CN107199139B - The method of foreign matter on apparatus for coating and detection substrate - Google Patents
The method of foreign matter on apparatus for coating and detection substrate Download PDFInfo
- Publication number
- CN107199139B CN107199139B CN201710380241.7A CN201710380241A CN107199139B CN 107199139 B CN107199139 B CN 107199139B CN 201710380241 A CN201710380241 A CN 201710380241A CN 107199139 B CN107199139 B CN 107199139B
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- China
- Prior art keywords
- foreign matter
- substrate
- nozzle
- emission sensor
- coating
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B13/00—Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
- G01V8/00—Prospecting or detecting by optical means
- G01V8/10—Detecting, e.g. by using light barriers
- G01V8/20—Detecting, e.g. by using light barriers using multiple transmitters or receivers
Abstract
A kind of apparatus for coating, for being coated to substrate, apparatus for coating includes the first emission sensor and the second emission sensor, first emission sensor obtains the first coordinate information of the foreign matter on substrate along the first surface of first direction scanning substrate, and the second emission sensor obtains the second coordinate information of the foreign matter on substrate along the first surface of the second direction scanning substrate vertical with first direction.The present invention provides a kind of apparatus for coating, and by the way that the first emission sensor being fixedly connected with nozzle is arranged on nozzle, the second correlation being flexibly connected with nozzle senses, and can not only protect to nozzle, moreover it is possible to the position of foreign matter on substrate be accurately positioned.
Description
Technical field
The present invention relates to field of display technology, and in particular, to a kind of method of foreign matter on apparatus for coating and detection substrate.
Background technique
In the production process of display panel, be typically employed to apparatus for coating be coated on substrate formed photoresist film layer with
Various film layers are formed on substrate in subsequent processing procedure.In specific production, apparatus for coating generallys use nozzle on substrate
It is coated with corresponding film material, such as photoresist.
The groundwork process of apparatus for coating are as follows: nozzle is moved along substrate surface from the one side edge of substrate with certain speed
To opposite another side edge, meanwhile, with certain speed discharge film material in nozzle, with the movement of nozzle, film layer material
Material can be applied to the surface of substrate to form corresponding film layer.
But when having the foreign matter of protrusion on substrate, foreign matter can greatly influence coating work.In the prior art, it is fixed on spray
Emission sensor in front of mouth can only detect the coordinate along nozzle movement direction of the foreign matter on substrate, can not accurately really
Determine the position of foreign matter, this makes troubles to foreign matter is removed.
Summary of the invention
The purpose of the present invention is to provide the foreign matter inspection methods on a kind of apparatus for coating and its substrate, to solve existing painting
The problem of cloth apparatus can not accurately determine the location information of foreign matter on substrate and can not remove foreign matter automatically.
It is that it is realized by adopting the following technical scheme that the present invention, which solves its technical problem,.
The present invention provides a kind of apparatus for coating, and for being coated to substrate, apparatus for coating is sensed including the first correlation
Device and the second emission sensor, the first emission sensor obtain on substrate along the first surface of first direction scanning substrate
First coordinate information of foreign matter, first table of second emission sensor along the second direction scanning substrate vertical with first direction
Face obtains the second coordinate information of the foreign matter on substrate.
Further, it is located at spray along the moving direction of nozzle, the first emission sensor and the second emission sensor
The front of mouth.
Further, the first emission sensor includes that the first transmitter and first of the length direction of nozzle is arranged in connect
Device is received, first transmitter and the first receiver are fixedly connected with to nozzle, and first transmitter and the first receiver are located at substrate
Two sides.
Further, the second emission sensor includes the second transmitter and the second reception that nozzle width direction is arranged in
Device, second receiver are slidably attached on nozzle, and second transmitter is moved synchronously with second receiver.
Further, apparatus for coating further includes the camera for shooting the foreign matter on substrate, camera and nozzle activity
Connection and energy relative nozzle movement.
Further, apparatus for coating further includes the clearing apparatus for cleaning the foreign matter on substrate, clearing apparatus and nozzle
Being flexibly connected can relative nozzle movement.
Further, apparatus for coating further includes control unit, control unit and nozzle, the first emission sensor, second
Emission sensor, camera and clearing apparatus electrical connection.
Apparatus for coating as described above is applied the present invention also provides a kind of come the method that detects foreign matter on substrate, including step
It is rapid:
Along the first surface of first direction scanning substrate to detect on substrate with the presence or absence of foreign matter；
After having foreign matter on detecting substrate, the first coordinate information of foreign matter is obtained；
The first surface of scanning substrate is in a second direction to obtain the second coordinate information of foreign matter；
The position of foreign matter is determined based on the first coordinate information and the second coordinate information.
It further, further include behind the position for obtaining foreign matter, obtaining the image information of foreign matter, being removed based on image information
Remove foreign matter.
Further, judge that foreign matter is in that the first surface of substrate is in substrate based on image information with the first table
On the opposite second surface in face:
When determining that foreign matter is on the first surface of substrate, the clearing apparatus of apparatus for coating handles foreign matter；
When determining that foreign matter is on the second surface of substrate, apparatus for coating is sounded an alarm.
The present invention provides a kind of detection method of foreign matter on apparatus for coating and its substrate, passes through setting and nozzle on nozzle
The first emission sensor being fixedly connected, the second correlation sensing being flexibly connected with nozzle, can not only carry out nozzle
Protection, moreover it is possible to the position of foreign matter on substrate be accurately positioned.
Detailed description of the invention
Fig. 1 is the schematic top plan view of apparatus for coating and substrate relative position in the embodiment of the present invention.
Fig. 2 is the partial side schematic diagram of apparatus for coating in Fig. 1.
Fig. 3 is structural schematic diagram when nozzle starts mobile in Fig. 1.
Fig. 4 is structural schematic diagram when the second emission sensor starts mobile in Fig. 3.
Fig. 5 is structural schematic diagram when the second emission sensor stops mobile in Fig. 4.
Fig. 6 is structural schematic diagram when camera is moved at foreign matter in Fig. 5.
Fig. 7 is structural schematic diagram when clearing apparatus is moved at foreign matter in Fig. 6.
Specific embodiment
It is of the invention to reach the technical approach and effect that predetermined goal of the invention is taken further to illustrate, below in conjunction with
Accompanying drawings and embodiments, to a specific embodiment of the invention, structure, feature and its effect, detailed description is as follows.
Fig. 1 is the schematic top plan view of apparatus for coating and substrate relative position in the embodiment of the present invention.Fig. 2 is to be coated in Fig. 1
The partial side schematic diagram of device.Fig. 1 and Fig. 2 are please referred to, the present embodiment provides a kind of apparatus for coating, for carrying out to substrate 10
Coating.Apparatus for coating includes that nozzle 20, the first emission sensor 30 and the second emission sensor 40 (do not illustrate in Fig. 2
First emission sensor 30 and the second emission sensor 40).First emission sensor 30 and the second emission sensor
40 are connected to the front of nozzle 20, and the first emission sensor 30 obtains base along the first surface of first direction scanning substrate 10
First coordinate information of the foreign matter 11 on plate 10, the second emission sensor 40 are scanned along the second direction vertical with first direction
The first surface of substrate 10 obtains the second coordinate information of the foreign matter 11 on substrate 10.In the present embodiment, first direction is, for example,
Y-axis in Fig. 1 is reversed, and second direction is, for example, the X-direction in Fig. 1.In other embodiments, first direction is, for example, Fig. 1
In X-axis it is reversed, second direction is, for example, the Y direction in Fig. 1.First surface is, for example, front, and second surface is for example, anti-
Face.
Specifically, the first emission sensor 30 includes first transmitter 31 and the first receiver 32, first transmitter 31
It is fixedly connected with the first receiver 32 to nozzle 20.First transmitter 31 and the first receiver 32 are connected to the length of nozzle 20
It spends on direction, and first transmitter 31 and the first receiver 32 are located at the two sides of substrate 10.Second emission sensor 40 includes
Second transmitter 41 and second receiver 42, second receiver 42 are slidably attached in the width direction of nozzle 20, when
When two receivers 42 move, second transmitter 41 is moved synchronously.
In the present embodiment, the first emission sensor 30 and the second emission sensor 40 are correlation photoelectric sensing
Device.For example, first transmitter 31 issues feux rouges or infrared light, the first receiver 32 is received；Second transmitter 41 issues infrared
Or infrared light, second receiver 42 receive.In the presence of having foreign matter 11, the light between transmitter and receiver is cut off, just
There is the signal of foreign matter on the substrate 10 in output.
Further, Fig. 1 and Fig. 2 are please referred to, apparatus for coating further includes the camera 50 for shooting foreign matter on substrate 10
With the clearing apparatus 60 for cleaning foreign matter on substrate 10.Camera 50 is flexibly connected with nozzle 20 and can the shifting of relative nozzle 20
Dynamic, clearing apparatus 60 is flexibly connected with nozzle 20 and can the movement of relative nozzle 20.In a specific embodiment, in nozzle 20
On be provided with sliding rail 70 along its length, camera 50 and clearing apparatus 60 be for example separately positioned on the both ends of sliding rail 70 and
It can be moved along sliding rail 70, camera 50 and clearing apparatus 60 for example can be articulated to by telescopic rod (not shown)
Nozzle 20, i.e. camera 50 and clearing apparatus 60 both can be mobile with nozzle 20, can also be mobile with relative nozzle 20.Another
In a embodiment, the cleaning device that clearing apparatus 60 includes can be for example air gun, laser, organic solvent dropper, cleaning
Any one of ball or two or more combinations, but not limited to this.
Referring to FIG. 1, apparatus for coating further includes control unit 80, control unit 80 respectively with nozzle 20, the first correlation
Sensor 30, the second emission sensor 40, camera 50 and clearing apparatus 60 are electrically connected, and can control nozzle 20, second
The movement of emission sensor 40, camera 50 and clearing apparatus 60.
The present invention also provides a kind of methods for applying foreign matter on apparatus for coating detection substrate as described above, comprising steps of
Along the first surface of first direction scanning substrate 10 to detect on substrate 10 with the presence or absence of foreign matter 11；
After having foreign matter 11 on detecting substrate 10, the first coordinate information of foreign matter 11 is obtained；
The first surface of scanning substrate 10 is in a second direction to obtain the second coordinate information of foreign matter 11；
The position of foreign matter 11 is determined based on the first coordinate information and the second coordinate information.
Behind the position for obtaining foreign matter 11, the image information of foreign matter 11 is obtained, foreign matter 11 is removed based on image information.
Further, based on image information judge foreign matter 11 be in substrate 10 first surface be in substrate 10 with
On the opposite second surface of first surface,
When determining that foreign matter 11 is on the first surface of substrate 10, the clearing apparatus 60 of apparatus for coating handles foreign matter 11,
When determining that foreign matter 11 is on the second surface of substrate 10, apparatus for coating is sounded an alarm.
Fig. 3 is structural schematic diagram when nozzle starts mobile in Fig. 1.Please refer to Fig. 1 and Fig. 3, the control spray of control unit 80
Mouth 20 is moved and is coated along the Y direction of substrate 10, and the first transmitter 31 and first being fixedly attached on nozzle 20 connect
It receives device 32 and follows nozzle 20 mobile and detected on substrate 10 simultaneously whether have the presence of foreign matter 11, the be articulated on nozzle 20
Two receivers 42 move in the Y-axis direction also with nozzle 20, and second transmitter 41 is moved synchronously with second receiver 42.
Fig. 4 is structural schematic diagram when the second emission sensor starts mobile in Fig. 3.Incorporated by reference to Fig. 3 and Fig. 4,
When one transmitter 31 and the first receiver 32 detect foreign matter 11, the first coordinate information of foreign matter 11 is sent to control unit
80.At this point, control unit 80, which controls nozzle 20, stops movement, and start to control second transmitter 41 and second receiver 42 in base
The top of plate 10 starts to move along the X-direction of substrate 10.
Fig. 5 is that structural schematic diagram when the second emission sensor stops mobile in Fig. 4 is penetrated incorporated by reference to Fig. 5 at second at
Formula sensor 40 is during the top of substrate 10 is moved along the X-direction of substrate 10, if the second emission sensor 40 detects
To foreign matter 11, then the second coordinate information of foreign matter 11 is sent to control unit 80 by the second emission sensor 40, meanwhile, control
Unit 80 controls the second emission sensor 40 and stops movement.
Fig. 6 is that camera is moved to the structural schematic diagram at foreign matter in Fig. 5.Conjunction Fig. 6 is settled accounts, when the second emission sensor
40 stop it is mobile after, control unit 80 is according to the received from the first emission sensor 30 and the second emission sensor 40
One coordinate information and the second coordinate information start to control length direction shifting of the camera 50 in the top of substrate 10 along sliding rail 70
The image for moving to the surface of foreign matter 11, and shooting foreign matter 11 is sent to control unit 80.In the present embodiment, if camera 50 away from
Farther out, then control unit 80 can be by controlling the telescopic rod being connected between camera 50 and nozzle 20 (in figure for divorced object 11
Do not show) it is flexible so that camera 50 is moved to the surface of foreign matter 11.
When control unit 80 receives the image of the foreign matter 11 of the shooting of camera 50, control unit 80 controls camera 50
Playback (i.e. position shown in Fig. 1), and based on image information judge foreign matter 11 be in substrate 10 first surface (i.e. just
Face) on be on the second surface (i.e. reverse side) of substrate 10.When control unit 80 determines that foreign matter 11 is in the of substrate 10
When two surfaces, then apparatus for coating sounds an alarm prompt artificial treatment；When control unit 80 determines that foreign matter 11 is in the of substrate 10
When one surface, then control unit 80 controls clearing apparatus 60 and handles foreign matter 11.
Fig. 7 is that clearing apparatus is moved to the structural schematic diagram at foreign matter in Fig. 6.Incorporated by reference to Fig. 7, when control unit 80 determines
When foreign matter 11 is in the first surface of substrate 10, control unit 80 is passed according to from the first emission sensor 30 and the second correlation
After the first coordinate information and the second coordinate information of the foreign matter 11 that sensor 40 receives, then the photo based on the shooting of camera 50 is sentenced
Surely it obtains the cleaning movement needed to be implemented, then controls clearing apparatus 60 along the length direction of sliding rail 70 and be moved to foreign matter 11
Surface, clearing apparatus 60 start to execute cleaning movement.In the present embodiment, if clearing apparatus 60 apart from foreign matter 11 farther out, control
Unit 80 processed can be connected to the flexible of the telescopic rod (not shown) between clearing apparatus 60 and nozzle 20 by control, so that
Clearing apparatus 60 is moved to the surface of foreign matter 11.
Herein, the terms "include", "comprise" or any other variant thereof is intended to cover non-exclusive inclusion, are removed
It comprising those of listed element, but also may include other elements that are not explicitly listed.
Herein, the nouns of locality such as related front, rear, top, and bottom are to be located in figure with components in attached drawing and zero
Part mutual position defines, only for the purpose of expressing the technical solution clearly and conveniently.It should be appreciated that the noun of locality
Use should not limit the claimed range of the application.
The foregoing is merely presently preferred embodiments of the present invention, is not intended to limit the invention, it is all in spirit of the invention and
Within principle, any modification, equivalent replacement, improvement and so on be should all be included in the protection scope of the present invention.
Claims (6)
1. a kind of apparatus for coating, for being coated to substrate (10), which is characterized in that the apparatus for coating includes nozzle
(20), the first emission sensor (30) and the second emission sensor (40), along the moving direction of the nozzle (20), institute
It states the first emission sensor (30) and second emission sensor (40) is located at the front of the nozzle (20), described
One emission sensor (30) includes first transmitter (31) and the first receiver (32), the first transmitter (31) and described
First receiver (32) is fixedly connected with to the nozzle (20)；
First emission sensor (30) obtains the substrate along the first surface that first direction scans the substrate (10)
(10) the first coordinate information of the foreign matter (11) on, second emission sensor (40) is along vertical with the first direction
The first surface that second direction scans the substrate (10) obtains the second coordinate information of the foreign matter (11) on the substrate (10)；
The apparatus for coating further includes the camera (50) for shooting the foreign matter (11) on the substrate (10), described to take the photograph
As head (50) are flexibly connected with the nozzle (20) and can be mobile relative to the nozzle (20)；The apparatus for coating further includes being used for
Clean the clearing apparatus (60) of the foreign matter (11) on the substrate (10), the clearing apparatus (60) and the nozzle (20)
It is flexibly connected and can be moved relative to the nozzle (20)；
It is provided with along its length on the nozzle (20) sliding rail (70), the camera (50) and the clearing apparatus
(60) both ends of the sliding rail (70) are separately positioned on and can be moved along the sliding rail (70), the camera (50) and institute
It states clearing apparatus (60) and the nozzle (20) is articulated to by telescopic rod.
2. apparatus for coating as described in claim 1, which is characterized in that first emission sensor (30) is arranged described
The length direction of nozzle (20), and the first transmitter (31) and first receiver (32) are located at the substrate (10)
Two sides.
3. apparatus for coating as described in claim 1, which is characterized in that second emission sensor (40) includes that setting exists
The second transmitter (41) and second receiver (42) of nozzle (20) width direction, the second receiver (42) is slidably
Ground is connected on the nozzle (20).
4. apparatus for coating as described in claim 1, which is characterized in that the apparatus for coating further includes control unit (80), institute
State control unit (80) and the nozzle (20), first emission sensor (30), second emission sensor
(40), the camera (50) and the clearing apparatus (60) electrical connection.
5. the method for foreign matter (11), feature exist on a kind of application apparatus for coating detection substrate (10) as claimed in claim 4
In, comprising steps of
Along the first surface of first direction scanning substrate (10) to detect on substrate (10) with the presence or absence of foreign matter (11)；
After there are foreign matter (11) on detecting substrate (10), the first coordinate information of the foreign matter (11) is obtained；
Scan the first surface of the substrate (10) in a second direction to obtain the second coordinate information of the foreign matter (11)；
The position of the foreign matter (11) is determined based on first coordinate information and second coordinate information；
It controls camera (50) and is moved to the foreign matter along the length direction of sliding rail (70) in the top of the substrate (10)
(11) surface, if the camera (50) apart from foreign matter (11) farther out, control unit (80) is connected to described by control
Telescopic rod between camera (50) and nozzle (20) it is flexible so that the camera (50) is moved to the foreign matter (11)
Surface, and the image for shooting the foreign matter (11) is sent to described control unit (80)；
Described control unit (80) basis is received from the first emission sensor (30) and the second emission sensor (40)
After the first coordinate information and the second coordinate information of the foreign matter (11), then the photo based on the camera (50) shooting determines
It obtains the cleaning movement needed to be implemented, then controls clearing apparatus (60) along the length direction of the sliding rail (70) and be moved to institute
State the surface of foreign matter (11), if the clearing apparatus (60) apart from the foreign matter (11) farther out, described control unit (80)
By controlling the flexible of the telescopic rod being connected between the clearing apparatus (60) and the nozzle (20), so that the cleaning fills
The surface that (60) are moved to the foreign matter (11) is set, the clearing apparatus (60) starts to execute cleaning movement.
6. method as claimed in claim 5, which is characterized in that judge that the foreign matter (11) are in institute based on described image information
The first surface for stating substrate (10) is on the second surface opposite with the first surface of the substrate (10):
When determining that the foreign matter (11) is on the first surface of the substrate (10), the clearing apparatus of the apparatus for coating
(60) foreign matter (11) is handled；
When determining that the foreign matter (11) is on the second surface of the substrate (10), the apparatus for coating is sounded an alarm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710380241.7A CN107199139B (en) | 2017-05-25 | 2017-05-25 | The method of foreign matter on apparatus for coating and detection substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710380241.7A CN107199139B (en) | 2017-05-25 | 2017-05-25 | The method of foreign matter on apparatus for coating and detection substrate |
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| Publication Number | Publication Date |
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| CN107199139A CN107199139A (en) | 2017-09-26 |
| CN107199139B true CN107199139B (en) | 2019-08-30 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201710380241.7A Active CN107199139B (en) | 2017-05-25 | 2017-05-25 | The method of foreign matter on apparatus for coating and detection substrate |
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Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108543671A (en) * | 2018-04-23 | 2018-09-18 | 深圳市华星光电技术有限公司 | A kind of cleaning device, coating machine |
| CN109701960B (en) * | 2018-12-28 | 2021-07-27 | 惠科股份有限公司 | Substrate cleaning apparatus and cleaning method |
| CN114476585B (en) * | 2022-03-15 | 2023-12-15 | 英特尔产品（成都）有限公司 | Presence detection device |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006010544A (en) * | 2004-06-28 | 2006-01-12 | Horiba Ltd | Apparatus and method for inspecting foreign matter |
| JP2010232326A (en) * | 2009-03-26 | 2010-10-14 | Toray Eng Co Ltd | Coating applicator |
| CN104549945B (en) * | 2013-10-17 | 2017-09-01 | 京东方科技集团股份有限公司 | A kind of coating machine and its grit detection, sweep-out method |
| CN104808213A (en) * | 2015-05-11 | 2015-07-29 | 合肥京东方光电科技有限公司 | Foreign matter detecting device and coating system |
| CN106076731B (en) * | 2016-05-31 | 2019-02-15 | 京东方科技集团股份有限公司 | A kind of automatic double surface gluer |
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- 2017-05-25 CN CN201710380241.7A patent/CN107199139B/en active Active
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Application publication date: 20170926 Assignee: Yungu (Gu'an) Technology Co., Ltd.|Bazhou Yungu Electronic Technology Co., Ltd.|Kunshan Institute of technology new flat panel display technology center Co., Ltd Assignor: Kunshan Guo Xian Photoelectric Co., Ltd. Contract record no.: X2019990000157 Denomination of invention: Coating device and method for detecting foreign matters on base plate Granted publication date: 20190830 License type: Common License Record date: 20191031 |
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Effective date of registration: 20191206 Address after: No. 2 Xiangshan Avenue, Yongning Street, Zengcheng District, Guangzhou, Guangdong province (the core of Zengcheng economic and Technological Development Zone) Patentee after: Guangzhou Guoxian Technology Co., Ltd Address before: 215300, No. 1, Longteng Road, Kunshan Development Zone, Jiangsu, Suzhou, 4 Patentee before: Kunshan Guo Xian Photoelectric Co., Ltd. |
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