CN113933681A - Chip testing equipment - Google Patents
Chip testing equipment Download PDFInfo
- Publication number
- CN113933681A CN113933681A CN202111073454.8A CN202111073454A CN113933681A CN 113933681 A CN113933681 A CN 113933681A CN 202111073454 A CN202111073454 A CN 202111073454A CN 113933681 A CN113933681 A CN 113933681A
- Authority
- CN
- China
- Prior art keywords
- defective
- test
- tray
- frame
- module
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000012360 testing method Methods 0.000 title claims abstract description 221
- 230000002950 deficient Effects 0.000 claims abstract description 170
- 239000000463 material Substances 0.000 claims abstract description 41
- 238000013519 translation Methods 0.000 claims description 49
- 230000000903 blocking effect Effects 0.000 claims description 44
- 230000007246 mechanism Effects 0.000 claims description 27
- 230000001360 synchronised effect Effects 0.000 claims description 19
- 238000010079 rubber tapping Methods 0.000 description 18
- 238000000034 method Methods 0.000 description 7
- 230000008569 process Effects 0.000 description 7
- 238000001514 detection method Methods 0.000 description 6
- 230000032258 transport Effects 0.000 description 6
- 230000009471 action Effects 0.000 description 5
- 230000003028 elevating effect Effects 0.000 description 4
- 238000011161 development Methods 0.000 description 3
- 238000007599 discharging Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- 230000001174 ascending effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000002457 bidirectional effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Abstract
The invention discloses a chip testing device which comprises a testing tray conveying track, a defective tray conveying track, a testing module and a defective chip grabbing module, wherein the testing tray conveying track and the defective tray conveying track are arranged in parallel side by side; the test tray conveying track comprises a test tray track frame, a tray conveying device and a tray positioning device, wherein the tray conveying device and the tray positioning device are installed on the test tray track frame; the defective plate conveying track comprises a defective plate track frame, a material plate conveying device and a defective plate positioning device, wherein the material plate conveying device and the defective plate positioning device are installed on the defective plate track frame; the test module comprises a test main frame and a test gripper, and the test gripper is movably arranged on the test main frame; and the defective chip grabbing module comprises a defective grabbing moving frame and a defective sucker module. The chip testing equipment can improve the whole flow of conveying, taking, placing and detecting chips, thereby effectively improving the efficiency.
Description
Technical Field
The invention relates to the technical field of semiconductor integrated circuit chip test equipment, in particular to chip test equipment.
Background
In the production and manufacturing process of semiconductor integrated circuit chips, because of numerous links and delicate and complex process, part of chips are damaged in the manufacturing process, and if the damaged chips and normal chips are put into the market at the same time, the confusion of the market is caused, so that the chips need to be detected before entering the market. The traditional chip detection process belongs to a labor-intensive process, a detector picks up a chip by using a tweezer finger, the chip is placed on a testing machine and then manually pressed to obtain chip data, the traditional chip detection process is gradually eliminated in the current market, the most advanced detection mode is to simulate manual detection action through detection equipment and detect the chip, the efficiency is greatly improved, the chip is picked up by using a mechanical gripper to carry out test operation, the independent test process is quicker and more accurate, but the current range limiting the test efficiency of the whole chip is not the test speed of a test position on the test equipment, but the whole operation process from chip extraction to test to chip replacement and chip transportation is carried out by the test equipment, so the test efficiency cannot be further integrally improved by the old equipment technology.
Disclosure of Invention
The purpose of the invention is: the chip testing equipment can improve the whole flow of conveying, taking, placing and detecting chips, thereby effectively improving the efficiency.
In order to solve the above technical problems, the present invention provides a chip testing apparatus.
The chip testing equipment comprises a testing tray conveying track, a defective tray conveying track, a testing module and a defective chip grabbing module, wherein the testing tray conveying track and the defective tray conveying track are arranged side by side in parallel;
the test tray conveying track comprises a test tray track frame, a tray conveying device and a tray positioning device, wherein the tray conveying device and the tray positioning device are installed on the test tray track frame;
the defective plate conveying track comprises a defective plate track frame, a material plate conveying device and a defective plate positioning device, wherein the material plate conveying device is installed on the defective plate track frame and used for conveying defective plates to move on the defective plate track frame, and the defective plate positioning device is used for positioning the defective plates at stations;
the test module comprises a test main frame and a test gripper, the test gripper is movably arranged on the test main frame, and the test gripper is used for picking up a chip to a test position and then placing the chip back to the feed tray;
the defective chip grabbing module comprises a defective grabbing moving frame and a defective sucker module, the defective grabbing moving frame is used for driving the defective sucker module to move horizontally, and the defective sucker module can move in a lifting mode and suck and place chips.
As a preferred scheme of the invention, the tray conveying device comprises a tray conveying belt and a conveying driver, the tray positioning device comprises a tray blocking module, a backward pushing clamping module and a side pushing clamping module, the tray blocking module and the backward pushing clamping module are respectively arranged at the stations on the test tray track frame in tandem, and the side pushing clamping module is arranged at the side of the stations of the test tray track frame; the defective plate positioning device comprises an oblique push clamping cylinder and a defective plate blocking block, the defective plate blocking block is installed at two ends of the defective plate track frame, and the oblique push clamping cylinder is installed on the side edge of the station of the defective plate track frame.
As a preferred scheme of the present invention, the backward-pushing clamping module includes a backward-pushing clamping base, a backward-pushing cylinder, a tapping cylinder, a backward push rod, and a tapping head, the backward-pushing cylinder and the tapping cylinder are horizontally installed on the backward-pushing clamping base in the same direction, the backward push rod is connected to a piston rod of the backward-pushing cylinder, the tapping head is connected to a piston rod of the tapping cylinder, and a tapping plate protrudes from the backward-pushing clamping base.
As a preferred scheme of the invention, the two ends of the test tray track frame are respectively provided with a tray stacking limiting frame, a tray jacking module and a tray supporting module.
As a preferred scheme of the invention, the inclined pushing clamping cylinder comprises an inclined pushing cylinder, an inclined pushing bracket, an inclined pushing block and an inclined pushing guide rod, the inclined pushing cylinder, the inclined pushing block and the inclined pushing guide rod are fixed on the defective tray track frame through the inclined pushing bracket, a piston rod of the inclined pushing cylinder drives the inclined pushing block to move obliquely, and one side of the inclined pushing block is connected with the inclined pushing guide rod in a sliding manner.
As a preferred scheme of the invention, the test gripper comprises a floating suction head, a suction head connecting plate, a test gripper body, a suction head translation connecting block and a body lifting connecting block, wherein the floating suction head is arranged at the lower side of the suction head connecting plate, the upper side of the suction head connecting plate is connected with the test gripper body, the body lifting connecting block is movably connected to one side of the test gripper body in a lifting manner, and the body lifting connecting block is connected with the suction head translation connecting plate; the test main frame is provided with a test hand grip translation module and a test hand grip lifting module, the test hand grip translation module is connected with the suction head translation connecting block, and the test hand grip lifting module is connected with the test hand grip body.
As a preferred scheme of the invention, the test gripper translation module comprises a hand adjusting screw rod, a hand adjusting screw rod connecting block, a test gripper translation motor and a test gripper translation slide rail, the test gripper translation motor drives the hand adjusting screw rod connecting block by connecting the hand adjusting screw rod, the hand adjusting screw rod connecting block is connected with the suction head translation connecting block, the suction head translation connecting block is in sliding connection with the test gripper translation slide rail through a slide block, and the hand adjusting screw rod is parallel to the test gripper translation slide rail.
As a preferred scheme of the invention, the test gripper lifting module comprises a lifting screw rod, a lifting screw rod connecting block, a lifting motor and a translation auxiliary connecting block, the lifting screw rod connecting block is connected to the lifting screw rod, the lifting motor is in driving connection with the lifting screw rod, the translation auxiliary connecting block is movably mounted on the lifting screw rod connecting block through a sliding block and a sliding rail, and the translation auxiliary connecting block is connected with the test gripper body.
As a preferable scheme of the invention, the defective product grabbing motion frame comprises a transverse motion frame, a longitudinal motion frame, a transverse moving motor, a transverse synchronous pulley mechanism, a longitudinal moving motor and a longitudinal synchronous pulley mechanism, the transverse moving frame is vertically erected above the test tray track frame, the transverse moving motor and the transverse synchronous pulley mechanism are arranged on the transverse moving frame, the longitudinal moving frame is movably connected with the transverse moving frame through a sliding rail and a sliding block, the transverse moving motor drives the longitudinal moving frame through the transverse synchronous pulley mechanism, the defective sucker module is movably connected with the longitudinal moving frame through a sliding rail sliding block, the longitudinal moving motor and the longitudinal synchronous pulley mechanism are installed on the longitudinal moving frame, and the longitudinal moving motor drives the defective sucker module through the longitudinal synchronous pulley mechanism.
According to the preferable scheme, the defective sucker module comprises a defective sucker, a defective sucker frame, a defective sucker lifting motor and a defective sucker connecting frame, the defective sucker is arranged at the lower end of the defective sucker frame, one side of the defective sucker frame is connected with the defective sucker connecting frame through a sliding rail slider, the defective sucker lifting motor is arranged on the defective sucker connecting frame, and the defective sucker frame is connected with the defective sucker lifting motor through a screw nut.
Compared with the prior art, the chip testing equipment provided by the embodiment of the invention has the beneficial effects that: the limit of the test efficiency of an old chip tester can be broken, the chip carrying structure is eliminated, and the chip test function of the equipment is brought into full play; the future development of the testing machine can be met according to the elasticity, and the special material tray is modified according to the difference of the testing machine, so that the service efficiency of the testing machine is highest; the test gripper of the equipment can be independently adjusted, so that the debugging difficulty of the equipment is reduced; the defective chip picking position is separated from the testing position, and the chip disc changing position is separated, so that the mutual interference of the testing action and the disc changing action is effectively avoided, and the highest efficiency operation of the equipment is ensured as far as possible; the feeding position and the discharging position of the equipment are designed to be of a stacking structure, a large number of material trays can be fed in at one time, and feeding time and material taking time of workers are saved.
Drawings
FIG. 1 is a schematic view of an assembly structure of an embodiment of the present invention;
FIG. 2 is a schematic diagram of an assembly structure of the transportation track of the test tray in the present invention;
FIG. 3 is a schematic view of an assembly structure of the tray blocking module of the present invention;
FIG. 4 is a schematic view of an assembly structure of the backward clamping module according to the present invention;
FIG. 5 is a schematic view of an assembly structure of the side-push clamping module of the present invention;
FIG. 6 is an enlarged view of a portion of the structure at F in FIG. 2;
FIG. 7 is a schematic view of an assembly structure of the tray lifting module according to the present invention;
FIG. 8 is a schematic view of an assembly structure of one embodiment of the tray support module of the present invention;
FIG. 9 is a schematic view of an assembly structure of another embodiment of the tray supporting module of the present invention;
FIG. 10 is a schematic view showing an assembled structure of a defective tray transporting rail according to the present invention;
FIG. 11 is an enlarged view of a portion of the structure at G of FIG. 10;
FIG. 12 is a schematic view of the assembled structure of the inclined clamping cylinder according to the present invention;
FIG. 13 is a schematic view of an assembly structure of the test module of the present invention;
FIG. 14 is a partially disassembled view of the test module of FIG. 13;
FIG. 15 is a schematic diagram of an assembled configuration of the test grip of the present invention;
FIG. 16 is a schematic view of an assembly structure of the translation module for the test gripper of the present invention;
FIG. 17 is a schematic view of an assembly structure of the lifting module for the test gripper of the present invention;
FIG. 18 is a schematic view of the structural connection of the lift motor of the test gripper lift module of the present invention;
FIG. 19 is a schematic view showing an assembled structure of a defective product gripping moving frame according to the present invention;
FIG. 20 is a schematic view of an assembly structure of a defective chuck module according to the present invention.
Detailed Description
The following detailed description of embodiments of the present invention is provided in connection with the accompanying drawings and examples. The following examples are intended to illustrate the invention but are not intended to limit the scope of the invention.
In the description of the present invention, it is to be understood that the terms "mounted," "connected," and "connected" are used broadly and are defined as, for example, either fixedly connected, detachably connected, or integrally connected, unless otherwise explicitly stated or limited; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In the description of the present invention, it is to be further understood that the terms "upper", "lower", "left", "right", "front", "rear", "top", "bottom", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are only for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the machine or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. It should be understood that the terms "first", "second", etc. are used herein to describe various information, but the information should not be limited to these terms, which are only used to distinguish one type of information from another. For example, "first" information may also be referred to as "second" information, and similarly, "second" information may also be referred to as "first" information, without departing from the scope of the present invention.
Referring to fig. 1, a chip testing apparatus according to an embodiment of the present invention includes a test tray transportation track, a defective tray transportation track, a test module, and a defective chip grabbing module, where the test tray transportation track and the defective tray transportation track are arranged side by side in parallel, the test module picks up a chip from a tray transported on the test tray transportation track and places the chip on a test station for detection, and then places the chip back into the tray, the defective chip grabbing module transfers the detected defective chip from the tray to a defective tray on the defective tray transportation track, and the test tray transportation track correspondingly transports the tray from a feeding position through a material taking test position, a defective grabbing position, and finally to a discharging position;
the test tray conveying track comprises a test tray track frame 51, a tray conveying device 22 and a tray positioning device, wherein the tray conveying device 22 is installed on the test tray track frame 51, the tray conveying device 22 is used for carrying a special tray to move on the test tray track frame 51, the tray positioning device is used for positioning a general tray or the special tray at a station, the trays can be conveyed on the test tray conveying track one by one, and the trays are positioned at the station in a self-adaptive manner;
the defective plate conveying track comprises a defective plate track frame 52, a material plate conveying device 22 and a defective plate positioning device, wherein the material plate conveying device 22 is installed on the defective plate track frame 52 and used for conveying defective plates to move on the defective plate track frame 52, the defective plate positioning device is used for positioning defective plates at a station, and the defective plates are conveyed to a replacement station and then returned to the station after being fully loaded;
the test module comprises a test main frame 53 and a test gripper 54, the test gripper 54 can be horizontally and movably mounted on the test main frame 53 in a lifting way, and the test gripper 54 is used for picking up a chip from a special material tray on the test material tray transportation track to a test position and then placing the chip back into the special material tray;
the defective chip grabbing module comprises a defective grabbing and moving frame 55 and a defective sucker module 56, the defective grabbing and moving frame 55 is used for driving the defective sucker module 56 to horizontally move above the test tray transportation rail and the defective tray transportation rail, the defective sucker module 56 can move up and down and suck and place chips, and the defective grabbing and moving frame 55 moves the defective sucker module 56 to the detected defective chips to carry out sucking and placing operations, so that the defective chips are transferred to the defective trays at the stations from the special trays.
Referring to fig. 2-9, illustratively, the tray transport 22 includes a tray transport belt 221 and a transport drive 222, the tray transport belt 221 of the test tray transport track being mounted to the test tray track rack 51; the tray conveyer belt 221 of the defective tray conveyer rail is installed on the defective tray rail rack 52, the tray conveyer belt 221 is driven by the conveyer driver 222 to operate, and the tray conveyer belt 221 carries special trays to correspondingly move along the rail rack; the tray positioning device comprises a tray blocking module 31, a back-pushing clamping module 32 and a side-pushing clamping module 33, the tray blocking module 31, the back-pushing clamping module 32 and the side-pushing clamping module 33 are preferably two groups, the tray blocking module 31 and the back-pushing clamping module 32 of each group are respectively arranged at each station in the middle of the test tray rail frame 51 in tandem, the side-pushing clamping module 33 is arranged at the side of each station in the middle of the test tray rail frame 51, when a tray is transported to the station of the test tray rail frame 51, the tray blocking module 31 firstly blocks the tray, the back-pushing clamping module 32 presses the tray from the other end of the tray to clamp the tray, and the side-pushing clamping module 33 presses the tray from the side to the other side of the defective tray rail frame 52 to clamp the tray, so that the tray is positioned at the station, the back-push clamping module 32 and the side-push clamping module 33 can be pressed by a power cylinder, an electric push rod or a rotating and moving movable mechanism, and the tray blocking module 31 can be moved to a corresponding position by the movable mechanism to block the tray.
Referring to fig. 10 to 12, the defective plate positioning device illustratively includes a diagonal push clamping cylinder 571 and a defective plate blocking block 572, the defective plate blocking block 572 is installed at both ends of the defective plate rail frame 52, the diagonal push clamping cylinder 571 is installed at a side edge of a defective plate collecting station of the defective plate rail frame 52, the defective plate blocking block 572 is used for limiting and blocking a defective plate at either end position of the defective plate rail frame 52, and the diagonal push clamping cylinder 571 is used for clamping a defective plate or a material plate located at the defective plate collecting station in cooperation with the defective plate blocking block 572.
Referring to fig. 2, 6 and 10, for example, the defective tray rail holder 52 and the test tray rail holder 51 are both rectangular frame structures, the tray transportation device 22 in the test tray rail holder 51 is preferably provided with at least two sets of the tray transportation belts 221 and the transportation drivers 222 along the transportation direction, so as to provide independent transportation or driving for the test grabbing station and the defective picking station respectively, the tray transportation belts 221 in each set are two and can be rotatably installed on the inner two side wall surfaces of the defective tray rail holder 52 or the test tray rail holder 51 respectively, the transportation drivers 222 include motors, motor belt pulleys and rail belt pulleys connected with the motors, one end of the tray transportation belt 221 is in matching socket joint with the rail belt pulleys, the motor belt pulleys and the rail belt pulley on one side are connected and driven by a transmission belt, meanwhile, the rail belt wheel shafts on the two sides are connected, so that the motor is started to drive the material tray conveying belts 221 to rotate in a linkage mode, when material trays are placed in the test material tray rail frame 51 or the defective product tray rail frame 52, the material trays are supported and driven by the material tray conveying belts 221 on the two sides, the two groups of material tray conveying belts 221 are opposite in end portions, so that the material trays can continuously move from one material tray conveying belt 221 to the other material tray conveying belt 221, obviously, the defective product picking station of the test material tray rail frame 51 corresponds to the defective product collecting station of the defective product tray rail frame 52, and therefore the defective chip picking module can conveniently move defective chips.
Referring to fig. 3, exemplarily, the tray blocking module 31 includes a blocking base 311, a blocking cylinder 312, a blocking frame 313, a blocking plate 314, a blocking slide rail 315 and a blocking slide block 316, the blocking base 311 is L-shaped, the blocking cylinder 312 and the blocking slide rail 315 are respectively vertically installed on two sides of the blocking base 311, the blocking frame 313 is a right-angle plate, the upper end of the blocking frame is connected to a piston rod of the blocking cylinder 312, the lower end inner side surface of the blocking frame 313 is connected to the blocking slide block 316 and is in sliding connection with the blocking slide rail 315, the blocking plate 314 is installed on the lower end outer side surface of the blocking frame 313, so that when the tray blocking module 31 is located in the middle of the test tray rail frame 51, the lower portion of the tray blocking frame upwardly extends out of the blocking plate 314, and the tray can be blocked.
Referring to fig. 4, for example, the back-pushing clamping module 32 includes a back-pushing clamping base 321, a back-pushing cylinder 322, a tapping cylinder 323, a back push rod 324 and a tapping head 325, the back-pushing cylinder 322 and the tapping cylinder 323 are horizontally installed on the back-pushing clamping base 321 in the same direction, the back push rod 324 is connected to a piston rod of the back-pushing cylinder 322, the tapping head 325 is connected to a piston rod of the tapping cylinder 323, a tapping plate 3211 protrudes from the back-pushing clamping base 321, the tapping cylinder 323 drives the tapping head 325 to tap the tapping plate 3211, so that when a tray is blocked by the tray blocking module 31, the back-pushing cylinder 322 drives the back push rod 324 to move horizontally to press the tray against the tray blocking module 31 to realize back-pushing clamping, and then the tapping cylinder 323 drives the tapping head 325 to tap the tapping plate 3211 horizontally, therefore, the material tray can be vibrated by pushing the clamping module 32 backwards, the chips which are skewed or improperly placed in the material tray can be vibrated to the correct position, the knocking speed and the knocking frequency can be set, the chips which are originally arranged at the specified position cannot be knocked over due to the fact that the knocking force is too large, and the chips cannot be knocked down due to the fact that the knocking force and the frequency are not enough.
Referring to fig. 5, for example, the side-push clamping module 33 includes a side-push cylinder 331, a side-push base 332, and a side-push rod 333, the side-push base 332 is fixed relative to the test tray rail frame 51, the side-push cylinder 331 is fixed on the side-push base 332, a piston rod of the side-push cylinder 331 is connected to the side-push rod 333, and the side-push rod 333 is driven by the side-push cylinder 331 to push against one side edge of the general or special tray, so that the other side edge of the general or special tray is tightly attached to the side plate of the test tray rail frame 51; the blocking base 311 and the push-back clamping base 321 may be fixed on the test tray rail rack 51.
Referring to fig. 2, 6-9, exemplarily, both ends of the test tray rail frame 51 are provided with a tray stacking limit frame 41, a tray jacking module 42 and a tray supporting module 43, a special tray can be placed along the tray stacking limit frame 41 at one end of the test tray rail frame 51, the tray jacking module 42 can jack up or lower the tray, and the tray supporting module 43 can hang up the tray above at a time, and the tray can be discharged one by one or stacked up one by one from any end of the test tray rail frame 51, and meanwhile, the tray of the tray transportation device 22 can be bidirectionally stacked, released and stacked and collected, so as to realize bidirectional transportation.
Referring to fig. 2, 6-9, exemplarily, the charging tray piles up spacing 41 and includes four upright right angle laths, four the right angle lath is the four corners distribution of rectangle, works as charging tray jacking module 42 is followed the charging tray the test charging tray track frame 51 jack-up can four of four corner correspondence right angle lath rises, perhaps piles up the charging tray again and follows four the right angle lath is transferred one by one to the charging tray can be followed spacing 41 lift realization that piles up of charging tray piles up and collect or release, because the both ends of test charging tray track frame 51 all have four respectively the right angle lath, preferably, the right angle lath that leans on one side outside is shorter than leaning on interior one side, very conveniently gets and puts the charging tray that piles up.
Referring to fig. 2 and 6-9, for example, the tray jacking module 42 is disposed below the stations at two ends of the test tray rail frame 51, the tray jacking module 42 includes a jacking driver 421, a jacking base 422, a jacking stage 423 and a jacking guide rod mechanism 424, one end of the jacking driver 421 and one end of the jacking guide rod mechanism 424 are mounted on the jacking base 422, the lower side of the jacking stage 423 is connected with the other end of the jacking guide rod mechanism 424, the other end of the jacking driver 421 is connected with the jacking stage 423 in a driving manner, the jacking base 422 can be mounted below two ends of the test tray rail frame 51, the jacking driver 421 can be a power cylinder or a motor, preferably, the jacking driver 421 is a motor and is connected with the jacking stage 423 through a roller screw mechanism or other transmission mechanism for converting rotational motion into linear motion, meanwhile, the jacking guide rod mechanism 424 assists in guiding the jacking rack 423 to stably lift.
Referring to fig. 8, illustratively, the tray support module 43 includes a support driver 431, a support base 432 and a support pad 433, the supporting driver 431 can be a power cylinder or an electric telescopic rod, the supporting driver 431 is installed on the supporting base 432, the supporting driver 431 drives the supporting bracket 433 to move horizontally, when the tray jacking module 42 supports the tray to lift, the supporting block 433 moves backwards to avoid clamping a specially-arranged bayonet of the tray from the lower part, after the material tray goes up and down, the supporting block 433 extends out of a bayonet which is specially arranged corresponding to the material tray, thereby supporting the stacked trays and the tray support module 43 can put down the tray or jack up the next tray below the stacked trays, the support actuator 431 is preferably a pneumatic cylinder, the support base 432 is preferably L-shaped, the front end of the supporting block 433 is preferably provided with a bayonet in which a shovel-shaped supporting sheet is matched and inserted into the side edge of the material tray; still alternatively referring to fig. 9, for example, the tray supporting module 43 includes a supporting seat 434 and a rotatable supporting tray 435, the rear end of the rotatable supporting tray 435 is rotatably connected to the supporting seat 434, the rotatable supporting tray 435 can rotate upward and the bottom side of the rotatable supporting tray 435 is supported and abutted by the upper end surface of the supporting seat 434, preferably, the lower side of the front end of the rotatable supporting tray 435 is provided with an inclined surface, when the tray is lifted by the tray lifting module 42, the rotatable supporting tray 435 can be naturally pushed upward from the lower side until it falls down to return, and the tray lifting module 42 descends to naturally support the tray, so that the unidirectional ascending stacking collection of the trays can be realized with a simpler structure, which is more arranged at the end of the test tray rail frame 51.
Referring to fig. 12, the inclined clamping cylinder 571 illustratively comprises an inclined cylinder 5711, an inclined bracket 5714, an inclined ejector block 5712 and an inclined ejector guide rod 5713, the inclined cylinder 5711, the inclined ejector block 5712 and the inclined ejector guide rod 5713 are fixed to the defective tray rail rack 52 through the inclined bracket 5714, a piston rod of the inclined cylinder 5711 drives the inclined ejector block 5712 to move obliquely, and one side of the inclined ejector block 5712 is slidably connected with the inclined ejector guide rod 5713, so as to ensure that the inclined ejector block 5712 is stably matched with the defective tray stopper 572 to clamp the tray.
Referring to fig. 13-15, for example, the testing gripper 54 includes a floating suction head 541, a suction head connecting plate 542, a testing gripper body 543, a suction head translation connecting block 544 and a body lifting connecting block 545, the floating suction head 541 is installed at the lower side of the suction head connecting plate 542, the upper side of the suction head connecting plate 542 is connected with the testing gripper body 543, the body lifting connecting block 545 is movably connected to one side of the testing gripper body 543 in a lifting manner, and the body lifting connecting block 545 is connected with the suction head translation connecting block 544, and the floating suction head 541 is a gripper specially designed for a testing position of a testing machine, is matched with a special tray and the testing position of the testing machine, and plays a role in slowing down chip suction and impact caused when taking chips; the test main frame 53 is provided with a test hand grip translation module 531 and a test hand grip lifting module 532, the test hand grip translation module 531 is connected with the suction head translation connecting block 544, and the test hand grip lifting module 532 is connected with the test hand grip body 543, so that the test hand grip 54 is driven to lift and translate in a single direction through the test hand grip translation module 531 and the test hand grip lifting module 532 respectively.
Referring to fig. 16, exemplarily, the test gripper translation module 531 includes a hand adjusting screw rod 5311, a hand adjusting screw rod connection block 5312, a test gripper translation motor 5313, and a test gripper translation slide rail 5314, where the test gripper translation motor 5313 drives the hand adjusting screw rod connection block 5312 by connecting the hand adjusting screw rod 5311, the hand adjusting screw rod connection block 5312 is connected to the suction head translation connection block 544, the suction head translation connection block 544 is slidably connected to the test gripper translation slide rail 5314 through a slider, the hand adjusting screw rod 5311 is parallel to the test gripper translation slide rail 5314, and the hand adjusting screw rod 5311 can manually adjust a position of the test gripper along an axial direction thereof when the equipment is stopped, so as to achieve translation of the test gripper.
Referring to fig. 17 and 18, for example, the test gripper lifting module 532 includes a lifting screw 5321, a lifting screw connecting block 5322, a lifting motor 5323, and a translational auxiliary connecting block 5324, where the lifting screw connecting block 5322 is connected to the lifting screw 5321, the lifting motor 5323 is connected to the lifting screw 5321 in a driving manner, the translational auxiliary connecting block 5324 is movably mounted on the lifting screw connecting block 5322 through a slider and a slide rail, and the translational auxiliary connecting block 5324 is connected to the test gripper body 543, so that when the lifting motor 5323 rotates, the test gripper can be driven to lift, and can translate while lifting the test gripper body is ensured to lift through the translational auxiliary connecting block 5324, the lifting motor 5323 is mounted on the test main frame 543 through a bracket of a gantry structure and is connected to the lifting screw 5321 through a synchronous belt pulley mechanism, the height of the whole structure can be reduced, meanwhile, the test hand grips 54 on the test main frame 53 are preferably designed to be bilaterally symmetrical, the test hand grip translation module 531 and the test hand grip lifting module 532 are correspondingly symmetrically arranged to be two groups, and therefore the test plate transportation rails are matched with the two groups, and the test efficiency is improved.
Referring to fig. 19, illustratively, the defective gripper moving frame 55 includes a transverse moving frame 551, a longitudinal moving frame 552, a transverse moving motor 553, a transverse synchronous pulley mechanism 554, a longitudinal moving motor 555, and a longitudinal synchronous pulley mechanism 556, the transverse moving frame 551 is vertically erected above the test tray rail frame 51, the transverse moving motor 553 and the transverse synchronous pulley mechanism 554 are installed at the transverse moving frame 551, the longitudinal moving frame 552 is movably connected to the transverse moving frame 551 through slide blocks, the transverse moving motor 553 drives the longitudinal moving frame 552 through the transverse synchronous pulley mechanism 554, the defective sucker module 56 is movably connected to the longitudinal moving frame 552 through slide blocks, the longitudinal moving motor 555 and the longitudinal synchronous pulley mechanism 556 are installed on the longitudinal moving frame 552, the longitudinal moving motor 555 drives the defective sucker module 56 through the longitudinal synchronous pulley mechanism 556, the defective suction cup module 56 can move vertically and horizontally on the defective grasping and moving rack 55 to perform a defective grasping operation, and can cover a plurality of chips of the tray and a plurality of test tray transportation tracks.
Referring to fig. 20, the defective suction cup module 56 illustratively includes a defective suction cup 561, a defective suction cup holder 562, a defective suction cup elevating motor 563, and a defective suction cup link 564, the defective suction cup 561 is mounted at a lower end of the defective suction cup holder 562, one side of the defective suction cup holder 562 is connected to the defective suction cup link 564 through a slide rail slider, the defective suction cup elevating motor 563 is mounted on the defective suction cup link 564, the defective suction cup holder 562 is connected to the defective suction cup elevating motor 563 through a screw nut, the defective suction cup link 564 is connected to the longitudinal moving frame 552 through a slide rail slider, when the defective suction cup elevating motor 563 drives a screw, the defective suction cup holder 562 is moved up and down along a screw axis by the nut, the moving process is more fine and adjustable, and inconvenience that the chips may be collided due to driving by an air cylinder or a telescopic rod is avoided, as the defective products are generally few, the grabbing of the defective products can be completed only by designing a single sucking disc, and the structural complexity is reduced.
In summary, the embodiments of the present invention are characterized in that:
(1) the limit of the testing efficiency of the old chip testing machine is broken through, the chip carrying structure is removed, and the chip testing function of the equipment is brought into full play;
(2) the future development of the testing machine can be met according to the elasticity, and the special material tray is modified according to the difference of the testing machine, so that the service efficiency of the testing machine is highest;
(3) the test machine can be compatible with an old test machine, and the transition of market development is facilitated;
(4) the internal and external test grippers of the equipment can be independently adjusted, so that the debugging difficulty of the equipment is reduced;
(5) the defective chip picking position is separated from the testing position, and the chip disc changing position is separated, so that the mutual interference of the testing action and the disc changing action is effectively avoided, and the highest efficiency operation of the equipment is ensured as far as possible;
(6) the feeding position and the discharging position of the equipment are designed to be of a stacking structure, a large number of material trays can be fed in at one time, and feeding time and material taking time of workers are saved.
The above description is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, various modifications and substitutions can be made without departing from the technical principle of the present invention, and these modifications and substitutions should also be regarded as the protection scope of the present invention.
Claims (10)
1. A chip test equipment, its characterized in that: the device comprises a test tray conveying track, a defective tray conveying track, a test module and a defective chip grabbing module, wherein the test tray conveying track and the defective tray conveying track are arranged in parallel side by side;
the test tray conveying track comprises a test tray track frame, a tray conveying device and a tray positioning device, wherein the tray conveying device and the tray positioning device are installed on the test tray track frame;
the defective plate conveying track comprises a defective plate track frame, a material plate conveying device and a defective plate positioning device, wherein the material plate conveying device is installed on the defective plate track frame and used for conveying defective plates to move on the defective plate track frame, and the defective plate positioning device is used for positioning the defective plates at stations;
the test module comprises a test main frame and a test gripper, the test gripper is movably arranged on the test main frame, and the test gripper is used for picking up a chip to a test position and then placing the chip back to the feed tray;
the defective chip grabbing module comprises a defective grabbing moving frame and a defective sucker module, the defective grabbing moving frame is used for driving the defective sucker module to move horizontally, and the defective sucker module can move in a lifting mode and suck and place chips.
2. The chip testing apparatus of claim 1, wherein: the material tray conveying device comprises a material tray conveying belt and a conveying driver, the material tray positioning device comprises a material tray blocking module, a backward pushing clamping module and a side pushing clamping module, the material tray blocking module and the backward pushing clamping module are respectively installed at the positions of the stations on the test material tray track frame in tandem, and the side pushing clamping module is installed at the side edge of the positions of the stations on the test material tray track frame; the defective plate positioning device comprises an oblique push clamping cylinder and a defective plate blocking block, the defective plate blocking block is installed at two ends of the defective plate track frame, and the oblique push clamping cylinder is installed on the side edge of the station of the defective plate track frame.
3. The chip testing apparatus of claim 2, wherein: the rear pushing and clamping module comprises a rear pushing and clamping base, a rear pushing cylinder, a knocking cylinder, a rear push rod and a knocking head, the rear pushing cylinder and the knocking cylinder are horizontally installed on the rear pushing and clamping base in the same direction, the rear push rod is connected with a piston rod of the rear pushing cylinder, the knocking head is connected with the piston rod of the knocking cylinder, and a knocking plate protrudes out of the rear pushing and clamping base.
4. The chip testing apparatus of claim 2, wherein: the both ends of test charging tray track frame all are provided with the charging tray and pile up spacing, charging tray jacking module, charging tray support module.
5. The chip testing apparatus of claim 2, wherein: the inclined pushing clamping cylinder comprises an inclined pushing cylinder, an inclined pushing support, an inclined pushing block and an inclined pushing guide rod, the inclined pushing cylinder, the inclined pushing block and the inclined pushing guide rod are fixed to the defective plate track frame through the inclined pushing support, a piston rod of the inclined pushing cylinder drives the inclined pushing block to move obliquely, and one side of the inclined pushing block is connected with the inclined pushing guide rod in a sliding mode.
6. The chip testing apparatus according to any one of claims 1 to 5, wherein: the test gripper comprises a floating suction head, a suction head connecting plate, a test gripper body, a suction head translation connecting block and a body lifting connecting block, wherein the floating suction head is arranged on the lower side of the suction head connecting plate, the upper side of the suction head connecting plate is connected with the test gripper body, the body lifting connecting block is movably connected to one side of the test gripper body in a lifting mode, and the body lifting connecting block is connected with the suction head translation connecting plate; the test main frame is provided with a test hand grip translation module and a test hand grip lifting module, the test hand grip translation module is connected with the suction head translation connecting block, and the test hand grip lifting module is connected with the test hand grip body.
7. The chip testing apparatus of claim 6, wherein: the test gripper translation module comprises a hand adjusting screw rod, a hand adjusting screw rod connecting block, a test gripper translation motor and a test gripper translation slide rail, the test gripper translation motor drives the hand adjusting screw rod connecting block through connection, the hand adjusting screw rod connecting block is connected with the suction head translation connecting block, the suction head translation connecting block is in sliding connection with the test gripper translation slide rail through a slide block, and the hand adjusting screw rod is parallel to the test gripper translation slide rail.
8. The chip testing apparatus of claim 6, wherein: the test tongs lifting module comprises a lifting screw rod, a lifting screw rod connecting block, a lifting motor and a translation auxiliary connecting block, wherein the lifting screw rod connecting block is connected to the lifting screw rod, the lifting motor is driven to be connected to the lifting screw rod, the translation auxiliary connecting block is movably installed on the lifting screw rod connecting block through a sliding block and a sliding rail, and the translation auxiliary connecting block is connected with the test tongs body.
9. The chip testing apparatus according to any one of claims 1 to 5, wherein: the substandard product grabbing motion frame comprises a transverse motion frame, a longitudinal motion frame, a transverse moving motor, a transverse synchronous pulley mechanism, a longitudinal moving motor and a longitudinal synchronous pulley mechanism, the transverse motion frame is vertically erected above the test tray track frame, the transverse moving motor and the transverse synchronous pulley mechanism are installed on the transverse motion frame, the longitudinal motion frame is movably connected with the transverse motion frame through a slide rail slider, the transverse moving motor drives the longitudinal motion frame through the transverse synchronous pulley mechanism, the substandard product sucker module is movably connected with the longitudinal motion frame through a slide rail slider, the longitudinal moving motor and the longitudinal synchronous pulley mechanism are installed on the longitudinal motion frame, and the longitudinal moving motor drives the substandard product sucker module through the longitudinal synchronous pulley mechanism.
10. The chip testing apparatus according to any one of claims 1 to 5, wherein: the defective sucker module comprises a defective sucker, a defective sucker frame, a defective sucker lifting motor and a defective sucker connecting frame, the defective sucker is mounted at the lower end of the defective sucker frame, one side of the defective sucker frame is connected with the defective sucker connecting frame through a sliding rail slider, the defective sucker lifting motor is mounted on the defective sucker connecting frame, and the defective sucker frame is connected with the defective sucker lifting motor through a screw nut.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111073454.8A CN113933681B (en) | 2021-09-13 | 2021-09-13 | Chip test equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111073454.8A CN113933681B (en) | 2021-09-13 | 2021-09-13 | Chip test equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113933681A true CN113933681A (en) | 2022-01-14 |
| CN113933681B CN113933681B (en) | 2024-03-08 |
Family
ID=79275774
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111073454.8A Active CN113933681B (en) | 2021-09-13 | 2021-09-13 | Chip test equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113933681B (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114377986A (en) * | 2022-01-20 | 2022-04-22 | 无锡昌鼎电子有限公司 | Chip sorting machine |
| CN114505257A (en) * | 2022-01-18 | 2022-05-17 | 深圳格芯集成电路装备有限公司 | Material distribution method, material distribution device, terminal equipment and computer readable storage medium |
| CN114779051A (en) * | 2022-04-29 | 2022-07-22 | 深圳格芯集成电路装备有限公司 | Chip pressure equipment |
| WO2023179149A1 (en) * | 2022-03-25 | 2023-09-28 | 博众精工科技股份有限公司 | Chip detection and packaging device |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0943311A (en) * | 1995-08-04 | 1997-02-14 | Advantest Corp | Ic test device |
| CN102698969A (en) * | 2012-05-29 | 2012-10-03 | 格兰达技术（深圳）有限公司 | Automatic testing and sorting machine for integrated circuit IC chip |
| CN108957332A (en) * | 2018-05-17 | 2018-12-07 | 张金仙 | Lithium battery finished product detection equipment |
| CN110508500A (en) * | 2019-09-20 | 2019-11-29 | 深圳市标王工业设备有限公司 | Multistation chip testing sorting machine |
| CN212944180U (en) * | 2020-07-06 | 2021-04-13 | 深圳市易胜德机械设备有限公司 | Automatic test equipment for electronic element |
| CN112691938A (en) * | 2020-12-21 | 2021-04-23 | 上海微电机研究所(中国电子科技集团公司第二十一研究所) | Chip tube detection device based on vision and deep learning |
| CN113120609A (en) * | 2021-03-22 | 2021-07-16 | 深圳格芯集成电路装备有限公司 | Chip disk replacing equipment |
-
2021
- 2021-09-13 CN CN202111073454.8A patent/CN113933681B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0943311A (en) * | 1995-08-04 | 1997-02-14 | Advantest Corp | Ic test device |
| CN102698969A (en) * | 2012-05-29 | 2012-10-03 | 格兰达技术（深圳）有限公司 | Automatic testing and sorting machine for integrated circuit IC chip |
| CN108957332A (en) * | 2018-05-17 | 2018-12-07 | 张金仙 | Lithium battery finished product detection equipment |
| CN110508500A (en) * | 2019-09-20 | 2019-11-29 | 深圳市标王工业设备有限公司 | Multistation chip testing sorting machine |
| CN212944180U (en) * | 2020-07-06 | 2021-04-13 | 深圳市易胜德机械设备有限公司 | Automatic test equipment for electronic element |
| CN112691938A (en) * | 2020-12-21 | 2021-04-23 | 上海微电机研究所(中国电子科技集团公司第二十一研究所) | Chip tube detection device based on vision and deep learning |
| CN113120609A (en) * | 2021-03-22 | 2021-07-16 | 深圳格芯集成电路装备有限公司 | Chip disk replacing equipment |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114505257A (en) * | 2022-01-18 | 2022-05-17 | 深圳格芯集成电路装备有限公司 | Material distribution method, material distribution device, terminal equipment and computer readable storage medium |
| CN114505257B (en) * | 2022-01-18 | 2023-02-14 | 深圳格芯集成电路装备有限公司 | Material distribution method, material distribution device, terminal equipment and computer readable storage medium |
| CN114377986A (en) * | 2022-01-20 | 2022-04-22 | 无锡昌鼎电子有限公司 | Chip sorting machine |
| WO2023179149A1 (en) * | 2022-03-25 | 2023-09-28 | 博众精工科技股份有限公司 | Chip detection and packaging device |
| CN114779051A (en) * | 2022-04-29 | 2022-07-22 | 深圳格芯集成电路装备有限公司 | Chip pressure equipment |
| CN114779051B (en) * | 2022-04-29 | 2023-06-20 | 深圳格芯集成电路装备有限公司 | Chip press-testing device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN113933681B (en) | 2024-03-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN113933681A (en) | Chip testing equipment | |
| CN113120609B (en) | Chip disk replacing equipment | |
| CN107737774B (en) | The full-automatic disassembly, cleaning machine of keyboard | |
| CN113401651A (en) | Automatic feeding and testing device for semiconductor element | |
| CN111482374A (en) | Silicon wafer detection sorting machine and sorting method thereof | |
| CN210477810U (en) | Hollow tube laminating equipment | |
| CN113998457B (en) | Multi-chip detection system | |
| CN110550262A (en) | Button cell detects mark packaging all-in-one machine | |
| CN111470312A (en) | Coil body feeding device and method for earphone coil body assembly | |
| CN111136018A (en) | Rotating disc type sorting equipment | |
| CN217432329U (en) | Detection marking device for electronic product | |
| CN114029241A (en) | Soft-packaged electrical core material loading sorting facilities | |
| CN107283165B (en) | Material assembly system is pulled out to first sideslip module of intellectuality of fuel pump automatic assembly line | |
| CN216784881U (en) | Face ID module unloader | |
| CN216441127U (en) | Soft-packaged electrical core material loading sorting facilities | |
| CN116142556A (en) | Paper buttress grabbing device | |
| CN215923683U (en) | Automatic feeding and testing device for semiconductor element | |
| CN218973829U (en) | Automatic change coil motor detection performance device | |
| CN110899791B (en) | IC card slot milling machine and slot milling method | |
| CN112010009B (en) | Battery packaging machine and battery | |
| CN110676199B (en) | High-speed mounting imprinter | |
| CN110899792B (en) | Positioning device of IC card slot milling machine | |
| CN114313766A (en) | Automatic feeding and discharging mechanism of production line | |
| CN110790020A (en) | Correction receiving mechanism and ultra-thin type multi-compatibility receiving flying machine | |
| CN111477559A (en) | Silicon wafer damage detection device and detection method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |