CN217873962U - Vibration isolation system of integrally controlled large-scale precision equipment - Google Patents

Abstract

The utility model discloses a vibration isolation system is equipped to large-scale precision of integrated control relates to large-scale precision and equips vibration isolation technical field, including vibration isolation subassembly and load-bearing platform, the vibration isolation subassembly sets up in the precision equipment below, and load-bearing platform is a plurality of, and a plurality of load-bearing platform are vertical arranging in the precision equipment, and each load-bearing platform supports by the vibration isolation subassembly. The utility model discloses a vibration isolation system is equipped to large-scale precision of integration control is equipped inside a plurality of vertical load-bearing platform who arranges that have set up at large-scale precision to on the integration is controlled by the vibration isolation subassembly, realize the vibration isolation to the precision device of different dimensions through the mode of integration, solved the problem of puzzlement industry of a specified duration, this system can also reduce input and running cost by a wide margin on the basis that satisfies equipment multidimension degree vibration isolation effect, improves precision and equips detection efficiency.

Description

Integrally controlled vibration isolation system for large-scale precision equipment

Technical Field

The utility model relates to a large-scale precision equipment vibration isolation technical field especially relates to a vibration isolation system is equipped to large-scale precision of integrated control.

Background

For large-scale precision equipment, such as optical precision equipment applied to space load optical detection tests, the whole or a plurality of precision devices in the equipment may need vibration isolation, and a precision equipment vibration isolation system matched with the equipment becomes an important environmental protection technology for precision production, processing, tests and other works.

The existing vibration isolation system matched with large-scale precision equipment mainly adopts separated vibration isolation, namely the precision equipment is placed on a ground foundation, and the vibration isolation system only performs vibration isolation on components requiring vibration internally. The separated vibration isolation can not meet the requirement of multi-dimensional vibration isolation in the precision equipment, so that the input and operation cost of a large-scale precision equipment vibration isolation system is extremely high, and even the work of precision production, processing, testing and the like of equipment can not be met.

SUMMERY OF THE UTILITY MODEL

An embodiment of the utility model provides a vibration isolation system is equipped to large-scale precision of integrated control to solve large-scale precision and equip the problem that can't satisfy multidimension degree vibration isolation requirement of using current vibration isolation mode.

The embodiment of the utility model provides an integrally controlled vibration isolation system for large-scale precision equipment, which comprises a vibration isolation assembly and a bearing platform; the vibration isolation assembly is arranged below the precision equipment; bearing platform is a plurality of, and a plurality of bearing platform are vertical in the precision equipment arranges, and each bearing platform supports by the vibration isolation subassembly.

According to the utility model discloses an aspect, the vibration isolation subassembly is including a plurality of vibration isolation strutting arrangement that the tiling was arranged.

According to an aspect of the embodiment of the utility model, the vibration isolation subassembly still includes high rigidity platform, and high rigidity platform is supported in the precision below of equipping by a plurality of vibration isolation strutting arrangement, and a plurality of vibration isolation strutting arrangement arrange into one row at least along the extending direction of high rigidity platform, and every row includes one or more vibration isolation strutting arrangement.

According to an aspect of the embodiment of the utility model, load-bearing platform includes first load-bearing platform and second load-bearing platform, and second load-bearing platform is configured to be located first load-bearing platform top in vertical direction.

According to the utility model discloses an aspect, second load-bearing platform's quantity is a plurality of, and a plurality of second load-bearing platform stack gradually the setting in vertical direction.

According to the utility model discloses an aspect, first load-bearing platform's quantity is a plurality of, and a plurality of first load-bearing platform tile setting on the horizontal direction.

According to the utility model discloses an aspect of embodiment, first load-bearing platform is connected with the vibration isolation subassembly through a plurality of first support piece that run through the precision equipment wall, and second load-bearing platform is connected with the vibration isolation subassembly through a plurality of second support piece that run through the precision equipment wall.

According to the utility model discloses an aspect, first support piece and second support piece all are provided with flexible sealing member between first support piece and second support piece and the through-hole and run through the precision and equip the wall by the through-hole on the precision equipment.

According to the utility model discloses an aspect, the first end and the vibration isolation component of first support piece are connected, and the diapire that the second end of first support piece runs through precision equipment extends to the precision and equips inside bottom and be connected with first load-bearing platform.

According to an aspect of the embodiments of the present invention, the second ends of the plurality of first supporting members are arranged in at least one row along the extending direction of the first carrying platform, and the number of the second ends of the first supporting members in each row is one or more.

According to the utility model discloses an aspect, second support piece's first end is connected with the vibration isolation subassembly, and second support piece's second end runs through the lateral wall that precision equipment and extends to the inside upper portion of precision equipment and be connected with second load-bearing platform.

According to the utility model discloses an aspect, second load-bearing platform is connected with first load-bearing platform through setting up a plurality of second support piece in the precision equipment.

According to an aspect of the embodiment of the present invention, the first end of the second supporting member is connected to the first bearing platform, and the second end of the second supporting member extends to the upper portion of the precision equipment and is connected to the second bearing platform.

According to the utility model discloses an aspect, second load-bearing platform is connected with the vibration isolation subassembly through set up in the precision is equipped, run through a plurality of second support piece of first load-bearing platform.

According to an aspect of the embodiment of the present invention, the second ends of the plurality of second supporting members are disposed around the second carrying platform along the circumference of the second carrying platform.

According to the utility model discloses an aspect of embodiment, a plurality of second support piece are connected with second load-bearing platform through annular setting element, and second load-bearing platform sets up in the setting element middle part through a plurality of connecting pieces.

According to an aspect of the embodiments of the present invention, among the plurality of second supporting members, a part of the second supporting members is close to one side of the first carrying platform, and another part of the second supporting members is close to the other side of the first carrying platform; and oblique supporting pieces are arranged between the adjacent second supporting pieces in the second supporting pieces close to the same side of the first bearing platform.

The embodiment of the utility model provides a vibration isolation system is equipped to large-scale precision of integrated control, the inside load-bearing platform who has set up a plurality of vertical arrangements of large-scale precision equipment, and the integration is controlled by on the vibration isolation subassembly, the mode through the integration realizes the vibration isolation to the precision device of the inside not unidimensional degree of precision equipment, the problem of taking the unable inside multidimensional degree vibration isolation requirement of satisfying precision equipment of separated vibration isolation mode puzzlement industry thoughtlessly of a specified duration has been solved, this system is on the basis of satisfying equipment multidimensional degree vibration isolation effect, can also reduce input and running cost by a wide margin, improve precision equipment detection efficiency, the field has high spreading value in precision equipment.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required to be used in the embodiments of the present invention will be briefly described below, and it is obvious that the drawings described below are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without creative efforts.

Fig. 1 is a schematic structural view of an integrally controlled large-scale precision equipment vibration isolation system at a certain viewing angle according to an embodiment of the present invention.

Fig. 2 is a schematic structural view of an integrally controlled large-scale precision equipment vibration isolation system at a certain viewing angle according to another embodiment of the present invention.

Fig. 3 is a schematic structural view of an integrally controlled large-scale precision equipment vibration isolation system at another viewing angle according to an embodiment of the present invention.

Fig. 4 is a schematic structural view of an integrally controlled large-scale precision equipment vibration isolation system at another viewing angle according to another embodiment of the present invention.

Fig. 5 is a schematic structural view of another view angle of an integrally controlled large-scale precision equipment vibration isolation system according to another embodiment of the present invention.

Fig. 6 is a schematic structural diagram of the first bearing platform of the vibration isolation system of the integrally controlled large-scale precision equipment according to the embodiment of the present invention.

Fig. 7 is a schematic structural view of a second bearing platform of the vibration isolation system for integrally controlled large-scale precision equipment according to an embodiment of the present invention at a certain viewing angle.

Fig. 8 is a schematic structural view of a second bearing platform of the integrally controlled large-scale precision equipment vibration isolation system according to an embodiment of the present invention at another viewing angle.

In the drawings:

100-vibration isolation assembly, 200-precision equipment, 300-first load-bearing platform, 400-second load-bearing platform, 500-first support, 600-second support, 700-flexible seal;

101-vibration isolation supporting device, 102-high rigidity platform;

401-positioning piece, 402-connecting piece, 403-mounting interface, 404-stainless steel plate, 405-stainless steel frame;

601-diagonal stay.

Detailed Description

The following describes embodiments of the present invention in further detail with reference to the accompanying drawings and examples. The following detailed description of the embodiments and the accompanying drawings are provided to illustrate the principles of the invention, but are not intended to limit the scope of the invention, i.e., the invention is not limited to the described embodiments.

In the description of the present invention, it is noted that, unless otherwise indicated, the terms "first" and "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance; "plurality" means two or more; the terms "inner", "outer", "top", "bottom", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience in describing the present invention and simplifying the description, but do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the present invention.

Referring to fig. 1, an integrally controlled large-scale precision equipment vibration isolation system according to an embodiment of the present invention includes a vibration isolation assembly 100 and a bearing platform; the vibration isolation assembly 100 is disposed below the precision equipment 200; the bearing platforms are a plurality of, and a plurality of bearing platforms are vertical in precision equipment 200 and each bearing platform is supported by vibration isolation assembly 100. In this embodiment, at the inside load-bearing platform that has set up a plurality of vertical arrangements of large-scale precision equipment to the integration is controlled by vibration isolation subassembly 100 on, the mode through the integration realizes the vibration isolation to the precision device of different dimensions, this system can also reduce input and running cost by a wide margin on the basis of satisfying equipment multidimension degree vibration isolation effect, improve precision equipment detection efficiency, solved and used current vibration isolation mode to make the process that precision equipment detected complicated, loaded down with trivial details, the higher problem of economy and time cost.

The precision equipment 200 can be in a vacuum tank structure, the precision equipment 200 can be in a cylinder-like shape or a cuboid-like shape, and the precision equipment 200 can be supported on a foundation or other vibration isolation bases and isolated vibration isolation is performed between the precision equipment 200 and a bearing platform, so that vibration interference of the precision equipment 200 to the inside is avoided.

As an alternative embodiment, the vibration isolation assembly 100 includes a plurality of vibration isolation support devices 101 arranged in a tiled arrangement.

In this embodiment, a plurality of vibration isolation supporting devices 101 are tiled and arranged below the precision equipment 200 to form a supporting plane, and the first bearing platform 300 and the second bearing platform 400 are supported by the same plurality of vibration isolation supporting devices 101, so that the consistency of the vibration phases of the first bearing platform 300 and the second bearing platform 400 is ensured, and the consistency of the vibration phases of the detection devices borne by the first bearing platform 300 and the second bearing platform 400 is ensured.

With reference to fig. 2 and 3, according to an aspect of the embodiment of the present invention, the vibration isolation assembly 100 further includes a high rigidity platform 102, the high rigidity platform 102 is supported below the precision equipment 200 by a plurality of vibration isolation supporting devices 101, the plurality of vibration isolation supporting devices 101 are arranged in at least one row along an extending direction of the high rigidity platform 102, and each row includes one or more vibration isolation supporting devices 101.

In the present embodiment, the first load-bearing platform 300 and the second load-bearing platform 400 are both supported by the high rigidity platform 102, so as to further improve the uniformity of the vibration phase. A plurality of vibration isolation supporting devices 101 are positioned below the high-rigidity platform 102 and jointly support the high-rigidity platform 102 on a foundation or other foundation platforms; the plurality of vibration isolation supporting devices 101 are arranged in rows, and when one or more rows of vibration isolation supporting devices 101 include a plurality of vibration isolation supporting devices 101, the vibration isolation supporting devices 101 in adjacent rows may be staggered, aligned, or in other corresponding relationships, and the plurality of vibration isolation supporting devices 101 may be uniformly arranged as a whole, so as to stably support the first carrying platform 300 and the second carrying platform 400.

The projection shape of the high-rigidity platform 102 in the vertical direction may be a plurality of shapes such as a rectangle, a square, a circle, an ellipse, etc., and may be specifically determined according to the projection shape of the precision equipment 200 in the vertical direction, and certainly, it is necessary to ensure that the first bearing platform 300 and the second bearing platform 400 can be stably supported; the high-rigidity platform 102 may be a plate structure, a steel-concrete structure, a frame structure, etc., and has a high structural stability, and the rigidity requirement required by the use scenario of the embodiment should be satisfied. The vibration isolation supporting device 101 may be an air spring, a steel spring, a rubber spring, or the like, or may be an air bag, an air chamber, or other structures having vibration isolation and supporting functions that can be applied to the usage scenario of the present embodiment.

As an alternative embodiment, the carrying platform includes a first carrying platform 300 and a second carrying platform 400, and the second carrying platform 400 is configured to be located above the first carrying platform 300 in the vertical direction.

In specific implementation, the bearing platform is subdivided into a first bearing platform 300 relatively located above and a second bearing platform 400 relatively located below, and the vibration isolation system for the integrally-controlled large-scale precision equipment of the embodiment can meet the vibration isolation requirements of precision devices with different heights in the large-scale precision equipment, and realizes respective vibration isolation of the precision devices with different heights.

In a specific application, the first bearing platform 300 is used for bearing a precision device, and comprises a precision device to be tested and a horizontal detection device, wherein the horizontal detection device can horizontally detect the precision device to be tested borne by the first bearing platform 300, the second bearing platform 400 is used for bearing a vertical detection device, and the first bearing platform 300 and the second bearing platform 400 which are arranged from top to bottom can simultaneously meet the horizontal micro-vibration isolation and the vertical micro-vibration isolation, and can simultaneously enable the vertical detection device to vertically detect the precision device to be tested borne by the first bearing platform 300. The application can be realized as a test of a large-scale measured precision device, such as an optical test, and horizontal and vertical integrated vibration isolation is provided, so that the same set of vibration isolation equipment can be applied to horizontal detection and vertical detection, the vibration transfer rate of the ground and precision equipment 200 vibration to the measured precision device and a detection device is effectively reduced, the vibration isolation efficiency is improved, the requirement of the test vibration environment is ensured, the test economic cost and the time cost can be reduced, and the vibration isolation device is simple in structure and easy to realize.

In this embodiment, the first bearing platform 300 and the second bearing platform 400 are supported by the same vibration isolation assembly 100, so that the consistency of the vibration phases of the first bearing platform 300 and the second bearing platform 400 is ensured, the consistency of the vibration phases of the precision devices borne by the first bearing platform 300 and the second bearing platform 400 is ensured, and the detection accuracy can be ensured on the basis of improving the detection efficiency.

Alternatively, the second load-bearing platform 400 may be vertically aligned with the middle of the first load-bearing platform 300, facilitating the erection of the detection device on the second load-bearing platform 400. Meanwhile, the second loading platform 400 is located above the first loading platform 300, and the height of the second loading platform 400 from the first loading platform 300 should be enough to place the precision device on the first loading platform 300.

As an alternative embodiment, the number of the second bearing platforms 400 is multiple, and the multiple second bearing platforms 400 are sequentially stacked in the vertical direction; the number of the first supporting platforms 300 is plural, and the plurality of the first supporting platforms 300 are tiled in the horizontal direction.

In this embodiment, the number of the second bearing platforms 400 may be multiple, the second bearing platforms 400 may be stacked in sequence in the vertical direction, and may be stacked in alignment or stacked in dislocation, the number of the first bearing platforms 300 may also be multiple, the first bearing platforms 300 may be tiled in the horizontal direction, and may be tiled in alignment or tiled in dislocation, the second bearing platforms 400 and the first bearing platforms 300 may be specifically arranged according to the vibration isolation requirements and distribution conditions of different internal components of the large-scale precision equipment, all the second bearing platforms 400 and the first bearing platforms 300 are connected to each other, the integration is controlled by the vibration isolation assembly 100, and the integrated vibration control of all the bearing platforms is realized.

As an alternative embodiment, the first loading platform 300 is connected to the vibration isolation assembly 100 through a plurality of first supporting members 500 penetrating through the wall of the precision equipment 200, and the first supporting members 500 penetrate through the wall of the precision equipment 200 through holes on the precision equipment 200, and a flexible sealing member 700 is disposed between the first supporting members 500 and the through holes.

The flexible sealing member 700 of the embodiment is used for sealing the through hole, and simultaneously, the first supporting member 500 is in soft contact with the precision equipment 200, so that the influence of the precision equipment 200 and the external vibration on the first bearing platform 300 is greatly reduced, and the influence on the detection is further reduced. When the number of the first carrying platforms 300 is plural, the plural first carrying platforms 300 are all supported by the first supports 500.

Optionally, the flexible sealing member 700 is a corrugated pipe, and the connection manner is welding, so that the flexible sealing member has certain deformation capability, can effectively perform a vibration isolation function, can ensure the sealing between the first supporting member 500 and the precision equipment 200, and can maintain the vacuum degree and the temperature in the precision equipment 200; the flexible sealing member 700 may also be other members capable of performing flexible connection and sealing functions, such as a large-deflection corrugated pipe, a rubber sealing ring, a membrane type vibration damping structure, and the like.

As an alternative embodiment, a first end of the first support 500 is connected to the vibration isolation assembly 100, and a second end of the first support 500 extends through the bottom wall of the precision equipment 200 to the bottom of the interior of the precision equipment 200 to be connected to the first load-bearing platform 300.

The first support 500 of the present embodiment can extend from the bottom wall of the precision equipment 200 into the precision equipment 200, and support the first loading platform 300 at the bottom of the precision equipment 200; the first support 500 may extend linearly as a whole, or may be formed in a folded line shape by connecting a plurality of stages in sequence, and preferably, the stage penetrating the bottom wall of the precision equipment 200 is linear.

As an alternative embodiment, the second ends of the plurality of first supports 500 are arranged in at least one row along the extending direction of the first carrying platform 300, and the number of the second ends of the first supports 500 in each row is one or more.

The second ends of the plurality of first supports 500 of the present embodiment are arranged in a row, and when one or more rows include the second ends of the plurality of first supports 500, the second ends of the first supports 500 of adjacent rows may be staggered, aligned, or in other corresponding relationships, so as to ensure that the first carrying platform 300 can be stably supported.

As an alternative embodiment, the second load-bearing platform 400 is connected to the vibration isolation assembly 100 through a plurality of second supports 600 penetrating the wall of the precision equipment 200, the second supports 600 penetrate the wall of the precision equipment 200 through holes on the precision equipment 200, and flexible seals 700 are disposed between the second supports 600 and the through holes.

In the embodiment, similarly, the flexible sealing member 700 is used for sealing the through hole, and at the same time, the second supporting member 600 is in soft contact with the precision equipment 200, so that the influence of the precision equipment 200 and the external vibration on the second bearing platform 400 is greatly reduced, and the influence on the detection is further reduced. When the number of the second loading platforms 400 is plural, the plurality of second loading platforms 400 are supported by the second support 600.

As an alternative embodiment, a first end of the second support 600 is connected to the vibration isolation assembly 100, and a second end of the second support 600 extends through a sidewall of the precision equipment 200 to an upper portion of the inside of the precision equipment 200 to be connected to the second loading platform 400.

The second support 600 of the present embodiment may extend from a sidewall of the precision apparatus 200 into the precision apparatus 200, and support the second loading platform 400 at an upper portion of the precision apparatus 200.

The second support 600 may be curved, folded, or otherwise shaped, and may conform to the contour of the sidewall of the precision apparatus 200, extend upward from the outside of the precision apparatus 200, and extend from the upper sidewall of the precision apparatus 200 into the precision apparatus 200.

Also, the plurality of second supporters 600 may be symmetrically disposed at both sides of the precision equipment 200, including uniform number and uniform position, as viewed in a length direction of the precision equipment 200, so as to be able to more stably support the second loading platform 400.

As an alternative embodiment, the second load-bearing platform 400 is connected to the first load-bearing platform 300 by a plurality of second supports 600 disposed within the precision equipment 200.

In this embodiment, the second supporting member 600 may be disposed in the precision equipment 200, and connects the second loading platform 400 and the first loading platform 300, so that the second loading platform 400 is supported above the first loading platform 300.

As an alternative embodiment, a first end of the second support 600 is connected to the first load-bearing platform 300, and a second end of the second support 600 extends to the upper portion of the precision equipment 200 to be connected to the second load-bearing platform 400.

The second support 600 of this embodiment may extend upwardly within the precision apparatus 200, supporting the second load-bearing platform 400 at an upper portion within the precision apparatus 200.

The second support 600 may be curved, folded, or otherwise shaped to conform to the inner profile of the sidewall of the precision apparatus 200 and extend upwardly within the precision apparatus 200 to the upper portion of the precision apparatus 200.

As an alternative embodiment, the second load-bearing platform 400 is connected to the vibration isolation assembly 100 through a plurality of second supports 600 disposed in the precision equipment 200 and penetrating through the first load-bearing platform 300.

It can be understood that when the first end of the second supporting member 600 is connected to the vibration isolation assembly 100, the second end of the second supporting member 600 may extend through the bottom wall of the precision equipment 200 to the upper portion of the inside of the precision equipment 200 to be connected to the second bearing platform 400, if necessary, considering the convenience of erecting the second supporting member 600 or the dimensional relationship between the first bearing platform 300 and the precision equipment 200, the second end of the second supporting member 600 may simultaneously extend through the first bearing platform 300 to be connected to the second bearing platform 400, and the first bearing platform 300 is correspondingly provided with a through hole for the second supporting member 600 to pass through.

As an alternative embodiment, the second ends of the plurality of second supports 600 are arranged around the second load-bearing platform 400 along the circumference of the second load-bearing platform 400.

The second ends of the plurality of second supports 600 of the present embodiment may be uniformly arranged along the circumference of the second load-bearing platform 400 within the precision equipment 200 to be able to more stably support the second load-bearing platform 400.

As an alternative embodiment, the plurality of second supporting members 600 are connected to the second loading platform 400 through a ring-shaped positioning member 401, and the second loading platform 400 is disposed in the middle of the positioning member 401 through a plurality of connecting members 402, as shown in fig. 7.

In this embodiment, the positioning element 401 is disposed, so that the connection between the second supporting platform 400 and the plurality of second supporting members 600 is more convenient, and the position of the second supporting platform 400 is more stable. The plurality of connecting members 402 may be uniformly distributed along the circumferential direction of the positioning member 401, so that the positioning member 401 stably carries the second carrying platform 400.

The arrangement of the positioning member 401 is explained as follows: when the second loading platform 400 is connected to the high rigidity platform 102 through the second supporting members 600 penetrating through the wall of the precision equipment 200 from outside to inside, the positioning member 401 is disposed at the upper portion inside the precision equipment 200, the second ends of the second supporting members 600 extend upward to the upper portion of the precision equipment 200 outside the precision equipment 200, extend into the precision equipment 200 through the wall of the precision equipment 200, and are connected to the positioning member 401 at the upper portion inside the precision equipment 200, the second loading platform 400 is disposed at the middle portion of the positioning member 401 through the connecting members 402, so that the second loading platform 400 is supported on the high rigidity platform 102 through the second supporting members 600; when the second supporting platform 400 is connected to the first supporting platform 300 through the plurality of second supporting members 600 disposed in the precision equipment 200, as shown in fig. 4, or connected to the high rigidity platform 102 by penetrating through the first supporting platform 300, as shown in fig. 5, the positioning member 401 is disposed at the upper portion of the precision equipment 200, the second ends of the plurality of second supporting members 600 extend to the upper portion of the precision equipment 200 and are connected to the positioning member 401, and the second supporting platform 400 is disposed at the middle portion of the positioning member 401 through the connecting member 402, so that the second supporting platform 400 is supported on the first supporting platform 300 or the high rigidity platform 102 through the plurality of second supporting members 600.

As an alternative embodiment, among the plurality of second supporting members 600, a part of the second supporting members 600 is close to one side of the first loading platform 300, and another part of the second supporting members 600 is close to the other side of the first loading platform 300; in the second supports 600 near the same side of the first loading platform 300, diagonal supports 601 are disposed between adjacent second supports 600.

In this embodiment, diagonal braces 601 may be disposed between adjacent second supports 600 to improve the overall rigidity of all the second supports 600.

Further, when the plurality of second supports 600 are disposed around the first carrying platform 300, particularly, when the first ends of the plurality of second supports 600 are disposed around the first carrying platform 300, the diagonal supports 601 are also disposed between the adjacent second supports 600.

Referring to fig. 6, as an alternative embodiment, the first load-bearing platform 300 may be in the form of a stainless steel frame structure, a space truss structure, a grid structure, or a honeycomb structure, or may be in the form of other high-rigidity structures, and may have bracing members to improve overall rigidity.

As an alternative embodiment, the second load-bearing platform 400 may be circular or polygonal in shape, in the form of a stainless steel frame structure, a grid structure, or a sandwich structure, among other highly rigid forms. Meanwhile, an installation interface 403 of a detection device, such as a collimator, is reserved, and a channel for installation and maintenance can be reserved, as shown in fig. 7; when the second platform 400 is a sandwich structure, the upper and lower layers may be stainless steel plates 404 or perforated plates, with mounting bolt holes reserved, and the middle may be a stainless steel frame 405, as shown in fig. 8.

As an alternative embodiment, the first support 500 and the second support 600 may each be in the form of a structure supporting a column, a concrete frame structure. The first bearing platform 300 and the second bearing platform 400, and the first supporting member 500 and the second supporting member 600 are made of high-rigidity members, such as the stainless steel plate, the perforated plate, the stainless steel frame, and the stainless steel column, to form a high-rigidity structure, thereby reducing the vibration amplification rate. The first load-bearing platform 300 and the second load-bearing platform 400 are designed in consideration of the overall rigidity of the platforms, and the overall rigidity requirement may be greater than 14Hz, for reference.

Also, in view of more effective vibration isolation, the first support 500 is rigidly connected to the first loading platform 300, and the second support 600 is rigidly connected to the second loading platform 400.

It should be understood by those skilled in the art that the foregoing is only illustrative of the present invention, and the scope of the present invention is not limited thereto. It will be apparent to those skilled in the art that various changes and modifications may be made in the present application without departing from the spirit and scope of the application. Thus, if such modifications and variations of the present application fall within the scope of the claims of the present application and their equivalents, the present application is intended to include such modifications and variations as well.

Claims (17)

1. The utility model provides an integrated control's large-scale precision equipment vibration isolation system which characterized in that includes:

the vibration isolation assembly is arranged below the precision equipment;

the bearing platforms are arranged vertically in the precision equipment, and each bearing platform is supported by the vibration isolation assembly.

2. The integrally controlled large scale precision equipment vibration isolation system of claim 1 wherein said vibration isolation assembly comprises a plurality of vibration isolation support devices arranged in a tiled arrangement.

3. The integrally controlled large precision equipment vibration isolation system according to claim 2, wherein said vibration isolation assembly further comprises a high rigidity platform supported below the precision equipment by said plurality of vibration isolation support means arranged in at least one row along the extension direction of said high rigidity platform, each row comprising one or more vibration isolation support means.

4. The integrally controlled large scale precision equipment vibration isolation system according to claim 1, wherein said load-bearing platform comprises a first load-bearing platform and a second load-bearing platform, said second load-bearing platform configured to be vertically above said first load-bearing platform.

5. The vibration isolation system for integrally controlled large-scale precision equipment according to claim 4, wherein the number of the second bearing platforms is plural, and the plural second bearing platforms are sequentially stacked in a vertical direction.

6. The vibration isolation system for large integrally controlled precision equipment according to claim 4 or 5, wherein the number of the first bearing platforms is plural, and the plural first bearing platforms are horizontally laid.

7. The integrally controlled large scale precision equipment vibration isolation system of claim 4, wherein said first load-bearing platform is connected to said vibration isolation assembly by a plurality of first supports extending through the precision equipment wall, and said second load-bearing platform is connected to said vibration isolation assembly by a plurality of second supports extending through the precision equipment wall.

8. The integrally controlled large-scale precision equipment vibration isolation system according to claim 7, wherein the first supporting member and the second supporting member are both provided with through holes on the precision equipment to penetrate through the wall of the precision equipment, and flexible sealing members are arranged between the first supporting member and the through holes and between the second supporting member and the through holes.

9. The integrally controlled vibration isolation system for large precision equipment according to claim 7, wherein the first end of the first support member is connected to the vibration isolation assembly, and the second end of the first support member extends through the bottom wall of the precision equipment to the bottom of the interior of the precision equipment to be connected to the first load-bearing platform.

10. The integrally controlled large scale precision equipment vibration isolation system according to claim 9, wherein the second ends of the plurality of first supporting members are arranged in at least one row along the extending direction of the first carrying platform, and the number of the second ends of the first supporting members in each row is one or more.

11. The integrally controlled large scale precision equipment vibration isolation system of claim 7, wherein a first end of said second support member is connected to said vibration isolation assembly and a second end of said second support member extends through a side wall of the precision equipment to an upper interior portion of the precision equipment to be connected to said second load-bearing platform.

12. The integrally controlled large scale precision equipment vibration isolation system of claim 4 wherein said second load-bearing platform is connected to said first load-bearing platform by a plurality of second supports disposed within the precision equipment.

13. The integrally controlled large scale precision equipment vibration isolation system of claim 12, wherein a first end of said second support member is connected to said first load-bearing platform and a second end of said second support member extends to a precision equipment upper portion to be connected to said second load-bearing platform.

14. The integrally controlled large scale precision equipment vibration isolation system of claim 4, wherein said second load-bearing platform is connected to said vibration isolation assembly by a plurality of second supports disposed within the precision equipment that extend through said first load-bearing platform.

15. The integrally controlled large scale precision equipment vibration isolation system according to claim 11 or 13, wherein the second ends of said plurality of second supports are disposed circumferentially around said second load-bearing platform.

16. The vibration isolation system of integrally controlled large-scale precision equipment according to claim 7, 12 or 14, wherein the second supporting members are connected to the second carrying platform through a ring-shaped positioning member, and the second carrying platform is disposed in the middle of the positioning member through a plurality of connecting members.

17. The integrally controlled large scale precision equipment vibration isolation system of claim 7, 12 or 14 wherein a portion of said plurality of second supports are adjacent one side of said first load-bearing platform and another portion of said plurality of second supports are adjacent the other side of said first load-bearing platform;

and oblique supporting pieces are arranged between the adjacent second supporting pieces in the second supporting pieces close to the same side of the first bearing platform.

Images