CN1145531A - Method and appts. for making silicon chip - Google Patents
Method and appts. for making silicon chip Download PDFInfo
- Publication number
- CN1145531A CN1145531A CN96110121A CN96110121A CN1145531A CN 1145531 A CN1145531 A CN 1145531A CN 96110121 A CN96110121 A CN 96110121A CN 96110121 A CN96110121 A CN 96110121A CN 1145531 A CN1145531 A CN 1145531A
- Authority
- CN
- China
- Prior art keywords
- grinding
- silicon chip
- mentioned
- grinding tool
- sides
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/005—Control means for lapping machines or devices
- B24B37/015—Temperature control
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
- B24B37/08—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D1/00—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
- B28D1/003—Multipurpose machines; Equipment therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02002—Preparing wafers
- H01L21/02005—Preparing bulk and homogeneous wafers
- H01L21/02008—Multistep processes
- H01L21/0201—Specific process step
- H01L21/02019—Chemical etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02002—Preparing wafers
- H01L21/02005—Preparing bulk and homogeneous wafers
- H01L21/02008—Multistep processes
- H01L21/0201—Specific process step
- H01L21/02024—Mirror polishing
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mining & Mineral Resources (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
Abstract
Description
Claims (10)
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19117195 | 1995-07-03 | ||
JP191171/95 | 1995-07-03 | ||
JP441596 | 1996-01-12 | ||
JP004415/96 | 1996-01-12 | ||
JP089784/96 | 1996-04-11 | ||
JP08978496A JP3923107B2 (en) | 1995-07-03 | 1996-04-11 | Silicon wafer manufacturing method and apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1145531A true CN1145531A (en) | 1997-03-19 |
CN1096108C CN1096108C (en) | 2002-12-11 |
Family
ID=27276263
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN96110121A Expired - Lifetime CN1096108C (en) | 1995-07-03 | 1996-07-03 | Method and appts. for making silicon chip |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP3923107B2 (en) |
KR (1) | KR100457718B1 (en) |
CN (1) | CN1096108C (en) |
DE (1) | DE19626396B4 (en) |
TW (1) | TW303488B (en) |
Cited By (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101875181A (en) * | 2010-05-31 | 2010-11-03 | 青岛理工大学 | Crisp and hard material grinding machine |
CN101954620A (en) * | 2009-06-17 | 2011-01-26 | 硅电子股份公司 | The method of bilateral chemical grinding semiconductor wafer |
CN101972983A (en) * | 2010-08-11 | 2011-02-16 | 中国电子科技集团公司第四十五研究所 | Chemically mechanical polishing mandrel device |
US7897801B2 (en) | 2003-05-12 | 2011-03-01 | Invista North America S.A R.L. | Process for the preparation of dinitriles |
US7919646B2 (en) | 2006-07-14 | 2011-04-05 | Invista North America S.A R.L. | Hydrocyanation of 2-pentenenitrile |
US7973174B2 (en) | 2005-10-18 | 2011-07-05 | Invista North America S.A.R.L. | Process of making 3-aminopentanenitrile |
US7977502B2 (en) | 2008-01-15 | 2011-07-12 | Invista North America S.A R.L. | Process for making and refining 3-pentenenitrile, and for refining 2-methyl-3-butenenitrile |
CN102172885A (en) * | 2011-01-31 | 2011-09-07 | 北京通美晶体技术有限公司 | Substrate polishing device and polished substrate thereof |
CN102179734A (en) * | 2011-03-14 | 2011-09-14 | 刘晓明 | Super-hard blade passivation polishing machine |
CN102229093A (en) * | 2011-07-01 | 2011-11-02 | 中国电子科技集团公司第四十五研究所 | Lifting and pressing mechanism applied to wafer polishing equipment |
US8088943B2 (en) | 2008-01-15 | 2012-01-03 | Invista North America S.A R.L. | Hydrocyanation of pentenenitriles |
US8101790B2 (en) | 2007-06-13 | 2012-01-24 | Invista North America S.A.R.L. | Process for improving adiponitrile quality |
US8178711B2 (en) | 2006-03-17 | 2012-05-15 | Invista North America S.A R.L. | Method for the purification of triorganophosphites by treatment with a basic additive |
US8247621B2 (en) | 2008-10-14 | 2012-08-21 | Invista North America S.A.R.L. | Process for making 2-secondary-alkyl-4,5-di-(normal-alkyl)phenols |
US8338636B2 (en) | 2009-08-07 | 2012-12-25 | Invista North America S.A R.L. | Hydrogenation and esterification to form diesters |
US8373001B2 (en) | 2003-02-10 | 2013-02-12 | Invista North America S.A R.L. | Method of producing dinitrile compounds |
CN103817572A (en) * | 2014-02-18 | 2014-05-28 | 河南机电高等专科学校 | Repairing device for clutch friction steel sheets |
CN103847032A (en) * | 2014-03-20 | 2014-06-11 | 德清晶辉光电科技有限公司 | Production process of large-diameter ultrathin quartz wafer |
US8906334B2 (en) | 2007-05-14 | 2014-12-09 | Invista North America S.A R.L. | High efficiency reactor and process |
CN104669105A (en) * | 2013-11-26 | 2015-06-03 | 浙江上城科技有限公司 | Two-surface grinding method of sapphire touch panel |
CN107543837A (en) * | 2017-08-25 | 2018-01-05 | 郑州磨料磨具磨削研究所有限公司 | The detection method of silicon chip damaging layer after a kind of emery wheel fine grinding |
CN108349058A (en) * | 2015-10-09 | 2018-07-31 | 胜高股份有限公司 | Load-carrying ring, grinding attachment and method for grinding |
CN108544329A (en) * | 2018-04-09 | 2018-09-18 | 中国工程物理研究院材料研究所 | A kind of surface polishing and grinding apparatus and its application |
CN109706436A (en) * | 2017-10-26 | 2019-05-03 | 汉民科技股份有限公司 | Single-wafer processing unit and its operating method, transfer approach and collimator |
CN113815127A (en) * | 2021-10-20 | 2021-12-21 | 山东中恒建设集团有限公司 | Material turnover cutting device for construction |
CN115008318A (en) * | 2022-06-16 | 2022-09-06 | 南京工业职业技术大学 | Pneumatic loading type double-sided ring polishing machine |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3620554B2 (en) * | 1996-03-25 | 2005-02-16 | 信越半導体株式会社 | Semiconductor wafer manufacturing method |
JP2002346918A (en) * | 2001-05-29 | 2002-12-04 | Speedfam Co Ltd | Both surface polishing device |
DE10132504C1 (en) * | 2001-07-05 | 2002-10-10 | Wacker Siltronic Halbleitermat | Method for simultaneously polishing both sides of semiconductor wafer mounted on cogwheel between central cogwheel and annulus uses upper and lower polishing wheel |
DE10142400B4 (en) * | 2001-08-30 | 2009-09-03 | Siltronic Ag | Improved local flatness semiconductor wafer and method of making the same |
CN1301184C (en) * | 2003-12-16 | 2007-02-21 | 汪开庆 | Optical grinding machine and method for processing sapphire crystal substrate for semiconductor use |
DE102006062872B4 (en) * | 2006-07-13 | 2012-06-14 | Peter Wolters Gmbh | Simultaneous double-side grinding providing method for semiconductor wafer, involves machining semiconductor wafers in material-removing fashion between rotating upper working disk and lower working disk |
DE102006062871B4 (en) * | 2006-07-13 | 2012-06-21 | Peter Wolters Gmbh | Simultaneous double-side grinding providing method for semiconductor wafer, involves machining semiconductor wafers in material-removing fashion between rotating upper working disk and lower working disk |
DE102007056627B4 (en) | 2007-03-19 | 2023-12-21 | Lapmaster Wolters Gmbh | Method for grinding several semiconductor wafers simultaneously |
JP4780142B2 (en) * | 2008-05-22 | 2011-09-28 | 信越半導体株式会社 | Wafer manufacturing method |
JP2009302409A (en) * | 2008-06-16 | 2009-12-24 | Sumco Corp | Method of manufacturing semiconductor wafer |
JP5600867B2 (en) * | 2008-06-16 | 2014-10-08 | 株式会社Sumco | Manufacturing method of semiconductor wafer |
CN101708593B (en) * | 2009-12-08 | 2013-01-09 | 中国电子科技集团公司第四十五研究所 | Chemical-mechanical polishing mandrel driving device |
DE102011089570A1 (en) | 2011-12-22 | 2013-06-27 | Siltronic Ag | Guide cage for grinding both sides of at least one disc-shaped workpiece between two rotating working wheels of a grinding device, method for producing the guide cage and method for simultaneous two-sided grinding of disc-shaped workpieces using the guide cage |
CN103123865B (en) * | 2013-02-26 | 2015-05-27 | 宁波韵升股份有限公司 | Magnetic product processing method and automatic sorting device |
JP6792363B2 (en) * | 2016-07-22 | 2020-11-25 | 株式会社ディスコ | Grinding device |
CN106425857A (en) * | 2016-11-18 | 2017-02-22 | 南京华东电子信息科技股份有限公司 | Novel polishing fixing jig for small and medium single liquid crystal display panels |
WO2020056538A1 (en) * | 2018-09-17 | 2020-03-26 | 苏州迈创信息技术有限公司 | Automatic grinder |
CN113752111B (en) * | 2021-09-30 | 2023-11-21 | 浙江仲全数控科技有限公司 | Vertical double-end-face grinding machine |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5840265A (en) * | 1981-08-28 | 1983-03-09 | Toshiba Corp | Both faces polishing device |
JPS5972139A (en) * | 1982-10-18 | 1984-04-24 | Toshiba Corp | Processing method for sheet material |
JPS59107854A (en) * | 1982-12-08 | 1984-06-22 | Hitachi Ltd | Both surfaces simultaneous grinding method of wafer |
JPS59169758A (en) * | 1983-03-15 | 1984-09-25 | Toshiba Corp | Grinding device for wafer |
JPS6384860A (en) * | 1986-09-26 | 1988-04-15 | Hitachi Ltd | Surface polishing device |
KR900001724B1 (en) * | 1987-09-28 | 1990-03-19 | 주식회사 한국삼기 | Plane grinding apparatus |
JPH06103678B2 (en) * | 1987-11-28 | 1994-12-14 | 株式会社東芝 | Semiconductor substrate processing method |
JP2555000B2 (en) * | 1989-01-18 | 1996-11-20 | 鐘紡株式会社 | Polishing method for hard and brittle materials |
AU637087B2 (en) * | 1989-03-24 | 1993-05-20 | Sumitomo Electric Industries, Ltd. | Apparatus for grinding semiconductor wafer |
JP2674665B2 (en) * | 1989-03-24 | 1997-11-12 | 住友電気工業株式会社 | Semiconductor wafer grinding machine |
JPH0740565B2 (en) * | 1991-04-05 | 1995-05-01 | 不二越機械工業株式会社 | Wafer double-sided simultaneous grinding method and apparatus |
JPH0667070A (en) * | 1992-08-24 | 1994-03-11 | Furukawa Electric Co Ltd:The | Semiconductor laser module |
JP2839801B2 (en) * | 1992-09-18 | 1998-12-16 | 三菱マテリアル株式会社 | Wafer manufacturing method |
JP2722975B2 (en) * | 1992-11-19 | 1998-03-09 | 住友金属工業株式会社 | Cutting method with multi-wire saw |
US5389579A (en) * | 1993-04-05 | 1995-02-14 | Motorola, Inc. | Method for single sided polishing of a semiconductor wafer |
JP3047670B2 (en) * | 1993-04-08 | 2000-05-29 | トヨタ自動車株式会社 | Control device for engine drive generator for electric vehicle |
-
1996
- 1996-04-11 JP JP08978496A patent/JP3923107B2/en not_active Expired - Fee Related
- 1996-05-15 TW TW085105754A patent/TW303488B/zh not_active IP Right Cessation
- 1996-05-31 KR KR1019960019031A patent/KR100457718B1/en active IP Right Grant
- 1996-07-01 DE DE19626396A patent/DE19626396B4/en not_active Expired - Lifetime
- 1996-07-03 CN CN96110121A patent/CN1096108C/en not_active Expired - Lifetime
Cited By (32)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8373001B2 (en) | 2003-02-10 | 2013-02-12 | Invista North America S.A R.L. | Method of producing dinitrile compounds |
US7897801B2 (en) | 2003-05-12 | 2011-03-01 | Invista North America S.A R.L. | Process for the preparation of dinitriles |
US7973174B2 (en) | 2005-10-18 | 2011-07-05 | Invista North America S.A.R.L. | Process of making 3-aminopentanenitrile |
US8178711B2 (en) | 2006-03-17 | 2012-05-15 | Invista North America S.A R.L. | Method for the purification of triorganophosphites by treatment with a basic additive |
US7919646B2 (en) | 2006-07-14 | 2011-04-05 | Invista North America S.A R.L. | Hydrocyanation of 2-pentenenitrile |
US8394981B2 (en) | 2006-07-14 | 2013-03-12 | Invista North America S.A R.L. | Hydrocyanation of 2-pentenenitrile |
US8906334B2 (en) | 2007-05-14 | 2014-12-09 | Invista North America S.A R.L. | High efficiency reactor and process |
US8101790B2 (en) | 2007-06-13 | 2012-01-24 | Invista North America S.A.R.L. | Process for improving adiponitrile quality |
US7977502B2 (en) | 2008-01-15 | 2011-07-12 | Invista North America S.A R.L. | Process for making and refining 3-pentenenitrile, and for refining 2-methyl-3-butenenitrile |
US8088943B2 (en) | 2008-01-15 | 2012-01-03 | Invista North America S.A R.L. | Hydrocyanation of pentenenitriles |
US8247621B2 (en) | 2008-10-14 | 2012-08-21 | Invista North America S.A.R.L. | Process for making 2-secondary-alkyl-4,5-di-(normal-alkyl)phenols |
CN101954620A (en) * | 2009-06-17 | 2011-01-26 | 硅电子股份公司 | The method of bilateral chemical grinding semiconductor wafer |
US8338636B2 (en) | 2009-08-07 | 2012-12-25 | Invista North America S.A R.L. | Hydrogenation and esterification to form diesters |
CN101875181A (en) * | 2010-05-31 | 2010-11-03 | 青岛理工大学 | Crisp and hard material grinding machine |
CN101972983A (en) * | 2010-08-11 | 2011-02-16 | 中国电子科技集团公司第四十五研究所 | Chemically mechanical polishing mandrel device |
CN102172885A (en) * | 2011-01-31 | 2011-09-07 | 北京通美晶体技术有限公司 | Substrate polishing device and polished substrate thereof |
CN102179734A (en) * | 2011-03-14 | 2011-09-14 | 刘晓明 | Super-hard blade passivation polishing machine |
CN102229093A (en) * | 2011-07-01 | 2011-11-02 | 中国电子科技集团公司第四十五研究所 | Lifting and pressing mechanism applied to wafer polishing equipment |
CN102229093B (en) * | 2011-07-01 | 2013-09-18 | 中国电子科技集团公司第四十五研究所 | Lifting and pressing mechanism applied to wafer polishing equipment |
CN104669105A (en) * | 2013-11-26 | 2015-06-03 | 浙江上城科技有限公司 | Two-surface grinding method of sapphire touch panel |
CN103817572A (en) * | 2014-02-18 | 2014-05-28 | 河南机电高等专科学校 | Repairing device for clutch friction steel sheets |
CN103847032A (en) * | 2014-03-20 | 2014-06-11 | 德清晶辉光电科技有限公司 | Production process of large-diameter ultrathin quartz wafer |
CN103847032B (en) * | 2014-03-20 | 2016-01-06 | 德清晶辉光电科技有限公司 | The production technology of the ultra-thin quartz wafer of a kind of major diameter |
US11052506B2 (en) | 2015-10-09 | 2021-07-06 | Sumco Corporation | Carrier ring, grinding device, and grinding method |
CN108349058A (en) * | 2015-10-09 | 2018-07-31 | 胜高股份有限公司 | Load-carrying ring, grinding attachment and method for grinding |
CN107543837A (en) * | 2017-08-25 | 2018-01-05 | 郑州磨料磨具磨削研究所有限公司 | The detection method of silicon chip damaging layer after a kind of emery wheel fine grinding |
CN107543837B (en) * | 2017-08-25 | 2020-02-21 | 郑州磨料磨具磨削研究所有限公司 | Method for detecting damaged layer of silicon wafer after grinding wheel fine grinding |
CN109706436A (en) * | 2017-10-26 | 2019-05-03 | 汉民科技股份有限公司 | Single-wafer processing unit and its operating method, transfer approach and collimator |
CN108544329A (en) * | 2018-04-09 | 2018-09-18 | 中国工程物理研究院材料研究所 | A kind of surface polishing and grinding apparatus and its application |
CN113815127A (en) * | 2021-10-20 | 2021-12-21 | 山东中恒建设集团有限公司 | Material turnover cutting device for construction |
CN113815127B (en) * | 2021-10-20 | 2023-06-02 | 山东中恒建设集团有限公司 | Material turnover cutting device for construction |
CN115008318A (en) * | 2022-06-16 | 2022-09-06 | 南京工业职业技术大学 | Pneumatic loading type double-sided ring polishing machine |
Also Published As
Publication number | Publication date |
---|---|
CN1096108C (en) | 2002-12-11 |
KR970008384A (en) | 1997-02-24 |
TW303488B (en) | 1997-04-21 |
KR100457718B1 (en) | 2005-04-06 |
JPH09248740A (en) | 1997-09-22 |
JP3923107B2 (en) | 2007-05-30 |
DE19626396A1 (en) | 1997-01-16 |
DE19626396B4 (en) | 2006-12-07 |
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Legal Events
Date | Code | Title | Description |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Free format text: FORMER OWNER: MITSUBISHI MATERIALS CORP. |
|
C41 | Transfer of patent application or patent right or utility model | ||
C56 | Change in the name or address of the patentee |
Owner name: SUMCO CORP. Free format text: FORMER NAME: MITSUBISHI MATERIALS SILICON CORP. |
|
CP01 | Change in the name or title of a patent holder |
Address after: Tokyo, Japan Co-patentee after: Mitsubishi Materials Corp. Patentee after: SUMCO Corp. Address before: Tokyo, Japan Co-patentee before: Mitsubishi Materials Corp. Patentee before: SUMITOMO MITSUBISHI SILICON Corp. |
|
TR01 | Transfer of patent right |
Effective date of registration: 20111031 Address after: Tokyo, Japan Patentee after: SUMCO Corp. Address before: Tokyo, Japan Co-patentee before: Mitsubishi Materials Corp. Patentee before: Sumco Corp. Effective date of registration: 20111031 Address after: Tokyo, Japan Co-patentee after: Mitsubishi Materials Corp. Patentee after: SUMITOMO MITSUBISHI SILICON Corp. Address before: Tokyo, Japan Co-patentee before: Mitsubishi Materials Corp. Patentee before: Sumitomo Mitsubishi Silicon Corp. |
|
CX01 | Expiry of patent term |
Granted publication date: 20021211 |
|
EXPY | Termination of patent right or utility model |