TWI508786B - Coating device - Google Patents

Description

Coating device

The present invention relates to a coating machine for applying a coating liquid onto a substrate.

In a flat panel display such as a liquid crystal display or a plasma display, a glass substrate coated with a resist liquid (hereinafter also referred to as a coating) is used. Cloth substrate). Further, the coated substrate was produced by using a coating device that uniformly applied a photoresist to a glass substrate.

In the following Patent Document 1, there is disclosed a coating apparatus comprising: a substrate holding tray that holds a substrate; and a coating that is disposed above the substrate held by the substrate holding tray and that is discharged from the nozzle at the lower end portion. a head (coating portion); a relative moving means for moving the coating head horizontally with respect to the substrate holding tray, wherein the coating head flows out from the coating head while the coating head is horizontally moved relative to the substrate holding tray Applying a photoresist solution to the substrate on the substrate holding tray.

Moreover, since there is usually only a slight gap between several tens of μm and one hundred tens of μm between the top surface of the substrate and the nozzle of the coating head, if there is foreign matter on the substrate or on the substrate holding tray Foreign matter exists to float the substrate In this case, the nozzle of the coating head collides with the foreign matter or the substrate to damage the nozzle or the substrate.

Therefore, as shown in FIG. 6, the coating apparatus of Patent Document 1 does not include the nozzle 144 of the coating head 122 and the side opposite to the moving direction X1 of the substrate holding tray 114 for colliding with the foreign matter P. a plate-shaped member (collision portion) 150; a vibration sensor 151 that detects vibration of the plate-like member 150; and a relative movement of the coating head 122 when vibration is detected by the vibration sensor 151 Control means for forced stop. Further, the coating device transmits the foreign matter P on the substrate 112 by the plate member 150, transmits the vibration caused by the collision by the vibration sensor 151, and causes the coating head 122 to face the X1 direction according to the detection signal. The movement is forcibly stopped to prevent the nozzle 144 of the coating head 122 from colliding with the foreign matter P.

[Patent Document 1] Japanese Patent No. 3653688

In the coating apparatus of Patent Document 1, since it takes time until the relative movement of the coating head 122 is stopped after the vibration sensor 151 detects the vibration, it is necessary to vacate the nozzle 144 and the plate of the coating head 122. The interval L of the member 150 is only a portion of the moving distance (stop distance) of the coating head 122 at that time.

On the other hand, with the improvement of the coating performance of the photoresist liquid etc. in recent years, the relative movement speed of the coating head 122 to the substrate holding disk 114 tends to increase. Therefore, the stopping distance of the coating head 122 also becomes long, which makes it necessary to elongate the interval L between the nozzle 144 of the coating head 122 and the plate-like member 150. However, if the distance L between the coating head 122 and the plate member 150 is elongated, there is a large device. Problem. Further, since the coating head 122 vibrates centering on the position of its center of gravity due to factors other than the collision with the foreign matter P, the displacement due to the vibration is larger as the position of the center of gravity of the coating head 122 is larger, so if the coating is elongated The distance L between the head 122 and the plate-like member 150 (vibration sensor 151) also has a problem that it is easy to erroneously detect vibration other than the collision with the foreign matter.

The present invention has been made to solve such a problem, and an object of the invention is to provide a coating apparatus capable of avoiding collision of a nozzle with a foreign object or the like even if the distance between the nozzle and the foreign matter is not increased after the foreign matter detecting unit detects the foreign matter. It can suppress the enlargement of the device.

(1) The coating apparatus of the present invention, comprising: a holding stage for holding a substrate horizontally; a coating portion having a nozzle for discharging the coating liquid onto the substrate on the holding stage; and the coating portion being opposite to the foregoing a traveling mechanism that keeps the running in the horizontal direction; a lifting mechanism that raises and lowers the coating portion in the vertical direction; and when the coating portion is moved by the traveling mechanism to apply the coating liquid to the substrate, a foreign matter detecting unit that detects a foreign object that is not in the traveling direction on the side of the nozzle; and when the foreign object detecting unit detects a foreign object, the lifting mechanism is controlled to retract the coating unit to the upper retreat control The foreign matter detecting unit includes: a side disposed in the traveling direction of the nozzle that is not in the coating unit, and is capable of colliding with the surface of the substrate when the substrate or the holding table has foreign matter a collision detecting portion disposed; and a collision detecting portion for detecting a change in height of the collision portion due to collision with the foreign matter or the surface of the substrate, wherein the collision portion can be Coated with the lifting portion integrally disposed in the coating unit, further comprising: a detection unit detecting the height of the height of the coated portion; The elevation control unit that controls the height of the application unit to a predetermined value is controlled by the detection result of the height detection unit, and the height detection unit also serves as the collision detection unit, and the lower portion of the collision portion is formed on the lower side in the traveling direction. The inclined side with a higher position on the side in the same direction.

In the coating apparatus of the present invention, the foreign matter detecting unit detects the foreign matter, and the elevating mechanism is controlled by the retracting control unit to retract the coating unit to the upper side. Therefore, in order to speed up the traveling speed of the application unit, Even if the distance from the nozzle to the foreign matter (the interval between the foreign matter detecting portion and the nozzle) after the foreign matter detecting unit detects the foreign matter is not elongated, collision between the nozzle and the foreign matter can be avoided, and the size of the device can be suppressed.

According to this configuration, the collision detecting unit detects a change in the height of the collision portion caused by the collision with the foreign matter or the surface of the substrate (hereinafter also referred to as a foreign matter), and thus detects the vibration caused by the collision by the vibration sensor. Comparison of the situation can reduce false detection and improve detection accuracy. In other words, when the vibration sensor detects the vibration of the collision portion, the vibration caused by the collision between the collision portion and the foreign matter or the like is inadvertently detected, for example, at the beginning or the end of the coating operation. In the present invention, when the height of the collision portion is detected, the problem is almost impossible, and the collision between the collision portion and the foreign matter can be accurately detected.

According to this configuration, the height detecting unit used for the height control of the application portion is also used to detect a change in the height of the collision portion caused by the collision with the foreign matter or the like. Therefore, it is not necessary to detect the change in the height of the collision portion. In addition, a sensor is provided. Therefore, it is possible to reduce the number of parts and to suppress the manufacturing cost.

According to this configuration, when a foreign matter is present on the substrate or the like, the bottom surface of the collision portion on which the inclined surface is formed collides with a foreign object or the like, and the collision force including the upward component acts on the collision portion. Therefore, the collision portion is easily changed in height due to collision with foreign matter or the like, and the detection accuracy of the foreign matter can be further improved.

In the coating apparatus of the present invention, when the foreign matter on the substrate or the holding table is detected, the coating portion is retracted upward, and the distance from the nozzle to the foreign matter or the like after the foreign matter detecting portion detects the foreign matter is not required to be elongated. The size of the device can be suppressed.

Next, the form for carrying out the invention will be described with reference to the drawings.

1 is a perspective view showing a coating device 11 according to an embodiment of the present invention, and FIG. 2 is a front view showing an enlarged vicinity of a unit supporting portion 23 of the coating unit 15 in the coating device 11. As shown in FIG. 1 and FIG. 2, the coating device 11 is a liquid material (hereinafter also referred to as a coating liquid) such as a chemical solution or a photoresist, which is applied to the supplied thin plate-shaped substrate 12. The coating device 11 includes a base 13 , a stage (holding stage) 14 for carrying the substrate 12 , and a coating unit 15 configured to move the platform 14 in a specific direction.

In the following description, the direction in which the coating unit 15 moves is the X-axis direction, and the direction orthogonal to the horizontal plane in the X-axis direction is the Y-axis direction, and is orthogonal to the X-axis direction and the Y-axis direction. The up and down direction of both sides is Z Axis direction.

A platform 14 is carried on the base 13 and a slide rail 17 is disposed on both sides of the platform 14 in the Y-axis direction. Moreover, the coating unit 15 is carried on the slide rail 17.

The platform 14 carries and holds the substrate 12 carried in on its top surface. A plurality of suction holes (not shown) are formed on the surface of the stage 14, and a vacuum pump (not shown) is connected to the suction holes. Further, when the vacuum pump is operated, the substrate 12 is attracted to the surface of the stage 14 by the negative pressure, and is held on the surface. Further, a substrate elevating mechanism (not shown) for moving the substrate 12 up and down is disposed on the stage 14.

The slide rail 17 guides the traveling of the coating unit 15 and is disposed to extend in the X-axis direction. The slide rail 17 has a flat and smooth guide face 19 in a direction perpendicular to the Z-axis direction and perpendicular to the Y-axis direction. This guide surface 19 opposes the air bearing 20 of the coating unit 15 mentioned later.

The coating unit 15 is for applying the coating liquid to the substrate 12 carried on the stage 14, and includes: a slit nozzle part (coating part) 22 that extends in the Y-axis direction and flows out of the coating liquid. The unit support portion 23 disposed at both end portions of the slit nozzle portion 22.

The unit support portion 23 is for moving the slit nozzle portion 22 up and down in the Z-axis direction, and the slit nozzle portion 22 is moved in the X-axis direction. In other words, the unit support portion 23 has a lifting mechanism 24 that raises and lowers the slit nozzle portion 22 in the Z-axis direction, and a traveling mechanism 25 that moves the slit nozzle portion 22 in the X-axis direction. Further, the elevating mechanism 24 and the traveling mechanism 25 are controlled by the control device 26 (see FIG. 4). Further, the control device 26 is made of electricity including the following components Brain composition: calculation means composed of CPU; ROM (Read-Only Memory), RAM (Random Access Memory), HDD (Hard Disk: Hard) for memory program or data (data) A memory means such as a disc; in order to input/output an input/output interface to an external signal, etc., the arithmetic means is configured to execute various programs stored in the memory means.

As shown in FIGS. 1 and 2, the elevating mechanism 24 has a guide rail 28 extending in the Z-axis direction, and a slider 29 coupled to the slit nozzle portion 22. On the guide rail 28, the slider 29 is slidably mounted along the guide rail 28. 3 is a schematic view of a lifting mechanism 24 having a servo motor 30 as a driving body and a ball screw mechanism 31 driven by the servo motor 30, in which the ball screw mechanism is used. 31 is connected to the slider 29 or the slit nozzle portion 22. The control device 26 includes the elevation control unit 32 that drives the servo motor 30 as a functional unit (see also FIG. 4), and the elevation control unit 32 controls the servo motor 30 to raise and lower the slit nozzle unit 22 in the Z-axis direction. And it is configured to stop at an arbitrary position.

Further, the elevating mechanism 24 includes a height detecting unit 33 that detects displacement of the slit nozzle portion 22 in the vertical direction. The height detecting unit 33 is formed of an optical scale such as an optical type or a magnetic type, and includes a first scale 34 provided on the slit nozzle unit 22, and is disposed on the opposite side. The position of the scale 34 is raised and lowered with the slit nozzle portion 22 in the first reading portion 35 in the vertical direction. Further, the height detecting unit 33 is configured to read the first scale 34 by the first reading unit 35 and detect the height of the slit nozzle unit 22. The signal detected by the first reading unit 35 is input to the lifting control of the control device 26 The portion 32 controls the servo motor 30 by the elevation control unit 32 in accordance with the input signal.

As shown in FIGS. 1 and 2, the traveling mechanism 25 includes a slide support portion 36 and a linear motor 37 in order to cause the slit nozzle portion 22 to travel in the X-axis direction.

The slide support portion 36 is supported by the slide rail 17 by an air bearing 20 disposed between the slide rails 17. Then, the linear motor 37 is driven and controlled by the control device 26 to move the slide support portion 36 in the X-axis direction. Specifically, a compressor (not shown) is connected to the air bearing 20 disposed in the slide support portion 36 through a pipe, and the operating air of the compressor is supplied to the guide surface 19 by the air bearing 20. Then, by supplying air between the air bearing 20 and the guide surface 19, the slide support portion 36 is floated by the guide surface 19, and the linear motor 37 is driven in this state to move the slide support portion 36 in the X-axis direction.

As shown in FIG. 4, the control device 26 includes a travel control unit 39 that controls the linear motor 37 as a functional unit that controls the linear motor 37 and causes the slit nozzle unit 22 to travel in the X-axis direction. And it is constructed by stopping it at an arbitrary position.

Further, the slide support portion 36 is provided with a travel position detecting portion 40 that detects a position in the X-axis direction of the coating unit 15. As shown in FIGS. 1 and 2, the travel position detecting unit 40 includes a second scale 41 disposed on the slide rail 17 along the guide surface 19, and is disposed at a position facing the second scale 41. The second reading unit 42 transmits the second scale 41 by the second reading unit 42 to detect the traveling position of the coating unit 15. Detected by the second reading unit 42 The signal is input to the travel control unit 39, and the travel control unit 39 controls the linear motor 37 in accordance with the input signal. Further, the travel control unit 39 has a function of calculating the traveling speed of the coating unit 15 based on the input signal.

As shown in FIGS. 1 and 2, the slit nozzle portion 22 is a top surface of the substrate 12 coated with the coating liquid to be held on the stage 14. The slit nozzle portion 22 is a columnar member having a shape extending in the Y-axis direction, and includes a nozzle 44 that flows out of the coating liquid to the side facing the surface of the stage 14. The nozzle 44 protrudes toward the surface side of the stage 14, and a slit extending in the Y-axis direction is formed in the protruding portion, and the coating liquid supplied to the slit nozzle portion 22 flows out through the slit. To the surface of the substrate 12.

The slit nozzle unit 22 passes the coating control unit 39 to control the linear motor 37, and applies the coating liquid to the surface of the substrate 12 while traveling in the direction of the arrow X1 while being placed on the end side of the stage 14 in the X-axis direction.

Further, when the coating liquid is applied to the surface of the substrate 12, the height of the slit nozzle portion 22 is set, and the gap between the 俾 nozzle 44 and the surface of the substrate 12 is a predetermined value between about several tens of μm and one hundred tens of μm. . Specifically, when the coating liquid is applied, the height of the slit nozzle portion 22 is always detected by the height detecting portion 33 (see FIG. 3), and the detection signal is input to the elevation control portion 32 of the control device 26. Then, the servo motor 30 is subjected to feedback control by the elevation control unit 32, and the slit nozzle unit 22 is maintained at a predetermined height.

As shown in FIG. 3, the collision part 45 is arrange|positioned in the bottom surface of the slit nozzle part 22. The collision portion 45 extends in the Y-axis direction like the slit nozzle portion 22, and has a substantially L-shaped cross-sectional shape orthogonal to the Y-axis direction. Moreover, the collision department 45 is disposed on the side of the running direction X1 of the slit nozzle portion 22, and is vacant at a predetermined interval L in the same direction with respect to the nozzle 44. Further, the collision portion 45 is integrally fixed to the slit nozzle portion 22, and is configured to be vertically moved up and down and horizontally moved together with the slit nozzle portion 22. The lower end position of the collision portion 45 is set to be substantially the same as or slightly lower than the tip end of the nozzle 44.

When the coating liquid is applied, if the foreign matter P is present on the substrate 12, the collision portion 45 of the slit nozzle portion 22 traveling in the direction of the arrow X1 collides with the foreign matter P. Further, if the foreign matter P exists on the stage 14, the substrate 12 placed thereon partially floats, and the collision portion 45 collides with the surface of the substrate 12. Then, when the collision occurs, the slit nozzle portion 22 is lifted upward (in the Z-axis direction) and is suddenly displaced. This displacement is detected by reading the first scale 34 by the first reading unit 35 of the height detecting unit 33, and the detection signal is input to the control device 26.

In this way, the displacement of the slit nozzle portion 22 caused by the collision portion 45 colliding with the foreign matter P or the like is larger than the slight vertical movement caused by the normal running of the slit nozzle portion 22, and the two can be clearly distinguished. Therefore, when the displacement detected by the first reading unit 35 is equal to or greater than a predetermined threshold value (threshold value), the control device 26 determines that the displacement is caused by a collision with the foreign matter P or the like.

Further, as shown in FIG. 4, the elevation control unit 32 of the control device 26 controls the servo motor 30 based on a detection signal (collision signal) caused by a displacement of a collision with the foreign matter P or the like, and raises the slit nozzle portion 22. Then, the collision of the nozzle 44 with the foreign matter P is prevented by the rise of the slit nozzle portion 22.

Moreover, the travel control unit 39 of the control device 26 is based on the input collision letter. The linear motor 37 is controlled to stop the travel of the slit nozzle portion 22. Then, the collision of the nozzle 44 with the foreign matter P by the stop of the slit nozzle portion 22 is also avoided.

Here, the collision portion 45 and the height detecting portion 33 constitute a foreign matter detecting portion that detects the foreign matter P existing on the substrate 12 or the stage 14, and the elevation control portion 32 of the control device 26 is configured to make the slit nozzle portion 22 from the foreign matter P. The travel control unit 39 functions as a stop control unit that stops the slit nozzle unit 22 and does not collide with the foreign matter P, and the travel control unit 39 functions as a stop control unit that is retracted to the upper side.

When the foreign matter detecting unit detects the foreign matter P on the substrate 12, the coating device 11 of the present embodiment not only stops the slit nozzle portion 22 but also retracts it upward, so that it is compared with the conventional (see FIG. 6). The distance L between the tip end of the nozzle 44 and the collision portion 45 is not required to be elongated, and the size of the apparatus can be suppressed.

In other words, since the travel of the slit nozzle portion 22 can be stopped only in the related art, the distance L between the nozzle 44 and the collision portion 45 must be made larger than the detection of the foreign matter P, and the linear motor 37 starts to stop until the actual slit nozzle portion 22 is stopped. The distance (stop distance) at which the slit nozzle portion 22 moves between the stops is long, and since the stop distance is as long as the running speed of the slit nozzle portion 22 is longer, the interval L needs to be longer, but in the present embodiment. In the embodiment, when the slit nozzle portion 22 is raised higher than the height of the foreign matter P, collision with the foreign matter P can be avoided, and since the amount of rise is much smaller than the stop distance, it is not necessary to elongate the nozzle 44 and collide as in the past. The interval L of the portion 45.

When the distance L between the nozzle 44 and the collision portion 45 (the first reading portion 35) is long, vibration is generated around the center of gravity of the slit nozzle portion 22. In the case where the vibration (up and down motion) in the position of the first reading unit 35 is increased, there is a possibility that the height change due to the collision with the foreign object P is erroneously detected, but the case of the present embodiment is unnecessary. Then, the interval L between the elongated nozzle 44 and the collision portion 45 (the first reading portion 35) is also difficult to occur.

Further, in the present embodiment, since the collision detecting unit 33 detects the collision between the collision portion 45 and the foreign matter P by the height detecting unit 33 used for the height control of the slit nozzle portion 22, it is not necessary to separately provide a dedicated feeling for detecting the collision. In the detector, it is possible to suppress the manufacturing cost achieved by the reduction in the number of parts.

Fig. 5 is an enlarged schematic view showing a collision portion of a coating device according to another embodiment of the present invention. An inclined surface 45a is formed in a lower portion of the collision portion 45 of the present embodiment. Specifically, the inclined surface 45a is formed by chamfering a corner portion on the side in the traveling direction X1 of the collision portion 45 with respect to the width a and the height b in the same direction X1. Since the width a and the height b have a relationship of b < a, the inclination angle θ of the inclined surface 45a of the horizontal plane is set to 0 < θ < 45 °. However, the inclination angle θ of the inclined surface 45a may be set to 45° ≦ θ < 90°.

In the case of the present embodiment, when the inclined surface 45a of the collision portion 45 collides with the foreign matter P existing on the substrate 12, the collision portion 45 receives a reaction force including an upward component of the inclination angle θ according to the inclined surface 45a. Therefore, in the present embodiment, the collision portion 45 is easily displaced upward by the collision with the foreign matter P, and the detection accuracy of the foreign matter can be improved based on the displacement. Further, by setting the inclination angle θ of the inclined surface 45a to 0 < θ < 45°, the upward component of the reaction force acting on the collision portion 45 can be increased, and the collision portion 45 can be more easily displaced upward. Further, after the collision portion 45 collides with the foreign matter P, it travels in the traveling direction X1. The slit nozzle portion 22 is easily raised along the inclined surface 45a, and collision of the foreign matter P with the nozzle 44 can be more reliably prevented.

The present invention is not limited to the above embodiment, and design changes can be appropriately made.

For example, the collision detecting unit that detects the change in the height of the collision portion 45 may be an ammeter that detects the supply current to the servo motor 30. When the slit portion 22 is raised by the collision portion 45 colliding with the foreign matter P or the like, the torque of the servo motor 30 changes, and the supply current also changes. Therefore, when the change in the value of the supply current is detected, it is possible to detect that the collision portion 45 collides with the foreign matter P.

In the above-described embodiment, the collision portion 45 is formed of a member different from the slit nozzle portion 22, and is integrally fixed to the slit nozzle portion 22, but the collision is integrally formed by the machining slit nozzle portion 22 itself. The part 45 is also possible.

Further, the collision portion 45 may have a structure in which the slit nozzle portion 22 is separately moved up and down. In this case, unlike the height detecting unit 33, a collision detecting unit that detects the height of the collision unit 45 may be provided.

The coating device of the present invention may include a sensor different from the height detecting unit 33 in order to detect a collision between the collision portion 45 and the foreign matter P. For example, in the same manner as in the related art (see FIG. 6), the vibration sensor that detects the vibration of the slit nozzle unit 22 is configured to cause the slit nozzle unit 22 to perform the ascending operation and the stop operation by the detection signal of the vibration sensor. Also.

However, even if the vibration sensitivity of the vibration sensor is set to the maximum in the Z-axis direction, since the device having the driving portion in the XYZ direction as in the coating device detects the detection sensitivity to the maximum. Since vibration other than the direction is erroneously detected, for example, vibration due to acceleration or deceleration of the slit nozzle portion 22 at the start or end of the coating operation. In this case, in the case where the collision portion 45 collides with the foreign matter P or the like, the height detecting unit 33 detects the change in the height of the collision portion 45 (displacement in the Z-axis direction), so that it is hardly False detection occurs at the end of the start of the coating operation.

Moreover, other sensors that use optical sensors such as laser light can also be used.

In the above embodiment, the coating unit 15 is moved on the slide rail 17, and the slit nozzle portion 22 is moved in the X-axis direction with respect to the stage 14, but the coating unit 15 is fixed and the stage 14 is moved to the X. In the axial direction, the slit nozzle portion 22 may be relatively moved in the X-axis direction with respect to the stage 14.

11‧‧‧ Coating device

12, 112‧‧‧ substrate

13‧‧‧Abutment

14‧‧‧ Platform (holding station)

15‧‧‧ Coating unit

17‧‧‧Slide rails

19‧‧‧ Guide

20‧‧‧Air bearing

22‧‧‧Slot nozzle part (coating part)

23‧‧‧Unit Support

24‧‧‧ Lifting mechanism

25‧‧‧Traveling agencies

26‧‧‧Control device

28‧‧‧rails

29‧‧‧Sliding parts

30‧‧‧Servo motor

31‧‧‧Rolling screw mechanism

32‧‧‧ Lifting control unit (retraction control unit)

33‧‧‧ Height detection unit (foreign object detection unit)

34‧‧‧ first scale

35‧‧‧First Reading Department

36‧‧‧Sliding support

37‧‧‧Linear motor

39‧‧‧Travel Control Department (Stop Control Department)

40‧‧‧ Walking position detection department

41‧‧‧ second scale

42‧‧‧Second reading department

44, 144‧‧‧ nozzle

45‧‧‧ Collision Department (foreign object detection department)

45a‧‧‧ sloped surface

114‧‧‧Substrate retention disk

122‧‧‧Coating head

150‧‧‧ Plate-shaped members (collision parts)

151‧‧‧Vibration sensor

L‧‧‧ interval

P‧‧‧ Foreign objects

X1‧‧‧ walking direction

Fig. 1 is a perspective view showing a coating apparatus according to an embodiment of the present invention.

Fig. 2 is a front elevational view showing the vicinity of a unit supporting portion of the coating unit in the coating device.

Fig. 3 is a schematic view of a lifting mechanism in the coating device.

Fig. 4 is a block diagram showing the configuration of a control device in the coating device.

Fig. 5 is an enlarged schematic view showing a collision portion of a coating device according to another embodiment of the present invention.

Figure 6 is a schematic view showing a coating portion of a coating device related to the prior art. Sketch map.

12‧‧‧Substrate

14‧‧‧ Platform (holding station)

22‧‧‧Slot nozzle part (coating part)

24‧‧‧ Lifting mechanism

26‧‧‧Control device

29‧‧‧Sliding parts

30‧‧‧Servo motor

31‧‧‧Rolling screw mechanism

32‧‧‧ Lifting control unit (retraction control unit)

33‧‧‧ Height detection unit (foreign object detection unit)

34‧‧‧ first scale

35‧‧‧First Reading Department

44‧‧‧Nozzles

45‧‧‧ Collision Department (foreign object detection department)

L‧‧‧ interval

P‧‧‧ Foreign objects

X1‧‧‧ walking direction

Claims (1)

A coating apparatus comprising: a holding stage for holding a substrate horizontally; a coating portion of a nozzle that flows out of the coating liquid onto the holding table; and the coating portion is horizontally moved relative to the holding table a traveling mechanism for directional direction; an elevating mechanism for elevating and lowering the coating portion in the vertical direction; and when the coating portion is moved by the traveling mechanism for applying the coating liquid to the substrate, detecting that the coating portion is present in the nozzle a foreign matter detecting unit of the foreign object on the side in the traveling direction; and when the foreign object detecting unit detects the foreign matter, the lifting mechanism is controlled to retract the coating unit to the upper retreat control unit, and the foreign matter detecting unit The portion includes: a collision portion that is disposed on a side of the coating portion that is not in the traveling direction, and that is collided with the surface of the substrate when there is a foreign matter on the substrate or the holding table And a collision detecting unit that detects a change in height of the collision portion due to collision with the foreign matter or the surface of the substrate, wherein the collision portion can be lifted and lowered together with the coating portion to be integrally disposed in the coating portion, and Comprising: a detection unit detecting the height of the height of the coated portion; elevation control to a predetermined value based on the detection result of the detecting section controls the height of the height of the coated portion, The height detecting unit also serves as the collision detecting unit, and the lower portion on the side in the traveling direction of the collision portion is formed with an inclined surface that is inclined as the position on the side in the same direction is higher.