CN113866587B - Flying probe test equipment - Google Patents
Flying probe test equipment Download PDFInfo
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- CN113866587B CN113866587B CN202110960679.9A CN202110960679A CN113866587B CN 113866587 B CN113866587 B CN 113866587B CN 202110960679 A CN202110960679 A CN 202110960679A CN 113866587 B CN113866587 B CN 113866587B
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- 238000012360 testing method Methods 0.000 title claims abstract description 211
- 239000000523 sample Substances 0.000 title claims abstract description 48
- 230000007246 mechanism Effects 0.000 claims abstract description 45
- 230000003287 optical effect Effects 0.000 claims description 3
- 238000003384 imaging method Methods 0.000 claims 1
- 238000009966 trimming Methods 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 6
- 238000010191 image analysis Methods 0.000 abstract description 2
- 239000000047 product Substances 0.000 description 29
- 239000000758 substrate Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000001514 detection method Methods 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 230000002427 irreversible effect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
- G01R31/281—Specific types of tests or tests for a specific type of fault, e.g. thermal mapping, shorts testing
- G01R31/2812—Checking for open circuits or shorts, e.g. solder bridges; Testing conductivity, resistivity or impedance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
- G01R31/2806—Apparatus therefor, e.g. test stations, drivers, analysers, conveyors
- G01R31/2808—Holding, conveying or contacting devices, e.g. test adapters, edge connectors, extender boards
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- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Tests Of Electronic Circuits (AREA)
Abstract
The invention discloses flying probe test equipment, which comprises 2N test tracks, wherein two on-off test units are arranged on each test track, an image unit is arranged on one test unit of each test track, each on-off test unit comprises an X-direction movement mechanism, a Y-direction movement mechanism and a Z-direction movement mechanism, and a test probe is arranged on the Z-direction movement mechanism, wherein N is more than or equal to 1. The flying probe test equipment improves the test efficiency, the image analysis capability and the stability and the safety of the tested product in the test process of the flying probe equipment, ensures enough precision, and can keep the precision for a long time.
Description
Technical Field
The invention relates to the technical field of testing, in particular to flying probe testing equipment.
Background
Electrical performance testing is a critical step for packaging substrates, ceramic substrates, silicon substrates, printed wiring boards. It is indispensable to automatically detect whether defects such as open circuits and short circuits exist in products such as package substrates, ceramic substrates, silicon substrates, printed circuit boards and the like by using detection equipment, so that the detection efficiency can be greatly improved. Currently, the mainstream electrical performance detection devices mainly include a dedicated test device and a flying probe test device.
For the flying probe test equipment, the main characteristics and problems are as follows:
1. The existing flying probe testing equipment is usually used for controlling the probe to move and test by driving a screw rod or a belt through a servo/stepping motor. The problem is that the screw or belt is driven by a servo/stepping motor, so that irreversible abrasion is easy to occur, and the whole test system cannot maintain stable precision. In particular screw drives, this problem is more pronounced.
2. Existing flying probe test equipment is configured with only one test unit per track/lead screw. The problem is that all test units are closed loop systems, and when one test unit fails/is abnormal, other test units cannot work normally.
3. Existing flying probe test equipment is provided with an independent industrial camera on the front and back or one industrial camera on all test heads. The problem is that when one industrial camera is arranged in front of and behind each other, the two industrial cameras are only used for positioning the reference point before the test, and cannot view real-time images/videos in the test process. If the position of the test probe changes during the test, the probe is not easy to be found in time. In order to avoid collision, the industrial cameras are arranged on all the test heads, so that very complex algorithms are needed to be matched, and when a plurality of test heads are gathered together, the image of the tested product cannot be seen. And sometimes in order to avoid collision when testing particularly high-end products (products with relatively small and dense pads), the equipment is suddenly stopped, but sometimes collision is unavoidable.
4. The conventional flying probe test equipment often adopts a vertical clamping plate mode to bear a tested product, so that the soft board cannot realize a very flat state on a frame plate frame when the soft board is tested. The needle mark can not be controlled, and the test point is inconvenient to test the product which is relatively close to the board.
Disclosure of Invention
The invention aims to solve the technical problem of providing a flying probe test device which can efficiently test and maintain stable test precision.
In order to solve the technical problems, the invention provides flying probe testing equipment, which comprises 2N testing tracks, wherein two on-off testing units are arranged on each testing track, an image unit is arranged on one of the testing units of each testing track, the on-off testing units comprise an X-direction moving mechanism, a Y-direction moving mechanism and a Z-direction moving mechanism, and a testing probe is arranged on the Z-direction moving mechanism, wherein N is more than or equal to 1.
Further, the equipment comprises a test beam, an upper test track and a lower test track are respectively arranged on two sides of the test beam, two on-off test units are respectively arranged on the upper test track and the lower test track, the on-off test units on the upper test track and the lower test track are arranged symmetrically up and down, the image units on the two upper test tracks are arranged on the two on-off test units in a crossing manner, and the image units on the two lower test tracks are arranged on the two on-off test units in a crossing manner.
Further, a clamping device is also included, which is disposed horizontally and between the upper and lower test rails.
Further, the clamping plate device comprises two parallel sliding rails, and two clamping mechanisms are symmetrically arranged between the two sliding rails; each clamping mechanism comprises a sliding seat with two ends capable of sliding on the sliding rail and a clamping piece for clamping a tested product, and an air bag is arranged between the sliding seat and the clamping piece.
Further, the clamping mechanism is also provided with a locking knob and a fine adjustment rod.
Further, the X-direction movement mechanism and the Z-direction movement mechanism respectively adopt linear motors, wherein a stator of each X-direction linear motor is arranged and fixed on a test beam, and the Y-direction movement mechanism is arranged on a rotor of each X-direction linear motor; one end of a rotor of the Z-direction linear motor is provided with a test support, and the test probe is arranged on the test support; the Y-direction movement mechanism is a rotating motor, and the rotating motor drives the Z-direction linear motor to rotate together with the test support and the test probe.
Further, grating scales are respectively arranged on the X-direction linear motor and the Y-direction linear motor; the rotary motor is provided with a rotary encoder.
Further, the image unit is arranged on the base of the Z-direction movement mechanism and comprises a camera with a lens optical axis horizontally arranged, and a reflecting mirror arranged at an angle of 45 degrees is arranged in front of the lens.
Further, the image unit also comprises a horizontal light-emitting diode and an inclined light-emitting diode, wherein light emitted by the horizontal light-emitting diode horizontally irradiates the reflector, and vertically irradiates the tested product after being reflected by the reflector; the light emitted by the inclined light emitting diode is emitted to the tested product in an inclined angle.
Further, the included angle between the light emitted by the inclined light emitting diode and the horizontal plane is 45 degrees.
The flying probe test equipment improves the test efficiency, the image analysis capability and the stability and the safety of the tested product in the test process of the flying probe equipment, ensures enough precision, and can keep the precision for a long time.
Drawings
FIG. 1 is a front view of one embodiment of a test beam structure of the present invention.
Fig. 2 is a perspective view of one embodiment of a test beam structure in accordance with the present invention.
FIG. 3 is a schematic diagram of a test track with an on-off test unit according to the present invention.
Fig. 4 is a schematic view of an embodiment of the splint device according to the present invention.
FIG. 5 is a schematic diagram of an embodiment of an on-off test unit according to the present invention.
FIG. 6 is a schematic diagram of an embodiment of an image unit according to the present invention.
Fig. 7 is a schematic diagram of an illumination light path of an image unit in the present invention.
FIG. 8 is a simplified schematic diagram of the rotational scan range of the test rack and the flying probe of the present invention.
Detailed Description
The present invention will be further described with reference to the accompanying drawings and specific examples, which are not intended to be limiting, so that those skilled in the art will better understand the invention and practice it.
The flying probe test equipment comprises 2N (N is more than or equal to 1) test tracks, wherein two on-off test units are arranged on each test track, two on-off test units on the same track form a group of independent on-off test systems, an image unit is arranged on one test unit of each test track, each on-off test unit comprises an X-direction movement mechanism, a Y-direction movement mechanism and a Z-direction movement mechanism, and a test probe is arranged on the Z-direction movement mechanism. That is, in the present invention, the test tracks are configured in pairs, two on-off test units are provided on each test track, and among the two on-off test units on the same test track, only one on-off test unit is provided with an image unit. The on-off test unit drives the test probe to respectively act in the X direction, the Y direction and the Z direction so as to realize the detection of any point on the tested product.
As shown in fig. 1 to 3, in this embodiment, a test beam 1 is provided, and upper test rails 2 and lower test rails 3 are provided in pairs on the test beam 1, respectively, the two upper test rails 2 are provided on both sides of the test beam 1, respectively, and the two lower test rails 3 are also provided on both sides of the test beam 1, respectively. Two on-off test units are arranged on each upper test track 2, two on-off test units are also arranged on each lower test track 3, the on-off test units on the upper test track 2 and the lower test track 3 are arranged in an up-down symmetrical mode, namely the on-off test units on the upper test track 2 are arranged downwards, and the on-off test units on the lower test track 3 are arranged upwards. The image units 7 on the two upper test tracks 2 are arranged on the two on-off test units in a crossing way, and the image units 7 on the two lower test tracks 3 are arranged on the two on-off test units in a crossing way. That is, if the image unit on the front upper test track is disposed on the left on-off test unit, the image unit on the rear upper test track is disposed on the right on-off test unit; and vice versa. Likewise, if the image unit on the front lower test track is disposed on the left on-off test unit, the image unit on the rear lower test track is disposed on the right on-off test unit; and vice versa. In other embodiments, only the upper test track may be provided.
As shown in fig. 4, an embodiment of the present invention further includes a clamping device horizontally disposed and located between the upper test rail 2 and the lower test rail 3. When the tested product is clamped on the clamping plate device, the on-off test units on the upper test track are used for detecting the upper surfaces of the tested product from the two sides of the test beam respectively, and the on-off test units on the lower test track are used for detecting the lower surfaces of the tested product from the two sides of the test beam respectively. The clamping plate device is used for supporting the tested product, and ensuring that the tested product is safely and stably placed in the middle of the equipment, preferably in the middle of the equipment in the testing process.
As shown in fig. 4, the clamping plate device comprises two parallel sliding rails 12, and two clamping mechanisms are symmetrically arranged between the two sliding rails 12; each clamping mechanism comprises a sliding seat 14 with two ends capable of sliding on the sliding rail 12 and a clamping piece 16 for clamping a tested product, wherein an air bag 15 is arranged between the sliding seat 12 and the clamping piece 16 and is communicated with an air source for providing compressed air. The clamping mechanism is provided with a locking knob 18; a porous rod 13 is arranged on the inner side of the slide rail 12. The working principle is as follows: according to the size of the product to be measured, the front clamping mechanism and the rear clamping mechanism are adjusted, slide to a proper position on the slide rail 12, and the locking knob 18 is rotated, so that the clamping mechanisms are tightly fixed on the porous rod 13. The passage between the compressed air source and the air bag 15 is closed, and the compressed air in the air bag 15 is pressed out, at this time, the product to be tested or the auxiliary clamp can be placed between the two clamping pieces 16, the passage between the compressed air source and the air bag is opened, the air bag 15 is inflated, and at this time, the product to be tested can be firmly fixed between the clamping pieces. A fine adjustment lever 17 may be provided on the clamping mechanism to fine adjust the clamping force.
As shown in fig. 5, in an embodiment of the present invention, the X-direction movement mechanism and the Z-direction movement mechanism respectively use linear motors, wherein a stator 4 of the X-direction linear motor is fixed on a test beam 1, so that the linear motors are separately arranged from a test track, and the Y-direction movement mechanism is arranged on a mover 5 of the X-direction linear motor; a test support 8 is arranged at one end of a rotor of the Z-direction linear motor 10, and the test probe is arranged on the test support 8; the Y-direction movement mechanism is a rotating motor 9, and the rotating motor 9 drives the Z-direction linear motor to rotate together with the test support and the test probe. Preferably, the X-direction linear motor and the Y-direction linear motor are respectively provided with a grating ruler 11; the rotary encoder 6 is provided on the rotary electric machine 9. The structure can enable the on-off test unit to move in X, Y, Z three directions, wherein the test support and the test probe move to the X coordinate position of the product bonding pad to be tested in the X direction through the horizontally installed linear motor and the grating ruler. Meanwhile, a rotary motor in the Y direction is matched with a rotary encoder to move to the Y coordinate position of the product bonding pad to be tested. After the test probe moves to the position right above X, Y coordinates of the bonding pad of the product to be tested, a linear motor arranged in the Z direction is matched with a grating ruler, and the test support and the test probe are driven to move downwards to complete the contact test of the corresponding bonding pad.
In the invention, the test support and the test probe adopt a rotary positioning mode in the Y direction to find the Y-direction coordinate of the bonding pad to be tested. As shown in fig. 3 in combination with fig. 5 and 8, the test stand and the flying probe on the left side can be rotationally positioned at 0-180 degrees on the right side of the test unit, and the test stand and the flying probe on the right side can be rotationally positioned at 0-180 degrees on the left side of the test unit, so that 100% full coverage of the test track area is realized.
As shown in fig. 5 and 6, the image unit in the present invention is disposed on the base of the Z-direction movement mechanism, and the image unit includes a camera 19 with a lens optical axis disposed horizontally, and a reflector 20 disposed at an angle of 45 degrees is disposed in front of the lens. The image unit further comprises a horizontal light emitting diode and an inclined light emitting diode 22, wherein the light emitted by the horizontal light emitting diode horizontally irradiates the reflector 20, and vertically irradiates the tested product after being reflected by the reflector 20; the light emitted by the side-inclined light emitting diode 22 is emitted to the tested product at an inclined angle. The included angle between the light emitted by the inclined light emitting diode and the horizontal plane is preferably 45 degrees. Wherein the camera is preferably an industrial camera.
According to the invention, the industrial camera is transversely arranged and fixed on the base of the Z-direction movement mechanism, so that the industrial camera can move synchronously with the test support in the horizontal direction but cannot move along with the test support in the Z-direction, thereby checking the real-time test condition and having good stability. The transverse camera is used for transmitting the image of the circuit board to be tested to the industrial camera through the lens after reflecting the image. Therefore, products with different thicknesses can be accurately focused, and the method is suitable for testing products with thickness differences of 0-10 mm.
The image unit on the on-off test unit is an industrial camera matched light path structure for assisting the test system to accurately scan and locate and view real-time images/videos. The X-direction focal length fine adjustment function and the Z-direction object distance adjustment function are provided, the X direction can be adjusted by 0-10mm, and the Z direction can be adjusted by 0-15mm. So as to adapt to the test requirements of different products.
An embodiment of the light path structure in the image unit is shown in fig. 7, and includes at least 2 horizontal light emitting diodes 21 irradiating light onto a mirror 20 forming an angle of 45 degrees with the horizontal plane, and irradiating the light onto the surface of the product under test 23 through the mirror 20. In addition, in order to prevent the test probe from blocking the light reflected by the reflector 20, at least 2 inclined leds 22 may be further disposed to irradiate the light to the surface of the tested product 23 at an angle of 45 degrees to the horizontal. Under the irradiation of 2 groups of light, the industrial camera can acquire very clear images/videos of the detected area.
The industrial camera can provide functions of positioning scanning, viewing real-time images and the like for a test area covered by the test track. The image units on the adjacent test tracks are designed with height differences, so that the image units on the same surface can be ensured not to collide or interfere with the image units on the adjacent test tracks in the scanning alignment and test process.
The above-described embodiments are merely preferred embodiments for fully explaining the present invention, and the scope of the present invention is not limited thereto. Equivalent substitutions and modifications will occur to those skilled in the art based on the present invention, and are intended to be within the scope of the present invention. The protection scope of the invention is subject to the claims.
Claims (9)
1. The flying probe test equipment is characterized by comprising 2N test tracks, wherein two on-off test units are arranged on each test track, an image unit is arranged on one test unit of each test track, each on-off test unit comprises an X-direction movement mechanism, a Y-direction movement mechanism and a Z-direction movement mechanism, and a test probe is arranged on the Z-direction movement mechanism, wherein N is more than or equal to 1;
The equipment comprises a test beam, wherein an upper test track and a lower test track are respectively arranged on two sides of the test beam, two on-off test units are respectively arranged on the upper test track and the lower test track, the on-off test units on the upper test track and the lower test track are arranged symmetrically up and down, the image units on the two upper test tracks are arranged on the two on-off test units in a crossing manner, and the image units on the two lower test tracks are arranged on the two on-off test units in a crossing manner.
2. The flying probe testing device of claim 1, further comprising a clamping device disposed horizontally and between the upper and lower test rails.
3. The flying probe testing device according to claim 2, wherein the clamping plate device comprises two parallel sliding rails, and two clamping mechanisms are symmetrically arranged between the two sliding rails; each clamping mechanism comprises a sliding seat with two ends capable of sliding on the sliding rail and a clamping piece for clamping a tested product, and an air bag is arranged between the sliding seat and the clamping piece.
4. The flying probe testing device of claim 3, wherein the clamping mechanism is further provided with a locking knob and a trimming lever.
5. The flying probe testing device according to claim 1, wherein the X-direction movement mechanism and the Z-direction movement mechanism respectively adopt linear motors, wherein a stator of the X-direction linear motor is fixed on the test beam, and the Y-direction movement mechanism is arranged on a rotor of the X-direction linear motor; one end of a rotor of the Z-direction linear motor is provided with a test support, and the test probe is arranged on the test support; the Y-direction movement mechanism is a rotating motor, and the rotating motor drives the Z-direction linear motor to rotate together with the test support and the test probe.
6. The flying probe testing device according to claim 5, wherein grating scales are respectively arranged on the X-direction linear motor and the Y-direction linear motor; the rotary motor is provided with a rotary encoder.
7. The flying probe testing device according to claim 5, wherein the image unit is arranged on a base of the Z-direction movement mechanism, the image unit comprises a camera with a lens optical axis horizontally arranged, and a reflecting mirror arranged at an angle of 45 degrees is arranged in front of the lens.
8. The flying probe testing device according to claim 7, wherein the imaging unit further comprises a horizontal light emitting diode and an inclined light emitting diode, wherein the light emitted by the horizontal light emitting diode is horizontally emitted to the reflector, and is vertically emitted to the tested product after being reflected by the reflector; the light emitted by the inclined light emitting diode is emitted to the tested product in an inclined angle.
9. The flying probe testing device according to claim 8, wherein the inclined light emitting diode emits light at an angle of 45 degrees to the horizontal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110960679.9A CN113866587B (en) | 2021-08-20 | 2021-08-20 | Flying probe test equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110960679.9A CN113866587B (en) | 2021-08-20 | 2021-08-20 | Flying probe test equipment |
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| Publication Number | Publication Date |
|---|---|
| CN113866587A CN113866587A (en) | 2021-12-31 |
| CN113866587B true CN113866587B (en) | 2024-05-24 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202110960679.9A Active CN113866587B (en) | 2021-08-20 | 2021-08-20 | Flying probe test equipment |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN116930559A (en) * | 2023-06-07 | 2023-10-24 | 苏州国科测试科技有限公司 | Flying probe test equipment |
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| CN207380195U (en) * | 2017-09-20 | 2018-05-18 | 南京泊纳莱电子科技有限公司 | Flying probe tester |
| CN207946498U (en) * | 2018-01-12 | 2018-10-09 | 苏州工业园区浩高电子科技有限公司 | A kind of flying probe device |
| CN111566488A (en) * | 2018-01-18 | 2020-08-21 | 艾克斯塞拉公司 | Test pin, test probe, and flying probe tester for testing printed circuit board |
| CN209014691U (en) * | 2018-10-24 | 2019-06-21 | 深圳市智泽丰科技有限公司 | A kind of flying probe tester |
| CN209342865U (en) * | 2018-11-08 | 2019-09-03 | 深圳市众博信科技有限公司 | A kind of horizontal flying probe host |
| CN209327403U (en) * | 2018-12-24 | 2019-08-30 | 昆山新亚新电子科技有限公司 | A kind of vertical flying probe machine clamp |
| CN110726669A (en) * | 2019-08-31 | 2020-01-24 | 苏州国科测试科技有限公司 | Flying probe is camera subassembly and flying probe test equipment for test equipment |
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Effective date of registration: 20230927 Address after: Building 1, No. 98, Yangpu Road, Suzhou Industrial Park, Suzhou Area, China (Jiangsu) Pilot Free Trade Zone, 215000, Jiangsu Province Applicant after: Suzhou Guoke Testing Technology Co.,Ltd. Address before: 215000 3382, building a, No. 188, Suhong East Road, Suzhou Industrial Park, Suzhou area, China (Jiangsu) pilot Free Trade Zone, Suzhou, Jiangsu Applicant before: Suzhou hengce Electronic Technology Co.,Ltd. |
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