CN1145204C - 稀释设备和方法 - Google Patents
稀释设备和方法 Download PDFInfo
- Publication number
- CN1145204C CN1145204C CNB981155553A CN98115555A CN1145204C CN 1145204 C CN1145204 C CN 1145204C CN B981155553 A CNB981155553 A CN B981155553A CN 98115555 A CN98115555 A CN 98115555A CN 1145204 C CN1145204 C CN 1145204C
- Authority
- CN
- China
- Prior art keywords
- liquid
- filter
- flow velocity
- pump
- solution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02057—Cleaning during device manufacture
- H01L21/0206—Cleaning during device manufacture during, before or after processing of insulating layers
- H01L21/02063—Cleaning during device manufacture during, before or after processing of insulating layers the processing being the formation of vias or contact holes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/80—Forming a predetermined ratio of the substances to be mixed
- B01F35/83—Forming a predetermined ratio of the substances to be mixed by controlling the ratio of two or more flows, e.g. using flow sensing or flow controlling devices
- B01F35/831—Forming a predetermined ratio of the substances to be mixed by controlling the ratio of two or more flows, e.g. using flow sensing or flow controlling devices using one or more pump or other dispensing mechanisms for feeding the flows in predetermined proportion, e.g. one of the pumps being driven by one of the flows
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02057—Cleaning during device manufacture
Abstract
Description
Claims (6)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/886,741 US6070600A (en) | 1997-07-01 | 1997-07-01 | Point of use dilution tool and method |
US886,741 | 1997-07-01 | ||
US886741 | 2001-06-21 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1208950A CN1208950A (zh) | 1999-02-24 |
CN1145204C true CN1145204C (zh) | 2004-04-07 |
Family
ID=25389667
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB981155553A Expired - Fee Related CN1145204C (zh) | 1997-07-01 | 1998-06-30 | 稀释设备和方法 |
Country Status (6)
Country | Link |
---|---|
US (2) | US6070600A (zh) |
JP (1) | JPH1119871A (zh) |
KR (1) | KR100597325B1 (zh) |
CN (1) | CN1145204C (zh) |
SG (1) | SG77642A1 (zh) |
TW (1) | TW393677B (zh) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6070600A (en) * | 1997-07-01 | 2000-06-06 | Motorola, Inc. | Point of use dilution tool and method |
US6276997B1 (en) * | 1998-12-23 | 2001-08-21 | Shinhwa Li | Use of chemical mechanical polishing and/or poly-vinyl-acetate scrubbing to restore quality of used semiconductor wafers |
US6405399B1 (en) * | 1999-06-25 | 2002-06-18 | Lam Research Corporation | Method and system of cleaning a wafer after chemical mechanical polishing or plasma processing |
US6267142B1 (en) * | 1999-06-25 | 2001-07-31 | Lam Research Corporation | Fluid delivery stablization for wafer preparation systems |
EP1094506A3 (en) | 1999-10-18 | 2004-03-03 | Applied Materials, Inc. | Capping layer for extreme low dielectric constant films |
US20030011774A1 (en) * | 2001-06-05 | 2003-01-16 | Dibello Gerald N. | Methods and systems for monitoring process fluids |
US6589099B2 (en) | 2001-07-09 | 2003-07-08 | Motorola, Inc. | Method for chemical mechanical polishing (CMP) with altering the concentration of oxidizing agent in slurry |
US7063097B2 (en) * | 2003-03-28 | 2006-06-20 | Advanced Technology Materials, Inc. | In-situ gas blending and dilution system for delivery of dilute gas at a predetermined concentration |
WO2004088415A2 (en) * | 2003-03-28 | 2004-10-14 | Advanced Technology Materials Inc. | Photometrically modulated delivery of reagents |
JP4197469B2 (ja) * | 2003-07-01 | 2008-12-17 | 三菱電機株式会社 | 回転電機の回転子 |
US7520287B2 (en) * | 2005-01-28 | 2009-04-21 | Kozy David M | Aqueous tube cleaning apparatus and method |
TWI552797B (zh) * | 2005-06-22 | 2016-10-11 | 恩特葛瑞斯股份有限公司 | 整合式氣體混合用之裝置及方法 |
US20130068264A1 (en) * | 2011-09-21 | 2013-03-21 | Nanya Technology Corporation | Wafer scrubber apparatus |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
BE754657Q (fr) * | 1965-11-29 | 1971-01-18 | Kenics Corp | Appareil melangeur |
DE2263769C2 (de) * | 1972-12-28 | 1974-10-03 | Hewlett-Packard Gmbh, 7030 Boeblingen | Mischvorrichtung |
US4159929A (en) * | 1978-05-17 | 1979-07-03 | Hooker Chemicals & Plastics Corp. | Chemical and electro-chemical process for production of alkali metal chlorates |
US4506987A (en) * | 1982-09-08 | 1985-03-26 | The United States Of America As Represented By The United States Department Of Energy | High pressure liquid chromatographic gradient mixer |
US4911761A (en) * | 1984-05-21 | 1990-03-27 | Cfm Technologies Research Associates | Process and apparatus for drying surfaces |
US4531456A (en) * | 1984-09-26 | 1985-07-30 | Fmc Corporation | Liquid distribution trough |
US5316384A (en) * | 1992-11-13 | 1994-05-31 | Unosource Controls, Inc. | Primary-secondary circuit hydraulic interface |
JP3341033B2 (ja) * | 1993-06-22 | 2002-11-05 | 忠弘 大見 | 回転薬液洗浄方法及び洗浄装置 |
US5407526A (en) * | 1993-06-30 | 1995-04-18 | Intel Corporation | Chemical mechanical polishing slurry delivery and mixing system |
SE9400437D0 (sv) * | 1994-02-10 | 1994-02-10 | Pharmacia Lkb Biotech | Filterbrunn och förfarande vid dess tillverkning |
US5439663A (en) * | 1994-08-01 | 1995-08-08 | Fmc Corporation | Method for producing Caro's acid |
TW402542B (en) | 1994-10-24 | 2000-08-21 | Motorola Inc | Improvements in timing and location for mixing polishing fluid in a process of polishing a semiconductor substrate |
US5772784A (en) * | 1994-11-14 | 1998-06-30 | Yieldup International | Ultra-low particle semiconductor cleaner |
US5664990A (en) * | 1996-07-29 | 1997-09-09 | Integrated Process Equipment Corp. | Slurry recycling in CMP apparatus |
US5779355A (en) * | 1997-02-27 | 1998-07-14 | Roger H. Woods Limited | Mixing apparatus venturi coupled multiple shear mixing apparatus for repairing a liquid-solid slurry |
US6070600A (en) * | 1997-07-01 | 2000-06-06 | Motorola, Inc. | Point of use dilution tool and method |
DE19813600A1 (de) * | 1998-03-27 | 1999-09-30 | Bayer Ag | Statischer Scheibenmischer |
-
1997
- 1997-07-01 US US08/886,741 patent/US6070600A/en not_active Expired - Fee Related
-
1998
- 1998-04-23 TW TW087106258A patent/TW393677B/zh not_active IP Right Cessation
- 1998-06-25 SG SG1998001519A patent/SG77642A1/en unknown
- 1998-06-30 JP JP10199832A patent/JPH1119871A/ja active Pending
- 1998-06-30 CN CNB981155553A patent/CN1145204C/zh not_active Expired - Fee Related
- 1998-07-01 KR KR1019980026343A patent/KR100597325B1/ko not_active IP Right Cessation
-
2000
- 2000-02-01 US US09/495,180 patent/US6406555B1/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
KR19990013494A (ko) | 1999-02-25 |
US6406555B1 (en) | 2002-06-18 |
CN1208950A (zh) | 1999-02-24 |
US6070600A (en) | 2000-06-06 |
JPH1119871A (ja) | 1999-01-26 |
TW393677B (en) | 2000-06-11 |
KR100597325B1 (ko) | 2006-09-28 |
SG77642A1 (en) | 2001-01-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: FREEDOM SEMICONDUCTORS CO. Free format text: FORMER OWNER: MOTOROLA, INC. Effective date: 20040813 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20040813 Address after: Texas in the United States Patentee after: FreeScale Semiconductor Address before: Illinois Instrunment Patentee before: Motorola, Inc. |
|
C56 | Change in the name or address of the patentee |
Owner name: FISICAL SEMICONDUCTOR INC. Free format text: FORMER NAME: FREEDOM SEMICONDUCTOR CORP. |
|
CP01 | Change in the name or title of a patent holder |
Address after: Texas in the United States Patentee after: FREESCALE SEMICONDUCTOR, Inc. Address before: Texas in the United States Patentee before: FreeScale Semiconductor |
|
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20040407 Termination date: 20150630 |
|
EXPY | Termination of patent right or utility model |