CN114162618B

CN114162618B - Modularized automatic loading and unloading device for semiconductor power device

Info

Publication number: CN114162618B
Application number: CN202111555253.1A
Authority: CN
Inventors: 张军辉; 宋志威; 张文亮; 朱阳军
Original assignee: Shandong Yuexin Electronic Technology Co ltd
Current assignee: Shandong Yuexin Electronic Technology Co ltd
Priority date: 2021-12-17
Filing date: 2021-12-17
Publication date: 2024-05-03
Anticipated expiration: 2041-12-17
Also published as: CN114162618A

Abstract

The invention relates to a modularized automatic feeding and discharging device for a semiconductor power device. The device comprises a frame body and a carrying disc conveying mechanism arranged on the frame body, wherein a carrying disc group feeding area, a laminated carrying disc separating area, a device to be tested picking area and an empty tray picking area are sequentially arranged in the feeding and discharging conveying direction of the carrying disc conveying mechanism; the device to be tested is arranged in the device to be tested picking area, and the device to be tested is arranged in the device to be tested picking area; the automatic feeding and discharging device can effectively realize automatic feeding and discharging, improves production efficiency, saves labor cost, and is high in automation degree, safe and reliable.

Description

Modularized automatic loading and unloading device for semiconductor power device

Technical Field

The invention relates to an automatic feeding and discharging device, in particular to a modularized automatic feeding and discharging device for a semiconductor power device.

Background

In recent years, as the capacity of semiconductor package testing increases, the need for automated feeding and discharging handling (handling) by various packaging factories also increases. At present, in the automatic feeding device on the market, there is handling inefficiency, is difficult to satisfy the demand of automatic feeding and discharging in the actual encapsulation test.

Disclosure of Invention

The invention aims to overcome the defects in the prior art and provides a modularized automatic feeding and discharging device for a semiconductor power device, which can effectively realize automatic feeding and discharging, improve the production efficiency, save the labor cost, and has high degree of automation, safety and reliability.

According to the technical scheme provided by the invention, the modularized automatic feeding and discharging device for the semiconductor power device comprises a frame body and a carrier disc conveying mechanism arranged on the frame body, wherein a carrier disc group feeding area, a laminated carrier disc separation area, a device pickup area to be tested and an empty tray pickup area are sequentially arranged in the feeding and discharging conveying direction of the carrier disc conveying mechanism;

the device to be tested is arranged in the device to be tested picking area, and the device to be tested is arranged in the device to be tested picking area;

After the laminated carrying disc group is arranged in the carrying disc group feeding area, the laminated carrying disc group in the carrying disc group feeding area can be conveyed to the laminated carrying disc separating area through the carrying disc conveying mechanism; the device carrier plates which are distributed in a laminated way in the laminated carrier plate group can be separated from bottom to top one by one through the laminated carrier plate separating mechanism; the device carrier plates separated by the laminated carrier plate separating mechanism are conveyed to a device pickup area to be detected through a carrier plate conveying mechanism, and devices to be detected on the device carrier plates in the device pickup area to be detected can be picked up one by one and conveyed to a required position through the device pickup mechanism to be detected; after the device to be tested is picked up and conveyed on the corresponding device to be tested on the device carrying disc in the device to be tested pickup area through the device to be tested pickup mechanism, the device carrying disc in the device to be tested pickup area is conveyed to the empty tray pickup area through the carrying disc conveying mechanism; the device carrier in the empty tray pickup area can be picked up and conveyed to a desired position by the empty tray pickup mechanism so as to separate the device carrier in the empty tray pickup area from the carrier conveying mechanism.

And after the laminated carrier disc group is detected by the feeding area carrier disc detection sensor, the laminated carrier disc group can be stabilized in the carrier disc group feeding area through the feeding blocking mechanism.

The laminated carrier disc separating mechanism comprises a laminated separating and positioning frame which can be matched with the laminated carrier disc group, a carrier disc primary lifting mechanism arranged in the laminated separating and positioning frame, and carrier disc clamping and lifting mechanisms arranged on two sides of the carrier disc conveying mechanism;

After a laminated carrying disc group in a carrying disc group feeding area is conveyed into a laminated separating and positioning frame by a carrying disc conveying mechanism, a carrying disc primary jacking mechanism is contacted with a device carrying disc at the lowest layer in the laminated carrying disc group and can jack the laminated carrying disc group in a direction away from the carrying disc conveying mechanism, and all device carrying discs above the device carrying disc at the lowest layer in the laminated carrying disc group can be clamped and supported by the carrying disc primary jacking mechanism;

After the corresponding device carrier trays are clamped and supported and jacked by the carrier tray clamping and jacking mechanism, the device carrier trays contacted with the carrier tray primary jacking mechanism are dropped onto the carrier tray conveying mechanism by utilizing the carrier tray primary jacking mechanism so as to separate the device carrier trays in the laminated carrier tray group one by one; the device carrier trays which are separated and contacted with the carrier tray conveying mechanism are conveyed to a device pickup area to be detected by utilizing the carrier tray conveying mechanism;

After the separated device carrier trays are conveyed to a device pickup area to be detected through the carrier tray conveying mechanism, all the device carrier trays which are clamped and supported and jacked can fall to be in contact with the carrier tray primary jacking mechanism through the carrier tray clamping jacking mechanism.

A carrier tray full layer detection sensor and a carrier tray overrun detection sensor are arranged on the laminated separation positioning frame;

The carrier plate clamping and jacking mechanism comprises a separation clamping driving connecting mechanism and a carrier plate secondary jacking mechanism which is adaptively connected with the separation clamping driving connecting mechanism, and the carrier plate secondary jacking mechanism can be driven to move through the separation clamping driving connecting mechanism, so that the carrier plate secondary jacking mechanism is close to a laminated carrier plate group in the laminated separation positioning frame or far away from the laminated carrier plate group in the laminated separation positioning frame;

after the secondary jacking mechanism of the carrier disc is driven to approach the laminated carrier disc group in the laminated separating and positioning frame by the separating and clamping driving connecting mechanism, the carrier disc corresponding to the device carrier disc in the laminated separating and positioning frame can be clamped and supported and jacked by the secondary jacking mechanism of the carrier disc, and all the device carrier discs jacked by the clamped and supported and jacked device carrier disc can fall to be in contact with the primary jacking mechanism of the carrier disc.

The device carrying disc comprises a carrying disc plate and device placing areas which are distributed on the carrying disc plate in an array manner, and devices to be tested can be assembled on the carrying disc plate through the device placing areas;

A plurality of tray plate laminating positioning blocks are arranged on the front surface of the tray plate, and a plurality of tray plate laminating connecting positioning columns are arranged on the back surface of the tray plate; when any two adjacent device carrying discs in the laminated carrying disc group are laminated, carrying disc layer laminating connecting positioning columns of the carrying disc layer laminating positioning blocks on the carrying disc plate positioned above can be respectively embedded into carrying disc laminating positioning holes of the carrying disc layer laminating positioning blocks positioned on the carrying disc plate positioned below, carrying disc plates of all device carrying discs in the laminated carrying disc group are mutually parallel, and carrying disc plates of the two adjacent device carrying discs are in clearance fit.

The device to be tested picking mechanism comprises a device picking carrier disc detection sensor for detecting a carrier disc plate, a device picking clamping mechanism for clamping a device to be tested in a device picking area to be tested and a device picking conveying mechanism for picking the device to be tested on the carrier disc plate;

after the device picking disc-carrying detection sensor detects the disc-carrying plate, the device picking clamping mechanism can clamp the disc-carrying plate positioned in the device picking area to be detected, and the device picking and conveying mechanism can be used for picking the devices to be detected on the disc-carrying plate one by one and conveying the devices to be detected to a required position.

The device picking and conveying mechanism comprises a picking device conveying frame, a device picking and conveying mechanism assembled on the picking device conveying frame and a device picking mechanical arm which is connected with the device picking and conveying mechanism in an adapting way;

The device picking mechanical arm comprises a device vacuum adsorption head matched with the device to be detected, a vacuum adsorption connecting mechanism connected with the device vacuum adsorption head in a matched mode, and an adsorption head motion driving mechanism used for driving the device vacuum adsorption head to move, wherein the device vacuum adsorption head can be driven to move to the positive correspondence of any device to be detected on the tray plate through the adsorption head motion driving mechanism, the vacuum adsorption connecting mechanism is matched with the device vacuum adsorption head so as to adsorb and pick up the device to be detected, which corresponds to the device vacuum adsorption head, on the tray plate from the tray plate, and the device vacuum adsorption head and the device to be detected, which is adsorbed by the device vacuum adsorption head, can be conveyed to a required position through the device picking rear conveying mechanism.

The empty tray pickup mechanism comprises an empty tray detection sensor for detecting a device carrier tray, a carrier tray plate clamping and lifting mechanism for clamping and lifting the device carrier tray on the carrier tray conveying mechanism, and an empty tray conveying mechanism which is connected with the carrier tray plate clamping and lifting mechanism in an adaptive manner;

the device carrying disc on the carrying disc conveying mechanism is clamped by the carrying disc plate clamping and pulling mechanism and separated from the carrying disc conveying mechanism after being lifted, and the device carrying disc clamped and pulled by the carrying disc plate clamping and pulling mechanism can be conveyed to a required position by the empty carrying disc conveying mechanism.

The carrying disc clamping and lifting mechanism comprises a clamping connecting plate, tray clamping blocks arranged at two ends of the clamping connecting plate, a tray clamping block driving mechanism for driving the tray clamping blocks to move, and a clamping connecting plate lifting mechanism which is connected with the clamping connecting plate in an adaptive manner;

When the tray clamping blocks at two ends of the connecting plate are clamped by the driving mechanism of the tray clamping blocks, the tray clamping blocks can be contacted with and clamped by the device carrying plates arranged between the tray clamping blocks, and the lifting of the connecting plate can be pulled by the lifting mechanism of the clamping connecting plate, so that the device carrying plates clamped by the tray clamping blocks can be separated from the carrying plate conveying mechanism.

The carrier plate conveying mechanism comprises a conveying frame, two conveying chains which are symmetrically distributed are arranged in the conveying frame, and a carrier plate conveying driving mechanism for driving the two conveying chains to synchronously rotate is further arranged on the conveying frame;

when the device carrying disc is conveyed, the carrying disc layer on the device carrying disc is stacked and connected with the positioning column to be in contact with the conveying chain in the conveying frame.

The invention has the advantages that: after the laminated carrying disc group is arranged in the carrying disc group feeding area, the laminated carrying disc group in the carrying disc group feeding area can be conveyed to the laminated carrying disc separating area through the carrying disc conveying mechanism; the device carrier plates which are distributed in a laminated way in the laminated carrier plate group can be separated from bottom to top one by one through the laminated carrier plate separating mechanism; the device carrying disc separated by the laminated carrying disc separating mechanism is conveyed to a device pickup area to be detected through a carrying disc conveying mechanism, and devices to be detected on the device carrying disc in the device pickup area to be detected can be picked up one by one and conveyed to a required position through the device pickup mechanism to be detected; after the device to be tested is picked up and conveyed on the corresponding device to be tested on the device carrying disc in the device to be tested pickup area through the device to be tested pickup mechanism, the device carrying disc in the device to be tested pickup area is conveyed to the empty tray pickup area through the carrying disc conveying mechanism; the device carrier in the empty tray picking area can be picked up and conveyed to a required position through the empty tray picking mechanism, so that the device carrier in the empty tray picking area is separated from the carrier conveying mechanism, automatic feeding and discharging can be effectively realized, the production efficiency is improved, the labor cost is saved, the automation degree is high, and the automatic feeding and discharging device is safe and reliable.

Drawings

FIG. 1 is a schematic diagram of the present invention.

Fig. 2 is a top view of the present invention.

Fig. 3 is a schematic view of the hidden device pick-up and transport mechanism of fig. 1 after an empty tray transport mechanism.

Fig. 4 is a schematic view of the transport of a single device carrier tray on a tray transport mechanism of the present invention.

Fig. 5 is a perspective view of the stack tray separating mechanism, device under test pick-up mechanism, and empty tray pick-up mechanism of the present invention mated with the tray transport mechanism.

Fig. 6 is a schematic view of the cooperation of the device carrier tray and the carrier tray conveying mechanism of the present invention.

Fig. 7 is a top view of fig. 5.

FIG. 8 is a perspective view of the stack tray separating mechanism of the present invention mated with a stack tray set.

FIG. 9 is a block diagram of the stack tray separating mechanism of the present invention mated with a stack tray set.

FIG. 10 is a perspective view of the primary lift mechanism for a carrier tray, the clamping lift mechanism for a carrier tray, and a stacked carrier tray assembly of the present invention.

Fig. 11 is a perspective view of the device pickup clamping mechanism of the present invention mated with a device carrier tray.

Fig. 12 is a schematic view of a device pick-up clamping mechanism of the present invention.

Fig. 13 is a schematic view of a device carrier tray of the present invention.

Fig. 14 is a perspective view of a stacked tray assembly of the present invention.

FIG. 15 is a schematic view of a stacked tray assembly of the present invention.

Fig. 16 is a schematic view of a device pick-up robot of the present invention.

Fig. 17 is a perspective view of a device pick-up robot of the present invention.

FIG. 18 is a schematic view of a tray clamp pull mechanism of the present invention.

Fig. 19 is a perspective view of the tray clamp pulling mechanism of the present invention.

Reference numerals illustrate: 1-case rack, 2-case door, 3-case door handle, 4-case wheel, 5-transport positioning case, 6-feed guide rail, 7-adjust positioning groove, 8-tray transport mechanism, 9-feed zone lever, 10-feed position detection sensor, 11-stack separation positioning frame, 12-tray overrun detection sensor, 13-device post pick-up transport mechanism, 14-empty tray transport mechanism, 15-device pick-up mechanical arm, 16-tray plate pick-up pull mechanism, 17-tray clamping jacking mechanism, 18-stack tray set, 19-device pick-up clamping mechanism, 20-transport drive motor, 21-transport carrier plate, 22-transport frame, 23-transport chain connecting shaft, 24-device pick-up clamping positioning column, 25-pick-up device transport frame, 26-device tray, 27-tray primary jacking cylinder, 28-feed blocking cylinder, 29-feed zone detection sensor, 30-feed zone detection sensor, 31-separation clamping drive cylinder, 32-tray secondary jacking cylinder, 34-support plate, 34-tray clamping block, 35-tray carrier block, 35-37, empty tray clamping block, 37-tray carrier block, 35-37, 37-tray carrier block, 35-up block, 37-up device top-up clamp block, 30-up device top-up sensor, 30-up device carrier plate, 35-up clamp device, 35-up device top-up clamp block, 37-up device top-up sensor, 37-up device, 30-up clamp device, 37-up clamp device, and 37-up sensor, 46-tray plate, 47-device to be tested, 48-tray plate laminated connection positioning column, 49-conveying chain, 50-separation bottom plate, 51-separation clamping driving connection block, 52-separation connection reinforcing rib, 53-tray plate laminated positioning block, 54-tray laminated positioning hole, 55-tray positioning hole, 56-tray positioning slot, 57-mechanical arm connecting plate, 58-mechanical arm electromagnetic valve, 59-mechanical arm transverse movement connecting body, 60-device vacuum adsorption head, 61-vacuum tube, 62-vacuum adsorption head guiding connection block, 63-adsorption head longitudinal driving connecting body, 64-vacuum generator, 65-clamping lifting cylinder, 66-clamping connecting plate, 67-tray clamping block, 68-lifting guide rod, 69-lifting guide sleeve, 70-tray clamping block driving mechanism, 71-lifting guide connecting plate, 72-lifting clamping connecting plate, 73-lifting clamping electromagnetic valve, 74-separation positioning side plate, 75-separation positioning side plate and 76-separation positioning side plate slot.

Detailed Description

The invention will be further described with reference to the following specific drawings and examples.

As shown in fig. 1,2,3, 4,5 and 7: in order to effectively realize automatic feeding and discharging, improve production efficiency and save labor cost, the invention comprises a frame body and a carrying disc conveying mechanism 8 arranged on the frame body, wherein a carrying disc group feeding area, a laminated carrying disc separating area, a device pickup area to be tested and an empty tray pickup area are sequentially arranged in the feeding and discharging conveying direction of the carrying disc conveying mechanism 8;

after the laminated carrier disc group 18 is placed in the carrier disc group feeding area, the laminated carrier disc group 18 in the carrier disc group feeding area can be conveyed to the laminated carrier disc separation area through the carrier disc conveying mechanism 8; the device carrier plates 26 in laminated distribution in the laminated carrier plate group 18 can be separated one by one from bottom to top by the laminated carrier plate separating mechanism; the device carrier trays 26 separated by the laminated carrier tray separating mechanism are conveyed to a device pickup area to be detected by a carrier tray conveying mechanism 8, and devices 47 to be detected on the device carrier trays 26 in the device pickup area to be detected can be picked up one by one and conveyed to a required position by the device pickup mechanism to be detected; after the device to be tested 47 on the device carrying disc 26 in the device to be tested picking area is picked and conveyed by the device to be tested picking mechanism, the carrying disc conveying mechanism 8 conveys the device carrying disc 26 in the device to be tested picking area to an empty tray picking area; the device trays 26 in the empty tray pickup area can be picked up and conveyed to a desired position by the empty tray pickup mechanism so as to separate the device trays 26 in the empty tray pickup area from the tray conveying mechanism 8.

Specifically, the tray conveying mechanism 8 is disposed on a frame body, the frame body supports the tray conveying mechanism 8, and the tray conveying mechanism 8 can be mounted at a desired position through the frame body. The feeding area of the tray group, the separating area of the stacked tray, the picking area of the device to be tested and the picking area of the empty tray are sequentially arranged or formed in the feeding and discharging conveying direction of the tray conveying mechanism 8, namely, when feeding and discharging are performed, the feeding area of the tray group, the separating area of the stacked tray, the picking area of the device to be tested and the picking area of the empty tray are sequentially subjected to conveying by the tray conveying mechanism 8. In order to realize automatic loading and unloading, a laminated tray separating mechanism corresponding to the laminated tray separating area, a device to be tested picking mechanism corresponding to the device to be tested picking area and an empty tray picking mechanism corresponding to the empty tray picking area are required to be arranged.

The stacked tray group 18 is formed by stacking a plurality of device trays 26 in the up-down direction, as shown in fig. 14 and 15, and of course, the plurality of device trays 26 in the stacked tray group 18 can be separated by a stacked tray separating mechanism. A plurality of devices to be tested 47 are arranged on each device carrying disc 26, the devices to be tested 47 can be picked up from the device carrying disc 26 through a device to be tested pick-up mechanism, the devices to be tested 47 can be current commonly used power semiconductor devices, the types of specific power semiconductor devices can be selected according to actual needs, and details are not repeated here.

The stacked pallet assembly 18 is placed on the pallet transfer mechanism 8 after being placed in the pallet assembly feed zone, after which the stacked pallet assembly 18 can be transported into the stacked pallet separation zone by the pallet transfer mechanism 8. After the stacked tray set 18 is conveyed to the stacked tray separation area, the device trays 26 in the stacked tray set 18 can be separated one by the stacked tray separation mechanism, and the separated device trays 26 can be conveyed to the device pickup area to be tested by the tray conveying mechanism 8, and the rest of the device trays 26 still remain in the stacked tray separation area and wait for the stacked tray separation mechanism to separate one by one. After separation and entering the device carrier tray 26 in the device to be tested pickup area, the devices to be tested 47 on the device carrier tray 26 are picked up and conveyed one by the device to be tested pickup mechanism, generally, the picked devices to be tested 47 are conveyed to the testing equipment for testing or measuring, and the specific testing or measuring process and the like are consistent with the prior art and are not repeated here.

The picking and conveying of the devices 47 to be tested on the device carrier tray 26 in the device to be tested picking area by the device to be tested picking mechanism is specifically that all the devices 47 to be tested on the device carrier tray 26 are picked and conveyed to a designated position, or that designated areas or designated number of devices 47 to be tested on the device carrier tray 26 are picked and conveyed to the designated position, and the specific situation is in order to meet the specific device to be tested picking requirement, and details are not repeated here.

The device carrier plate 26 after the completion of the picking and conveying can be conveyed to an empty tray picking area through the carrier plate conveying mechanism 8, the device carrier plate 26 can be separated from the carrier plate conveying mechanism 8 through the empty tray picking mechanism and conveyed to a required position, so that the recovery of the device carrier plate 26 is realized, and the subsequent conveying and recovery of the device carrier plate 26 can not be influenced after the recovery of the device carrier plate 26. The above-mentioned processes of separating the device carrier tray 26, picking up the device 47 to be tested on the device carrier tray 26, and recovering the device carrier tray 26 are circularly performed, so as to realize automatic loading and unloading, improve production efficiency and save labor cost.

As shown in fig. 1 and 3, an implementation situation of a frame body is shown, specifically, the frame body includes a box body frame 1, the box body frame 1 is a box body, a plurality of cabinet doors 2 are arranged on the box body frame 1, cabinet door handles 3 are arranged on the cabinet doors 2, a plurality of evenly distributed box body wheels 4 are arranged at the bottom of the box body frame 1, and movement of the whole box body frame 1 can be realized through the box body wheels 4. Of course, in the specific implementation, the box wheel 4 is generally in a lockable form, and the process of moving and locking by the box wheel 4 can be in a conventional form, which is well known to those skilled in the art, and will not be described herein.

The upper end face of the box body frame 1 is provided with a conveying positioning box 5, and the carrier plate conveying mechanism 8 is arranged in the conveying positioning box 5, but the part of the carrier plate conveying mechanism 8 protruding from the conveying positioning box 5 is utilized for conveying, and the length direction of the carrier plate conveying mechanism 8 is consistent with the length direction of the box body frame 1 and the conveying positioning box 5. The feeding area of the tray group, the separating area of the laminated tray, the picking area of the device to be tested and the picking area of the empty tray are arranged along the length direction of the tray conveying mechanism 8. A plurality of adjusting and positioning grooves 7 are also arranged on the conveying and positioning box 5, and the required position adjustment and the like can be realized through the adjusting and positioning grooves 7.

As shown in fig. 1, 2, 3, 4, 5 and 7, a feed blocking mechanism and a feed zone tray detection sensor 30 for detecting the stacked tray set 18 are provided in the tray set feed zone, and after the stacked tray set 18 is detected by the feed zone tray detection sensor 30, the stacked tray set 18 can be stabilized in the tray set feed zone by the feed blocking mechanism.

In the embodiment of the present invention, the feeding area of the tray set is generally located at the end of the tray conveying mechanism 8, a feeding guide rail 6 is disposed at one end of the tray conveying mechanism 8, the feeding guide rail 6 is adaptively connected with the tray conveying mechanism 8, and the process of entering the tray conveying mechanism 8 and the feeding area of the tray set into the stack tray set 18 can be guided by the feeding guide rail 6. In specific implementation, the stacked tray set 18 may be conveyed to the tray set feeding area of the tray conveying mechanism 8 by using a conventional conveying manner through the feeding guide rail 6, and the specific conveying manner may be selected according to actual needs, which is not described herein.

In order to stably stay the stacked tray set 18 in the feeding area of the tray set, a feeding blocking mechanism and a feeding tray detection sensor 30 are disposed in the feeding area of the tray set, and the feeding tray detection sensor 30 may be in the form of a conventional sensor, such as a photoelectric switch, a proximity switch, etc., so long as the detection of the stacked tray set 18 can be achieved, which is well known in the art, and will not be repeated herein. The feed blocking mechanism can block the stacked carrier plate group 18, specifically, the feed blocking mechanism comprises a feed blocking cylinder 28 and a feed blocking body 29 connected with a piston rod of the feed blocking cylinder 28, and the feed blocking body 29 can generally comprise a blocking rod and a blocking roller arranged on the blocking rod.

When the piston rod of the feed blocking cylinder 28 is extended, the feed blocking body 29 overlaps the stack pallet set 18, so that the blocking of the stack pallet set 18 is realized by the feed blocking body 29 and the blocking roller on the feed blocking body 29 contacting the stack pallet set 18, and when the piston rod of the feed blocking cylinder 28 is retracted, the feed blocking body 29 does not overlap the stack pallet set 18 at all, i.e. does not contact the stack pallet set 18, so that the normal conveying of the stack pallet set 18 can be realized by the pallet conveying mechanism 8. In particular, the feed blocking mechanism includes two symmetrically distributed feed blocking cylinders 28, and a feed carrier plate detection sensor 30 is located between the two feed blocking cylinders 28. Of course, the feeding blocking mechanism may also take other forms capable of cooperating with the stacked tray set 18, so long as blocking of the stacked tray set 18 can be achieved, and the feeding blocking mechanism can contact and block after blocking, which is not described herein.

In addition, a feeding area rod 9 and a feeding position detection sensor 10 positioned at the end part of the feeding area rod 9 are further arranged in the feeding area of the tray set, the feeding area rod 9 is symmetrically distributed on two sides of the tray conveying mechanism 8, the feeding area rod 9 is vertically distributed, the height of the feeding area rod 9 is generally larger than the height of the laminated tray set 18, the number of the device trays 26 in the laminated tray set 18 is a fixed value, the height detection of the laminated tray set 18 can be realized through the feeding position detection sensor 10, when the number of the device trays 26 in the laminated tray set 18 exceeds the fixed value, the detection of the feeding position detection sensor 10 can be realized, and at the moment, alarm information such as overrun of the laminated tray set 18 can be output according to the detection information of the feeding position detection sensor 10. When the number of the device carrier trays 26 in the stacked carrier tray group 18 is not more than the set fixed value, the corresponding detection information cannot be obtained by the feeding level detection sensor 10, and the fixed value of the number of the device carrier trays 26 in the stacked carrier tray group 18 can be selected according to actual needs, specifically determined by those skilled in the art, and will not be described herein.

Further, the stacked tray separating mechanism comprises a stacked separating and positioning frame 11 which can be matched with the stacked tray group 18, a tray primary jacking mechanism arranged in the stacked separating and positioning frame 11, and tray clamping and jacking mechanisms 17 arranged at two sides of the tray conveying mechanism 8;

after the carrier tray conveying mechanism 8 conveys the laminated carrier tray groups 18 in the carrier tray group feeding area into the laminated separating and positioning frame 11, the carrier tray primary lifting mechanism is in contact with the device carrier tray 26 at the lowest layer in the laminated carrier tray groups 18 and can lift the laminated carrier tray groups 18 in a direction away from the carrier tray conveying mechanism 8, and all the device carrier trays 26 above the device carrier tray 26 at the lowest layer in the laminated carrier tray groups 18 can be lifted by the carrier tray primary lifting mechanism through the carrier tray clamping and lifting mechanism 17;

After the corresponding device carrier plates 26 are clamped, supported and jacked by the carrier plate clamping and jacking mechanism 17, the device carrier plates 26 contacted with the carrier plate primary jacking mechanism are dropped onto the carrier plate conveying mechanism 8 by utilizing the carrier plate primary jacking mechanism so as to separate the device carrier plates 26 in the laminated carrier plate group 18 one by one; the device carrier tray 26 separated and contacted with the carrier tray conveying mechanism 8 is conveyed to a device pickup area to be tested by the carrier tray conveying mechanism 8,

After the separated device carrier tray 26 is conveyed to the device pickup area to be tested by the carrier tray conveying mechanism 8, all the device carrier trays 26 supported and jacked by the clamping and jacking mechanism 17 can be dropped to a contact state with the first-stage jacking mechanism of the carrier tray.

In the embodiment of the invention, the laminated separating and positioning frame 11 can be matched with the laminated carrying disc group 18, and the laminated separating and positioning frame 11 can guide and limit the separating process of the device carrying disc 26 in the laminated carrying disc group 18, so that the reliability of the separating process is ensured. The stack separating and positioning frame 11 is internally provided with a carrier disc primary lifting mechanism, and carrier disc clamping and lifting mechanisms 17 are symmetrically distributed on two sides of the carrier disc primary lifting mechanism.

After the tray conveying mechanism 8 conveys the stacked tray set 18 into the stacked separation positioning frame 11, the stacked tray set 18 positioned in the stacked separation positioning frame 11 is positioned right above the tray primary lifting mechanism, and the tray clamping and lifting mechanisms 17 are positioned at two sides of the stacked tray set 18. When the tray primary lifting mechanism does not lift the stacked tray set 18, the entire stacked tray set 18 is located on the tray conveying mechanism 8.

When the device carrier trays 26 in the stacked carrier tray assembly 18 need to be separated one by one, the carrier tray primary lifting mechanism contacts with the device carrier tray 26 at the lowest layer in the stacked carrier tray assembly 18, and after contacting with the device carrier tray 26 at the lowest layer, the carrier tray primary lifting mechanism can lift up the whole stacked carrier tray assembly 18, and at this time, the whole stacked carrier tray assembly 18 is separated from the carrier tray conveying mechanism 8. When the stacked tray set 18 is lifted up to a set position, the tray clamping and lifting mechanism 17 is utilized to lift up all the device trays 26 above the lowest device tray 26 in the stacked tray set 18, that is, the tray clamping and lifting mechanism 17 can lift up all the device trays 26 above the next lower layer, at this time, the device tray 26 at the lowest layer in the stacked tray set 18 and the rest of the device trays 26 in the stacked tray set 18 can be separated, and the lowest device tray 26 is supported by the tray primary lifting mechanism. As is clear from the above description, the lowest device carrier tray 26 is located above the carrier tray conveyance mechanism 8 at this time, and is not in contact with the carrier tray conveyance mechanism 8, that is, cannot be conveyed by the carrier tray conveyance mechanism 8.

In order to realize that the device carrier tray 26 at the lowest layer is conveyed to the device pickup area to be tested, the shrinkage of the carrier tray primary lifting mechanism is required to be utilized to drop the supported device carrier tray 26 at the lowest layer on the carrier tray conveying mechanism 8, and when the device carrier tray 26 at the lowest layer falls on the carrier tray conveying mechanism 8, the carrier tray primary lifting mechanism is required to continue to shrink, so that the carrier tray primary lifting mechanism is completely separated from the adjacent device carrier tray 26, and the effect of the carrier tray conveying mechanism 8 on conveying the device carrier tray 26 positioned above the carrier tray conveying mechanism 8 is avoided, so that the device carrier tray 26 can be conveyed to the device pickup area to be tested by utilizing the carrier tray conveying mechanism 8.

After the device carrier tray 26 is conveyed to the device pickup area to be tested, the device carrier tray 26 is matched with the carrier tray clamping and jacking mechanism 17 through the carrier tray primary jacking mechanism, so that all the device carrier trays 26 which are supported and jacked by the carrier tray clamping and jacking mechanism 17 can fall onto the carrier tray primary jacking mechanism again. When all the stacked device trays 26 drop onto the tray primary jack, the separation process of the device trays 26 is repeated, so that the device trays 26 nearest to the tray primary jack can be separated one by one and then conveyed to the device pickup area to be tested.

As shown in fig. 7, 8, 9 and 10, the first-stage lifting mechanism for a carrier plate includes a first-stage lifting cylinder 27 for a carrier plate and a first-stage lifting connecting plate 35 connected to a piston rod of the first-stage lifting cylinder 27 for a carrier plate, where the first-stage lifting cylinder 27 for a carrier plate can contact and support the carrier plate 26 for a device through the first-stage lifting connecting plate 35, and the first-stage lifting connecting plate 35 is specifically used to meet the contact with the carrier plate 26 for a device, and does not affect the device 47 to be tested on the carrier plate 26, which is well known to those skilled in the art and is not repeated herein. The expansion and contraction direction of the piston rod of the first-stage lifting cylinder 27 of the carrying disc is consistent with the stacking direction of the device carrying discs 26 in the stacked carrying disc group 18, namely, the device carrying discs 26 can be driven to lift or fall through the expansion and contraction of the piston rod of the first-stage lifting cylinder 27 of the carrying disc.

Further, a tray full layer detection sensor 34 and a tray overrun detection sensor 12 are arranged on the laminated separating and positioning frame 11;

The carrier plate clamping and jacking mechanism 17 comprises a separation clamping driving connecting mechanism and a carrier plate secondary jacking mechanism which is adaptively connected with the separation clamping driving connecting mechanism, and the carrier plate secondary jacking mechanism can be driven to move through the separation clamping driving connecting mechanism so as to enable the carrier plate secondary jacking mechanism to be close to the laminated carrier plate group 18 in the laminated separation positioning frame 11 or far from the laminated carrier plate group 18 in the laminated separation positioning frame 11;

After the secondary jacking mechanism of the carrier disc is driven to approach the laminated carrier disc group 18 in the laminated separating and positioning frame 11 by the separating and clamping driving connecting mechanism, the carrier disc 26 of the corresponding device in the laminated separating and positioning frame 11 can be clamped and supported and jacked by the secondary jacking mechanism of the carrier disc, and all the device carrier discs 26 jacked by the clamped and supported can be fallen to be in contact with the primary jacking mechanism of the carrier disc by the secondary jacking mechanism of the carrier disc.

As shown in fig. 1, 3, 5, 8, 9 and 10, the laminated separating and positioning frame 11 includes a separating bottom plate 50, separating and positioning side plates 74 symmetrically arranged on the separating bottom plate 50, separating and positioning side plate grooves 76 distributed along the length direction of the separating and positioning side plates 74 are arranged on the separating and positioning side plates 74, and the separating and positioning side plate grooves 76 penetrate through the separating and positioning side plates 74. And a separation positioning sealing plate 75 is arranged on one side of the two separation positioning side plates 74, the separation positioning side plates 75 are positioned on one side far away from the feeding area of the tray group, and one side of the two separation positioning side plates 74 adjacent to the feeding area of the tray group is in an open state, so that the stacked tray group 18 in the feeding area of the tray group can be allowed to enter the stacked separation positioning frame 11 under the conveying action of the tray conveying mechanism 8 by utilizing the opening.

The laminated tray set 18 is rectangular, the shape of the laminated separating and positioning frame 11 is adapted to the laminated tray set 18, the laminated tray set 18 can be lifted in the laminated separating and positioning frame 11, the separating and positioning side plate 75 can be used for preventing the laminated tray set 18 from being separated from the laminated separating and positioning frame 11 in the lifting process, and the width of the separating and positioning side plate groove 76 is smaller than the width of the laminated tray set 18. In addition, four spacer risers 36 are provided in the stack separator spacer 11, the four spacer risers 36 are fixed to the inner side walls of the separator positioning side plates 74, respectively, and the spacer risers 36 are also fixed to the tray conveyance mechanism 8. The strength of the connection between the separation positioning side plate 74 and the separation bottom plate 50 can be enhanced by the separation connection reinforcing ribs 52.

The tray full layer detection sensor 34 and the tray overrun detection sensor 12 can be in a conventional form, such as a photoelectric switch, and can be specifically selected according to requirements. The tray overrun detecting sensor 12 is located at the top end of the stack separating and positioning frame 11, and the tray full layer detecting sensor 34 and the tray overrun detecting sensor 12 can further detect the stack tray set 18 entering the stack tray separating area. The excessive number of device carrier trays 26 are easily separated from the outside of the laminated separating and positioning frame 11, and after detection judgment is performed by the carrier tray full layer detection sensor 34 and the carrier tray overrun detection sensor 12, the device carrier trays 26 exceeding the set number during separation can be avoided, and the reliability of the laminated carrier tray group 18 during separation can be improved.

As shown in fig. 8, 9 and 10, the separation clamp driving connection mechanism includes a separation clamp driving cylinder 31 provided on a separation bottom plate 50, a separation clamp driving connection block 51 is provided on a piston rod of the separation clamp driving cylinder 31, and the separation clamp driving connection block 51 can follow a piston rod of the separation clamp driving cylinder 31 to move synchronously. The carrier plate secondary jacking mechanism comprises a carrier plate secondary jacking cylinder 32 fixedly connected with the separation clamping driving connecting block 51 and a secondary jacking supporting plate 33 fixedly connected with a piston rod of the carrier plate secondary jacking cylinder 32.

A tray clamping and lifting mechanism 17 is respectively disposed on two sides of the stack separating and positioning frame 11, wherein the secondary lifting support plate 33 passes through the separating and positioning side plate slot 76 of the separating and positioning side plate 74 to be in contact with the corresponding device tray 26 in the stack tray group 18. In particular operation, the split clamping driving cylinder 31 can drive the horizontal movement of the pallet secondary lift cylinder 32 and the secondary lift support plate 33 so as to enable the pallet secondary lift cylinder 32 and the secondary lift support plate 33 to be far away from or near to the stack pallet group 18 in the stack split positioning frame 11.

When the tray secondary lifting cylinder 32 and the secondary lifting support plate 33 are close to the stacked tray set 18, and the secondary lifting support plate 33 is opposite to the corresponding device tray 26 in the stacked tray set 18, the corresponding device tray 26 can be clamped by using the secondary lifting support plate 33, and when the secondary lifting support plate 33 is driven to lift by the tray secondary lifting cylinder 32, the clamped device tray 26 and all the stacked device trays 26 above the clamped device tray 26 can be lifted, so that the clamping support lifting of the required device tray 26 can be realized.

When the carrier plate secondary jacking cylinder 32 drives the secondary jacking support plate 33 to drop close to the separation clamping driving cylinder 31, the device carrier plate 26 jacked by the clamping support can be dropped to be in contact with the carrier plate primary jacking mechanism only.

In specific implementation, the carrier plate second-stage jacking cylinder 32 and the second-stage jacking supporting plate 33 can directly clamp and jack the next-lower device carrier plate 26, so that the jacking process of the whole laminated carrier plate group 18 by the prior carrier plate first-stage jacking mechanism can be omitted. The process of separating and transporting the device carriers 26 one by one in the stacked carrier tray assembly 18 may be selected according to actual needs, and is well known in the art, and will not be described in detail herein.

As shown in fig. 13, 14 and 15, the device carrier 26 includes a carrier plate 46 and device placement areas distributed in an array on the carrier plate 46, through which devices 47 to be tested can be mounted on the carrier plate 46;

A plurality of tray plate stacking positioning blocks 53 are arranged on the front surface of the tray plate 46, and a plurality of tray plate stacking connecting positioning columns 48 are arranged on the back surface of the tray plate 46; when any two adjacent device carrier plates 26 in the stacked carrier plate group 18 are stacked, the carrier plate stacking connection positioning posts 48 of the carrier plate stacking positioning blocks 53 on the upper carrier plate 46 can be respectively embedded in the carrier plate stacking positioning holes 54 of the carrier plate stacking positioning blocks 53 on the lower carrier plate 46, the carrier plate plates 46 of all the device carrier plates 26 in the stacked carrier plate group 18 are parallel to each other, and the carrier plate 46 of two adjacent device carrier plates 26 are in clearance fit.

In the embodiment of the present invention, the tray carrier 46 is rectangular, and the specific shape of the tray carrier 46 can be selected according to actual needs, which will not be described herein. The central area of the tray carrier 46 is provided with device placement areas, the device placement areas are distributed in an array, the devices to be tested can be mounted on the tray carrier 46 through the device placement areas, the device placement areas are generally in a hole or groove form which can be matched with the devices to be tested 47, and the devices to be tested 47 can be separated from the tray carrier 46 so as to meet the follow-up picking up of the single devices to be tested 47 one by one.

Tray stacking positioning blocks 53 are disposed at four corners of the front surface of the tray 46, the tray stacking positioning blocks 53 are fan-shaped, tray stacking positioning holes 54 are disposed in each tray stacking positioning block 53, and the depth of the tray stacking positioning holes 54 is generally not greater than the thickness of the tray stacking positioning blocks 53. The tray plate stacking connection positioning columns 48 are arranged on the back surface of the tray plate 46, the number of the tray plate stacking connection positioning columns 48 is greatly equal to that of the tray plate stacking positioning blocks 53, and the tray plate stacking connection positioning columns 48 correspond to the positions of the tray plate stacking positioning blocks 53. The axis of the pallet stacking connection positioning posts 48 is perpendicular to the plane of the pallet 46. The tray deck laminate connection positioning posts 48 and the tray deck laminate positioning blocks 53 are all located outside the device placement area.

When stacking any two device trays 26, the tray stack connection positioning posts 48 of the tray stack layer positioned on the upper tray plate 46 can be respectively embedded in the tray stack positioning holes 54 of the tray stack layer positioning blocks 53 positioned on the lower tray plate 46. The stacked tray set 18 obtained by stacking a plurality of device trays 26 is arranged such that the tray plates 46 of all the device trays 26 in the stacked tray set 18 are parallel to each other. In particular, the length of the tray-stacked connection positioning columns 48 is greater than the thickness of the tray-stacked positioning blocks 53, so that when the tray-stacked connection positioning columns 48 of the tray-stacked positioning blocks 53 on the tray 46 above can be respectively embedded into the tray-stacked positioning holes 54 of the tray-stacked positioning blocks 53 on the tray 46 below, the two tray 46 are in gap distribution so as not to affect the mutual interference between the devices 47 to be tested on the two adjacent tray 46.

In addition, the two ends of the tray plate 46 are provided with tray positioning slots 56 and tray positioning holes 55, and the tray positioning holes 56 are generally distributed on two sides of the tray positioning slots 56. When the secondary jacking supporting plate 33 is in contact with the device carrier plate 26 for clamping and jacking, the secondary jacking supporting plate 33 needs to enter the carrier plate positioning groove 56, and the secondary jacking supporting plate 33 can be withdrawn from the carrier plate positioning groove 56 of the carrier plate 46 by separating the clamping driving cylinder 31 so as not to influence the subsequent conveying of the carrier plate 46.

As shown in fig. 1, 2, 3, 4, 5 and 7, the device under test pick-up mechanism includes a device pick-up tray detection sensor 42 for detecting a tray board 46, a device pick-up clamping mechanism 19 for clamping a device under test located in a device under test pick-up area, and a device pick-up conveying mechanism for picking up a device under test 47 on the tray board 46;

After the device pickup tray detection sensor 42 detects the tray carrier 46, the device pickup clamping mechanism can clamp the tray carrier 46 positioned in the device pickup area to be detected, and the device pickup conveying mechanism can be used for picking up the devices 47 to be detected on the tray carrier 46 one by one and conveying the devices to be detected to a required position.

In the embodiment of the present invention, the device pickup detection sensor 42 may take a conventional form, such as a photoelectric switch, and may be specifically selected according to needs, which will not be described herein. Of course, the device to be tested picking up mechanism may further include a device to be tested picking up blocking mechanism, where the device to be tested picking up blocking mechanism may include a device picking up blocking cylinder 40 and a device picking up blocking body 41, blocking the tray plate 46 by the device picking up blocking cylinder 40 and the device picking up blocking body 41, and the device to be tested blocking mechanism formed by matching between the device picking up blocking cylinder 40 and the device picking up blocking body 41 may refer to the description of the feeding blocking mechanism, which is not repeated herein.

In particular, when the device pickup tray detection sensor 42 detects that the tray carrier 46 enters the device pickup area to be tested, the blocking of the tray carrier 46 by the device pickup blocking mechanism to be tested and the conveying state of the tray conveying mechanism 8 can be controlled, so that the tray carrier 46 can be stabilized in the current device pickup area to be tested. The device pickup blocking mechanism to be tested and the device pickup carrier tray detection sensor 42 are both located in the carrier tray conveying mechanism 8, and the device pickup blocking cylinder 40 and the device pickup blocking body 41 are located in front of the carrier tray plate 46 when blocking the carrier tray plate 46.

After the tray carrier 46 is stabilized in the pickup area of the device under test, the devices under test 47 on the tray carrier 46 can be picked up one by the device pickup clamping mechanism 19, and the picked up devices under test 47 can be separated from the tray carrier 46 and transported to the measuring or testing position by the device pickup transporting mechanism.

As shown in fig. 11 and 1, the device pickup clamping mechanism 19 is matched with the tray carrier 46, and the device pickup clamping mechanism 19 comprises two symmetrically distributed device pickup clamping bodies, and the device pickup clamping bodies respectively correspond to two ends of the tray carrier 46.

As shown in fig. 12, a schematic view of a device pickup clamping body is shown, which includes a device pickup clamping seat 37, a device pickup clamping cylinder 38 disposed on the device pickup clamping seat 37, and a device pickup clamping block 39 adapted to be connected with a piston rod of the device pickup clamping cylinder 38, two device pickup clamping positioning posts 24 capable of being adapted to a carrier plate positioning hole 55 are disposed on the device pickup clamping block 39, and the device pickup clamping positioning posts 24 can be embedded in the carrier plate positioning hole 55. When the disc carrier plate 46 needs to be clamped, the device pickup clamping block 39 is driven by the piston rod of the device pickup clamping cylinder 38 to approach the disc carrier plate 46 until the device pickup clamping positioning column 24 is embedded in the disc carrier positioning hole 55 of the disc carrier plate 46. After clamping the tray carrier 46, the stability and reliability of subsequent pickup of the devices 47 to be tested on the tray carrier 46 one by one can be ensured. When the clamping of the tray carrier 46 needs to be released, the piston rod of the device pickup clamping cylinder 38 drives the device pickup clamping block 39 away from the end of the tray carrier 46, and the device pickup clamping positioning column 24 is supported to withdraw from the tray positioning hole 55 at the end of the tray carrier 46.

As shown in fig. 1,2,3, 5 and 7, the device pickup transfer mechanism includes a pickup device transfer rack 25, a device post-pickup transfer mechanism 13 mounted on the pickup device transfer rack 25, and a device pickup robot arm 15 adapted to be connected to the device post-pickup transfer mechanism 13;

The device pickup mechanical arm 15 comprises a device vacuum adsorption head 60 adapted to the device 47 to be tested, a vacuum adsorption connection mechanism adapted to the device vacuum adsorption head 60 and an adsorption head motion driving mechanism for driving the device vacuum adsorption head 60 to move, the device vacuum adsorption head 60 can be driven to move to the opposite direction of any device 47 to be tested on the tray carrier plate 46 by the adsorption head motion driving mechanism, the vacuum adsorption connection mechanism is matched with the device vacuum adsorption head 60 so as to be capable of adsorbing and picking the device 47 to be tested on the tray carrier plate 46, which is in positive correspondence with the device vacuum adsorption head 60, from the tray carrier plate 46, and the device vacuum adsorption head 60 and the device 47 to be tested adsorbed by the device vacuum adsorption head 60 can be conveyed to a required position by the device after-picking conveying mechanism 13.

In the embodiment of the present invention, the device-picking conveying frames 25 are distributed on two sides of the tray conveying mechanism 8, the device-picking conveying mechanism 13 is erected above the tray conveying mechanism 8 through the device-picking conveying frames 25, and the conveying direction of the device-picking conveying mechanism 13 and the conveying direction of the tray conveying mechanism 8 can be mutually perpendicular, and are specifically selected according to actual needs, and will not be described herein. The device picking mechanical arm 15 can pick up the devices 47 to be tested one by one, the device picking mechanical arm 15 can be conveyed by the device picking conveying mechanism 13, namely the device picking mechanical arm 15 and the picked devices 47 to be tested can be conveyed to the required positions by the device picking conveying mechanism 13, and the device picking conveying mechanism 13 is positioned above the tray conveying mechanism 8, namely normal conveying of the tray smashing conveying mechanism 8 is not influenced. The device post-pickup conveying mechanism 13 may be in a conventional commonly used form, for example, the device post-pickup conveying mechanism 13 may be in a conventional commonly used chain conveying form, and a specific conveying form of the device post-pickup conveying mechanism 13 may be selected according to actual needs, so as to meet specific conveying, which is specifically known in the art, and will not be described herein.

As shown in fig. 16 and 17, a schematic diagram of one implementation of the device pick-up robot 15 is shown. Specifically, the device vacuum chuck 50 can be adapted to the device under test 47, and the driving movement of the device vacuum chuck 60 to a desired position can be achieved by the chuck movement driving mechanism, so that the device vacuum chuck 60 can be positively corresponded to the device under test 47. When the device vacuum adsorption head 60 corresponds to the device 47 to be tested and is pressed on the device 47 to be tested, vacuum adsorption of the device 47 to be tested can be realized by utilizing the vacuum adsorption effect generated by the vacuum adsorption connecting mechanism in the device vacuum adsorption head 60, and after the device 47 to be tested is vacuum adsorbed, the device vacuum adsorption head 60 is driven to move again by utilizing the adsorption head movement driving mechanism, so that the device 47 to be tested can be adsorbed and separated from the carrier plate 46, and the device 47 to be tested is picked up.

The suction head motion driving mechanism comprises a vacuum suction head guide connection block 62 connected with the device vacuum suction head 60 and a suction head longitudinal driving connection body 63, the suction head longitudinal driving connection body 63 can be in the form of an air cylinder, when the driving form of the air cylinder is adopted, a piston rod of the suction head longitudinal driving connection body 63 is connected with the device vacuum suction head 60, the vacuum suction head guide connection block 62 is simultaneously connected with the device vacuum suction head 60 and the suction head longitudinal driving connection body 63, the vacuum suction head guide connection block 62 and the suction head longitudinal driving connection body 63 can move relatively in the longitudinal direction, and the vacuum suction head guide connection block 62 can guide the longitudinal motion of the device vacuum suction head 60 relative to the suction head longitudinal driving connection body 63. The longitudinal movement of the device vacuum chuck 60, specifically, the direction in which the device vacuum chuck 60 can be closer to the platen 46 or farther from the platen 46.

The adsorption head longitudinal driving connector 63 is mounted on the mechanical arm transverse movement connector 59, the mechanical arm transverse movement connector 59 can drive the adsorption head longitudinal driving connector 63 to transversely move, the mechanical arm transverse movement connector 59 can adopt a driving mode such as a cylinder, and the like, and the mechanical arm transverse movement connector can be specifically selected according to actual needs and is not described herein. When the suction head longitudinal driving connector 63 is driven to move laterally by the robot arm lateral movement connector 59 and the suction head longitudinal driving connector 63 drives the device vacuum suction head 60 to move longitudinally, driving the device vacuum suction head 60 to a desired position and positive alignment with the picked-up device under test 47 can be achieved. The mechanical arm transverse movement connector 59 drives the suction head to longitudinally drive the transverse movement of the connector 63, specifically, the direction perpendicular to the longitudinal movement of the vacuum suction head 60. The arm transverse movement connector 59 is fixedly connected with the arm connecting plate 57, so that the whole device picking mechanical arm 15 and the device post-picking conveying mechanism 13 can be in adaptive connection through the arm connecting plate 57.

The vacuum adsorption connection mechanism comprises a vacuum generator 64 arranged on the mechanical arm connecting plate 57 and a vacuum tube 61 arranged on the device vacuum adsorption head 60, the vacuum generator 64 is connected with the vacuum tube 61 through a pipeline, and negative pressure generated by the vacuum generator 64 can be loaded into the device vacuum adsorption head 60 through the vacuum tube 61, so that the device vacuum adsorption head 60 can realize vacuum adsorption corresponding to the device 47 to be tested. The vacuum generator 64 may take any form commonly used in the art, and may be specifically selected as needed to achieve the desired vacuum adsorption, and will not be described in detail herein. Of course, the mechanical arm connecting plate 57 is further provided with a mechanical arm electromagnetic valve 58, the mechanical arm electromagnetic valve 58 can inform the adsorption head of the air pressure required by the operation of the longitudinal driving connecting body 63 and the mechanical arm transverse moving connecting body 59, and the mode of controlling the air pressure on-off by using the mechanical arm electronic valve 58 is consistent with the prior art, and is particularly well known in the art, and is not repeated here.

Further, the empty tray pickup mechanism comprises an empty tray detection sensor 44 for detecting the device tray 26, a tray board clamping and pulling mechanism 16 for clamping and pulling the device tray 26 on the tray conveying mechanism 8, and an empty tray conveying mechanism 14 which is connected with the tray board clamping and pulling mechanism 16 in an adapting way;

the device carrier tray 26 on the carrier tray conveying mechanism 8 is gripped by the carrier tray plate gripping and pulling mechanism 16 and separated from the carrier tray conveying mechanism 8 after being lifted, and the device carrier tray 26 gripped and pulled by the carrier tray gripping and pulling mechanism 16 can be conveyed to a required position by the empty tray conveying mechanism 14.

As is clear from the above description, when the pickup of the device 47 to be tested on the device carrier tray 26 is completed, the device carrier tray 26 needs to be transported to the empty tray pickup area, and when the device carrier tray 26 is transported to the empty tray pickup area by the carrier tray transporting mechanism 8, the carrier tray 46 of the device carrier tray 26 can be lifted by the carrier tray plate clamping and pulling mechanism 16 and separated from the carrier tray transporting mechanism 8, and after being separated from the carrier tray transporting mechanism 8, the device carrier tray 26 clamped and pulled by the carrier tray plate clamping and pulling mechanism 16 is transported to a required position by the empty tray transporting mechanism 14, so that the recovery processing of the device carrier tray 26 is completed. In specific implementation, the empty tray conveying mechanism 14 may take a conventional form, and a specific conveying form may be selected according to needs, which will not be described herein. The conveying direction of the empty tray conveying mechanism 14 coincides with the conveying direction of the device post-pickup conveying mechanism 13.

As shown in fig. 18 and 19, the tray board clamping and pulling mechanism 16 includes a clamping connecting board 66, tray clamping blocks 67 disposed at two ends of the clamping connecting board 66, a tray clamping block driving mechanism 70 for driving the tray clamping blocks 67 to move, and a clamping connecting board lifting mechanism adapted to be connected with the clamping connecting board 66;

When the tray clamping blocks 67 at the two ends of the clamping connecting plate 66 are driven to approach each other by the tray clamping block driving mechanism 70, the tray clamping blocks 67 can be contacted with and clamped by the device carrier plates 26 arranged between the tray clamping blocks 67, and the lifting of the clamping connecting plate 66 can be lifted by the clamping connecting plate lifting mechanism, so that the device carrier plates 26 clamped by the tray clamping blocks 67 can be separated from the carrier plate conveying mechanism 8.

In the embodiment of the present invention, the clamping connection plate 66 is in a strip shape, the clamping connection plate 66 is above the tray conveying mechanism 8, and the length direction of the clamping connection plate 66 is consistent with the length direction of the tray plate 46. Tray clamping blocks 67 are arranged at two ends of the clamping connecting plate 66, and the tray clamping blocks 67 are hinged with the ends of the clamping connecting plate 66. The end parts of the clamping connecting plates 66 are respectively provided with a tray clamping block driving mechanism 70, the tray clamping block driving mechanisms 70 can be in the form of air cylinders and the like, when the driving mode of the air cylinders is adopted, the tray clamping block driving mechanisms 70 are connected with the adjacent tray clamping blocks 67, and when the tray clamping block driving mechanisms 70 drive the tray clamping blocks 67 to move, the tray clamping blocks 67 at the two ends of the clamping connecting plates 66 can be relatively close to or far away from each other. By bringing the two tray clamping blocks 67 relatively close together when the tray carrier plate 46 is located directly below the clamping link plate 66, the tray carrier plate 46 can be clamped after contact by the tray clamping blocks 67.

The opposite clamping connecting plate lifting mechanism comprises a clamping lifting air cylinder 65, a piston rod of the clamping lifting air cylinder 65 is fixedly connected with a clamping connecting plate 66, and the clamping lifting air cylinder 65 is arranged on a lifting guide connecting plate 71. The clamping connecting plate 66 is further provided with two symmetrically-distributed lifting guide rods 68, one end of each lifting guide rod 68 is fixedly connected with the clamping connecting plate 66, the other end of each lifting guide rod 68 penetrates through the lifting guide connecting plate 71 and stretches into a lifting guide sleeve 69 on the lifting guide plate 71, and the lifting guide rods 68 and the lifting guide sleeves 69 can guide the lifting process of the clamping connecting plate 66 under the driving of the clamping lifting air cylinder 65.

The lifting guide link plate 71 is further provided with a lifting clamping link plate 72, and the lifting clamping link plate 72 can be fixedly connected with the empty tray conveying mechanism 14, that is, the empty tray conveying mechanism 14 can drive the clamping link plate 66 and the clamping lifting cylinder 65 to synchronously move through the lifting clamping link plate 72 so as to realize conveying the clamped tray carrier plate 46 to a required position. In addition, a lifting clamping electromagnetic valve 73 is further disposed on the lifting clamping connecting plate 72, and the ventilation state of the clamping lifting air cylinder 65 can be controlled through the lifting clamping electromagnetic valve 73, which is consistent with the prior art, and details are not repeated here.

In particular, to stabilize the tray carrier 46 in the empty tray pickup area, an empty tray blocking mechanism is further included, and the empty tray blocking mechanism is utilized to block the tray carrier 46 after contacting the tray carrier 46, so as to stabilize the tray carrier 46 in the empty tray pickup area. The empty tray blocking mechanism includes an empty tray pickup blocking cylinder 45 and an empty tray pickup blocking body 43 connected to a piston rod of the empty tray pickup blocking mechanism 45, and the specific structural forms of the empty tray pickup blocking cylinder 45 and the empty tray pickup blocking body 43 and the specific blocking manner of the tray carrying plate 46 may refer to the description of the above feeding blocking mechanism and the like, and will not be repeated here. The empty tray detection sensor 44 may also adopt a conventional photoelectric switch or the like, when the empty tray detection sensor 44 detects the tray carrier 46, the empty tray blocking mechanism works to block the tray carrier 46, then the tray carrier 46 is clamped and lifted by the tray carrier clamping and lifting mechanism 16, and finally the tray carrier 46 is conveyed to the recovery position by the empty tray conveying mechanism 14.

As shown in fig. 2,3,4,5, 6 and 7, the tray conveying mechanism 8 includes a conveying frame 22, two conveying chains 49 symmetrically distributed are disposed in the conveying frame 22, and a tray conveying driving mechanism for driving the two conveying chains 49 to rotate synchronously is further disposed on the conveying frame 22;

When the device carrier tray 26 is transported, the carrier tray layer on the device carrier tray 26 is stacked and connected with the positioning posts 48 to be contacted with the transport chain 49 in the transport frame 22.

In the embodiment of the present invention, the conveying frame 22 is disposed on the conveying carrier 21, two conveying chains 49 are disposed in the conveying frame 22, the conveying chains 49 can rotate in the conveying frame 22, and the condition of the conveying chains 49 in the conveying frame 22 can be consistent with the existing condition, which is well known in the art, and will not be repeated here. The two conveying chains 49 are connected through the conveying chain connecting shaft 23, one end of the conveying chain connecting shaft 23 is connected with a tray conveying driving mechanism in an adapting way, the tray conveying driving mechanism can generally adopt a conveying driving motor 20, namely, the conveying chain connecting shaft 23 can be driven to rotate through the conveying driving motor 20 so as to drive the conveying chains 49 in the conveying frame 22 to synchronously rotate, and after the conveying chains 49 rotate, the conveying of the device tray 26 and the laminated tray group 18 can be realized.

In particular, when the device carrier tray 26 is transported, the carrier tray layer on the device carrier tray 26 is stacked and connected with the positioning column 48 to contact with the conveying chain 49 in the conveying frame 22, so that the device carrier tray 26 can be transported to a required position when the conveying chain 49 rotates. Since two conveying chains 49 are disposed in the conveying frame 22, the feeding blocking mechanism and the like are located in the tray conveying mechanism 8, specifically, located between the two conveying chains 49, and detailed descriptions are omitted.

Claims

1. A modularized automatic feeding and discharging device for a semiconductor power device is characterized in that: the device comprises a frame body and a carrying disc conveying mechanism (8) arranged on the frame body, wherein a carrying disc group feeding area, a laminated carrying disc separating area, a device pickup area to be tested and an empty tray pickup area are sequentially arranged in the feeding and discharging conveying direction of the carrying disc conveying mechanism (8);

After the laminated carrying disc group (18) is arranged in the carrying disc group feeding area, the laminated carrying disc group (18) in the carrying disc group feeding area can be conveyed to the laminated carrying disc separating area through the carrying disc conveying mechanism (8); a plurality of device carrying discs (26) which are distributed in a laminated way in the laminated carrying disc group (18) can be separated from bottom to top one by a laminated carrying disc separating mechanism; the device carrying disc (26) separated by the laminated carrying disc separating mechanism is conveyed to a device pickup area to be detected through a carrying disc conveying mechanism (8), and devices (47) to be detected on the device carrying disc (26) in the device pickup area to be detected can be picked up one by one and conveyed to a required position through the device pickup mechanism to be detected; after the device to be tested (47) on the device carrying disc (26) in the device to be tested pick-up area is picked up and conveyed by the device to be tested pick-up mechanism, the device carrying disc (26) in the device to be tested pick-up area is conveyed to the empty tray pick-up area by the carrying disc conveying mechanism (8); the device carrier (26) in the empty tray pickup area can be picked up and conveyed to a required position by the empty tray pickup mechanism so as to separate the device carrier (26) in the empty tray pickup area from the carrier conveying mechanism (8);

The empty tray pickup mechanism comprises an empty tray detection sensor (44) for detecting a device carrier tray (26), a carrier tray plate clamping and lifting mechanism (16) for clamping and lifting the device carrier tray (26) on the carrier tray conveying mechanism (8), and an empty tray conveying mechanism (14) which is connected with the carrier tray plate clamping and lifting mechanism (16) in an adapting mode;

the device carrying disc (26) on the carrying disc conveying mechanism (8) is clamped by the carrying disc plate clamping and lifting mechanism (16) and separated from the carrying disc conveying mechanism (8) after being lifted, and the device carrying disc (26) clamped and lifted by the carrying disc plate clamping and lifting mechanism (16) can be conveyed to a required position by the empty carrying disc conveying mechanism (14);

The device carrying disc (26) comprises a carrying disc plate (46) and device placing areas which are distributed on the carrying disc plate (46) in an array manner, wherein devices (47) to be tested can be assembled on the carrying disc plate (46) through the device placing areas;

A plurality of tray plate laminating positioning blocks (53) are arranged on the front surface of the tray plate (46), and a plurality of tray plate laminating connecting positioning columns (48) are arranged on the back surface of the tray plate (46); when any two adjacent device carrier plates (26) in the laminated carrier plate group (18) are laminated, carrier plate laminated connecting positioning columns (48) of the upper carrier plate plates (46) can be respectively embedded in carrier plate laminated positioning holes (54) of carrier plate laminated positioning blocks (53) on the lower carrier plate plates (46), the carrier plate plates (46) of all the device carrier plates (26) in the laminated carrier plate group (18) are mutually parallel, and the carrier plate plates (46) of the two adjacent device carrier plates (26) are in clearance fit;

The device to be tested picking mechanism comprises a device picking tray detection sensor (42) for detecting a tray carrying plate (46), a device picking clamping mechanism (19) for clamping a device to be tested in a device picking area to be tested and a device picking conveying mechanism for picking up a device to be tested (47) on the tray carrying plate (46);

After the device picking-up tray detection sensor (42) detects the tray carrying plate (46), the device picking-up clamping mechanism (19) can clamp the tray carrying plate (46) positioned in the device picking-up area to be detected, and the device picking-up conveying mechanism can be used for picking up the devices (47) to be detected on the tray carrying plate (46) one by one and conveying the devices to the required position.

2. The modular automatic loading and unloading device for semiconductor power devices according to claim 1, characterized in that: and a feeding blocking mechanism and a feeding area carrier disc detection sensor (30) for detecting the laminated carrier disc group (18) are arranged in the feeding area of the carrier disc group, and after the laminated carrier disc group (18) is detected by the feeding area carrier disc detection sensor (30), the laminated carrier disc group (18) can be stabilized in the feeding area of the carrier disc group through the feeding blocking mechanism.

3. The modular automatic loading and unloading device for semiconductor power devices according to claim 1, characterized in that: the laminated tray separating mechanism comprises a laminated separating positioning frame (11) which can be matched with the laminated tray group (18), a tray primary jacking mechanism arranged in the laminated separating positioning frame (11) and tray clamping jacking mechanisms (17) arranged at two sides of the tray conveying mechanism (8);

After a laminated carrying disc group (18) in a carrying disc group feeding area is conveyed into a laminated separating and positioning frame (11) by a carrying disc conveying mechanism (8), a carrying disc primary lifting mechanism is in contact with a device carrying disc (26) at the lowest layer in the laminated carrying disc group (18) and can lift the laminated carrying disc group (18) in a direction away from the carrying disc conveying mechanism (8), and all device carrying discs (26) above the device carrying disc (26) at the lowest layer in the laminated carrying disc group (18) can be clamped and supported by a carrying disc clamping and lifting mechanism (17);

After the corresponding device carrier plates (26) are clamped and supported and jacked by the carrier plate clamping and jacking mechanism (17), the device carrier plates (26) contacted with the carrier plate primary jacking mechanism are dropped onto the carrier plate conveying mechanism (8) by utilizing the carrier plate primary jacking mechanism so as to separate the device carrier plates (26) in the laminated carrier plate group (18) one by one; the separated device carrier disc (26) contacted with the carrier disc conveying mechanism (8) is conveyed to a device pickup area to be detected by utilizing the carrier disc conveying mechanism (8);

After the separated device carrier trays (26) are conveyed to a device pickup area to be detected through the carrier tray conveying mechanism (8), all the device carrier trays (26) which are clamped and supported and jacked can be dropped to a contact state with the carrier tray primary jacking mechanism through the carrier tray clamping jacking mechanism (17).

4. The modular automatic loading and unloading device for semiconductor power devices according to claim 3, characterized in that: a tray full layer detection sensor (34) and a tray overrun detection sensor (12) are arranged on the laminated separation positioning frame (11);

The carrier disc clamping and jacking mechanism (17) comprises a separation clamping driving connecting mechanism and a carrier disc secondary jacking mechanism which is adaptively connected with the separation clamping driving connecting mechanism, and the carrier disc secondary jacking mechanism can be driven to move through the separation clamping driving connecting mechanism, so that the carrier disc secondary jacking mechanism is close to a laminated carrier disc group (18) in the laminated separation positioning frame (11) or far away from the laminated carrier disc group (18) in the laminated separation positioning frame (11);

After the secondary jacking mechanism of the carrier disc is driven to approach the laminated carrier disc group (18) in the laminated separating and positioning frame (11) through the separating and clamping driving connecting mechanism, the carrier disc (26) of corresponding devices in the laminated separating and positioning frame (11) can be clamped and supported and jacked through the secondary jacking mechanism of the carrier disc, and the secondary jacking mechanism of the carrier disc can enable all the device carrier discs (26) jacked by the clamped and supported and jacked to fall into contact with the primary jacking mechanism of the carrier disc.

5. The modular automatic loading and unloading device for semiconductor power devices according to claim 1, characterized in that: the device picking and conveying mechanism comprises a picking device conveying frame (25), a device picking and conveying mechanism (13) assembled on the picking device conveying frame (25) and a device picking mechanical arm (15) which is connected with the device picking and conveying mechanism (13) in an adapting mode;

The device picking mechanical arm (15) comprises a device vacuum adsorption head (60) matched with a device to be detected (47), a vacuum adsorption connecting mechanism connected with the device vacuum adsorption head (60) in a matched mode, and an adsorption head motion driving mechanism used for driving the device vacuum adsorption head (60) to move, wherein the device vacuum adsorption head (60) can be driven to move to the right opposite direction of any device to be detected (47) on the tray carrying plate (46) through the adsorption head motion driving mechanism, the vacuum adsorption connecting mechanism is matched with the device vacuum adsorption head (60) so that the device to be detected (47) on the tray carrying plate (46) corresponding to the device vacuum adsorption head (60) can be adsorbed and picked up from the tray carrying plate (46), and the device vacuum adsorption head (60) and the device to be detected (47) adsorbed by the device vacuum adsorption head (60) can be conveyed to a required position through the device after-picking conveying mechanism (13).

6. The modular automatic loading and unloading device for semiconductor power devices according to claim 1, characterized in that: the tray carrying plate clamping and pulling mechanism (16) comprises a clamping connecting plate (66), tray clamping blocks (67) arranged at two ends of the clamping connecting plate (66), a tray clamping block driving mechanism (70) for driving the tray clamping blocks (67) to move, and a clamping connecting plate lifting mechanism which is connected with the clamping connecting plate (66) in an adapting mode;

When the tray clamping blocks (67) at two ends of the clamping connecting plate (66) are driven to be close to each other by the tray clamping block driving mechanism (70), the tray clamping blocks (67) can be contacted with and clamped with the device carrying plates (26) arranged between the tray clamping blocks (67), and the lifting of the clamping connecting plate (66) can be lifted by the clamping connecting plate lifting mechanism, so that the device carrying plates (26) clamped by the tray clamping blocks (67) can be separated from the carrying plate conveying mechanism (8).

7. The modular automatic loading and unloading device for semiconductor power devices according to claim 1, characterized in that: the carrier plate conveying mechanism (8) comprises a conveying frame (22), two conveying chains (49) which are symmetrically distributed are arranged in the conveying frame (22), and a carrier plate conveying driving mechanism for driving the two conveying chains (49) to synchronously rotate is further arranged on the conveying frame (22);

When the device carrier plate (26) is conveyed, a carrier plate layer on the device carrier plate (26) is stacked and connected with a positioning column (48) to be contacted with a conveying chain (49) in the conveying frame (22).