CN114135583A - High-rigidity large-bearing ultrasonic extrusion suspension bearing - Google Patents
High-rigidity large-bearing ultrasonic extrusion suspension bearing Download PDFInfo
- Publication number
- CN114135583A CN114135583A CN202111405693.9A CN202111405693A CN114135583A CN 114135583 A CN114135583 A CN 114135583A CN 202111405693 A CN202111405693 A CN 202111405693A CN 114135583 A CN114135583 A CN 114135583A
- Authority
- CN
- China
- Prior art keywords
- suspension
- cover plate
- front cover
- extrusion
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000725 suspension Substances 0.000 title claims abstract description 67
- 238000001125 extrusion Methods 0.000 title claims abstract description 44
- 230000000694 effects Effects 0.000 claims abstract description 29
- 239000000919 ceramic Substances 0.000 claims abstract description 20
- 238000006073 displacement reaction Methods 0.000 claims description 12
- 239000003822 epoxy resin Substances 0.000 claims description 4
- 230000005284 excitation Effects 0.000 claims description 4
- 229920000647 polyepoxide Polymers 0.000 claims description 4
- 230000001050 lubricating effect Effects 0.000 claims description 3
- 230000003068 static effect Effects 0.000 abstract description 14
- 238000005461 lubrication Methods 0.000 abstract description 3
- 239000012530 fluid Substances 0.000 abstract description 2
- 238000002604 ultrasonography Methods 0.000 abstract 1
- 230000001808 coupling effect Effects 0.000 description 3
- 229910000838 Al alloy Inorganic materials 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000000265 homogenisation Methods 0.000 description 2
- 230000008092 positive effect Effects 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000009351 contact transmission Effects 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
- F16C32/0607—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being retained in a gap, e.g. squeeze film bearings
- F16C32/0611—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being retained in a gap, e.g. squeeze film bearings by means of vibrations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
- F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Abstract
The invention discloses an ultrasonic extrusion suspension bearing with high rigidity and large bearing capacity, belonging to the field of ultrasound and fluid lubrication; comprises a supporting frame, a fixed station and vibrators connected with the supporting frame through the fixed station; the vibrator is composed of a front cover plate, a ceramic plate and the middle part of a rear cover plate which are fastened and connected together through a pre-tightening bolt, the upper end of the front cover plate is connected with a porous mass, and the upper end of the porous mass is suspended on a suspension plate; the vibrator drives the porous mass block to vibrate at high frequency to generate an extrusion effect, meanwhile, an air source flows through the porous mass block to generate a static pressure effect, when the bearing works, the extrusion effect and the static pressure effect are coupled with each other, and the extrusion effect and the static pressure effect can be changed by adjusting driving voltage and air supply pressure, so that a supporting air film with high rigidity and large bearing capacity is realized. The suspension device can realize the suspension characteristic of ultrasonic extrusion suspension with high rigidity and large bearing capacity, can overcome the influence of assembly error and processing quality on the extrusion suspension characteristic, and has the advantages of high precision, good stability and compact structure.
Description
Technical Field
The invention relates to an ultrasonic suspension bearing, in particular to a high-rigidity large-bearing ultrasonic extrusion suspension bearing, and belongs to the technical field of ultrasonic and fluid lubrication.
Background
The high-frequency ultrasonic vibration squeezes the gas in the gap between the radiating surface of the vibrator and the suspended object, and the object is suspended by the average gas pressure which is higher than the ambient gas pressure in a period. The ultrasonic suspension technology has the advantages of high precision, good stability, compact structure and the like, and has a better application prospect in gas lubrication bearings, non-contact ultrasonic motors and non-contact transmission systems.
At present, the ultrasonic suspension system can only realize small suspension bearing capacity. In addition, the ultrasonic suspension gap is small, the assembly error of the suspension system and the surface quality of the device have inevitable influence on the extrusion suspension force, and the bearing capacity of the ultrasonic suspension system in unit area is further reduced.
Aiming at the requirement of realizing non-contact support by adopting an ultrasonic suspension technology, an ultrasonic extrusion suspension bearing device and a method which have the advantages of high rigidity of a supporting air film, large bearing capacity in unit area and capability of overcoming assembly errors and processing quality need to be researched urgently.
Disclosure of Invention
The purpose of the invention is: the problems of low bearing capacity and small rigidity of an ultrasonic extrusion suspension bearing in the prior art are solved, and the high-rigidity large-bearing ultrasonic extrusion suspension bearing is provided.
In order to achieve the purpose, the invention adopts the following technical scheme: a high-rigidity large-bearing ultrasonic extrusion suspension bearing comprises a support frame, a fixed table and a vibrator which is connected to the support frame through the fixed table; the vibrator is formed by fastening and connecting a front cover plate, a ceramic plate and the middle part of a rear cover plate together through a pre-tightening bolt, wherein the ceramic plate is connected between the front cover plate and the rear cover plate, the upper end of the front cover plate is connected with a porous mass block, and a suspension plate is suspended at the upper end of the porous mass block; an annular air supply groove is formed in the upper end face of the front cover plate, a stepped circular table is arranged at the lower end of the porous mass block, and the porous mass block is connected into the annular air supply groove in the front cover plate in a matched mode through the stepped circular table; the annular air supply groove is characterized in that an air outlet is formed in the inner bottom surface of the annular air supply groove, an air supply port is formed in the side wall of the front cover plate, an air supply channel communicated with the air outlet and the air supply port is formed in the front cover plate, and an air pipe connector is connected to the outer portion of the air supply port.
The air pipe interface is connected with an air source of an air supply system, the upper end of the suspension plate is provided with a laser displacement sensor, and the vibrator is connected with a power amplifier; and the gas supply system, the laser displacement sensor, the power amplifier, the signal acquisition system connected between the laser displacement sensor and the power amplifier and the PID controller form a PID control system together.
The signal acquisition system feeds the suspension height of the suspension plate acquired by the laser displacement sensor back to the PID controller, the PID controller transmits a signal generated after a measured value is compared with an expected value to the power amplifier, the power amplifier acts a new excitation signal on the ceramic chip in the oscillator, the vibration amplitude of the oscillator is changed, the extrusion effect is adjusted, and the suspension height of the suspension plate reaches the expected value.
The support frame is a detachable support frame, the fixed platform is fastened on the support frame through bolts, and the oscillator is fixedly connected to the fixed platform through bolts.
The ceramic plates are provided with a plurality of plates, and every two ceramic plates are connected through an electrode plate.
The ceramic plate is connected with the front cover plate and the rear cover plate in a pre-tightening mode through pre-tightening bolts.
A supporting table is arranged in the middle of an inner ring of the annular air supply groove in the upper end face of the front cover plate, and the height of the supporting table is lower than the depth of the annular air supply groove; the stepped round platform at the lower end of the porous block is connected in the annular air supply groove in a matching manner, and the lower end face of the stepped round platform is in contact connection with the support platform.
The end face of the porous mass block is provided with a groove or a surface microtexture capable of improving the lubricating property.
The porous mass block is adhered and connected to the upper end face of the front cover plate by epoxy resin.
The front cover plate is made of aluminum alloy, and the rear cover plate is made of No. 45 steel.
The invention has the beneficial effects that:
1) the device drives the porous mass block to vibrate at high frequency through the vibrator to generate an extrusion effect, meanwhile, an air source flows through the porous mass block to generate a static pressure effect, when the bearing works, the extrusion effect and the static pressure effect are mutually coupled and generate a bearing air film, and the air film under the coupling effect has a positive effect, so that the high-rigidity and large-bearing capacity of the bearing air film is realized.
2) The invention can respectively change the extrusion effect and the static pressure effect by adjusting the driving voltage and the air supply pressure so as to change the bearing characteristic of the suspension system, and the coupling of the extrusion effect and the dynamic pressure effect ensures that the structure of the suspension system is more compact.
3) The invention realizes the large bearing characteristic in unit area by introducing the porous mass block into the end face of the front cover plate, and simultaneously ensures the stability of the suspension plate by the homogenization effect of the air film on the surface of the porous mass block.
4) The suspension plate is higher in suspended height under the action of the coupling effect, and the influence of assembly errors and processing quality on the extrusion effect is effectively overcome.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic structural view of the front cover plate in FIG. 1;
FIG. 3 is a schematic partial cross-sectional view of FIG. 2;
FIG. 4 is a schematic diagram of the working principle of the present invention;
FIG. 5 is a schematic diagram of a PID control system of the invention.
In the figure, 1-a support frame, 2-a fixed platform, 3-a front cover plate, 301-an annular air supply groove, 302-a support platform, 303-an air outlet, 304-an air supply port, 305-an air supply channel, 4-a ceramic plate, 5-a rear cover plate, 6-a pre-tightening bolt, 7-a porous mass, 8-a suspension plate and 9-an air pipe interface.
Detailed Description
The invention is further explained below with reference to the figures and the embodiments.
Example (b): as shown in fig. 1-5, the invention provides a high-rigidity large-bearing ultrasonic extrusion suspension bearing, which comprises a support frame 1, a fixed table 2 and a vibrator connected to the support frame 1 through the fixed table 2; support frame 1 is detachable type braced frame, and fixed station 2 passes through the bolt-up on support frame 1, and the oscillator passes through bolt fixed connection on fixed station 2.
The vibrator is formed by fastening and connecting the middle parts of a front cover plate 3, a ceramic plate 4 and a rear cover plate 5 together through a pre-tightening bolt 6, wherein the ceramic plate 4 is stuck and connected between the front cover plate 3 and the rear cover plate 5 by adopting epoxy resin, the ceramic plate 4 is provided with a plurality of pieces, and every two ceramic plates 4 are connected through an electrode plate; the upper end of the front cover plate 3 is connected with a porous mass 7, and the upper end of the porous mass 7 is suspended with a suspension plate 8.
An annular air supply groove 301 is formed in the upper end face of the front cover plate 3, a stepped circular truncated cone is arranged at the lower end of the porous mass 7, and the porous mass 7 is connected into the annular air supply groove 301 in the front cover plate 3 in a matched mode through the stepped circular truncated cone; an air outlet 303 is formed in the inner bottom surface of the annular air supply groove 301, an air supply port 304 is formed in the side wall of the front cover 3, an air supply passage 305 for communicating the air outlet 303 and the air supply port 304 is formed in the front cover 3, and an air pipe connection 9 is connected to the outside of the air supply port 304.
A support table 302 is arranged in the middle of the inner ring of the annular air supply groove 301 in the upper end surface of the front cover plate 3, and the height of the support table 302 is lower than the depth of the annular air supply groove 301; the stepped circular truncated cone at the lower end of the porous mass block 7 is connected in the annular air supply groove 301 in a matching manner, and the lower end face of the stepped circular truncated cone is connected with the support platform 302 in a contact manner.
The end face of the porous mass block 7 is provided with grooves or surface micro-textures, and the shape and arrangement mode of the grooves or the micro-textures can effectively improve the pressure of an extruded air film and the pressure of a static pressure air film, enhance the suspension force and further improve the lubricating property of the bearing.
A certain gap is left after the porous block 7 is matched with the air supply groove 301, and a clean air source sequentially passes through an air pipe connector 9, an air supply port 304, an air supply channel 305 and an air outlet 303 and then reaches the air supply groove 301; the porous mass 7 is adhered and connected on the upper end surface of the front cover plate 3 by adopting epoxy resin.
The front cover plate 3 is made of aluminum alloy, and the rear cover plate 5 is made of No. 45 steel.
The air pipe interface 9 is connected with an air source of an air supply system, the upper end of the suspension plate 8 is provided with a laser displacement sensor, and the vibrator is connected with a power amplifier; the gas supply system, the laser displacement sensor, the power amplifier, the signal acquisition system connected between the laser displacement sensor and the power amplifier and the PID controller form a PID control system.
The signal acquisition system feeds the suspension height of the suspension plate 8 acquired by the laser displacement sensor back to the PID controller, the PID controller transmits a signal generated after a measured value is compared with an expected value to the power amplifier, the power amplifier acts a new excitation signal on the ceramic chip 4 in the oscillator, the vibration amplitude of the oscillator is further changed, the extrusion effect is adjusted to be strong or weak, and the suspension height of the suspension plate 8 reaches the expected value.
The working principle is as follows: the high-rigidity large-bearing ultrasonic extrusion suspension bearing is a mixed bearing, when a static pressure air source is not provided, the vibrator drives the porous mass to vibrate at high frequency, and extrudes air in gaps to form an extrusion effect, and at the moment, the bearing is a pure extrusion bearing, has very small bearing capacity and air film rigidity, and can only suspend objects with smaller gravity. When the ultrasonic excitation signal is stopped and only the static pressure air source is provided, the bearing can generate static pressure effect. When the static pressure effect is coupled to the extrusion effect, the coupling bearing air film pressure is formed between the end face of the porous mass block and the end face of the suspension plate, the positive effect with obvious effect can be generated, the extrusion suspension bearing capacity and the air film rigidity are greatly increased, meanwhile, the suspension air film under the coupling effect has the homogenization effect, objects can be stably suspended, and the influence of assembly errors and processing quality on the extrusion suspension performance is directly overcome by the high suspension height.
The static pressure effect can be realized by porous throttling, slit throttling, surface throttling or nozzle throttling, and the extrusion effect can be realized by vibrator extrusion or ceramic chip extrusion.
The vibration amplitude of the vibrator can be changed by adjusting the driving voltage, so that the extrusion effect is adjusted, and the extrusion suspension force is changed; in addition, the static pressure effect can be changed by adjusting the air supply pressure of the air source, and the static pressure suspension force is further changed. The two adjusting modes can improve the rigidity and damping characteristic of the supporting air film and realize the control of the bearing characteristic.
The high-rigidity large-bearing ultrasonic extrusion suspension bearing provided by the invention has higher stability and suspension precision and compact structure, and can be used for precision equipment such as precision device suspension, medical instruments and space positioning.
The above description is only for the purpose of illustrating the technical solutions of the present invention and not for the purpose of limiting the same, and other modifications or equivalent substitutions made by those skilled in the art to the technical solutions of the present invention should be covered within the scope of the claims of the present invention without departing from the spirit and scope of the technical solutions of the present invention.
Claims (9)
1. The utility model provides a big ultrasonic extrusion suspension bearing that bears of high rigidity which characterized in that: comprises a support frame (1), a fixed station (2) and vibrators connected with the support frame (1) through the fixed station (2); the vibrator is formed by fastening and connecting the middle parts of a front cover plate (3), a ceramic plate (4) and a rear cover plate (5) together through a pre-tightening bolt (6), wherein the ceramic plate (4) is connected between the front cover plate (3) and the rear cover plate (5), the upper end of the front cover plate (3) is connected with a porous mass block (7), and the upper end of the porous mass block (7) is suspended with a suspension plate (8); an annular gas supply groove (301) is formed in the upper end face of the front cover plate (3), a stepped circular truncated cone is arranged at the lower end of the porous block (7), and the porous block (7) is connected in the annular gas supply groove (301) in the front cover plate (3) in a matched mode through the stepped circular truncated cone; set up gas outlet (303) on the interior bottom surface of annular air feed groove (301), set up air supply port (304) on the lateral wall of front shroud (3), the inside of front shroud (3) is provided with air feed channel (305) that communicate gas outlet (303) and air supply port (304), and air pipe interface (9) are connected to the outside of air supply port (304).
2. The ultrasonic extrusion suspension bearing with high rigidity and large bearing capacity as claimed in claim 1, wherein: the air pipe interface (9) is connected with an air source of an air supply system, the upper end of the suspension plate (8) is provided with a laser displacement sensor, and the vibrator is connected with a power amplifier; and the gas supply system, the laser displacement sensor, the power amplifier, the signal acquisition system connected between the laser displacement sensor and the power amplifier and the PID controller form a PID control system together.
3. The ultrasonic extrusion suspension bearing with high rigidity and large bearing capacity as claimed in claim 2, wherein: the signal acquisition system feeds the suspension height of the suspension plate (8) acquired by the laser displacement sensor back to the PID controller, the PID controller transmits a signal generated after a measured value is compared with an expected value to the power amplifier, the power amplifier acts a new excitation signal on the ceramic chip (4) in the oscillator, the vibration amplitude of the oscillator is further changed, the extrusion effect is adjusted to be strong or weak, and the suspension height of the suspension plate (8) reaches the expected value.
4. The ultrasonic extrusion suspension bearing with high rigidity and large bearing capacity as claimed in claim 1, wherein: the supporting frame (1) is a detachable supporting frame, the fixed platform (2) is fastened on the supporting frame (1) through bolts, and the vibrator is fixedly connected to the fixed platform (2) through bolts.
5. The ultrasonic extrusion suspension bearing with high rigidity and large bearing capacity as claimed in claim 1, wherein: the ceramic plates (4) are provided with a plurality of pieces, and every two ceramic plates (4) are connected through an electrode plate.
6. The ultrasonic extrusion suspension bearing with high rigidity and large bearing capacity as claimed in claim 1 or 5, wherein: the ceramic plate (4) is connected with the front cover plate (3) and the rear cover plate (5) through pretightening bolts.
7. The ultrasonic extrusion suspension bearing with high rigidity and large bearing capacity as claimed in claim 1, wherein: a support table (302) is arranged in the middle of the inner ring of the annular gas supply groove (301) in the upper end face of the front cover plate (3), and the height of the support table (302) is lower than the depth of the annular gas supply groove (301); the stepped circular truncated cone at the lower end of the porous block (7) is connected in the annular air supply groove (301) in a matching manner, and the lower end face of the stepped circular truncated cone is connected with the support table (302) in a contact manner.
8. The ultrasonic extrusion suspension bearing with high rigidity and large bearing capacity as claimed in claim 1 or 7, wherein: the end face of the porous mass block (7) is provided with a groove or a surface microtexture capable of improving the lubricating property.
9. The ultrasonic extrusion suspension bearing with high rigidity and large bearing capacity as claimed in claim 1 or 7, wherein: the porous mass block (7) is adhered and connected to the upper end face of the front cover plate (3) by epoxy resin.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202111405693.9A CN114135583B (en) | 2021-11-24 | 2021-11-24 | High-rigidity large-bearing ultrasonic extrusion suspension bearing |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202111405693.9A CN114135583B (en) | 2021-11-24 | 2021-11-24 | High-rigidity large-bearing ultrasonic extrusion suspension bearing |
Publications (2)
Publication Number | Publication Date |
---|---|
CN114135583A true CN114135583A (en) | 2022-03-04 |
CN114135583B CN114135583B (en) | 2024-03-15 |
Family
ID=80391320
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202111405693.9A Active CN114135583B (en) | 2021-11-24 | 2021-11-24 | High-rigidity large-bearing ultrasonic extrusion suspension bearing |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN114135583B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN115890275A (en) * | 2023-02-20 | 2023-04-04 | 中国机械总院集团宁波智能机床研究院有限公司 | Static pressure composite rotary table and protection method thereof |
Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007321811A (en) * | 2006-05-30 | 2007-12-13 | National Univ Corp Shizuoka Univ | Non-contact supporting device |
CN101311568A (en) * | 2002-09-26 | 2008-11-26 | Ntn株式会社 | Dynamic pressure bearing device |
JP2009068547A (en) * | 2007-09-11 | 2009-04-02 | Nsk Ltd | Spindle device |
CN103047341A (en) * | 2012-12-19 | 2013-04-17 | 哈尔滨工业大学 | Vibration isolator with pneumatic flotation ball bearing for angular decoupling and magnetic suspension plane for driving and positioning |
CN104675859A (en) * | 2015-03-16 | 2015-06-03 | 湖南大学 | Ultrasonic thrust air bearing with curve grooves |
US20170082144A1 (en) * | 2014-03-18 | 2017-03-23 | Huazhong University Of Science And Technology | Active airbearing device |
CN109812501A (en) * | 2019-01-29 | 2019-05-28 | 湖南大学 | The flexible support tilting bush squeeze film gas thrust bearing to be suspended based on near-field ultrasound |
CN110094425A (en) * | 2019-06-04 | 2019-08-06 | 中国工程物理研究院机械制造工艺研究所 | A kind of static pressure air-bearing axial bearing |
CN111059149A (en) * | 2019-12-23 | 2020-04-24 | 昆明理工大学 | Energy collecting device based on acoustic wave suspension and energy recovery method thereof |
CN111442030A (en) * | 2020-04-21 | 2020-07-24 | 大连民族大学 | Air supporting system |
CN113217541A (en) * | 2021-06-04 | 2021-08-06 | 北京工业大学 | Porous ring belt exhaust type static pressure air-float thrust bearing |
CN113357263A (en) * | 2021-06-25 | 2021-09-07 | 合肥工业大学 | Extrusion film auxiliary pressure stabilization static pressure air flotation supporting device and control method |
-
2021
- 2021-11-24 CN CN202111405693.9A patent/CN114135583B/en active Active
Patent Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101311568A (en) * | 2002-09-26 | 2008-11-26 | Ntn株式会社 | Dynamic pressure bearing device |
JP2007321811A (en) * | 2006-05-30 | 2007-12-13 | National Univ Corp Shizuoka Univ | Non-contact supporting device |
JP2009068547A (en) * | 2007-09-11 | 2009-04-02 | Nsk Ltd | Spindle device |
CN103047341A (en) * | 2012-12-19 | 2013-04-17 | 哈尔滨工业大学 | Vibration isolator with pneumatic flotation ball bearing for angular decoupling and magnetic suspension plane for driving and positioning |
US20170082144A1 (en) * | 2014-03-18 | 2017-03-23 | Huazhong University Of Science And Technology | Active airbearing device |
CN104675859A (en) * | 2015-03-16 | 2015-06-03 | 湖南大学 | Ultrasonic thrust air bearing with curve grooves |
CN109812501A (en) * | 2019-01-29 | 2019-05-28 | 湖南大学 | The flexible support tilting bush squeeze film gas thrust bearing to be suspended based on near-field ultrasound |
CN110094425A (en) * | 2019-06-04 | 2019-08-06 | 中国工程物理研究院机械制造工艺研究所 | A kind of static pressure air-bearing axial bearing |
CN111059149A (en) * | 2019-12-23 | 2020-04-24 | 昆明理工大学 | Energy collecting device based on acoustic wave suspension and energy recovery method thereof |
CN111442030A (en) * | 2020-04-21 | 2020-07-24 | 大连民族大学 | Air supporting system |
CN113217541A (en) * | 2021-06-04 | 2021-08-06 | 北京工业大学 | Porous ring belt exhaust type static pressure air-float thrust bearing |
CN113357263A (en) * | 2021-06-25 | 2021-09-07 | 合肥工业大学 | Extrusion film auxiliary pressure stabilization static pressure air flotation supporting device and control method |
Non-Patent Citations (1)
Title |
---|
景敏卿;刘恒;沈园;虞烈;: "新型挤压膜气体轴承的研究", 西安交通大学学报, no. 07, 10 July 2008 (2008-07-10) * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN115890275A (en) * | 2023-02-20 | 2023-04-04 | 中国机械总院集团宁波智能机床研究院有限公司 | Static pressure composite rotary table and protection method thereof |
Also Published As
Publication number | Publication date |
---|---|
CN114135583B (en) | 2024-03-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN114135583A (en) | High-rigidity large-bearing ultrasonic extrusion suspension bearing | |
CN102518740B (en) | Ultrasonic levitation and air floatation mixed suspension damping device | |
CN111442030B (en) | Air supporting system | |
CN212272829U (en) | Air supporting system | |
CN105240452A (en) | Local bearing type active vibration isolation device capable of being applied to ultrahigh vacuum system | |
CN103994059A (en) | Resonance piezoelectric fan with cymbal-shaped cavity | |
CN110064890B (en) | Sound liquid solid coupling two-dimensional ultrasonic deep rolling processing device | |
CN208600110U (en) | Large stereoization sieves Environmentally friendly screen | |
CN104942663B (en) | Hyperbolic disk grinding crowned roller processing unit (plant) and processing method under ultrasonication | |
CN111760514A (en) | Liquid stirring device with good mixing effect for machining | |
CN111878371B (en) | Spring type piezoelectric air pump | |
CN104492558B (en) | Diaphragm type hydraulic exciting dual-drum vibration mill | |
CN103418520B (en) | A kind of medium frequency ultrasonic atomizer | |
CN113202718A (en) | Flexible cavity resonance piezoelectric pump for industrial lubrication | |
CN204321818U (en) | A kind of single-electrical signal excitation ultrasonic elliptical vibratory burnishing device | |
CN114412923A (en) | Novel gas suspension bearing | |
CN202066764U (en) | Rotary disk cavitation testing stand based on flexible rotor | |
CN211875296U (en) | Quick positioning and hoisting device for building ventilation pipeline | |
CN113828876A (en) | Ultrasonic-assisted rotating pipe electrolytic machining device, machine tool and method | |
CN210367720U (en) | Ultrasonic crushing device with mechanical crushing function | |
CN211134586U (en) | Composite vibrating screen | |
CN102900770A (en) | High-speed hybrid electric spindle sealing structure | |
CN112332699A (en) | Pipeline pressure pulsation energy collection device with supercharging device | |
CN214063257U (en) | Portable pneumatic diaphragm pump | |
CN113048040A (en) | Plunger diaphragm pump for conveying high-density medium |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant |