CN108543671A - A kind of cleaning device, coating machine - Google Patents
A kind of cleaning device, coating machine Download PDFInfo
- Publication number
- CN108543671A CN108543671A CN201810366001.6A CN201810366001A CN108543671A CN 108543671 A CN108543671 A CN 108543671A CN 201810366001 A CN201810366001 A CN 201810366001A CN 108543671 A CN108543671 A CN 108543671A
- Authority
- CN
- China
- Prior art keywords
- cleaning device
- foreign matter
- support
- transmission device
- adsorbent equipment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0254—Coating heads with slot-shaped outlet
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
- B05B15/50—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter
Landscapes
- Cleaning In General (AREA)
Abstract
The present invention provides a kind of cleaning devices, cleaning device when coating machine detects that substrate surface has foreign matter for being cleaned, coating machine includes nozzle assembly and a pair of of sliding rail set on nozzle assembly opposite sides and a pair of of first sensor, the first sensor position of detection foreign matter in glide direction when being slided on sliding rail for nozzle assembly, cleaning device includes first support and the guide rail set on first support opposite sides, glide direction of moving direction of the first support on guide rail perpendicular to nozzle assembly on sliding rail, first support includes first driving means, first transmission device and the adsorbent equipment on the first transmission device, first driving means are for driving the first transmission device that adsorbent equipment is made to drive to position of the foreign matter in glide direction, adsorbent equipment is used for the adsorption of foreign matter when first support is moved along guide rail.The present invention is used cooperatively by first sensor and first support, can accurately be cleaned foreign matter, and artificial clean puzzlement is eliminated.
Description
Technical field
The invention belongs to coating machine technical fields, and in particular to a kind of cleaning device, coating machine.
Background technology
In the preparation process of TFT-LCD, slot coated is a very important step in yellow light processing procedure.But when coating machine
Base station or substrate surface can generate highly important influence, or even can cause to apply there are when foreign matter (such as particle) on Painting effect
Cloth machine delay machine.And it needs to shut down coating machine and carry out when such as foreign matter occur in the base station of coating machine or substrate surface artificial clear
It washes.Therefore, the above problem influences the efficiency of coating very big, considerably increases the time of preparation, improves the cost of preparation.
Currently, someone develops a kind of cleaning device for coating machine, by sticky idler wheel by the foreign matter on base station surface
Removal, but when substrate surface is there are when foreign matter, then can not be removed with stickiness idler wheel.Therefore, existing cleaning device is still
The demand of user is not achieved.
Invention content
In consideration of it, to solve the above-mentioned problems, the present invention provides a kind of cleaning device, can be used for cleaning substrate surface
Foreign matter eliminates artificial clean puzzlement.The time of spraying is not only greatly saved, but also also improves the yield of product, drops
Low cost.
First aspect present invention provides a kind of cleaning device, and the cleaning device is used to detect substrate table when coating machine
Face is cleaned when having foreign matter, and the coating machine includes nozzle assembly and a pair of of sliding rail set on the nozzle assembly opposite sides
With a pair of of first sensor, the first sensor is used to detect when the nozzle assembly slides on the sliding rail described different
Position of the object in glide direction, the cleaning device include first support and leading set on the first support opposite sides
Rail, sliding side of moving direction of the first support on the guide rail perpendicular to the nozzle assembly on the sliding rail
To the first support includes first driving means, the first transmission device and the absorption dress on first transmission device
It sets, the first sensor is additionally operable to position signal of the foreign matter in the glide direction being transferred to first driving
Device, the first driving means are for receiving the position signal and first transmission device being driven to make the adsorbent equipment
Position of the foreign matter in the glide direction is driven to, the adsorbent equipment is used for when the first support is along the guide rail
The foreign matter is adsorbed when mobile.
A kind of cleaning device that first aspect present invention provides, first, when coating machine is started to work, nozzle assembly starts
Along sliding rail slide and spray substrate surface.Nozzle assembly finds that substrate surface has foreign matter during spraying
When, position of the foreign matter of first sensor detection at this time in glide direction, and nozzle assembly returns initial position.Then, first
Position signal of the foreign matter in the glide direction is transferred to the first driving means in first support by sensor,
First driving means drive first transmission device that the adsorbent equipment is made to drive to the foreign matter in the glide direction
Position, and then first support starts to be moved on the guide rail perpendicular with sliding rail, and opens in the process of moving
Adsorbent equipment is opened, adsorbent equipment can be adsorbed persistently in the process of moving.Finally, adsorbent equipment can be by the different of substrate surface
Object absorption is clean, has achieved the purpose that clean substrate surface.The present invention is used cooperatively by first sensor and first support,
Accurately foreign matter can be cleaned, eliminate artificial clean puzzlement.The time of spraying is not only greatly saved, but also carries
The high yield of product, reduces cost.
Wherein, the first support is equipped with second sensor, the second sensor close to the opposite sides of the guide rail
Orientation of the foreign matter on the moving direction is detected during the movement on the guide rail for the first support,
The second sensor is additionally operable to bearing signal of the foreign matter on the moving direction being transferred to the adsorbent equipment, institute
Adsorbent equipment is stated for receiving the bearing signal and opening the adsorbent equipment makes the foreign matter be adsorbed by the adsorbent equipment.
Wherein, the cleaning device is additionally operable to clean the foreign matter on the base station surface of the coating machine, and the cleaning device is also
Including the second support that can be moved along the guide rail, the second support include the second driving device, the second transmission device and with
The sticky roller that second transmission device is connected, the sticky roller are arranged in parallel in the base station surface, and described second
Driving device is for driving second transmission device that the sticky roller edge is made to be moved perpendicular to the direction on the base station surface
The sticky roller is set to conform to the base station surface, the sticky roller in the second support along the guide rail for moving
The foreign matter on base station surface described in Shi Qingjie.
Wherein, the cleaning device further includes controller, and the controller is by way of wirelessly or non-wirelessly with described the
One driving device is connected with second driving device, and the controller is for controlling the first driving means and described second
Driving device.
Wherein, when the cleaning device is started to work, the controller, which is additionally operable to control the cleaning device, to be moved to
The base station surface and the substrate surface.
Wherein, the first support further includes first shaft coupling, and the first shaft coupling is for connecting first driving
Device and first transmission device, the second support further include second shaft coupling, and the second shaft coupling is for connecting institute
State the second driving device and second transmission device.
Wherein, first transmission device includes first movement platform, the first movement platform and the adsorbent equipment
It is connected, first transmission device, which controls the first movement platform movement adsorbent equipment is made to drive to the foreign matter, to exist
Position in the glide direction, second transmission device include the second mobile platform, second mobile platform with it is described
Sticky roller is connected, second transmission device control the second mobile platform movement make the sticky roller along perpendicular to
It moves in the direction on the base station surface.
Wherein, the second sensor and the first sensor are photoelectric sensor.
Wherein, the sticky roller is made of cohesive material or the outer surface of the sticky roller coats toughness material
Material.
Second aspect of the present invention provides a kind of coating machine, including the cleaning device that first aspect present invention provides.
A kind of coating machine that second aspect of the present invention provides, the cleaning device provided using first aspect present invention can essence
The foreign matter for really cleaning substrate surface eliminates artificial clean puzzlement.The yield for substantially increasing product, reduces cost.
Description of the drawings
It to describe the technical solutions in the embodiments of the present invention more clearly, below will be to required in the embodiment of the present invention
The attached drawing used illustrates.
Fig. 1 is the structural schematic diagram of cleaning device in the embodiment of the present invention;
Fig. 2 is the structural schematic diagram of first support in cleaning device in the embodiment of the present invention;
Fig. 3 is the structural schematic diagram of second support in cleaning device in the embodiment of the present invention.
Specific implementation mode
It is the preferred embodiment of the present invention below, it is noted that for those skilled in the art,
Various improvements and modifications may be made without departing from the principle of the present invention, these improvements and modifications are also considered as this hair
Bright protection domain.
A kind of-Fig. 3 cleaning devices 1 provided in an embodiment of the present invention are please referred to Fig.1, the cleaning device 1 is used for when coating
Machine examination is measured when substrate surface has foreign matter and is cleaned, the coating machine include nozzle assembly 2 and be set to 2 phase of the nozzle assembly
A pair of of sliding rail 3 to both sides and a pair of of first sensor 4, the first sensor 4 are used for when the nozzle assembly 2 is in the cunning
Position of the foreign matter in glide direction is detected when being slided on rail 3, the cleaning device 1 is including first support 11 and is set to institute
The guide rail 12 of 11 opposite sides of first support is stated, moving direction of the first support 11 on the guide rail 12 is perpendicular to described
Glide direction of the nozzle assembly 2 on the sliding rail 3, the first support 11 include the transmission dress of first driving means 111, first
112 and the adsorbent equipment 113 on first transmission device 112 are set, the first sensor 4 is additionally operable to the foreign matter
Position signal in the glide direction is transferred to the first driving means 111, and the first driving means 111 are for connecing
It receives the position signal and drives first transmission device 112 that the adsorbent equipment 113 is made to drive to the foreign matter described
Position in glide direction, the adsorbent equipment 113 when the first support 11 is moved along the guide rail 12 for adsorbing institute
State foreign matter.
A kind of cleaning device 1 provided in an embodiment of the present invention, first, when coating machine is started to work, nozzle assembly 2 starts
(arrow direction at such as Fig. 1 sliding rails) is slided along sliding rail 3 and substrate surface is sprayed.It is sprayed during spraying
When nozzle assembly 2 finds that substrate surface has foreign matter, position of the foreign matter of the detection of first sensor 4 at this time in glide direction, and nozzle
Component 2 returns initial position.Then, position signal of the foreign matter in the glide direction is transferred to by first sensor 4
The first driving means 111 in first support 11, first driving means 111 drive first transmission device 112 to make institute
It states adsorbent equipment 113 and is driven (as shown in the arrow direction in Fig. 2) to position of the foreign matter in the glide direction, immediately
The beginning of first support 11 to be moved on the guide rail 12 perpendicular with sliding rail 3 (such as the arrow direction institute at Fig. 1 middle guides
Show), and adsorbent equipment 113 is opened in the process of moving, adsorbent equipment 113 can be adsorbed persistently in the process of moving.
Finally, adsorbent equipment 113 can adsorb the foreign matter of substrate surface clean, achieve the purpose that clean substrate surface.The present invention is logical
Being used cooperatively for first sensor 4 and first support 11 is crossed, can accurately be cleaned foreign matter, is eliminated artificial clean tired
It disturbs.The time of spraying is not only greatly saved, but also also improves the yield of product, reduces cost.
In embodiment of the present invention, the first support 11 is equipped with second sensor close to the opposite sides of the guide rail 12
115, the second sensor 115 detects for the first support 11 during the movement on the guide rail 12 described different
Orientation of the object on the moving direction, the second sensor 115 are additionally operable to the foreign matter on the moving direction
Bearing signal is transferred to the adsorbent equipment 113, and the adsorbent equipment 113 is for receiving the bearing signal and opening the suction
Adsorption device 113 makes the foreign matter be adsorbed by the adsorbent equipment 113.
In present embodiment, first support 11 on the guide rail 12 perpendicular with sliding rail 3 when being moved, absorption dress
113 are set to remain off, and second sensor 115 is constantly in working condition, when encountering foreign matter in the process of moving,
Second sensor 115 can detect the orientation of foreign matter.Second sensor 115 sends bearing signal to adsorbent equipment 113, tightly at this time
Then adsorbent equipment 113 is opened and adsorbs away foreign matter.It can more be accurately positioned the position of foreign matter in this way.And it can avoid absorption
Device 113 is always on, is impacted to the substrate having been coated with, and improves clean efficiency, reduces energy consumption, cost-effective.
In embodiment of the present invention, the cleaning device 1 is additionally operable to clean the foreign matter on the base station surface of the coating machine, institute
It further includes the second support 13 that can be moved along the guide rail 12 (as shown in the arrow direction at Fig. 1 middle guides) to state cleaning device 1,
The second support 13 includes the second driving device 131, the second transmission device 132 and is connected with second transmission device 132
The sticky roller 133 connect, the sticky roller 133 are arranged in parallel in the base station surface, and second driving device 131 is used for
Drive second transmission device 132 that the sticky roller 133 is made to move (such as Fig. 3 along perpendicular to the direction on the base station surface
In arrow direction shown in) so that sticky roller 133 is conformed to the base station surface, the sticky roller 133 is used for described the
Two holders 13 clean the foreign matter on the base station surface when being moved along the guide rail 12.
In present embodiment, cleaning device 1 can be also used for going the surface of cleaning base station when coating machine does not work, and second
Driving device 131 can drive second transmission device 132 to make the sticky roller 133 along the side perpendicular to the base station surface
To moving up and down, and sticky roller 133 is made to conform to the surface of the base station.Then, second support 13 is along guide rail 12
Direction moved, the foreign matter on base station surface can be carried out adherency cleaning by sticky roller 133 in the process of moving.
In embodiment of the present invention, the cleaning device 1 further includes controller (being not shown), and the controller is logical
The mode crossed wirelessly or non-wirelessly is connect with the first driving means 111 and second driving device 131, and the controller is used
In the control first driving means 111 and second driving device 131.Controller sends out control signal and then goes to control institute
State first driving means 111 and second driving device 131.
In embodiment of the present invention, when the cleaning device 1 is started to work, the controller is additionally operable to control described clear
Clean device 1 is moved to the base station surface and the substrate surface.When cleaning device 1 does not work, cleaning device 1 is located at base station
Or the lower section of substrate.When cleaning device 1 is started to work, controller control cleaning device 1 makes cleaning device 1 be moved to the base
Platform surface and the substrate surface proceed by work again.Space not only can be saved, can not also interfere coating machine just
Often operation.
In embodiment of the present invention, also controllable second driver of controller and then 133 court of control sticky roller
Base station surface drop and clean number control the pressure of sticky roller 133 and base station surface, final control viscosity
The adhesion strength of roller 133.
In embodiment of the present invention, the first support 11 further includes first shaft coupling 114, the first shaft coupling 114
For connecting the first driving means 111 and first transmission device 112, the second support 13 further includes the second shaft coupling
Device 134, the second shaft coupling 134 is for connecting second driving device 131 and second transmission device 132.First
Shaft coupling 114 is connected by screw thread with the first transmission device 112 and first driving means 111, and second shaft coupling 134 passes through spiral shell
Line is connected with the first transmission device 112 and first driving means 111.
In embodiment of the present invention, first transmission device 112 includes first movement platform 116, the first movement
Platform 116 is connected with the adsorbent equipment 113, and first transmission device 112 controls the first movement platform 116 and moves
The adsorbent equipment 113 is set to drive to position of the foreign matter in the glide direction, second transmission device 132 includes
Second mobile platform 136, second mobile platform 136 are connected with the sticky roller 133, second transmission device
132 control second mobile platforms 136, which move, makes the sticky roller 133 along the direction shifting perpendicular to the base station surface
It is dynamic.
In embodiment of the present invention, the second sensor 115 and the first sensor 4 are photoelectric sensor.
In embodiment of the present invention, the sticky roller 133 is made of cohesive material or the sticky roller 133
Outer surface is coated with cohesive material.
In embodiment of the present invention, 113 surface of the adsorbent equipment is equipped with the suction hole of multiple array arrangements.Multiple arrays
The suction hole of arrangement can preferably adsorb foreign matter.
In embodiment of the present invention, first driving means 111 and the second driving device 131 are servo motor.
A kind of coating machine provided in an embodiment of the present invention, including cleaning device provided in an embodiment of the present invention 1.
A kind of coating machine that second aspect of the present invention provides, the cleaning device 1 provided using first aspect present invention can essence
The foreign matter for really cleaning substrate surface eliminates artificial clean puzzlement, substantially increases the yield of product, reduce cost.
The content provided above embodiment of the present invention is described in detail, herein to the principle of the present invention and reality
The mode of applying is expounded and illustrates, the method and its core concept described above for being merely used to help understand the present invention;Meanwhile
For those of ordinary skill in the art, according to the thought of the present invention, has change in specific embodiments and applications
Become place, in conclusion the content of the present specification should not be construed as limiting the invention.
Claims (10)
1. a kind of cleaning device, which is characterized in that the cleaning device is used for when coating machine detects that substrate surface has foreign matter
It is cleaned, the coating machine includes nozzle assembly and a pair of of sliding rail and a pair first set on the nozzle assembly opposite sides
Sensor, the first sensor is for detecting the foreign matter when the nozzle assembly slides on the sliding rail in sliding side
Upward position, the cleaning device include first support and the guide rail set on the first support opposite sides, and described first
Glide direction of moving direction of the holder on the guide rail perpendicular to the nozzle assembly on the sliding rail, described first
Frame includes first driving means, the first transmission device and the adsorbent equipment on first transmission device, and described first passes
Sensor is additionally operable to position signal of the foreign matter in the glide direction being transferred to the first driving means, and described first
Driving device is described different for receiving the position signal and driving first transmission device that the adsorbent equipment is made to drive to
Position of the object in the glide direction, the adsorbent equipment when the first support is moved along the guide rail for adsorbing institute
State foreign matter.
2. cleaning device as described in claim 1, which is characterized in that opposite sides of the first support close to the guide rail
Equipped with second sensor, the second sensor is for the first support during mobile on the guide rail described in detection
Orientation of the foreign matter on the moving direction, the second sensor are additionally operable to the side on the moving direction by the foreign matter
Position signal transmission gives the adsorbent equipment, the adsorbent equipment to make for receiving the bearing signal and opening the adsorbent equipment
The foreign matter is adsorbed by the adsorbent equipment.
3. cleaning device as described in claim 1, which is characterized in that the cleaning device is additionally operable to clean the coating machine
The foreign matter on base station surface, the cleaning device further include the second support that can be moved along the guide rail, and the second support includes
Second driving device, the second transmission device and the sticky roller being connected with second transmission device, the sticky roller are flat
Row is set to the base station surface, and second driving device is for driving second transmission device to make the sticky roller edge
Direction movement perpendicular to the base station surface makes the sticky roller conform to the base station surface, and the sticky roller is used for
The foreign matter on the base station surface is cleaned when the second support is moved along the guide rail.
4. cleaning device as claimed in claim 3, which is characterized in that the cleaning device further includes controller, the control
Device is connect by way of wirelessly or non-wirelessly with the first driving means and second driving device, and the controller is used for
Control the first driving means and second driving device.
5. cleaning device as claimed in claim 4, which is characterized in that when the cleaning device is started to work, the control
Device, which is additionally operable to control the cleaning device, is moved to the base station surface and the substrate surface.
6. cleaning device as claimed in claim 3, which is characterized in that the first support further includes first shaft coupling, described
For first shaft coupling for connecting the first driving means and first transmission device, the second support further includes second
Axis device, the second shaft coupling is for connecting second driving device and second transmission device.
7. cleaning device as claimed in claim 3, which is characterized in that first transmission device includes first movement platform,
The first movement platform is connected with the adsorbent equipment, and first transmission device controls the first movement platform movement
The adsorbent equipment is set to drive to position of the foreign matter in the glide direction, second transmission device includes the second shifting
Moving platform, second mobile platform are connected with the sticky roller, the second transmission device control second movement
Platform movement makes the sticky roller edge be moved perpendicular to the direction on the base station surface.
8. cleaning device as described in claim 1, which is characterized in that the second sensor and the first sensor are light
Electric transducer.
9. cleaning device as claimed in claim 3, which is characterized in that the sticky roller is made of cohesive material, Huo Zhesuo
The outer surface for stating sticky roller is coated with cohesive material.
10. a kind of coating machine, which is characterized in that including such as claim 1-9 any one of them cleaning device.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201810366001.6A CN108543671A (en) | 2018-04-23 | 2018-04-23 | A kind of cleaning device, coating machine |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201810366001.6A CN108543671A (en) | 2018-04-23 | 2018-04-23 | A kind of cleaning device, coating machine |
Publications (1)
Publication Number | Publication Date |
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CN108543671A true CN108543671A (en) | 2018-09-18 |
Family
ID=63512234
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201810366001.6A Pending CN108543671A (en) | 2018-04-23 | 2018-04-23 | A kind of cleaning device, coating machine |
Country Status (1)
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CN (1) | CN108543671A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113203510A (en) * | 2021-04-28 | 2021-08-03 | 深圳市鸿瑞传感仪器有限公司 | Tension sensor for new energy coating machine |
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CN103521479A (en) * | 2013-09-27 | 2014-01-22 | 京东方科技集团股份有限公司 | Cleaning device and linear coater |
CN203508433U (en) * | 2013-09-13 | 2014-04-02 | 京东方科技集团股份有限公司 | Cleaning device |
JP2017029880A (en) * | 2015-07-29 | 2017-02-09 | 株式会社Screenホールディングス | Nozzle cleaning member, nozzle cleaning device, and coating device |
CN106607396A (en) * | 2015-10-23 | 2017-05-03 | 修谷鲁开发股份有限公司 | Cleaning head and cleaning method |
CN107199188A (en) * | 2017-06-12 | 2017-09-26 | 京东方科技集团股份有限公司 | Coating machine, coating system and coating machine clean method |
CN107199139A (en) * | 2017-05-25 | 2017-09-26 | 昆山国显光电有限公司 | The method of foreign matter on apparatus for coating and detection substrate |
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2018
- 2018-04-23 CN CN201810366001.6A patent/CN108543671A/en active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
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CN203508433U (en) * | 2013-09-13 | 2014-04-02 | 京东方科技集团股份有限公司 | Cleaning device |
CN103521479A (en) * | 2013-09-27 | 2014-01-22 | 京东方科技集团股份有限公司 | Cleaning device and linear coater |
JP2017029880A (en) * | 2015-07-29 | 2017-02-09 | 株式会社Screenホールディングス | Nozzle cleaning member, nozzle cleaning device, and coating device |
CN106607396A (en) * | 2015-10-23 | 2017-05-03 | 修谷鲁开发股份有限公司 | Cleaning head and cleaning method |
CN107199139A (en) * | 2017-05-25 | 2017-09-26 | 昆山国显光电有限公司 | The method of foreign matter on apparatus for coating and detection substrate |
CN107199188A (en) * | 2017-06-12 | 2017-09-26 | 京东方科技集团股份有限公司 | Coating machine, coating system and coating machine clean method |
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Publication number | Priority date | Publication date | Assignee | Title |
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CN113203510A (en) * | 2021-04-28 | 2021-08-03 | 深圳市鸿瑞传感仪器有限公司 | Tension sensor for new energy coating machine |
CN113203510B (en) * | 2021-04-28 | 2021-10-22 | 深圳市鸿瑞传感仪器有限公司 | Tension sensor for new energy coating machine |
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Address after: 9-2 Tangming Avenue, Guangming New District, Shenzhen City, Guangdong Province Applicant after: TCL Huaxing Photoelectric Technology Co.,Ltd. Address before: 9-2 Tangming Avenue, Guangming New District, Shenzhen City, Guangdong Province Applicant before: Shenzhen China Star Optoelectronics Technology Co.,Ltd. |
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Application publication date: 20180918 |
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