CN113959574B - 一种基于氧化铟复合材料的薄膜热电偶及其制备方法 - Google Patents
一种基于氧化铟复合材料的薄膜热电偶及其制备方法 Download PDFInfo
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- CN113959574B CN113959574B CN202111131729.9A CN202111131729A CN113959574B CN 113959574 B CN113959574 B CN 113959574B CN 202111131729 A CN202111131729 A CN 202111131729A CN 113959574 B CN113959574 B CN 113959574B
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- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/02—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermoelectric elements, e.g. thermocouples
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WO2007130862A2 (en) * | 2006-05-03 | 2007-11-15 | The Board Of Governors For Higher Education, State Of Rhode Island And The Providence Plantations | Thermoelectric properties of ceramic thin film thermocouples |
CN105300544B (zh) * | 2015-11-12 | 2018-11-23 | 西安交通大学 | 一种氧化物薄膜型热电偶及其制备方法 |
CN105294074B (zh) * | 2015-11-12 | 2017-10-20 | 西安交通大学 | 一种采用丝网印刷工艺制备氧化物薄膜型热电偶的方法 |
CN106679838B (zh) * | 2016-12-27 | 2020-04-28 | 西安交通大学 | 一种具有超大输出电压的薄膜型热电偶及其制备方法 |
CN111076836B (zh) * | 2019-12-12 | 2020-10-27 | 西安交通大学 | 一种金属-氧化物型薄膜热电偶及其制备方法 |
CN112729580B (zh) * | 2020-12-23 | 2023-04-28 | 西安交通大学 | 一种柔性温度传感器及其制备方法 |
CN113174569B (zh) * | 2021-04-20 | 2022-11-22 | 中国航发北京航空材料研究院 | 制备晶面择优取向氧化铟锡-氧化铟锌薄膜热电偶的方法 |
CN113292315A (zh) * | 2021-05-12 | 2021-08-24 | 先导薄膜材料(广东)有限公司 | 一种稀土掺杂氧化铟锌粉体及其制备方法、应用 |
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Inventor after: Tian Bian Inventor after: Li Shuimin Inventor after: Zhang Zhongkai Inventor after: Cheng Gong Inventor after: Zhang Bingfei Inventor after: Liu Zhaojun Inventor before: Tian Bian Inventor before: Cheng Gong Inventor before: Li Shuimin Inventor before: Zhang Zhongkai Inventor before: Zhang Bingfei Inventor before: Liu Zhaojun |
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