CN108543671A - A kind of cleaning device, coating machine - Google Patents

A kind of cleaning device, coating machine Download PDF

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Publication number
CN108543671A
CN108543671A CN201810366001.6A CN201810366001A CN108543671A CN 108543671 A CN108543671 A CN 108543671A CN 201810366001 A CN201810366001 A CN 201810366001A CN 108543671 A CN108543671 A CN 108543671A
Authority
CN
China
Prior art keywords
cleaning device
foreign matter
support
transmission device
adsorbent equipment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201810366001.6A
Other languages
Chinese (zh)
Inventor
徐行涛
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TCL China Star Optoelectronics Technology Co Ltd
Original Assignee
Shenzhen China Star Optoelectronics Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shenzhen China Star Optoelectronics Technology Co Ltd filed Critical Shenzhen China Star Optoelectronics Technology Co Ltd
Priority to CN201810366001.6A priority Critical patent/CN108543671A/en
Publication of CN108543671A publication Critical patent/CN108543671A/en
Pending legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0254Coating heads with slot-shaped outlet
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B15/00Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
    • B05B15/50Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter

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  • Cleaning In General (AREA)

Abstract

The present invention provides a kind of cleaning devices, cleaning device when coating machine detects that substrate surface has foreign matter for being cleaned, coating machine includes nozzle assembly and a pair of of sliding rail set on nozzle assembly opposite sides and a pair of of first sensor, the first sensor position of detection foreign matter in glide direction when being slided on sliding rail for nozzle assembly, cleaning device includes first support and the guide rail set on first support opposite sides, glide direction of moving direction of the first support on guide rail perpendicular to nozzle assembly on sliding rail, first support includes first driving means, first transmission device and the adsorbent equipment on the first transmission device, first driving means are for driving the first transmission device that adsorbent equipment is made to drive to position of the foreign matter in glide direction, adsorbent equipment is used for the adsorption of foreign matter when first support is moved along guide rail.The present invention is used cooperatively by first sensor and first support, can accurately be cleaned foreign matter, and artificial clean puzzlement is eliminated.

Description

A kind of cleaning device, coating machine
Technical field
The invention belongs to coating machine technical fields, and in particular to a kind of cleaning device, coating machine.
Background technology
In the preparation process of TFT-LCD, slot coated is a very important step in yellow light processing procedure.But when coating machine Base station or substrate surface can generate highly important influence, or even can cause to apply there are when foreign matter (such as particle) on Painting effect Cloth machine delay machine.And it needs to shut down coating machine and carry out when such as foreign matter occur in the base station of coating machine or substrate surface artificial clear It washes.Therefore, the above problem influences the efficiency of coating very big, considerably increases the time of preparation, improves the cost of preparation.
Currently, someone develops a kind of cleaning device for coating machine, by sticky idler wheel by the foreign matter on base station surface Removal, but when substrate surface is there are when foreign matter, then can not be removed with stickiness idler wheel.Therefore, existing cleaning device is still The demand of user is not achieved.
Invention content
In consideration of it, to solve the above-mentioned problems, the present invention provides a kind of cleaning device, can be used for cleaning substrate surface Foreign matter eliminates artificial clean puzzlement.The time of spraying is not only greatly saved, but also also improves the yield of product, drops Low cost.
First aspect present invention provides a kind of cleaning device, and the cleaning device is used to detect substrate table when coating machine Face is cleaned when having foreign matter, and the coating machine includes nozzle assembly and a pair of of sliding rail set on the nozzle assembly opposite sides With a pair of of first sensor, the first sensor is used to detect when the nozzle assembly slides on the sliding rail described different Position of the object in glide direction, the cleaning device include first support and leading set on the first support opposite sides Rail, sliding side of moving direction of the first support on the guide rail perpendicular to the nozzle assembly on the sliding rail To the first support includes first driving means, the first transmission device and the absorption dress on first transmission device It sets, the first sensor is additionally operable to position signal of the foreign matter in the glide direction being transferred to first driving Device, the first driving means are for receiving the position signal and first transmission device being driven to make the adsorbent equipment Position of the foreign matter in the glide direction is driven to, the adsorbent equipment is used for when the first support is along the guide rail The foreign matter is adsorbed when mobile.
A kind of cleaning device that first aspect present invention provides, first, when coating machine is started to work, nozzle assembly starts Along sliding rail slide and spray substrate surface.Nozzle assembly finds that substrate surface has foreign matter during spraying When, position of the foreign matter of first sensor detection at this time in glide direction, and nozzle assembly returns initial position.Then, first Position signal of the foreign matter in the glide direction is transferred to the first driving means in first support by sensor, First driving means drive first transmission device that the adsorbent equipment is made to drive to the foreign matter in the glide direction Position, and then first support starts to be moved on the guide rail perpendicular with sliding rail, and opens in the process of moving Adsorbent equipment is opened, adsorbent equipment can be adsorbed persistently in the process of moving.Finally, adsorbent equipment can be by the different of substrate surface Object absorption is clean, has achieved the purpose that clean substrate surface.The present invention is used cooperatively by first sensor and first support, Accurately foreign matter can be cleaned, eliminate artificial clean puzzlement.The time of spraying is not only greatly saved, but also carries The high yield of product, reduces cost.
Wherein, the first support is equipped with second sensor, the second sensor close to the opposite sides of the guide rail Orientation of the foreign matter on the moving direction is detected during the movement on the guide rail for the first support, The second sensor is additionally operable to bearing signal of the foreign matter on the moving direction being transferred to the adsorbent equipment, institute Adsorbent equipment is stated for receiving the bearing signal and opening the adsorbent equipment makes the foreign matter be adsorbed by the adsorbent equipment.
Wherein, the cleaning device is additionally operable to clean the foreign matter on the base station surface of the coating machine, and the cleaning device is also Including the second support that can be moved along the guide rail, the second support include the second driving device, the second transmission device and with The sticky roller that second transmission device is connected, the sticky roller are arranged in parallel in the base station surface, and described second Driving device is for driving second transmission device that the sticky roller edge is made to be moved perpendicular to the direction on the base station surface The sticky roller is set to conform to the base station surface, the sticky roller in the second support along the guide rail for moving The foreign matter on base station surface described in Shi Qingjie.
Wherein, the cleaning device further includes controller, and the controller is by way of wirelessly or non-wirelessly with described the One driving device is connected with second driving device, and the controller is for controlling the first driving means and described second Driving device.
Wherein, when the cleaning device is started to work, the controller, which is additionally operable to control the cleaning device, to be moved to The base station surface and the substrate surface.
Wherein, the first support further includes first shaft coupling, and the first shaft coupling is for connecting first driving Device and first transmission device, the second support further include second shaft coupling, and the second shaft coupling is for connecting institute State the second driving device and second transmission device.
Wherein, first transmission device includes first movement platform, the first movement platform and the adsorbent equipment It is connected, first transmission device, which controls the first movement platform movement adsorbent equipment is made to drive to the foreign matter, to exist Position in the glide direction, second transmission device include the second mobile platform, second mobile platform with it is described Sticky roller is connected, second transmission device control the second mobile platform movement make the sticky roller along perpendicular to It moves in the direction on the base station surface.
Wherein, the second sensor and the first sensor are photoelectric sensor.
Wherein, the sticky roller is made of cohesive material or the outer surface of the sticky roller coats toughness material Material.
Second aspect of the present invention provides a kind of coating machine, including the cleaning device that first aspect present invention provides.
A kind of coating machine that second aspect of the present invention provides, the cleaning device provided using first aspect present invention can essence The foreign matter for really cleaning substrate surface eliminates artificial clean puzzlement.The yield for substantially increasing product, reduces cost.
Description of the drawings
It to describe the technical solutions in the embodiments of the present invention more clearly, below will be to required in the embodiment of the present invention The attached drawing used illustrates.
Fig. 1 is the structural schematic diagram of cleaning device in the embodiment of the present invention;
Fig. 2 is the structural schematic diagram of first support in cleaning device in the embodiment of the present invention;
Fig. 3 is the structural schematic diagram of second support in cleaning device in the embodiment of the present invention.
Specific implementation mode
It is the preferred embodiment of the present invention below, it is noted that for those skilled in the art, Various improvements and modifications may be made without departing from the principle of the present invention, these improvements and modifications are also considered as this hair Bright protection domain.
A kind of-Fig. 3 cleaning devices 1 provided in an embodiment of the present invention are please referred to Fig.1, the cleaning device 1 is used for when coating Machine examination is measured when substrate surface has foreign matter and is cleaned, the coating machine include nozzle assembly 2 and be set to 2 phase of the nozzle assembly A pair of of sliding rail 3 to both sides and a pair of of first sensor 4, the first sensor 4 are used for when the nozzle assembly 2 is in the cunning Position of the foreign matter in glide direction is detected when being slided on rail 3, the cleaning device 1 is including first support 11 and is set to institute The guide rail 12 of 11 opposite sides of first support is stated, moving direction of the first support 11 on the guide rail 12 is perpendicular to described Glide direction of the nozzle assembly 2 on the sliding rail 3, the first support 11 include the transmission dress of first driving means 111, first 112 and the adsorbent equipment 113 on first transmission device 112 are set, the first sensor 4 is additionally operable to the foreign matter Position signal in the glide direction is transferred to the first driving means 111, and the first driving means 111 are for connecing It receives the position signal and drives first transmission device 112 that the adsorbent equipment 113 is made to drive to the foreign matter described Position in glide direction, the adsorbent equipment 113 when the first support 11 is moved along the guide rail 12 for adsorbing institute State foreign matter.
A kind of cleaning device 1 provided in an embodiment of the present invention, first, when coating machine is started to work, nozzle assembly 2 starts (arrow direction at such as Fig. 1 sliding rails) is slided along sliding rail 3 and substrate surface is sprayed.It is sprayed during spraying When nozzle assembly 2 finds that substrate surface has foreign matter, position of the foreign matter of the detection of first sensor 4 at this time in glide direction, and nozzle Component 2 returns initial position.Then, position signal of the foreign matter in the glide direction is transferred to by first sensor 4 The first driving means 111 in first support 11, first driving means 111 drive first transmission device 112 to make institute It states adsorbent equipment 113 and is driven (as shown in the arrow direction in Fig. 2) to position of the foreign matter in the glide direction, immediately The beginning of first support 11 to be moved on the guide rail 12 perpendicular with sliding rail 3 (such as the arrow direction institute at Fig. 1 middle guides Show), and adsorbent equipment 113 is opened in the process of moving, adsorbent equipment 113 can be adsorbed persistently in the process of moving. Finally, adsorbent equipment 113 can adsorb the foreign matter of substrate surface clean, achieve the purpose that clean substrate surface.The present invention is logical Being used cooperatively for first sensor 4 and first support 11 is crossed, can accurately be cleaned foreign matter, is eliminated artificial clean tired It disturbs.The time of spraying is not only greatly saved, but also also improves the yield of product, reduces cost.
In embodiment of the present invention, the first support 11 is equipped with second sensor close to the opposite sides of the guide rail 12 115, the second sensor 115 detects for the first support 11 during the movement on the guide rail 12 described different Orientation of the object on the moving direction, the second sensor 115 are additionally operable to the foreign matter on the moving direction Bearing signal is transferred to the adsorbent equipment 113, and the adsorbent equipment 113 is for receiving the bearing signal and opening the suction Adsorption device 113 makes the foreign matter be adsorbed by the adsorbent equipment 113.
In present embodiment, first support 11 on the guide rail 12 perpendicular with sliding rail 3 when being moved, absorption dress 113 are set to remain off, and second sensor 115 is constantly in working condition, when encountering foreign matter in the process of moving, Second sensor 115 can detect the orientation of foreign matter.Second sensor 115 sends bearing signal to adsorbent equipment 113, tightly at this time Then adsorbent equipment 113 is opened and adsorbs away foreign matter.It can more be accurately positioned the position of foreign matter in this way.And it can avoid absorption Device 113 is always on, is impacted to the substrate having been coated with, and improves clean efficiency, reduces energy consumption, cost-effective.
In embodiment of the present invention, the cleaning device 1 is additionally operable to clean the foreign matter on the base station surface of the coating machine, institute It further includes the second support 13 that can be moved along the guide rail 12 (as shown in the arrow direction at Fig. 1 middle guides) to state cleaning device 1, The second support 13 includes the second driving device 131, the second transmission device 132 and is connected with second transmission device 132 The sticky roller 133 connect, the sticky roller 133 are arranged in parallel in the base station surface, and second driving device 131 is used for Drive second transmission device 132 that the sticky roller 133 is made to move (such as Fig. 3 along perpendicular to the direction on the base station surface In arrow direction shown in) so that sticky roller 133 is conformed to the base station surface, the sticky roller 133 is used for described the Two holders 13 clean the foreign matter on the base station surface when being moved along the guide rail 12.
In present embodiment, cleaning device 1 can be also used for going the surface of cleaning base station when coating machine does not work, and second Driving device 131 can drive second transmission device 132 to make the sticky roller 133 along the side perpendicular to the base station surface To moving up and down, and sticky roller 133 is made to conform to the surface of the base station.Then, second support 13 is along guide rail 12 Direction moved, the foreign matter on base station surface can be carried out adherency cleaning by sticky roller 133 in the process of moving.
In embodiment of the present invention, the cleaning device 1 further includes controller (being not shown), and the controller is logical The mode crossed wirelessly or non-wirelessly is connect with the first driving means 111 and second driving device 131, and the controller is used In the control first driving means 111 and second driving device 131.Controller sends out control signal and then goes to control institute State first driving means 111 and second driving device 131.
In embodiment of the present invention, when the cleaning device 1 is started to work, the controller is additionally operable to control described clear Clean device 1 is moved to the base station surface and the substrate surface.When cleaning device 1 does not work, cleaning device 1 is located at base station Or the lower section of substrate.When cleaning device 1 is started to work, controller control cleaning device 1 makes cleaning device 1 be moved to the base Platform surface and the substrate surface proceed by work again.Space not only can be saved, can not also interfere coating machine just Often operation.
In embodiment of the present invention, also controllable second driver of controller and then 133 court of control sticky roller Base station surface drop and clean number control the pressure of sticky roller 133 and base station surface, final control viscosity The adhesion strength of roller 133.
In embodiment of the present invention, the first support 11 further includes first shaft coupling 114, the first shaft coupling 114 For connecting the first driving means 111 and first transmission device 112, the second support 13 further includes the second shaft coupling Device 134, the second shaft coupling 134 is for connecting second driving device 131 and second transmission device 132.First Shaft coupling 114 is connected by screw thread with the first transmission device 112 and first driving means 111, and second shaft coupling 134 passes through spiral shell Line is connected with the first transmission device 112 and first driving means 111.
In embodiment of the present invention, first transmission device 112 includes first movement platform 116, the first movement Platform 116 is connected with the adsorbent equipment 113, and first transmission device 112 controls the first movement platform 116 and moves The adsorbent equipment 113 is set to drive to position of the foreign matter in the glide direction, second transmission device 132 includes Second mobile platform 136, second mobile platform 136 are connected with the sticky roller 133, second transmission device 132 control second mobile platforms 136, which move, makes the sticky roller 133 along the direction shifting perpendicular to the base station surface It is dynamic.
In embodiment of the present invention, the second sensor 115 and the first sensor 4 are photoelectric sensor.
In embodiment of the present invention, the sticky roller 133 is made of cohesive material or the sticky roller 133 Outer surface is coated with cohesive material.
In embodiment of the present invention, 113 surface of the adsorbent equipment is equipped with the suction hole of multiple array arrangements.Multiple arrays The suction hole of arrangement can preferably adsorb foreign matter.
In embodiment of the present invention, first driving means 111 and the second driving device 131 are servo motor.
A kind of coating machine provided in an embodiment of the present invention, including cleaning device provided in an embodiment of the present invention 1.
A kind of coating machine that second aspect of the present invention provides, the cleaning device 1 provided using first aspect present invention can essence The foreign matter for really cleaning substrate surface eliminates artificial clean puzzlement, substantially increases the yield of product, reduce cost.
The content provided above embodiment of the present invention is described in detail, herein to the principle of the present invention and reality The mode of applying is expounded and illustrates, the method and its core concept described above for being merely used to help understand the present invention;Meanwhile For those of ordinary skill in the art, according to the thought of the present invention, has change in specific embodiments and applications Become place, in conclusion the content of the present specification should not be construed as limiting the invention.

Claims (10)

1. a kind of cleaning device, which is characterized in that the cleaning device is used for when coating machine detects that substrate surface has foreign matter It is cleaned, the coating machine includes nozzle assembly and a pair of of sliding rail and a pair first set on the nozzle assembly opposite sides Sensor, the first sensor is for detecting the foreign matter when the nozzle assembly slides on the sliding rail in sliding side Upward position, the cleaning device include first support and the guide rail set on the first support opposite sides, and described first Glide direction of moving direction of the holder on the guide rail perpendicular to the nozzle assembly on the sliding rail, described first Frame includes first driving means, the first transmission device and the adsorbent equipment on first transmission device, and described first passes Sensor is additionally operable to position signal of the foreign matter in the glide direction being transferred to the first driving means, and described first Driving device is described different for receiving the position signal and driving first transmission device that the adsorbent equipment is made to drive to Position of the object in the glide direction, the adsorbent equipment when the first support is moved along the guide rail for adsorbing institute State foreign matter.
2. cleaning device as described in claim 1, which is characterized in that opposite sides of the first support close to the guide rail Equipped with second sensor, the second sensor is for the first support during mobile on the guide rail described in detection Orientation of the foreign matter on the moving direction, the second sensor are additionally operable to the side on the moving direction by the foreign matter Position signal transmission gives the adsorbent equipment, the adsorbent equipment to make for receiving the bearing signal and opening the adsorbent equipment The foreign matter is adsorbed by the adsorbent equipment.
3. cleaning device as described in claim 1, which is characterized in that the cleaning device is additionally operable to clean the coating machine The foreign matter on base station surface, the cleaning device further include the second support that can be moved along the guide rail, and the second support includes Second driving device, the second transmission device and the sticky roller being connected with second transmission device, the sticky roller are flat Row is set to the base station surface, and second driving device is for driving second transmission device to make the sticky roller edge Direction movement perpendicular to the base station surface makes the sticky roller conform to the base station surface, and the sticky roller is used for The foreign matter on the base station surface is cleaned when the second support is moved along the guide rail.
4. cleaning device as claimed in claim 3, which is characterized in that the cleaning device further includes controller, the control Device is connect by way of wirelessly or non-wirelessly with the first driving means and second driving device, and the controller is used for Control the first driving means and second driving device.
5. cleaning device as claimed in claim 4, which is characterized in that when the cleaning device is started to work, the control Device, which is additionally operable to control the cleaning device, is moved to the base station surface and the substrate surface.
6. cleaning device as claimed in claim 3, which is characterized in that the first support further includes first shaft coupling, described For first shaft coupling for connecting the first driving means and first transmission device, the second support further includes second Axis device, the second shaft coupling is for connecting second driving device and second transmission device.
7. cleaning device as claimed in claim 3, which is characterized in that first transmission device includes first movement platform, The first movement platform is connected with the adsorbent equipment, and first transmission device controls the first movement platform movement The adsorbent equipment is set to drive to position of the foreign matter in the glide direction, second transmission device includes the second shifting Moving platform, second mobile platform are connected with the sticky roller, the second transmission device control second movement Platform movement makes the sticky roller edge be moved perpendicular to the direction on the base station surface.
8. cleaning device as described in claim 1, which is characterized in that the second sensor and the first sensor are light Electric transducer.
9. cleaning device as claimed in claim 3, which is characterized in that the sticky roller is made of cohesive material, Huo Zhesuo The outer surface for stating sticky roller is coated with cohesive material.
10. a kind of coating machine, which is characterized in that including such as claim 1-9 any one of them cleaning device.
CN201810366001.6A 2018-04-23 2018-04-23 A kind of cleaning device, coating machine Pending CN108543671A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201810366001.6A CN108543671A (en) 2018-04-23 2018-04-23 A kind of cleaning device, coating machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201810366001.6A CN108543671A (en) 2018-04-23 2018-04-23 A kind of cleaning device, coating machine

Publications (1)

Publication Number Publication Date
CN108543671A true CN108543671A (en) 2018-09-18

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201810366001.6A Pending CN108543671A (en) 2018-04-23 2018-04-23 A kind of cleaning device, coating machine

Country Status (1)

Country Link
CN (1) CN108543671A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113203510A (en) * 2021-04-28 2021-08-03 深圳市鸿瑞传感仪器有限公司 Tension sensor for new energy coating machine

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103521479A (en) * 2013-09-27 2014-01-22 京东方科技集团股份有限公司 Cleaning device and linear coater
CN203508433U (en) * 2013-09-13 2014-04-02 京东方科技集团股份有限公司 Cleaning device
JP2017029880A (en) * 2015-07-29 2017-02-09 株式会社Screenホールディングス Nozzle cleaning member, nozzle cleaning device, and coating device
CN106607396A (en) * 2015-10-23 2017-05-03 修谷鲁开发股份有限公司 Cleaning head and cleaning method
CN107199188A (en) * 2017-06-12 2017-09-26 京东方科技集团股份有限公司 Coating machine, coating system and coating machine clean method
CN107199139A (en) * 2017-05-25 2017-09-26 昆山国显光电有限公司 The method of foreign matter on apparatus for coating and detection substrate

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN203508433U (en) * 2013-09-13 2014-04-02 京东方科技集团股份有限公司 Cleaning device
CN103521479A (en) * 2013-09-27 2014-01-22 京东方科技集团股份有限公司 Cleaning device and linear coater
JP2017029880A (en) * 2015-07-29 2017-02-09 株式会社Screenホールディングス Nozzle cleaning member, nozzle cleaning device, and coating device
CN106607396A (en) * 2015-10-23 2017-05-03 修谷鲁开发股份有限公司 Cleaning head and cleaning method
CN107199139A (en) * 2017-05-25 2017-09-26 昆山国显光电有限公司 The method of foreign matter on apparatus for coating and detection substrate
CN107199188A (en) * 2017-06-12 2017-09-26 京东方科技集团股份有限公司 Coating machine, coating system and coating machine clean method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113203510A (en) * 2021-04-28 2021-08-03 深圳市鸿瑞传感仪器有限公司 Tension sensor for new energy coating machine
CN113203510B (en) * 2021-04-28 2021-10-22 深圳市鸿瑞传感仪器有限公司 Tension sensor for new energy coating machine

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