WO2022262006A1 - Integrally-controlled vibration isolation system for large precision equipment - Google Patents

Integrally-controlled vibration isolation system for large precision equipment Download PDF

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Publication number
WO2022262006A1
WO2022262006A1 PCT/CN2021/102175 CN2021102175W WO2022262006A1 WO 2022262006 A1 WO2022262006 A1 WO 2022262006A1 CN 2021102175 W CN2021102175 W CN 2021102175W WO 2022262006 A1 WO2022262006 A1 WO 2022262006A1
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WO
WIPO (PCT)
Prior art keywords
vibration isolation
precision equipment
platform
support
integrated control
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Application number
PCT/CN2021/102175
Other languages
French (fr)
Chinese (zh)
Inventor
娄宇
刘海宏
夏艳
陈骝
颜枫
孙宁
左汉文
赵明慧
窦硕
胡书广
林岱中
Original Assignee
中国电子工程设计院有限公司
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Publication of WO2022262006A1 publication Critical patent/WO2022262006A1/en

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/023—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means
    • F16F15/0232—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means with at least one gas spring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/04—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means
    • F16F15/046—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means using combinations of springs of different kinds
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/04—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means
    • F16F15/06—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means with metal springs
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/04—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means
    • F16F15/08—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means with rubber springs ; with springs made of rubber and metal
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
    • F16M5/00—Engine beds, i.e. means for supporting engines or machines on foundations

Definitions

  • the invention relates to the technical field of large precision equipment vibration isolation, in particular to an integrated control large precision equipment vibration isolation system.
  • vibration isolation may be required for the whole or several precision components inside it, and the matching vibration isolation system for precision equipment has become an important environmental protection technology for precision production, processing, testing and other work.
  • the existing vibration isolation system supporting large precision equipment mainly adopts the following two methods: one is integral vibration isolation, that is, the vibration isolation system isolates the precision equipment and its internal components as a whole; the other is separate isolation Vibration, that is, precision equipment is placed on the ground foundation, and the vibration isolation system only isolates the internal components that require vibration.
  • the application of the above two vibration isolation methods has certain limitations depending on different equipment.
  • the integral vibration isolation cannot meet the requirements of large-scale equipment, and the separate vibration isolation cannot meet the multi-dimensional vibration isolation requirements of equipment, resulting in investment and operating costs of vibration isolation systems for large-scale precision equipment. Extremely high, even unable to meet the precision production, processing, testing and other work of equipment.
  • the embodiment of the present invention provides an integrated control vibration isolation system for large-scale precision equipment to solve the problem that the application of existing vibration isolation methods makes the detection process of precision equipment complex, cumbersome, and economical and time-consuming.
  • the embodiment of the present invention proposes an integrated control vibration isolation system for large-scale precision equipment, including a vibration isolation component and a bearing platform; the vibration isolation component is arranged under the precision equipment; there are multiple bearing platforms, and the multiple bearing platforms are inside the precision equipment Arranged vertically, and each bearing platform is supported by vibration isolation components.
  • the vibration isolation assembly includes a plurality of vibration isolation support devices arranged in a flat manner.
  • the vibration isolation assembly further includes a high rigidity platform, the high rigidity platform is supported by a plurality of vibration isolation support devices under the precision equipment, and the plurality of vibration isolation support devices are arranged along the extension direction of the high rigidity platform to form at least A row, each row comprising one or more vibration-isolation supports.
  • the carrying platform includes a first carrying platform and a second carrying platform, and the second carrying platform is configured to be located above the first carrying platform in a vertical direction.
  • the multiple first carrying platforms are arranged in tiles in the horizontal direction.
  • the first bearing platform is connected to the vibration isolation assembly through a plurality of first supports penetrating the precision equipment wall
  • the second bearing platform is connected to the vibration isolation assembly through a plurality of second supports penetrating the precision equipment wall.
  • both the first support and the second support pass through the precision equipment wall through holes on the precision equipment, and flexible seals are provided between the first support and the second support and the through holes. pieces.
  • the first end of the first support is connected to the vibration isolation assembly, and the second end of the first support extends through the bottom wall of the precision equipment to the inner bottom of the precision equipment and is connected to the first bearing platform .
  • the second ends of the plurality of first supports are arranged in at least one row along the extension direction of the first carrying platform, and the number of second ends of the first supports in each row is one or more .
  • the first end of the second support is connected to the vibration isolation assembly, and the second end of the second support extends through the side wall of the precision equipment to the upper part inside the precision equipment and is connected to the second bearing platform .
  • the second carrying platform is connected to the first carrying platform through a plurality of second supports arranged in the precision equipment.
  • the first end of the second support is connected to the first carrying platform, and the second end of the second support extends to the upper part of the precision equipment to connect to the second carrying platform.
  • the second carrying platform is connected to the vibration isolation assembly through a plurality of second supports disposed in the precision equipment and penetrating through the first carrying platform.
  • the second ends of the plurality of second supports are arranged around the second carrying platform along the circumferential direction of the second carrying platform.
  • the plurality of second support members are connected to the second carrying platform through ring-shaped positioning members, and the second carrying platform is arranged in the middle of the positioning member through a plurality of connecting members.
  • a part of the second supports is close to one side of the first carrying platform, and another part of the second supports is close to the other side of the first carrying platform;
  • diagonal braces are arranged between adjacent second supports.
  • the integrated control large-scale precision equipment vibration isolation system provided by the embodiment of the present invention is provided with a plurality of vertically arranged bearing platforms inside the large-scale precision equipment, and is integrated and controlled on the vibration isolation components.
  • the vibration isolation of precision devices of different dimensions has been realized by means of vibration isolation, which has solved the problem that has plagued the industry for a long time.
  • the system can also greatly reduce investment and operation costs, and improve the detection efficiency of precision equipment.
  • the field of precision equipment has extremely high promotion value.
  • Fig. 1 is a structural schematic view of a large-scale precision equipment vibration isolation system with integrated control according to an embodiment of the present invention at a certain angle of view;
  • Fig. 2 is a structural schematic view of a large-scale precision equipment vibration isolation system with integrated control according to another embodiment of the present invention at a certain angle of view;
  • Fig. 3 is a structural schematic diagram of an integrated control large-scale precision equipment vibration isolation system in another perspective according to an embodiment of the present invention
  • Fig. 4 is a structural schematic view of another perspective view of an integrated control large-scale precision equipment vibration isolation system according to another embodiment of the present invention.
  • Fig. 5 is a structural schematic diagram of another perspective view of an integrated control vibration isolation system for large-scale precision equipment according to yet another embodiment of the present invention.
  • FIG. 6 is a schematic structural view of the first load-carrying platform of the vibration isolation system for large-scale precision equipment with integrated control according to the embodiment of the present invention
  • Fig. 7 is a schematic view of the structure of the second bearing platform of the integrated control vibration isolation system for large-scale precision equipment according to the embodiment of the present invention at a certain angle of view;
  • Fig. 8 is a structural schematic view of the second bearing platform of the integrated control vibration isolation system for large-scale precision equipment according to the embodiment of the present invention from another perspective.
  • 100-vibration isolation components 200-precision equipment, 300-first bearing platform, 400-second bearing platform, 500-first support, 600-second support, 700-flexible seal;
  • the large-scale precision equipment vibration isolation system with integrated control of the embodiment of the present invention includes a vibration isolation assembly 100 and a bearing platform; the vibration isolation assembly 100 is arranged below the precision equipment 200; The platforms are vertically arranged in the precision equipment 200 , and each bearing platform is supported by the vibration isolation assembly 100 .
  • a plurality of vertically arranged load-bearing platforms are set inside the large-scale precision equipment, and are integrated and controlled on the vibration isolation assembly 100, and the isolation of precision devices of different dimensions is realized in an integrated manner.
  • the system can also greatly reduce the input and operation costs, improve the detection efficiency of precision equipment, and solve the problem that the application of existing vibration isolation methods makes the detection process of precision equipment complex and cumbersome. Higher economic and time costs.
  • the precision equipment 200 can be in the form of a vacuum tank, the shape of the precision equipment 200 can be similar to a cylinder or a similar cuboid, and the precision equipment 200 can be supported on the foundation or other vibration isolation foundations, and the distance between the precision equipment 200 and the bearing platform It is a separated vibration isolation, which avoids the internal vibration interference of the precision equipment 200.
  • the vibration isolation assembly 100 includes a plurality of vibration isolation support devices 101 arranged in a flat manner.
  • a plurality of vibration isolation support devices 101 are arranged flatly under the precision equipment 200 to form a support plane, and the first carrying platform 300 and the second carrying platform 400 are supported by the same plurality of vibration isolation support devices 101 , to ensure the consistency of the vibration phases of the first carrying platform 300 and the second carrying platform 400 , thereby ensuring the consistency of the vibration phases of the detection devices carried by them.
  • the vibration isolation assembly 100 further includes a high-rigidity platform 102, and the high-rigidity platform 102 is supported under the precision equipment 200 by a plurality of vibration isolation support devices 101, and the plurality of vibration isolation support devices 101
  • the supporting devices 101 are arranged in at least one row along the extending direction of the high-rigidity platform 102 , and each row includes one or more vibration-isolation supporting devices 101 .
  • both the first bearing platform 300 and the second bearing platform 400 are supported by the high rigidity platform 102, which can further improve the consistency of the vibration phase.
  • Multiple vibration-isolation support devices 101 are located below the high-rigidity platform 102, and jointly support the high-rigidity platform 102 on the foundation or other foundation platforms; multiple vibration-isolation support devices 101 are arranged in rows, when one or more rows of vibration
  • the device 101 includes a plurality of vibration isolation support devices 101, adjacent rows of vibration isolation support devices 101 can be arranged alternately, or arranged in alignment, or in other corresponding relationships, and the plurality of vibration isolation support devices 101 can be evenly arranged on the whole , based on the principle of being able to stably support the first carrying platform 300 and the second carrying platform 400 .
  • the projection shape of the high rigidity platform 102 in the vertical direction can be a variety of shapes such as rectangle, square, circle, ellipse, etc., and can be specifically determined according to the projection shape of the precision equipment 200 in the vertical direction.
  • the high-rigidity platform 102 can adopt a plate structure, a steel-concrete structure, a frame structure, etc., and itself needs to have high structural stability and should meet the requirements of this embodiment.
  • the vibration isolation support device 101 can adopt air springs, steel springs, rubber springs, etc., or adopt structural forms such as air bags, air chambers, or other structures with vibration isolation and support functions that can be applied to the usage scenarios of this embodiment.
  • the carrying platform includes a first carrying platform 300 and a second carrying platform 400 , and the second carrying platform 400 is configured to be located above the first carrying platform 300 in a vertical direction.
  • the bearing platform is subdivided into the first bearing platform 300 located relatively above and the second bearing platform 400 located relatively below.
  • the integrated control vibration isolation system for large-scale precision equipment in this embodiment can meet the needs of large-scale precision equipment.
  • the vibration isolation requirements of precision devices of different heights in the interior are realized, and the vibration isolation of precision devices of different heights is realized separately.
  • the first carrying platform 300 is used to carry precision devices, including a precision device under test and a level detection device.
  • the level detection device can perform level detection on the precision device under test carried by the first carrying platform 300 .
  • the second carrying platform 400 is used to carry the vertical detection device.
  • the first carrying platform 300 and the second carrying platform 400 arranged up and down can simultaneously satisfy horizontal micro-vibration isolation and vertical micro-vibration isolation, and can simultaneously make the vertical detection device to the first
  • the precision device under test carried by the carrying platform 300 is vertically detected.
  • This kind of application can realize the test of large precision devices under test, such as optical test, providing horizontal and vertical integrated vibration isolation, so that the same set of vibration isolation equipment can be used for horizontal detection and vertical detection, effectively reducing the ground and precision equipment by 200
  • the vibration transmission rate of the vibration to the precision device under test and the detection device improves the vibration isolation efficiency, ensures the vibration environment requirements of the test, can reduce the economic cost and time cost of the test, and has a simple structure and is easy to implement.
  • the first bearing platform 300 and the second bearing platform 400 are supported by the same vibration isolation assembly 100, which ensures the consistency of the vibration phases of the first bearing platform 300 and the second bearing platform 400, thereby ensuring the The consistency of the vibration phase of the precision device can not only improve the detection efficiency, but also ensure the accuracy of the detection.
  • the second carrying platform 400 can be aligned with the middle of the first carrying platform 300 , so as to facilitate erection of testing equipment on the second carrying platform 400 .
  • the second carrying platform 400 is located above the first carrying platform 300 , and the height of the second carrying platform 400 from the first carrying platform 300 should be sufficient to place precision devices on the first carrying platform 300 .
  • the number of the second carrying platform 400 is multiple, and the multiple second carrying platforms 400 are stacked successively in the vertical direction; the number of the first carrying platform 300 is multiple, and the multiple first carrying platforms The platforms 300 are arranged in tiles in the horizontal direction.
  • the number of the second carrying platforms 400 can be multiple, and the multiple second carrying platforms 400 can be stacked in sequence in the vertical direction, and can be stacked in alignment or misaligned.
  • the number of the first carrying platforms 300 It can also be multiple, and multiple first carrying platforms 300 can be tiled in the horizontal direction, and can be aligned or dislocated.
  • Multiple second carrying platforms 400 and multiple first carrying platforms 300 can be arranged according to the large The vibration isolation requirements and distribution of different internal components of precision equipment are arranged in detail. All the second bearing platform 400 and the first bearing platform 300 are connected to each other, and the integration is controlled by the vibration isolation component 100 to realize the integration of all bearing platforms. optimized vibration control.
  • the first carrying platform 300 is connected to the vibration isolation assembly 100 through a plurality of first supports 500 penetrating the wall of the precision equipment 200 , and the first supports 500 penetrate the precision equipment 200 through holes on the precision equipment 200 . Equipped with 200 walls, a flexible seal 700 is provided between the first support 500 and the through hole.
  • the flexible sealing member 700 of this embodiment is used to seal the through hole, and at the same time makes the first support member 500 and the precision equipment 200 be in soft contact, greatly reducing the impact of the precision equipment 200 and external vibration on the first bearing platform 300, and further Reduce the impact on detection.
  • the multiple first carrying platforms 300 are all supported by the first supporting member 500 .
  • the flexible sealing member 700 is a bellows, and the connection method can be welding, which has a certain deformation ability, can effectively play a role of vibration isolation, and can ensure the sealing between the first support member 500 and the precision equipment 200 , to maintain the vacuum degree and temperature in the precision equipment 200; the flexible seal 700 can also be other components capable of flexible connection and sealing, such as large deflection bellows, rubber tubes, rubber sealing rings, membrane damping structures, etc. .
  • the first end of the first support 500 is connected to the vibration isolation assembly 100, and the second end of the first support 500 extends through the bottom wall of the precision equipment 200 to the inner bottom of the precision equipment 200 to connect with the first The bearing platform 300 is connected.
  • the first support 500 in this embodiment can extend into the interior of the precision equipment 200 from the bottom wall of the precision equipment 200, and support the first carrying platform 300 at the bottom inside the precision equipment 200; the first support 500 can extend in a straight line as a whole, or It may be in the shape of a broken line formed by sequentially connecting multiple sections. Preferably, a section passing through the bottom wall of the precision equipment 200 is in the shape of a straight line.
  • the second ends of the plurality of first supports 500 are arranged in at least one row along the extension direction of the first carrying platform 300, and the number of second ends of the first supports 500 in each row is one or more indivual.
  • the second ends of the plurality of first supports 500 in this embodiment are arranged in a row, and when one or more rows include the second ends of the plurality of first supports 500, the first supports 500 of adjacent rows
  • the second ends can be arranged in a staggered manner, or arranged in alignment, or in other corresponding relationships, and it should be ensured that the first bearing platform 300 can be stably supported.
  • the second carrying platform 400 is connected to the vibration isolation assembly 100 through a plurality of second supports 600 penetrating through the wall of the precision equipment 200, and the second supports 600 penetrate the precision equipment 200 through the through holes on the precision equipment 200
  • a flexible sealing member 700 is provided between the wall, the second supporting member 600 and the through hole.
  • the flexible sealing member 700 is used to seal the through hole, and at the same time makes soft contact between the second support member 600 and the precision equipment 200, greatly reducing the vibration of the precision equipment 200 and the outside world on the second bearing platform. 400, thereby reducing the impact on detection.
  • the multiple second carrying platforms 400 are all supported by the second support member 600 .
  • the first end of the second support 600 is connected to the vibration isolation assembly 100, and the second end of the second support 600 extends through the side wall of the precision equipment 200 to the upper part of the precision equipment 200 and is connected to the second The bearer platform 400 is connected.
  • the second supporting member 600 of this embodiment can extend into the interior of the precision equipment 200 from the side wall of the precision equipment 200 , and support the second carrying platform 400 at the upper part of the interior of the precision equipment 200 .
  • the second supporting member 600 can be in the shape of a curve, a broken line or other shapes, which can fit the contour of the side wall of the precision equipment 200, extend upwards from the outside of the precision equipment 200, and extend into the precision equipment from the upper side wall of the precision equipment 200. Equip 200 interior.
  • a plurality of second support members 600 can be symmetrically arranged on both sides of the precision equipment 200 , including uniform number and position, so as to support the second carrying platform 400 more stably.
  • the second carrying platform 400 is connected to the first carrying platform 300 through a plurality of second supports 600 disposed in the precision equipment 200 .
  • the second supporting member 600 can be arranged in the precision equipment 200 to connect the second carrying platform 400 with the first carrying platform 300 so that the second carrying platform 400 is supported above the first carrying platform 300 .
  • the first end of the second support 600 is connected to the first carrying platform 300 , and the second end of the second support 600 extends to the upper part of the precision equipment 200 to connect to the second carrying platform 400 .
  • the second supporting member 600 in this embodiment may extend upwards inside the precision equipment 200 , and support the second carrying platform 400 on the upper part inside the precision equipment 200 .
  • the second support member 600 can be curved, broken line or other shapes, can match the inner contour of the side wall of the precision equipment 200 , and extend upwards to the upper part of the precision equipment 200 inside the precision equipment 200 .
  • the second carrying platform 400 is connected to the vibration isolation assembly 100 through a plurality of second support members 600 disposed in the precision equipment 200 and penetrating through the first carrying platform 300 .
  • the second end of the second support 600 can extend through the bottom wall of the precision equipment 200 to the upper part of the precision equipment 200 to connect with the second carrying platform. 400 connection, if necessary, the second end of the second support 600 can pass through the first
  • the carrying platform 300 is connected to the second carrying platform 400 , and the first carrying platform 300 is correspondingly provided with a through hole for the second supporting member 600 to pass through.
  • the second ends of the plurality of second supports 600 are arranged around the second carrying platform 400 along the circumferential direction of the second carrying platform 400 .
  • the second ends of the plurality of second support members 600 in this embodiment may be evenly arranged along the circumference of the second carrying platform 400 in the precision equipment 200 to support the second carrying platform 400 more stably.
  • a plurality of second support members 600 are connected to the second carrying platform 400 through ring-shaped positioning members 401, and the second carrying platform 400 is arranged in the middle of the positioning member 401 through a plurality of connecting members 402, as shown in Figure 7 shown.
  • the setting of the positioning member 401 makes the connection between the second carrying platform 400 and a plurality of second support members 600 more convenient, and also makes the position of the second carrying platform 400 more stable.
  • a plurality of connecting parts 402 may be evenly distributed along the circumferential direction of the positioning part 401 , so that the positioning part 401 can stably carry the second carrying platform 400 .
  • the setting of the positioning member 401 is described as follows: when the second carrying platform 400 is connected to the high rigidity platform 102 through a plurality of second supports 600 penetrating the wall of the precision equipment 200 from outside to inside, the positioning member 401 is set on the precision equipment 200 In the upper part, the second ends of the plurality of second support members 600 extend upwards to the upper part of the precision equipment 200 outside the precision equipment 200, penetrate through the wall of the precision equipment 200 and extend to the interior of the precision equipment 200, and are positioned in the upper part of the precision equipment 200 401, the second carrying platform 400 is arranged in the middle of the positioning member 401 through a plurality of connecting pieces 402, so that the second carrying platform 400 is supported on the high rigidity platform 102 through a plurality of second supporting members 600; when the second carrying platform 400 is connected to the first carrying platform 300 through a plurality of second supports 600 arranged in the precision equipment 200, as shown in FIG.
  • the positioning part 401 is arranged on the upper part of the precision equipment 200, and the second ends of the plurality of second supports 600 extend to the upper part of the precision equipment 200 to connect with the positioning part 401, and the second carrying platform 400 is arranged on the The middle part of the positioning member 401 , so that the second carrying platform 400 is supported on the first carrying platform 300 or the high-rigidity platform 102 through a plurality of second support members 600 .
  • a part of the second supports 600 is close to one side of the first carrying platform 300, and another part of the second supports 600 is close to the other side of the first carrying platform 300;
  • diagonal braces 601 are arranged between adjacent second support members 600 .
  • diagonal braces 601 may be provided between adjacent second supports 600 to improve the overall rigidity of all second supports 600 .
  • the adjacent second supports Diagonal braces 601 are also arranged between 600 .
  • the structural form of the first bearing platform 300 is a stainless steel frame structure, a space truss structure, a network frame structure, or a honeycomb structure, or other high rigid structural forms, which may have inclined Bracing members to increase overall rigidity.
  • the shape of the second bearing platform 400 is circular or polygonal, and its structure is a stainless steel frame structure, grid structure, or sandwich structure, or other highly rigid structure forms.
  • an installation interface 403 for detection equipment such as a collimator, can also be reserved for installation and maintenance, as shown in Figure 7; when the second carrying platform 400 is a sandwich structure, the upper and lower layers It can be a stainless steel plate 404 or a perforated plate, with mounting bolt holes reserved, and a stainless steel frame 405 in the middle, as shown in FIG. 8 .
  • both the first supporting member 500 and the second supporting member 600 may be in the form of supporting columns or concrete frame structures.
  • the first bearing platform 300 and the second bearing platform 400, the first support member 500 and the second support member 600 are all made of high-rigidity components, such as the above-mentioned stainless steel plate, perforated plate, stainless steel frame, and stainless steel column, etc. Form a highly rigid structure and reduce vibration amplification.
  • the overall rigidity of the platform needs to be taken into consideration when designing the first bearing platform 300 and the second bearing platform 400 .
  • the overall rigidity requirement can be greater than 14 Hz.
  • the first support 500 is rigidly connected to the first carrying platform 300
  • the second support 600 is also rigidly connected to the second carrying platform 400 .

Abstract

Disclosed is an integrally-controlled vibration isolation system for large precision equipment, which relates to the technical field of large precision equipment vibration isolation, the system comprising a vibration isolation assembly and carrying platforms; the vibration isolation assembly is disposed below a piece of precision equipment, and there are multiple carrying platforms, the multiple carrying platforms being vertically arranged within the precision equipment; and each carrying platform is supported by the vibration isolation assembly. In the integrally-controlled vibration isolation system for large precision equipment according to the present invention, multiple vertically-arranged carrying platforms are provided in the interior of a piece of large precision equipment and are integrally controlled above a vibration isolation assembly, and vibration isolation of precision devices of different dimensions is achieved by means of integration, thereby solving a problem which has troubled the industry for a long time. In the system, on the basis that the multi-dimensional vibration isolation effect of a device is met, investment and operation costs may be greatly reduced, and precision equipment testing efficiency is improved.

Description

一体化控制的大型精密装备隔振系统Vibration isolation system for large precision equipment with integrated control
相关申请的交叉引用Cross References to Related Applications
本申请要求在2021年06月18日提交中国专利局、申请号为202110677299.4、申请名称为“一体化控制的大型精密装备隔振系统”的中国专利申请的优先权，其全部内容通过引用结合在本申请中。This application claims the priority of the Chinese patent application submitted to the China Patent Office on June 18, 2021, with the application number 202110677299.4, and the application name "Integrated Control Vibration Isolation System for Large Precision Equipment", the entire content of which is incorporated by reference In this application.
技术领域technical field
本发明涉及大型精密装备隔振技术领域，尤其涉及一种一体化控制的大型精密装备隔振系统。The invention relates to the technical field of large precision equipment vibration isolation, in particular to an integrated control large precision equipment vibration isolation system.
背景技术Background technique
对于大型精密装备而言，其整体或者其内部若干精密器件都可能需要进行隔振，与之相配套的精密装备隔振系统就成为精密生产、加工、试验等工作的重要环境保障技术。For large-scale precision equipment, vibration isolation may be required for the whole or several precision components inside it, and the matching vibration isolation system for precision equipment has become an important environmental protection technology for precision production, processing, testing and other work.
现有的与大型精密装备配套的隔振系统主要采取以下两种方式：一种为整体式隔振，即隔振系统对精密装备和其内部器件整体进行隔振；另一种为分离式隔振，即精密装备放置于地面基础上，隔振系统只对内部对振动要求组件进行隔振。The existing vibration isolation system supporting large precision equipment mainly adopts the following two methods: one is integral vibration isolation, that is, the vibration isolation system isolates the precision equipment and its internal components as a whole; the other is separate isolation Vibration, that is, precision equipment is placed on the ground foundation, and the vibration isolation system only isolates the internal components that require vibration.
应用上述两种隔振方式根据不同装备存在一定局限性，整体式隔振无法满足设备大型化要求，分离式隔振无法满足设备多维度隔振要求，导致大型精密装备隔振系统投入和运行成本极高，甚至不能满足设备精密生产、加工、试验等工作。The application of the above two vibration isolation methods has certain limitations depending on different equipment. The integral vibration isolation cannot meet the requirements of large-scale equipment, and the separate vibration isolation cannot meet the multi-dimensional vibration isolation requirements of equipment, resulting in investment and operating costs of vibration isolation systems for large-scale precision equipment. Extremely high, even unable to meet the precision production, processing, testing and other work of equipment.
发明内容Contents of the invention
本发明实施例提供一种一体化控制的大型精密装备隔振系统，以解决应用现有的隔振方式使得精密装备检测过程复杂、繁琐，经济及时间成本较高 的问题。The embodiment of the present invention provides an integrated control vibration isolation system for large-scale precision equipment to solve the problem that the application of existing vibration isolation methods makes the detection process of precision equipment complex, cumbersome, and economical and time-consuming.
本发明实施例提出了一种一体化控制的大型精密装备隔振系统，包括隔振组件及承载平台；隔振组件设置于精密装备下方；承载平台为多个，多个承载平台在精密装备内竖向排布，且各个承载平台均由隔振组件支撑。The embodiment of the present invention proposes an integrated control vibration isolation system for large-scale precision equipment, including a vibration isolation component and a bearing platform; the vibration isolation component is arranged under the precision equipment; there are multiple bearing platforms, and the multiple bearing platforms are inside the precision equipment Arranged vertically, and each bearing platform is supported by vibration isolation components.
根据本发明实施例的一个方面，隔振组件包括平铺排布的多个隔振支撑装置。According to an aspect of the embodiments of the present invention, the vibration isolation assembly includes a plurality of vibration isolation support devices arranged in a flat manner.
根据本发明实施例的一个方面，隔振组件还包括高刚性平台，高刚性平台由多个隔振支撑装置支撑于精密装备下方，多个隔振支撑装置沿高刚性平台的延伸方向排列成至少一排，每排包括一个或多个隔振支撑装置。According to an aspect of the embodiment of the present invention, the vibration isolation assembly further includes a high rigidity platform, the high rigidity platform is supported by a plurality of vibration isolation support devices under the precision equipment, and the plurality of vibration isolation support devices are arranged along the extension direction of the high rigidity platform to form at least A row, each row comprising one or more vibration-isolation supports.
根据本发明实施例的一个方面，承载平台包括第一承载平台及第二承载平台，第二承载平台被配置为在竖直方向上位于第一承载平台上方。According to an aspect of the embodiments of the present invention, the carrying platform includes a first carrying platform and a second carrying platform, and the second carrying platform is configured to be located above the first carrying platform in a vertical direction.
根据本发明实施例的一个方面，第二承载平台的数量为多个，多个第二承载平台在竖直方向上依次层叠设置。According to an aspect of the embodiments of the present invention, there are multiple second carrying platforms, and the multiple second carrying platforms are stacked in sequence in the vertical direction.
根据本发明实施例的一个方面，第一承载平台的数量为多个，多个第一承载平台在水平方向上平铺设置。According to an aspect of an embodiment of the present invention, there are multiple first carrying platforms, and the multiple first carrying platforms are arranged in tiles in the horizontal direction.
根据本发明实施例的一个方面，第一承载平台通过贯穿精密装备壁的多个第一支撑件与隔振组件连接，第二承载平台通过贯穿精密装备壁的多个第二支撑件与隔振组件连接。According to an aspect of the embodiment of the present invention, the first bearing platform is connected to the vibration isolation assembly through a plurality of first supports penetrating the precision equipment wall, and the second bearing platform is connected to the vibration isolation assembly through a plurality of second supports penetrating the precision equipment wall. Component connections.
根据本发明实施例的一个方面，第一支撑件及第二支撑件均由精密装备上的通孔贯穿精密装备壁，第一支撑件及第二支撑件与通孔之间均设置有柔性密封件。According to an aspect of the embodiment of the present invention, both the first support and the second support pass through the precision equipment wall through holes on the precision equipment, and flexible seals are provided between the first support and the second support and the through holes. pieces.
根据本发明实施例的一个方面，第一支撑件的第一端与隔振组件连接，第一支撑件的第二端贯穿精密装备的底壁延伸至精密装备内部底部而与第一承载平台连接。According to an aspect of an embodiment of the present invention, the first end of the first support is connected to the vibration isolation assembly, and the second end of the first support extends through the bottom wall of the precision equipment to the inner bottom of the precision equipment and is connected to the first bearing platform .
根据本发明实施例的一个方面，多个第一支撑件的第二端沿第一承载平台的延伸方向排列成至少一排，每排的第一支撑件的第二端的数量为一个或多个。According to an aspect of an embodiment of the present invention, the second ends of the plurality of first supports are arranged in at least one row along the extension direction of the first carrying platform, and the number of second ends of the first supports in each row is one or more .
根据本发明实施例的一个方面，第二支撑件的第一端与隔振组件连接，第二支撑件的第二端贯穿精密装备的侧壁延伸至精密装备内部上部而与第二承载平台连接。According to an aspect of the embodiment of the present invention, the first end of the second support is connected to the vibration isolation assembly, and the second end of the second support extends through the side wall of the precision equipment to the upper part inside the precision equipment and is connected to the second bearing platform .
根据本发明实施例的一个方面，第二承载平台通过设置于精密装备内的多个第二支撑件与第一承载平台连接。According to an aspect of the embodiments of the present invention, the second carrying platform is connected to the first carrying platform through a plurality of second supports arranged in the precision equipment.
根据本发明实施例的一个方面，第二支撑件的第一端与第一承载平台连接，第二支撑件的第二端延伸至精密装备上部而与第二承载平台连接。According to an aspect of the embodiments of the present invention, the first end of the second support is connected to the first carrying platform, and the second end of the second support extends to the upper part of the precision equipment to connect to the second carrying platform.
根据本发明实施例的一个方面，第二承载平台通过设置于精密装备内的、贯穿第一承载平台的多个第二支撑件与隔振组件连接。According to an aspect of the embodiments of the present invention, the second carrying platform is connected to the vibration isolation assembly through a plurality of second supports disposed in the precision equipment and penetrating through the first carrying platform.
根据本发明实施例的一个方面，多个第二支撑件的第二端沿第二承载平台的周向环绕第二承载平台设置。According to an aspect of the embodiments of the present invention, the second ends of the plurality of second supports are arranged around the second carrying platform along the circumferential direction of the second carrying platform.
根据本发明实施例的一个方面，多个第二支撑件通过环状的定位件与第二承载平台连接，第二承载平台通过多个连接件设置于定位件中部。According to an aspect of the embodiments of the present invention, the plurality of second support members are connected to the second carrying platform through ring-shaped positioning members, and the second carrying platform is arranged in the middle of the positioning member through a plurality of connecting members.
根据本发明实施例的一个方面，多个第二支撑件中，一部分第二支撑件靠近第一承载平台的一侧，另一部分第二支撑件靠近第一承载平台的另一侧；靠近第一承载平台同一侧的第二支撑件中，相邻第二支撑件之间设置有斜撑件。According to an aspect of an embodiment of the present invention, among the plurality of second supports, a part of the second supports is close to one side of the first carrying platform, and another part of the second supports is close to the other side of the first carrying platform; Among the second supports on the same side of the bearing platform, diagonal braces are arranged between adjacent second supports.
本发明实施例提供的一体化控制的大型精密装备隔振系统，在大型精密装备内部设置了多个竖向排布的承载平台，并一体化受控于隔振组件之上，通过一体化的方式实现对不同维度的精密器件的隔振，解决了困扰业界许久的问题，该系统在满足设备多维度隔振效果的基础上，还能够大幅降低投入和运行成本，提高精密装备检测效率，在精密装备领域具有极高的推广价值。The integrated control large-scale precision equipment vibration isolation system provided by the embodiment of the present invention is provided with a plurality of vertically arranged bearing platforms inside the large-scale precision equipment, and is integrated and controlled on the vibration isolation components. The vibration isolation of precision devices of different dimensions has been realized by means of vibration isolation, which has solved the problem that has plagued the industry for a long time. On the basis of satisfying the multi-dimensional vibration isolation effect of equipment, the system can also greatly reduce investment and operation costs, and improve the detection efficiency of precision equipment. The field of precision equipment has extremely high promotion value.
附图说明Description of drawings
为了更清楚地说明本发明实施例的技术方案，下面将对本发明实施例中所需要使用的附图作简单地介绍，显而易见地，下面所描述的附图仅仅是本发明的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的 前提下，还可以根据这些附图获得其他的附图。In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following will briefly introduce the accompanying drawings required in the embodiments of the present invention. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For Those of ordinary skill in the art can also obtain other drawings based on these drawings without making creative efforts.
图1为本发明实施例的一体化控制的大型精密装备隔振系统在某一视角的结构示意图；Fig. 1 is a structural schematic view of a large-scale precision equipment vibration isolation system with integrated control according to an embodiment of the present invention at a certain angle of view;
图2为本发明另一实施例的一体化控制的大型精密装备隔振系统在某一视角的结构示意图；Fig. 2 is a structural schematic view of a large-scale precision equipment vibration isolation system with integrated control according to another embodiment of the present invention at a certain angle of view;
图3为本发明实施例的一体化控制的大型精密装备隔振系统在另一视角的结构示意图；Fig. 3 is a structural schematic diagram of an integrated control large-scale precision equipment vibration isolation system in another perspective according to an embodiment of the present invention;
图4为本发明又一实施例的一体化控制的大型精密装备隔振系统在另一视角的结构示意图；Fig. 4 is a structural schematic view of another perspective view of an integrated control large-scale precision equipment vibration isolation system according to another embodiment of the present invention;
图5为本发明再一实施例的一体化控制的大型精密装备隔振系统在另一视角的结构示意图；Fig. 5 is a structural schematic diagram of another perspective view of an integrated control vibration isolation system for large-scale precision equipment according to yet another embodiment of the present invention;
图6为本发明实施例的一体化控制的大型精密装备隔振系统的第一承载平台的结构示意图；6 is a schematic structural view of the first load-carrying platform of the vibration isolation system for large-scale precision equipment with integrated control according to the embodiment of the present invention;
图7为本发明实施例的一体化控制的大型精密装备隔振系统的第二承载平台在某一视角的结构示意图；Fig. 7 is a schematic view of the structure of the second bearing platform of the integrated control vibration isolation system for large-scale precision equipment according to the embodiment of the present invention at a certain angle of view;
图8为本发明实施例的一体化控制的大型精密装备隔振系统的第二承载平台在另一视角的结构示意图。Fig. 8 is a structural schematic view of the second bearing platform of the integrated control vibration isolation system for large-scale precision equipment according to the embodiment of the present invention from another perspective.
附图中：In the attached picture:
100-隔振组件，200-精密装备，300-第一承载平台，400-第二承载平台，500-第一支撑件，600-第二支撑件，700-柔性密封件；100-vibration isolation components, 200-precision equipment, 300-first bearing platform, 400-second bearing platform, 500-first support, 600-second support, 700-flexible seal;
101-隔振支撑装置,102-高刚性平台；101-vibration isolation support device, 102-high rigidity platform;
401-定位件，402-连接件，403-安装接口，404-不锈钢钢板，405-不锈钢框架；401-positioning piece, 402-connecting piece, 403-installation interface, 404-stainless steel plate, 405-stainless steel frame;
601-斜撑件。601 - Diagonal bracing.
具体实施方式detailed description
下面结合附图和实施例对本发明的实施方式作进一步详细描述。以下实 施例的详细描述和附图用于示例性地说明本发明的原理，但不能用来限制本发明的范围，即本发明不限于所描述的实施例。Embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings and examples. The detailed description and drawings of the following embodiments are used to illustrate the principles of the present invention, but not to limit the scope of the present invention, that is, the present invention is not limited to the described embodiments.
在本发明的描述中，需要说明的是，除非另有说明，术语“第一”和“第二”等仅用于描述目的，而不能理解为指示或暗示相对重要性；“多个”的含义是两个或两个以上；术语“内”、“外”、“顶部”、“底部”等指示的方位或位置关系为基于附图所示的方位或位置关系，仅是为了便于描述本发明和简化描述，而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本发明的限制。In the description of the present invention, it should be noted that, unless otherwise stated, the terms "first" and "second" are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance; The meaning is two or more; the orientation or positional relationship indicated by the terms "inner", "outer", "top", "bottom" etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing this The invention and the simplified description do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and thus should not be construed as limiting the present invention.
请参阅图1，本发明实施例的一体化控制的大型精密装备隔振系统，包括隔振组件100及承载平台；隔振组件100设置于精密装备200下方；承载平台为多个，多个承载平台在精密装备200内竖向排布，且各个承载平台均由隔振组件100支撑。在本实施例中，在大型精密装备内部设置了多个竖向排布的承载平台，并一体化受控于隔振组件100之上，通过一体化的方式实现对不同维度的精密器件的隔振，该系统在满足设备多维度隔振效果的基础上，还能够大幅降低投入和运行成本，提高精密装备检测效率，解决了应用现有的隔振方式使得精密装备检测的过程复杂、繁琐，经济及时间成本较高的问题。Please refer to Fig. 1 , the large-scale precision equipment vibration isolation system with integrated control of the embodiment of the present invention includes a vibration isolation assembly 100 and a bearing platform; the vibration isolation assembly 100 is arranged below the precision equipment 200; The platforms are vertically arranged in the precision equipment 200 , and each bearing platform is supported by the vibration isolation assembly 100 . In this embodiment, a plurality of vertically arranged load-bearing platforms are set inside the large-scale precision equipment, and are integrated and controlled on the vibration isolation assembly 100, and the isolation of precision devices of different dimensions is realized in an integrated manner. On the basis of satisfying the multi-dimensional vibration isolation effect of the equipment, the system can also greatly reduce the input and operation costs, improve the detection efficiency of precision equipment, and solve the problem that the application of existing vibration isolation methods makes the detection process of precision equipment complex and cumbersome. Higher economic and time costs.
其中，精密装备200可为真空罐的结构形式，精密装备200的形状可为类圆柱体状或类长方体状，精密装备200可支撑于地基基础或其他隔振基础之上，与承载平台之间为分离式隔振，避免了精密装备200对内部的振动干扰。Among them, the precision equipment 200 can be in the form of a vacuum tank, the shape of the precision equipment 200 can be similar to a cylinder or a similar cuboid, and the precision equipment 200 can be supported on the foundation or other vibration isolation foundations, and the distance between the precision equipment 200 and the bearing platform It is a separated vibration isolation, which avoids the internal vibration interference of the precision equipment 200.
作为一个可选实施例，隔振组件100包括平铺排布的多个隔振支撑装置101。As an optional embodiment, the vibration isolation assembly 100 includes a plurality of vibration isolation support devices 101 arranged in a flat manner.
在本实施例中，多个隔振支撑装置101平铺排布于精密装备200下方，构成一个支撑平面，第一承载平台300和第二承载平台400由相同的该多个 隔振支撑装置101支撑，保证了第一承载平台300和第二承载平台400振动相位的一致性，从而保证了各自所承载的检测装置的振动相位的一致性。In this embodiment, a plurality of vibration isolation support devices 101 are arranged flatly under the precision equipment 200 to form a support plane, and the first carrying platform 300 and the second carrying platform 400 are supported by the same plurality of vibration isolation support devices 101 , to ensure the consistency of the vibration phases of the first carrying platform 300 and the second carrying platform 400 , thereby ensuring the consistency of the vibration phases of the detection devices carried by them.
结合图2及图3，根据本发明实施例的一个方面，隔振组件100还包括高刚性平台102，高刚性平台102由多个隔振支撑装置101支撑于精密装备200下方，多个隔振支撑装置101沿高刚性平台102的延伸方向排列成至少一排，每排包括一个或多个隔振支撑装置101。2 and 3, according to an aspect of the embodiment of the present invention, the vibration isolation assembly 100 further includes a high-rigidity platform 102, and the high-rigidity platform 102 is supported under the precision equipment 200 by a plurality of vibration isolation support devices 101, and the plurality of vibration isolation support devices 101 The supporting devices 101 are arranged in at least one row along the extending direction of the high-rigidity platform 102 , and each row includes one or more vibration-isolation supporting devices 101 .
在本实施例中，第一承载平台300和第二承载平台400均由高刚性平台102支撑，能够进一步提升振动相位的一致性。多个隔振支撑装置101位于高刚性平台102下方，共同将高刚性平台102支撑在地基或其他基础平台上；多个隔振支撑装置101成排设置，当其中一排或多排隔振支撑装置101包括多个隔振支撑装置101时，相邻排的隔振支撑装置101之间可交错设置，或者对齐设置，或者为其他对应关系，多个隔振支撑装置101整体上可均匀排布，以能够稳定地支撑第一承载平台300和第二承载平台400为原则。In this embodiment, both the first bearing platform 300 and the second bearing platform 400 are supported by the high rigidity platform 102, which can further improve the consistency of the vibration phase. Multiple vibration-isolation support devices 101 are located below the high-rigidity platform 102, and jointly support the high-rigidity platform 102 on the foundation or other foundation platforms; multiple vibration-isolation support devices 101 are arranged in rows, when one or more rows of vibration When the device 101 includes a plurality of vibration isolation support devices 101, adjacent rows of vibration isolation support devices 101 can be arranged alternately, or arranged in alignment, or in other corresponding relationships, and the plurality of vibration isolation support devices 101 can be evenly arranged on the whole , based on the principle of being able to stably support the first carrying platform 300 and the second carrying platform 400 .
其中，高刚性平台102在竖直方向上的投影形状可为长方形、正方形、圆形、椭圆形等多种形状，可根据精密装备200在竖直方向上的投影形状而具体确定，当然还需保证能够平稳地支撑第一承载平台300和第二承载平台400；高刚性平台102可采用板材结构、钢混结构、框架结构等，本身需具备较高的结构稳定性，且应满足本实施例使用场景所需的刚性要求。隔振支撑装置101可采用空气弹簧、钢弹簧、橡胶弹簧等，或者采用气囊、气室等结构形式，或者采用其它能够应用于本实施例使用场景的具备隔振及支撑功能的结构。Among them, the projection shape of the high rigidity platform 102 in the vertical direction can be a variety of shapes such as rectangle, square, circle, ellipse, etc., and can be specifically determined according to the projection shape of the precision equipment 200 in the vertical direction. Ensure that the first load-bearing platform 300 and the second load-bearing platform 400 can be stably supported; the high-rigidity platform 102 can adopt a plate structure, a steel-concrete structure, a frame structure, etc., and itself needs to have high structural stability and should meet the requirements of this embodiment. Use the rigid requirements required by the scene. The vibration isolation support device 101 can adopt air springs, steel springs, rubber springs, etc., or adopt structural forms such as air bags, air chambers, or other structures with vibration isolation and support functions that can be applied to the usage scenarios of this embodiment.
作为一个可选实施例，承载平台包括第一承载平台300及第二承载平台400，第二承载平台400被配置为在竖直方向上位于第一承载平台300上方。As an optional embodiment, the carrying platform includes a first carrying platform 300 and a second carrying platform 400 , and the second carrying platform 400 is configured to be located above the first carrying platform 300 in a vertical direction.
在具体实施中，承载平台细分为相对位于上方的第一承载平台300和相对位于下方的第二承载平台400，本实施例的一体化控制的大型精密装备隔振系统，能够满足大型精密装备内的不同高度的精密器件的隔振要求，实现不 同高度的精密器件的分别隔振。In specific implementation, the bearing platform is subdivided into the first bearing platform 300 located relatively above and the second bearing platform 400 located relatively below. The integrated control vibration isolation system for large-scale precision equipment in this embodiment can meet the needs of large-scale precision equipment. The vibration isolation requirements of precision devices of different heights in the interior are realized, and the vibration isolation of precision devices of different heights is realized separately.
在某种具体应用中，第一承载平台300用于承载精密器件，包括被测精密器件及水平检测装置，水平检测装置能够对第一承载平台300所承载的被测精密器件进行水平检测，第二承载平台400用于承载垂直检测装置，上下设置的第一承载平台300和第二承载平台400，能够同时满足水平微振动隔振和垂直微振动隔振，能够同时使得垂直检测装置对第一承载平台300所承载的被测精密器件进行垂直检测。该种应用能够实现为大型被测精密器件的试验，如光学试验，提供水平和垂直一体化隔振，使得水平检测和垂直检测能够应用同一套隔振设备，有效地降低了地面及精密装备200振动对被测精密器件及检测装置的振动传递率，提高隔振效率，保证了试验的振动环境要求，能够降低试验经济成本和时间成本，且结构简单，易于实现。In a specific application, the first carrying platform 300 is used to carry precision devices, including a precision device under test and a level detection device. The level detection device can perform level detection on the precision device under test carried by the first carrying platform 300 . The second carrying platform 400 is used to carry the vertical detection device. The first carrying platform 300 and the second carrying platform 400 arranged up and down can simultaneously satisfy horizontal micro-vibration isolation and vertical micro-vibration isolation, and can simultaneously make the vertical detection device to the first The precision device under test carried by the carrying platform 300 is vertically detected. This kind of application can realize the test of large precision devices under test, such as optical test, providing horizontal and vertical integrated vibration isolation, so that the same set of vibration isolation equipment can be used for horizontal detection and vertical detection, effectively reducing the ground and precision equipment by 200 The vibration transmission rate of the vibration to the precision device under test and the detection device improves the vibration isolation efficiency, ensures the vibration environment requirements of the test, can reduce the economic cost and time cost of the test, and has a simple structure and is easy to implement.
在本实施例中，第一承载平台300和第二承载平台400由同一隔振组件100支撑，保证了第一承载平台300和第二承载平台400振动相位的一致性，从而保证了各自所承载的精密器件的振动相位的一致性，在提高检测效率的基础上，还能够保证检测的准确性。In this embodiment, the first bearing platform 300 and the second bearing platform 400 are supported by the same vibration isolation assembly 100, which ensures the consistency of the vibration phases of the first bearing platform 300 and the second bearing platform 400, thereby ensuring the The consistency of the vibration phase of the precision device can not only improve the detection efficiency, but also ensure the accuracy of the detection.
可选地，在竖直方向上，第二承载平台400可与第一承载平台300的中部对齐，便于检测设备在第二承载平台400上的架设。同时，第二承载平台400位于第一承载平台300上方，第二承载平台400距离第一承载平台300的高度应保证足够在第一承载平台300上放置精密器件。Optionally, in the vertical direction, the second carrying platform 400 can be aligned with the middle of the first carrying platform 300 , so as to facilitate erection of testing equipment on the second carrying platform 400 . At the same time, the second carrying platform 400 is located above the first carrying platform 300 , and the height of the second carrying platform 400 from the first carrying platform 300 should be sufficient to place precision devices on the first carrying platform 300 .
作为一个可选实施例，第二承载平台400的数量为多个，多个第二承载平台400在竖直方向上依次层叠设置；第一承载平台300的数量为多个，多个第一承载平台300在水平方向上平铺设置。As an optional embodiment, the number of the second carrying platform 400 is multiple, and the multiple second carrying platforms 400 are stacked successively in the vertical direction; the number of the first carrying platform 300 is multiple, and the multiple first carrying platforms The platforms 300 are arranged in tiles in the horizontal direction.
在本实施例中，第二承载平台400的数量可为多个，多个第二承载平台400可在竖直方向上依次层叠，且可为对齐层叠或错位层叠，第一承载平台300的数量也可为多个，多个第一承载平台300可在水平方向上平铺，且可为对齐平铺或错位平铺，多个第二承载平台400及多个第一承载平台300可根据大型精密装备的不同内部部件的隔振需求及分布情况而具体排布，全部的 第二承载平台400及第一承载平台300相互连接，一体化受控于隔振组件100，实现全部承载平台的一体化振动控制。In this embodiment, the number of the second carrying platforms 400 can be multiple, and the multiple second carrying platforms 400 can be stacked in sequence in the vertical direction, and can be stacked in alignment or misaligned. The number of the first carrying platforms 300 It can also be multiple, and multiple first carrying platforms 300 can be tiled in the horizontal direction, and can be aligned or dislocated. Multiple second carrying platforms 400 and multiple first carrying platforms 300 can be arranged according to the large The vibration isolation requirements and distribution of different internal components of precision equipment are arranged in detail. All the second bearing platform 400 and the first bearing platform 300 are connected to each other, and the integration is controlled by the vibration isolation component 100 to realize the integration of all bearing platforms. optimized vibration control.
作为一个可选实施例，第一承载平台300通过贯穿精密装备200壁的多个第一支撑件500与隔振组件100连接，并且，第一支撑件500由精密装备200上的通孔贯穿精密装备200壁，第一支撑件500与通孔之间设置有柔性密封件700。As an optional embodiment, the first carrying platform 300 is connected to the vibration isolation assembly 100 through a plurality of first supports 500 penetrating the wall of the precision equipment 200 , and the first supports 500 penetrate the precision equipment 200 through holes on the precision equipment 200 . Equipped with 200 walls, a flexible seal 700 is provided between the first support 500 and the through hole.
本实施例的柔性密封件700用于密封通孔，同时使得第一支撑件500与精密装备200之间为软接触，大幅降低精密装备200及外界的振动对第一承载平台300的影响，进而降低对检测的影响。当第一承载平台300的数量为多个时，多个第一承载平台300均由第一支撑件500支撑。The flexible sealing member 700 of this embodiment is used to seal the through hole, and at the same time makes the first support member 500 and the precision equipment 200 be in soft contact, greatly reducing the impact of the precision equipment 200 and external vibration on the first bearing platform 300, and further Reduce the impact on detection. When there are multiple first carrying platforms 300 , the multiple first carrying platforms 300 are all supported by the first supporting member 500 .
可选地，柔性密封件700为波纹管，连接方式可选为焊接，具备一定的变形能力，能够有效地起到隔振作用，同时能够保证第一支撑件500与精密装备200之间的密封，维持精密装备200内的真空度及温度；柔性密封件700还可为其他能够起到柔性连接和密封作用的构件，如大挠度波纹管、橡胶管、橡胶密封圈、膜式减振结构等。Optionally, the flexible sealing member 700 is a bellows, and the connection method can be welding, which has a certain deformation ability, can effectively play a role of vibration isolation, and can ensure the sealing between the first support member 500 and the precision equipment 200 , to maintain the vacuum degree and temperature in the precision equipment 200; the flexible seal 700 can also be other components capable of flexible connection and sealing, such as large deflection bellows, rubber tubes, rubber sealing rings, membrane damping structures, etc. .
作为一个可选实施例，第一支撑件500的第一端与隔振组件100连接，第一支撑件500的第二端贯穿精密装备200的底壁延伸至精密装备200内部底部而与第一承载平台300连接。As an optional embodiment, the first end of the first support 500 is connected to the vibration isolation assembly 100, and the second end of the first support 500 extends through the bottom wall of the precision equipment 200 to the inner bottom of the precision equipment 200 to connect with the first The bearing platform 300 is connected.
本实施例的第一支撑件500可由精密装备200的底壁伸入精密装备200内部，在精密装备200内部底部将第一承载平台300支撑；第一支撑件500整体可呈直线状延伸，也可为由多段依次连接而形成的折线状，优选地，贯穿精密装备200的底壁的一段为直线状。The first support 500 in this embodiment can extend into the interior of the precision equipment 200 from the bottom wall of the precision equipment 200, and support the first carrying platform 300 at the bottom inside the precision equipment 200; the first support 500 can extend in a straight line as a whole, or It may be in the shape of a broken line formed by sequentially connecting multiple sections. Preferably, a section passing through the bottom wall of the precision equipment 200 is in the shape of a straight line.
作为一个可选实施例，多个第一支撑件500的第二端沿第一承载平台300的延伸方向排列成至少一排，每排的第一支撑件500的第二端的数量为一个或多个。As an optional embodiment, the second ends of the plurality of first supports 500 are arranged in at least one row along the extension direction of the first carrying platform 300, and the number of second ends of the first supports 500 in each row is one or more indivual.
本实施例的多个第一支撑件500的第二端成排设置，当其中一排或多排 包括多个第一支撑件500的第二端时，相邻排的第一支撑件500的第二端之间可交错设置，或者对齐设置，或者为其他对应关系，应保证能够稳定地支撑第一承载平台300。The second ends of the plurality of first supports 500 in this embodiment are arranged in a row, and when one or more rows include the second ends of the plurality of first supports 500, the first supports 500 of adjacent rows The second ends can be arranged in a staggered manner, or arranged in alignment, or in other corresponding relationships, and it should be ensured that the first bearing platform 300 can be stably supported.
作为一个可选实施例，第二承载平台400通过贯穿精密装备200壁的多个第二支撑件600与隔振组件100连接，第二支撑件600由精密装备200上的通孔贯穿精密装备200壁，第二支撑件600与通孔之间设置有柔性密封件700。As an optional embodiment, the second carrying platform 400 is connected to the vibration isolation assembly 100 through a plurality of second supports 600 penetrating through the wall of the precision equipment 200, and the second supports 600 penetrate the precision equipment 200 through the through holes on the precision equipment 200 A flexible sealing member 700 is provided between the wall, the second supporting member 600 and the through hole.
在本实施例中，同样地，柔性密封件700用于密封通孔，同时使得第二支撑件600与精密装备200之间为软接触，大幅降低精密装备200及外界的振动对第二承载平台400的影响，进而降低对检测的影响。当第二承载平台400的数量为多个时，多个第二承载平台400均由第二支撑件600支撑。In this embodiment, similarly, the flexible sealing member 700 is used to seal the through hole, and at the same time makes soft contact between the second support member 600 and the precision equipment 200, greatly reducing the vibration of the precision equipment 200 and the outside world on the second bearing platform. 400, thereby reducing the impact on detection. When there are multiple second carrying platforms 400 , the multiple second carrying platforms 400 are all supported by the second support member 600 .
作为一个可选实施例，第二支撑件600的第一端与隔振组件100连接，第二支撑件600的第二端贯穿精密装备200的侧壁延伸至精密装备200内部上部而与第二承载平台400连接。As an optional embodiment, the first end of the second support 600 is connected to the vibration isolation assembly 100, and the second end of the second support 600 extends through the side wall of the precision equipment 200 to the upper part of the precision equipment 200 and is connected to the second The bearer platform 400 is connected.
本实施例的第二支撑件600可由精密装备200的侧壁伸入精密装备200内部，在精密装备200内部上部将第二承载平台400支撑。The second supporting member 600 of this embodiment can extend into the interior of the precision equipment 200 from the side wall of the precision equipment 200 , and support the second carrying platform 400 at the upper part of the interior of the precision equipment 200 .
其中，第二支撑件600可为曲线状、折线状或其他形状，可与精密装备200的侧壁轮廓相契合，在精密装备200的外部向上延伸，由精密装备200的上部侧壁伸入精密装备200内部。Wherein, the second supporting member 600 can be in the shape of a curve, a broken line or other shapes, which can fit the contour of the side wall of the precision equipment 200, extend upwards from the outside of the precision equipment 200, and extend into the precision equipment from the upper side wall of the precision equipment 200. Equip 200 interior.
并且，沿精密装备200的长度方向观察，多个第二支撑件600可对称布置于精密装备200的两侧，包括数量均匀和位置均匀，以能够更加稳定地支撑第二承载平台400。Moreover, viewed along the length direction of the precision equipment 200 , a plurality of second support members 600 can be symmetrically arranged on both sides of the precision equipment 200 , including uniform number and position, so as to support the second carrying platform 400 more stably.
作为一个可选实施例，第二承载平台400通过设置于精密装备200内的多个第二支撑件600与第一承载平台300连接。As an optional embodiment, the second carrying platform 400 is connected to the first carrying platform 300 through a plurality of second supports 600 disposed in the precision equipment 200 .
在本实施例中，第二支撑件600可设置于精密装备200内，将第二承载 平台400与第一承载平台300连接，使得第二承载平台400被支撑于第一承载平台300上方。In this embodiment, the second supporting member 600 can be arranged in the precision equipment 200 to connect the second carrying platform 400 with the first carrying platform 300 so that the second carrying platform 400 is supported above the first carrying platform 300 .
作为一个可选实施例，第二支撑件600的第一端与第一承载平台300连接，第二支撑件600的第二端延伸至精密装备200上部而与第二承载平台400连接。As an optional embodiment, the first end of the second support 600 is connected to the first carrying platform 300 , and the second end of the second support 600 extends to the upper part of the precision equipment 200 to connect to the second carrying platform 400 .
本实施例的第二支撑件600可在精密装备200内向上延伸，在精密装备200内部上部将第二承载平台400支撑。The second supporting member 600 in this embodiment may extend upwards inside the precision equipment 200 , and support the second carrying platform 400 on the upper part inside the precision equipment 200 .
其中，第二支撑件600可为曲线状、折线状或其他形状，可与精密装备200的侧壁内侧轮廓相契合，在精密装备200的内部向上延伸至精密装备200的上部。Wherein, the second support member 600 can be curved, broken line or other shapes, can match the inner contour of the side wall of the precision equipment 200 , and extend upwards to the upper part of the precision equipment 200 inside the precision equipment 200 .
作为一个可选实施例，第二承载平台400通过设置于精密装备200内的、贯穿第一承载平台300的多个第二支撑件600与隔振组件100连接。As an optional embodiment, the second carrying platform 400 is connected to the vibration isolation assembly 100 through a plurality of second support members 600 disposed in the precision equipment 200 and penetrating through the first carrying platform 300 .
可以理解，第二支撑件600的第一端与隔振组件100连接时，第二支撑件600的第二端可贯穿精密装备200的底壁延伸至精密装备200内部上部而与第二承载平台400连接，如果需要，如考虑到第二支撑件600架设的便利性，或受限于第一承载平台300与精密装备200的尺寸关系，第二支撑件600的第二端可同时贯穿第一承载平台300而与第二承载平台400连接，第一承载平台300上对应设置有用于供第二支撑件600穿过的通孔。It can be understood that when the first end of the second support 600 is connected to the vibration isolation assembly 100, the second end of the second support 600 can extend through the bottom wall of the precision equipment 200 to the upper part of the precision equipment 200 to connect with the second carrying platform. 400 connection, if necessary, the second end of the second support 600 can pass through the first The carrying platform 300 is connected to the second carrying platform 400 , and the first carrying platform 300 is correspondingly provided with a through hole for the second supporting member 600 to pass through.
作为一个可选实施例，多个第二支撑件600的第二端沿第二承载平台400的周向环绕第二承载平台400设置。As an optional embodiment, the second ends of the plurality of second supports 600 are arranged around the second carrying platform 400 along the circumferential direction of the second carrying platform 400 .
本实施例的多个第二支撑件600的第二端可在精密装备200内沿第二承载平台400的周向均匀布置，以能够更加稳定地支撑第二承载平台400。The second ends of the plurality of second support members 600 in this embodiment may be evenly arranged along the circumference of the second carrying platform 400 in the precision equipment 200 to support the second carrying platform 400 more stably.
作为一个可选实施例，多个第二支撑件600通过环状的定位件401与第二承载平台400连接，第二承载平台400通过多个连接件402设置于定位件401中部，如图7所示。As an optional embodiment, a plurality of second support members 600 are connected to the second carrying platform 400 through ring-shaped positioning members 401, and the second carrying platform 400 is arranged in the middle of the positioning member 401 through a plurality of connecting members 402, as shown in Figure 7 shown.
在本实施例中，定位件401的设置，使得第二承载平台400与多个第二 支撑件600的连接更加方便，也使得第二承载平台400的位置更加稳定。其中，多个连接件402可沿定位件401的周向均匀分布，使得定位件401稳定地承载第二承载平台400。In this embodiment, the setting of the positioning member 401 makes the connection between the second carrying platform 400 and a plurality of second support members 600 more convenient, and also makes the position of the second carrying platform 400 more stable. Wherein, a plurality of connecting parts 402 may be evenly distributed along the circumferential direction of the positioning part 401 , so that the positioning part 401 can stably carry the second carrying platform 400 .
对于定位件401的设置情况进行如下说明：当第二承载平台400通过由外向内贯穿精密装备200壁的多个第二支撑件600与高刚性平台102连接时，定位件401设置于精密装备200内部上部，多个第二支撑件600的第二端在精密装备200的外部向上延伸至精密装备200上部，贯穿精密装备200壁而延伸至精密装备200内部，在精密装备200内部上部而与定位件401连接，第二承载平台400通过多个连接件402设置于定位件401中部，从而第二承载平台400通过多个第二支撑件600被支撑于高刚性平台102上；当第二承载平台400通过设置于精密装备200内的多个第二支撑件600与第一承载平台300连接时，如图4所示，或贯穿第一承载平台300而与高刚性平台102连接时，如图5所示，定位件401设置于精密装备200内部上部，多个第二支撑件600的第二端延伸至精密装备200内部上部而与定位件401连接，第二承载平台400通过连接件402设置于定位件401的中部，从而第二承载平台400通过多个第二支撑件600被支撑于第一承载平台300上，或高刚性平台102上。The setting of the positioning member 401 is described as follows: when the second carrying platform 400 is connected to the high rigidity platform 102 through a plurality of second supports 600 penetrating the wall of the precision equipment 200 from outside to inside, the positioning member 401 is set on the precision equipment 200 In the upper part, the second ends of the plurality of second support members 600 extend upwards to the upper part of the precision equipment 200 outside the precision equipment 200, penetrate through the wall of the precision equipment 200 and extend to the interior of the precision equipment 200, and are positioned in the upper part of the precision equipment 200 401, the second carrying platform 400 is arranged in the middle of the positioning member 401 through a plurality of connecting pieces 402, so that the second carrying platform 400 is supported on the high rigidity platform 102 through a plurality of second supporting members 600; when the second carrying platform 400 is connected to the first carrying platform 300 through a plurality of second supports 600 arranged in the precision equipment 200, as shown in FIG. As shown, the positioning part 401 is arranged on the upper part of the precision equipment 200, and the second ends of the plurality of second supports 600 extend to the upper part of the precision equipment 200 to connect with the positioning part 401, and the second carrying platform 400 is arranged on the The middle part of the positioning member 401 , so that the second carrying platform 400 is supported on the first carrying platform 300 or the high-rigidity platform 102 through a plurality of second support members 600 .
作为一个可选实施例，多个第二支撑件600中，一部分第二支撑件600靠近第一承载平台300的一侧，另一部分第二支撑件600靠近第一承载平台300的另一侧；靠近第一承载平台300同一侧的第二支撑件600中，相邻第二支撑件600之间设置有斜撑件601。As an optional embodiment, among the plurality of second supports 600, a part of the second supports 600 is close to one side of the first carrying platform 300, and another part of the second supports 600 is close to the other side of the first carrying platform 300; Among the second support members 600 close to the same side of the first carrying platform 300 , diagonal braces 601 are arranged between adjacent second support members 600 .
在本实施例中，相邻第二支撑件600之间可设置有斜撑件601，以提高全部第二支撑件600的整体刚性。In this embodiment, diagonal braces 601 may be provided between adjacent second supports 600 to improve the overall rigidity of all second supports 600 .
进一步地，当多个第二支撑件600环绕第一承载平台300设置时，尤其地，当多个第二支撑件600的第一端环绕第一承载平台300设置时，相邻第二支撑件600之间也设置有斜撑件601。Further, when a plurality of second supports 600 are arranged around the first carrying platform 300, especially, when the first ends of the plurality of second supports 600 are arranged around the first carrying platform 300, the adjacent second supports Diagonal braces 601 are also arranged between 600 .
结合图6，作为一个可选实施例，第一承载平台300的结构形式为不锈钢框架结构，空间桁架结构，网架结构，或者蜂窝板结构，或者采用其他的高刚性的结构形式，可具有斜撑构件以提高整体刚性。Referring to Fig. 6, as an optional embodiment, the structural form of the first bearing platform 300 is a stainless steel frame structure, a space truss structure, a network frame structure, or a honeycomb structure, or other high rigid structural forms, which may have inclined Bracing members to increase overall rigidity.
作为一个可选实施例，第二承载平台400的形状为圆形或者多边形，结构形式为不锈钢框架结构，网架结构，或者夹心结构，者采用其他的高刚性的结构形式。同时，预留有检测设备，如平行光管，的安装接口403，还可预留有用于安装、维修的通道，如图7所示；当第二承载平台400为夹心结构时，上下两层可为不锈钢钢板404或穿孔板，预留有安装螺栓孔，中间可为不锈钢框架405，如图8所示。As an optional embodiment, the shape of the second bearing platform 400 is circular or polygonal, and its structure is a stainless steel frame structure, grid structure, or sandwich structure, or other highly rigid structure forms. At the same time, an installation interface 403 for detection equipment, such as a collimator, can also be reserved for installation and maintenance, as shown in Figure 7; when the second carrying platform 400 is a sandwich structure, the upper and lower layers It can be a stainless steel plate 404 or a perforated plate, with mounting bolt holes reserved, and a stainless steel frame 405 in the middle, as shown in FIG. 8 .
作为一个可选实施例，第一支撑件500和第二支撑件600均可为支撑立柱、混凝土框架结构的结构形式。第一承载平台300和第二承载平台400，第一支撑件500和第二支撑件600，均选用高刚性构件制成，如上述的不锈钢钢板、穿孔板、不锈钢框架，以及不锈钢立柱等，整体形成高刚性结构，降低振动放大率。其中，第一承载平台300和第二承载平台400设计时均需考虑平台的整体刚性，可参考地，整体刚性要求可大于14Hz。As an optional embodiment, both the first supporting member 500 and the second supporting member 600 may be in the form of supporting columns or concrete frame structures. The first bearing platform 300 and the second bearing platform 400, the first support member 500 and the second support member 600 are all made of high-rigidity components, such as the above-mentioned stainless steel plate, perforated plate, stainless steel frame, and stainless steel column, etc. Form a highly rigid structure and reduce vibration amplification. Wherein, the overall rigidity of the platform needs to be taken into consideration when designing the first bearing platform 300 and the second bearing platform 400 . For reference, the overall rigidity requirement can be greater than 14 Hz.
并且，考虑到更有效地隔振，第一支撑件500与第一承载平台300之间为刚性连接，第二支撑件600与第二承载平台400之间也为刚性连接。Moreover, in consideration of more effective vibration isolation, the first support 500 is rigidly connected to the first carrying platform 300 , and the second support 600 is also rigidly connected to the second carrying platform 400 .
本领域内的技术人员应明白，以上所述，仅为本发明的具体实施方式，但本发明的保护范围并不局限于此。显然，本领域的技术人员可以对本申请进行各种改动和变型而不脱离本申请的精神和范围。这样，倘若本申请的这些修改和变型属于本申请权利要求及其等同技术的范围之内，则本申请也意图包含这些改动和变型在内。Those skilled in the art should understand that the above description is only a specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Obviously, those skilled in the art can make various changes and modifications to the application without departing from the spirit and scope of the application. In this way, if these modifications and variations of the present application fall within the scope of the claims of the present application and their equivalent technologies, the present application is also intended to include these modifications and variations.

Claims (17)

  1. 一种一体化控制的大型精密装备隔振系统，其特征在于，包括：An integrated control large-scale precision equipment vibration isolation system is characterized in that it includes:
    隔振组件，所述隔振组件设置于精密装备下方；A vibration isolation component, the vibration isolation component is arranged under the precision equipment;
    承载平台，所述承载平台为多个，多个所述承载平台在精密装备内竖向排布，且各个所述承载平台均由所述隔振组件支撑。There are multiple bearing platforms, the multiple bearing platforms are vertically arranged in the precision equipment, and each of the bearing platforms is supported by the vibration isolation component.
  2. 根据权利要求1所述的一体化控制的大型精密装备隔振系统，其特征在于，所述隔振组件包括平铺排布的多个隔振支撑装置。The integrated control vibration isolation system for large-scale precision equipment according to claim 1, wherein the vibration isolation assembly includes a plurality of vibration isolation support devices arranged in a flat manner.
  3. 根据权利要求2所述的一体化控制的大型精密装备隔振系统，其特征在于，所述隔振组件还包括高刚性平台，所述高刚性平台由所述多个隔振支撑装置支撑于精密装备下方，所述多个隔振支撑装置沿所述高刚性平台的延伸方向排列成至少一排，每排包括一个或多个隔振支撑装置。The vibration isolation system for large precision equipment with integrated control according to claim 2, characterized in that, the vibration isolation assembly further includes a high rigidity platform, and the high rigidity platform is supported by the plurality of vibration isolation support devices on the precision Below the equipment, the multiple vibration-isolation support devices are arranged in at least one row along the extension direction of the high-rigidity platform, and each row includes one or more vibration-isolation support devices.
  4. 根据权利要求1所述的一体化控制的大型精密装备隔振系统，其特征在于，所述承载平台包括第一承载平台及第二承载平台，所述第二承载平台被配置为在竖直方向上位于所述第一承载平台上方。The vibration isolation system for large-scale precision equipment with integrated control according to claim 1, wherein the bearing platform includes a first bearing platform and a second bearing platform, and the second bearing platform is configured to be vertically is located above the first carrying platform.
  5. 根据权利要求4所述的一体化控制的大型精密装备隔振系统，其特征在于，所述第二承载平台的数量为多个，多个所述第二承载平台在竖直方向上依次层叠设置。The vibration isolation system for large-scale precision equipment with integrated control according to claim 4, characterized in that there are multiple second bearing platforms, and multiple second bearing platforms are stacked one after another in the vertical direction .
  6. 根据权利要求4或5所述的一体化控制的大型精密装备隔振系统，其特征在于，所述第一承载平台的数量为多个，多个所述第一承载平台在水平方向上平铺设置。According to claim 4 or 5, the integrated control vibration isolation system for large-scale precision equipment is characterized in that there are multiple first bearing platforms, and multiple first bearing platforms are tiled in the horizontal direction set up.
  7. 根据权利要求4所述的一体化控制的大型精密装备隔振系统，其特征在于，所述第一承载平台通过贯穿精密装备壁的多个第一支撑件与所述隔振组件连接，所述第二承载平台通过贯穿精密装备壁的多个第二支撑件与所述隔振组件连接。The vibration isolation system for large-scale precision equipment with integrated control according to claim 4, wherein the first bearing platform is connected to the vibration isolation assembly through a plurality of first supports penetrating through the wall of the precision equipment, and the The second bearing platform is connected with the vibration isolation assembly through a plurality of second supports penetrating through the wall of the precision equipment.
  8. 根据权利要求7所述的一体化控制的大型精密装备隔振系统，其特征在于，所述第一支撑件及所述第二支撑件均由精密装备上的通孔贯穿精密装 备壁，所述第一支撑件及所述第二支撑件与所述通孔之间均设置有柔性密封件。The vibration isolation system for large-scale precision equipment with integrated control according to claim 7, characterized in that, both the first support and the second support pass through the wall of the precision equipment through holes on the precision equipment, and the A flexible seal is provided between the first support, the second support and the through hole.
  9. 根据权利要求7所述的一体化控制的大型精密装备隔振系统，其特征在于，所述第一支撑件的第一端与所述隔振组件连接，所述第一支撑件的第二端贯穿精密装备的底壁延伸至精密装备内部底部而与所述第一承载平台连接。The integrated control vibration isolation system for large-scale precision equipment according to claim 7, wherein the first end of the first support is connected to the vibration isolation assembly, and the second end of the first support is The bottom wall penetrating through the precision equipment extends to the inner bottom of the precision equipment to connect with the first bearing platform.
  10. 根据权利要求9所述的一体化控制的大型精密装备隔振系统，其特征在于，所述多个第一支撑件的第二端沿所述第一承载平台的延伸方向排列成至少一排，每排的第一支撑件的第二端的数量为一个或多个。The integrated control vibration isolation system for large-scale precision equipment according to claim 9, wherein the second ends of the plurality of first supports are arranged in at least one row along the extension direction of the first bearing platform, The number of the second ends of the first support members in each row is one or more.
  11. 根据权利要求7所述的一体化控制的大型精密装备隔振系统，其特征在于，所述第二支撑件的第一端与所述隔振组件连接，所述第二支撑件的第二端贯穿精密装备的侧壁延伸至精密装备内部上部而与所述第二承载平台连接。The integrated control vibration isolation system for large precision equipment according to claim 7, wherein the first end of the second support is connected to the vibration isolation assembly, and the second end of the second support is The side wall penetrating the precision equipment extends to the inner upper part of the precision equipment and is connected with the second carrying platform.
  12. 根据权利要求4所述的一体化控制的大型精密装备隔振系统，其特征在于，所述第二承载平台通过设置于精密装备内的多个第二支撑件与所述第一承载平台连接。The vibration isolation system for large-scale precision equipment with integrated control according to claim 4, wherein the second bearing platform is connected to the first bearing platform through a plurality of second supports arranged in the precision equipment.
  13. 根据权利要求12所述的一体化控制的大型精密装备隔振系统，其特征在于，所述第二支撑件的第一端与所述第一承载平台连接，所述第二支撑件的第二端延伸至精密装备上部而与所述第二承载平台连接。The integrated control vibration isolation system for large precision equipment according to claim 12, wherein the first end of the second support is connected to the first bearing platform, and the second end of the second support is The end extends to the upper part of the precision equipment and is connected with the second carrying platform.
  14. 根据权利要求4所述的一体化控制的大型精密装备隔振系统，其特征在于，所述第二承载平台通过设置于精密装备内的、贯穿所述第一承载平台的多个第二支撑件与所述隔振组件连接。The vibration isolation system for large-scale precision equipment with integrated control according to claim 4, characterized in that, the second carrying platform passes through a plurality of second supports arranged in the precision equipment and penetrating through the first carrying platform Connect with the vibration isolation assembly.
  15. 根据权利要求11或13所述的一体化控制的大型精密装备隔振系统，其特征在于，所述多个第二支撑件的第二端沿所述第二承载平台的周向环绕所述第二承载平台设置。The vibration isolation system for large-scale precision equipment with integrated control according to claim 11 or 13, characterized in that, the second ends of the plurality of second supports surround the first bearing platform along the circumference of the second bearing platform 2. Hosting platform settings.
  16. 根据权利要求7、12或14所述的一体化控制的大型精密装备隔振系统，其特征在于，所述多个第二支撑件通过环状的定位件与所述第二承载平 台连接，所述第二承载平台通过多个连接件设置于所述定位件中部。According to claim 7, 12 or 14, the integrated control vibration isolation system for large-scale precision equipment is characterized in that, the plurality of second supports are connected to the second bearing platform through ring-shaped positioning members, so The second carrying platform is arranged in the middle of the positioning part through a plurality of connecting parts.
  17. 根据权利要求7、12或14所述的一体化控制的大型精密装备隔振系统，其特征在于，所述多个第二支撑件中，一部分第二支撑件靠近所述第一承载平台的一侧，另一部分第二支撑件靠近所述第一承载平台的另一侧；According to claim 7, 12 or 14, the integrated control vibration isolation system for large-scale precision equipment is characterized in that, among the plurality of second supports, a part of the second supports is close to one of the first bearing platforms. side, another part of the second support is close to the other side of the first carrying platform;
    靠近所述第一承载平台同一侧的第二支撑件中，相邻第二支撑件之间设置有斜撑件。Among the second support members close to the same side of the first carrying platform, diagonal braces are arranged between adjacent second support members.
PCT/CN2021/102175 2021-06-18 2021-06-24 Integrally-controlled vibration isolation system for large precision equipment WO2022262006A1 (en)

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JPH09177872A (en) * 1995-12-21 1997-07-11 Ohbayashi Corp Precise vibration isolation device
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CN105240452A (en) * 2015-09-29 2016-01-13 北京控制工程研究所 Local bearing type active vibration isolation device capable of being applied to ultrahigh vacuum system
CN106402261A (en) * 2016-08-08 2017-02-15 中国电子工程设计院 Penetration type micro-vibration air spring vibration isolation system
CN107917311A (en) * 2017-11-21 2018-04-17 北京空间机电研究所 A kind of precise vibration isolation device applied to large-scale vacuum environment simulator
CN111810581A (en) * 2020-05-27 2020-10-23 厦门大学 Large-scale precision vibration isolation platform based on air spring

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09177872A (en) * 1995-12-21 1997-07-11 Ohbayashi Corp Precise vibration isolation device
CN104267756A (en) * 2014-09-19 2015-01-07 中国电子工程设计院 Horizontal overlength precision equipment micro-vibration control system
CN105240452A (en) * 2015-09-29 2016-01-13 北京控制工程研究所 Local bearing type active vibration isolation device capable of being applied to ultrahigh vacuum system
CN106402261A (en) * 2016-08-08 2017-02-15 中国电子工程设计院 Penetration type micro-vibration air spring vibration isolation system
CN107917311A (en) * 2017-11-21 2018-04-17 北京空间机电研究所 A kind of precise vibration isolation device applied to large-scale vacuum environment simulator
CN111810581A (en) * 2020-05-27 2020-10-23 厦门大学 Large-scale precision vibration isolation platform based on air spring

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