CN114323364B - 一种带测振功能的高精度压力传感器及修正方法 - Google Patents
一种带测振功能的高精度压力传感器及修正方法 Download PDFInfo
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- 238000000034 method Methods 0.000 title claims abstract description 43
- 238000012937 correction Methods 0.000 title claims abstract description 27
- 238000009530 blood pressure measurement Methods 0.000 claims abstract description 24
- 238000005259 measurement Methods 0.000 claims abstract description 16
- OIGNJSKKLXVSLS-VWUMJDOOSA-N prednisolone Chemical compound O=C1C=C[C@]2(C)[C@H]3[C@@H](O)C[C@](C)([C@@](CC4)(O)C(=O)CO)[C@@H]4[C@@H]3CCC2=C1 OIGNJSKKLXVSLS-VWUMJDOOSA-N 0.000 claims abstract description 4
- 239000013078 crystal Substances 0.000 claims description 31
- 239000003292 glue Substances 0.000 claims description 19
- 239000000919 ceramic Substances 0.000 claims description 17
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 11
- 229910052709 silver Inorganic materials 0.000 claims description 11
- 239000004332 silver Substances 0.000 claims description 11
- 230000001681 protective effect Effects 0.000 claims description 10
- 239000007788 liquid Substances 0.000 claims description 7
- 238000007747 plating Methods 0.000 claims description 4
- LTOKVQLDQRXAHK-UHFFFAOYSA-N [W].[Ni].[Cu] Chemical compound [W].[Ni].[Cu] LTOKVQLDQRXAHK-UHFFFAOYSA-N 0.000 claims description 3
- 239000000956 alloy Substances 0.000 claims description 3
- 229910045601 alloy Inorganic materials 0.000 claims description 3
- 230000005484 gravity Effects 0.000 claims description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 3
- 229910052721 tungsten Inorganic materials 0.000 claims description 3
- 239000010937 tungsten Substances 0.000 claims description 3
- 238000005498 polishing Methods 0.000 claims description 2
- 230000001133 acceleration Effects 0.000 description 4
- 238000013461 design Methods 0.000 description 4
- 238000003466 welding Methods 0.000 description 4
- 238000012544 monitoring process Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000004806 packaging method and process Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000003750 conditioning effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
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CN114918111A (zh) * | 2022-06-16 | 2022-08-19 | 芜湖全程智能科技有限公司 | 一种传感器弹性体加工方法 |
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JPH1194707A (ja) * | 1997-09-18 | 1999-04-09 | Sumitomo Electric Ind Ltd | 振動・力検出回路 |
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CN108534942A (zh) * | 2018-03-28 | 2018-09-14 | 西南交通大学 | 一种微压阻式传感器振动与温度干扰补偿模型及系统 |
CN110068418A (zh) * | 2019-03-21 | 2019-07-30 | 慧石(上海)测控科技有限公司 | 一种可在振动环境中工作的压力及加速度多功能传感器 |
CN110411630A (zh) * | 2019-08-02 | 2019-11-05 | 西安微电子技术研究所 | 一种振动筒压力传感器及其特性补偿方法 |
CN111521306A (zh) * | 2020-05-12 | 2020-08-11 | 深圳芯易德科技有限公司 | 集成震动检测的压力传感器及衡器 |
CN211783642U (zh) * | 2020-04-28 | 2020-10-27 | 合肥科迈捷智能传感技术有限公司 | 一种基于mems压力传感器的差压流量计 |
CN212110411U (zh) * | 2020-05-12 | 2020-12-08 | 深圳芯易德科技有限公司 | 集成震动检测的压力传感器及衡器 |
CN112268610A (zh) * | 2020-10-17 | 2021-01-26 | 徐恩成 | 一种隧道监测用振动传感器的数据修正方法 |
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2021
- 2021-11-11 CN CN202111334231.2A patent/CN114323364B/zh active Active
Patent Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
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EP0902267A2 (de) * | 1997-09-15 | 1999-03-17 | K.K. Holding Ag | Beschleunigungskompensierter Druckaufnehmer |
JPH1194707A (ja) * | 1997-09-18 | 1999-04-09 | Sumitomo Electric Ind Ltd | 振動・力検出回路 |
WO2005052534A1 (ja) * | 2003-11-27 | 2005-06-09 | Kyocera Corporation | 圧力センサ装置 |
JP2007286013A (ja) * | 2006-04-20 | 2007-11-01 | National Institute Of Advanced Industrial & Technology | 外乱補償機能付き圧力センサ |
CN106197807A (zh) * | 2016-08-15 | 2016-12-07 | 北京航空航天大学 | 一种用于动态力的测量方法 |
CN108534942A (zh) * | 2018-03-28 | 2018-09-14 | 西南交通大学 | 一种微压阻式传感器振动与温度干扰补偿模型及系统 |
CN110068418A (zh) * | 2019-03-21 | 2019-07-30 | 慧石(上海)测控科技有限公司 | 一种可在振动环境中工作的压力及加速度多功能传感器 |
CN110411630A (zh) * | 2019-08-02 | 2019-11-05 | 西安微电子技术研究所 | 一种振动筒压力传感器及其特性补偿方法 |
CN211783642U (zh) * | 2020-04-28 | 2020-10-27 | 合肥科迈捷智能传感技术有限公司 | 一种基于mems压力传感器的差压流量计 |
CN111521306A (zh) * | 2020-05-12 | 2020-08-11 | 深圳芯易德科技有限公司 | 集成震动检测的压力传感器及衡器 |
CN212110411U (zh) * | 2020-05-12 | 2020-12-08 | 深圳芯易德科技有限公司 | 集成震动检测的压力传感器及衡器 |
CN112268610A (zh) * | 2020-10-17 | 2021-01-26 | 徐恩成 | 一种隧道监测用振动传感器的数据修正方法 |
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