CN112663019A - Synchronous control structure for reel-to-reel conveying of CIGS co-evaporation method - Google Patents
Synchronous control structure for reel-to-reel conveying of CIGS co-evaporation method Download PDFInfo
- Publication number
- CN112663019A CN112663019A CN202011592354.1A CN202011592354A CN112663019A CN 112663019 A CN112663019 A CN 112663019A CN 202011592354 A CN202011592354 A CN 202011592354A CN 112663019 A CN112663019 A CN 112663019A
- Authority
- CN
- China
- Prior art keywords
- shaft
- conveying
- roll
- cigs
- evaporation method
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 24
- 238000010549 co-Evaporation Methods 0.000 title claims abstract description 22
- 230000001360 synchronised effect Effects 0.000 title claims abstract description 11
- 238000004804 winding Methods 0.000 claims abstract description 28
- 239000000463 material Substances 0.000 claims abstract description 27
- 238000005096 rolling process Methods 0.000 claims description 17
- 238000001514 detection method Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 abstract description 20
- 238000000576 coating method Methods 0.000 abstract description 14
- 239000011248 coating agent Substances 0.000 abstract description 12
- 238000004519 manufacturing process Methods 0.000 abstract description 9
- 238000005260 corrosion Methods 0.000 abstract description 3
- 230000007797 corrosion Effects 0.000 abstract 1
- KTSFMFGEAAANTF-UHFFFAOYSA-N [Cu].[Se].[Se].[In] Chemical compound [Cu].[Se].[Se].[In] KTSFMFGEAAANTF-UHFFFAOYSA-N 0.000 description 14
- 238000009501 film coating Methods 0.000 description 5
- 239000007888 film coating Substances 0.000 description 5
- 239000010408 film Substances 0.000 description 4
- 238000003908 quality control method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 229910052711 selenium Inorganic materials 0.000 description 1
- 239000011669 selenium Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Images
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
The invention relates to a synchronous control structure for roll-to-roll conveying of a CIGS co-evaporation method, and solves the problems that the abnormity of a conveying roller can influence the coating quality and is difficult to find in time under the non-visible production environment with high temperature and high corrosion of the CIGS co-evaporation method roll. The device comprises a vacuum cavity, wherein an unwinding shaft and a winding shaft are arranged in the vacuum cavity, a substrate coiled material is unwound and wound between the unwinding shaft and the winding shaft and conveyed, a plurality of conveying rollers are arranged between the unwinding shaft and the winding shaft, the end part of each conveying roller is provided with a half shaft in an axially protruding manner, one section of the circumference of the half shaft is a cylindrical surface which is coaxial with the conveying rollers and has a radius of R, the distance between other positions of the circumference of the half shaft and the axis is smaller than R, a thimble is arranged on one side of the half shaft, and the distance between the tip of the thimble and. According to the invention, the rotation period signal of the conveying roller is converted into the square wave to be output through the matching structure of the half shaft and the thimble, and the rotation speed data can be obtained and the synchronism of the conveying roller can be detected through the analysis of the period and the phase of the square wave.
Description
Technical Field
The invention belongs to the field of solar cell production, relates to CIGS flexible solar cell production and processing equipment, and particularly relates to a synchronous roll-to-roll conveying control structure of a CIGS co-evaporation method.
Background
The flexible solar cell sheet is formed by forming a solar photovoltaic material coating on a flexible windable substrate. The Copper Indium Gallium Selenide (CIGS) thin film cell is a solar photovoltaic material with high mass-power ratio and good stability, and is generally considered as a flexible solar cell material with the greatest development prospect. The multi-element co-evaporation method is the most widely applied CIGS film coating method, film coating is completed in a vacuum environment, and a polycrystalline coating is formed on the surface of a substrate through reaction by co-evaporation of elements such as copper, indium, gallium and selenium. The vapor coating is finished in a vacuum, high-temperature and high-corrosion environment, and the coating process inside cannot be directly visible.
In order to improve the production efficiency and ensure the continuity of production, continuous coating is generally carried out on a continuous substrate in the CIGS coating process. The raw material of the continuous substrate is in a winding drum type, and the substrate with the film after the film coating is finished may be wound into a winding drum, so the process of unwinding, film coating and winding the substrate is called a roll-to-roll production process. In the roll-to-roll production process, a plurality of driving rollers are required to be arranged between the unreeling device and the reeling device so as to ensure that the substrate material can be conveyed along a preset route, and the clamping and the desynchronization of any conveying roller can cause the relative sliding between the substrate and the surface of the conveying roller, so that the substrate shakes to influence the film coating quality. Because the steam coating is carried out in a non-visible state, the abnormity of the rotating roller is difficult to find in time, so that the coating is not uniform, and economic loss is caused.
Disclosure of Invention
The invention aims to solve the problems that the abnormity of a conveying roller can influence the coating quality and is difficult to find in time under the high-temperature and high-corrosion invisible production environment because the roll-to-roll production of the CIGS co-evaporation method is conveyed by the conveying roller, and provides a synchronous control structure for the roll-to-roll conveying of the CIGS co-evaporation method, which can monitor the rotation state of each conveying roller in real time and ensure that the conveying rollers are in a synchronous state.
The technical scheme adopted by the invention for solving the technical problems is as follows: the utility model provides a CIGS evaporates volume to volume of method altogether and carries synchro control structure, includes the vacuum cavity, and the vacuum cavity sets up and unreels axle and rolling axle, unreels and receive and release between axle and the rolling axle and carry the base coiled material, its characterized in that: the novel winding and unwinding device is characterized in that a plurality of conveying rollers are arranged between the unwinding shaft and the winding shaft, a half shaft is arranged at the end part of each conveying roller in an axially protruding mode, one section of the circumference of each half shaft is a cylindrical surface which is coaxial with the conveying rollers and has the radius of R, the distance between the other positions of the circumference of each half shaft and the axis is smaller than R, an ejector pin is arranged on one side of each half shaft, and the distance between the tip of each ejector pin and the conveying roller axis. The device is characterized in that a conveying curved surface of a substrate coiled material is arranged between an unwinding shaft and a winding shaft through conveying rollers and used for CIGS co-evaporation coating, the substrate coiled material is conveyed at a constant speed under a normal working state, the rotating speed of each conveying roller is the same, the winding radius of the unwinding shaft is gradually reduced, so that the rotating speed is gradually changed from small to large, correspondingly, the winding radius of the winding shaft is gradually increased, and the rotating speed is gradually changed from large to small. In the traditional conveying control, the speed change of the unwinding shaft and the winding shaft is carried out through fixed data, the adjustability is poor, and when abnormity exists in the conveying process, the coating of the substrate coiled material is not uniform. In the device, a half shaft is arranged at the shaft end of each conveying roller in a protruding mode, the cylindrical surface of the half shaft can be abutted and contacted with the ejector pin, other positions are curved surfaces or planes with the radius smaller than R and are not contacted with the ejector pin, an electric signal is output according to the contact signal of the ejector pin, a periodically-changed square wave can be output, the rotating speed of each conveying roller can be calculated through the period T of the square wave, and therefore the current conveying speed of the substrate coiled material is calculated. Different conveying roller initial position is different, there is phase difference phi between the square wave, when the phase difference phi of different conveying roller output square wave is invariable, the conveying roller is synchronous, phase difference phi when different conveying roller output square wave changes, then there is the difference in rotational speed between the conveying roller, it then means that the conveying roller is asynchronous to have the difference in rotational speed, must have the slow conveying roller of rotational speed and the basement coiled material between skid or idle running, lead to basement coiled material shake, influence the coating film homogeneity, need adjust the tensile force of basement coiled material, perhaps maintain the conveying roller.
Preferably, an oscilloscope and a power supply are connected in series outside the vacuum cavity at the rear end of the thimble and the end of the conveying roller to form an electric signal detection circuit together.
Preferably, the half-shaft is a part of a cylinder, and the radian of the cylindrical surface is 90-270 degrees.
As another preferred mode, the half shaft is of a cam structure, the maximum radius of the cam is R, and the cam surfaces with the radius of R are continuously arranged for 90-270 degrees.
Preferably, the shaft ends of the unwinding shaft and the winding shaft are also provided with half shaft and thimble structures. Unreel the axle, the rolling axle is along with the rolling of basement coiled material, and the rotational speed can change, utilizes semi-axis structure can acquire the rotation cycle of unreeling the axle, the rolling axle equally, and the rotation cycle of unreeling the axle, the rolling axle is the data that continuously changes, through the real-time contrast of the rotation cycle of unreeling the axle, the rolling axle with the conveying roller, can acquire the basement coiled material thickness of unreeling the axle and rolling axle separately coiling to reach the processing progress of current coiled material.
Preferably, one of the conveying rollers close to the winding shaft is a tension roller, and two ends of the tension roller are respectively provided with an independent tension sensor. The data of the tension sensor can be used for adjusting the rotating speed of the unwinding shaft and the winding shaft, so that the substrate coiled material between the unwinding shaft and the winding shaft keeps reasonable tension, the internal stress is not increased due to excessive stretching, and the surface of the coiled material is not flat due to looseness.
Preferably, the unwinding shaft is connected with an independently controllable unwinding servo motor, and the winding shaft is connected with an independently adjustable winding servo motor.
Preferably, the ejector pins are arranged in an inclined mode, and the inclined angle of the ejector pins is located between the radial direction and the tangential direction of the semi-axis cylindrical surface. The existence of the inclination angle ensures smooth guiding of the butting position of the thimble and the cylindrical surface of the half shaft.
Preferably, the included angle between the thimble and the radial direction of the half-axis cylindrical surface is not less than 30 degrees.
Preferably, the cylindrical surface with the radius of the half shaft R has a positive tolerance, and the distance R between the tip of the thimble and the axis has a negative tolerance.
According to the invention, the rotation period signal of the conveying roller is converted into square wave to be output through the matching structure of the half shaft and the thimble, and the rotation speed data can be obtained and the synchronism of the conveying roller can be detected through the analysis of the period and the phase of the square wave; the invention also provides a half shaft structure for the shaft ends of the winding shaft and the unwinding shaft, monitors the winding and unwinding speed and the processing progress, and is used for tension control and processing progress monitoring of the film-coated roll-to-roll conveying of the CIGS co-evaporation method.
Drawings
The invention is further described below with reference to the accompanying drawings.
FIG. 1 is a schematic diagram of an embodiment of the present invention.
FIG. 2 is a schematic view of the half-shaft construction of the present invention.
FIG. 3 is a schematic view of the angular fit of the half-shafts and the ejector pins of the present invention.
Fig. 4 is a schematic diagram of the period and phase difference of the square wave output by the different conveyor rollers of the present invention.
In the figure: 1. the device comprises a vacuum cavity, 2, an unreeling shaft, 3, an unreeling servo motor, 4, a reeling shaft, 5, a reeling servo motor, 6, a substrate coiled material, 7, a conveying roller, 8, a tension sensor, 9, an evaporation source, 10, a quality control sensor, 11, a half shaft, 12 and a thimble.
Detailed Description
The invention is further illustrated by the following specific examples in conjunction with the accompanying drawings.
Example (b): a synchronous control structure for the reel-to-reel transportation of CIGS co-evaporation method, as shown in fig. 1. This device includes vacuum cavity 1, sets up in the vacuum cavity and unreels axle 2 and rolling shaft 4, unreel axle 2 and connect and set up the servo motor 3 that unreels that can independent control, rolling shaft 4 is connected and is set up rolling servo motor 5 that can independently adjust. The substrate web 6 is wound and unwound between the unwinding reel 2 and the winding reel 4. A plurality of conveying rollers 7 are arranged between the unreeling shaft 2 and the reeling shaft 4, and the conveying rollers 7 are conveying tracks of the substrate coiled material 6. An evaporation source 9 for CIGS co-evaporation and a quality control sensor 10 are arranged below the conveying middle section of the substrate coiled material 6, and the quality control sensor 10 comprises a temperature sensor, a thickness measuring sensor, a component analyzer, a vacuum gauge and the like.
As shown in fig. 2 and 3, an end of each of the conveyor rollers 7 is provided with a half shaft 11 in a protruding manner in the axial direction, the half shaft 11 is a semi-cylindrical mechanism, and the circumference of the half shaft 11 is provided with a cylindrical surface with a radius R of 180 degrees, and the cylindrical surface is coaxial with the conveyor roller. The other 180 degrees of the circumference of half shaft 11 is a plane formed by cylindrical halving. The 180 degree plane of half shaft 11 may also be a cam segment with a radius less than R. And a thimble 12 is arranged on the side of the half shaft, and the distance between the tip of the thimble 12 and the axis of the conveying roller is R. The thimble 12 is arranged obliquely, the inclination angle of the thimble is located between the radial direction and the tangential direction of the half-axis cylindrical surface, and as shown in fig. 3, the included angle between the thimble and the radial direction of the half-axis cylindrical surface is 45 degrees. The radius of the half shaft 11 is a cylindrical surface with a radius R, and the distance R between the tip of the thimble 12 and the axis is a negative tolerance. The rear end of the thimble 12 and the end of the conveying roller 7 are connected in series with an oscilloscope and a power supply outside the vacuum cavity 1 to form an electric signal detection loop together.
The shaft ends of the unreeling shaft 2 and the reeling shaft 4 are also provided with half shafts 11 and thimbles 12 which have the same structure as the shaft ends of the conveying rollers. One of the conveying rollers 7 close to one end of the winding shaft 4 is a tension roller, and two ends of the tension roller are respectively provided with an independent tension sensor 8.
As shown in fig. 4, an electrical signal is output according to the thimble contact signal, a square wave with a period varying periodically can be output, and the rotation speed of each conveying roller can be calculated through the period T of the square wave, so that the current substrate web conveying speed can be calculated. Different conveying roller initial position is different, there is phase difference phi between the square wave, when the phase difference phi of different conveying roller output square waves is invariable, the conveying roller is synchronous, phase difference phi when different conveying roller output square waves changes, then there is the difference in rotational speed between the conveying roller, it then means that the conveying roller is asynchronous to have the difference in rotational speed, must have the slow conveying roller of rotational speed and the basement coiled material between skid or idle running, lead to basement coiled material shake, influence the coating film homogeneity, need adjust the conveying roller, perhaps basement coiled material rate of tension is not enough, need promote the tensile force. The rotation period of unreeling the axle, rolling the axle also can acquire through the semi-axis, and the rotation period of unreeling the axle, rolling the axle is the data that continuously changes, through the real-time contrast of the rotation period of unreeling the axle, rolling the axle and conveying roller, can acquire the base coiled material thickness of unreeling the axle and rolling the axle separately coiling to reachd the processing progress of current coiled material.
Claims (10)
1. The utility model provides a CIGS evaporates volume to volume of method altogether and carries synchro control structure, includes the vacuum cavity, and the vacuum cavity sets up and unreels axle and rolling axle, unreels and receive and release between axle and the rolling axle and carry the base coiled material, its characterized in that: the novel winding and unwinding device is characterized in that a plurality of conveying rollers are arranged between the unwinding shaft and the winding shaft, a half shaft is arranged at the end part of each conveying roller in an axially protruding mode, one section of the circumference of each half shaft is a cylindrical surface which is coaxial with the conveying rollers and has the radius of R, the distance between the other positions of the circumference of each half shaft and the axis is smaller than R, an ejector pin is arranged on one side of each half shaft, and the distance between the tip of each ejector pin and the conveying roller axis.
2. The structure for synchronously controlling roll-to-roll conveying of CIGS co-evaporation method according to claim 1, wherein: the rear end of the thimble and the end part of the conveying roller are connected in series with an oscilloscope and a power supply outside the vacuum cavity to jointly form an electric signal detection loop.
3. The structure for synchronously controlling roll-to-roll conveying of CIGS co-evaporation method according to claim 1 or 2, wherein: the semi-axis is a part of a cylinder, and the radian of the cylindrical surface is 90-270 degrees.
4. The structure for synchronously controlling roll-to-roll conveying of CIGS co-evaporation method according to claim 1 or 2, wherein: the half shaft is of a cam structure, the maximum radius of the cam is R, and the cam surface with the radius of R is continuously arranged for 90-270 degrees.
5. The structure for synchronously controlling roll-to-roll conveying of CIGS co-evaporation method according to claim 1 or 2, wherein: the axle ends of the unreeling shaft and the reeling shaft are also provided with half shafts and ejector pin structures.
6. The structure for synchronously controlling roll-to-roll conveying of CIGS co-evaporation method according to claim 1, wherein: one of the conveying rollers close to the winding shaft is a tension roller, and two ends of the tension roller are respectively provided with an independent tension sensor.
7. The structure for synchronously controlling roll-to-roll conveying of CIGS co-evaporation method according to claim 1 or 6, wherein: the unwinding shaft is connected with an independently controllable unwinding servo motor, and the winding shaft is connected with an independently adjustable winding servo motor.
8. The synchronous roll-to-roll conveying structure of CIGS co-evaporation method as claimed in claim 1, 2 or 6, wherein: the thimble inclines to set up, and the inclination of thimble is located between the radial and the tangential of semi-axis face of cylinder.
9. The structure for synchronously controlling roll-to-roll conveying of CIGS co-evaporation method according to claim 8, wherein: and the included angle between the thimble and the radial direction of the half shaft cylindrical surface is not less than 30 degrees.
10. The synchronous roll-to-roll conveying structure of CIGS co-evaporation method as claimed in claim 1, 2 or 6, wherein: the cylindrical surface with the semi-axis radius R has positive tolerance, and the distance R between the tip of the thimble and the axis has negative tolerance.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011592354.1A CN112663019B (en) | 2020-12-29 | 2020-12-29 | Synchronous control structure for roll-to-roll conveying of CIGS co-evaporation method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011592354.1A CN112663019B (en) | 2020-12-29 | 2020-12-29 | Synchronous control structure for roll-to-roll conveying of CIGS co-evaporation method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN112663019A true CN112663019A (en) | 2021-04-16 |
| CN112663019B CN112663019B (en) | 2023-05-09 |
Family
ID=75411863
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011592354.1A Active CN112663019B (en) | 2020-12-29 | 2020-12-29 | Synchronous control structure for roll-to-roll conveying of CIGS co-evaporation method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112663019B (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113210438A (en) * | 2021-05-20 | 2021-08-06 | 广西北港不锈钢有限公司 | High-speed rolling method of stainless steel cold-rolled sheet |
| CN114672784A (en) * | 2022-03-28 | 2022-06-28 | 尚越光电科技股份有限公司 | Flexible reel-to-reel CIGS evaporation plume control structure |
| CN114686838A (en) * | 2022-03-28 | 2022-07-01 | 尚越光电科技股份有限公司 | High-stability transmission system of CIGS co-evaporation equipment |
| CN114686838B (en) * | 2022-03-28 | 2024-06-11 | 尚越光电科技股份有限公司 | High-stability transmission system of CIGS co-evaporation equipment |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107794510A (en) * | 2016-08-31 | 2018-03-13 | 湘潭宏大真空技术股份有限公司 | Fexible film vertical vacuum coating film production line |
| WO2018114379A1 (en) * | 2016-12-22 | 2018-06-28 | Flisom Ag | Roll-to roll vapor deposition system |
| CN108217270A (en) * | 2018-03-19 | 2018-06-29 | 浙江德龙科技有限公司 | A kind of transmission and tension control system and its control method |
| CN108928665A (en) * | 2017-05-26 | 2018-12-04 | 北京创昱科技有限公司 | A kind of transmission device and transmission control method |
| CN110342296A (en) * | 2019-08-16 | 2019-10-18 | 苏州金纬片板膜智能装备有限公司 | Retractable volume all-in-one machine for composite sheet |
| CN110697476A (en) * | 2018-07-09 | 2020-01-17 | 北京铂阳顶荣光伏科技有限公司 | Coiled material uncoiling and conveying equipment |
-
2020
- 2020-12-29 CN CN202011592354.1A patent/CN112663019B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107794510A (en) * | 2016-08-31 | 2018-03-13 | 湘潭宏大真空技术股份有限公司 | Fexible film vertical vacuum coating film production line |
| WO2018114379A1 (en) * | 2016-12-22 | 2018-06-28 | Flisom Ag | Roll-to roll vapor deposition system |
| CN108928665A (en) * | 2017-05-26 | 2018-12-04 | 北京创昱科技有限公司 | A kind of transmission device and transmission control method |
| CN108217270A (en) * | 2018-03-19 | 2018-06-29 | 浙江德龙科技有限公司 | A kind of transmission and tension control system and its control method |
| CN110697476A (en) * | 2018-07-09 | 2020-01-17 | 北京铂阳顶荣光伏科技有限公司 | Coiled material uncoiling and conveying equipment |
| CN110342296A (en) * | 2019-08-16 | 2019-10-18 | 苏州金纬片板膜智能装备有限公司 | Retractable volume all-in-one machine for composite sheet |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113210438A (en) * | 2021-05-20 | 2021-08-06 | 广西北港不锈钢有限公司 | High-speed rolling method of stainless steel cold-rolled sheet |
| CN113210438B (en) * | 2021-05-20 | 2023-03-24 | 广西北港不锈钢有限公司 | High-speed rolling method of stainless steel cold-rolled sheet |
| CN114672784A (en) * | 2022-03-28 | 2022-06-28 | 尚越光电科技股份有限公司 | Flexible reel-to-reel CIGS evaporation plume control structure |
| CN114686838A (en) * | 2022-03-28 | 2022-07-01 | 尚越光电科技股份有限公司 | High-stability transmission system of CIGS co-evaporation equipment |
| CN114686838B (en) * | 2022-03-28 | 2024-06-11 | 尚越光电科技股份有限公司 | High-stability transmission system of CIGS co-evaporation equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| CN112663019B (en) | 2023-05-09 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN112663019A (en) | Synchronous control structure for reel-to-reel conveying of CIGS co-evaporation method | |
| JP6554072B2 (en) | Method and system for lithium replenishment to electrode sheet | |
| CN204508356U (en) | A kind of tenslator and sutomatic winding machine | |
| KR20120017597A (en) | Apparatus of correcting belt-meandering for secondary battery | |
| CN108630883A (en) | Calendering device | |
| JP2012166896A (en) | Web winder | |
| CN108657780B (en) | Novel coiled material tail end directional conveying device | |
| US20230330957A1 (en) | Detection device and electrode plate calendering apparatus | |
| CN205264795U (en) | Lithium system is mended to pole piece | |
| WO2024051280A1 (en) | Film roll conveying apparatus, control method thereof, electronic device and storage medium | |
| CN103436852A (en) | Flexible substrate foil roll-to-roll conveyer and conveying method | |
| CN106059218B (en) | The coiling of coil winding machine and insulating tape wrapping continuous synchronization operational method and device | |
| CN110629191A (en) | Graphene film roll-to-roll production device and method | |
| CN116730073A (en) | Device for unreeling, correcting and cutting pole piece | |
| CN114686838B (en) | High-stability transmission system of CIGS co-evaporation equipment | |
| CN108987822A (en) | Electrical core of power battery winding device | |
| CN209480883U (en) | The constant adjustment mechanism in winding point of contact for processing film | |
| CN211394617U (en) | Graphene film roll-to-roll production device | |
| CN203855214U (en) | Splitting machine capable of rectifying deviation automatically | |
| CN112038569A (en) | Horizontal laminating mechanism for lithium supplement | |
| CN208256837U (en) | Lithium battery production positive and negative anodes up- coiler | |
| CN102133563A (en) | Device for dynamically and continuously preparing high-temperature superconductivity belt material by non-fluorine chemical solution sedimentation method | |
| CN205526931U (en) | Permanent linear velocity rolling system of bands for band | |
| CN210286125U (en) | Tension control mechanism of metallized film capacitor winding machine | |
| CN116314982B (en) | Proton exchange membrane fuel cell CCM production device and method based on transfer printing process |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP02 | Change in the address of a patent holder |
Address after: Room 211, Building 3, No. 399 Xingguo Road, Linping Street, Linping District, Hangzhou City, Zhejiang Province, 311103 Patentee after: Still more photoelectric Polytron Technologies Inc. Address before: Room 603, building 1, Shangyue Green Valley Center, 1999 yuhangtang Road, Wuchang Street, Yuhang District, Hangzhou City, Zhejiang Province Patentee before: Still more photoelectric Polytron Technologies Inc. |
|
| CP02 | Change in the address of a patent holder |