CN113998457B

CN113998457B - Multi-chip detection system

Info

Publication number: CN113998457B
Application number: CN202111071412.0A
Authority: CN
Inventors: 林宜龙; 刘飞; 吴海裕; 唐召来; 张宋儿
Original assignee: Shenzhen Gexin Integrated Circuit Equipment Co ltd
Current assignee: Shenzhen Gexin Integrated Circuit Equipment Co ltd
Priority date: 2021-09-13
Filing date: 2021-09-13
Publication date: 2024-02-02
Anticipated expiration: 2041-09-13
Also published as: CN113998457A

Abstract

The invention discloses a multi-chip detection system, which comprises chip disc changing equipment and chip testing equipment; the chip disc changing equipment comprises a disc changing material disc conveying track and a disc changing module; the tray replacing and transporting rail comprises a tray replacing rail main frame, a tray transporting device and a tray positioning device; the disc changing module comprises a disc changing moving frame and a disc changing gripper; the chip testing equipment comprises a testing tray conveying rail, a defective tray conveying rail, a testing module and a defective chip grabbing module; the test tray conveying rail comprises a test tray rail frame, a tray conveying device and a tray positioning device; the defective disc conveying rail comprises a defective disc rail frame, a material disc conveying device and a defective disc positioning device; the test module comprises a test main frame and a test gripper; the defective chip grabbing module comprises a defective grabbing moving frame and a defective sucker module. The chip detection system has high test efficiency, saves cost, greatly reduces manpower consumption, can be flexibly configured, and has high application value.

Description

Multi-chip detection system

Technical Field

The invention relates to the technical field of semiconductor integrated circuit chip detection equipment, in particular to a multi-chip detection system.

Background

In the production and manufacturing process of the semiconductor integrated circuit chip, the process is fine and complex due to numerous links, and part of the chips are damaged in the manufacturing process, if the damaged chips and normal chips are put in the market at the same time, the market confusion is necessarily caused, so that the chips need to be detected before entering the market.

The traditional chip detection process belongs to a labor-intensive process, a detector picks up chips by using tweezers, the chips are placed on a tester and then pressed manually, chip data are acquired, the traditional chip detection process is being phased out in the market, the most advanced detection mode is to simulate manual detection actions through detection equipment, the efficiency is greatly improved, the chips are picked up by using mechanical grippers, the detection actions can be rapidly and accurately carried out at the same time, meanwhile, the intermittent time between two tests can be very short, the instantaneous detection action speed is improved along with improvement and optimization of the technology, therefore, the part limiting the chip detection efficiency is not a single action speed of a test position of the test equipment, a plurality of chips need to be detected through a series of mechanical equipment actions, at least one mechanical gripper is involved to grasp the chips and the chip loading and conveying process, meanwhile, a tray carrying the chips is also likely to be required to be transported through matching detection equipment, the detection of the chips in a large quantity is mostly carried out through matching of different equipment, meanwhile, the quantity of equipment is easy to operate and control, the labor cost is reduced, and the labor cost is low, and the practical resource is not wasted.

Disclosure of Invention

The purpose of the invention is that: the multi-chip detection system is high in test efficiency, capable of saving cost, greatly reducing manpower consumption and capable of being flexibly configured.

In order to solve the technical problems, the invention provides a multi-chip detection system.

The multi-chip detection system comprises chip disc changing equipment and chip testing equipment;

the chip disc changing device comprises disc changing material disc conveying tracks and disc changing modules, wherein the number of the disc changing material disc conveying tracks is at least two;

the tray replacing and transporting rail comprises a tray replacing rail main frame, a tray transporting device and a tray positioning device, wherein the tray transporting device and the tray positioning device are arranged on the tray replacing rail main frame, the tray transporting device is used for carrying a general tray or a special tray to move on the tray replacing rail main frame, and the tray positioning device is used for positioning the general tray or the special tray;

the disc changing module comprises a disc changing moving frame and a disc changing gripper, wherein the disc changing moving frame is used for driving the disc changing gripper to horizontally move, and the disc changing gripper can grasp a single chip or grasp at least two chips in a way of opening and closing an adjustment interval;

the chip testing equipment comprises a testing tray conveying rail, a defective tray conveying rail, a testing module and a defective chip grabbing module, wherein the testing tray conveying rail and the defective tray conveying rail are arranged in parallel and side by side;

The test tray conveying rail comprises a test tray rail frame, a tray conveying device and a tray positioning device, wherein the tray conveying device and the tray positioning device are arranged on the test tray rail frame, the tray conveying device is used for conveying a tray to move on the test tray rail frame, and the tray positioning device is used for positioning the tray at a station;

the defective product disc conveying rail comprises a defective product disc rail frame, a material disc conveying device and a defective product disc positioning device, wherein the material disc conveying device is arranged on the defective product disc rail frame and used for carrying defective product discs to move on the defective product disc rail frame, and the defective product disc positioning device is used for positioning the defective product discs at stations;

the test module comprises a test main frame and a test gripper, wherein the test gripper is movably arranged on the test main frame and is used for picking up a chip to a test position for testing and then placing the chip back into the material tray;

the defective chip grabbing module comprises a defective chip grabbing moving frame and a defective sucker module, wherein the defective chip grabbing moving frame is used for driving the defective sucker module to horizontally move, and the defective sucker module can move up and down and suck and release chips.

As a preferable scheme of the invention, the tray conveying device comprises a tray conveying belt and a conveying driver, the tray positioning device comprises a tray blocking module, a back pushing clamping module and a side pushing clamping module, the defective tray positioning device comprises an oblique pushing clamping cylinder and defective tray blocking blocks, the defective tray blocking blocks are arranged at two ends of the defective tray rail frame, and the oblique pushing clamping cylinder is arranged at the side edge of a station of the defective tray rail frame.

As a preferable scheme of the invention, the back pushing clamping module comprises a back pushing clamping base, a back pushing air cylinder, a beating air cylinder, a back pushing rod and a beating head, wherein the back pushing air cylinder and the beating air cylinder are horizontally and equidirectionally arranged on the back pushing clamping base, the back pushing rod is connected with a piston rod of the back pushing air cylinder, the beating head is connected with a piston rod of the beating air cylinder, and the back pushing clamping base is provided with a beating plate in a protruding mode.

As a preferable scheme of the invention, the two ends of the test tray track frame are respectively provided with a tray stacking limit frame, a tray jacking module and a tray supporting module, and the two ends of the tray replacing track main frame are also provided with a tray stacking limit frame, a tray jacking module and a tray supporting module.

As a preferable scheme of the invention, the disc changing movement frame comprises a disc changing movement main frame, an arm support, a first disc changing driver, a second disc changing driver and a disc changing gripper connecting block, wherein the disc changing movement main frame and the arm support are horizontally arranged, the arm support is vertically and movably connected with the disc changing movement main frame, the first disc changing driver drives the arm support to move along the disc changing movement main frame, the disc changing gripper connecting block is movably connected with the arm support, and the second disc changing driver drives the disc changing gripper connecting block to move along the arm support.

As a preferred scheme of the invention, the disc changing handle comprises a disc changing handle back plate, a fixed suction nozzle module, an opening and closing driving module and a suction nozzle driving module, wherein the fixed suction nozzle module is fixedly connected with the disc changing handle back plate, the opening and closing suction nozzle module can be movably connected with the disc changing handle back plate in a horizontal manner, the opening and closing driving module drives the opening and closing suction nozzle module to move in a horizontal manner, and the fixed suction nozzle module and the opening and closing suction nozzle module are respectively provided with a suction nozzle which is driven to lift by the suction nozzle driving module.

As a preferred scheme of the invention, the test gripper comprises a floating suction head, a suction head connecting plate, a test gripper trunk, a suction head translation connecting block and a trunk lifting connecting block, wherein the floating suction head is arranged on the lower side of the suction head connecting plate, the upper side of the suction head connecting plate is connected with the test gripper trunk, the trunk lifting connecting block is connected on one side of the test gripper trunk in a lifting and movable manner, and the trunk lifting connecting block is connected with the suction head translation connecting plate; the test main frame is provided with a test gripper translation module and a test gripper lifting module, the test gripper translation module is connected with the suction head translation connecting block, and the test gripper lifting module is connected with the test gripper trunk.

As a preferable scheme of the invention, the defective product grabbing motion frame comprises a transverse motion frame, a longitudinal motion frame, a transverse motion motor, a transverse synchronous belt wheel mechanism, a longitudinal motion motor and a longitudinal synchronous belt wheel mechanism, wherein the transverse motion frame is vertically erected above the test tray track frame, the transverse motion motor and the transverse synchronous belt wheel mechanism are arranged on the transverse motion frame, the longitudinal motion frame is movably connected with the transverse motion frame through a sliding rail sliding block, the transverse motion motor drives the longitudinal motion frame through the transverse synchronous belt wheel mechanism, the defective product sucker module is movably connected with the longitudinal motion frame through the sliding rail sliding block, and the longitudinal motion motor and the longitudinal synchronous belt wheel mechanism are arranged on the longitudinal motion frame and drive the defective product sucker module through the longitudinal synchronous belt wheel mechanism.

As a preferable scheme of the invention, the defective sucker module comprises a defective sucker, a defective sucker frame, a defective sucker lifting motor and a defective sucker connecting frame, wherein the defective sucker is arranged at the lower end of the defective sucker frame, one side of the defective sucker frame is connected with the defective sucker connecting frame through a sliding rail and a sliding block, the defective sucker lifting motor is arranged on the defective sucker connecting frame, and the defective sucker frame is connected with the defective sucker lifting motor through a screw nut.

As a preferable scheme of the invention, the oblique pushing clamping cylinder comprises an oblique pushing cylinder, an oblique pushing support, an oblique pushing jacking block and an oblique pushing guide rod, wherein the oblique pushing cylinder, the oblique pushing jacking block and the oblique pushing guide rod are fixed on the defective tray rail frame through the oblique pushing support, a piston rod of the oblique pushing cylinder drives the oblique pushing jacking block to move obliquely, and one side of the oblique pushing jacking block is connected with the oblique pushing guide rod in a sliding manner.

Compared with the prior art, the multi-chip detection system provided by the embodiment of the invention has the beneficial effects that:

(1) The number of the chip disc changing devices can be flexibly configured according to the chip test efficiency of one chip test device, so that the device cost is saved;

(2) Breaking through the limitation of the traditional chip tester, one chip testing device can exert the performance of the tester extremely;

(3) The chip testing equipment and the chip disc changing equipment can be placed in different places, so that the space utilization rate is high;

(4) When the tester can directly test chips with the density of the universal tray, a chip tray replacing device can be directly eliminated, and the chip testing efficiency of a chip testing device is maximized;

(5) One chip testing device and one chip disc changing device can control the operation of a plurality of devices by one person, so that the manpower resource consumption is reduced;

(6) The set of multi-chip detection system is suitable for the old test machine, and can better provide time for excessive market;

(7) A set of multi-chip detection system is suitable for future testing machines and is beneficial to updating of markets.

Drawings

FIG. 1 is a schematic view of the overall mounting structure of a disc changer of a chip in the present invention;

FIG. 2 is a schematic diagram of an assembled structure of a tray-changing tray conveyor track according to the present invention;

FIG. 3 is a schematic diagram of an assembly structure of a tray barrier module according to the present invention;

FIG. 4 is a schematic diagram of an assembled structure of the push-back clamping module according to the present invention;

FIG. 5 is a schematic diagram of an assembled structure of a side-pushing clamping module according to the present invention;

FIG. 6 is an enlarged schematic view of a partial structure at A in FIG. 2;

FIG. 7 is a schematic diagram of an assembly structure of a tray lifting module according to the present invention;

FIG. 8 is a schematic diagram of an assembly structure of a tray support module according to the present invention;

FIG. 9 is a schematic diagram of an assembled structure of a disc changer of the present invention;

FIG. 10 is a schematic view of an assembled construction of a disc changer grip of the present invention;

FIG. 11 is a schematic diagram of an assembled structure of the opening/closing driving module according to the present invention;

FIG. 12 is a schematic diagram of an assembled structure of a suction nozzle driving module according to the present invention;

FIG. 13 is a schematic diagram of an assembled structure of the opening and closing nozzle module according to the present invention;

FIG. 14 is a schematic diagram showing the general assembly structure of the chip test apparatus of the present invention;

FIG. 15 is a schematic view of an assembled structure of a test tray transportation rail according to the present invention;

FIG. 16 is an enlarged schematic view of a partial structure at F in FIG. 15;

FIG. 17 is a schematic diagram illustrating an assembly structure of another embodiment of a tray support module according to the present invention;

fig. 18 is a schematic diagram of an assembled structure of a defective tray transporting rail according to the present invention;

FIG. 19 is an enlarged schematic view of a partial structure at G in FIG. 18;

FIG. 20 is a schematic view of an assembled structure of the tilt-push clamping cylinder of the present invention;

FIG. 21 is a schematic diagram of an assembled structure of a test module according to the present invention;

FIG. 22 is a partially disassembled schematic illustration of the test module of FIG. 13;

FIG. 23 is a schematic view of an assembled structure of a test grip of the present invention;

FIG. 24 is a schematic diagram of an assembled structure of a test grip translation module according to the present invention;

FIG. 25 is a schematic diagram of an assembled structure of a lifting module of a test grip according to the present invention;

FIG. 26 is a schematic diagram showing the connection of the lift motor structure of the test grip lift module of the present invention;

fig. 27 is a schematic view of an assembled structure of the defective article grabbing motion frame in the present invention;

FIG. 28 is a schematic diagram of an assembly structure of a defective sucker module according to the present invention;

fig. 29 is a schematic view of the overall device layout of a system according to an embodiment of the present invention.

Detailed Description

The following describes in further detail the embodiments of the present invention with reference to the drawings and examples. The following examples are illustrative of the invention and are not intended to limit the scope of the invention.

In the description of the present invention, it should be understood that the terms "mounted," "connected," and "connected" are to be construed broadly in this application, and may be either fixedly connected, detachably connected, or integrally connected, for example, unless otherwise explicitly stated and defined; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.

In the description of the present invention, it should be further understood that the terms "upper," "lower," "left," "right," "front," "rear," "top," "bottom," and the like indicate or are based on the orientation or positional relationship shown in the drawings, merely to facilitate description of the present invention and to simplify the description, and do not indicate or imply that the machine or element in question must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the present invention. It should be understood that the terms "first," "second," and the like are used herein to describe various information, but such information should not be limited to these terms, which are used merely to distinguish one type of information from another. For example, a "first" message may also be referred to as a "second" message, and similarly, a "second" message may also be referred to as a "first" message, without departing from the scope of the invention.

Referring to fig. 1 and 14, the multi-chip testing system according to the embodiment of the present invention includes a chip tray changing apparatus for transferring chips between different trays, and a chip testing apparatus for grabbing chips on a dedicated tray for testing and sorting out failed chips;

the chip disc changing device comprises disc changing material disc conveying tracks and disc changing modules, wherein at least two disc changing material disc conveying tracks are arranged in parallel and side by side, the disc changing modules can span over the disc changing material disc conveying tracks, the two disc changing material disc conveying tracks are respectively used for placing and conveying general material discs and special material discs, and the disc changing modules are used for transferring chips from the general material discs to the special material discs or from the special material discs to the general material discs; through the cooperation operation of the tray changing material tray conveying track and the tray changing module, the corresponding tray changing of chips on a plurality of general material trays to a plurality of special material trays can be continuously realized, and the corresponding tray changing of chips on a plurality of special material trays to a plurality of general material trays can also be continuously realized;

the tray replacing and transporting rail comprises a tray replacing rail main frame 21, a tray transporting device 22 and a tray positioning device, wherein the tray transporting device 22 is arranged on the tray replacing rail main frame 21 and is used for carrying general trays or special trays to move on the tray replacing rail main frame 21, the tray positioning device is used for positioning the general trays or the special trays at a station, and the trays can be transported one by one on the tray replacing transporting rail and adaptively position the trays with different sizes at the station to continuously transfer chips;

The disc changing module comprises a disc changing moving frame 23 and a disc changing gripper 24, the disc changing moving frame 23 is used for driving the disc changing gripper 24 to horizontally move above a disc changing material disc conveying track, the disc changing gripper 24 is used for lifting and grabbing at least two chips with single chips or opening and closing adjustment intervals on a general material disc or a special material disc, the chip placement intervals of different material discs can be adjusted in real time by the disc changing gripper 24 during disc changing, so that chips can be picked and placed correctly each time when the chips are grabbed, and the disc changing efficiency of multiple chips is effectively improved;

the chip testing equipment comprises a testing tray conveying rail, an inferior product tray conveying rail, a testing module and an inferior product chip grabbing module, wherein the testing tray conveying rail and the inferior product conveying rail are arranged in parallel and side by side;

The test tray conveying rail comprises a test tray rail frame 51, a tray conveying device 22 and a tray positioning device, wherein the tray conveying device 22 is arranged on the test tray rail frame 51, the tray conveying device 22 is used for conveying special trays to move on the test tray rail frame 51, the tray positioning device is used for positioning general trays or special trays at stations, the trays can be conveyed one by one on the test tray conveying rail, and the trays can be positioned at the stations in a self-adaptive mode;

the defective product disc conveying rail comprises a defective product disc rail frame 52, a tray conveying device 22 and a defective product disc positioning device, wherein the tray conveying device 22 is arranged on the defective product disc rail frame 52, the tray conveying device 22 is used for conveying defective product discs to move on the defective product disc rail frame 52, and the defective product disc positioning device is used for positioning defective product discs at stations, and the defective product discs are returned to the stations after being filled and conveyed to the replacement stations;

the test module comprises a test main frame 53 and a test gripper 54, wherein the test gripper 54 can be horizontally and vertically movably arranged on the test main frame 53, and the test gripper 54 is used for picking up chips from a special tray on the test tray conveying track to a test position for testing and then placing the chips back into the special tray;

The defective chip grabbing module comprises a defective chip grabbing motion frame 55 and a defective chip sucker module 56, the defective chip grabbing motion frame 55 is used for driving the defective chip sucker module 56 to horizontally move above the test tray conveying track and the defective chip conveying track, the defective chip sucker module 56 can move up and down and suck and release chips, and the defective chip grabbing motion frame 55 moves the defective chip sucker module 56 to a defective chip obtained through detection and then performs sucking and releasing operation, so that the defective chip is transferred from a special tray to a defective tray at a station.

Referring to fig. 2, 6, 15, 16, 18, the tray conveying device 22 includes a tray conveying belt 221 and a conveying driver 222, on the tray changing tray conveying rail, the tray conveying belt 221 is mounted on the tray changing rail main frame 21 and is driven to operate by the conveying driver 222, and the tray conveying belt 221 carries a special tray or a universal tray and correspondingly drags along the tray changing rail main frame 21; the tray conveyor 221 of the test tray conveyor rail is installed at the test tray rail frame 51; the tray conveying belt 221 of the defective tray conveying rail is mounted on the defective tray rail frame 52, the tray conveying belt 221 is driven by the conveying driver 222 to operate, and the tray conveying belt 221 carries a special tray to correspondingly move along the rail frame; the tray replacing rail main frame 21 and the sample detecting tray rail frame 51 of the defective tray rail frame 52 are rectangular frame structures, the tray conveying device 22 in the sample detecting tray conveying rail is preferably arranged on the sample detecting tray rail frame 51 along the conveying direction, at least two groups of tray conveying belts 221 and conveying drivers 222 are distributed on the sample detecting tray rail frame 51, so that independent conveying or driving is provided for a test grabbing station and a defective product picking station respectively, each group of tray conveying belts 221 are provided with two and can be rotatably mounted on the inner side wall surfaces of the tray replacing rail main frame 21, the defective product tray rail frame 52 or the test tray rail frame 51 respectively, the conveying drivers 222 comprise motors, motor pulleys and rail pulleys connected with the motors, one ends of the tray conveying belts 221 are matched and sleeved with the rail pulleys, the motor pulleys and the rail pulleys on one side are connected and the two sides of the tray conveying belts through driving belts, the motor pulleys are connected with the rail belt shafts on the two sides, and accordingly, the motor conveying belts are started to rotate, and the tray conveying belts are arranged on the tray conveying belts, when the tray conveying belts 21 are arranged on the tray main frame 21, the chips are continuously conveyed to the two sides of the tray conveying belts 52, and the chips are continuously arranged on the tray conveying frames, and the tray conveying belts can continuously move along the two sides of the tray conveying belts 52, and the chip is continuously arranged on the tray conveying frames and the tray conveying belts are correspondingly arranged on the tray conveying frames 52.

Referring to fig. 2 and 15, the tray positioning device includes a tray blocking module 31, a push-back clamping module 32 and a side push clamping module 33, preferably two groups of the tray blocking module 31, the push-back clamping module 32 and the side push clamping module 33 are arranged on the tray transporting rail, and the tray blocking module 31 and the push-back clamping module 32 are respectively arranged on the positions of the rail frame in tandem, and the side push clamping module 33 is arranged on the side of the positions of the rail frame, when the tray is transported to the positions of the tray changing rail main frame 21, the test tray rail frame 51 or the defective tray rail frame 52, the tray blocking module 31 blocks the tray firstly, and simultaneously the push clamping module 32 presses the tray from the other end of the tray to clamp the tray, and simultaneously the side push clamping module presses the tray from the side rail to the other side to clamp the tray, so that the side push clamping module can move to the positions of the push clamping module 32 by the push-back clamping module by the corresponding push clamping mechanism or the push clamping mechanism.

Referring to fig. 3, the tray blocking module 31 includes a blocking base 311, a blocking cylinder 312, a blocking frame 313, a blocking piece 314, a blocking sliding rail 315, and a blocking slider 316, wherein the blocking base 311 is L-shaped, the blocking cylinder 312 and the blocking sliding rail 315 are respectively vertically installed at two sides of the blocking base 311, the blocking frame 313 is a rectangular plate, an upper end of the blocking frame 313 is connected with a piston rod of the blocking cylinder 312, a lower inner side of the blocking frame 313 is connected with the blocking slider 316 and is slidingly connected with the blocking sliding rail 315, and the blocking piece 314 is installed on an outer side of a lower end of the blocking frame 313, so that when the tray blocking module 31 extends out of the blocking piece 314 in an upward direction at a lower portion of a middle of the rail frame, a tray can be blocked.

Referring to fig. 4, by way of example, the back-pushing clamping module 32 includes a back-pushing clamping base 321, a back-pushing cylinder 322, a beating cylinder 323, a back push rod 324 and a beating head 325, the back-pushing cylinder 322 and the beating cylinder 323 are horizontally installed on the back-pushing clamping base 321 in the same direction, the back push rod 324 is connected with a piston rod of the back-pushing cylinder 322, the beating head 325 is connected with a piston rod of the beating cylinder 323, the back-pushing clamping base 321 is protruded with a beating plate 3211, the beating cylinder 323 drives the beating head 325 to beat the beating plate 3211, so that when a tray is blocked by the tray blocking module 31, the back-pushing cylinder 322 drives the back push rod 324 to horizontally move so as to press the tray to the tray blocking module 31 to realize back-pushing clamping, and then the beating cylinder 323 drives the beating head to horizontally beat the beating plate 3211, so that the back-pushing clamping module 32 can vibrate the tray, namely, the tray can be placed in the tray or the wrong chip, and the chip can not be set up to the correct beating speed and the chip can not be set up due to the fact that the correct beating speed is not enough.

Referring to fig. 5, the side pushing clamping module 33 includes a side pushing cylinder 331, a side pushing base 332, and a side pushing rod 333, where the side pushing base 332 is fixedly connected to the rail frame, the side pushing cylinder 331 is fixed on the side pushing base 332, a piston rod of the side pushing cylinder 331 is connected to the side pushing rod 333, and the side pushing rod 333 is driven by the side pushing cylinder 331 to push against one side edge of the general purpose tray or the special purpose tray, so that the other side edge of the general purpose tray or the special purpose tray is tightly attached to a side plate of the rail frame; the blocking base 311 and the push-back clamping base 321 may be fixed to a rail frame.

Referring to fig. 2, 6, 15 and 16, for example, the two ends of the test tray rail frame 51 are respectively provided with a tray stacking limit frame 41, a tray jacking module 42 and a tray supporting module 43, the two ends of the tray replacing rail main frame 21 are also provided with a tray stacking limit frame 41, a tray jacking module 42 and a tray supporting module 43, the tray can be placed along the tray stacking limit frame 41 at one end of the test tray rail frame 51 or the tray replacing rail main frame 21 in a stacking manner, the tray jacking module 42 can jack up or down the tray, the tray supporting module 43 can suspend the tray above once, the tray can be released from the stacking one by one or stacked one by one at any end of the test tray rail frame 51 or the tray replacing rail main frame 21, and meanwhile, the tray conveying device 22 can be bidirectionally stacked, released, and then stacked and collected, so as to realize bidirectional conveying.

Referring to fig. 2 and 15, the tray stacking limiting frame 41 includes four vertical rectangular strips, the four rectangular strips are distributed at four corners, when the tray jacking module 42 jacks up the tray from the test tray rail frame 51 or the tray replacing rail main frame 21, the four corners can be lifted up corresponding to the four rectangular strips, or the stacked tray is lowered down along the four rectangular strips one by one, so that the tray can be lifted down along the tray stacking limiting frame 41 to realize stacking collection or release, and because the four rectangular strips are respectively arranged at two ends of the test tray rail frame 51 or the tray replacing rail main frame 21, preferably, the rectangular strips on the outer side are shorter than the rectangular strips on the inner side, so that the stacked tray can be conveniently taken and placed.

Referring to fig. 2, 6, 7, 15 and 16, the tray lifting module 42 is exemplarily disposed under the two end stations of the test tray rail frame 51 or the tray changing rail main frame 21, the tray lifting module 42 includes a lifting driver 421, a lifting base 422, a lifting rack 423 and a lifting guide rod mechanism 424, one ends of the lifting driver 421 and the lifting guide rod mechanism 424 are mounted on the lifting base 422, the lower side of the lifting rack 423 is connected with the other end of the lifting guide rod mechanism 424, the other end of the lifting driver 421 is in driving connection with the lifting rack 423, the lifting base 422 may be mounted under the two ends of the test tray rail frame 51 or the tray changing rail main frame 21, the lifting driver 421 may be a power cylinder or a motor, preferably, the lifting driver 421 is a motor and is connected with the lifting rack 423 through a roller screw mechanism or other transmission mechanism converting linear motion, and the lifting guide rod mechanism 424 is simultaneously assisted by the lifting guide rod mechanism 423.

Referring to fig. 2, 6, 8 and 15, the tray supporting module 43 includes a supporting driver 431, a supporting base 432 and a supporting bracket 433, the supporting driver 431 may be a power cylinder or an electric telescopic rod, the supporting driver 431 is installed on the supporting base 432, the supporting driver 431 drives the supporting bracket 433 to horizontally move, when the tray lifting module 42 supports the tray, the supporting bracket 433 moves backwards to avoid the bayonet specially used by the lower clamping tray, when the tray lifting module lifts up and down, the supporting bracket 433 extends out of the bayonet specially used by the corresponding clamping tray, so as to support the stacked tray, the tray supporting module 43 can drop the tray or jack the next tray under the stacked tray, the supporting driver 431 is preferably an air cylinder, the supporting base 432 is preferably L-shaped, and the front end of the supporting bracket 433 is preferably provided with a spade-shaped bracket matched with the bayonet inserted into the side edge of the tray.

Referring to fig. 15-17, the tray supporting module 43 further includes a supporting base 434 and a rotatable supporting bracket 435, wherein the rear end of the rotatable supporting bracket 435 is rotatably connected with the supporting base 434, the rotatable supporting bracket 435 is rotatable upwards and the bottom side is supported and abutted by the upper end surface of the supporting base 434, preferably the front end lower side of the rotatable supporting bracket 435 is provided with a slope, the rotatable supporting bracket 435 is naturally pushed upwards from the lower side when the tray is lifted by the tray lifting module 42 until the tray falls down and returns, the tray lifting module 42 descends to naturally support the tray, thereby realizing the one-way ascending stacking of the trays by a simpler structure, and the tray is more arranged at the tail end of the test tray rail frame 51.

Referring to fig. 18 and 19, exemplary, the defective tray positioning device includes a diagonal pushing clamping cylinder 571 and a defective tray blocking block 572, the defective tray blocking block 572 is installed at both ends of the defective tray rail frame 52, the diagonal pushing clamping cylinder 571 is installed at a side of a defective tray collecting station of the defective tray rail frame 52, the defective tray blocking block 572 is used for blocking defective trays at any end position of the defective tray rail frame 52, and the diagonal pushing clamping cylinder 571 is used for clamping defective trays or trays located at a defective tray collecting station in cooperation with the defective tray blocking block 572.

Referring to fig. 20, the diagonal pushing clamping cylinder 571 includes a diagonal pushing cylinder 5711, a diagonal pushing bracket 5714, a diagonal pushing block 5712 and a diagonal pushing guide bar 5713, the diagonal pushing cylinder 5711, the diagonal pushing block 5712 and the diagonal pushing guide bar 5713 are fixed to the defective tray rail frame 52 through the diagonal pushing bracket 5714, a piston rod of the diagonal pushing cylinder 5711 drives the diagonal pushing block 5712 to move obliquely, and one side of the diagonal pushing block 5712 is connected with the diagonal pushing guide bar 5713 in a sliding manner, so that the diagonal pushing block 5712 is ensured to clamp a tray in a matched manner with the defective tray blocking block 572.

Referring to fig. 9, an exemplary disc changer 23 includes a disc changer moving main frame 231, an arm support 233, a first disc changer driver 234, a second disc changer driver 235, and a disc changer gripper connection block 236 for connecting the disc changer gripper 24, wherein the disc changer moving main frame 231 and the arm support 233 are horizontally disposed, and the arm support 233 is vertically and movably connected to the disc changer moving main frame 231, the first disc changer driver 234 drives the arm support 233 to move along the disc changer moving main frame 231, the disc changer gripper connection block 236 is movably connected to the arm support 233, the second disc changer driver 235 drives the disc changer gripper connection block 236 to move along the arm support 233, the disc changer moving main frame 231 is perpendicular to the disc changer moving track, the arm support 233 is parallel to the disc changer moving track, and the disc changer gripper 236 is moved in the same direction as the disc changer moving track, and the disc changer gripper connection block 236 is horizontally connected to the disc changer gripper connection block 24 through the arm support 233; the first disc changer 234 is a motor fixedly connected to the disc changer motion main frame 231, a motor shaft of the motor is connected with an end part of the arm support 233 through a synchronous belt, the motor shaft of the first disc changer 234 is driven by the synchronous belt to reciprocate by the arm support 233, the first disc changer 234 is arranged at one end of the disc changer motion main frame 231, a driven wheel is arranged at the other end of the disc changer motion main frame 231, the synchronous belt can be tensioned and pulled through a motor and a driven wheel, so that the cost is saved, in addition, the first disc changer 234 can also be an air cylinder, a hydraulic cylinder or an electric telescopic rod, the second disc changer 235 is a motor fixedly connected to the arm support 233, the motor shaft of the motor is connected with the disc changer gripper connecting block 236 through the synchronous belt, and the motor shaft of the second disc changer 235 is driven by the synchronous belt to reciprocate by the disc changer gripper connecting block 236, and the driven wheel is also arranged on the arm support 233 to cooperate with the tensioning motor and the synchronous belt; the arm support 233 is movably connected with the disc changing motion main frame 231 through a sliding block guide rail, the disc changing gripper connecting block 236 is also movably connected with the arm support 233 through a sliding block guide rail, or the disc changing gripper 24 is connected with the disc changing gripper connecting block 236 and is movably connected with the arm support 233 through a sliding block guide rail, so that the moving accuracy and stability are realized; the disc changer motion frame 23 further includes a disc changer motion sub-frame 232, the disc changer motion sub-frame 232 is parallel to the disc changer motion main frame 231, two ends of the arm support 233 are respectively and vertically movably connected with the disc changer motion main frame 231 and the disc changer motion sub-frame 232, and the arm support 233 is supported by the disc changer motion main frame 231 in parallel, so that the arm support 233 has a better supporting structure and moves more stably; two driven wheels are arranged on the disc-changing motion sub-frame 232 and are connected with the other end of the arm support 233 through a synchronous belt drive, one driven wheel on the disc-changing motion sub-frame 232 is linked with the driven wheel on the disc-changing motion main frame 231 through a disc-changing linkage shaft 237, and therefore the two ends of the arm support 233 can be synchronously driven to realize movement only through the driving of the first disc-changing driver 234; the arm support 233 is also movably connected to the disc changing motion sub-frame 232 through a slider guide rail.

Referring to fig. 10, the disc changer gripper 24 includes a disc changer gripper backboard 241, a fixed nozzle module 242, an opening and closing nozzle module 243, an opening and closing driving module 244 and a nozzle driving module 245, the disc changer gripper backboard 241 is fixedly connected with the disc changer gripper connection block 236, the disc changer gripper 24 is movably connected with the arm support 233, the fixed nozzle module 242 is fixedly connected with the disc changer gripper backboard 241, the opening and closing nozzle module 243 is movably connected with the disc changer gripper backboard 241, the opening and closing driving module 244 drives the opening and closing nozzle module 243 to move horizontally, the fixed nozzle module 242 and the opening and closing nozzle module 243 are provided with nozzles which are driven to move up and down by the nozzle driving module 245, the opening and closing driving module 244 and the nozzle driving module 245 can be driven by a hydraulic cylinder or an air cylinder to realize linear reciprocating movement, the opening and closing suction nozzle module 243 can be moved by a transmission mechanism, the horizontal opening and closing movement of the suction nozzle module 243 relative to the fixed suction nozzle module 242 can be realized by a sliding groove, a sliding rod or other loose joint structure connected to the disc changing handle back plate 241, the opening and closing driving module 244 can correspondingly drive the opening and closing suction nozzle module 243, the suction nozzles of the fixed suction nozzle module 242 and the opening and closing suction nozzle module 243 can be guided and lifted by sliding sleeves or other similar structures, the suction nozzle driving module 245 can respectively and correspondingly arrange two or more suction nozzles for synchronously driving the fixed suction nozzle module 242 and the opening and closing suction nozzle module 243, or can simultaneously drive two or more suction nozzles by a linkage mechanism, thereby the disc changing handle 24 can automatically and properly perform a plurality of grabbing according to the specification of the chip placement position of the disc changing handle, even if the chip placement positions of the general tray and the special tray are different in distance, the tray changing gripper 24 can be correspondingly adjusted to flexibly perform efficient actions of simultaneously gripping a plurality of chips.

Referring to fig. 11, for example, the tray replacing gripper backboard 241 is movably connected with the opening and closing suction nozzle module 243 through a horizontal sliding rail mechanism, the opening and closing driving module 244 includes an opening and closing motor 2441, an opening and closing belt pulley 2442, an opening and closing driving belt 2443 and an opening and closing driven wheel 2444, the opening and closing motor 2441 is fixedly connected with the tray replacing gripper backboard 241, a motor shaft of the opening and closing motor 2441 is connected with the opening and closing belt pulley 2442, the opening and closing driven wheel 2444 is rotatably mounted on the tray replacing gripper backboard 241, two ends of the opening and closing driving belt 2443 are respectively connected with the opening and closing belt pulley 2442 and the opening and closing driven wheel 2444, and the opening and closing driving belt 2443 is horizontally in transmission connection with the opening and closing suction nozzle module 243, so that the opening and closing motor 2441 can easily drive the opening and closing suction nozzle module 243 to open and close the spacing relative to the fixed suction nozzle module 242, the opening and closing motor 2441 can also be realized through connecting a horizontal screw rod and the opening and closing suction nozzle module 243 through a nut. The opening and closing suction nozzle modules 243 are at least two in parallel, the opening and closing belt pulley 2442, the opening and closing driving belt 2443 and the opening and closing driven wheel 2444 are at least two in correspondence, the motor shaft of the opening and closing motor 2441 is connected with at least two opening and closing belt pulleys 2442 in series, the opening and closing driving belt 2443 and the opening and closing driven wheel 2444 are distributed up and down, and the opening and closing belt pulleys 2442 are correspondingly provided with a diameter difference according to the distance difference between the connected opening and closing suction nozzle modules 243 and the fixed suction nozzle module 242, and the moving speed difference of the opening and closing driving belt 2443 is generated due to the diameter difference of the opening and closing belt pulleys 2442, so that the diameter difference of the opening and closing belt pulleys 2442 is designed through corresponding distance and speed calculation, and the opening and closing of the opening and closing suction nozzle modules 243 can be opened and closed at equal distances on one side relative to the fixed suction nozzle module 242.

Referring to fig. 10-12, for example, the suction nozzle driving module 245 has at least two suction nozzle driving modules 242 and a suction nozzle opening and closing module 243, the suction nozzle driving module 245 includes a suction nozzle driving motor 2451, a suction nozzle driving belt 2452 and two suction nozzle driving pulleys 2453, the two suction nozzle driving pulleys 2453 are mounted on the tray replacing gripper backboard 241 one by one, two suction nozzle driving pulleys 2453 are connected to two ends of the suction nozzle driving belt 2452, the suction nozzle driving motor 2451 is fixedly connected to the rear side of the tray replacing gripper backboard 241, a motor shaft of the suction nozzle driving motor 2451 is connected to one of the suction nozzle driving pulleys 2453, and the suction nozzle driving belt 2452 is connected to the fixed suction nozzle module 242 or the suction nozzle opening and closing module 243, thereby driving the fixed suction nozzle module 242 or the suction nozzle opening and closing module 243 to lift very fast.

Referring to fig. 10, for example, at least two nozzle dropping protection pieces 246 respectively connected to the fixed nozzle module 242 and the opening and closing nozzle module 243 are further disposed on the tray changing gripper backboard 241, one end of the nozzle dropping protection piece 246 is connected to the tray changing gripper backboard 241, the other end of the nozzle dropping protection piece 246 is connected to the fixed nozzle module 242 or the opening and closing nozzle module 243, and the nozzle dropping protection piece 246 makes the fixed nozzle module 242 or the opening and closing nozzle module 243 buffered when sliding down due to gravity, so as to avoid hard collision or impact damage to the chip. The suction nozzle falling protector 246 is preferably a tension spring, the upper end of the tension spring is connected to the upper end of the disc changing handle back plate 241, the lower end of the tension spring is connected to the fixed suction nozzle module 242 or the opening and closing suction nozzle module 243, and the tension spring is vertically and elastically tensioned when the fixed suction nozzle module 242 or the opening and closing suction nozzle module 243 descends.

Referring to fig. 10 and 13, an exemplary embodiment of the present invention, the opening and closing suction nozzle module 243 includes a second suction nozzle module lower mount 2431, a second suction nozzle module upper mount 2432, a second suction nozzle module main frame 2433, and an opening and closing lateral guide 2434, the second suction nozzle module lower mount 2431 is horizontally movably connected to the disc changer gripper backplate 241 through a slide rail mechanism, the second suction nozzle module upper mount 2432 is vertically movably connected to the disc changer gripper backplate 241 through a slide rail mechanism, the second suction nozzle module main frame 2433 is vertically movably connected to the second suction nozzle module lower mount 2431 through a slide rail mechanism, the opening and closing lateral guide 2434 is horizontally mounted on the second suction nozzle module upper mount 2432, the second suction nozzle module main frame 2433 is slidably connected to the opening and closing lateral guide 2434, preferably, the upper end of the second suction nozzle module main frame 2433 is clamped to the opening and closing lateral guide 2434 through two rotating pins, when the second suction nozzle module main frame 243 is horizontally moved to the opening and closing the second suction nozzle module main frame 2433, and the second suction nozzle module 2433 is simultaneously driven to be horizontally connected to the upper end of the second suction nozzle module lower mount 2433, and the second suction nozzle module 2433 is simultaneously driven to be horizontally connected to the upper end of the lower suction nozzle module support 2433; the fixed suction nozzle module 242 comprises a first suction nozzle module lower mounting seat, a first suction nozzle module upper mounting seat and a first suction nozzle module main frame, and is identical to the opening and closing suction nozzle module 243 in structure, the first suction nozzle module lower mounting seat is connected to the first suction nozzle module main frame in a lifting manner through a sliding block sliding rail mechanism, the upper end of the first suction nozzle module main frame is connected with the suction nozzle falling protection piece 246, an air nozzle is mounted at the lower end of the first suction nozzle module main frame, the first suction nozzle module upper mounting seat is fixedly connected with the first suction nozzle module main frame, and the first suction nozzle module lower mounting seat is fixedly connected with the disc changing handle backboard 241.

Referring to fig. 21-23, by way of example, the test grip 54 includes a floating tip 541, a tip connection plate 542, a test grip trunk 543, a tip translation connection block 544, and a trunk lifting connection block 545, the floating tip 541 is mounted on the lower side of the tip connection plate 542, the upper side of the tip connection plate 542 is connected to the test grip trunk 543, the trunk lifting connection block 545 is connected to one side of the test grip trunk 543 in a lifting manner, and the trunk lifting connection block 545 is connected to the tip translation connection block 544, the floating tip 541 is a grip specially designed for a test site of a tester, and is matched with a special tray and the test site of the tester, and plays a role in slowing down the impact caused when sucking a chip and reducing the chip; the test main frame 53 is provided with a test gripper translation module 531 and a test gripper lifting module 532, the test gripper translation module 531 is connected with the suction head translation connection block 544, and the test gripper lifting module 532 is connected with the test gripper trunk 543, so that the test gripper 54 is respectively driven to lift and unidirectionally translate by the test gripper translation module 531 and the test gripper lifting module 532.

Referring to fig. 21, 22 and 24, an exemplary test gripper translation module 531 includes a hand screw 5311, a hand screw connection block 5312, a test gripper translation motor 5313 and a test gripper translation slide rail 5314, the test gripper translation motor 5313 drives the hand screw connection block 5312 through connecting the hand screw 5311, the hand screw connection block 5312 is connected with the suction head translation connection block 544, the suction head translation connection block 544 is in sliding connection with the test gripper translation slide rail 5314 through a sliding block, the hand screw 5311 is parallel to the test gripper translation slide rail 5314, and the hand screw 5311 can manually adjust the position of the test gripper along the axial direction thereof when the equipment is stopped, so that the translation of the test gripper is well realized.

Referring to fig. 21, 22 and 25, 26, an exemplary test gripper lifting module 532 includes a lifting screw 5321, a lifting screw connecting block 5322, a lifting motor 5323 and a translation auxiliary connecting block 5324, wherein the lifting screw connecting block 5322 is connected to the lifting screw 5321, the lifting motor 5323 is in driving connection with the lifting screw 5321, the translation auxiliary connecting block 5324 is movably installed on the lifting screw connecting block 5322 through a sliding block and a sliding rail, the translation auxiliary connecting block 5324 is connected with a test gripper trunk 543, when the lifting motor 5323 rotates to drive the test gripper trunk 543 to lift, the test gripper trunk 543 can be translated while being lifted through the translation auxiliary connecting block 5324, the lifting motor 5323 is installed on the test main frame 53 through a bracket of a portal frame structure, and then is connected with the lifting screw 5321 through a synchronous pulley mechanism, so that the height of the whole structure can be reduced, simultaneously, the test grippers 54 on the test main frame 53 are preferably designed to be in two groups of left and right symmetry, the test gripper and the test gripper module 531 and the test gripper module are also symmetrically arranged to form two groups of test gripper rails, so that the test gripper lifting module and the test gripper can be matched with the two groups of test gripper rails, and the test gripper lifting module can be lifted by the test gripper lifting module.

Referring to fig. 27, an exemplary defective product grabbing motion frame 55 includes a lateral motion frame 551, a longitudinal motion frame 552, a lateral motion motor 553, a lateral synchronous pulley mechanism 554, a longitudinal motion motor 555 and a longitudinal synchronous pulley mechanism 556, wherein the lateral motion frame 551 is vertically erected above the test tray rail frame 51, the lateral motion motor 553 and the lateral synchronous pulley mechanism 554 are installed on the lateral motion frame 551, the longitudinal motion frame 552 is movably connected with the lateral motion frame 551 through a sliding rail slider, the lateral motion motor 553 drives the longitudinal motion frame 552 through the lateral synchronous pulley mechanism 554, the defective product suction cup module 56 is movably connected with the longitudinal motion frame 552 through the sliding rail slider, the longitudinal motion motor 555 and the longitudinal synchronous pulley mechanism 556 are installed on the longitudinal motion frame 552, the longitudinal motion motor 555 drives the defective product suction cup module 56 through the longitudinal synchronous pulley mechanism 556, and the defective product suction cup module 56 can move vertically and horizontally on the defective product grabbing motion frame 55 to perform a defective product sucking motion, and simultaneously cover a plurality of chips and a plurality of test tray rails.

Referring to fig. 28, an exemplary defective suction cup module 56 includes a defective suction cup 561, a defective suction cup holder 562, a defective suction cup lifting motor 563 and a defective suction cup connection holder 564, the defective suction cup 561 is mounted at a lower end of the defective suction cup holder 562, one side of the defective suction cup holder 562 is connected with the defective suction cup connection holder 564 through a sliding rail slider, the defective suction cup lifting motor 563 is mounted on the defective suction cup connection holder 564, the defective suction cup holder 562 is connected with the defective suction cup lifting motor 563 through a screw nut, the defective suction cup connection holder 564 is connected with the longitudinal movement holder 552 through a sliding rail slider, when the defective suction cup lifting motor 563 drives a screw, the defective suction cup holder 562 is moved up and down along a screw axis direction, the moving process is more fine and smooth and adjustable, inconvenience that a collision chip may be caused by driving of a cylinder or a telescopic rod is avoided, and as defective suction cups can be gripped only by a single design in general, and structural complexity is reduced.

The chip disc changing equipment can realize the action of changing the chips on the universal material disc into the special material disc and also realize the action of changing the chips on the special material disc into the universal material disc; the tray can be adaptively positioned in the station, and the position of the chip on the tray can be guided by tapping; the disc-changing gripper can be opened and closed, is suitable for chips or trays with various specifications, and has high flexibility; the disc replacement process can be carried out by a plurality of grippers at the same time, so that the disc replacement efficiency of the chip is effectively improved; the disc changing movement frame ensures high moving positioning precision and good moving stability of the disc changing gripper; the tray-changing tray conveying track can be used for changing trays or changing the direction conveying direction, the flexibility is good, the material inlet positions and the material outlet positions at two ends of the track are of a stacking structure design, a large number of trays can be fed at one time, and feeding time and material taking time of workers are saved.

The chip testing device of the invention is characterized in that: breaking the limitation of the testing efficiency of the old chip testing machine, removing the chip carrying structure, and exerting the chip testing function of the equipment to the greatest extent; the future development of the testing machine can be met according to the elasticity, and the special material disc can be modified according to the different testing machines, so that the service efficiency of the testing machine is highest; the device is compatible with an old testing machine, and is beneficial to the transition of market development; the internal and external test grippers of the equipment can be independently adjusted, so that the debugging difficulty of the equipment is reduced; the defective chip picking position is separated from the testing position, and the chip disc changing position is separated, so that the mutual interference of the testing action and the disc changing action is effectively avoided, and the highest-efficiency operation of the equipment is ensured as much as possible; the material feeding position and the material discharging position of the equipment are designed in a stacking structure, a large number of trays can be fed at one time, and the feeding time and the material taking time of workers are saved.

The multi-chip detection system provided by the invention tests chips through the multi-chip test equipment, the chips enter the equipment through the special material disc according to the design of the chip placement position of the tester, one multi-chip test equipment can preferably grasp all the chips on the special material disc through the test grippers at one time, uniformly test the chips, and after the test is finished, the chips are put back into the special material disc again and are sent out of the equipment; a set of multi-chip detection system carries out disc replacement between a general material disc and a special material disc through a plurality of chip disc replacement devices, one chip disc replacement device can be used for disc replacement between the general material disc and the special material disc, and also can be used for disc replacement between the special material disc and the general material disc, if the test machine is further optimized, the original chip disc replacement device is insufficient in quantity, the chip disc replacement device can be directly added, one chip test device does not need to be improved and designed, the flexibility of the system is improved, and referring to fig. 29, the multi-chip detection system is matched with two chip disc replacement devices from the middle one chip test device.

In summary, the multi-chip detection system of the present invention can achieve the following effects:

The foregoing is merely a preferred embodiment of the present invention, and it should be noted that modifications and substitutions can be made by those skilled in the art without departing from the technical principles of the present invention, and these modifications and substitutions should also be considered as being within the scope of the present invention.

Claims

1. The multi-chip detection system is characterized in that: the device comprises a chip disc changing device and a chip testing device;

the chip testing equipment comprises a testing tray conveying rail, an inferior product tray conveying rail, a testing module and an inferior product chip grabbing module, wherein the testing tray conveying rail and the inferior product tray conveying rail are arranged in parallel and side by side, and the testing tray conveying rail is provided with two groups and is arranged on two sides of the inferior product tray conveying rail;

the defective chip grabbing module comprises a defective chip grabbing moving frame and a defective sucker module, wherein the defective chip grabbing moving frame is used for driving the defective sucker module to horizontally move, and the defective sucker module can move up and down and suck and discharge chips;

the inferior product disc positioning device comprises an oblique pushing clamping cylinder and inferior product disc blocking blocks, wherein the inferior product disc blocking blocks are arranged at two ends of the inferior product disc track frame, and the oblique pushing clamping cylinder is arranged at the side edge of the station of the inferior product disc track frame;

The test gripper comprises a floating suction head, a suction head connecting plate, a test gripper trunk, a suction head translation connecting block and a trunk lifting connecting block, wherein the floating suction head is arranged on the lower side of the suction head connecting plate, the upper side of the suction head connecting plate is connected with the test gripper trunk, the trunk lifting connecting block is connected to one side of the test gripper trunk in a lifting and movable manner, and the trunk lifting connecting block is connected with the suction head translation connecting plate; the test main frame is provided with a test gripper translation module and a test gripper lifting module, the test gripper translation module is connected with the suction head translation connecting block, and the test gripper lifting module is connected with the test gripper trunk;

the test grippers on the test main frame are provided with two groups which are bilaterally symmetrical, the test gripper translation module and the test gripper lifting module are correspondingly and symmetrically provided with two groups, and the test tray conveying rails are provided with two groups in a matched manner;

the inferior product sucker module comprises an inferior product sucker, an inferior product sucker frame, an inferior product sucker lifting motor and an inferior product sucker connecting frame, wherein the inferior product sucker is arranged at the lower end of the inferior product sucker frame, one side of the inferior product sucker frame is connected with the inferior product sucker connecting frame through a sliding rail and a sliding block, the inferior product sucker lifting motor is arranged on the inferior product sucker connecting frame, and the inferior product sucker frame is connected with the inferior product sucker lifting motor through a screw nut;

The oblique pushing clamping cylinder comprises an oblique pushing cylinder body, an oblique pushing support, an oblique pushing jacking block and an oblique pushing guide rod, wherein the oblique pushing cylinder body, the oblique pushing jacking block and the oblique pushing guide rod are fixed on the defective tray track frame through the oblique pushing support, a piston rod of the oblique pushing cylinder body drives the oblique pushing jacking block to move obliquely, and one side of the oblique pushing jacking block is connected with the oblique pushing guide rod in a sliding mode.

2. The multi-chip detection system of claim 1, wherein: the tray conveying device comprises a tray conveying belt and a conveying driver, and the tray positioning device comprises a tray blocking module, a back pushing clamping module and a side pushing clamping module.

3. The multi-chip detection system of claim 2, wherein: the back pushes away and presss from both sides tight module and includes back pushing away and presss from both sides tight base, back pushing away the cylinder, beats the cylinder, back push rod and beat the head, back pushing away the cylinder with beat the cylinder level and install with the syntropy back pushing away on pressing from both sides tight base, back push rod connect with back push cylinder's piston rod is connected, beat the head with beat the piston rod of beating the cylinder and be connected, back pushing away and pressing from both sides tight base arch and have the knocking board.

4. The multi-chip detection system of claim 2, wherein: the tray stacking and limiting device is characterized in that tray stacking and limiting frames, tray jacking modules and tray supporting modules are arranged at two ends of the tray testing track frame, and tray stacking and limiting frames, tray jacking modules and tray supporting modules are also arranged at two ends of the tray replacing track main frame.

5. The multi-chip detection system according to any one of claims 1-4, wherein: the disc changing motion frame comprises a disc changing motion main frame, an arm support, a first disc changing driver, a second disc changing driver and a disc changing gripper connecting block, wherein the disc changing motion main frame is horizontally arranged with the arm support, the arm support is vertically and movably connected with the disc changing motion main frame, the first disc changing driver drives the arm support to move along the disc changing motion main frame, the disc changing gripper connecting block is movably connected with the arm support, and the second disc changing driver drives the disc changing gripper connecting block to move along the arm support.

6. The multi-chip detection system according to any one of claims 1-4, wherein: the disc changing gripper comprises a disc changing gripper backboard, a fixed suction nozzle module, an opening and closing driving module and a suction nozzle driving module, wherein the fixed suction nozzle module is fixedly connected with the disc changing gripper backboard, the opening and closing suction nozzle module can horizontally move and is movably connected with the disc changing gripper backboard, the opening and closing driving module drives the opening and closing suction nozzle module to horizontally move, and the fixed suction nozzle module and the opening and closing suction nozzle module are respectively provided with a suction nozzle which is driven to go up and down by the suction nozzle driving module.

7. The multi-chip detection system according to any one of claims 1-4, wherein: the test gripper translation module comprises a hand screw rod, a hand screw rod connecting block, a test gripper translation motor and a test gripper translation slide rail, wherein the test gripper translation motor drives the hand screw rod connecting block through connecting the hand screw rod, the hand screw rod connecting block is connected with the suction head translation connecting block, the suction head translation connecting block is in sliding connection with the test gripper translation slide rail through a sliding block, and the hand screw rod is parallel to the test gripper translation slide rail; the test tongs lifting module comprises a lifting screw rod, a lifting screw rod connecting block, a lifting motor and a translation auxiliary connecting block, wherein the lifting screw rod connecting block is connected to the lifting screw rod, the lifting motor is in driving connection with the lifting screw rod, the translation auxiliary connecting block is movably installed on the lifting screw rod connecting block through a sliding block and a sliding rail, and the translation auxiliary connecting block is connected with the test tongs trunk.

8. The multi-chip detection system according to any one of claims 1-4, wherein: the inferior product snatchs the motion frame and includes transverse movement frame, longitudinal movement frame, transverse movement motor, transverse synchronous pulley mechanism, longitudinal movement motor and longitudinal synchronous pulley mechanism, the transverse movement frame erects perpendicularly test tray track frame top, transverse movement motor with transverse synchronous pulley mechanism installs transverse movement frame, longitudinal movement frame pass through the slide rail slider with transverse movement frame removes to be connected, transverse movement motor passes through transverse synchronous pulley mechanism drives longitudinal movement frame, inferior product sucking disc module pass through the slide rail slider with longitudinal movement frame removes to be connected, longitudinal movement motor with longitudinal synchronous pulley mechanism installs on the longitudinal movement frame, longitudinal movement motor passes through longitudinal synchronous pulley mechanism and drives inferior product sucking disc module.