CN105240452A - Local bearing type active vibration isolation device capable of being applied to ultrahigh vacuum system - Google Patents
Local bearing type active vibration isolation device capable of being applied to ultrahigh vacuum system Download PDFInfo
- Publication number
- CN105240452A CN105240452A CN201510633253.7A CN201510633253A CN105240452A CN 105240452 A CN105240452 A CN 105240452A CN 201510633253 A CN201510633253 A CN 201510633253A CN 105240452 A CN105240452 A CN 105240452A
- Authority
- CN
- China
- Prior art keywords
- flange
- vibration isolation
- active vibration
- bellows
- vacuum system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Vibration Prevention Devices (AREA)
Abstract
A local bearing type active vibration isolation device capable of being applied to an ultrahigh vacuum system comprises a vacuum cavity (103), a rigid datum platform (101), supporting columns (102), flexible connection sections (201) and active vibration isolation supports (119). The vacuum cavity (103) is arranged on the ground and is fixedly connected with the flexible connection sections (201) and the active vibration isolation supports (119) in sequence; the active vibration isolation supports (119) are arranged on the ground. The active vibration isolation supports (119) generate the dynamic position compensation function in the vertical direction and isolate vibration from the ground; the flexible connection sections (201) comprise corrugated pipes (108), one-dimensional movement generated by the active vibration isolation supports (119) is ensured, and vacuum sealing is also ensured. In addition, the corrugated pipes (108) isolate vibration from a vacuum pump through elastic deformation. The active vibration isolation supports (119) do not bear the weight of the whole vacuum system, so that the active vibration isolation supports (119) have no limit to weight of the vacuum cavity (103).
Description
Technical field
The present invention relates to a kind of isolation mounting, especially relate to a kind of active vibration isolation arrangement.
Background technique
ALTA company of Italy has a set of ultrahigh vacuum equipment that have employed active vibration isolation system, for measuring the micro thrust that electric thruster produces.Its system architecture as shown in Figure 1.This system adopts active vibration isolation support ripe on market directly to support whole vacuum cavity, all adopts and be rigidly connected between the equipment mountion plate of between vacuum cavity and active vibration isolation support and vacuum cavity inside and vacuum cavity.
This system owing to have employed active vibration isolation support, therefore, it is possible to effectively isolate the extraneous vibration from ground, as equipment surrounding people walk about, neighbouring street car even Underground Rail Transit the vibration that produces, vibration isolation efficiency is more than 90%.
But there is following shortcoming in this system:
(1) vibration isolating effect is limited.Although this system effectively can isolate the extraneous vibration from ground, cannot vacuum pump produces on isolated vacuum cavity vibration.The turbomolecular pump the most frequently used due to ultra-high vacuum system and cryopump all can produce obvious vibration when normal work, above-mentioned two kinds of vacuum pumps are again directly be rigidly connected on vacuum cavity, vibration that this just causes vacuum pump body to produce can along vacuum chamber body wall unblocked be delivered in cavity and place on the platform of precision equipment, cause precision equipment normally to work.
(2) application area is narrow.The vacuum pump that ultra-high vacuum system uses all must directly be rigidly connected on vacuum cavity, and conventional kind comprises turbomolecular pump, cryopump, sputter ion pump and Tianium sublimation pump.All there is movable part in first two vacuum pump, all can produce obvious vibration, but can bear larger gas load when normal work; There is not movable part in latter two pump, does not produce vibration completely during work, but the treatable gas load of institute is little.Due to cannot the vibration of isolated vacuum pump on the impact of system, ALTA company of Italy cannot adopt the ultrahigh vacuum pump that first two gas load ability is strong, and the ultrahigh vacuum pump that latter two gas load ability can only be used more weak, cause this system can only be applied to the minimum electric thruster not needing air feed even completely of air demand, thrust range only can cover μ N magnitude, can not be applied to the mN magnitude electric thruster that the air demands such as the hall thruster of main flow, ion thruster are large.
(3) vacuum cavity weight and boundary dimension limited.Active vibration isolation method due to Italian ALTA company is placed on four active vibration isolation supports by whole vacuum cavity, and therefore the gross weight of vacuum cavity is just subject to the restriction of active vibration isolation rack bearing ability, causes vacuum cavity boundary dimension limited.The active vibration isolation support bearing power being applied to field of precision measurement is in the market generally about 2t, and the maximum rated load-bearing of four active vibration isolation supports is 4t, to ensure that active vibration isolation support can bear when four active vibration isolation rack bearings are uneven.And the electric thruster of main flow generally all needs could normally to work in the large-scale vacuum cavity of diameter 2m-6m, length 5m-10m at present, the vacuum cavity weight of this scale is greater than 6t, is that active vibration isolation support cannot carry completely.
Summary of the invention
The technical problem to be solved in the present invention is: overcome the deficiencies in the prior art, provides a kind of bearing capacity strong, can isolate the active vibration isolation arrangement coming from ground and vacuum pump vibration simultaneously.
The technical solution adopted in the present invention is: a kind of local bearing-type active vibration isolation arrangement for ultra-high vacuum system, is characterized in that: comprise vacuum cavity, rigidity reference platform, supporting post, the section of flexibly connecting, active vibration isolation support; Vacuum cavity is positioned on ground, and vacuum cavity is provided with vertical cavity flange-interface down, and active vibration isolation stentplacement is on ground, and rigidity reference platform is positioned at vacuum cavity inside; The section of flexibly connecting comprises the first flange and second flange at bellows and two ends thereof, and active vibration isolation cradle top is provided with three-flange, and the two ends of bellows are respectively by the first flange and the second flange and flange-interface and three-flange fixed seal connection; Supporting post is through bellows, and one end is supported on bottom rigidity reference platform, and the other end is spacing on three-flange, and the quantity of supporting post is consistent with the quantity of flange-interface; Described bellows, under the deadweight of three-flange or the effect of counterweight that is fixedly connected with three-flange, is in extended state.
Described counterweight comprises counterweight suspension and counterweight member, and counterweight suspension comprises: tie-beam, heavy burden beam and suspension; Tie-beam is fixedly attached on three-flange, and heavy burden beam two ends are fixedly attached on tie-beam respectively, vertical with in tie-beam substantially horizontal, and the vertical bar upper end of suspension is fixedly connected with heavy burden beam, and the bearing table carrying described counterweight member is arranged at suspension bottom.
The gross weight of described three-flange, rigidity reference platform and supporting post, or the gross weight of described three-flange, counterweight, rigidity reference platform and supporting post is not less than W, W=n π Δ Pd
2/ 4g, wherein, d is the inside nominal diameter of vacuum cavity flange-interface, and Δ P is that vacuum cavity inner and outer air pressure is poor, and g is gravity accleration, and n is the quantity of flange-interface.
Described bellows is welding type bellows or hydraulic type bellows.
Described first flange or the second flange are lap joint flange.
Described rigidity reference platform is optical table.
The vertical bar upper end of described suspension is fixedly connected with by pin with heavy burden beam, and the two ends of pin are spacing by limit stoper.
The material of described bellows, rigidity reference platform, supporting post, flange-interface, the first flange, the second flange or three-flange is stainless steel or oxygenless copper material.
Described flange-interface and the first flange, the joint of the second flange and three-flange has the first Sealing and the second Sealing respectively; Described flange-interface, the first flange, the second flange and three-flange are edge of a knife type flange or non-knife-edge method flange-type flange, and described first Sealing and the second Sealing are anaerobic copper band or O type circle.
Described three-flange is in same level.
The present invention's advantage is compared with prior art:
(1) boundary dimension of vacuum cavity and weight are not limited.Because the vacuum cavity in the present invention is directly placed on the ground, active vibration isolation support does not need the weight carrying a whole set of vacuum system, only for carrying the weight of active vibration isolation arrangement, belongs to local bearing-type.This local bearing-type active vibration isolation arrangement does not limit for the boundary dimension of vacuum cavity and weight.
(2) vibration coming from vacuum pump on vacuum cavity can effectively be isolated.The present invention takes full advantage of the features such as bellows tube wall is thin, good springiness, extending amount are large, has both realized vacuum seal, again the position dynamic compensation effect that active vibration isolation support produces effectively is passed to the precision equipment in vacuum cavity.And the bellows of softness can utilize the elastic strain of self, the vibration displacement that vacuum pump produces on average is distributed on each joint ripple, thus significantly weaken the amplitude being delivered to the other end, therefore the transmission path coming from the vibration of vacuum pump is obstructed, thus the isolation of the precision measurement equipment achieved on rigidity reference platform and vacuum cavity.
(3) type selecting of vacuum pump is not limited.Because the present invention effectively can block the vibration path of propagating to rigidity reference platform that vacuum pump produces, therefore the vibration interference of vacuum pump to the precision measurement equipment on rigidity reference platform can be considered when design vacuum system.These ultrahigh vacuum pumps that can produce obviously vibration of turbomolecular pump, cryopump can normally use.Compared to vibrationless sputter ion pump and Tianium sublimation pump, turbomolecular pump and cryopump can bear larger gas load, and therefore application area of the present invention is more wide, can cover thrust from μ N magnitude to all kinds electric thruster of mN magnitude.
(4) can be applicable to ultrahigh vacuum cavity.In whole parts and components used in the present invention, rigidity reference platform, supporting post, flange-interface, Sealing, the first flange, bellows, the second flange and three-flange meeting local or entirety is only had to be among vacuum environment.The stainless steel that these parts and components above-mentioned all can select vacuum compatibility splendid or oxygenless copper material manufacture, therefore the present invention is applicable to background air pressure completely lower than 1 × 10
-5the ultrahigh vacuum cavity of Pa.
Accompanying drawing explanation
Fig. 1 is Italian ALTA company active vibration isolation system schematic diagram;
Fig. 2 is active vibration isolation arrangement 3-D view;
Fig. 3 is the 3-D view after active vibration isolation arrangement simplifies vacuum cavity;
Fig. 4 is active vibration isolation arrangement explosive view;
Fig. 5 is for flexibly connecting segment structure schematic diagram;
Fig. 6 is the flange arrangement schematic diagram of active vibration isolation cradle top, and wherein (a) is front view, and (b) is sectional view;
Fig. 7 is counterweight suspension and counterweight member overall structure schematic three dimensional views;
Fig. 8 is active vibration isolation bracket stable district and quasi stable region conceptual schematic view.
Embodiment
As shown in Figure 2, Figure 3 and Figure 4, the active vibration isolation arrangement for vacuum system of the present invention comprises vacuum cavity 103, rigidity reference platform 101, supporting post 102, the section of flexibly connecting 201, active vibration isolation support 119 and counterweight.In the present embodiment, rigidity reference platform 101 is preferably optical table, also can be that other rigidity are large, be out of shape little platform, as thick corrosion resistant plate.Optical table has large, the lightweight advantage of rigidity, and general optical table employs the poor material of a large amount of vacuum compatibility in process of production, such as epoxy resin, anti-corrosive grease etc.And in ultra-high vacuum system, strictly must forbid the material occurring vacuum compatibility difference, therefore need specific customization optical table, and comparatively strict requirement is proposed to the heat resistance of the adhesive material wherein used and volatile substance composition.Vacuum cavity 103 is positioned on ground, and vacuum cavity 103 is provided with four vertical cavity flange-interfaces 105 down, and the rectangular distribution of flange-interface 105 can be knife-edge method flange-type, also can be non-knife-edge method flange-type.Active vibration isolation support 119 is positioned on ground, and rigidity reference platform 101 is in vacuum cavity 103.When rigidity reference platform 101 area or weight that need carrying are larger, flange-interface 105 can be greater than 4.
As Fig. 5, the section of flexibly connecting 201 is welded by first flange 107, second flange 109 at two ends and bellows 108, and active vibration isolation support 119 top is fixedly connected with three-flange 115.One end of bellows 108 is fixedly connected with flange-interface 105 by the first flange 107, and the other end of bellows 108 is fixedly connected with three-flange 115 by the second flange 109; First flange 107 or the second flange 109 are lap joint flange.
In the present embodiment, bellows 108 is preferably welding type bellows, also can be hydraulic type bellows.First flange 107 is fastening flange, and the second flange 109 is lap joint flange.Lap joint flange is for revising the inconsistent deviation caused of each flange bolt hole circumferential position.Before construction bolt nut 118, by regulating the angle of lap joint flange 109, the bolt hole of four three-flanges 115 and the bolt hole of lap joint flange 109 are aligned mutually, and the axis being parallel of the short seamed edge of sealing flange 115 and vacuum cavity 103.Then install and the nut 118 that tights a bolt, make the Sealing 110 between the second flange 109 and three-flange 115 compacted, thus realize vacuum seal.In installation process and after installing, should note protecting bellows 108, avoid it to damage because of excessive tensile.
Four supporting posts 102 stretch into the central position that bellows 108 is positioned over four three-flanges 115 respectively, three-flange 115 centre bit is equipped with the recessed ledge frame face matched with supporting post 102 external diameter, be used for carrying out spacing to supporting post 102, prevent it from contacting with the pipe side wall of flange-interface 105, the quantity of supporting post 102 is consistent with flange-interface 105 quantity.Rigidity reference platform 101 is positioned over four supporting post 102 tops.Bellows 108, under the deadweight of three-flange 115 or the effect of counterweight that is fixedly connected with three-flange 115, is in extended state.
The effect of the section of flexibly connecting has following three aspects:
(1) realize vacuum seal, active vibration isolation support 119 is isolated in outside vacuum environment;
(2) isolation is from the low-frequency vibration of vacuum pump.The vibration passing that the favorable elasticity of the bellows 108 in the section of flexibly connecting can stop vacuum pump to produce is to rigidity reference platform 101; Bellows 108 tube wall is thin, good springiness, extending amount are large, the elastic strain of self can be utilized, the vibration displacement that vacuum pump produces on average is distributed on each joint ripple, thus significantly weaken the amplitude being delivered to the other end, therefore the transmission path coming from the vibration of vacuum pump is obstructed, thus the isolation of the precision measurement equipment achieved on rigidity reference platform 101 and vacuum cavity 103.
(3) flexibly connecting of active vibration isolation support 119 and vacuum cavity 103 is realized.Flexibly connect and can guarantee that the position dynamic compensation effect that active vibration isolation support 119 produces effectively passes to rigidity reference platform 101 by supporting post 102.
As flange-interface in Fig. 3 105 is fixedly connected with by bolt and nut 104 with the first flange 107, second flange 109 is fixedly connected with by bolt and nut 118 with three-flange 115, the joint that the joint of flange-interface 105 and the first flange 107 is provided with the first Sealing 106, second flange 109 and three-flange 115 is provided with the second Sealing 110; Sealing should match with flange: if flange is edge of a knife type flange, then Sealing can be oxygen free copper circle; If flange is non-knife-edge method flange-type, then Sealing can be O type circle.As Fig. 6 (a) and Fig. 6 (b), in the present embodiment, the flange arrangement of three-flange 115 is preferably sealing flange, and shape is rectangle, the flange arrangement of the second flange 109 match specifications in the center section of being and flexibly connecting 201.
In the present embodiment, vacuum cavity 103 is axis cylindrical shape parallel to the ground, and diameter is 2.0m, because vacuum cavity size is comparatively large, and the therefore local of all only display vacuum cavity 103 in figs. 3 and 4.Rigidity reference platform 101 horizontal dimension is 1700mm × 700mm, and four flange-interface 105 specifications are ISO160, and position is the distributed rectangular of 1400mm × 500mm.
In the present embodiment, supporting post 102 is the solid stainless steel cylinder of diameter 100mm, and length is 580mm, just in time can put into the circular recessed ledge frame face of the Φ 101mm in the middle part of the three-flange 115 as shown in Fig. 6 (a) He Fig. 6 (b).Three-flange 115 elects vacuum flange as.The height of supporting post 102 should make rigidity reference platform 101 above not interfere with vacuum cavity 103 wall.
As shown in Figure 7, in the present embodiment, three-flange 115 is fixedly connected with counterweight, and counterweight comprises counterweight suspension 202 and counterweight member 120, and counterweight suspension 202 comprises: tie-beam 114, heavy burden beam 113 and suspension 121.The corner of flange 115 is provided with through hole, and the two ends of a pair tie-beam 114 are respectively fixed on two three-flanges 115 by bolt and nut 116, and another is fixed on two three-flanges 115 of opposite side the two ends of tie-beam 114.Heavy burden beam 113 two ends are respectively fixed to the medium position of two tie-beams 114 by bolt and nut 117, pin 112 is through the through hole on the vertical bar upper end of suspension 121 and heavy burden beam 113, suspension 121 is fixed on heavy burden beam 113, nut 111 position-limiting actions, in case shotpin 112 is deviate from, also the limit stoper such as back-up ring or cotter pin can be adopted.There is bearing table suspension 121 bottom for carrying counterweight 120.Suspension 121 can be formed by heavy wall square steel pipe welded.
The installation process of counterweight suspension is as follows:
(1) first suspension 121 is placed on the ground in the middle of four active vibration isolation supports 119.
(2) by the through hole of three-flange 115 4 jiaos, with bolt and nut 116, tie-beam 114 is fixed on two adjacent three-flanges 115.
(3) between often pair of tie-beam 114, each installation heavy burden beam 113, and fix with bolt and nut 117.
(4) pin 112 is passed the through hole of suspension 121 and heavy burden beam 113, suspension 121 is hung up.Finally screw on nut 111 in order to carry out spacing to suspension 121 at the two ends of pin 112.
Suspension 121 is placed counterweight member 120, and counterweight member 120 can be lead.
Counterweight has following two aspect effects:
(1) atmospheric pressure is offset to the squeezing action of bellows 108.The minimum weight formula of counterweight is: W=n π Δ Pd
2/ 4g, wherein, d is the inside nominal diameter of vacuum cavity 103 flange-interface 105, and Δ P is that vacuum cavity inner and outer air pressure is poor, and g is gravity accleration, and n is the quantity of flange-interface 105.Take inside nominal diameter as the flange-interface 105 of 160mm be example:
Flange inside nominal diameter:
d＝160mm
Radius:
R＝80mm
Then pipeline section amasss:
S＝πR
2≈0.02m
2
When being in vacuum state in vacuum cavity 103, the pressure that single flange-interface 105 bears is about:
F＝ΔPS≈1.01×10
5Pa×0.02m
2≈2000N。
Be equivalent to barometric pressure produces W=F/g ≈ 205kg extruding force to flange-interface 105, bellows 108 is extruded into most short status completely, loses the effect flexibly connected.In order to avoid bellows 108 loses because of extruding the effect of flexibly connecting, flange-interface 105 is four, just needs the 205kg pressure utilizing counterweight to overcome four inner and outer air pressure differences to produce.That is, the gross weight of rigidity reference platform, supporting post and counterweight must not be less than 820kg.
(2) the overall height of C.G. of all structures on active vibration isolation support 119 is reduced.Have the concept of " stable region " when using active vibration isolation support 119, as shown in Figure 8, the centre distance of active vibration isolation support 119 is D, and a-quadrant (dash area) is the stable region of active vibration isolation support 119, and B region is quasi stable region.The object center of gravity only having active vibration isolation support 119 to carry drops in stable region, and active vibration isolation support 119 can stable operation.But rigidity reference platform 101 center of gravity supported due to supporting post 102 is higher, add the precision equipment placed on rigidity reference platform 101, cause center of gravity can far away higher than the stable region of active vibration isolation support 119, therefore need to carry out counterweight to overall center of gravity, the overall center of gravity of all structures on active vibration isolation support 119 is dropped in stable region.
The working principle of active vibration isolation support 119 is the height utilizing pressurized air to carry out its supporting surface of dynamic adjustments, to compensate the displacement that ground vibration produces.Active vibration isolation support 119 can vertically produce dynamic position compensating action when responding the vibration from ground, thus causes the supporting post 102 of vacuum cavity inside and rigidity reference platform 101 to move up and down relative to vacuum cavity 103.The height of suitable adjustment active vibration isolation support 119 upper-end surface, make four bellowss 108 all be in the state be slightly stretched, and four three-flanges 115 is in same level substantially.
Active vibration isolation arrangement, before work, first should install position transducer, and connect compressed air line, then air compressor is started, rigidity reference platform 101 floats immediately, and bellows 108 is slightly compressed, and namely active vibration isolation arrangement starts normally to play vibration isolation effect.
The unspecified part of the present invention belongs to technology as well known to those skilled in the art.
Claims (10)
1. can be applicable to a local bearing-type active vibration isolation arrangement for ultra-high vacuum system, it is characterized in that: comprise vacuum cavity (103), rigidity reference platform (101), supporting post (102), the section of flexibly connecting (201) and active vibration isolation support (119); Vacuum cavity (103) is positioned on ground, vacuum cavity (103) is provided with vertical cavity flange-interface (105) down, active vibration isolation support (119) is positioned on ground, and it is inner that rigidity reference platform (101) is positioned at vacuum cavity (103); The section of flexibly connecting (201) comprises the first flange (107) and second flange (109) at bellows and two ends thereof, active vibration isolation support (119) top is provided with three-flange (115), one end of bellows (108) is fixedly connected with flange-interface (105) by the first flange (107), and the other end of bellows (108) is fixedly connected with three-flange (115) by the second flange (109); Supporting post (102) is through bellows (108), and one end is supported on rigidity reference platform (101) bottom, and the other end is spacing on three-flange (115); Described bellows (108), under three-flange (115) deadweight or the effect of counterweight that is fixedly connected with three-flange (115), is in extended state.
2. one kind can be applicable to the local bearing-type active vibration isolation arrangement of ultra-high vacuum system as claimed in claim 1, it is characterized in that: described counterweight comprises counterweight suspension (202) and counterweight member (120), and counterweight suspension (202) comprising: tie-beam (114), heavy burden beam (113) and suspension (121); Tie-beam (114) is fixedly attached on three-flange (115), the two ends of heavy burden beam (113) are fixedly attached on tie-beam (114) respectively, and it is vertical in the horizontal direction with tie-beam (114), the vertical bar upper end of suspension (121) is fixedly connected with heavy burden beam (113), and the bearing table of the described counterweight member of carrying (120) is arranged at suspension (121) bottom.
3. one kind can be applicable to the local bearing-type active vibration isolation arrangement of ultra-high vacuum system as claimed in claim 2, it is characterized in that: the vertical bar upper end of described suspension (121) is fixedly connected with by pin (112) with heavy burden beam (113), the two ends of pin (112) are undertaken spacing by limit stoper.
4. one kind can be applicable to the local bearing-type active vibration isolation arrangement of ultra-high vacuum system as claimed in claim 1 or 2, it is characterized in that: the gross weight of described three-flange (115), rigidity reference platform (101) and supporting post (102), or described three-flange (115), counterweight, rigidity reference platform (101) and supporting post (102) gross weight be not less than W, W=n π Δ Pd
2/ 4g, wherein, d is the inside nominal diameter of flange-interface (105), and Δ P is that the inner and outer air pressure of vacuum cavity (103) is poor, and g is gravity accleration, and n is the quantity of flange-interface (105).
5. can be applicable to a local bearing-type active vibration isolation arrangement for ultra-high vacuum system as claimed in claim 1 or 2, it is characterized in that: described bellows (108) is welding type bellows or hydraulic type bellows.
6. can be applicable to a local bearing-type active vibration isolation arrangement for ultra-high vacuum system as claimed in claim 1 or 2, it is characterized in that: described first flange (107) or the second flange (109) are lap joint flange.
7. can be applicable to a local bearing-type active vibration isolation arrangement for ultra-high vacuum system as claimed in claim 1 or 2, it is characterized in that: described rigidity reference platform (101) is optical table.
8. can be applicable to a local bearing-type active vibration isolation arrangement for ultra-high vacuum system as claimed in claim 1 or 2, it is characterized in that: the material of described bellows (108), rigidity reference platform (101), supporting post (102), flange-interface (105), the first flange (107), the second flange (109) or three-flange (115) is stainless steel or oxygenless copper material.
9. one kind can be applicable to the local bearing-type active vibration isolation arrangement of ultra-high vacuum system as claimed in claim 1 or 2, it is characterized in that: described flange-interface (105) is provided with the first Sealing (106) with the joint of the first flange (107), the second flange (109) is provided with the second Sealing (110) with the joint of three-flange (115); Described flange-interface (105), the first flange (107), the second flange (109) and three-flange (115) are edge of a knife type flange or non-knife-edge method flange-type flange, the first Sealing (106) and the second Sealing (110) be anaerobic copper band or O type circle.
10. one kind can be applicable to the local bearing-type active vibration isolation arrangement of ultra-high vacuum system as claimed in claim 1 or 2, it is characterized in that: described three-flange (115) is consistent with the quantity of flange-interface (105), and three-flange (115) is in same level mutually.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510633253.7A CN105240452B (en) | 2015-09-29 | 2015-09-29 | Local bearing type active vibration isolation device capable of being applied to ultrahigh vacuum system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510633253.7A CN105240452B (en) | 2015-09-29 | 2015-09-29 | Local bearing type active vibration isolation device capable of being applied to ultrahigh vacuum system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105240452A true CN105240452A (en) | 2016-01-13 |
| CN105240452B CN105240452B (en) | 2017-05-10 |
Family
ID=55038224
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510633253.7A Active CN105240452B (en) | 2015-09-29 | 2015-09-29 | Local bearing type active vibration isolation device capable of being applied to ultrahigh vacuum system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105240452B (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106594162A (en) * | 2016-12-07 | 2017-04-26 | 上海交通大学 | Hydraulic power antiresonance isolation device |
| CN109884763A (en) * | 2019-02-28 | 2019-06-14 | 中国科学院国家授时中心 | The super steady optical reference chamber supporting and regulating device of one kind and its adjusting method |
| CN111609079A (en) * | 2020-05-28 | 2020-09-01 | 中国电子工程设计院有限公司 | Vibration isolation sealing system |
| CN113866520A (en) * | 2021-09-07 | 2021-12-31 | 哈尔滨工业大学 | Independent supporting structure for vacuum microwave dark room framework |
| CN114688205A (en) * | 2020-12-31 | 2022-07-01 | 北京科益虹源光电技术有限公司 | Vibration isolation structure and impeller rotor system for laser |
| WO2022262006A1 (en) * | 2021-06-18 | 2022-12-22 | 中国电子工程设计院有限公司 | Integrally-controlled vibration isolation system for large precision equipment |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2236059C2 (en) * | 2002-08-07 | 2004-09-10 | Кумыков Вячеслав Каншаубиевич | Method for damping vibrations in vacuum installations |
| WO2008111335A1 (en) * | 2007-03-13 | 2008-09-18 | Edwards Japan Limited | Vibration-proof structure for vacuum pump and vacuum pump with the structure |
| CN201386873Y (en) * | 2009-02-27 | 2010-01-20 | 大连齐维科技发展有限公司 | Ultra-high vacuum angle adjustment device |
| CN101694210A (en) * | 2009-08-25 | 2010-04-14 | 东莞宏威数码机械有限公司 | Damping device |
| CN102818587A (en) * | 2012-07-27 | 2012-12-12 | 北京中科科仪股份有限公司 | Vacuum operating platform with damping mechanism |
-
2015
- 2015-09-29 CN CN201510633253.7A patent/CN105240452B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2236059C2 (en) * | 2002-08-07 | 2004-09-10 | Кумыков Вячеслав Каншаубиевич | Method for damping vibrations in vacuum installations |
| WO2008111335A1 (en) * | 2007-03-13 | 2008-09-18 | Edwards Japan Limited | Vibration-proof structure for vacuum pump and vacuum pump with the structure |
| CN201386873Y (en) * | 2009-02-27 | 2010-01-20 | 大连齐维科技发展有限公司 | Ultra-high vacuum angle adjustment device |
| CN101694210A (en) * | 2009-08-25 | 2010-04-14 | 东莞宏威数码机械有限公司 | Damping device |
| CN102818587A (en) * | 2012-07-27 | 2012-12-12 | 北京中科科仪股份有限公司 | Vacuum operating platform with damping mechanism |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106594162A (en) * | 2016-12-07 | 2017-04-26 | 上海交通大学 | Hydraulic power antiresonance isolation device |
| CN109884763A (en) * | 2019-02-28 | 2019-06-14 | 中国科学院国家授时中心 | The super steady optical reference chamber supporting and regulating device of one kind and its adjusting method |
| CN109884763B (en) * | 2019-02-28 | 2023-12-26 | 中国科学院国家授时中心 | Ultra-stable optical reference cavity supporting and adjusting device and adjusting method thereof |
| CN111609079A (en) * | 2020-05-28 | 2020-09-01 | 中国电子工程设计院有限公司 | Vibration isolation sealing system |
| CN111609079B (en) * | 2020-05-28 | 2022-07-12 | 中国电子工程设计院有限公司 | Vibration isolation sealing system |
| CN114688205A (en) * | 2020-12-31 | 2022-07-01 | 北京科益虹源光电技术有限公司 | Vibration isolation structure and impeller rotor system for laser |
| CN114688205B (en) * | 2020-12-31 | 2023-08-29 | 北京科益虹源光电技术有限公司 | Vibration isolation structure and impeller rotor system for laser |
| WO2022262006A1 (en) * | 2021-06-18 | 2022-12-22 | 中国电子工程设计院有限公司 | Integrally-controlled vibration isolation system for large precision equipment |
| CN113866520A (en) * | 2021-09-07 | 2021-12-31 | 哈尔滨工业大学 | Independent supporting structure for vacuum microwave dark room framework |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105240452B (en) | 2017-05-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105240452A (en) | Local bearing type active vibration isolation device capable of being applied to ultrahigh vacuum system | |
| CN101646918B (en) | Co-ordinate measuring machine with a device for balancing the weight of a vertically mobile member | |
| US8256735B2 (en) | Supporting device for supporting vibration sensitive components | |
| CN109569900B (en) | Self-balancing device of geotechnical centrifuge | |
| CN202834418U (en) | Pipeline radial shock absorption support | |
| CN103292047A (en) | Multifunctional pipeline support structure | |
| US2652241A (en) | Strut platform support | |
| CN215065142U (en) | Earthquake simulation shaking table | |
| KR940001174A (en) | Upper support of pressurized tank | |
| CN205678275U (en) | A kind of wall damping device of antimony glycol feedstock transportation pipeline | |
| CN103573195A (en) | Hydraulic bearing-type riser universal joint device | |
| CN110441155B (en) | Bellows performance inspection integrated device | |
| CN101831955A (en) | Universal hinge support | |
| CN102679139A (en) | Suspension cable type flexible piston arch of gas holder and rubber-film-sealed gas holder | |
| CN107505700B (en) | Large-caliber telescope supporting system and tracking frame | |
| CN107228231B (en) | A kind of novel pump line rack | |
| CN111609079B (en) | Vibration isolation sealing system | |
| CN209839512U (en) | Leveling device for instrument cabin | |
| CN112963621A (en) | Supporting device for large-diameter pipeline | |
| CN213929289U (en) | Cabin-penetrating type micro-vibration control system for large-scale precision equipment | |
| CN107271288B (en) | 10,000 tons load testing machine moving beam lifting system | |
| CN206570816U (en) | Flexible Node and two-way steel support structure applied to two-way steel support structure | |
| CN214499344U (en) | Vacuum system | |
| CN205476444U (en) | Light -duty support post based on low level jacking die carrier system | |
| CN220082029U (en) | Vibration isolation structure and vacuum equipment |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |