CN113357263A - Extrusion film auxiliary pressure stabilization static pressure air flotation supporting device and control method - Google Patents
Extrusion film auxiliary pressure stabilization static pressure air flotation supporting device and control method Download PDFInfo
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- CN113357263A CN113357263A CN202110709904.1A CN202110709904A CN113357263A CN 113357263 A CN113357263 A CN 113357263A CN 202110709904 A CN202110709904 A CN 202110709904A CN 113357263 A CN113357263 A CN 113357263A
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
- F16C32/0607—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being retained in a gap, e.g. squeeze film bearings
- F16C32/0611—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being retained in a gap, e.g. squeeze film bearings by means of vibrations
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Abstract
The invention discloses a static pressure air-flotation supporting device with an extrusion film for assisting pressure stabilization, which comprises an air supply device, a floating body and a carrier which are oppositely arranged, wherein the air supply device introduces air flow between the floating body and the carrier to form a static pressure bearing air film between the floating body and the carrier, and the static pressure air-flotation supporting device also comprises a high-frequency vibration generator which is arranged on the carrier, and the high-frequency vibration generator drives the carrier to vibrate in a high frequency. The invention can realize the function of inhibiting the low-frequency vibration of the static pressure bearing air film, and can further avoid the resonance of the floating body along with the static pressure bearing air film, thereby improving the stability of the air floatation bearing resonance.
Description
Technical Field
The invention relates to the field of air floatation support, in particular to a static pressure air floatation support device with an extrusion film for assisting pressure stabilization and a control method.
Background
The air bearing and the air floatation support are common support modes in modern industry, and generally comprise a carrier and a floating body, wherein the carrier and the floating body are opposite up and down, the floating body is arranged above the carrier, constant-pressure airflow is introduced between the carrier and the floating body through an air supply device, a static pressure bearing air film is formed between the carrier and the floating body, and the floating body is upwards floated relative to the carrier through the static pressure bearing air film, so that the floating body is supported.
In the application of air bearing technology such as air bearing, air bearing and transmission, the stability control of air bearing is one of the technical difficulties. Because the rigidity of the generated static pressure bearing air film is very low, low-frequency vibration (or oscillation) is easy to occur, when the vibration frequency of the static pressure bearing air film is close to the natural frequency of the floating body during resonance, the floating body can even be caused to resonate, and the air floatation supporting system can be unstably unstable and cannot work normally in severe cases. In the existing air-floating supporting technology, the stability of the air-floating support is generally improved by properly designing the geometric shapes and sizes of a nozzle, a pressure-bearing cavity and a throttling device in an air supply device, and the problem of resonance of a floating body along with a static pressure bearing air film is still not fundamentally solved.
Disclosure of Invention
The invention aims to provide a static pressure air-flotation supporting device with an extrusion film for assisting pressure stabilization and a control method, and aims to solve the problem that the stability of a floating body is adversely affected by low-frequency vibration of a static pressure bearing air film in the air-flotation supporting in the prior art.
In order to achieve the purpose, the technical scheme adopted by the invention is as follows:
the invention relates to a static pressure air-float supporting device with auxiliary pressure stabilization of a squeeze film, wherein at least one high-frequency vibration generator is arranged on a carrier of the static pressure air-float supporting device, the high-frequency vibration generator drives the carrier to vibrate in a high frequency, and the direction of the high-frequency vibration is parallel to the floating direction of a floating body, so that the squeeze film effect for inhibiting the low-frequency vibration of the static pressure bearing air film is generated in the static pressure bearing air film. The vibration frequency of the extrusion die effect is the same as the vibration frequency of the high-frequency vibration, so that the vibration frequency of the high-frequency vibration is superposed on the static pressure bearing air film, and the low-frequency vibration of the static pressure bearing air film is restrained. By suppressing the low-frequency vibration of the static pressure bearing air film, the influence of the low-frequency vibration of the static pressure bearing air film on the floating body can be avoided.
Furthermore, the superposition result of the vibration frequency of the high-frequency vibration generator for driving the carrier to vibrate at high frequency and the vibration frequency of the static pressure bearing air film during low-frequency vibration is not equal to the natural frequency of the floating body during resonance, so that the floating body is further prevented from resonating with the static pressure bearing air film during low-frequency vibration of the static pressure bearing air film on the basis of effectively inhibiting the low-frequency vibration of the static pressure bearing air film.
Meanwhile, the high-frequency vibration generator drives the amplitude of the high-frequency vibration of the carrier to be less than or equal to the amplitude of the resonance of the floating body.
The invention also discloses a control method of the static pressure air-float supporting device for the auxiliary pressure stabilization of the extrusion film, which comprises the steps of firstly collecting and measuring the vibration frequency of the current low-frequency vibration of the static pressure bearing air film and the natural frequency of the floating body during resonance; and then the high-frequency vibration generator drives the carrier to vibrate at high frequency, and the superposition result of the vibration frequency of the high-frequency vibration and the current vibration frequency of the static pressure bearing air film is not equal to the natural frequency of the floating body by setting the parameters of the high-frequency vibration generator, so that the resonance of the floating body is avoided.
Meanwhile, in the method, the amplitude of the floating body during resonance is also measured, and the amplitude of the high-frequency vibration of the carrier is smaller than or equal to the amplitude of the floating body during resonance by setting the parameters of the high-frequency vibration generator.
Compared with the prior art, the invention enables the carrier to generate high-frequency vibration through the high-frequency vibration generator, thereby enabling the static pressure bearing air film supported by the air floatation to generate a squeeze film effect, enabling the frequency of the high-frequency vibration to be superposed on the static pressure bearing air film through the squeeze film effect, realizing the function of inhibiting the low-frequency vibration of the static pressure bearing air film, and further avoiding the floating body from resonating along with the static pressure bearing air film by controlling the vibration frequency of the high-frequency vibration generated by the carrier through the high-frequency vibration generator. Therefore, the stability of the air floatation support resonance can be improved.
Drawings
FIG. 1 is a schematic diagram of the basic structure of the device of the present invention.
Fig. 2 is a schematic diagram of the apparatus of the present invention.
Fig. 3 is a diagram illustrating an application example of the present invention.
Detailed Description
The invention is further illustrated with reference to the following figures and examples.
As shown in fig. 1, the basic device of the present invention includes a floating body 01 and a carrier 03 which are opposite to each other up and down, wherein the floating body 01 is on the upper side, the carrier 03 is on the lower side, and the lower surface of the floating body 01 and the upper surface of the carrier 03 are parallel to each other. An axial vertical throttling hole 02 and a mounting hole are formed in the middle of the carrier 03, wherein the upper end of the throttling hole 02 is located on the upper surface of the carrier 03, the lower end of the throttling hole 02 is coaxially communicated with the upper end of the mounting hole, and the lower end of the mounting hole is located on the lower surface of the carrier 03. The basic device of the invention adopts the air supply nozzle 05 as the air supply device, the air supply nozzle 05 is coaxially inserted into the mounting hole, the lower end of the air supply nozzle 05 is communicated with an external constant pressure air source, the upper end of the air supply nozzle 05 is introduced with constant pressure air flow into the gap between the floating body 01 and the carrier 03 through the throttling hole 02, thereby forming a static pressure bearing air film which enables the floating body 01 to float upwards in the gap between the floating body 01 and the carrier 03. Meanwhile, a plurality of high-frequency vibration generators 04 (two in fig. 1) are fixed to the bottom of the carrier 03, and the high-frequency vibration generators 04 are electrically connected to an external controller, and the external controller controls the high-frequency vibration generators 04 to operate.
In fig. 1, Q0 represents the supply air flow, the direction of which is indicated by the corresponding positional arrow in fig. 1; q1 represents the direction of gas flow in the hydrostatic carrier gas film between the carrier 03 and the floating body 01, i.e. the horizontal direction all around, as indicated by the corresponding positional arrows in fig. 1. The dither generator 04 drives the carrier 03 to dither in a direction perpendicular to Q1, i.e., up and down. When the high-frequency vibration generator 04 does not work, the supplied air flow Q0 with constant pressure flows into the gap between the carrier 03 and the floating body 01 through the throttling hole 02 to form a static pressure bearing air film to float the floating body 01, when the high-frequency vibration generator 04 works, a squeeze film effect is generated in the static pressure bearing air film between the floating body 01 and the carrier 03, the squeeze film effect is superposed and acted on the original static pressure bearing air film flow field, the static pressure bearing air film can be inhibited from generating low-frequency vibration, and the static pressure bearing air film is difficult to form vibration close to the natural frequency of the floating body, so that the purpose of improving the stability of the whole air floatation support is achieved.
As shown in fig. 2, is the principle of the present invention. When the gas extrusion film effect occurs, the gas in the static pressure bearing gas film flows back and forth rapidly along the direction shown by Q1, the gas pressure and the gas flow direction in the static pressure bearing gas film have the characteristic of rapid pulsation change, and the gas pressure pulsation frequency and the gas flow direction change frequency are the same as the vibration frequency of the high-frequency vibration of the carrier 03 along the R1 direction (namely the up-down direction). Therefore, the squeeze film effect by the high-frequency vibration of the carrier 03 can exert a superimposed influence on the low-frequency vibration of the static pressure carrier gas film, and further, the low-frequency vibration of the static pressure carrier gas film can be suppressed.
The invention discloses a control method of a static pressure air-float supporting device for assisting pressure stabilization of an extrusion film, which comprises the following steps:
step 1, measuring the vibration frequency of the current low-frequency vibration of a static pressure bearing air film, and measuring the natural frequency and the amplitude of the floating body when the floating body resonates;
step 2, enabling the high-frequency vibration generator to drive the carrier to vibrate in a high frequency mode, setting parameters of the high-frequency vibration generator, and enabling the superposition result of the vibration frequency of the high-frequency vibration and the current vibration frequency of the static pressure bearing air film measured in the step 1 not to be equal to the inherent frequency of the floating body measured in the step 1; and the amplitude of the high-frequency vibration of the carrier is less than or equal to the amplitude of the resonance of the floating body.
Fig. 3 shows an example of the application of the present invention. This example is illustrated by a float production of a glass substrate.
In fig. 3, the floating plate body 03a corresponds to the carrier 03 in the basic device of the present invention, and the glass substrate 01a corresponds to the floating body 01 in the basic device of the present invention. A plurality of throttle holes 02a and mounting holes which are communicated coaxially in a one-to-one correspondence manner are formed in the air floating plate body 03a, and the arrangement structures of the throttle holes 02a and the mounting holes are the same as that of the basic device. Wherein, a positive pressure air supply nozzle 05a is inserted in part of the mounting holes, and a negative pressure air suction nozzle 05b is inserted in the other mounting holes, the positive pressure air supply nozzle 05a is used for introducing air flow into the gap between the air floating plate body 03a and the glass substrate 01a through the corresponding throttling hole, and the negative pressure air suction nozzle 05b is used for leading out the air flow in the gap between the air floating plate body 03a and the glass substrate 01a through the corresponding throttling hole. A plurality of piezoelectric ceramic high-frequency vibrators 04a are fixed to the bottom of the air floating plate body 03a, and are used for generating high-frequency vibration in the air floating plate body 03 a. Meanwhile, linear motion guide rails 11 are respectively arranged on two symmetrical sides of the air floating plate body 03a, sliding parts are respectively installed on the linear motion guide rails 11 on each side in a sliding mode, the sliding parts are respectively attracted and fixed with the bottom of the corresponding side of the glass substrate 01a through suckers 12, and the glass substrate 01a slides in the horizontal direction through the linear motion guide rails 11.
When an air flow with a certain pressure is connected to the positive pressure air supply nozzle 05a, the air flow flows into a gap between the glass substrate 01a and the air floating plate body 03a through the orifice 02a, then a part of the air flow is sucked through the negative pressure air suction nozzle 13, and the other part of the air flow flows out of the gap between the air floating plate body 03a and the glass substrate 01a and is discharged into the surrounding atmosphere, so that a static pressure bearing air film is formed in the gap between the air floating plate body 03a and the glass substrate 01 a. When the air flow flows in the gap, a static pressure bearing air film is formed to enable the glass substrate 01a to float to a certain height, and the working principle of the glass substrate is the same as that of the static pressure air floating support of the conventional glass substrate. The linear motion guide 11 moves the glass substrate 01a linearly in the horizontal direction on the static pressure carrier gas film by the suction pad 12.
A plurality of piezoelectric ceramic high-frequency vibrators 04a are fixedly bonded on the lower surface of the air floating plate body 03a, and when the piezoelectric ceramic high-frequency vibrators 04a are electrified to work, the air floating plate body 03a can generate high-frequency vibration, so that the purpose of improving the static pressure air floating supporting stability of the glass substrate is achieved. The high-frequency vibration frequency and amplitude generated by the air floating plate body 03a can be determined through process experiments: for a specific glass substrate 01a, the frequency and amplitude of the piezoelectric ceramic high-frequency vibrator 04a are adjusted, and the amplitude of the glass substrate 01a is measured by a laser vibration meter, so that the frequency and amplitude numerical value range of the piezoelectric ceramic high-frequency vibrator 04a corresponding to the amplitude of the glass substrate 01a not exceeding the allowable value can be obtained.
The embodiments of the present invention are described only for the preferred embodiments of the present invention, and not for the limitation of the concept and scope of the present invention, and various modifications and improvements made to the technical solution of the present invention by those skilled in the art without departing from the design concept of the present invention shall fall into the protection scope of the present invention, and the technical content of the present invention which is claimed is fully set forth in the claims.
Claims (7)
1. The device is characterized by also comprising a high-frequency vibration generator which is arranged on the carrier, and the high-frequency vibration generator drives the carrier to vibrate at high frequency, so that an extrusion film effect for inhibiting the low-frequency vibration of the static-pressure bearing air film is generated in the static-pressure bearing air film.
2. The squeeze-film assisted pressure stabilization aerostatic air bearing device of claim 1, wherein the high-frequency vibration generator is a piezoceramic high-frequency vibrator.
3. The squeeze-film-assisted pressure-stabilized aerostatic air-bearing support device according to claim 1, wherein the high-frequency vibration generator drives the carrier to vibrate at high frequency in a direction parallel to the floating body floating direction, thereby causing the static pressure carrier film to generate a squeeze-film effect for suppressing low-frequency vibration of the static pressure carrier film.
4. The squeeze-film-assisted pressure-stabilized aerostatic air bearing device according to claim 3, wherein the high-frequency vibration generator drives the carrier to vibrate at a high frequency, and the superposition of the high-frequency vibration of the static pressure carrier air film and the low-frequency vibration of the static pressure carrier air film is not equal to the natural frequency of the floating body when the floating body resonates, thereby suppressing the floating body from resonating with the static pressure carrier air film vibrating at a low frequency.
5. The squeeze-film-assisted pressure-stabilized aerostatic air bearing device according to claim 4, characterized in that the dither generator drives the carrier to dither with an amplitude less than or equal to the amplitude of the floating body at resonance.
6. A control method of the static pressure air-float supporting device based on the extrusion film auxiliary pressure stabilization of any one of the claims 1 to 5 is characterized in that: the method comprises the following steps:
step 1, measuring the vibration frequency of the current low-frequency vibration of the static pressure bearing air film, and measuring the natural frequency of the floating body during resonance;
and 2, enabling the high-frequency vibration generator to drive the carrier to vibrate at high frequency, setting parameters of the high-frequency vibration generator, and enabling the superposition result of the vibration frequency of the high-frequency vibration and the current vibration frequency of the static pressure bearing air film measured in the step 1 not to be equal to the natural frequency of the floating body measured in the step 1.
7. The method for controlling the static pressure air-float supporting device with the auxiliary pressure stabilization of the extrusion film according to claim 6, is characterized in that: the amplitude of the floating body in resonance is also measured in the step 1; and in the step 2, parameters of the high-frequency vibration generator are set, so that the amplitude of the high-frequency vibration of the carrier is smaller than or equal to the amplitude of the resonance of the floating body.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202110709904.1A CN113357263B (en) | 2021-06-25 | 2021-06-25 | Extrusion film auxiliary pressure stabilization static pressure air flotation supporting device and control method |
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| CN202110709904.1A CN113357263B (en) | 2021-06-25 | 2021-06-25 | Extrusion film auxiliary pressure stabilization static pressure air flotation supporting device and control method |
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| CN113357263A true CN113357263A (en) | 2021-09-07 |
| CN113357263B CN113357263B (en) | 2023-04-18 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114135583A (en) * | 2021-11-24 | 2022-03-04 | 郑州大学 | High-rigidity large-bearing ultrasonic extrusion suspension bearing |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114135583A (en) * | 2021-11-24 | 2022-03-04 | 郑州大学 | High-rigidity large-bearing ultrasonic extrusion suspension bearing |
| CN114135583B (en) * | 2021-11-24 | 2024-03-15 | 郑州大学 | High-rigidity large-bearing ultrasonic extrusion suspension bearing |
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| CN113357263B (en) | 2023-04-18 |
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