CN114076840A - 检测探针的制造方法及制造装置 - Google Patents

检测探针的制造方法及制造装置 Download PDF

Info

Publication number
CN114076840A
CN114076840A CN202110895382.9A CN202110895382A CN114076840A CN 114076840 A CN114076840 A CN 114076840A CN 202110895382 A CN202110895382 A CN 202110895382A CN 114076840 A CN114076840 A CN 114076840A
Authority
CN
China
Prior art keywords
terminal
cylinder
manufacturing
detection probe
barrel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202110895382.9A
Other languages
English (en)
Chinese (zh)
Inventor
曺惺铉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leeno Industiral Inc
Original Assignee
Leeno Industiral Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leeno Industiral Inc filed Critical Leeno Industiral Inc
Publication of CN114076840A publication Critical patent/CN114076840A/zh
Pending legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06705—Apparatus for holding or moving single probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G01R1/06722—Spring-loaded
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Measuring Leads Or Probes (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Treatment Of Fiber Materials (AREA)
CN202110895382.9A 2020-08-11 2021-08-05 检测探针的制造方法及制造装置 Pending CN114076840A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020200100206A KR102456469B1 (ko) 2020-08-11 2020-08-11 검사 프로브의 제조 방법 및 장치
KR10-2020-0100206 2020-08-11

Publications (1)

Publication Number Publication Date
CN114076840A true CN114076840A (zh) 2022-02-22

Family

ID=80283158

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202110895382.9A Pending CN114076840A (zh) 2020-08-11 2021-08-05 检测探针的制造方法及制造装置

Country Status (3)

Country Link
KR (1) KR102456469B1 (ko)
CN (1) CN114076840A (ko)
TW (1) TWI792422B (ko)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01287484A (ja) * 1988-05-16 1989-11-20 Hitachi Ltd プローブヘッド及びその製造方法とそれを用いた半導体ｌｓｉ検査装置
KR101904265B1 (ko) * 2018-04-13 2018-10-05 (주)에이치엠티 플랫 핀바디를 구비한 핀블록용 프로브핀
KR20180111219A (ko) * 2017-03-31 2018-10-11 주식회사 오킨스전자 레이저 용접을 이용하여 조립되는 프로브 핀, 그 프로브 핀의 조립 방법 및 여기에 사용되는 프로브 핀의 전기-광학 용접 시스템
TW201918712A (zh) * 2017-11-07 2019-05-16 南韓商李諾工業股份有限公司 測試探針模組、測試插座及製造測試探針模組的方法
TW201940887A (zh) * 2018-03-20 2019-10-16 日商日本電產理德股份有限公司 接觸端子、具備接觸端子的檢查治具、以及接觸端子的製造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20050112213A (ko) * 2004-05-25 2005-11-30 서인교 버티컬 핸들러의 반도체 소자 소켓 설치 구조
KR20170105030A (ko) * 2014-12-30 2017-09-18 테크노프로브 에스.피.에이. 복수의 테스트 헤드용 접촉 프로브를 포함하는 반제품 및 이의 제조 방법
KR20170000572A (ko) * 2015-06-24 2017-01-03 주식회사 메가터치 전자 디바이스 테스트용 탐침 장치
US10168357B2 (en) * 2015-12-21 2019-01-01 Intel Corporation Coated probe tips for plunger pins of an integrated circuit package test system
TWI671529B (zh) * 2017-12-22 2019-09-11 馬來西亞商宇騰精密探針集團 具有壓縮性彈簧組件的接觸探針

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01287484A (ja) * 1988-05-16 1989-11-20 Hitachi Ltd プローブヘッド及びその製造方法とそれを用いた半導体ｌｓｉ検査装置
KR20180111219A (ko) * 2017-03-31 2018-10-11 주식회사 오킨스전자 레이저 용접을 이용하여 조립되는 프로브 핀, 그 프로브 핀의 조립 방법 및 여기에 사용되는 프로브 핀의 전기-광학 용접 시스템
TW201918712A (zh) * 2017-11-07 2019-05-16 南韓商李諾工業股份有限公司 測試探針模組、測試插座及製造測試探針模組的方法
TW201940887A (zh) * 2018-03-20 2019-10-16 日商日本電產理德股份有限公司 接觸端子、具備接觸端子的檢查治具、以及接觸端子的製造方法
KR101904265B1 (ko) * 2018-04-13 2018-10-05 (주)에이치엠티 플랫 핀바디를 구비한 핀블록용 프로브핀

Also Published As

Publication number Publication date
KR20220019918A (ko) 2022-02-18
KR102456469B1 (ko) 2022-10-21
TWI792422B (zh) 2023-02-11
TW202206821A (zh) 2022-02-16

Similar Documents

Publication Publication Date Title
US5334931A (en) Molded test probe assembly
KR100443999B1 (ko) 인쇄회로기판용 상호 접속체, 이의 제조방법 및 이를구비한 상호 접속 조립체
JP5936619B2 (ja) 電気コネクタを形成する方法
US4200351A (en) Straight through electrical spring probe
US20110102009A1 (en) Test socket electrical connector, and method for manufacturing the test socket
JP6610322B2 (ja) プローブピンおよびそれを用いた検査装置
JP6040532B2 (ja) プローブ及び接続治具
US20080088331A1 (en) Socket for test
KR101434280B1 (ko) 집적 리드 스위치
CN110462408B (zh) 接触式探针及探针单元
KR101266122B1 (ko) 검사용 탐침장치 및 그 검사용 탐침장치의 제조방법
CN112005121A (zh) 筒状体及其制造方法
TWM484814U (zh) 接觸元件
CN114076840A (zh) 检测探针的制造方法及制造装置
CN114076838A (zh) 检测探针
CN111293448B (zh) 压接结构的一体型弹簧针
JP4624372B2 (ja) 多層電気プローブ
TWI823560B (zh) 探針接頭及所組成的彈簧式探針
KR102606892B1 (ko) 검사 소켓용 지지 플레이트, 검사 소켓용 소켓핀 및 이들을 구비하는 검사 소켓
CN109581003B (zh) 探针组件及其电容式探针
TW202411659A (zh) 探針接頭及所組成的彈簧式探針
JP4963912B2 (ja) 集積電気配列コネクタ
CN116819142A (zh) 一种晶圆测试探针及其制备方法

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination