528618 A7 _B7 五、發明説明（1 ) 【發明之詳細說明】 【發明所屬之技術領域】 本發明係有關於針對玻璃基板或半導體晶圓等的基板 ，將顯像液、洗淨液、S 0 G溶液、抗鈾液等予以塗佈之 裝置。 【以往之技術】 在液晶顯示器、電漿顯示器、半導體元件等的製程中 ，爲了在基板上形成各種被膜，或塗佈洗淨液或顯像液， 而使用了塗佈裝置。 作爲習知的塗佈裝置，例如日本特開zp 4 一 3 4 1 3 6 7號公報中所揭示的，從噴嘴將塗佈液滴 到基板的中心，然後使基板旋轉，利用離心力使塗佈液均 勻地塗佈在基板上的旋轉塗佈型態的裝置，或是藉由噴霧 器將塗佈液均勻地塗佈在基板上的型態。 在旋轉塗佈型態或噴霧形態中，被塗佈在基板上的有 效塗佈液的量很少而被白白浪費掉的量卻很多。作爲一種 不會浪費掉塗佈液的塗佈裝置，係有被揭示於日本特開昭 6 3 — 2 4 6 8 2 0號公報中的滾輪式被膜器。不過，它 卻有難以均勻塗佈的問題點。 在此，作爲可以減少塗佈液的浪費，而且可以均句地 塗佈的裝置，如日本特開昭6 1 - 6 5 4 3 5號公報或日 本特開昭6 3 - 1 5 6 3 2 0號公報中所揭示，可以使用 將狹縫噴嘴和旋轉方式加以組合的裝置。這種裝置是藉由 本紙張尺度適用中國國家標準（CNS ) A4規格(^210X 297公釐)~-- I — I — 衣—丨 (請先閱讀背面之注意事項再填寫本頁)528618 A7 _B7 V. Description of the invention (1) [Detailed description of the invention] [Technical field to which the invention belongs] The present invention relates to a substrate for a glass substrate, a semiconductor wafer, or the like. G solution, anti-uranium solution, etc. for coating. [Previous Technology] In the manufacturing processes of liquid crystal displays, plasma displays, semiconductor devices, etc., a coating device is used in order to form various films on a substrate, or to apply a cleaning solution or a developing solution. As a conventional coating device, for example, disclosed in Japanese Patent Application Laid-Open No. Zp 4-3 4 1 3 6 7, a coating liquid is dropped from a nozzle to the center of a substrate, and then the substrate is rotated, and the coating is applied by centrifugal force. A device of a spin coating type in which a liquid is uniformly coated on a substrate, or a type in which a coating liquid is uniformly coated on a substrate by a sprayer. In a spin coating type or a spray form, the amount of effective coating solution applied to the substrate is small and the amount wasted in vain. As a coating device that does not waste the coating liquid, there is a roller-type film coater disclosed in Japanese Patent Application Laid-Open No. Sho 6 3-2 4 6 8 2. However, it has a problem that it is difficult to apply uniformly. Here, as a device that can reduce the waste of the coating liquid and can apply uniformly, such as Japanese Patent Laid-Open No. 6 1-6 5 4 3 5 or Japanese Patent Laid-Open No. 6 3-1 5 6 3 2 It is disclosed in JP 0 that a device combining a slit nozzle and a rotation system can be used. This device is based on Chinese paper standard (CNS) A4 specification (^ 210X 297 mm) ~-I — I — clothing — 丨 (Please read the precautions on the back before filling this page)
、1T 經濟部智慈財產局員工消費合作社印製 -4 - 528618 A 7 B7 經濟部智慧財產局員工消費合作社印製 五、發明説明（2 ) 狹縫噴嘴在基板上將塗佈液塗佈成某種程度的厚度，然後 藉由使基板旋轉來達到塗佈液厚度均一化的目的。 又，若是述及關於被組裝在液晶顯示裝置中的玻璃基 板的話，對提高生產性而言，則是在大型的玻璃基板上形 成被膜，然後以符合各液晶面板的大小來加以切斷會比較 有利。由於這樣的因素致使近來係朝基板大型化（每邊的 邊長超過1公尺的矩形）發展。 基板的尺寸若是朝大型化發展的話，就變得很難使基 板旋轉。也就是說，使每邊的邊長超過1公尺的矩形基板 以每分鐘數千轉的速度旋轉，所要的裝置構造會變得極爲 複雜，再加上若是考慮到會有基板破損的事態發生的話， 會使大型基板高速旋轉有許多不利點。 另一方面，從以往的狹縫噴嘴和旋轉方式加以組合所 成的裝置，可以省掉使基板旋轉的機構，而只要考慮到狹 縫噴嘴就可以了。不過，當塗佈時係將狹縫噴嘴持續移動 到基板的上方而將塗佈液供給到基板表面上，這又必定會 使狹縫噴嘴在移動之際發生振動。由於這種振動會使被供 給到基板表面上的塗佈液的量產生變動，此即爲造成膜厚 不均勻的原因。 在此，爲了消除掉肇因於塗佈元件（狹縫噴嘴）的振 動所造成的膜厚度不均勻而使用了線性馬達，試著將支擦 塗佈元件的部分以相對於基底做成非接觸的狀態。 【發明所欲解決之課題】 (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS ) A4規格（21〇X；297公釐） - 5- 528618 A7 B7 五、發明説明（3 ) 將安裝有塗佈元件的構件做成可以相對於基底作非接 觸式的移動，雖然可以消除掉肇因於振動所導致塗佈的不 均勻，不過，若僅是如此尙難謂充份。 也就是說，以往係將供給塗佈液到塗佈元件上的塗佈 液輸送泵固定在基底等不會移動的地方，在該塗佈液輸送 泵和塗佈元件之間藉由彈性軟管連接。因此，若是塗佈元 件移動的話，彈性軟管也會隨之變形，使配管的內容積變 化，從塗佈元件所噴出的塗佈液量會有微妙的變化。於是 ，這就成爲膜厚度不均勻的原因了。 【解決課題之手段】 關於用來解決上述課題的本發明之塗佈裝置，係具備 著：具備將基板以水平狀態載置的檯盤之基底；和相對於 該基底透過線性馬達可以加以移動的移動構件；和使該移 動構件以相對於基底地浮上來的浮上手段；和可以自由昇 降地被支撐在前述移動構件之昇降架；和被以水平狀態安 裝在該昇降架上而狹縫狀的噴出口正對著檯盤上方的塗佈 元件之塗佈裝置，其中，在前述移動構件或昇降架上安裝 著塗佈液輸送泵。 藉由將塗佈液輸送泵安裝在昇降架上，使塗佈液輸送 泵和塗佈元件之間的相對位置不會產生變化，而連接在塗 佈液輸送泵和塗佈元件之間的彈性軟管的配管內容積就不 會變動。該結果使從塗佈元件噴出的量保持一定，使被膜 的厚度均勻。 本紙張尺度適用中國國家標準（CNS ) Α4規格（210X297公釐） — (請先閲讀背面之注意事項再填寫本頁)Printed by 1T Consumer Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs-4-528618 A 7 B7 Printed by Consumer Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the invention (2) The slit nozzle applies the coating liquid on the substrate to To some extent, the thickness of the coating liquid is uniformized by rotating the substrate. In addition, if the glass substrate incorporated in a liquid crystal display device is mentioned, in order to improve productivity, a film is formed on a large glass substrate, and then it is cut to match the size of each liquid crystal panel. advantageous. These factors have led to the recent increase in the size of substrates (rectangles with sides longer than 1 meter on each side). If the size of the substrate becomes larger, it becomes difficult to rotate the substrate. In other words, if a rectangular substrate with a side length exceeding 1 meter on each side is rotated at a speed of several thousand revolutions per minute, the required device structure will become extremely complicated. In addition, if it is considered that a substrate damage may occur In this case, there are many disadvantages that can cause large substrates to rotate at high speed. On the other hand, a device formed by combining a conventional slit nozzle and a rotation method can omit a mechanism for rotating the substrate, and only needs to consider the slit nozzle. However, when coating, the slit nozzle is continuously moved above the substrate and the coating liquid is supplied to the surface of the substrate, which will inevitably cause the slit nozzle to vibrate during the movement. Due to such vibration, the amount of the coating liquid supplied to the surface of the substrate varies, and this is the cause of uneven film thickness. Here, a linear motor is used to eliminate the uneven film thickness caused by the vibration of the coating element (slit nozzle). Try to make the portion of the coating element that is not in contact with the substrate non-contact. status. [Problems to be solved by the invention] (Please read the precautions on the back before filling this page) The paper size applies to the Chinese National Standard (CNS) A4 specification (21〇X; 297 mm)-5- 528618 A7 B7 V. Description of the invention (3) The component mounted with the coating element can be made to move non-contactly with respect to the substrate, although the uneven coating caused by vibration can be eliminated, but if it is so difficult, That is sufficient. That is, in the past, a coating liquid conveying pump for supplying a coating liquid to a coating element was fixed to a place where the substrate or the like would not move, and an elastic hose was connected between the coating liquid conveying pump and the coating element. connection. Therefore, if the coating element is moved, the elastic hose will be deformed accordingly, the inner volume of the piping will be changed, and the amount of the coating liquid ejected from the coating element will be slightly changed. Therefore, this becomes the cause of uneven film thickness. [Means for Solving the Problem] The coating device of the present invention for solving the above-mentioned problems is provided with a base having a platen for placing a substrate in a horizontal state, and a base which can be moved by a linear motor with respect to the base. A moving member; and a floating means for floating the moving member relative to the base; and a lifting frame that can be freely lifted and supported on the moving member; and a slit-shaped mounting on the lifting frame in a horizontal state. The discharge port is directly opposite the coating device of the coating element above the platen, wherein a coating liquid transfer pump is mounted on the moving member or the lifting frame. By installing the coating liquid delivery pump on the lifting frame, the relative position between the coating liquid delivery pump and the coating element will not change, and the elasticity connected between the coating liquid delivery pump and the coating element will not change. The inner volume of the piping does not change. As a result, the amount ejected from the coating element was kept constant, and the thickness of the film was made uniform. This paper size applies to China National Standard (CNS) Α4 specification (210X297 mm) — (Please read the precautions on the back before filling this page)
、1T 經濟部智慈財產局員工消費合作社印製 -6- 528618 A7 B7 經濟部智慈財產局員工消費合作社印製 五、發明説明（4 ) 前述線性馬達以及浮上手段若是被配置成沿著移動構 件的移動方向分別地成對平行的話則是最理想的。因爲當 將線性馬達以及浮上手段在例如基底的中央處只配置一條 時恐怕會使移動構件的移動欠缺安定性。 又，作爲浮上手段，會想到空氣軸承或磁鐵，若是空 氣軸承的話，所考慮到的結構是在滑動構件內部設置空洞 ，然後供給加壓氣體到該空洞，將空氣從形成於滑動構件 內面（面向軌道的面）的孔噴出來。 【發明的實施形態】 以下根據所附的本發明實施形態的圖面來加以說明。 第1圖是關於本發名的塗佈裝置的正面圖，第2圖是本塗 佈裝置的側面圖，第3圖是第1圖中沿著A - A線的剖面 圖，第4圖是空氣軸承的一部分的擴大剖面圖，第5圖是 用來說明塗佈裝置的高度感應器的作用的圖。 塗佈裝置係於基底1的上表面透過備有高度調整機構 的腳2來裝設檯盤3。爲了在該檯盤3上表面載置的玻璃 基板等的被處理基板W能呈現正確的水平度，而旋轉裝設 在腳2的螺帽來進行檯盤3上各部高度的微調。 又，在基底1的上表面裝設有上下方向動作的氣缸單 元4，該氣缸單元4的桿上裝設著水平平板5，在該水平 平板5上裝設有用來將被處理基板W從檯盤3舉起之插栓 6。另外，在檯盤3上形成插栓6所貫通的孔7。 另一方面，在基底1的上表面配置係平行地裝設有兩 (請先閲讀背面之注意事項再填寫本頁)Printed by the 1T Consumer Goods Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs -6 528618 A7 B7 Printed by the Consumer Goods Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the Invention (4) If the aforementioned linear motor and floating means are configured to move along It is most desirable if the moving directions of the members are parallel in pairs. This is because when the linear motor and the floating means are arranged only one at the center of the base, for example, the movement of the moving member may be unstable. In addition, as a floating means, an air bearing or a magnet is conceived. In the case of an air bearing, a structure is considered in which a cavity is provided inside the sliding member, and then a pressurized gas is supplied to the cavity to form air from the inner surface of the sliding member ( Holes facing the track). [Embodiment of the invention] The following description is based on the attached drawings of the embodiment of the invention. Fig. 1 is a front view of the coating device of the present invention, Fig. 2 is a side view of the coating device, and Fig. 3 is a cross-sectional view taken along line A-A in Fig. 1 and Fig. 4 is An enlarged sectional view of a part of the air bearing. FIG. 5 is a diagram for explaining the function of the height sensor of the coating apparatus. The coating device is provided on the upper surface of the substrate 1 and mounts the platen 3 through the feet 2 provided with a height adjustment mechanism. In order that the substrate W to be processed such as a glass substrate placed on the upper surface of the platen 3 can exhibit a correct level, the nut mounted on the foot 2 is rotated to finely adjust the height of each portion of the platen 3. A cylinder unit 4 that moves in the vertical direction is mounted on the upper surface of the substrate 1. A horizontal flat plate 5 is mounted on the rod of the cylinder unit 4. The horizontal flat plate 5 is mounted to remove the substrate W to be processed from the stage. Disk 3 lifts the plug 6. In addition, a hole 7 penetrated by the plug 6 is formed in the platen 3. On the other hand, the upper surface of the base 1 is arranged in parallel. (Please read the precautions on the back before filling this page)
本纸張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 528618 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明説明（5 ) 條朝左右方向延伸的軌道8、8，沿著該軌道8、8可以 將移動構件9加以移動。 也就是說，在移動構件9的下表面上係將作爲橫跨軌 道8的浮上手段的空氣軸承1 〇予以固著。空氣軸承1 〇 係如第4圖所不，被形成爲作爲將內部連通在壓氣源的中 空部，和軌道8的上表面以及面對側面的開口 1 2。而若 是從壓氣源將空氣供給到中空部1 1的話，從開口 1 2朝 向軌道8的上表面以.及側面噴出氣體，移動構件9會從軌 道8 (基底1 )浮上。另外，在空氣軸承1 〇的兩方下端 裝設著線性尺標。 又，在各軌道8的外側配置有線性馬達1 4，線性馬 達係由平行於前述軌道8的磁性軌道1 5、和置入該磁性 軌道所形成的間隔內的板狀的線圏1 6所組成，若是對線 圈1 6通電流的話，線圏1 6會變成電磁鐵而產生磁場。 另一方面，藉由該磁場的作用而使介電體也會發生磁場。 然後，若是將流通在線圈1 6中的電流方向以極短的週期 連續地切換的話，利用磁場的作用就可以發生水平方向的 力。利用該水平方向的力可使移動構件9沿著軌道8以及 磁性軌道1 5移動。另外，線性馬達的原理並不只限於上 述，在本發明中即使採用不同動作原理的線性馬達亦無妨 。又，移動構件9的移動量是藉由前述線性尺標1 3所量 測的。 另一方面，將支柱1 7立設於各移動構件9上，在該 支柱1 7上裝設有可上下移動的導向軌道1 8，將呈門型 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） (請先閱讀背面之注意事項再填寫本頁) -8 - 528618 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明説明（6 ) 的昇降架卡合在前後導向軌道1 8之間，利用驅動了安裝 在支柱1 7內側上的輔助馬達2 0而成爲昇降架1 9可昇 起降落的結構。另外，使昇降架1 9昇降的構件並不只限 於輔助馬達，例如使用凸輪和驅動凸輪的馬達亦無妨。 昇降架1 9的下表面上被安裝了塗佈元件2 1。在該 塗佈元件2 1中朝向被載置於檯盤3上的被處理基板W的 表面來開口的狹縫狀噴嘴孔係被以橫方向（第2圖中的左 右方向）形成的。 又，昇降架1 9的其中一端側的上表面固著了塗佈液 輸送泵2 3，係被製作成在該塗佈液輸送泵2 3中從塗佈 液槽透過供給管2 4 a來供給塗佈液，在該塗佈元件2 1 中從塗佈液輸送泵2 3透過供給管2 4 b來供給塗佈液。 又，將廢液槽和塗佈液輸送泵2 3以及塗佈元件分別以通 氣管25a、25b來連接，在塗佈液輸送泵23內以及 塗佈元件2 1內係進行了爲了用來充塡塗佈液所做的抽氣 。另外，作爲供給管24a、24b以及通氣管25a、 2 5 b的材料，用金屬製的無妨，用彈性管材亦無妨。 再者，在塗佈元件2 1的側面上被裝設有管套感應器 2 6，該管套感應器2 6和擴大器2 7之間係以訊號線連 結。 在上述敘述中，將塗佈液供給到被處理基板W的表面 上，係於的狀態下，對線性馬達1 4的線圈1 6通電，使 移動構件相對於軌道8 (基底1 )以非接觸的狀態下沿著 軌道8 (磁性軌道1 5 )來持續地移動，然後驅動塗佈液 (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -9 - 528618 經濟部智慧財產局員工消費合作社印製 A7 ___B7五、發明説明（7 ) 輸送泵2 3，從塗佈元件2 1下端的狹縫狀噴嘴孔將塗佈 液朝向被處理基板W的表面加以供給。 另外，在塗佈工程中的塗佈開始位置和塗佈完成位置 ，如第6圖所示，在塗佈元件2 1從左移動到右的這段區 間，間隙感應器2 6在偵知被處理基板W的上流端W 1之 後，會在經過預定的時間後開始噴出塗佈液，間隙感應器 2 6在偵知被處理基板W的下流端W 2之後，會在經過預 定的時間後停止噴出塗佈液。 【發明的效果】 如上述的說明若是依據關於本發明的塗佈裝置的話， 藉由將塗佈液輸送泵安裝在昇降架上，則塗佈液輸送泵和 塗佈元件之間的相對位置就不會產生變化，塗佈液輸送泵 和塗佈元件之間的彈性軟管的配管內容積也可以成爲一定 ，其結果，就可以形成厚度極爲均勻的塗膜。又，除了振 動之外，對於減少噪音產生的作業環境改善也很有幫助。 再者，由於愛制動時以外的時間同質構件不會互相接 觸，所以可以抑制發生由摩擦所生的塵埃，連帶的提升製 品的良品率，再者，藉由同質構件不會互相接觸，與使用 L Μ導向或鋼珠螺絲之移動機構相比之下，不會有經時性 的變化而可以進行半永久性的安定的塗佈。 又，藉由將塗佈元件製作成可昇降的形式並且備有高 度偵知感應器，可以將平行度正確地表現出來，即使是在 變更基板厚度的情況下也能夠迅速地因應。 (請先閱讀背面之注意事項再填寫本頁) 本纸張尺度適用中國國家標準（CNS ) Α4規格（21〇Χ 297公釐） -10- 528618 A7 B7 五、發明説明（8 ) 【圖式之簡單說明】 第1圖是關於本發名的塗佈裝置的正面圖。 第2圖是本塗佈裝置的側面圖。 第3圖是第1圖中沿著A - A線的剖面圖。 第4圖是空氣軸承的一部分的擴大剖面圖。 第5圖是用來說明塗佈裝置的高度感應器的作用的圖 (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 【符號 1 水平平 ° 1〇 線性尺 圈。1 、輔助 2 4a 管。2 。W 1 端。 說明】 、基底。2、腳。3、檯盤。 板。6 、插栓。7、孑L。8、 、空氣軸承。1 1、中空部。 標。1 4、線性馬達。1 5、 7、支柱。1 8、導向軌道。 馬達。2 1、塗佈元件。2 3 、2 4 b、塗步液供給管。2 4 '氣缸單元。5、 軌道。9、移動構件 1 2、開口。1 3、 磁性軌道。1 6、線 1 9、昇降架。2 0 、塗佈液輸送泵。5 a、2 5 b、通氣 、間隙感應器。2 7、擴大器。w、被處理基板 被處理基板的上流端。W 2、被處理基板的下流 訂 本纸張尺度適用中國國家標準（CNS ) A4規格（210X29?公釐） -11This paper size applies to China National Standard (CNS) A4 (210X297 mm) 528618 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the invention (5) Tracks 8 and 8 extending in the left-right direction. The moving members 9 can be moved along the tracks 8 and 8. That is, the lower surface of the moving member 9 is fixed with an air bearing 10 serving as a floating means across the rail 8. As shown in FIG. 4, the air bearing 10 is formed as a hollow portion that communicates the interior with a compressed air source, and the upper surface of the rail 8 and the opening facing the side 12. On the other hand, if air is supplied to the hollow portion 11 from a compressed air source, gas is ejected from the opening 12 toward the upper surface of the rail 8 and the side surface, and the moving member 9 floats from the rail 8 (base 1). In addition, linear scales are installed at the lower ends of both sides of the air bearing 10. A linear motor 14 is disposed outside each of the rails 8. The linear motor is composed of a magnetic rail 15 parallel to the above-mentioned rail 8 and a plate-shaped coil 16 placed in a space formed by the magnetic rail. In the composition, if a current is passed to the coil 16, the coil 16 will become an electromagnet and generate a magnetic field. On the other hand, the magnetic field causes a dielectric body to generate a magnetic field. If the direction of the current flowing through the coil 16 is continuously switched at an extremely short period, a horizontal force can be generated by the action of a magnetic field. The horizontal force can move the moving member 9 along the rail 8 and the magnetic rail 15. In addition, the principle of the linear motor is not limited to the above. In the present invention, even if a linear motor with a different operating principle is used, it is not a problem. The amount of movement of the moving member 9 is measured by the linear scale 13 described above. On the other hand, a pillar 17 is erected on each moving member 9, and a guide rail 18 that can be moved up and down is mounted on the pillar 17. The paper size will be in the shape of a door. The Chinese national standard (CNS) A4 will be applied. Specifications (210X 297mm) (Please read the precautions on the back before filling out this page) -8-528618 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs Between the guide rails 18, an auxiliary motor 20 mounted on the inner side of the pillar 17 is driven, so that the lifting frame 19 can be raised and lowered. In addition, the member for raising and lowering the lifting frame 19 is not limited to the auxiliary motor, and for example, a cam and a motor for driving the cam may be used. A coating element 21 is mounted on the lower surface of the lifting frame 19. Slot-shaped nozzle holes opened in the coating element 21 toward the surface of the substrate W to be mounted on the platen 3 are formed in a lateral direction (left-right direction in the second figure). In addition, the coating liquid conveying pump 23 is fixed to the upper surface of one end side of the lifting frame 19, and the coating liquid conveying pump 23 is made to pass from the coating liquid tank through the supply pipe 24a The coating liquid is supplied, and the coating liquid is supplied from the coating liquid feed pump 2 3 through the supply pipe 2 4 b in the coating element 2 1. In addition, the waste liquid tank, the coating liquid delivery pump 23, and the coating element were connected by vent pipes 25a and 25b, respectively. The coating liquid delivery pump 23 and the coating element 21 were used for charging.抽 Pumping down of the coating solution. In addition, as the materials of the supply pipes 24a and 24b and the vent pipes 25a and 25b, it is possible to use a metal, and it is also possible to use an elastic pipe. Furthermore, a sleeve sensor 26 is mounted on the side surface of the coating element 21, and the sleeve sensor 26 and the amplifier 27 are connected by a signal line. In the above description, the coating liquid is supplied to the surface of the substrate W to be processed, and the coil 16 of the linear motor 14 is energized in a state of being tied to make the moving member non-contact with respect to the rail 8 (base 1). In a state of continuous movement along track 8 (magnetic track 1 5), then drive the coating liquid (please read the precautions on the back before filling this page) This paper size applies Chinese National Standard (CNS) A4 specification (210X297 (Mm) -9-528618 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 ___B7 V. Description of the invention (7) The delivery pump 2 3 directs the coating liquid from the slit-shaped nozzle hole at the lower end of the coating element 21 toward the substrate. The surface of the processing substrate W is supplied. In addition, in the coating start position and the coating completion position in the coating process, as shown in FIG. 6, in a section where the coating element 21 is moved from left to right, the gap sensor 26 is detected by After processing the upstream end W 1 of the substrate W, the coating liquid will be ejected after a predetermined time has elapsed, and the gap sensor 26 will stop after detecting the downstream end W 2 of the substrate W to be processed after a predetermined time has elapsed. Spray the coating liquid. [Effects of the Invention] As described above, if the coating device according to the present invention is used, the relative position between the coating liquid conveying pump and the coating element can be obtained by installing the coating liquid conveying pump on a lifting frame. There is no change, and the piping internal volume of the flexible hose between the coating liquid conveying pump and the coating element can also be constant. As a result, a coating film with extremely uniform thickness can be formed. In addition to vibration, it also helps to improve the working environment by reducing noise. In addition, since the homogeneous members do not contact each other during the time other than the time of braking, it is possible to suppress the occurrence of dust generated by friction, which can improve the yield of the product, and because the homogeneous members do not contact each other, the Compared with the moving mechanism of the LM guide or the ball screw, semi-permanent and stable coating can be performed without a change over time. In addition, by making the coating element into a liftable form and equipped with a high-level detection sensor, the parallelism can be accurately expressed, and it can respond quickly even when the thickness of the substrate is changed. (Please read the precautions on the back before filling out this page) The paper size is applicable to the Chinese National Standard (CNS) A4 specification (21〇 × 297 mm) -10- 528618 A7 B7 V. Description of the invention (8) [Schematic Brief description] Fig. 1 is a front view of the coating device of the present invention. Fig. 2 is a side view of the coating device. Fig. 3 is a sectional view taken along line A-A in Fig. 1. Fig. 4 is an enlarged sectional view of a part of the air bearing. Figure 5 is a diagram to explain the function of the height sensor of the coating device (please read the precautions on the back before filling this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs [Symbol 1 horizontal flat ° 10 linear Ruler circle. 1. Auxiliary 2 4a tube. 2 . W 1 end. Description], base. 2. Feet. 3, the table. board. 6. Plug. 7. 孑 L. 8. Air bearing. 1 1. Hollow section. Mark. 1 4. Linear motor. 1 5, 7, pillars. 1 8. Guide rail. motor. 2 1. Coating element. 2 3, 2 4 b, coating step liquid supply tube. 2 4 'cylinder unit. 5. Track. 9. Moving member 1 2. Opening. 1 3. Magnetic track. 1 6. Line 1 9. Lifting frame. 2 0, coating liquid delivery pump. 5 a, 2 5 b, ventilation, gap sensor. 2 7. Amplifier. w. Processed substrate The upstream end of the processed substrate. W 2. Downstream processing of processed substrates The paper size applies to China National Standard (CNS) A4 (210X29? Mm) -11