CN114295075A - Device and method for measuring integral three-dimensional contour of inner surface of concave workpiece - Google Patents
Device and method for measuring integral three-dimensional contour of inner surface of concave workpiece Download PDFInfo
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Abstract
The invention discloses a device and a method for measuring the integral three-dimensional contour of the inner surface of a concave workpiece, wherein the device comprises the following steps: the light generation module is used for simultaneously generating annular light and collimated light, the transmission direction of the annular light is perpendicular to the central symmetry axis of the sample to be measured, and the transmission direction of the collimated light is parallel to the central symmetry axis of the sample to be measured; a first reflected light detection module for receiving the first reflected light and generating a first object image; a second reflected light detection module for receiving the second reflected light and generating a second image, and a control processing module for acquiring the side profile of the recessed space according to the first reflected light set and the inner bottom profile according to the second reflected light set. The invention aims to provide a device and a method for measuring the integral three-dimensional contour of the inner surface of a concave workpiece, which effectively solve the problems of insufficient angle adaptability of various original single probes, complex system structure and the like.
Description
Technical Field
The invention relates to the technical field of profile measurement, in particular to a device and a method for measuring the integral three-dimensional profile of the inner surface of a concave workpiece.
Background
With the continuous progress of the precision machining technology, the surface machining quality of sample pieces in various shapes is continuously improved, and higher requirements are also put forward on the surface contour detection technology. Profile measurement methods can be classified into two broad categories, contact and non-contact. Among them, non-contact measurement is favored because of the non-destructive property of the surface of the sample to be measured, and includes interferometry, laser triangulation, confocal methods, and the like. The interference method has extremely high measurement precision, but the system structure is complex, and has very high requirements on environmental stability; confocal method and laser triangulation method gauge head compact structure, however because angle adaptability problem, need a plurality of gauge heads and complicated mechanical motion structure cooperation scanning to accomplish when measuring the interior profile of concave type work piece, and measuring efficiency is lower.
In summary, it is difficult to realize simple overall measurement of the inner profile of a concave workpiece due to problems of spatial interference, adaptability of the angle of a measuring head and the like.
Disclosure of Invention
The invention aims to provide a device and a method for measuring the integral three-dimensional contour of the inner surface of a concave workpiece, which effectively solve the problems of insufficient angle adaptability of various original single probes, complex system structure and the like.
The invention is realized by the following technical scheme:
a first aspect of an embodiment of the present application provides an apparatus for measuring an entire three-dimensional contour of an inner surface of a concave workpiece, including:
the light generation module is used for simultaneously generating annular light and collimated light, the transmission direction of the annular light is perpendicular to the symmetrical central axis of the sample to be measured, and the transmission direction of the collimated light is parallel to the symmetrical central axis of the sample to be measured;
the first reflected light detection module is used for receiving the first reflected light and generating a first object image; the first reflected light is the reflected light generated by the annular light at a first contact position, and the first contact position is the contact position of the annular light and the side surface of the concave space of the sample to be measured;
the second reflected light detection module is used for receiving the second reflected light and generating a second image; the second reflected light is the reflected light generated by the collimated light at a second contact position, and the second contact position is the contact position of the collimated light and the inner bottom surface of the sample to be measured;
the control processing module is used for acquiring the profile of the side surface of the concave space according to a first reflected light set and acquiring the profile of the inner bottom surface according to a second reflected light set;
the first set of reflected light is a set of the first reflected light and the second set of reflected light is a set of the second reflected light.
Compared with the existing measuring method, the profile measuring device provided by the embodiment of the application integrates the side profile measurement and the bottom profile measurement of the concave workpiece, and can measure the side profile of the concave workpiece and the bottom profile of the concave workpiece without replacing a test light path or test equipment in the test process, so that the test efficiency is greatly improved; in addition, because the profile measuring device provided by the embodiment of the application can simultaneously generate the collimated light for measuring the profile of the bottom surface and the annular light for measuring the profile of the side surface, a plurality of measuring heads are not required to be matched with a complex mechanical motion structure, the transmission direction of the annular light is perpendicular to the optical axis, and the annular light is not required to be matched with a centering structure, so that the complexity of the measuring device is simplified, and the measuring cost is reduced.
Preferably, the light generating module comprises a light generator, a first optical system, a circular truncated prism and a positive lens which are coaxially arranged in sequence;
the diameter of the top surface of the circular truncated cone prism is smaller than the diameter of an emergent beam of the first optical system, the diameter of the bottom surface of the circular truncated cone prism is larger than the diameter of the emergent beam, an included angle between the side surface of the circular truncated cone prism and the bottom surface of the circular truncated cone prism is 45 degrees, and the top surface of the circular truncated cone prism is close to the side of the first optical system.
Preferably, the first optical system comprises a negative lens, a positive lens and a homogenizing plate which are coaxial and are arranged in sequence along the transmission direction of the optical path.
Preferably, the light generator is a supercontinuum laser.
Preferably, the first reflected light detection module includes an imaging lens and a first image sensor which are coaxial and are sequentially arranged along the optical path transmission direction.
Preferably, the second reflected light detection module includes an imaging lens and a second image sensor coaxially and sequentially disposed along the optical path transmission direction.
Preferably, the optical detection device further comprises a displacement module, and the first reflected light detection module, the light generation module and the second reflected light detection module are arranged on the displacement module along the optical path transmission direction.
Preferably, the displacement module comprises a support platform and a drive mechanism;
the first reflected light detection module, the light generation module and the second reflected light detection module are arranged on the supporting platform along the light path transmission direction; the driving end of the driving mechanism is fixedly connected with the supporting platform, and the signal input end of the driving mechanism is electrically connected with the control processing module.
Preferably, the supporting platform is a cylindrical supporting platform, and the light-emitting side of the supporting platform is transparent.
A second aspect of the embodiments of the present application provides a method for measuring an entire three-dimensional contour of an inner surface of a concave workpiece, which is applied to the apparatus for measuring an entire three-dimensional contour of an inner surface of a concave workpiece as described above, and includes the following steps:
acquiring a first reflected light set;
acquiring a second set of reflected light;
obtaining the profile of the side surface of the concave space according to the first reflected light set and an annular light cutting method;
and acquiring the outline of the inner bottom surface according to the second reflection light set and a laser triangulation distance measuring method.
Compared with the prior art, the invention has the following advantages and beneficial effects:
1. the problems of insufficient angle adaptability, complex system structure and the like of various original single probes are effectively solved, the side surface profile and the bottom surface profile can be conveniently obtained, the blank of the prior art in the application field is filled, and the high-efficiency measurement of the integral three-dimensional profile of the inner surface of the inward concave workpiece is realized;
2. the propagation direction of the annular light is vertical to the optical axis, so that the problem that the measurement is inaccurate due to the self off-axis error of the annular light caused by the non-coaxiality between the optical axis and the central axis of the sample to be measured when the annular light is not vertical to the optical axis is avoided;
3. the supercontinuum laser is used as a seed light source, so that the phenomenon that speckle (light beam is very uneven) is generated on an annular light beam due to interference of a reflected light beam is avoided, and the measuring error caused by inaccurate positioning of a contour line during calculation is avoided.
Drawings
The accompanying drawings, which are included to provide a further understanding of the embodiments of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the principles of the invention. In the drawings:
FIG. 1 is a schematic diagram of the optical path structure of the profile measuring apparatus according to the present invention;
FIG. 2 is a schematic diagram of a light path structure of a light-generating module according to the present invention;
FIG. 3 is a schematic diagram of the outline of the contact position of the annular beam with the side surface of the concave space according to the present invention;
FIG. 4 is a schematic diagram of an optical path structure of the lens assembly of the present invention;
reference numbers and corresponding part names in the drawings:
1. a light generator; 2. a first optical system; 3. a truncated cone prism; 4. a positive lens; 5. an imaging lens; 6. a second image sensor; 7. a first reflected light detection module; 8. a support platform; 9. a drive mechanism; 10. a control processing module; 11. and (5) measuring the sample.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail below with reference to examples and accompanying drawings, and the exemplary embodiments and descriptions thereof are only used for explaining the present invention and are not meant to limit the present invention.
Example 1
An apparatus for measuring the overall three-dimensional profile of the inner surface of a concave workpiece, as shown in fig. 1, comprises:
and the light generation module is used for simultaneously generating annular light and collimated light, the transmission direction of the annular light is perpendicular to the central symmetry axis of the sample 11 to be measured, and the transmission direction of the collimated light is parallel to the central symmetry axis of the sample 11 to be measured. Through the arrangement, the central axis of the light generation module (which is also the center of the annular light) and the central axis of symmetry of the sample 11 to be measured can be only parallel but not coaxial, so that the circular error (from a perfect circle to an ellipse) caused by the off-axis of the annular light can not be caused, and the problem that a coaxial adjusting mechanism needs to be added to a system when the annular light is obliquely incident (when the included angle between the transmission direction of the annular light and the central axis of symmetry of the sample 11 to be measured is not 90 degrees) is avoided.
A first reflected light detection module 7 for receiving the first reflected light and generating a first object image; the first reflected light is the reflected light generated by the annular light at the first contact position, and the first contact position is the contact position of the annular light and the side surface of the concave space of the tested sample 11;
the second reflected light detection module is used for receiving the second reflected light and generating a second image; the second reflected light is the reflected light generated by the collimated light at a second contact position, and the second contact position is the contact position of the collimated light and the inner bottom surface of the sample 11 to be measured;
the control processing module 10 is used for acquiring the profile of the side surface of the concave space according to the first reflected light set and acquiring the profile of the inner bottom surface according to the second reflected light set;
the first reflected light set is a set of first reflected light, the second reflected light set is a set of second reflected light, and preferably, the same data is prevented from being processed repeatedly, and any one of the first reflected light sets comes from different first contact positions; any one of the concentrated second reflected lights comes from a different second contact position.
Specifically, the light generation module in this embodiment is as shown in fig. 2, and includes a supercontinuum laser, a first optical system 2, a circular truncated prism 3, and a positive lens 4, which are coaxially arranged in sequence, and a top surface of the circular truncated prism 3 is close to the first optical system 2 side;
the light emitted by the supercontinuum laser is broad-spectrum Gaussian light, the broad spectrum can avoid reflected light from generating speckles, and after the Gaussian light passes through the circular truncated cone prism, the light beam distribution of the light beam is uneven no matter the circular ring light is formed by reflection or the collimated light is formed by transmission, and the contour line is difficult to accurately identify and extract. Specifically, the first optical system 2 in the present embodiment includes a lens group and a homogenizing plate for converting light intensity in gaussian distribution into uniform distribution, and the lens group and the homogenizing plate are arranged in order along the optical path transmission direction. In order to shorten the optical path structure and reduce the size of the measurement apparatus, the lens group in this embodiment adopts a galileo beam expanding structure, as shown in fig. 4, which includes a negative lens and a positive lens, and the distance between the negative lens and the positive lens is the difference between the focal lengths of the negative lens and the positive lens.
Meanwhile, in order to reduce the size of the profile measuring device, in this embodiment, the circular truncated cone prism 3 is used to simultaneously generate annular light and collimated light, specifically, the diameter of the top surface of the circular truncated cone prism 3 in this embodiment is smaller than the diameter of the outgoing beam of the first optical system 2, the diameter of the bottom surface of the circular truncated cone prism 3 is larger than the diameter of the outgoing beam, and the included angle between the side surface of the circular truncated cone prism 3 and the bottom surface of the circular truncated cone prism 3 is 45 °. Preferably, in order to enable more light beams to be reflected or transmitted, the side surface of the circular truncated cone prism 3 is uniformly plated with a high-reflection film layer, and the top surface of the circular truncated cone prism 3 is uniformly plated with a high-transmission film layer.
When the super-continuum spectrum laser works, the super-continuum spectrum laser emits Gaussian laser beams with round light spots, the Gaussian laser beams are expanded, collimated and homogenized by the first optical system 2 and then become collimated beams with increased beam diameters and uniformly distributed light intensity, wherein the part, with the diameter larger than the top surface of the circular truncated cone prism 3, of the collimated beams is transmitted to the side surface of the circular truncated cone prism 3, and annular beams are formed after being reflected by the side surface of the circular truncated cone prism 3 and transmitted to the side surface of the concave space; the part of the collimated light beam with the diameter smaller than the top surface of the circular truncated cone prism 3 passes through the top surface of the circular truncated cone prism 3, is emitted from the bottom surface of the circular truncated cone prism 3, and is focused on the inner bottom surface through the positive lens 4.
The first reflected light detection module 7 in this embodiment includes an imaging lens and a first image sensor that are coaxial and are sequentially arranged along the optical path transmission direction, and the first reflected light is imaged on the first image sensor through the imaging lens. The second reflected light detection module comprises an imaging lens 5 and a second image sensor 6 which are coaxial and are sequentially arranged along the transmission direction of the light path, and the second reflected light is imaged on the second image sensor 6 through the imaging lens 5
Since the area array CCD can intuitively acquire two-dimensional image information, both the first image sensor and the second image sensor 6 in this embodiment are configured as area array CCDs.
The control processing module 10 in this embodiment is configured as a computer, and acquires the profile of the side surface of the concave space according to the first reflected light set and the annular light cutting method; and acquiring the outline of the inner bottom surface according to the second reflected light set and the laser triangulation distance measuring method.
When the device works, after the annular light beam enters the side face of the concave space, the annular light beam is scattered at the position (the contact position of the annular light beam and the side face of the concave space), the reflected light beam is received by the first reflected light detection module 7 and forms an image modulated by the section shape of the tested sample, and the image is collected and processed by a computer, so that the profile of the section (the contact position of the annular light beam and the side face of the concave space) is obtained.
Specifically, after the image collected by the computer passes through the mask (i.e. taking an effective calculation area on an image, such as an annular image, an annular effective area is taken), along the radial direction of each angle on the image, the position of the middle point of the light intensity in the direction (the light intensity distribution of the image is nearly uniform) is taken as the contour point of the angle, and the contour line of the section is obtained by traversing each angle, as shown in fig. 3. Moving the first reflected light detection module 7, the light generation module and the second reflected light detection module along the central axis direction of the sample 11 to be measured so as to continuously obtain each cross-sectional profile; and finally, splicing the profiles of all the sections at intervals according to the movement step length so as to obtain the profile of the side surface of the measured sample. However, at this time, the contour is in an image space, the length unit is a pixel, and a corresponding relationship between the image space and an actual space needs to be established, so in a specific implementation process, a standard ring gauge is adopted to calibrate an imaging system, since the actual diameter of the standard ring gauge is known, the diameter (unit is a pixel) of the ring gauge is obtained by measuring the standard ring gauge through the system according to the calculation of the above process, and the actual length represented by each pixel is obtained by comparing the diameter with the actual diameter of the standard ring gauge.
The collimated light beam is focused on the inner bottom surface, the light spot is subjected to diffuse reflection and scattering at the position (the contact position of the collimated light beam and the inner bottom surface), the light beam subjected to diffuse reflection and scattering is received and imaged by the second reflected light detection module, and the image is collected and processed by a computer, so that the profile of the point (the contact position of the collimated light beam and the sample 11 to be measured) is obtained.
Specifically, the principle of the laser triangulation method is described below:
the laser triangulation method mainly includes that a laser beam irradiates a target to be measured (an inner bottom surface in the embodiment) at a certain incident angle, the laser beam is reflected and scattered on the surface of the target, a lens (an imaging lens 5 in the embodiment) is used for converging and imaging the reflected laser beam at another angle, and light spots are imaged on a CCD position sensor (a second image sensor 6 in the embodiment). When the measured object moves, the light spot on the position sensor moves, and the displacement size of the light spot corresponds to the moving distance of the measured object, so that the distance value between the measured object and the base line can be calculated according to the light spot displacement distance through algorithm design. Since the incident light and the reflected light form a triangle, and the geometric trigonometric theory is applied to the calculation of the displacement of the light spot, the measurement method is called a laser triangulation method.
Therefore, in the present embodiment, the first reflected light detection module 7, the light generation module, and the second reflected light detection module are moved by equal steps to scan the inner bottom surface of the sample 11, so that the inner bottom surface profile of the sample 11 can be obtained.
Furthermore, in order to make the precision of the profile measured by the measuring device higher, and also in order to realize the full automation of the measuring process, the displacement module is further arranged in the embodiment, the first reflected light detection module 7, the light generation module and the second reflected light detection module are driven to move through the displacement module, and compared with the manual movement of the first reflected light detection module 7, the light generation module and the second reflected light detection module, the measuring light path does not need to be readjusted, meanwhile, the error caused by the change of the light path is avoided, and the measuring accuracy is improved while the measuring efficiency is improved.
Specifically, the displacement module in the present embodiment includes a support platform 8 and a drive mechanism 9; the first reflected light detection module 7, the light generation module and the second reflected light detection module are arranged on the supporting platform 8 along the light path transmission direction; the driving end of the driving mechanism 9 is fixedly connected with the supporting platform 8, and the signal input end of the driving mechanism 9 is electrically connected with the computer; the driving mechanism 9 is controlled by the computer to move, so that the supporting platform 8 is driven to displace, and the first reflected light detection module 7, the light generation module and the second reflected light detection module are driven to move, wherein the moving direction of the supporting platform 8 can be any direction.
Further, in order to avoid the foreign object from touching the measurement component of the profile measurement apparatus, which may cause damage, contamination, or change of the optical path of the measurement component, the support platform 8 in this embodiment is configured as a cylindrical support platform 8, and the light emitting side (the light emitting side refers to the side close to the inner bottom surface of the sample 11 to be measured) of the support platform 8 is transparent, thereby avoiding the above situation.
Example 2
The embodiment provides a method for measuring the integral three-dimensional contour of the inner surface of a concave workpiece, which is applied to the device for measuring the integral three-dimensional contour of the inner surface of the concave workpiece provided by the embodiment 1, and comprises the following steps:
acquiring a first reflected light set;
acquiring a second set of reflected light;
obtaining the profile of the side surface of the concave space according to the first reflected light set and the annular light cutting method;
and acquiring the outline of the inner bottom surface according to the second reflected light set and the laser triangulation distance measuring method.
The above-mentioned embodiments are intended to illustrate the objects, technical solutions and advantages of the present invention in further detail, and it should be understood that the above-mentioned embodiments are merely exemplary embodiments of the present invention, and are not intended to limit the scope of the present invention, and any modifications, equivalent substitutions, improvements and the like made within the spirit and principle of the present invention should be included in the scope of the present invention.
Claims (10)
1. An apparatus for measuring the overall three-dimensional profile of the inner surface of a concave workpiece, comprising:
the light generation module is used for simultaneously generating annular light and collimated light, the transmission direction of the annular light is perpendicular to the symmetrical central axis of the sample to be measured (11), and the transmission direction of the collimated light is parallel to the symmetrical central axis of the sample to be measured (11);
a first reflected light detection module (7) for receiving the first reflected light and generating a first object image; the first reflected light is the reflected light generated by the annular light at a first contact position, and the first contact position is the contact position of the annular light and the side surface of the concave space of the sample to be measured (11);
the second reflected light detection module is used for receiving the second reflected light and generating a second image; the second reflected light is the reflected light generated by the collimated light at a second contact position, and the second contact position is the contact position of the collimated light and the inner bottom surface of the sample to be measured (11);
a control processing module (10) for obtaining a profile of a side surface of the recessed space according to a first set of reflected light and a profile of the inner bottom surface according to a second set of reflected light; the first set of reflected light is a set of the first reflected light and the second set of reflected light is a set of the second reflected light.
2. The apparatus for measuring the integral three-dimensional contour of the inner surface of a concave workpiece according to claim 1, wherein the light generating module comprises a light generator (1), a first optical system (2), a truncated prism (3) and a positive lens (4) which are coaxially arranged in sequence;
the diameter of the top surface of the circular truncated cone prism (3) is smaller than the diameter of an emergent beam of the first optical system (2), the diameter of the bottom surface of the circular truncated cone prism (3) is larger than the diameter of the emergent beam, an included angle between the side surface of the circular truncated cone prism (3) and the bottom surface of the circular truncated cone prism (3) is 45 degrees, and the top surface of the circular truncated cone prism (3) is close to the side of the first optical system (2).
3. The apparatus for measuring the entire three-dimensional contour of the inner surface of a female-type workpiece as defined in claim 2, wherein said first optical system (2) comprises a negative lens, a positive lens (4) and a homogenizing plate coaxially arranged in this order along the direction of optical path transmission.
4. The apparatus for measuring the entire three-dimensional contour of the inner surface of a concave workpiece as defined in claim 2, wherein said light generator (1) is a supercontinuum laser.
5. The apparatus for measuring the overall three-dimensional profile of the inner surface of a concave workpiece as defined in claim 1, wherein the first reflected light detection module (7) comprises an imaging lens and a first image sensor which are coaxial and arranged in sequence along the transmission direction of the optical path.
6. The apparatus for measuring the entire three-dimensional contour of the inner surface of a concave workpiece as defined in claim 1, wherein said second reflected light detecting module comprises an imaging lens (5) and a second image sensor (6) coaxially arranged in this order along the direction of optical path transmission.
7. The apparatus for measuring the entire three-dimensional contour of the inner surface of a concave workpiece according to any one of claims 1-6, further comprising a displacement module, wherein the first reflected light detection module (7), the light generation module and the second reflected light detection module are disposed on the displacement module along the optical path transmission direction.
8. The apparatus for measuring the overall three-dimensional contour of the inner surface of a female-type workpiece as defined in claim 7, wherein said displacement module comprises a support platform (8) and a driving mechanism (9);
the first reflected light detection module (7), the light generation module and the second reflected light detection module are arranged on the supporting platform (8) along the light path transmission direction; the driving end of the driving mechanism (9) is fixedly connected with the supporting platform (8), and the signal input end of the driving mechanism (9) is electrically connected with the control processing module (10).
9. The internal surface overall three-dimensional profile measuring device of a concave workpiece as claimed in claim 8, wherein the supporting platform (8) is a cylindrical supporting platform (8), and the light-emitting side of the supporting platform (8) is transparent.
10. A method for measuring an entire three-dimensional contour of an inner surface of a female-type workpiece, which is applied to the apparatus for measuring an entire three-dimensional contour of an inner surface of a female-type workpiece according to any one of claims 1 to 9, comprising the steps of:
acquiring a first reflected light set;
acquiring a second set of reflected light;
obtaining the profile of the side surface of the concave space according to the first reflected light set and an annular light cutting method;
and acquiring the outline of the inner bottom surface according to the second reflection light set and a laser triangulation distance measuring method.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN117268287A (en) * | 2023-11-21 | 2023-12-22 | 中国工程物理研究院激光聚变研究中心 | Contour measuring device and method for internal structure of workpiece |
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