CN1146501C - 微滴沉积装置及它的制造方法 - Google Patents
微滴沉积装置及它的制造方法 Download PDFInfo
- Publication number
- CN1146501C CN1146501C CNB988099640A CN98809964A CN1146501C CN 1146501 C CN1146501 C CN 1146501C CN B988099640 A CNB988099640 A CN B988099640A CN 98809964 A CN98809964 A CN 98809964A CN 1146501 C CN1146501 C CN 1146501C
- Authority
- CN
- China
- Prior art keywords
- raceway groove
- opening
- channel
- droplet
- piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000008021 deposition Effects 0.000 title claims abstract description 15
- 238000000034 method Methods 0.000 title claims description 20
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- 239000007788 liquid Substances 0.000 claims abstract description 16
- 239000000463 material Substances 0.000 claims description 19
- 230000007246 mechanism Effects 0.000 claims description 17
- 238000006073 displacement reaction Methods 0.000 claims description 7
- 230000005684 electric field Effects 0.000 claims description 7
- 230000004044 response Effects 0.000 claims description 4
- 239000007921 spray Substances 0.000 claims description 4
- 238000005507 spraying Methods 0.000 claims description 4
- 238000000151 deposition Methods 0.000 description 13
- 238000002161 passivation Methods 0.000 description 12
- 239000011248 coating agent Substances 0.000 description 9
- 238000000576 coating method Methods 0.000 description 9
- 230000015572 biosynthetic process Effects 0.000 description 8
- 238000005516 engineering process Methods 0.000 description 7
- 230000010287 polarization Effects 0.000 description 6
- 230000008901 benefit Effects 0.000 description 5
- 239000000919 ceramic Substances 0.000 description 5
- 230000002349 favourable effect Effects 0.000 description 5
- 238000007789 sealing Methods 0.000 description 5
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 230000007797 corrosion Effects 0.000 description 4
- 238000005260 corrosion Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000003466 welding Methods 0.000 description 4
- 229920000642 polymer Polymers 0.000 description 3
- 239000011148 porous material Substances 0.000 description 3
- 239000004642 Polyimide Substances 0.000 description 2
- 238000002679 ablation Methods 0.000 description 2
- 239000007772 electrode material Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000012779 reinforcing material Substances 0.000 description 2
- 239000004696 Poly ether ether ketone Substances 0.000 description 1
- -1 and Merlon Polymers 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 238000007641 inkjet printing Methods 0.000 description 1
- 238000000608 laser ablation Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 229920013745 polyesteretherketone Polymers 0.000 description 1
- 229920002530 polyetherether ketone Polymers 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/1609—Production of print heads with piezoelectric elements of finger type, chamber walls consisting integrally of piezoelectric material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14209—Structure of print heads with piezoelectric elements of finger type, chamber walls consisting integrally of piezoelectric material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
- B41J2/1634—Manufacturing processes machining laser machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1637—Manufacturing processes molding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14387—Front shooter
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/12—Embodiments of or processes related to ink-jet heads with ink circulating through the whole print head
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Ink Jet Recording Methods And Recording Media Thereof (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB9721555.2A GB9721555D0 (en) | 1997-10-10 | 1997-10-10 | Droplet deposition apparatus and methods of manufacture thereof |
GB9721555.2 | 1997-10-10 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1274316A CN1274316A (zh) | 2000-11-22 |
CN1146501C true CN1146501C (zh) | 2004-04-21 |
Family
ID=10820385
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB988099640A Expired - Lifetime CN1146501C (zh) | 1997-10-10 | 1998-10-09 | 微滴沉积装置及它的制造方法 |
Country Status (13)
Country | Link |
---|---|
EP (2) | EP1241007B1 (es) |
JP (1) | JP2001519264A (es) |
KR (1) | KR100567262B1 (es) |
CN (1) | CN1146501C (es) |
AT (1) | ATE231073T1 (es) |
AU (1) | AU747616B2 (es) |
BR (1) | BR9812580A (es) |
CA (1) | CA2301819C (es) |
DE (2) | DE69833978T2 (es) |
ES (2) | ES2257481T3 (es) |
GB (1) | GB9721555D0 (es) |
IL (1) | IL134657A (es) |
WO (1) | WO1999019147A1 (es) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB9828476D0 (en) | 1998-12-24 | 1999-02-17 | Xaar Technology Ltd | Apparatus for depositing droplets of fluid |
GB0000368D0 (en) | 2000-01-07 | 2000-03-01 | Xaar Technology Ltd | Droplet deposition apparatus |
JP2001334664A (ja) * | 2000-05-25 | 2001-12-04 | Seiko Instruments Inc | ヘッドチップ及びヘッドユニット |
CN101386226B (zh) * | 2003-08-08 | 2012-07-04 | 柯尼卡美能达控股株式会社 | 液体喷射设备及其方法、用于形成电路板的布线图案的方法 |
JP2008213434A (ja) * | 2007-03-08 | 2008-09-18 | Fuji Xerox Co Ltd | 液滴吐出ヘッド、液滴吐出装置及び画像形成装置 |
JP5298685B2 (ja) * | 2008-07-28 | 2013-09-25 | コニカミノルタ株式会社 | インクジェットヘッド |
JP5437773B2 (ja) * | 2009-10-29 | 2014-03-12 | エスアイアイ・プリンテック株式会社 | 液体噴射ヘッド、液体噴射装置及び液体噴射ヘッドの製造方法 |
JP6322369B2 (ja) * | 2013-07-18 | 2018-05-09 | エスアイアイ・プリンテック株式会社 | 液体噴射ヘッド、液体噴射装置及び液体噴射ヘッドの製造方法 |
GB2522563B (en) | 2013-11-26 | 2015-11-04 | Xaar Technology Ltd | Droplet deposition apparatus and method for manufacturing the same |
US9421768B2 (en) | 2014-04-02 | 2016-08-23 | Kabushiki Kaisha Toshiba | Inkjet printer head |
JP6266460B2 (ja) | 2014-07-30 | 2018-01-24 | 株式会社東芝 | インクジェットヘッドとインクジェット記録装置 |
JP6950210B2 (ja) | 2017-03-15 | 2021-10-13 | ブラザー工業株式会社 | 液体吐出ヘッド |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2429232C3 (de) * | 1974-06-18 | 1980-09-11 | Olympia Werke Ag, 2940 Wilhelmshaven | Schreibwerk mit einem Mosaikdruckkopf |
US4611219A (en) * | 1981-12-29 | 1986-09-09 | Canon Kabushiki Kaisha | Liquid-jetting head |
GB8824014D0 (en) * | 1988-10-13 | 1988-11-23 | Am Int | High density multi-channel array electrically pulsed droplet deposition apparatus |
DE3917434A1 (de) * | 1989-05-29 | 1989-11-09 | Siemens Ag | Mehrschichtig aufgebauter tintendruckkopf mit durch selektives aetzen erzeugten tintenkanaelen |
JP3041952B2 (ja) * | 1990-02-23 | 2000-05-15 | セイコーエプソン株式会社 | インクジェット式記録ヘッド、圧電振動体、及びこれらの製造方法 |
GB9010289D0 (en) * | 1990-05-08 | 1990-06-27 | Xaar Ltd | Drop-on-demand printing apparatus and method of manufacture |
EP0560760B1 (en) * | 1990-12-06 | 1994-08-17 | Markpoint Development Ab | Drop-on-demand liquid ejector arrangement |
JP2998764B2 (ja) * | 1991-06-13 | 2000-01-11 | セイコーエプソン株式会社 | インクジェット式印字ヘッド、インク補給方法、及び気泡除去方法 |
GB2288765B (en) * | 1992-02-25 | 1996-05-01 | Citizen Watch Co Ltd | Ink jet head |
US5659346A (en) * | 1994-03-21 | 1997-08-19 | Spectra, Inc. | Simplified ink jet head |
US5731827A (en) * | 1995-10-06 | 1998-03-24 | Xerox Corporation | Liquid ink printer having apparent 1XN addressability |
-
1997
- 1997-10-10 GB GBGB9721555.2A patent/GB9721555D0/en not_active Ceased
-
1998
- 1998-10-09 ES ES02010145T patent/ES2257481T3/es not_active Expired - Lifetime
- 1998-10-09 AU AU93608/98A patent/AU747616B2/en not_active Ceased
- 1998-10-09 DE DE69833978T patent/DE69833978T2/de not_active Expired - Lifetime
- 1998-10-09 AT AT98946612T patent/ATE231073T1/de not_active IP Right Cessation
- 1998-10-09 CA CA002301819A patent/CA2301819C/en not_active Expired - Fee Related
- 1998-10-09 EP EP02010145A patent/EP1241007B1/en not_active Expired - Lifetime
- 1998-10-09 WO PCT/GB1998/003050 patent/WO1999019147A1/en active IP Right Grant
- 1998-10-09 IL IL13465798A patent/IL134657A/en not_active IP Right Cessation
- 1998-10-09 ES ES98946612T patent/ES2186231T3/es not_active Expired - Lifetime
- 1998-10-09 JP JP2000515752A patent/JP2001519264A/ja active Pending
- 1998-10-09 DE DE69810799T patent/DE69810799T2/de not_active Expired - Lifetime
- 1998-10-09 CN CNB988099640A patent/CN1146501C/zh not_active Expired - Lifetime
- 1998-10-09 KR KR1020007003872A patent/KR100567262B1/ko not_active IP Right Cessation
- 1998-10-09 BR BR9812580-0A patent/BR9812580A/pt not_active IP Right Cessation
- 1998-10-09 EP EP98946612A patent/EP1021302B1/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP1241007B1 (en) | 2006-03-29 |
EP1241007A1 (en) | 2002-09-18 |
KR100567262B1 (ko) | 2006-04-04 |
AU9360898A (en) | 1999-05-03 |
AU747616B2 (en) | 2002-05-16 |
ES2257481T3 (es) | 2006-08-01 |
DE69810799T2 (de) | 2003-10-23 |
EP1021302B1 (en) | 2003-01-15 |
CA2301819C (en) | 2007-07-24 |
JP2001519264A (ja) | 2001-10-23 |
DE69833978D1 (de) | 2006-05-18 |
IL134657A (en) | 2004-01-04 |
CA2301819A1 (en) | 1999-04-22 |
GB9721555D0 (en) | 1997-12-10 |
ES2186231T3 (es) | 2003-05-01 |
DE69810799D1 (de) | 2003-02-20 |
KR20010031048A (ko) | 2001-04-16 |
EP1021302A1 (en) | 2000-07-26 |
BR9812580A (pt) | 2002-09-24 |
ATE231073T1 (de) | 2003-02-15 |
CN1274316A (zh) | 2000-11-22 |
WO1999019147A1 (en) | 1999-04-22 |
DE69833978T2 (de) | 2007-01-25 |
IL134657A0 (en) | 2001-04-30 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CX01 | Expiry of patent term |
Granted publication date: 20040421 |
|
CX01 | Expiry of patent term |