniform, arriving the boil-off gas at each jet also can be more
Add uniformly.
First plate body the 41, second plate body 42 of above-mentioned set-up mode and the 3rd plate body 43 can use respectively
The mode being fixed on shell body 10 is fixed in the inside of the flowing space 30, and those skilled in the art should be able to
Its fixed form of solution much of that, and this set-up mode research emphasis the most of the present utility model, retouch the most in detail at this
State.
On the basis of the air-flow guide frame using said structure, first above-mentioned plate body the 41, second plate
It is respectively arranged with the first heater strip 50 on body 42 and the 3rd plate body 43, as shown in Figure 3 and Figure 4, is used for
In the flowing space 30, the boil-off gas of evaporation material is carried out post bake, improve satisfying within evaporation source
And vapour pressure, make evaporation material more uniform when jet 12 sprays, and owing to steam temperature improves,
It is difficult to form crystallization at jet, it is to avoid blockage problem.
It is preferred that shown in Fig. 4, the 3rd plate body 43 includes prominent knot corresponding with multiple jets 12 respectively
Structure 431, the first heater strip 50 being arranged on the 3rd plate body 43 includes extending in prominent structure 431
The part in portion.In conjunction with Fig. 1, when the 3rd plate body 43 is vertically arranged in the flowing space 30, each prominent
Structure 431 is inserted in the inside of a jet 12 accordingly, so makes partly the first heater strip 50 extend
Enter jet 12 internal.More preferably, in each jet 12, it is provided with the first heater strip 50, with
Fully the boil-off gas at jet 12 is carried out post bake.
More than based on, use the evaporation source of said structure, inside evaporation source, be divided into two-part, bottom
Demultiplexing, in making evaporation material be thermally formed boil-off gas for crucible heating, is partially formed the flowing space, arranges
There is heater strip, carry out post bake, and use deflector to control boil-off gas in the flowing within evaporation source,
Make the material vapor mix homogeneously within evaporation source, improve the temperature within jet, thus reach accurately to control
Evaporation source evaporation rate processed, and avoid the effect that jet blocks.
More than it is described in detail for structure to evaporation source described in the utility model as a example by linear evaporation source,
It is understood that the evaporation source of above-mentioned principle is applicable not only to linear evaporation source, those skilled in the art can
To carry out being suitably modified in the evaporation source being applied to other structures, as being applied to the evaporation of large scale crucible structure
In source.
On the other hand this utility model embodiment also provides for the evaporation of a kind of evaporation source using said structure and sets
Standby.
Based on above description, those skilled in the art should be able to understand and use the evaporation of above-mentioned evaporation source to set
Standby concrete structure, does not repeats them here.
The foregoing is only preferred embodiment of the present utility model, not in order to limit this utility model,
All within spirit of the present utility model and principle, any modification, equivalent substitution and improvement etc. made, all
Within protection domain of the present utility model should be included in.
Claims (10)
1. an evaporation source, it is characterised in that including:
There is the shell body of accommodation space, wherein said shell body is provided with jet；
For arranging the evaporation source body of evaporation material, described evaporation source body is arranged in described accommodation space
It is formed with evaporation material between the position relative with described jet, and described evaporation source body and described jet
The flowing space of material institute boil-off gas；
First heater strip, is arranged in the described flowing space.
2. evaporation source as claimed in claim 1, it is characterised in that described evaporation source also includes:
Air-flow guide frame, is arranged in the described flowing space, and described first heater strip is fixed on described air-flow
On guide frame.
3. evaporation source as claimed in claim 2, it is characterised in that described air-flow guide frame include to
Few two plate bodys, are wherein respectively arranged with through hole on the first plate body and the second plate body, and described first plate body and institute
State the second plate body to be obliquely installed relative to the material surface of described evaporation material, described evaporation material institute evaporation part
Gas is divided to arrive described jet after the through hole on described first plate body or described second plate body.
4. evaporation source as claimed in claim 3, it is characterised in that described air-flow guide frame also includes
3rd plate body, between described first plate body and described second plate body, and relative to described evaporation material
Material surface is vertically arranged.
5. evaporation source as claimed in claim 4, it is characterised in that described first plate body and described second
Plate body is respectively relative to described 3rd plate body and is symmetrical arranged.
6. evaporation source as claimed in claim 4, it is characterised in that described first plate body, described second
The inside of plate body and described 3rd plate body is respectively arranged with described first heater strip.
7. evaporation source as claimed in claim 6, it is characterised in that described 3rd plate body include respectively with
The prominent structure that multiple described jets are corresponding, each of which highlights structure and extends into a wherein institute accordingly
State in jet, and described first heater strip being arranged at described 3rd plate body includes extending into described highlighting
The part of the inside of structure.
8. evaporation source as claimed in claim 1, it is characterised in that described evaporation source body includes crucible
Fixed structure with for placing crucible, wherein said fixed structure arranges the second heater strip.
9. evaporation source as claimed in claim 8, it is characterised in that described crucible is multiple, described
On fixed structure, arrangement is string successively, and wherein said jet is also multiple, edge and described crucible arrangement side
It is arranged as string to parallel direction.
10. an evaporated device, it is characterised in that include the steaming as described in any one of claim 1 to 9
Rise.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620341052.XU CN205501406U (en) | 2016-04-21 | 2016-04-21 | Evaporation source and have evaporation equipment of this evaporation source |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620341052.XU CN205501406U (en) | 2016-04-21 | 2016-04-21 | Evaporation source and have evaporation equipment of this evaporation source |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205501406U true CN205501406U (en) | 2016-08-24 |
Family
ID=56706365
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620341052.XU Active CN205501406U (en) | 2016-04-21 | 2016-04-21 | Evaporation source and have evaporation equipment of this evaporation source |
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| Country | Link |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106906445A (en) * | 2017-03-29 | 2017-06-30 | 武汉华星光电技术有限公司 | A kind of evaporation source |
| CN114672784A (en) * | 2022-03-28 | 2022-06-28 | 尚越光电科技股份有限公司 | Flexible reel-to-reel CIGS evaporation plume control structure |
| CN116005114A (en) * | 2023-01-04 | 2023-04-25 | 京东方科技集团股份有限公司 | Vapor deposition source and vapor deposition device |
-
2016
- 2016-04-21 CN CN201620341052.XU patent/CN205501406U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106906445A (en) * | 2017-03-29 | 2017-06-30 | 武汉华星光电技术有限公司 | A kind of evaporation source |
| CN106906445B (en) * | 2017-03-29 | 2019-02-12 | 武汉华星光电技术有限公司 | A kind of evaporation source |
| CN114672784A (en) * | 2022-03-28 | 2022-06-28 | 尚越光电科技股份有限公司 | Flexible reel-to-reel CIGS evaporation plume control structure |
| CN116005114A (en) * | 2023-01-04 | 2023-04-25 | 京东方科技集团股份有限公司 | Vapor deposition source and vapor deposition device |
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| GR01 | Patent grant |