CN114135583B - High-rigidity large-bearing ultrasonic extrusion suspension bearing - Google Patents
High-rigidity large-bearing ultrasonic extrusion suspension bearing Download PDFInfo
- Publication number
- CN114135583B CN114135583B CN202111405693.9A CN202111405693A CN114135583B CN 114135583 B CN114135583 B CN 114135583B CN 202111405693 A CN202111405693 A CN 202111405693A CN 114135583 B CN114135583 B CN 114135583B
- Authority
- CN
- China
- Prior art keywords
- cover plate
- suspension
- air supply
- front cover
- bearing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000000725 suspension Substances 0.000 title claims abstract description 64
- 238000001125 extrusion Methods 0.000 title claims abstract description 46
- 230000000694 effects Effects 0.000 claims abstract description 32
- 239000000919 ceramic Substances 0.000 claims abstract description 23
- 238000006073 displacement reaction Methods 0.000 claims description 12
- 239000003822 epoxy resin Substances 0.000 claims description 4
- 230000005284 excitation Effects 0.000 claims description 4
- 229920000647 polyepoxide Polymers 0.000 claims description 4
- 230000001050 lubricating effect Effects 0.000 claims description 2
- 230000003068 static effect Effects 0.000 abstract description 14
- 238000005461 lubrication Methods 0.000 abstract description 4
- 239000012530 fluid Substances 0.000 abstract description 2
- 230000001808 coupling effect Effects 0.000 description 4
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000008092 positive effect Effects 0.000 description 3
- 229910000838 Al alloy Inorganic materials 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000002706 hydrostatic effect Effects 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000009351 contact transmission Effects 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000000265 homogenisation Methods 0.000 description 1
- 238000005339 levitation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
- F16C32/0607—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being retained in a gap, e.g. squeeze film bearings
- F16C32/0611—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being retained in a gap, e.g. squeeze film bearings by means of vibrations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
- F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Abstract
The invention discloses a high-rigidity large-bearing ultrasonic extrusion suspension bearing, belonging to the fields of ultrasonic and fluid lubrication; comprises a supporting frame, a fixed table and a vibrator connected with the supporting frame through the fixed table; the vibrator is formed by fastening and connecting the middle parts of a front cover plate, a ceramic plate and a rear cover plate together through a pre-tightening bolt, the upper end of the front cover plate is connected with a porous block, and the upper end of the porous block is suspended with a suspension plate; the vibrator drives the porous block to vibrate at high frequency so as to generate an extrusion effect, and meanwhile, an air source flows through the porous block to generate a static pressure effect, and when the bearing works, the extrusion effect and the static pressure effect are mutually coupled, and the extrusion effect and the static pressure effect can be changed by adjusting the driving voltage and the air supply pressure, so that a high-rigidity and large-bearing supporting air film is realized. The invention can realize the suspension characteristics of high rigidity and large bearing of ultrasonic extrusion suspension, can overcome the influence of assembly errors and processing quality on the extrusion suspension characteristics, and has the advantages of high precision, good stability and compact structure.
Description
Technical Field
The invention relates to an ultrasonic suspension bearing, in particular to a high-rigidity large-bearing ultrasonic extrusion suspension bearing, and belongs to the technical field of ultrasonic and fluid lubrication.
Background
The high-frequency ultrasonic vibration extrudes the gas in the gap between the vibrator radiation surface and the suspended object, so that the object is suspended by the average gas pressure higher than the ambient gas pressure in the period. The ultrasonic suspension technology has the advantages of high precision, good stability, compact structure and the like, and has a relatively excellent application prospect in gas lubrication bearings, non-contact ultrasonic motors and non-contact transmission systems.
Current ultrasonic suspension systems can only achieve small suspension loads. In addition, because the ultrasonic suspension gap is smaller, the assembly error of the suspension system and the surface quality of the device have unavoidable influence on the extrusion suspension force, so that the bearing capacity of the ultrasonic suspension system per unit area is further reduced.
Aiming at the requirement of realizing non-contact support by adopting an ultrasonic suspension technology, there is a great need to study an ultrasonic extrusion suspension bearing device and method which have high rigidity of a support air film and large bearing capacity per unit area and can overcome assembly errors and processing quality.
Disclosure of Invention
The purpose of the invention is that: the problems of low bearing capacity and low rigidity of the ultrasonic extrusion suspension bearing in the prior art are solved, and the high-rigidity large-bearing ultrasonic extrusion suspension bearing is provided, an extrusion effect caused by ultrasonic vibration and a static pressure effect caused by gas flowing through a porous material are adopted, the two are mutually coupled to generate a bearing gas film, and the gas film under the coupling effect has a positive effect, so that the high-rigidity and large-bearing capacity of the bearing gas film is realized.
In order to achieve the above purpose, the present invention adopts the following technical scheme: the high-rigidity large-bearing ultrasonic extrusion suspension bearing comprises a support frame, a fixed table and vibrators connected to the support frame together through the fixed table; the vibrator is formed by fastening and connecting the middle parts of a front cover plate, a ceramic plate and a rear cover plate together through a pre-tightening bolt, wherein the ceramic plate is connected between the front cover plate and the rear cover plate, the upper end of the front cover plate is connected with a porous block, and the upper end of the porous block is suspended with a suspension plate; the upper end face of the front cover plate is internally provided with a ring-shaped air supply groove, the lower end of the porous block is provided with a stepped round platform, and the porous block is connected in the ring-shaped air supply groove on the front cover plate in a matched manner through the stepped round platform; an air outlet is formed in the inner bottom surface of the annular air supply groove, an air supply port is formed in the side wall of the front cover plate, an air supply channel which is communicated with the air outlet and the air supply port is formed in the front cover plate, and an air pipe connector is connected to the outer portion of the air supply port.
The air pipe interface is connected with an air source of the air supply system, a laser displacement sensor is arranged at the upper end of the suspension plate, and a power amplifier is connected to the vibrator; the air supply system, the laser displacement sensor, the power amplifier, the signal acquisition system connected between the laser displacement sensor and the power amplifier and the PID controller form a PID control system together.
The signal acquisition system feeds back the suspension height of the suspension plate acquired by the laser displacement sensor to the PID controller, the PID controller transmits signals generated after the measured value is compared with the expected value to the power amplifier, and the power amplifier acts a new excitation signal on the ceramic plate in the vibrator, so that the vibration amplitude of the vibrator is changed, the extrusion effect is adjusted, and the suspension height of the suspension plate reaches the expected value.
The support frame is a detachable support frame, the fixed table is fastened on the support frame through bolts, and the vibrator is fixedly connected on the fixed table through bolts.
The ceramic plates are provided with a plurality of ceramic plates, and every two ceramic plates are connected through an electrode plate.
The ceramic plate is in pre-tightening connection with the front cover plate and the rear cover plate through pre-tightening bolts.
A supporting table is arranged in the middle of the inner ring of the annular air supply groove in the upper end face of the front cover plate, and the height of the supporting table is lower than the depth of the annular air supply groove; the ladder round platform of porous piece lower extreme is connected in annular air feed tank in the cooperation, and the lower terminal surface of ladder round platform is connected with the supporting bench contact.
The end face of the porous block is provided with grooves or surface micro-textures capable of improving lubricating property.
The porous block is adhered and connected to the upper end face of the front cover plate by adopting epoxy resin.
The front cover plate is made of aluminum alloy, and the rear cover plate is made of No. 45 steel.
The beneficial effects of the invention are as follows:
1) The device drives the porous block to vibrate at high frequency through the vibrator, so that an extrusion effect is generated, meanwhile, an air source flows through the porous block to generate a static pressure effect, when the bearing works, the extrusion effect and the static pressure effect are mutually coupled, a bearing air film is generated by mutual coupling of the extrusion effect and the static pressure effect, and the air film under the coupling effect has a positive effect, so that the high rigidity and large bearing capacity of the bearing air film are realized.
2) The invention can respectively change the extrusion effect and the static pressure effect by adjusting the driving voltage and the air supply pressure so as to change the bearing characteristic of the suspension system, and the coupling of the extrusion effect and the dynamic pressure effect enables the suspension system to be more compact in structure.
3) According to the invention, the porous block is introduced into the end face of the front cover plate, so that the large bearing characteristic under unit area is realized, and meanwhile, the homogenization effect of the air film on the surface of the porous block ensures the stability of the suspension plate.
4) The suspension plate has higher suspended height under the coupling effect, and effectively overcomes the influence of assembly errors and processing quality on the extrusion effect.
Drawings
FIG. 1 is a schematic diagram of the structure of the present invention;
FIG. 2 is a schematic view of the front cover plate in FIG. 1;
FIG. 3 is a schematic partial cross-sectional view of FIG. 2;
FIG. 4 is a schematic diagram of the working principle of the present invention;
FIG. 5 is a schematic diagram of a PID control system according to the invention.
In the figure, a 1-supporting frame, a 2-fixing table, a 3-front cover plate, a 301-annular air supply groove, a 302-supporting table, a 303-air outlet, a 304-air supply port, a 305-air supply channel, a 4-ceramic plate, a 5-rear cover plate, a 6-pre-tightening bolt, a 7-porous block, an 8-suspension plate and a 9-air pipe interface.
Detailed Description
The invention is further illustrated by the following description in conjunction with the accompanying drawings and specific embodiments.
Examples: as shown in fig. 1-5, the invention provides a high-rigidity large-bearing ultrasonic extrusion suspension bearing, which comprises a support frame 1, a fixed table 2 and vibrators connected to the support frame 1 together through the fixed table 2; the support frame 1 is a detachable support frame, the fixed table 2 is fastened on the support frame 1 through bolts, and the vibrator is fixedly connected on the fixed table 2 through bolts.
The vibrator is formed by fastening and connecting the middle parts of a front cover plate 3, ceramic plates 4 and a rear cover plate 5 through a pre-tightening bolt 6, wherein the ceramic plates 4 are stuck and connected between the front cover plate 3 and the rear cover plate 5 by adopting epoxy resin, the ceramic plates 4 are provided with a plurality of ceramic plates, and every two ceramic plates 4 are connected through electrode plates; the upper end of the front cover plate 3 is connected with a porous block 7, and a suspension plate 8 is suspended at the upper end of the porous block 7.
The upper end surface of the front cover plate 3 is internally provided with a ring-shaped air supply groove 301, the lower end of the porous block 7 is provided with a stepped round platform, and the porous block 7 is connected in the ring-shaped air supply groove 301 on the front cover plate 3 in a matched manner through the stepped round platform; an air outlet 303 is formed in the inner bottom surface of the annular air supply groove 301, an air supply port 304 is formed in the side wall of the front cover plate 3, an air supply channel 305 which is communicated with the air outlet 303 and the air supply port 304 is arranged in the front cover plate 3, and the air supply port 304 is externally connected with the air pipe joint 9.
A supporting table 302 is arranged in the middle of the inner ring of the annular air supply groove 301 in the upper end surface of the front cover plate 3, and the height of the supporting table 302 is lower than the depth of the annular air supply groove 301; the stepped round platform at the lower end of the porous block 7 is connected in the annular air supply groove 301 in a matching way, and the lower end surface of the stepped round platform is connected with the supporting platform 302 in a contact way.
The grooves or the surface micro-textures are arranged on the end face of the porous block 7, and the shapes and the arrangement modes of the grooves or the layout micro-textures can effectively improve the extrusion air film pressure and the static pressure air film pressure, enhance the suspension force and further improve the lubrication characteristic of the bearing.
The porous block 7 is matched with the air supply groove 301, a certain gap is reserved, and the clean air source sequentially passes through the air pipe joint, the 9, the air supply port 304, the air supply channel 305 and the air outlet 303 and then reaches the air supply groove 301; the porous block 7 is adhered and connected to the upper end surface of the front cover plate 3 by using epoxy resin.
The front cover plate 3 is made of aluminum alloy, and the rear cover plate 5 is made of 45 # steel.
The air pipe interface 9 is connected with an air source of an air supply system, a laser displacement sensor is arranged at the upper end of the suspension plate 8, and a power amplifier is connected to the vibrator; the air supply system, the laser displacement sensor, the power amplifier, the signal acquisition system connected between the laser displacement sensor and the power amplifier and the PID controller form a PID control system together.
The signal acquisition system feeds back the suspension height of the suspension plate 8 acquired by the laser displacement sensor to the PID controller, the PID controller transmits signals generated after the measured value is compared with the expected value to the power amplifier, and the power amplifier acts a new excitation signal on the ceramic plate 4 in the vibrator, so that the vibration amplitude of the vibrator is changed, the extrusion effect is adjusted, and the suspension height of the suspension plate 8 reaches the expected value.
Working principle: the high-rigidity large-bearing ultrasonic extrusion suspension bearing is a hybrid bearing, when a static pressure air source is not provided, a vibrator drives a porous block to vibrate at high frequency, gas in a gap is extruded to form an extrusion effect, and at the moment, the bearing is a pure extrusion bearing, the bearing capacity and the air film rigidity are very small, and only objects with small gravity can be suspended. The bearing may produce a hydrostatic effect when the ultrasonic excitation signal is stopped and only a source of hydrostatic gas is provided. When the static pressure effect is coupled into the extrusion effect, the coupling bearing air film pressure is formed between the end face of the porous block and the end face of the suspension plate, so that the positive effect with obvious effect can be generated, the extrusion suspension bearing capacity and the air film rigidity can be greatly increased, meanwhile, the suspension air film under the coupling effect has the homogenizing effect, the object can be stably suspended, and the influence of assembly errors and processing quality on the extrusion suspension performance is directly overcome by the higher suspension height.
The static pressure effect can be realized by porous throttling, slit throttling, surface throttling or nozzle throttling, and the extrusion effect can be realized by vibrator extrusion or ceramic plate extrusion.
The vibration amplitude of the vibrator can be changed by adjusting the driving voltage, so that the extrusion effect is adjusted, and the extrusion suspension force is changed; in addition, by adjusting the air supply pressure of the air source, the static pressure effect can be changed, and the static pressure levitation force can be further changed. Both adjusting modes can improve the rigidity and damping characteristics of the supporting air film, and control the bearing characteristics of the bearing.
The high-rigidity large-bearing ultrasonic extrusion suspension bearing provided by the invention has higher stability and suspension precision, is compact in structure, and can be used for precision devices such as suspension, medical instruments and space positioning.
The foregoing is merely illustrative of the present invention and not restrictive, and other modifications and equivalents thereof may occur to those skilled in the art without departing from the spirit and scope of the present invention.
Claims (8)
1. The utility model provides a high rigidity bears ultrasonic extrusion suspension bearing greatly which characterized in that: comprises a supporting frame (1) and a fixed table (2)
And a vibrator connected to the support frame (1) together through the fixing table (2); the vibrator is formed by fastening and connecting the middle parts of a front cover plate (3), a ceramic plate (4) and a rear cover plate (5) together through a pre-tightening bolt (6), wherein the ceramic plate (4) is connected between the front cover plate (3) and the rear cover plate (5), the upper end of the front cover plate (3) is connected with a porous block (7), and the upper end of the porous block (7) is suspended with a suspension plate (8); the upper end face of the front cover plate (3) is internally provided with a ring-shaped air supply groove (301), the lower end of the porous block (7) is provided with a stepped round table, and the porous block (7) is connected in the ring-shaped air supply groove (301) on the front cover plate (3) in a matched manner through the stepped round table; an air outlet (303) is formed in the inner bottom surface of the annular air supply groove (301), an air supply port (304) is formed in the side wall of the front cover plate (3), an air supply channel (305) which is communicated with the air outlet (303) and the air supply port (304) is formed in the front cover plate (3), and an air pipe interface (9) is connected to the outside of the air supply port (304);
the air pipe interface (9) is connected with an air source of an air supply system, a laser displacement sensor is arranged at the upper end of the suspension plate (8), and a power amplifier is connected to the vibrator; the air supply system, the laser displacement sensor, the power amplifier, the signal acquisition system connected between the laser displacement sensor and the power amplifier and the PID controller form a PID control system together.
2. The high-rigidity large-load ultrasonic extrusion suspension bearing according to claim 1, wherein: the signal acquisition system feeds back the suspension height of the suspension plate (8) acquired by the laser displacement sensor to the PID controller, the PID controller transmits signals generated after the measured value is compared with the expected value to the power amplifier, the power amplifier acts a new excitation signal on the ceramic plate (4) in the vibrator, and then the vibration amplitude of the vibrator is changed, and the extrusion effect is adjusted to be strong or weak, so that the suspension height of the suspension plate (8) reaches the expected value.
3. The high-rigidity large-load ultrasonic extrusion suspension bearing according to claim 1, wherein: the support frame (1) is a detachable support frame, the fixed table (2) is fastened on the support frame (1) through bolts, and the vibrator is fixedly connected on the fixed table (2) through bolts.
4. The high-rigidity large-load ultrasonic extrusion suspension bearing according to claim 1, wherein: the ceramic plates (4) are provided with a plurality of ceramic plates, and every two ceramic plates (4) are connected through electrode plates.
5. The high-stiffness high-load ultrasonic extrusion suspension bearing of claim 1 or 4, wherein: the ceramic plate (4) is in pre-tightening connection with the front cover plate (3) and the rear cover plate (5) through pre-tightening bolts.
6. The high-rigidity large-load ultrasonic extrusion suspension bearing according to claim 1, wherein: a supporting table (302) is arranged in the middle of the inner ring of the annular air supply groove (301) in the upper end face of the front cover plate (3), and the height of the supporting table (302) is lower than the depth of the annular air supply groove (301); the stepped round platform at the lower end of the porous block (7) is connected in the annular air supply groove (301) in a matched mode, and the lower end face of the stepped round platform is connected with the supporting platform (302) in a contact mode.
7. The high-stiffness high-load ultrasonic extrusion suspension bearing of claim 1 or 6, wherein: the end face of the porous block (7) is provided with grooves or surface micro-textures capable of improving lubricating property.
8. The high-stiffness high-load ultrasonic extrusion suspension bearing of claim 1 or 6, wherein: the porous block (7) is adhered and connected to the upper end face of the front cover plate (3) by adopting epoxy resin.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111405693.9A CN114135583B (en) | 2021-11-24 | 2021-11-24 | High-rigidity large-bearing ultrasonic extrusion suspension bearing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111405693.9A CN114135583B (en) | 2021-11-24 | 2021-11-24 | High-rigidity large-bearing ultrasonic extrusion suspension bearing |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114135583A CN114135583A (en) | 2022-03-04 |
| CN114135583B true CN114135583B (en) | 2024-03-15 |
Family
ID=80391320
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111405693.9A Active CN114135583B (en) | 2021-11-24 | 2021-11-24 | High-rigidity large-bearing ultrasonic extrusion suspension bearing |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114135583B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115890275B (en) * | 2023-02-20 | 2023-07-14 | 中国机械总院集团宁波智能机床研究院有限公司 | Static pressure composite turntable and protection method thereof |
Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007321811A (en) * | 2006-05-30 | 2007-12-13 | National Univ Corp Shizuoka Univ | Non-contact supporting device |
| CN101311568A (en) * | 2002-09-26 | 2008-11-26 | Ntn株式会社 | Dynamic pressure bearing device |
| JP2009068547A (en) * | 2007-09-11 | 2009-04-02 | Nsk Ltd | Spindle device |
| CN103047341A (en) * | 2012-12-19 | 2013-04-17 | 哈尔滨工业大学 | Vibration isolator with pneumatic flotation ball bearing for angular decoupling and magnetic suspension plane for driving and positioning |
| CN104675859A (en) * | 2015-03-16 | 2015-06-03 | 湖南大学 | Ultrasonic thrust air bearing with curve grooves |
| CN109812501A (en) * | 2019-01-29 | 2019-05-28 | 湖南大学 | The flexible support tilting bush squeeze film gas thrust bearing to be suspended based on near-field ultrasound |
| CN110094425A (en) * | 2019-06-04 | 2019-08-06 | 中国工程物理研究院机械制造工艺研究所 | A kind of static pressure air-bearing axial bearing |
| CN111059149A (en) * | 2019-12-23 | 2020-04-24 | 昆明理工大学 | Energy collecting device based on acoustic wave suspension and energy recovery method thereof |
| CN111442030A (en) * | 2020-04-21 | 2020-07-24 | 大连民族大学 | Air supporting system |
| CN113217541A (en) * | 2021-06-04 | 2021-08-06 | 北京工业大学 | Porous ring belt exhaust type static pressure air-float thrust bearing |
| CN113357263A (en) * | 2021-06-25 | 2021-09-07 | 合肥工业大学 | Extrusion film auxiliary pressure stabilization static pressure air flotation supporting device and control method |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103836070B (en) * | 2014-03-18 | 2016-07-13 | 华中科技大学 | A kind of active gas suspension device |
-
2021
- 2021-11-24 CN CN202111405693.9A patent/CN114135583B/en active Active
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101311568A (en) * | 2002-09-26 | 2008-11-26 | Ntn株式会社 | Dynamic pressure bearing device |
| JP2007321811A (en) * | 2006-05-30 | 2007-12-13 | National Univ Corp Shizuoka Univ | Non-contact supporting device |
| JP2009068547A (en) * | 2007-09-11 | 2009-04-02 | Nsk Ltd | Spindle device |
| CN103047341A (en) * | 2012-12-19 | 2013-04-17 | 哈尔滨工业大学 | Vibration isolator with pneumatic flotation ball bearing for angular decoupling and magnetic suspension plane for driving and positioning |
| CN104675859A (en) * | 2015-03-16 | 2015-06-03 | 湖南大学 | Ultrasonic thrust air bearing with curve grooves |
| CN109812501A (en) * | 2019-01-29 | 2019-05-28 | 湖南大学 | The flexible support tilting bush squeeze film gas thrust bearing to be suspended based on near-field ultrasound |
| CN110094425A (en) * | 2019-06-04 | 2019-08-06 | 中国工程物理研究院机械制造工艺研究所 | A kind of static pressure air-bearing axial bearing |
| CN111059149A (en) * | 2019-12-23 | 2020-04-24 | 昆明理工大学 | Energy collecting device based on acoustic wave suspension and energy recovery method thereof |
| CN111442030A (en) * | 2020-04-21 | 2020-07-24 | 大连民族大学 | Air supporting system |
| CN113217541A (en) * | 2021-06-04 | 2021-08-06 | 北京工业大学 | Porous ring belt exhaust type static pressure air-float thrust bearing |
| CN113357263A (en) * | 2021-06-25 | 2021-09-07 | 合肥工业大学 | Extrusion film auxiliary pressure stabilization static pressure air flotation supporting device and control method |
Non-Patent Citations (1)
| Title |
|---|
| 景敏卿 ; 刘恒 ; 沈园 ; 虞烈 ; .新型挤压膜气体轴承的研究.西安交通大学学报.2008,(第07期),全文. * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN114135583A (en) | 2022-03-04 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN114135583B (en) | High-rigidity large-bearing ultrasonic extrusion suspension bearing | |
| CN109759308B (en) | Laser-assisted online measurement three-dimensional elliptical ultrasonic vibration-assisted micro-machining platform | |
| CN108167379B (en) | A kind of main passive isolation mechanical device of six degree-of-freedom low-frequency vibration | |
| CN113618421B (en) | Modularized sliding block device and ultra-precise hydrostatic guideway unit using same | |
| CN111442030B (en) | Air supporting system | |
| CN212272829U (en) | Air supporting system | |
| CN105014118A (en) | Vibrating table device for ultrasonic vibration auxiliary machining | |
| CN103234699A (en) | Pressure sensor detection device and detection method thereof | |
| CN213857906U (en) | Electromagnetic type pipeline welding is to mouthpart | |
| CN103994059A (en) | Resonance piezoelectric fan with cymbal-shaped cavity | |
| CN113202718A (en) | Flexible cavity resonance piezoelectric pump for industrial lubrication | |
| CN107228231B (en) | A kind of novel pump line rack | |
| CN100355100C (en) | Piezoelectric transducer assembly on-line computer control system | |
| CN208239045U (en) | A kind of shake table transmission device | |
| Li et al. | A novel non-contact carrying and transportation method based on near-field acoustic levitation and negative pressure adsorption | |
| CN111878371B (en) | Spring type piezoelectric air pump | |
| CN112332699A (en) | Pipeline pressure pulsation energy collection device with supercharging device | |
| CN210282006U (en) | Bellows leak protection liquid plastics anchor clamps | |
| CN210255261U (en) | Vacuum suction nozzle tool for thin-walled part | |
| CN112830256A (en) | Elastic pressure stabilizer for sheet air-float supporting system | |
| CN219692545U (en) | Vacuum nozzle air guide device | |
| CN203939677U (en) | A kind of resonant piezoelectricity blower fan of big cymbals shape cavity | |
| CN218118346U (en) | Air floatation transmission device for three-dimensional measuring equipment | |
| CN219013022U (en) | Large ladle ejector | |
| CN214833137U (en) | Frequency conversion constant voltage water supply equipment of exhausting function is taken certainly to operation stability |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |