CN113872465A - 压电驱动装置、压电电机以及机器人 - Google Patents

压电驱动装置、压电电机以及机器人 Download PDF

Info

Publication number
CN113872465A
CN113872465A CN202110722145.2A CN202110722145A CN113872465A CN 113872465 A CN113872465 A CN 113872465A CN 202110722145 A CN202110722145 A CN 202110722145A CN 113872465 A CN113872465 A CN 113872465A
Authority
CN
China
Prior art keywords
piezoelectric
spring
base
vibration
driving device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202110722145.2A
Other languages
English (en)
Chinese (zh)
Inventor
中村优作
中西大介
冈前雄大
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of CN113872465A publication Critical patent/CN113872465A/zh
Pending legal-status Critical Current

Links

Images

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001Driving devices, e.g. vibrators
    • H02N2/003Driving devices, e.g. vibrators using longitudinal or radial modes combined with bending modes
    • H02N2/004Rectangular vibrators
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001Driving devices, e.g. vibrators
    • H02N2/003Driving devices, e.g. vibrators using longitudinal or radial modes combined with bending modes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00Programme-controlled manipulators
    • B25J9/10Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/12Programme-controlled manipulators characterised by positioning means for manipulator elements electric
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00Programme-controlled manipulators
    • B25J9/10Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/12Programme-controlled manipulators characterised by positioning means for manipulator elements electric
    • B25J9/126Rotary actuators
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/005Mechanical details, e.g. housings
    • H02N2/0055Supports for driving or driven bodies; Means for pressing driving body against driven body
    • H02N2/006Elastic elements, e.g. springs
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/0075Electrical details, e.g. drive or control circuits or methods
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/103Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors by pressing one or more vibrators against the rotor
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/12Constructional details

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
CN202110722145.2A 2020-06-30 2021-06-28 压电驱动装置、压电电机以及机器人 Pending CN113872465A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020-112530 2020-06-30
JP2020112530A JP2022011405A (ja) 2020-06-30 2020-06-30 圧電駆動装置、圧電モーターおよびロボット

Publications (1)

Publication Number Publication Date
CN113872465A true CN113872465A (zh) 2021-12-31

Family

ID=78990022

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202110722145.2A Pending CN113872465A (zh) 2020-06-30 2021-06-28 压电驱动装置、压电电机以及机器人

Country Status (3)

Country Link
US (1) US11502627B2 (ja)
JP (1) JP2022011405A (ja)
CN (1) CN113872465A (ja)

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010233333A (ja) * 2009-03-26 2010-10-14 Seiko Epson Corp 圧電モーターの製造方法、圧電モーター、液体噴射装置及び時計
JP2015186329A (ja) * 2014-03-24 2015-10-22 セイコーエプソン株式会社 圧電モーター
JP2015186330A (ja) * 2014-03-24 2015-10-22 セイコーエプソン株式会社 圧電モーター
JP2018050435A (ja) * 2016-09-23 2018-03-29 セイコーエプソン株式会社 圧電アクチュエーター、圧電モーター、ロボット、電子部品搬送装置、プリンターおよび圧電アクチュエーターの製造方法
JP2020005435A (ja) * 2018-06-29 2020-01-09 セイコーエプソン株式会社 圧電駆動装置および圧電駆動装置の製造方法
CN110784122A (zh) * 2018-07-25 2020-02-11 精工爱普生株式会社 压电驱动装置、机器人以及打印机
JP2020089161A (ja) * 2018-11-29 2020-06-04 セイコーエプソン株式会社 圧電駆動装置およびロボット

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5884303B2 (ja) * 2011-06-07 2016-03-15 セイコーエプソン株式会社 圧電アクチュエーター、ロボットハンド、及びロボット
JP6008077B2 (ja) * 2011-12-06 2016-10-19 セイコーエプソン株式会社 アクチュエータ―、ロボット、電子部品搬送装置及び電子部品検査装置

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010233333A (ja) * 2009-03-26 2010-10-14 Seiko Epson Corp 圧電モーターの製造方法、圧電モーター、液体噴射装置及び時計
JP2015186329A (ja) * 2014-03-24 2015-10-22 セイコーエプソン株式会社 圧電モーター
JP2015186330A (ja) * 2014-03-24 2015-10-22 セイコーエプソン株式会社 圧電モーター
JP2018050435A (ja) * 2016-09-23 2018-03-29 セイコーエプソン株式会社 圧電アクチュエーター、圧電モーター、ロボット、電子部品搬送装置、プリンターおよび圧電アクチュエーターの製造方法
JP2020005435A (ja) * 2018-06-29 2020-01-09 セイコーエプソン株式会社 圧電駆動装置および圧電駆動装置の製造方法
CN110784122A (zh) * 2018-07-25 2020-02-11 精工爱普生株式会社 压电驱动装置、机器人以及打印机
JP2020089161A (ja) * 2018-11-29 2020-06-04 セイコーエプソン株式会社 圧電駆動装置およびロボット

Also Published As

Publication number Publication date
US11502627B2 (en) 2022-11-15
JP2022011405A (ja) 2022-01-17
US20210408944A1 (en) 2021-12-30

Similar Documents

Publication Publication Date Title
JP6008077B2 (ja) アクチュエータ―、ロボット、電子部品搬送装置及び電子部品検査装置
US11581477B2 (en) Vibrator, piezoelectric actuator, piezoelectric motor, robot, electronic component conveyance apparatus, and manufacturing method of vibrator
CN110784122B (zh) 压电驱动装置、机器人以及打印机
US10658950B2 (en) Piezoelectric actuator, piezoelectric motor, robot, and electronic component conveyance apparatus
JP2005081538A (ja) マニピュレータおよびこれを備えた装置
US11205974B2 (en) Piezoelectric driving device, piezoelectric motor, robot, electronic component conveyance apparatus, printer, and projector
CN113872465A (zh) 压电驱动装置、压电电机以及机器人
JP2020005435A (ja) 圧電駆動装置および圧電駆動装置の製造方法
US11502623B2 (en) Piezoelectric actuator, piezoelectric motor, and robot
US11888416B2 (en) Piezoelectric drive device and robot
JP2016082835A (ja) 圧電駆動装置、指アシスト装置及びロボット
US11233465B2 (en) Piezoelectric drive device, robot, and printer
JP7447677B2 (ja) 圧電駆動装置、圧電モーターおよびロボット
JP2022112669A (ja) 圧電駆動装置およびロボット
JP2022117611A (ja) 圧電駆動装置およびロボット
US11682986B2 (en) Piezoelectric drive device and robot
US11736039B2 (en) Control method for piezoelectric drive device and control method for manipulator
US20230200251A1 (en) Control method for piezoelectric motor, piezoelectric motor, and robot
JP2018019540A (ja) 圧電アクチュエーター、圧電モーター、ロボットおよび電子部品搬送装置
US20230247766A1 (en) Electronic apparatus, robot, and motion stage
CN111130386B (zh) 压电驱动装置及其控制方法、机器人及打印机
JP2020141451A (ja) 圧電駆動装置、圧電駆動装置の製造方法およびロボット
JP2020191767A (ja) 圧電アクチュエーター及びロボット
JP2022083612A (ja) 圧電駆動装置の異常検知方法、圧電駆動装置、及びロボット

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination