CN114476585B - Presence detection device - Google Patents

Presence detection device Download PDF

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Publication number
CN114476585B
CN114476585B CN202210250842.7A CN202210250842A CN114476585B CN 114476585 B CN114476585 B CN 114476585B CN 202210250842 A CN202210250842 A CN 202210250842A CN 114476585 B CN114476585 B CN 114476585B
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China
Prior art keywords
stoppers
stops
height
tray body
presence detection
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CN202210250842.7A
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CN114476585A (en
Inventor
张思齐
耿溧
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Intel Products Chengdu Co Ltd
Intel Corp
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Intel Products Chengdu Co Ltd
Intel Corp
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Priority to CN202210250842.7A priority Critical patent/CN114476585B/en
Publication of CN114476585A publication Critical patent/CN114476585A/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G43/00Control devices, e.g. for safety, warning or fault-correcting
    • B65G43/08Control devices operated by article or material being fed, conveyed or discharged
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2203/00Indexing code relating to control or detection of the articles or the load carriers during conveying
    • B65G2203/02Control or detection
    • B65G2203/0208Control or detection relating to the transported articles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2203/00Indexing code relating to control or detection of the articles or the load carriers during conveying
    • B65G2203/04Detection means
    • B65G2203/042Sensors
    • B65G2203/044Optical

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  • Length Measuring Devices By Optical Means (AREA)
  • Geophysics And Detection Of Objects (AREA)

Abstract

The invention provides a presence detection device. In one implementation, the presence detection device includes: a tray body; a group of correlation type photoelectric sensors arranged on two sides of the surface of the tray body and used for detecting the existence of a detected object falling on the tray body with specific shape specification, wherein the group of correlation type photoelectric sensors comprises a row of light emitting parts arranged on one side of the surface of the tray body and a row of light receiving parts correspondingly arranged on the opposite side of the surface of the tray body; and a detection result output unit connected to the set of correlation type photoelectric sensors, wherein at least one line of stoppers is provided on a surface of the tray body along a direction of light rays of the set of correlation type photoelectric sensors, each line of stoppers of the at least one line of stoppers including a plurality of stoppers arranged at intervals.

Description

Presence detection device
Technical Field
The present disclosure relates to a presence detection device.
Background
In industrial production environments, particularly during material transfer, it is common for the transferred material (e.g., parts or products) to fall from a designated location. A typical scenario is that the robot during the process of grabbing the material and placing it on a conveyor belt or a conveyor tray may cause the material to be placed inaccurately at a given location on the conveyor belt or conveyor tray due to deviations in the accuracy of the robot itself or related equipment or even malfunctions. Further, the material which itself has not been in the designated position is further displaced until it falls from the conveyor belt or the conveyor tray due to unavoidable vibrations of the conveyor belt or the conveyor tray during the conveying process, such as vibrations of the associated clamp itself or vibrations caused by contact with other mechanisms.
The dropping of the material can have an adverse effect on production. In particular, materials with higher precision or materials which are more fragile may be damaged directly by falling, causing a larger cost loss. Therefore, it is desirable to have a suitable mechanism to discover this in time, so that the operator can deal with and solve the problem as soon as possible, avoiding further losses.
One conventional approach in the art is a detection mechanism based on computer vision technology. For example, when the conveyor belt or tray reaches the target location/station, the conveyor belt or tray may be photographed by an imaging device, and an image analysis may be performed on the photographed photograph to determine whether one or more materials that should be present are missing thereon. However, one problem with this approach is that it is relatively costly in itself, as it requires imaging equipment with some precision and corresponding associated image processing equipment, and the image processing programs therein also often require specialized development or customization. On the other hand, the timeliness of such detection at the downstream location is not high, as there is a possibility that a significant amount of material has fallen during the preceding conveyance.
Another conventional approach is a presence detection mechanism based on weight detection. For example, whether the weight of the transfer tray changes may be determined by directly weighing the transfer tray, or whether there is a dropped material on a tray placed under a conveyor belt or transfer tray may be determined by weighing a tray for receiving the dropped material. However, many materials are small in form factor and very light in weight, especially for precision manufacturing, so that generally accurate weighing facilities are not sufficient to accurately find such weight changes, and high-accuracy weighing arrangements are very costly.
Disclosure of Invention
In the summary, some selected concepts are presented in a simplified form as further described below in the detailed description. This summary is not intended to identify any critical or essential features of the claimed subject matter, nor is it intended to be used as an aid in determining the scope of the claimed subject matter.
It is an object of the present invention to provide a presence detection device with high accuracy and low cost, which overcomes at least the above-mentioned drawbacks of the prior art.
According to one aspect of the present disclosure, there is provided a presence detection apparatus including: a tray body; a group of correlation type photoelectric sensors arranged on two sides of the surface of the tray body and used for detecting the existence of a detected object falling on the tray body with specific shape specification, wherein the group of correlation type photoelectric sensors comprises a row of light emitting parts arranged on one side of the surface of the tray body and a row of light receiving parts correspondingly arranged on the opposite side of the surface of the tray body; and a detection result output unit connected to the set of correlation type photoelectric sensors, wherein at least one line of stoppers is provided on the surface of the tray body along the direction of the light of the set of correlation type photoelectric sensors, each of the at least one line of stoppers including a plurality of stoppers arranged at intervals, wherein the height of each of the plurality of stoppers is smaller than the distance H from the light of the set of correlation type photoelectric sensors to the surface of the tray body, wherein the distance d between two adjacent stoppers of the plurality of stoppers 1 Less than the minimum value S of the length and the width of the measured object min Wherein the plurality of stoppers includes at least two stoppers having different heights, a first height of a first stopper of the at least two stoppers is smaller than a second height of a second stopper of the at least two stoppers, and wherein a sum of the second height and a thickness T of the measured object is greater than the distance H.
Drawings
Implementations of the present disclosure are illustrated by way of example, and not by way of limitation, in the figures of the accompanying drawings and in which like reference numerals refer to identical or similar elements and in which:
FIG. 1 is a schematic diagram of a presence detection device according to some implementations of the present disclosure;
FIG. 2 is a schematic diagram of a set of correlation-type photosensors according to some implementations of the present disclosure;
3A-3D are schematic diagrams of stop arrangements according to some implementations of the disclosure; and
fig. 4 is a schematic diagram of a stop arrangement of a line of stops according to some implementations of the present disclosure.
Detailed Description
In the following description, for purposes of explanation, numerous specific details are set forth. However, it is understood that implementations of the present disclosure may be practiced without these specific details. In other instances, well-known circuits, structures and techniques have not been shown in detail in order not to obscure the understanding of this description.
References throughout this specification to "one implementation," "an implementation," "example implementations," "some implementations," "various implementations," etc., indicate that the implementations of the disclosure described may include particular features, structures, or characteristics, but every implementation may not necessarily include the particular features, structures, or characteristics. Furthermore, some implementations may have some, all, or none of the features described for other implementations.
In the description and claims, the phrase "a and/or B" as may occur is used to denote one of the following: (A), (B), (A and B). Similarly, the phrase "A, B and/or C" as may occur is used to denote one of the following: (A), (B), (C), (A and B), (A and C), (B and C), (A and B and C).
Referring to fig. 1, a schematic diagram of a presence detection device 100 according to some implementations of the present disclosure is shown. The exemplary presence detection device 100 shown in fig. 1 is based on a tray structure that may be used to receive objects that fall on its surface, and the presence detection device 100 may accordingly detect the presence of such objects.
As shown in fig. 1, the presence detection apparatus 100 includes a tray body 110. In this example, the tray body 110 may be rectangular, however other shapes of tray bodies are possible, and the present disclosure is not limited thereto.
The presence detection device 100 further includes a set of correlation-type photosensors for detecting the presence of a test object falling on the tray body 110. The pair of correlation type photoelectric sensors includes a row of light emitting portions 120 provided on one side (one short side of the rectangular tray body in the example of fig. 1) on the surface of the tray body 110, and a row of light receiving portions 130 provided correspondingly on the opposite side (the other short side of the rectangular tray body in the example of fig. 1) on the surface of the tray body 110.
The array of light emitting portions 120 includes a plurality of light emitting portions uniformly arranged, each of which is configured to emit light, including but not limited to infrared light, toward a corresponding one of a plurality of light receiving portions of the array of light receiving portions 130 that are also uniformly arranged. Under the condition that the light path is not blocked, the light emitted by the light emitting part can be received by the corresponding light receiving part on the other end. Once an object falls onto the tray body 110, a certain light ray is blocked, and the photoelectric sensor of the light ray receiving part of the light ray is triggered to generate a corresponding signal, so that the existence detection of the detected object is realized.
Turning first to fig. 2, a schematic diagram of a set of correlation-type photosensors according to some implementations of the present disclosure is shown. The left rectangular bar in fig. 2 may correspond to a column of light emitting portions of the set of correlation type photosensors, and the right rectangular bar may correspond to a corresponding column of light receiving portions of the set of correlation type photosensors. Each of the broken lines of the parallel distribution shown in fig. 2 corresponds to light rays emitted by each of the light emitting portions (not shown) and received by a corresponding one of the light receiving portions (not shown). The partial region between the array of light emitting portions and the array of light receiving portions, that is, the region on the surface of the tray body, may correspond to a region on which an object falling on the region is detected.
According to some implementations of the disclosure, the set of correlation-type photosensors may be safety gratings or light curtains. Further, according to some implementations of the present disclosure, the spacing between adjacent two light rays of the set of correlation-type photosensors is less than a minimum of the length and width of the object under test.
Returning to fig. 1, the exemplary presence detection device 100 further comprises a detection result output unit 140, which is connected to the set of correlation-type photosensors, for outputting a detection result signal. In some implementations according to the present disclosure, the detection result output unit 140 may output the detection result signal in a visual and/or audible manner. In one example, the detection result output unit 140 may include an audible and visual alarm.
Although the detection result output unit 140 is shown as being fixed to the tray body 110 in fig. 1, the detection result output unit 140 may be provided at a position remote from the tray body 110 or the set of correlation type photosensors. Further, according to some implementations of the present disclosure, the detection result output unit 140 may be connected to the set of correlation type photosensors in a wired manner, and in other implementations, the detection result output unit 140 may be connected to the set of correlation type photosensors in a wireless manner, however, the present disclosure is not limited thereto.
The presence detection device 100 may be flexibly arranged at any location in the production environment where objects may fall off. For example, during semiconductor packaging/testing, materials such as substrates (substrates) or packaged chips (chips) need to be frequently transferred between different tools or within tools. The presence detection device 100 may be placed under a corresponding conveyor belt or tray so that as soon as a chip or substrate falls onto the tray body 110, a corresponding alarm signal is detected and triggered by the presence detection device 100, whereby an operator can immediately know this and can handle it as soon as possible.
In some implementations according to the present disclosure, to facilitate the described presence detection, at least one row of stops (not shown in fig. 1) is provided on the surface of the tray body 110 along the direction of the light of the set of correlation-type photosensors, each of the at least one row of stops comprising a plurality of stops arranged at intervals. According to some implementations of the present disclosure, the stopper may be of a rectangular parallelepiped structure, however, the present disclosure is not limited thereto.
A stop arrangement according to some implementations of the present disclosure is discussed below in connection with fig. 3A-3D. It is noted that for ease of illustration, only a small portion of one row of stops (two or three stops included) is shown in fig. 3A-3D, however, those skilled in the art will appreciate that the discussion in connection with the examples of fig. 3A-3D applies equally to other portions of the row of stops, as well as to other rows of stop arrangements in the at least one row of stops.
Reference is first made to fig. 3A. In fig. 3A, the lowermost rectangular bar represents a tray body of a presence detection device according to the present disclosure, such as the tray body 110 shown in fig. 1. Two rectangular vertical bars on the tray body represent two stoppers, and the upper dotted line represents light emitted/received by a corresponding pair of light emitting portions and light receiving portions in the pair of correlation type photoelectric sensors. The rectangle placed at an oblique angle on the two stoppers represents the object to be measured. The discussion herein uses a semiconductor chip as an example of an object under test, assuming that the form factor of the chip is: 20mm long, 16mm wide and 0.6mm thick.
In some implementations according to the present disclosure, a height of each of the plurality of stops of each row is less than a distance H of light rays of the set of correlation-type photosensors to a surface of the tray body. Therefore, the height of the stop block cannot cause the light rays of the group of correlation type photoelectric sensors to be blocked by the stop block. Furthermore, the spacing d between two adjacent stops of the plurality of stops 1 Less than the minimum value S of the length and the width of the measured object min . In the above example, the minimum value S min =16 mm. By letting the distance d between two adjacent stops in each row of stops 1 Satisfying the condition d 1 <S min The following can be avoided: the measured object of the shape specification can fall into the interval between two adjacent stop blocks in a horizontal posture and is flatly attached to the surface of the tray body, thus the measured object does not shield the corresponding light, and therefore the measured object is notWill be detected. Furthermore, in some implementations according to the present disclosure, the multiple stops of each row may be evenly spaced, although uneven spacing is equally possible.
In some implementations according to the present disclosure, the plurality of stops of each row includes at least two stops of different heights (two heights h as shown in fig. 3A 1 And height h 2 ) A first height h of a first one of the at least two stops 1 A second height h smaller than a second one of the at least two stops 2 And wherein the sum of the second height H2 and the thickness T of the measured object (in the above example, t=0.6 mm) is larger than the distance H.
By means of the stoppers with different heights, the object to be measured can fall onto the tray body at a certain inclination angle as much as possible, for example, as shown in fig. 3A. It will be appreciated that such a tilted pose of the object under test tends to make it easier to block light from being detected by the presence detection device according to the present disclosure. On the other hand, even if the object to be measured happens to fall onto and be flatly attached to the second type of stopper without tilting, the situation shown in FIG. 3B occurs due to the height h of the second type of stopper 2 Meets the condition h 2 +T>H, in which case the object to be measured still blocks the light and is thus detected.
Thus, according to some implementations of the present disclosure, a presence detection device is provided that has higher accuracy and lower cost.
Further, in some implementations according to the present disclosure, in each of the line stops, two of the first stops are not adjacently arranged, wherein a distance d between two stops adjacent to one of the first stops 2 Less than the minimum value S of the length and the width of the measured object min
By means of such an arrangement, a height h can be ensured 1 Around the first stop of (a) are all of a height different from h 1 Other kinds of stops. In the example of FIG. 3C, both of the stops are the second type of stop, i.eThe heights are all h 2 However, the present disclosure is not limited thereto. Due to the spacing d between the two stops 2 Satisfies the condition d 2 <S min The following disadvantages can be further avoided: the measured object of this form factor happens to fall into the space between the two higher stops and may even happen to lie flat against the first stop arranged in this space, and thus does not block the corresponding light and thus is not detected by the presence detection device according to the present disclosure.
Further, in some implementations according to the present disclosure, in each row of stops, two identical stops are not arranged adjacently. In other words, the heights of two adjacent stoppers in each row are always different. Continuing to exist only at heights h 1 And h 2 By way of example, this means that not only the two first stops (height h 1 ) Adjacent to each other, and two second stops (height h 2 ) Adjacent situation. In other words, in one row of stoppers, the first stopper (height h 1 ) And a second stopper (height h 2 ) Always appear staggered. This further helps to make the object to be measured fall on the tray body at an inclined angle and thus be detected more easily.
Furthermore, in some implementations according to the present disclosure, the at least two stops included in each row of stops further includes a third stop, the third stop having a height h 3 Height h greater than the second stop 2 That is, h 1 <h 2 <h 3 <H. Providing a plurality of stops of different heights allows the stop arrangement to be more varied and better adapted to the detection of objects to be detected for certain form factors. By way of example and not limitation, such a measured object may be relatively large in length and/or width, while on the other hand it may be relatively thin in thickness. Some semiconductor chips/substrates may be used as typical examples of such objects under test.
Further, in some implementations according to the present disclosure, in each row of stops, two stops adjacent to the first stop from the left and rightThe blocks being not of the same kind, wherein the spacing d between the two blocks 2 The method meets the following conditions:
wherein h is a2 Representing the difference in height of the two stops.
To have the height of h respectively 1 、h 2 、h 3 For example, two of the stoppers adjacent to the first stopper are not the same stopper, and as described above, the two same stoppers are not adjacently arranged, which means that the stopper is positioned at a distance from the first stopper (height h 1 ) The two adjacent blocks are the second type (height h 2 ) And a third stopper (height h 3 ) As shown in fig. 3D. In this case, h a2 =h 3 -h 2 . By letting the height h in the case shown in fig. 3D 2 The block and the height of h 3 Distance d between the two stops of (a) 2 Satisfying the above conditions, the following adverse conditions that may occur can be further avoided: although the minimum value S of the length and width of the object to be measured min Greater than d 2 And thus the object to be measured does not fall into the space in a horizontal posture, but the object to be measured may get caught between the two stoppers in an inclined posture right after falling, thereby making it impossible to accurately detect it.
Furthermore, according to some implementations of the present disclosure, in addition to the above conditions, the spacing d between the two stops 2 The following is also satisfied:
wherein h' represents the height of the higher of the two stops.
Continuing with the example of fig. 3D, where h "=h 3 . The above-mentioned and distance d 2 Conditions related to the thickness T of the object to be measuredIs determined based on a trigonometric function. This condition is satisfied such that even for a measured object that may be relatively large in length and/or width and relatively thin in thickness, a corner of the measured object (e.g., the lower right corner of the rectangle representing the measured object in fig. 3D) appears just above a corner of the higher stopper (e.g., the height h in fig. 3D) 3 The upper left corner of the rectangle of the stopper) contact, it is also possible to ensure that the object to be measured, which may be at a small inclination angle, is shielded from light so as to be accurately detected by the presence detection apparatus according to the present disclosure.
Furthermore, in some implementations according to the present disclosure, for a spacing d between two adjacent stops in each row of stops 1 In a similar manner to that described above, it may be otherwise satisfied that:
wherein h is a1 Representing the difference in height of the two adjacent stops. And, according to some implementations of the present disclosure, the spacing d is further 1 It is also possible to satisfy:
wherein h' represents the height of the higher one of the two adjacent stops.
Thus, the condition that the object to be measured is clamped between two adjacent stoppers in the inclined posture after falling can be avoided, and likewise, the object to be measured is further ensured to fall on a plurality of adjacent stoppers with small inclined angle (for example, the height is h 3 And h 2 Is still accurately detected.
The presence detection device according to some implementations of the present disclosure can detect falling objects under test (including but not limited to substrates or chips in semiconductor packaging/testing processes) accurately in time at a low cost, thereby facilitating operators in the production process to quickly determine and solve problems, avoiding larger production losses.
Although not explicitly described in the above discussion, it will be appreciated by those skilled in the art that a presence detection apparatus according to some implementations of the present disclosure is not only suitable for detecting objects under test for a particular one form factor, but rather that such a presence detection apparatus may detect objects under test for multiple form factors simultaneously, provided that the relevant parameters meet a minimum value over the length/width/thickness of a variety of different objects under test when the presence detection apparatus is designed and manufactured.
Fig. 4 is a schematic illustration of a stop arrangement of a line of stops according to some implementations of the present disclosure. As shown, the stop arrangement of a row of stops may be determined by repeating a portion of the stop arrangement of stops determined in the foregoing manner (e.g., including the foregoing height h 1 、h 2 、h 3 Three different stops) are provided. Likewise, those skilled in the art will appreciate that the example of FIG. 4 is equally applicable to other rows of stops. Furthermore, according to some implementations of the present disclosure, the spacing between adjacent rows of stops is less than a minimum S of the length and width of the object under test min
Some implementations according to the present disclosure are discussed above in connection with the accompanying drawings. It should be understood that the illustrations are for illustrative purposes only and should not be construed as any limitation on the inventive concepts of the present disclosure.
Some exemplary implementations of the present disclosure are described below:
example 1 provides a presence detection device, comprising: a tray body; a group of correlation type photoelectric sensors arranged on two sides of the surface of the tray body and used for detecting the existence of a detected object falling on the tray body with specific shape specification, wherein the group of correlation type photoelectric sensors comprises a row of light emitting parts arranged on one side of the surface of the tray body and a row of light receiving parts correspondingly arranged on the opposite side of the surface of the tray body; and detection connected to the set of correlation type photoelectric sensorsA result output unit in which at least one line of stoppers are provided on the surface of the tray body in the direction of the light of the set of correlation type photosensors, each of the at least one line of stoppers including a plurality of stoppers arranged at intervals, wherein the height of each of the plurality of stoppers is smaller than the distance H from the light of the set of correlation type photosensors to the surface of the tray body, wherein the distance d between two adjacent stoppers of the plurality of stoppers 1 Less than the minimum value S of the length and the width of the measured object min Wherein the plurality of stoppers includes at least two stoppers having different heights, a first height of a first stopper of the at least two stoppers is smaller than a second height of a second stopper of the at least two stoppers, and wherein a sum of the second height and a thickness T of the measured object is greater than the distance H.
Example 2 may include the subject matter of example 1, wherein in each of the one or more rows of stops, two of the first stops are not disposed adjacently, and wherein a spacing d between two stops adjacent to and about one of the first stops 2 Less than the minimum value S of the length and the width of the measured object min
Example 3 may include the subject matter of example 2, wherein in each row of stops, two identical stops are not disposed adjacently, and wherein the at least two stops further comprise a third stop, the third stop having a height greater than a height of the second stop.
Example 4 may include the subject matter of example 3, wherein in each of the one or more stops, two stops that are laterally adjacent to the first stop are not the same stop, and wherein a spacing d between the two stops 2 The method meets the following conditions:
wherein h is a2 Representing the difference in height of the two stops.
Example5 may include the subject matter of example 4, wherein the spacing d between the two stops 2 The following is also satisfied:
wherein h' represents the height of the higher of the two stops.
Example 6 may include the subject matter of example 3, wherein, in each row of stops, a spacing d between two adjacent stops 1 The method meets the following conditions:
wherein h is a1 Representing the difference in height of the two adjacent stops.
Example 7 may include the subject matter of example 6, wherein a spacing d between the two adjacent stops 1 The following is also satisfied:
wherein h' represents the height of the higher one of the two adjacent stops.
Example 8 may include the subject matter of example 1, wherein the set of correlation photosensors is a safety grating.
Example 9 may include the subject matter of example 1, wherein a spacing between adjacent two light rays of the set of correlation-type photosensors is less than a minimum value S of a length and a width of the measured object min
Example 10 may include the subject matter of example 1, wherein a spacing between adjacent ones of the at least one row of stops is less than a minimum value S of a length and a width of the object under test min
Example 11 may include the subject matter of example 1, wherein the detection result output unit includes an audible and visual alarm, and wherein the detection result output unit is connected to the set of correlation-type photosensors, either wired or wirelessly.
Example 12 may include the subject matter of example 1, wherein the object under test is a semiconductor chip or substrate.
What has been described above includes examples of the disclosed architecture. It is, of course, not possible to describe every conceivable combination of components and/or methodologies, but one of ordinary skill in the art may recognize that many further combinations and permutations are possible. Accordingly, the novel architecture is intended to embrace all such alternatives, modifications and variations that fall within the spirit and scope of the appended claims.

Claims (11)

1. A presence detection device, comprising:
a tray body;
a group of correlation type photoelectric sensors arranged on two sides of the surface of the tray body and used for detecting the existence of a detected object falling on the tray body with specific shape specification, wherein the group of correlation type photoelectric sensors comprises a row of light emitting parts arranged on one side of the surface of the tray body and a row of light receiving parts correspondingly arranged on the opposite side of the surface of the tray body; and
a detection result output unit connected with the group of correlation type photoelectric sensors,
wherein at least one row of stoppers is provided on the surface of the tray body along the direction of the light of the set of correlation type photoelectric sensors, each of the at least one row of stoppers includes a plurality of stoppers arranged at intervals, wherein the height of each of the plurality of stoppers is smaller than the distance H from the light of the set of correlation type photoelectric sensors to the surface of the tray body, wherein the distance d between two adjacent stoppers of the plurality of stoppers 1 Less than the minimum value S of the length and the width of the measured object min
Wherein the plurality of stoppers includes at least two stoppers having different heights, a first height of a first stopper of the at least two stoppers is smaller than a second height of a second stopper of the at least two stoppers, and wherein a sum of the second height and a thickness T of the measured object is larger than the distance H,
wherein in each of the first-type stoppers, two of the first-type stoppers are not adjacently arranged, and wherein a distance d between two stoppers adjacent to one of the first-type stoppers from the left to the right 2 Less than the minimum value S of the length and the width of the measured object min
2. The presence detection apparatus according to claim 1, wherein in each row of stops, two identical stops are not arranged adjacently, and wherein the at least two stops further comprise a third stop, the third stop having a height that is greater than the height of the second stop.
3. The presence detection apparatus according to claim 2, wherein, in each of the line stoppers, two stoppers left and right adjacent to the first type stopper are not the same stopper, and wherein a distance d between the two stoppers 2 The method meets the following conditions:
wherein h is a2 Representing the difference in height of the two stops.
4. A presence detection apparatus according to claim 3, wherein the spacing d between the two stops 2 The following is also satisfied:
wherein h' represents the height of the higher of the two stops.
5. The presence detection apparatus according to claim 2, wherein in each of the line stops, a distance d between two adjacent stops 1 The method meets the following conditions:
wherein h is a1 Representing the difference in height of the two adjacent stops.
6. The presence detection device of claim 5, wherein a spacing d between the two adjacent stops 1 The following is also satisfied:
wherein h' represents the height of the higher one of the two adjacent stops.
7. The presence detection device of claim 1, wherein the set of correlation photosensors is a safety grating.
8. The presence detection device according to claim 1, wherein a spacing between adjacent two light rays of said set of correlation-type photosensors is smaller than a minimum value S of a length and a width of said object under test min
9. The presence detection apparatus according to claim 1, wherein a spacing between adjacent two of the at least one line of stoppers is smaller than a minimum value S of a length and a width of the object under test min
10. The presence detection device according to claim 1, wherein the detection result output unit comprises an audible and visual alarm, and wherein the detection result output unit is connected to the set of correlation-type photosensors, either wired or wireless.
11. The presence detection device of claim 1, wherein the object under test is a semiconductor chip or a substrate.
CN202210250842.7A 2022-03-15 2022-03-15 Presence detection device Active CN114476585B (en)

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CN114476585B true CN114476585B (en) 2023-12-15

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