CN114414212B - Portable laser beam quality beta factor testing device - Google Patents

Portable laser beam quality beta factor testing device Download PDF

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CN114414212B
CN114414212B CN202111583285.2A CN202111583285A CN114414212B CN 114414212 B CN114414212 B CN 114414212B CN 202111583285 A CN202111583285 A CN 202111583285A CN 114414212 B CN114414212 B CN 114414212B
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beta
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beam quality
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CN114414212A (en
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顿雄
李冬冬
邢裕杰
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Tongji University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02Testing optical properties
    • G01M11/0207Details of measuring devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00Photometry, e.g. photographic exposure meter
    • G01J1/02Details

Abstract

The invention relates to a portable laser beam quality beta factor testing device, which comprises the following components in sequence along the direction of a tested laser path: energy attenuation module a: the device is used for accurately transmitting the high-energy laser to be measured into the energy attenuation module B after energy attenuation and light path adjustment; energy attenuation module B: the device is used for carrying out further attenuation through an attenuation sheet which is arranged on the mounting bracket in a replaceable manner, and outputting the laser to be detected after further attenuation to the beta detection module; beta detection module: the method is used for detecting the facula picture of the input laser in real time, and obtaining the beam quality beta factor after acquiring the gray information. Compared with the prior art, the invention has the advantages of modularization, standardization, accurate and real-time detection, simple operation and the like.

Description

Portable laser beam quality beta factor testing device
Technical Field
The invention relates to the technical field of lasers, in particular to a portable laser beam quality beta factor testing device.
Background
Since the birth of the first ruby laser, laser technology has been in rapid development, various lasers have been developed successively, and the laser has wide application in the industrial fields of medical treatment, communication, material processing, laser welding and the like, and has irreplaceable application prospect in military.
In recent years, high-energy laser sources are being greatly developed in many developed countries, and have many advantages, such as light weight, high efficiency, low cost and other outstanding characteristics, playing a very important role in military, the most important evaluation parameters of the high-energy laser sources are beam quality, the advantages and disadvantages of the indexes of the high-energy laser sources directly influence the energy density and the action time of light spots on targets, further influence the distance and the damage effect of the targets, and the current methods for defining the quality of the laser beams are many, wherein the beta factor and the M factor 2 The two methods are widely used at present, which can reflect the essence of the quality of the light beam and the spatial distribution of the light intensity.
The current technology adopted by the light beam quality instrument on the market basically adopts the devices such as CCD, knife edge and slit to carry out light beam profile measurement, the two most important points are focused light beam measurement and collimated laser measurement, and the accurate value of the light beam quality is obtained through multiple times of measurement, but the light beam quality detection time of the instrument is longer and is close to two minutes, real-time dynamic detection cannot be carried out, and the measurement method is accurate for low power; for high power, the corresponding beam quality is not the same at different times due to thermal effects, and therefore, a device capable of dynamically detecting the beam quality in real time is particularly required.
At present, a device for detecting the quality of the high-energy laser beam by adopting the beta factor does not appear basically, and research work is mainly focused on analyzing reasons for influencing the beta factor and how to improve the accuracy of beta factor calculation, such as the analysis of influencing factors of the beta factor of the quality of the high-energy laser beam in the literature of Wang Yanru; there is also a calibration measurement system for researching the beam quality beta factor, such as a calibration system for measuring the beam quality beta factor by CCD far-field method disclosed in Chinese patent CN 104977156A; and a calibration method of a beam quality beta factor measurement system disclosed in Chinese patent CN108871559A, etc., the currently available beam quality detection method or device is basically based on M 2 The working principle is that laser is focused firstly, then the laser is zoomed continuously, and the quality of the light beam is collected and calculated in the zooming process, but the method can not monitor and detect the quality of the light beam in real time, and a system test fixture is designed and built by itself, so that the method is generally free from standardization, messy, huge in size and quite high in cost.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provide a portable laser beam quality beta factor testing device.
The aim of the invention can be achieved by the following technical scheme:
the portable laser beam quality beta factor testing device comprises the following components in sequence along the direction of a tested laser path:
energy attenuation module a: the device is used for accurately transmitting the high-energy laser to be measured into the energy attenuation module B after energy attenuation and light path adjustment;
energy attenuation module B: the device is used for carrying out further attenuation through an attenuation sheet which is arranged on the mounting bracket in a replaceable manner, and outputting the laser to be detected after further attenuation to the beta detection module;
beta detection module: the method is used for detecting the facula picture of the input laser in real time, and obtaining the beam quality beta factor after acquiring the gray information.
The energy attenuation module A comprises a mounting platform, a plurality of groups of emission absorption units and adjusting components which are arranged on the mounting platform along light paths respectively, and the emission absorption units and the adjusting components are all positioned at the same center height.
Each group of emission absorption units consists of a high-energy reflection assembly and an absorber which are matched with each other, the high-energy reflection assembly consists of a high-energy reflection mirror and an adjusting frame and is used for removing a coating film according to the wave band of the laser to be detected and reflecting most of energy of the laser to be detected into the corresponding absorber, and the number of the high-energy reflection assemblies depends on the energy level of the laser to be detected, the damage threshold value which can be born by the reflection film and the thermal deformation of the lens.
The adjusting component consists of a reflecting mirror and an adjusting frame for adjusting the pitching and tilting angles of the reflecting mirror, and is used for ensuring that the laser to be tested is quickly and accurately debugged into the beta detection module.
The absorber is processed by metal materials with high heat conductivity and high heat exchange coefficient, and comprises aluminum alloy and red copper.
And a heat insulation pad is arranged between the absorber and the mounting platform and is used for preventing the measurement data from being influenced by the heated conduction on the mounting platform, and the heat insulation pad is made of polytetrafluoroethylene or POM heat insulation materials.
The beta detection module comprises a computer, a platform, a focusing mirror arranged on the platform, a detection camera communicated with the computer through a serial port, a beam splitter and a total reflection mirror, wherein the further attenuated laser to be detected sequentially passes through the focusing mirror, the beam splitter and the total reflection mirror and then is focused on the detection camera, the detection camera acquires the light spot picture of the laser to be detected, the obtained energy gray information is sent to the computer for real-time processing to obtain the ratio of the far field divergence angle of the laser to be detected to the diffraction limit angle of a reference or the ratio of the far field beam diameter of the light beam to be detected to the far field beam diameter corresponding to the diffraction limit angle of the reference beam, namely the beam quality beta factor, and the expression is as follows:
Figure GDA0004194275060000031
wherein alpha is u,real Alpha is the divergence angle of the far field of the measured beam u,ref D is the diffraction limit angle of the reference beam u,real For the power ratio in the barrel, i.e. the far-field beam diameter or width of the measured beam, d u,ref Is the far field beam diameter or width corresponding to the diffraction limited angle of the reference beam.
The focusing lens realizes a movable control function through a two-dimensional adjusting frame and a one-dimensional linear displacement platform, wherein the two-dimensional adjusting frame is used for adjusting the pitching and rotating motion of the focusing lens, the one-dimensional linear displacement platform is used for adjusting the front-back distance of the focusing lens, so that the beta focal length is adjusted, the image point is ensured to be accurately focused on the image surface of the detection camera, and the one-dimensional linear displacement platform consists of a sliding rail and a sliding block.
The energy attenuation module B and the beta detection module are designed in a split mode or integrated into a beam quality beta factor detection module serving as a standard module.
The device is applied to real-time detection of the quality of laser beams, convenient adjustment of a laser system, adjustment of multipath laser beam combining and is used as a beam quality feedback module in an integrated laser guiding system.
Compared with the prior art, the invention has the following advantages:
the invention provides a device for dynamically detecting the quality beta factor of a laser beam in real time based on computer programming, which can facilitate the adjustment of a laser system and also detect the quality beta factor of the laser beam in real time.
Drawings
Fig. 1 is a schematic structural view of the present invention.
Fig. 2 is a schematic structural diagram of the energy attenuation module a.
Fig. 3 is a schematic structural diagram of the energy attenuation module B.
Fig. 4 is a schematic structural diagram of the β detection module.
Fig. 5 shows a structure in which the attenuation module B and the β detection module are integrated.
Description of the drawings
1. The laser to be measured comprises 2 parts of laser to be measured, 3 parts of energy attenuation modules A and B,4 parts of beta detection modules, 5 parts of energy attenuation modules B and 4 parts of beta detection modules, 5 parts of installation platforms, 6 parts of high-energy reflection assemblies a and 7 parts of high-energy reflection assemblies B and 8 parts of high-energy reflection assemblies a and 9 parts of absorption bodies B and 10 parts of absorption bodies, 11 parts of adjustment assemblies, installation supports, 12 parts of attenuation sheets, 13 parts of platforms, 14 parts of focusing mirrors, 15 parts of detection cameras, 16 parts of computers, 17 parts of beam splitters, 18 parts of beam splitters and total reflection mirrors.
Detailed Description
The invention will now be described in detail with reference to the drawings and specific examples.
The invention provides a portable laser beam quality beta factor real-time testing device of a high-power laser device based on computer programming, which is used for dynamically monitoring a system beta factor in real time and is convenient for the adjustment of a laser system; and as the monitoring feedback of the system beam quality, thereby dynamically adjusting in real time; the device is connected with a camera through a serial port based on computer language programming, realizes an upper computer interface, is simple to operate and flexible to control, can accurately detect the laser beam beta factor in real time, has the advantages of light weight, small volume, low cost and portability, can be used in a laboratory, is easy to integrate into a system, and realizes more detection and experiment functions.
Example 1
The invention provides a device for dynamically detecting the quality beta factor of a laser beam in real time based on computer programming, which is shown in figure 1.
The device wholly comprises three modules, namely: the device is mainly applied to detection of laser beam quality, convenient adjustment of a laser system, adjustment of a multi-path laser beam combining system, and the like as a beam quality feedback module in an integrated laser guiding system.
The basic principle of beta test of the device is as follows:
the beam quality beta factor, namely the ratio of the far field divergence angle of the detected beam to the diffraction limit angle of the reference, is connected with a camera in the beta testing device in a serial port based on a computer language program, so that the upper computer is operated, flexible control is realized, and the beam quality is dynamically detected in real time.
The working process of the device is as follows:
after passing through the energy attenuation module A2 and the energy attenuation module B3, the laser 1 to be measured is attenuated to weak energy and enters the beta detection module 4, so that the detection of the real-time dynamic beam quality beta factor is realized.
As shown in fig. 2, the energy attenuation module A2 has the function of attenuating energy, so that most of energy of the high-energy laser is reflected to the absorber, and the output weak light enters the β detection module 4 to prevent the β detection module 4, and the module further has the function of adjusting the measured light path to accurately debug the measured laser 1 into the β detection module 4, and the installation platform 5 mainly integrates all components and is located at the same center; the high-energy reflection assembly a6 and the high-energy reflection assembly b7 are mainly composed of a high-energy reflector and an adjusting frame, and are used for reflecting most of energy into the absorber a8 and the absorber b9 respectively, the number of the high-energy reflection assemblies is mainly determined by the energy, the damage threshold value which can be born by a reflection film, the thermal deformation of a lens and other parameters, the high-energy reflector removes a coating film according to the wave band of the tested laser 1, so that most of energy is reflected onto the absorber, and the adjusting frame is mainly convenient for debugging the tested light beam into the absorber; the absorber a8 and the absorber b9 are made of metal materials with high heat conductivity and high heat exchange coefficient, such as aluminum alloy, red copper and the like, and the absorber is installed on the platform and has a heat insulation function to prevent the heat conduction installation platform 5 from influencing the measurement data, and the absorber is connected with the installation platform 5 through a heat insulation pad (the heat insulation pad is made of heat insulation materials such as polytetrafluoroethylene, POM and the like); the adjusting component 10 mainly comprises a reflecting mirror and an adjusting frame, has the functions of adjusting the pitching and tilting of the reflecting mirror, and is used for ensuring that the measured light beam is quickly and accurately debugged into the beta detection module 4.
As shown in fig. 3, the energy attenuation module B3 has a function of precisely attenuating energy and an adjustable function, and mainly comprises an attenuation sheet 12 and a mounting bracket 11, wherein the mounting bracket 11 can be selected or designed to be automatically switched so as to facilitate replacement of the attenuation sheet 12.
The energy attenuation module A2 selects a proper reflecting mirror according to the requirement, the reflectivity of the high-energy reflecting component is generally 99% -99.9%, the high-reflection film is mainly coated horizontally according to the existing optical coating technology, and the energy (generally in mu W or mW level) which can be born by the beta detection module 4 is mainly coated, for example, the laser power of the measured laser 1 is 1000W, and the attenuation module A2 needs to attenuate 10W -6 The output energy is 1mW, and is attenuated by 10 by the energy attenuation module B3 -1 ~10 -3 The energy attenuation module B3 is mainly implemented by an absorption type attenuation sheet or a reflection type attenuation sheet, and finally ensures that the laser energy reaching the β detection module 4 is in the μw or mW level.
As shown in fig. 4, the β detection module 4 mainly functions to dynamically detect the change of the beam quality β factor in real time, and is mainly composed of a platform 13, a focusing mirror 14, a detection camera 15, a computer 16, a beam splitter 17 and a total reflection mirror 18, wherein the incident laser 1 to be detected is focused on the detection camera 15 after passing through the focusing mirror 14, the beam splitter 17 and the total reflection mirror 18, the light spot picture of the laser 1 to be detected is collected by the detection camera 15 to obtain energy gray information, the computer 16 is connected with the detection camera 15 through a serial port, and the light spot is processed in real time by using a programming algorithm to obtain the beam quality β factor, namely, the ratio of the divergence angle of the far field of the detected beam to the diffraction limit angle of the reference beam or the ratio of the diameter of the far field beam of the detected beam to the diffraction limit angle of the reference beam, and the specific formula is:
Figure GDA0004194275060000061
wherein alpha is u,real For the far field divergence angle of the measured beam, the power ratio in the inner barrel and the power in the inner barrel of the diffraction limit angle of the reference beam are includedThe ratio is equal; alpha u,ref In-barrel power ratio d for reference beam diffraction limit angle u,real The power ratio in the inner barrel is equal to the power ratio in the inner barrel of the diffraction limit angle of the reference beam for the far-field beam diameter or width of the measured beam; d, d u,ref For the far field beam diameter or width corresponding to the reference beam diffraction limit angle, the programming algorithm performs calculations based on the above formula theory.
The platform 13 integrates the elements of the whole beta detection module 4, so that the debugging and the carrying are convenient; the focusing lens 14 has a movable control function, so that the calibration test of the device is facilitated, the focusing lens 14 realizes the movable control function through a two-dimensional adjusting frame and a one-dimensional linear displacement table, wherein the two-dimensional adjusting frame is used for adjusting the pitching and rotating motion of the focusing lens 14, the one-dimensional linear displacement table is used for adjusting the front-back distance of the focusing lens 14, and therefore the beta focal length is adjusted, and the image point is ensured to be accurately focused on the image surface of the detection camera 15.
The detection camera 15 may have a wavelength band capable of receiving laser light; the beam splitter 17 mainly splits the measured laser 1 onto the total reflection mirror 18, returns to the beam splitter 17, and is reflected to the detection camera 15 by the beam splitter 17 to complete the focusing function, so that the total reflection mirror 18 is used for reflecting the measured light back completely to realize the total reflection of the light beam while increasing the focal length without increasing the volume of the device.
Example 2
In this embodiment, the energy attenuation module B3 and the β detection module 4 are integrated together to form a new light beam quality β factor detection module, which is light, small, highly integrated, and can be used as a standard β factor detection instrument, as shown in fig. 5, and the working process is the same as that of embodiment 1.

Claims (4)

1. The portable laser beam quality beta factor testing device is characterized by comprising the following components in sequence along the direction of a tested laser path:
energy attenuation module a (2): the device is used for accurately transmitting the high-energy laser (1) to be measured into the energy attenuation module B (3) after energy attenuation and light path adjustment;
energy attenuation module B (3): the device is used for further attenuating through an attenuation sheet (12) which is arranged on the mounting bracket (11) in a replaceable way, and outputting the laser (1) to be detected after further attenuation to the beta detection module (4);
beta detection module (4): the method comprises the steps of detecting a facula picture of input laser in real time, and obtaining a beam quality beta factor after gray information is obtained;
the energy attenuation module A (2) comprises a mounting platform (5), a plurality of groups of emission and absorption units and an adjusting component (10) which are respectively arranged on the mounting platform (5) along an optical path, and the plurality of groups of emission and absorption units and the adjusting component (10) are all positioned at the same center height;
each group of emission and absorption units consists of high-energy reflection assemblies and absorbers which are matched with each other, the high-energy reflection assemblies consist of high-energy reflection mirrors and adjusting frames and are used for removing coating films according to wave bands of the laser (1) to be measured and reflecting most of energy of the laser (1) to be measured into the corresponding absorbers, and the number of the high-energy reflection assemblies depends on the energy of the laser (1) to be measured, the damage threshold value which can be born by the reflection films and the thermal deformation of the lenses;
a heat insulation pad is arranged between the absorber and the mounting platform (5) and is used for preventing the measurement data from being influenced on the heated conductive mounting platform (5), and the heat insulation pad is made of polytetrafluoroethylene or POM heat insulation materials;
the beta detection module (4) comprises a computer (16), a platform (13) and a focusing mirror (14) arranged on the platform (13), a detection camera (15) communicated with the computer (16) through a serial port, a beam splitter (17) and a total reflection mirror (18), wherein the further attenuated detected laser (1) sequentially passes through the focusing mirror (14), the beam splitter (17) and the total reflection mirror (18) and then is focused on the detection camera (15), the detection camera (15) collects the facula picture of the detected laser (1), the obtained energy gray information is sent to the computer (16) to be processed in real time to obtain the ratio of the far field divergence angle of the detected laser (1) to the diffraction limit angle of a reference or the ratio of the far field beam diameter of the detected laser to the far field beam diameter corresponding to the diffraction limit angle of the reference beam, namely the beam quality beta factor, and the expression is as follows:
Figure QLYQS_1
wherein alpha is u,real Alpha is the divergence angle of the far field of the measured beam u,ref D is the diffraction limit angle of the reference beam u,real For the power ratio in the barrel, i.e. the far-field beam diameter or width of the measured beam, d u,ref A far-field beam diameter or width corresponding to a diffraction limit angle of the reference beam;
the focusing mirror (14) realizes a movable control function through a two-dimensional adjusting frame and a one-dimensional linear displacement platform, wherein the two-dimensional adjusting frame is used for adjusting pitching and rotating motion of the focusing mirror (14), the one-dimensional linear displacement platform is used for adjusting front and back distances of the focusing mirror (14), so that beta focal length is adjusted, an image point is ensured to be focused on an image surface of the detection camera (15) accurately, and the one-dimensional linear displacement platform consists of a sliding rail and a sliding block;
the energy attenuation module B (3) and the beta detection module (4) are designed in a split mode or integrated into a beam quality beta factor detection module serving as a standard module.
2. The portable laser beam quality beta factor testing device according to claim 1, wherein the adjusting component (10) is composed of a reflecting mirror and an adjusting frame for adjusting the pitching and tilting angles of the reflecting mirror, so as to ensure that the tested laser (1) is quickly and accurately debugged into the beta detection module (4).
3. The portable laser beam quality beta factor testing device according to claim 1, wherein the absorber is made of a metal material with high thermal conductivity and high heat exchange coefficient, including aluminum alloy and red copper.
4. The portable laser beam quality beta factor testing device according to claim 1, wherein the device is applied to real-time detection of laser beam quality, convenient adjustment of a laser system, adjustment of multiple laser beam combining and integration of a laser guiding system as a beam quality feedback module.
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