CN1146501C - Droplet deposition appts. and methods of manufacture thereof - Google Patents
Droplet deposition appts. and methods of manufacture thereof Download PDFInfo
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- CN1146501C CN1146501C CNB988099640A CN98809964A CN1146501C CN 1146501 C CN1146501 C CN 1146501C CN B988099640 A CNB988099640 A CN B988099640A CN 98809964 A CN98809964 A CN 98809964A CN 1146501 C CN1146501 C CN 1146501C
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/1609—Production of print heads with piezoelectric elements of finger type, chamber walls consisting integrally of piezoelectric material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14209—Structure of print heads with piezoelectric elements of finger type, chamber walls consisting integrally of piezoelectric material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
- B41J2/1634—Manufacturing processes machining laser machining
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1637—Manufacturing processes molding
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14387—Front shooter
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/12—Embodiments of or processes related to ink-jet heads with ink circulating through the whole print head
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Ink Jet Recording Methods And Recording Media Thereof (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Abstract
A piezoelectric printhead or other droplet deposition apparatus has parallel liquid containing channels defined by a base and displaceable walls, and covered by a cover number. The channels each have at least one nozzle for ejecting droplets. Each nozzle may be disposed in the base, the cover then having two ink supply parts spaced lengthwise of each channel on opposite sides of the nozzle. Alternatively two longitudinally spaced nozzles may be provided in the base of each channel. The cover may have a conductive track corrected to wall-displacing electrodes, the points of connection being outside the channels.
Description
Technical field
The present invention relates to Oroplet deposition apparatus, ink jet-print head particularly, it comprises the raceway groove that is communicated with droplet liquid source of supply and the opening of ejection droplet, at least one trench sidewalls response signal of telecommunication can move, thereby realizes from raceway groove ejection droplet.
Background technology
Fig. 1 a is that this patent application of raceway groove profile according to the inkjet printing header structure of No. 92/22429 prior art of International Patent Application WO belongs to the applicant and inserts here as a reference.Piezoelectric ceramic piece 12 polarizes at its thickness direction 17, and forms raceway groove 11 in one surface, and the interface of raceway groove both sides is parallel with channel axes by channel walls 13.By the electrode 23 that on the both sides of each wall 13, forms, electric field can be added to the piezoelectric of wall, make their mode deflections on the direction vertical to shear with channel axes.Thereby in ink, produce pressure wave, cause the ejection of ink droplet.These principles are known in prior art.As European patent EP-A-0 364 136, it also belongs to the applicant, and its content is inserted here as a reference.
Along a side parallel, with cover 14 surperficial closed channel 11, form and the ink raceway groove has the conducting wire 16 of uniform distances covering with channel axes.Between circuit 16 and channel walls electrode 23, form welding, thereby lid is fixed on the base plate, and in single step, cause being electrically connected between electrode and the circuit.In order to protect them to avoid the corrosion of ink, then electrode and circuit are carried out the coated of passivator.
Shown in Fig. 1 b, Figure 16 is the profile that the single raceway groove longitudinal axis A along Fig. 1 a prior art printhead gets, and the nozzle plate 20 that has each ink to spray nozzle 22 is installed in the front of sheet 12, and is definite in the back ink manifold 26 with manifold structure 21.Circuit 16 is directed to covers 14 back, so that be connected with drive circuit, drive circuit generally is included in the integrated circuit block 27, and it is driven by the signal of accepting by incoming line 18 successively.
In the printhead of this ink, channel walls-and the electrode that particularly forms thereon-usually be is through Passivation Treatment, so that prevent the corrosion of ink.This respect can referenced patent WO95/07820, inserts here as a reference.
But in the above in the device of Tao Luning, the formation of between conventional Passivation Treatment such before the connection cover is with impeded electrode and circuit, welding.On the other hand, passivation can only be added to the terminal of raceway groove after connection cover, obtains the low-quality coated of electrode and circuit, and is particularly at the mid point of raceway groove, far away from the two ends of raceway groove.
Summary of the invention
Of the present invention is the advantage that is connected with the conducting wire that covers formation in the structure maintenance prior art structure of printhead, and is suitable for passivation.
Therefore, the aspect that the present invention comprises is, Oroplet deposition apparatus comprises at least one raceway groove, and it has mechanism to be communicated with droplet liquid source of supply and the opening of ejection droplet is arranged;
The channel walls of channel interface has at least a side parallel with channel axes, and channel walls links to each other with driving mechanism; The driving mechanism response signal of telecommunication makes channel walls produce displacement, thereby realizes from raceway groove ejection droplet;
The opposite side of channel interface is the surface of lid, and it is parallel with channel axes, and cap surface forms at least one conducting wire thereon, and the signal of telecommunication is sent to described driving mechanism, and the tie point of circuit and driving mechanism is outside raceway groove.
Because according to the single electric connecting point of circuit of the present invention and driver is outside at raceway groove, can not contact (the potential corrosion effect is arranged) ink like this, just no longer needs the passivation of this point.Therefore raceway groove itself can carry out conventional passivation by the top of raceway groove opening.Close the lid then, set up between the driving mechanism that the conducting wire that covers and channel walls are linked to each other and be electrically connected.Even do not needing in the printhead of passivation because of the ink type that design is sprayed, electric connecting point is outside raceway groove as the present invention, and this is than Fig. 1 a, and the device of 1b prior art is along the welding of whole channel length, more difficult generation wear-out failure.
Comprise the method for making Oroplet deposition apparatus according to the corresponding method of first aspect present invention, this method comprises following each step:
Form at least one open-topped raceway groove in base plate part, at least one side, it is parallel to the raceway groove axis with described raceway groove boundary, and a channel walls realizes that with the response signal of telecommunication driving mechanism of raceway groove displacement links to each other, thereby realizes from raceway groove ejection droplet;
With the surface of lid with the opposite side closed channel of channel axes line parallel, cap surface has at least one conducting wire that forms in the above to be used for sending the signal of telecommunication to described actuator mechanism; With
Conducting wire and actuator mechanism certain point outside raceway groove is electrically connected.
This step of closed channel is caused being electrically connected of conducting wire and actuator mechanism, thereby this point of simplified manufacturing technique is favourable.
A first aspect of the present invention also comprises Oroplet deposition apparatus, it comprise piezoelectric polarization egative film, this Oroplet deposition apparatus comprises:
The egative film of-piezoelectric polarization, the direction of polarization is vertical with the direction of described sheet material, and on egative film, form many parallel open-topped raceway grooves, each raceway groove is arranged on the direction vertical with channel length apart from one another by certain distance, and each raceway groove is determined by sidewall of facing and the basal surface that stretches between described sidewall;
-face the top flat of the described basal surface of described raceway groove, it is connected with described sidewall, with the closed described raceway groove at its top;
Each nozzle is communicated with the droplet that is used for therefrom spraying liquid with described raceway groove,
The mechanism that described raceway groove is connected with droplet deposition liquid source of supply;
Wherein each raceway groove is provided with forward part, install electrode at least one limits the opposite side of described sidewall of this raceway groove in this forward part, thereby the driver that forms shear mode is used for realizing penetrating droplet from raceway groove; With
Wherein each raceway groove is provided with the rear section, and there is the coating of conduction the rear section, the electric contact of at least one electrode on the face channel side of the described sidewall in this coating and the described forward part;
Sealing mechanism separates forward part with the rear section; Wherein
Described device further comprises the conducting wire that forms on the described topsheet surface, and described top flat is connected with described sidewall, and conductive coating is electric in conducting wire and the described rear section contacts.
Corresponding method comprises makes the egative film that piezoelectric material layer is arranged, the step that piezoelectric is polarized on a direction, and the method for making Oroplet deposition apparatus comprises following each step:
Form an egative film that piezoelectric material layer arranged, piezoelectric with the vertical direction of described sheet material on polarize;
Form many parallel open-topped raceway grooves, each raceway groove is apart from one another by certain distance.Be arranged on the direction vertical with channel length, each raceway groove determines that by sidewall of facing and the basal surface that stretches each raceway groove also has forward part and rear section between described sidewall;
On the opposite side of at least one sidewall that limits each raceway groove forward part, form electrode, thereby the driver that forms shear mode is used for realizing penetrating droplet from raceway groove; With
In the rear section of each raceway groove, form and the electric conductive coating that contacts of each electrode;
A sheet is provided, and it has the surface that forms the conducting wire in the above; With
The topsheet surface that the conducting wire is arranged in the above is connected to described sidewall, so that at the described raceway groove of its top closure;
Between the coating that described circuit and each raceway groove conduct electricity separately, set up electric contact; With
The sealing mechanism that provides the forward part that makes each raceway groove to separate with the rear section.
A second aspect of the present invention is that Oroplet deposition apparatus comprises:
At least one open-topped longitudinally droplet liquid channel.Raceway groove is limited by the vertical surface that extends between the sidewall of longitudinal side wall of facing and bottom;
Electric field is added in mechanism on the piezoelectric at least one sidewall, thereby realizes the displacement of the described relatively longitudinal channel of this wall, so that penetrate droplet from raceway groove; With
The lid of vertical top side of one closed channel opening;
Vertical surface, described bottom of wherein said raceway groove is provided with the opening that is used for the droplet ejection; With
This lid comprises two mouths that are used to supply with droplet liquid, and each mouthful along raceway groove in the both sides of opening at intervals.
Such structure has also been simplified the manufacturing of known print head, particularly the printhead of those " top ejection " types of discussing in patent WO91/17051 number (this patent belongs to the applicant, inserts here as a reference).Fig. 2 represents the profile of such prior art printhead along raceway groove, represents with corresponding reference number with corresponding those parts of Fig. 1.Droplet is from nozzle 22 ejections, nozzle is formed in the raceway groove cover 60, and droplet liquid is to supply to raceway groove by the mouth 33 that forms in the raceway groove base plate, mouth 33 generally is connected to the ink feed conduit (showing expression) that forms in base plate part 35, base plate part 35 separates with the parts 12 of piezoelectricity raceway grooveization.
According to the present invention, in the basal surface of raceway groove, form the opening is communicated with the droplet ejection orifice plate, thereby allow cover to comprise to supply ink each mouth in the raceway groove.Therefore the base plate part that no longer needs another separation.
A third aspect of the present invention comprises Oroplet deposition apparatus, and this device comprises:
At least one open-topped longitudinally droplet liquid channel, raceway groove is limited by the vertical surface that extends between the sidewall of longitudinal side wall of facing and bottom;
Droplet liquid is fed to the mechanism of raceway groove;
Electric field is added in the mechanism of the piezoelectric at least one sidewall, thereby realizes that the displacement of the described relatively longitudinal channel of this wall is so that penetrate droplet from raceway groove; With
The lid of vertical top side of closed channel opening;
Wherein vertical surface, the bottom of the raceway groove of Xing Chenging has two openings to be used for the droplet ejection, and opening along raceway groove at intervals.
Such structure: give patent application PCT/GB98/01495 number scheme-belong to the applicant, insert as a reference-bring the above-mentioned advantage that reduces component count here.
A fourth aspect of the present invention provides a kind of method of making Oroplet deposition apparatus, comprises following each step:
Provide to comprise piezoelectric and at least one main body of open top raceway groove is longitudinally arranged, raceway groove is determined by the vertical surface that extends between the sidewall of longitudinal side wall of facing and bottom;
In vertical surface, the bottom of raceway groove, be formed for spraying the opening of droplet liquid;
Provide electric field is added to piezoelectric at least one described wall, thereby realize the displacement of the described relatively longitudinal channel of described wall, so that from raceway groove ejection droplet;
With the vertical top side of opening of a lid closed channel, describedly be stamped two droplet liquid supply ports, along the raceway groove both sides at opening arranged apart.
The claim of correlation method is also included among the present invention, and other aspects independently propose in the claim at other.
At specification, further favourable each of the present invention proposed in accompanying drawing and the appended claims
Embodiment.
All claims openly be considered to as and the content of depositing insert here, unless toply propose.
Description of drawings
To the present invention be described with reference to the drawings by example now, accompanying drawing has:
Fig. 3 is the printhead according to first embodiment of a first aspect of the present invention, the profile of getting along its raceway groove axis;
Fig. 4 a and 4b respectively the rear section of the printhead of presentation graphs 3 before connection cover and detail view afterwards;
Fig. 5 is the printhead according to second embodiment of first aspect present invention, the profile of getting along its raceway groove axis;
Fig. 6 is the printhead in conjunction with the present invention first and second aspects, the profile of getting along its raceway groove axis;
Fig. 7 is according to the printhead of second embodiment of second aspect present invention, the profile of getting along its raceway groove axis;
Fig. 8 is the detailed perspective view of the piezoelectrics terminal of Fig. 7 printhead;
Fig. 9 and 10 is respectively the profile and the details profile of another embodiment of printhead of representing among Fig. 7.
Fig. 3 explanation is according to the printhead of first embodiment of first aspect present invention, among Fig. 3 with the printhead of prior art Fig. 1 and Fig. 2 in identical parts represent with identical reference number.
The specific embodiment
As the prior art device, the piezoelectric ceramic body 12 of formation polarizes at thickness direction, the raceway groove 11 that useful channel walls 13 is separated.Known from No. 364 136, above referenced European patent EP-A-0, form electrodes 23 along each wall 13 that contains in the ink raceway groove 11, electrode is stretched over the back 130 of main body along rear groove 100.In addition, installing covers 14, and the open side of surface 15 closed each raceway groove 11 of lid is equiped with the nozzle plate 20 of eject micro-droplets nozzle 22 and the manifold of providing ink raceway groove, raceway groove is laterally to be cut in the main body 12.There is the circuit 16 (suitable technology is well-known) that forms in the above on the surface 15 of lid 14, and it is connected (symbolically being illustrated among Fig. 3, not in proportion) with integrated circuit block 27, and circuit block is accepted input signal from incoming line 18.
The details table of printhead rear section is shown among Fig. 4 a before connection cover: passivation layer 140 (not expression in Fig. 3, in Fig. 4, represent with the shade dotted line) be added on the entire electrode 23 in the raceway groove and (in Fig. 3 and Fig. 4, all use the shade solid line to represent), part is along rear groove 100.With the prior art inverted configuration, before closing the lid, to carry out passivation, and be favourable according to the method for describing in No. 95/07820, the International Patent Application WO, this application belongs to the applicant and inserts here as a reference.
Realize by adhesive linkage 160 in main body and the mechanical connection that covers between 14 the surface 15, adhesive linkage was added to the terminal end surface of raceway groove 11 regional mesospores 13 before lid and main body assembling, this is preferred according to the method for discussing in No. 95/04658, the International Patent Application WO, and this application belongs to the applicant and inserts here as a reference.The printhead of Fig. 4 b explanation assembling points out to be bonded in 220 places.Such connection is more solid really than the corresponding Welding Structure of above-mentioned prior art, and arranged longer fatigue life.
By ductile, the material protrusion 170 of deformable and conduction, as the scolder that is fixed on the terminal 180 of circuit 16 is realized covering conducting wire 16 and being electrically connected between electrode 23 parts in rear groove 100.When Jiang Gai was assembled to main body, as illustrating among Fig. 4 b, projection 170 contacted with electrode 23 and is out of shape, thereby produced effective electric contact 200 between electrode 23 and circuit 16.
Add that also sealing stick with paste to be dripped or high viscosity glue drips 190, so that forming ink sealing 210 in the terminal of ink raceway groove 11 with between electrically contacting 200 on the assembly.Such seal protection electrical pickoff is avoided the corrosion of ink.Preferably sealing is such location, on the free end 150 of passivation layer 140, thereby prevents the seepage of ink under passivation layer, and ink may damage electrode material 23 therefrom.
Fig. 5 illustrates second embodiment of first aspect present invention.Embodiment with the front is the same, and piezoelectric ceramics body 290 forms the raceway groove 11 that is separated by channel walls 13 in the thickness direction polarization, and every wall of channel walls forms electrode 23.But the ejection of ink is from the nozzle 320 that is positioned at the center, and this nozzle or directly formation on cover plate 350 perhaps are formed in the nozzle plate 330 as expressed, are communicated with raceway groove by the hole in the cover plate 340.Main body 290 is added and is also formed two manifolds 310, is used for supplying with ink from the two ends of raceway groove.Shown in arrow 300.Further the structure (not shown) will be supplied ink to manifold from ink source.
" both-end " print head structure like this is disclosed in international monopoly WO91/17051 number, and this patent belongs to the applicant and inserts here as a reference, and this structure has operating voltage to be lower than the advantage of above-mentioned " single-ended " structure.Also have, base plate 290 structures are fit to molded a kind of technology and see it is possible more absorb the people than the technology of the routine saw of describing among No. 364 136, above-mentioned European patent EP-A-0 from the viewpoint of manufacturability.
Relative Fig. 3,4a and 4b have described the conducting wire 370 that forms on the surface of channel electrode 23 and cover plate 350 agent-orientions 290 and be connected, but these are connected in the groove 360 that is located at the formation of main body 290 1 sides in this embodiment.Similarly, in the zone of raceway groove itself (channel walls assembling before carry out passivation) and at terminal 380 places that main body is not electrically connected, cover plate 350 is connected to piezoelectric ceramic body by the bonding (not shown) of routine.
Thereby for the distance that makes ink outlet process of 320 from raceway groove itself 11 to nozzle minimum-reduce the pressure loss and the reducing of the droplet spouting velocity that causes-nozzle 320 can be formed on the cover plate 350.By aforesaid laser ablation, it is favourable for example forming nozzle as described in No. 93/15911, International Patent Application WO, and this article inserts here as a reference.Can make with the material of easy ablation for this purpose cover plate, suitable polymers has polyimides, and Merlon, polyester or polyether etherketone, general thickness are 50 microns (μ m).
The cover plate hardness that so easy ablator is made can make its increase by add the coating of curing agent material on the interior and outer surface of ablation cover plate.The nitride of silicon is particularly suitable for this purpose, it also can be used for the technology of above-mentioned WO 95/07820 as the passivator coating, it is deposited as the level and smooth coating of one deck, is fit to then to add the nonwetting coating of last layer and since its non-conductive characteristic will be not can the contiguous raceway groove of short circuit electrode.Two-layer such material is placed on the both sides of polyimides cover plate, the thickness of every layer of 5% cover plate of having an appointment (during cover plate 50 micron thickness is 2.5 microns), generally can increase a bending hardness 5-10 factor (having good bonding than polymer approximate big 100 times and reinforcing material and polymer) according to the compound beam theory of standard and the Young's modulus of supposing reinforcing material.Thereby such thin layer can not produce remarkable influence to the cover plate situation that forms nozzle of can ablating, if particularly this layer material itself also can be ablated to a certain extent.
Term with broad sense is expressed, the cover plate of ink-jet printer comprises first material layer of ablating easily, and have further multi-layer bonded in its relative both sides, every layer material of multilayer, its hardness is at least greater than order of magnitude of ground floor material, and its thickness is at least than the little order of magnitude of ground floor.
With reference now to Fig. 6,, expression is in conjunction with the printhead of the present invention first and second aspects among the figure.The piezoelectric ceramic body 400 that forms has raceway groove 11, separates the wall 13 and the electrode 23 of raceway groove, and electrode accepts to drive signal by the conducting wire 410 that is connected with the drive circuit (not shown).But do not resemble other embodiment, droplet is from the basal surface 440 of raceway groove 11 closures, with main body 400 in ejection in the nozzle 420 that is connected of the opening 430 that forms-with Fig. 5 in compare, nozzle 320 is arranged in the lid 350 of closed channel 11 open upper side there.
Molded also is the method for optimizing of making the main body 400 that raceway groove is arranged, and also application drawing 4a and 4b's is installed into being electrically connected between column electrode 23 and the conducting wire 410.Intercommunicating pore 430 can form in molding process or can form subsequently, as passes through laser.Lid 450 no longer is equipped with nozzle, but forms the inlet 460 of ink on the contrary.Such scheme has less part count than the embodiment of discussing in the past, and the advantage of corresponding generation is arranged.Another kind is that ink supply port can be formed in the parts of raceway groove, as the terminal at raceway groove.
Fig. 7 also uses cover 500 at printhead, is stamped ink entry 520,522 and 524 and is located at raceway groove two ends and the midpoint that forms in the piezoelectrics 530.Channel walls is supplied with by mouth 520,522 and 522,524 respectively by gap 540 separated into two parts 550,560, and every part is passed through electrode 570,580 drive separately, and electrode is driven by the drive circuit (not shown) by conducting wire 650,660.Each part is installed in the nozzle separately 610,620 that forms in the nozzle plate 615, and nozzle is communicated with the midpoint of intercommunicating pore between that part enters the mouth separately by the intercommunicating pore 630,640 that forms with the part of raceway groove 11 in the raceway groove basal surface.
In No. 9710530.8, the UK Patent Application of common pending trial, such structure has been described, this application belongs to the applicant and inserts here as a reference, the printhead that obtains has the type element of the parallel drive of two row, this is compact, because " two ends " supply ink is given each channel part, the driving voltage of per unit droplet spouting velocity reduces.
Do not resemble each embodiment of front, the conducting wire 650,660 that channel electrode is connected electrically to the drive integrated circult piece be formed in piezoelectrics originally on one's body, it is favourable forming in the same processing step of depositing electrode 570,580 on channel walls.Known such scheme from No. 397 441, European patent EP-A-0, this patent belong to the applicant and insert here as a reference, will be not described in detail here.Method by any routine can obtain the connection between circuit 650,660 and the drive integrated circult piece 590,600, comprises wire bonds or global link.
Another kind, as shown in the profile and details profile of Fig. 9 and 10, raceway groove can form (as described at European patent EP-A-0309148) in sawing in the piezoelectric part with the dish type cutting machine.The degree of depth of visible raceway groove shoals gradually at every end among the figure, is illustrated in 800 places, and is continuous between two agency parts 550,560 in the channel walls that the adjacent raceway groove that is sawn into 11 is determined.But interruption 810 is arranged in certain position between these two parts of the electrode on the channel walls, and this will guarantee that each wall all can be by the signal drive of electric input 820 supplies in agency part.Such interruption can be by obtaining as using covering plate or remove coated by laser in the deposition process of metal coated.
Connection between electrode on the channel walls and electric input 820, though not expression in detail, but can adopt any known technology to connect, be included in conducting wire and the conductive adhesive between (being described in EP-A-0397441) (as anisotropic electrically conducting adhesive) that the lead between the circuit that generates in shallow " withdrawing from " groove that forms in raceway groove 11 rear area 900 connects (being described among the above-mentioned EP-A-0364136) or forms in 900 districts on the surface of piezoelectric patches itself.
The same with the embodiment of Fig. 7, the appropriate length 820 of its two agency part 550,560 usefulness covers 500 of each raceway groove 11,830 closures, form the mouth 520 that partly to supply ink to each channelling covering also, 522,540, as is generally known, for the purpose of cleaning, selectively allow ink pass through each channel part circulation.Each import can be located like this so that determine the edge of agency part, as the situation of mouth 522, and can simplified manufacturing technique.In the example of expression, covering the width of mouth 522 and the closed length 820,830 of lid all is the identical order of magnitude, is generally 2 millimeters.
Ink also is by opening ejection from each agency part, and each opening is connected with the raceway groove opposite flank the piezoelectric part (sheet 860) of raceway groove and formation raceway groove.These openings are got the form in slit 840,850 in the present embodiment, and certain distance-general 200 microns-vertically just allowing some leeway when nozzle 870,880 is placed in the nozzle plate 890 separately the general so that allow at raceway groove extended in the slit.It is impossible no matter when spraying droplet simultaneously from adjacent raceway groove, the printhead of this class " share with wall " as described, and general as known from EP-A-0376, the skew of nozzle normally needs, and therefore will not do any detailed discussion.
Also can make the specification of standard package according to printhead of the present invention, (as mentioned above as described in WO91/17051 number), each standard package forms raceway groove separately on their relative end surfaces, thereby when standard package is adjacent to each other, the raceway groove of formation portion between each is to the standard package of adjacency.In such combination, channel part may comprise at least partially in the groove that forms in the raceway groove base plate and enough length is arranged separately, even when the standard package of a pair of adjacency and their slot parts separately do not have complete matching, between two and half grooves, still have and enough overlappingly can install nozzle.
As in aforesaid embodiment, nozzle 870,880 is formed in the 890 nozzle plates, as illustrating among the figure, the nozzle plate can extend on the length of almost whole piezoelectric patches 860, so that provide suitable big zone to be used for connecting as caping and/or smear the wiping machine.
Should be appreciated that only this invention of having described by example can be revised widely and can not deviate from category of the present invention.The various parts of representing in the first aspect present invention content also can equally be applied to second aspect or vice versa.
For example, the piezoelectricity channel walls can be at opposite direction polarization, and this direction is perpendicular to the axial plane of raceway groove, and this is known from European patent EP-A-0277703, inserts here as a reference.Another kind is, the polarization of channel walls can be parallel to the plane of channel axes, has the electrode that forms in channel walls itself, and this is known from European patent EP-A-0528647.
Do not need that each raceway groove can both spray droplet in the printhead: the effect raceway groove that can spray droplet can replace in printhead, printhead have do not act on-raceway groove of so-called " idle running ", as described in above-mentioned EP-A-0277703 number.
Claims (15)
1. Oroplet deposition apparatus comprises:
At least one longitudinally, open-topped droplet liquid channel, raceway groove is determined by the vertical surface that extends between the sidewall of longitudinal side wall of facing and bottom; And
Electric field is added to the mechanism of the piezoelectric at least one sidewall, thereby realizes that the displacement of the described relatively longitudinal channel of described wall is so that from described raceway groove ejection droplet; With
One lid, vertical top side of closed channel opening;
Vertical surface, the bottom of wherein said raceway groove be provided with the opening that is used to spray droplet and;
Described covering is equipped with two mouths and is used to supply droplet liquid, and these two mouthfuls separate both sides at above-mentioned opening along described raceway groove.
2. according to the described device of claim 1, the wherein above-mentioned supply opening equal distance of being separated by in the both sides of described opening.
3. according to claim 1 or 2 described devices, vertical surface, the bottom of wherein said raceway groove is provided with at least two openings, and this two opening along raceway groove at intervals.
4. according to the described device of claim 3, wherein cover and be provided with the droplet supply opening, they along raceway groove at intervals so that be positioned at the both sides of each described opening.
5. according to the described device of claim 1, wherein piezoelectric is out of shape with shear mode when standing electric field.
6. according to the described device of claim 1, wherein on the surface of raceway groove, form electrode in channel walls.
7. according to the described device of claim 6, wherein electrode also is formed on a certain lip-deep channel walls, surperficial relative towards raceway groove of this surface and channel walls.
8. according to the described device of claim 1, the wherein said channel walls response signal of telecommunication with the horizontal direction of raceway groove axis on can move.
9. according to the described device of claim 1, vertical surface of wherein said bottom determines that by base plate described base plate and described longitudinal side wall are in aggregates.
10. according to the described device of claim 1, comprising many longitudinal channels, arrangement parallel to each other.
11. a method of making Oroplet deposition apparatus comprises following each step:
Provide to comprise piezoelectric and at least one main body of open top raceway groove is longitudinally arranged, raceway groove is determined by the vertical surface that extends between the sidewall of longitudinal side wall of facing and bottom;
In vertical surface, the bottom of raceway groove, be formed for spraying the opening of droplet liquid;
Provide electric field is added to piezoelectric at least one described wall, thereby realize the displacement of the described relatively longitudinal channel of described wall, so that from raceway groove ejection droplet;
With the vertical top side of opening of a lid closed channel, describedly be stamped two droplet liquid supply ports, along the raceway groove both sides at opening arranged apart.
12. in accordance with the method for claim 11, comprise the vertical surface that forms described bottom and the step of described longitudinal side wall, make it in aggregates mutually.
13. in accordance with the method for claim 12, also comprise each step that body of piezoelectric material is provided and excises material, thereby in described main body, form described raceway groove from described main body.
14. in accordance with the method for claim 13, also comprise as above each step:
Main body with a sheet material form is provided, and this sheet material has first and second facing surfaces;
From the first surface excision material of described main body, thereby form raceway groove;
Form an opening in vertical surface, the bottom of this raceway groove, this opening is communicated with the described second surface of this sheet material.
15. comprise the step that this chip type piezoelectric material is polarized in accordance with the method for claim 14 on the direction perpendicular to described first and second surfaces.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GBGB9721555.2A GB9721555D0 (en) | 1997-10-10 | 1997-10-10 | Droplet deposition apparatus and methods of manufacture thereof |
| GB9721555.2 | 1997-10-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1274316A CN1274316A (en) | 2000-11-22 |
| CN1146501C true CN1146501C (en) | 2004-04-21 |
Family
ID=10820385
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB988099640A Expired - Lifetime CN1146501C (en) | 1997-10-10 | 1998-10-09 | Droplet deposition appts. and methods of manufacture thereof |
Country Status (13)
| Country | Link |
|---|---|
| EP (2) | EP1241007B1 (en) |
| JP (1) | JP2001519264A (en) |
| KR (1) | KR100567262B1 (en) |
| CN (1) | CN1146501C (en) |
| AT (1) | ATE231073T1 (en) |
| AU (1) | AU747616B2 (en) |
| BR (1) | BR9812580A (en) |
| CA (1) | CA2301819C (en) |
| DE (2) | DE69810799T2 (en) |
| ES (2) | ES2257481T3 (en) |
| GB (1) | GB9721555D0 (en) |
| IL (1) | IL134657A (en) |
| WO (1) | WO1999019147A1 (en) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB9828476D0 (en) | 1998-12-24 | 1999-02-17 | Xaar Technology Ltd | Apparatus for depositing droplets of fluid |
| GB0000368D0 (en) | 2000-01-07 | 2000-03-01 | Xaar Technology Ltd | Droplet deposition apparatus |
| JP2001334664A (en) * | 2000-05-25 | 2001-12-04 | Seiko Instruments Inc | Head chip and head unit |
| CN100595067C (en) * | 2003-08-08 | 2010-03-24 | 柯尼卡美能达控股株式会社 | Liquid ejection apparatus, liquid ejection method, and method for forming wiring pattern of circuit board |
| JP2008213434A (en) * | 2007-03-08 | 2008-09-18 | Fuji Xerox Co Ltd | Droplet ejection head, droplet ejection device, and image forming device |
| JP5298685B2 (en) * | 2008-07-28 | 2013-09-25 | コニカミノルタ株式会社 | Inkjet head |
| JP5437773B2 (en) * | 2009-10-29 | 2014-03-12 | エスアイアイ・プリンテック株式会社 | Liquid ejecting head, liquid ejecting apparatus, and method of manufacturing liquid ejecting head |
| JP6322369B2 (en) * | 2013-07-18 | 2018-05-09 | エスアイアイ・プリンテック株式会社 | Liquid ejecting head, liquid ejecting apparatus, and method of manufacturing liquid ejecting head |
| GB2520574B (en) | 2013-11-26 | 2015-10-07 | Xaar Technology Ltd | Droplet deposition apparatus and method for manufacturing the same |
| US9421768B2 (en) | 2014-04-02 | 2016-08-23 | Kabushiki Kaisha Toshiba | Inkjet printer head |
| JP6266460B2 (en) | 2014-07-30 | 2018-01-24 | 株式会社東芝 | Inkjet head and inkjet recording apparatus |
| JP6950210B2 (en) * | 2017-03-15 | 2021-10-13 | ブラザー工業株式会社 | Liquid discharge head |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2429232C3 (en) * | 1974-06-18 | 1980-09-11 | Olympia Werke Ag, 2940 Wilhelmshaven | Writing mechanism with a mosaic print head |
| US4611219A (en) * | 1981-12-29 | 1986-09-09 | Canon Kabushiki Kaisha | Liquid-jetting head |
| GB8824014D0 (en) * | 1988-10-13 | 1988-11-23 | Am Int | High density multi-channel array electrically pulsed droplet deposition apparatus |
| DE3917434A1 (en) * | 1989-05-29 | 1989-11-09 | Siemens Ag | Multi-layer ink printhead with ink channels which are produced by selective etching |
| JP3041952B2 (en) * | 1990-02-23 | 2000-05-15 | セイコーエプソン株式会社 | Ink jet recording head, piezoelectric vibrator, and method of manufacturing these |
| GB9010289D0 (en) * | 1990-05-08 | 1990-06-27 | Xaar Ltd | Drop-on-demand printing apparatus and method of manufacture |
| EP0560760B1 (en) * | 1990-12-06 | 1994-08-17 | Markpoint Development Ab | Drop-on-demand liquid ejector arrangement |
| JP2998764B2 (en) * | 1991-06-13 | 2000-01-11 | セイコーエプソン株式会社 | Ink jet print head, ink supply method, and air bubble removal method |
| GB2288765B (en) * | 1992-02-25 | 1996-05-01 | Citizen Watch Co Ltd | Ink jet head |
| US5659346A (en) * | 1994-03-21 | 1997-08-19 | Spectra, Inc. | Simplified ink jet head |
| US5731827A (en) * | 1995-10-06 | 1998-03-24 | Xerox Corporation | Liquid ink printer having apparent 1XN addressability |
-
1997
- 1997-10-10 GB GBGB9721555.2A patent/GB9721555D0/en not_active Ceased
-
1998
- 1998-10-09 DE DE69810799T patent/DE69810799T2/en not_active Expired - Lifetime
- 1998-10-09 WO PCT/GB1998/003050 patent/WO1999019147A1/en active IP Right Grant
- 1998-10-09 DE DE69833978T patent/DE69833978T2/en not_active Expired - Lifetime
- 1998-10-09 AU AU93608/98A patent/AU747616B2/en not_active Ceased
- 1998-10-09 KR KR1020007003872A patent/KR100567262B1/en not_active IP Right Cessation
- 1998-10-09 EP EP02010145A patent/EP1241007B1/en not_active Expired - Lifetime
- 1998-10-09 BR BR9812580-0A patent/BR9812580A/en not_active IP Right Cessation
- 1998-10-09 JP JP2000515752A patent/JP2001519264A/en active Pending
- 1998-10-09 AT AT98946612T patent/ATE231073T1/en not_active IP Right Cessation
- 1998-10-09 IL IL13465798A patent/IL134657A/en not_active IP Right Cessation
- 1998-10-09 CN CNB988099640A patent/CN1146501C/en not_active Expired - Lifetime
- 1998-10-09 ES ES02010145T patent/ES2257481T3/en not_active Expired - Lifetime
- 1998-10-09 CA CA002301819A patent/CA2301819C/en not_active Expired - Fee Related
- 1998-10-09 ES ES98946612T patent/ES2186231T3/en not_active Expired - Lifetime
- 1998-10-09 EP EP98946612A patent/EP1021302B1/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| EP1021302A1 (en) | 2000-07-26 |
| ES2257481T3 (en) | 2006-08-01 |
| IL134657A (en) | 2004-01-04 |
| AU747616B2 (en) | 2002-05-16 |
| KR20010031048A (en) | 2001-04-16 |
| AU9360898A (en) | 1999-05-03 |
| GB9721555D0 (en) | 1997-12-10 |
| DE69810799D1 (en) | 2003-02-20 |
| IL134657A0 (en) | 2001-04-30 |
| DE69833978T2 (en) | 2007-01-25 |
| CA2301819C (en) | 2007-07-24 |
| WO1999019147A1 (en) | 1999-04-22 |
| DE69833978D1 (en) | 2006-05-18 |
| EP1021302B1 (en) | 2003-01-15 |
| KR100567262B1 (en) | 2006-04-04 |
| JP2001519264A (en) | 2001-10-23 |
| ATE231073T1 (en) | 2003-02-15 |
| EP1241007A1 (en) | 2002-09-18 |
| CN1274316A (en) | 2000-11-22 |
| CA2301819A1 (en) | 1999-04-22 |
| DE69810799T2 (en) | 2003-10-23 |
| ES2186231T3 (en) | 2003-05-01 |
| BR9812580A (en) | 2002-09-24 |
| EP1241007B1 (en) | 2006-03-29 |
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