CN110094425A - A kind of static pressure air-bearing axial bearing - Google Patents

A kind of static pressure air-bearing axial bearing Download PDF

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Publication number
CN110094425A
CN110094425A CN201910482693.5A CN201910482693A CN110094425A CN 110094425 A CN110094425 A CN 110094425A CN 201910482693 A CN201910482693 A CN 201910482693A CN 110094425 A CN110094425 A CN 110094425A
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CN
China
Prior art keywords
bearing
hole
thrust plate
matter structure
static pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201910482693.5A
Other languages
Chinese (zh)
Inventor
杨光伟
阳红
刘有海
张敏
徐磊磊
戴晓静
孙守利
尹承真
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Institute of Mechanical Manufacturing Technology of CAEP
Original Assignee
Institute of Mechanical Manufacturing Technology of CAEP
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Institute of Mechanical Manufacturing Technology of CAEP filed Critical Institute of Mechanical Manufacturing Technology of CAEP
Priority to CN201910482693.5A priority Critical patent/CN110094425A/en
Publication of CN110094425A publication Critical patent/CN110094425A/en
Pending legal-status Critical Current

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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00Bearings not otherwise provided for
    • F16C32/06Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
    • F16C32/0614Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
    • F16C32/0618Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings via porous material
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00Bearings not otherwise provided for
    • F16C32/06Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
    • F16C32/0614Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
    • F16C32/0622Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings via nozzles, restrictors

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)

Abstract

The invention discloses a kind of static pressure air-bearing axial bearings, comprising: rotor (1) and bearing thrust plate (2) are air film (3) between rotor (1) lower surface and the upper surface of bearing thrust plate (2);Several first through hole (4) are circumferentially provided on bearing thrust plate (2), cylindrical porous matter structure (5) is inlaid in each first through hole (4), the inside of cylindrical porous matter structure (5) offers the second through-hole from cylindrical porous matter structure upper surface (6) center;Second through-hole penetrates into cylindrical porous matter structure lower surface (12);Cylindrical porous matter structure lower surface (12) and bearing thrust plate lower surface (13) form the air vent (14) of supply high pressure gas;Overcome orifice restriction rigidity to be difficult to the shortcomings that being promoted in stability, while avoiding the problem that porous restriction reliability is insufficient, requirement on machining accuracy is high, has the advantages that at low cost, process stabilizing, quality controllable.

Description

A kind of static pressure air-bearing axial bearing
Technical field
The invention belongs to static-pressure air bearing technical fields.More particularly to a kind of static pressure air-bearing of viscous-inertia coupling throttling Axial bearing.
Background technique
Orifice restriction pressurized air axial bearing has the characteristics that rotating accuracy is high, the service life is long, free of contamination, in ultraprecise plus Work field has extensive use.Bearing rigidity and stability are that the main performance of orifice restriction pressurized air axial bearing refers to Mark, is to ensure that the key of bearing accuracy and reliability.Higher bearing rigidity can be obtained using biggish supply gas pressure, still Pneumatic hammer oscillation can be caused, bearing is caused to can not work normally.Compared with orifice restriction, gas enters by porous restriction In air film gap, flow regime is more stable, and the critical supply gas pressure of self-excited vibration and support stiffness are obviously improved, but Porous Flow controller throttling performance is determined by porous material self-characteristic, usually requires that porous material to obtain higher support stiffness With compared with low-permeability and with minimum air film gap 5-10um, require high processing more tired material and the accuracy of manufacture Difficulty, and porous material is easy blocking, dampness deformation causes bearing rigidity reduction that locking phenomenon occurs, and is not able to satisfy to air-bearing shafts Holding unfailing performance must ask.
Summary of the invention
It is unable to Synchronous lifting in order to solve orifice restriction pressurized air axial bearing rigidity in the prior art and stability, together When overcome the problems, such as that porous restriction air-bearing reliability is insufficient, bearing mnanufacture difficulty is big, it is viscous-used that the invention proposes one kind Property coupling throttling static pressure air-bearing axial bearing.
The static pressure air-bearing axial bearing of viscous-inertia coupling throttling of the invention, its main feature is that: the bearing by rotor with Bearing thrust board group at, between rotor lower surface and the upper surface of bearing thrust plate be air film thickness;In the bearing Several first through hole are circumferentially provided on thrust plate;Cylindrical porous matter structure is inlayed in first through hole;In circle The inside of cylindricality porous structure offers the second through-hole, the second through-hole from cylindrical porous matter structure upper surface center downwards according to Secondary includes 3 sections, respectively one section of throttling pore, one section of taper connection hole, one section of cylindrical hole;Cylindrical porous matter structure upper surface There is a certain distance to form annular away from bearing thrust plate upper surface and presses chamber;Throttling pore, taper connection hole, the connected shape of cylindrical hole Cylindrical porous matter structure lower surface is penetrated at the second through-hole;Cylindrical porous matter structure lower surface and bearing thrust plate following table Face forms the air vent of supply high pressure gas;Total forms the static pressure air-bearing axial bearing of viscous-inertia coupling throttling.
The rotor can move up certain displacement in gas supply, so that its lower surface and bearing thrust plate Upper surface form the air-film thickness of certain (8-40um).
Wherein, the inside of the cylindrical porous matter structure from cylindrical porous matter structure upper surface center downwards successively Be provided with one section of throttling pore, one section of taper connection hole, one section of cylindrical hole, wherein be designed as 3 holes be in order to reduce difficulty of processing, Realization easy to process.
Wherein, the throttling pore, taper connection hole, cylindrical hole form the second through-hole and penetrate into cylindrical porous matter knot Structure lower surface.
Wherein, the cylindrical porous matter structure upper surface has a certain distance to form ring away from bearing thrust plate upper surface Shape presses chamber.
Wherein, chamber is settable is not provided with for the pressure of the annular in the present invention.
Wherein, the porous material in the present invention can be Porous metal and be also possible to Porous Graphite.
One or more technical solution provided by the present application, has at least the following technical effects or advantages:
Cylindrical porous matter structure energy reasonable coordination VISCOUS FLOW and inertia in the present invention flow, and inhibit redundancy gas It generates, facilitates the stability and rigidity that improve air-bearing simultaneously.
Gas is viscous, inertia using porous structure and aperture composite throttling, in enhancing flow controller and lubrication gap by the present invention Matching properties are flowed, realize gas suspension rigidity and stability Synchronous lifting.It is insufficient to solve single porous restriction reliability And the low problem for being easy to produce vibration of single orifice restriction rigidity.
Structure of the invention is simple, and stability and rigidity are high, and structure replacement is controllable, and manufacturing cost is low.
Detailed description of the invention
Attached drawing described herein is used to provide to further understand the embodiment of the present invention, constitutes one of the application Point, do not constitute the restriction to the embodiment of the present invention;
Fig. 1 is overall structure diagram of the invention;
Fig. 2 is the structural schematic diagram of cylindrical porous matter structure of the invention;
In figure, 1 rotor, 2 bearing thrust plates, 3 air films, 4 first through hole, 5 cylindrical porous matter structures, 6 cylindrical porous Matter structure upper surface, 7 throttling pores, 8 connecting holes, 9 cylindrical holes, 10 bearing thrust plate upper surfaces, 11 annulars press chamber, 12 cylinders Shape porous structure lower surface, 13 bearing thrust plate lower surfaces, 14 air vents.
Specific embodiment
To better understand the objects, features and advantages of the present invention, with reference to the accompanying drawing and specific real Applying mode, the present invention is further described in detail.It should be noted that in the case where not conflicting mutually, the application's Feature in embodiment and embodiment can be combined with each other.
In the following description, numerous specific details are set forth in order to facilitate a full understanding of the present invention, still, the present invention may be used also Implemented with being different from the other modes being described herein in range using other, therefore, protection scope of the present invention is not by under The limitation of specific embodiment disclosed in face.
Embodiment 1
Fig. 1 is that viscous-inertia of the invention couples throttling pressurized air bearing axial bearing overall structure diagram;In Fig. 1, this Viscous-inertia of invention couples throttling pressurized air bearing axial bearing, including rotor 1 and bearing thrust plate 2, and connection relationship is rotor 1 in the top of bearing thrust plate 2, and the diameter of rotor 1 is less than the diameter of bearing thrust plate 2;Rotor 1 can be to moving up in gas supply Certain displacement is moved, so that its lower surface and the upper surface of bearing thrust plate 2 form the thickness of the air film 3 of certain (8-40um) Degree is as shown in Figure 1.Several first through hole 4 are circumferentially provided on the bearing thrust plate 2;In first through hole 4 Inlay cylindrical porous matter structure 5;In the inside of cylindrical porous matter structure 5 from cylindrical porous matter structure upper surface 6 The heart successively opens downwards 7, one sections of one section of throttling pore, 8, one sections of taper connection hole cylindrical hole 9;Table in cylindrical porous matter structure Face 6 has a certain distance to form annular pressure chamber 11 away from bearing thrust plate upper surface 10;Throttling pore 7, connecting hole 8, cylindrical hole 9 It is connected to form the second through-hole and penetrates into cylindrical porous matter structure lower surface 12, connecting hole 8 is specially taper connection hole;It is cylindrical Porous structure lower surface 12 and bearing thrust plate lower surface 13 form the air vent 14 of supply high pressure gas;Total is formed The static pressure air-bearing axial bearing of viscous-inertia coupling throttling.
Fig. 2 shows for viscous in this hair-inertia coupling throttling i.e. flow controller structure of porous structure and aperture composite throttling to be cutd open View.
The diameter of the throttling pore 7 is less than the diameter in taper connection hole, and the diameter in taper connection hole is less than cylindrical hole 9 Diameter.
The cylindrical porous matter structure upper surface 6 has a certain distance to form annular away from bearing thrust plate upper surface 10 Press chamber 11.
Rotor 1 can move up certain displacement in gas supply in the present invention, so that its lower surface is stopped with bearing The upper surface of push plate 2 forms the thickness of certain air film 3, and gas has certain pressure to form bearing capacity, with rotor position The variation set, bearing capacity change to form rigidity.Its main function of cylindrical porous matter structure of the present invention is Enhance flow controller throttling viscosity, so that viscous-inertia flowing matches the mesh for reaching while improving bearing rigidity and stability 's.
Gas is come in from air vent through cylindrical porous matter structure 5 in Fig. 2, so that gas is not by flowing through cylindrical porous matter Inertia before structure 5 flows the viscosity after becoming to flow through cylindrical porous matter structure 5 and the mixing of inertia is imitated to enhance throttling It answers and stability.
The working principle of the invention is that gas is come in from air vent 4, a part through cylindrical hole 9, taper connection hole finally by Throttling pore 7 flows into annular pressure chamber 11 and then proceedes to the thickness 3 that up stream forms air film, a part of hole clearance flow by Porous The thickness that up stream forms air film 3 is then proceeded into pressure chamber 11, gas is VISCOUS FLOW in Porous gap 5, and gas exists It is flowed for inertia in throttling pore 7, gas viscosity effect enhancing and to improve bearing simultaneously rigid with inertia gas mixing to reach The purpose of degree and stability.
Embodiment 2
The present embodiment is identical as the structure of embodiment 1, except that annular pressure chamber 11 is not provided in the present embodiment, 6 distance away from bearing thrust plate upper surface 10 of cylindrical porous matter structure upper surface is zero.
Embodiment 3
The present embodiment is identical as the structure of embodiment 1, except that cylindrical porous matter structure 5 in the present embodiment Material is Porous metal.
Although preferred embodiments of the present invention have been described, it is created once a person skilled in the art knows basic Property concept, then additional changes and modifications may be made to these embodiments.So it includes excellent that the following claims are intended to be interpreted as It selects embodiment and falls into all change and modification of the scope of the invention.
Obviously, various changes and modifications can be made to the invention without departing from essence of the invention by those skilled in the art Mind and range.In this way, if these modifications and changes of the present invention belongs to the range of the claims in the present invention and its equivalent technologies Within, then the present invention is also intended to include these modifications and variations.

Claims (8)

1. a kind of static pressure air-bearing axial bearing, which is characterized in that the bearing includes:
Rotor (1) and bearing thrust plate (2), rotor (1) are located above bearing thrust plate (2), and rotor (1) lower surface is stopped with bearing It is between the upper surface of push plate (2) air film (3);Bearing thrust plate is circumferentially provided with several first through hole on (2) (4), cylindrical porous matter structure (5) is inlaid in each first through hole (4), in cylindrical porous matter structure upper surface (6) The heart offers the second through-hole;Second through-hole penetrates into cylindrical porous matter structure lower surface (12);Under cylindrical porous matter structure Surface (12) and bearing thrust plate lower surface (13) form the air vent (14) of supply high pressure gas.
2. static pressure air-bearing axial bearing according to claim 1, which is characterized in that the second through-hole includes successively from the top down Three sections of connection, are respectively as follows: one section of throttling pore (7), one section of connecting hole (8), one section of cylindrical hole (9).
3. static pressure air-bearing axial bearing according to claim 2, which is characterized in that connecting hole (8) is specially taper connection Hole.
4. static pressure air-bearing axial bearing according to claim 2, which is characterized in that throttling pore (7), connecting hole (8), circle The center line of post holes (9) is overlapped.
5. static pressure air-bearing axial bearing according to claim 3, which is characterized in that the diameter of throttling pore (7) with The upper end opening diameter in taper connection hole is identical, and the lower ending opening diameter in taper connection hole is straight with cylindrical hole (9) Diameter size is identical.
6. static pressure air-bearing axial bearing according to claim 1, which is characterized in that rotor (1) its lower surface in gas supply The air film of 8-40 micron thickness is formed with the upper surface of bearing thrust plate (2).
7. static pressure air-bearing axial bearing according to claim 1, which is characterized in that in cylindrical porous matter structure (5) Porous material is Porous metal or Porous Graphite.
8. static pressure air-bearing axial bearing according to claim 1, which is characterized in that cylindrical porous matter structure upper surface (6) there is a certain distance to form annular away from bearing thrust plate upper surface (10) and press chamber (11).
CN201910482693.5A 2019-06-04 2019-06-04 A kind of static pressure air-bearing axial bearing Pending CN110094425A (en)

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Application Number Priority Date Filing Date Title
CN201910482693.5A CN110094425A (en) 2019-06-04 2019-06-04 A kind of static pressure air-bearing axial bearing

Publications (1)

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CN110094425A true CN110094425A (en) 2019-08-06

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110695380A (en) * 2019-11-16 2020-01-17 洛阳传顺机械设备有限公司 Ultrasonic wave air static pressure electricity main shaft
CN111237341A (en) * 2020-03-09 2020-06-05 南京工业大学 Gas thrust bearing with hybrid action of dynamic pressure and static pressure
CN112922961A (en) * 2021-03-23 2021-06-08 哈尔滨工业大学 Static pressure air flotation unit based on porous throttling unit and processing method
CN114135583A (en) * 2021-11-24 2022-03-04 郑州大学 High-rigidity large-bearing ultrasonic extrusion suspension bearing
CN114857174A (en) * 2022-06-16 2022-08-05 中国工程物理研究院机械制造工艺研究所 Anti-disturbance restrictor for hydrostatic bearing and hydrostatic guide rail
CN115263924A (en) * 2022-07-18 2022-11-01 中电科风华信息装备股份有限公司 Mixed type air bearing with air path and loop based on porous material and air path mechanism

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61182736A (en) * 1985-02-06 1986-08-15 Omron Tateisi Electronics Co Static pressure pneumatic bearing
JPH03244827A (en) * 1990-02-21 1991-10-31 Nippon Seiko Kk Static pressure gas bearing
JPH0510330A (en) * 1991-06-29 1993-01-19 Canon Inc Static pressure bearing device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61182736A (en) * 1985-02-06 1986-08-15 Omron Tateisi Electronics Co Static pressure pneumatic bearing
JPH03244827A (en) * 1990-02-21 1991-10-31 Nippon Seiko Kk Static pressure gas bearing
JPH0510330A (en) * 1991-06-29 1993-01-19 Canon Inc Static pressure bearing device

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110695380A (en) * 2019-11-16 2020-01-17 洛阳传顺机械设备有限公司 Ultrasonic wave air static pressure electricity main shaft
CN110695380B (en) * 2019-11-16 2024-04-19 洛阳传顺机械设备有限公司 Ultrasonic air static pressure motorized spindle
CN111237341A (en) * 2020-03-09 2020-06-05 南京工业大学 Gas thrust bearing with hybrid action of dynamic pressure and static pressure
CN112922961A (en) * 2021-03-23 2021-06-08 哈尔滨工业大学 Static pressure air flotation unit based on porous throttling unit and processing method
CN114135583A (en) * 2021-11-24 2022-03-04 郑州大学 High-rigidity large-bearing ultrasonic extrusion suspension bearing
CN114135583B (en) * 2021-11-24 2024-03-15 郑州大学 High-rigidity large-bearing ultrasonic extrusion suspension bearing
CN114857174A (en) * 2022-06-16 2022-08-05 中国工程物理研究院机械制造工艺研究所 Anti-disturbance restrictor for hydrostatic bearing and hydrostatic guide rail
CN115263924A (en) * 2022-07-18 2022-11-01 中电科风华信息装备股份有限公司 Mixed type air bearing with air path and loop based on porous material and air path mechanism

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