CN116930559A - Flying probe test equipment - Google Patents
Flying probe test equipment Download PDFInfo
- Publication number
- CN116930559A CN116930559A CN202310670353.1A CN202310670353A CN116930559A CN 116930559 A CN116930559 A CN 116930559A CN 202310670353 A CN202310670353 A CN 202310670353A CN 116930559 A CN116930559 A CN 116930559A
- Authority
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- China
- Prior art keywords
- linear motor
- module
- flying probe
- frame
- testing device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- 238000012360 testing method Methods 0.000 title claims abstract description 86
- 239000000523 sample Substances 0.000 title claims abstract description 43
- 239000004579 marble Substances 0.000 claims abstract description 13
- 239000000463 material Substances 0.000 claims abstract description 6
- 230000002146 bilateral effect Effects 0.000 claims abstract description 3
- 238000005259 measurement Methods 0.000 claims description 12
- 238000000034 method Methods 0.000 abstract description 6
- 239000002585 base Substances 0.000 description 6
- 229910000831 Steel Inorganic materials 0.000 description 4
- 239000010959 steel Substances 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 238000013016 damping Methods 0.000 description 2
- 239000002253 acid Substances 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06705—Apparatus for holding or moving single probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07392—Multiple probes manipulating each probe element or tip individually
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
- G01R31/281—Specific types of tests or tests for a specific type of fault, e.g. thermal mapping, shorts testing
- G01R31/2812—Checking for open circuits or shorts, e.g. solder bridges; Testing conductivity, resistivity or impedance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
- G01R31/2818—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP] using test structures on, or modifications of, the card under test, made for the purpose of testing, e.g. additional components or connectors
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
The invention discloses flying probe testing equipment which comprises a base, a frame arranged on the base, a positioning unit arranged on the frame, a measuring unit and a carrier plate unit, wherein the frame is made of marble materials, the measuring unit comprises two measuring modules which are arranged in a bilateral symmetry mode, each measuring module comprises an X linear motor composed of an X linear motor stator and an X linear motor rotor, the X linear motor rotor is connected with a Y stepping motor, the output end of the Y stepping motor is connected with a Z linear motor, the stator of the Z linear motor is connected to the output end of the Y stepping motor, a testing arm is arranged on the rotor of the Z linear motor, and a testing probe is arranged on the testing arm. The invention adopts marble material as the frame, hardly generates vibration or shaking in the working process of the flying probe test equipment, greatly improves the test precision by reasonably arranging the driving structure, and can be suitable for printed circuit boards with different sizes and thicknesses.
Description
Technical Field
The invention relates to the technical field of flying probe testing equipment, in particular to a camera component for the flying probe testing equipment and the flying probe testing equipment comprising the camera component.
Background
The flying probe testing equipment is mainly applied to the printed circuit board industry and is used for detecting the on-off characteristics of a printed circuit board, and belongs to electrical performance detection equipment. The probe is driven by the support arm to move so as to contact different contacts on the circuit board to be tested to complete the test.
The motors driving the probes to move in the X, Y, Z directions on the existing flying probe test equipment are respectively and independently arranged on the main body frame, and the measurement accuracy of the motors can be influenced in the long-distance movement process. In addition, fly needle test equipment is in the course of working, needs to scan with the help of the camera and fixes a position, and current industry camera definition is not enough, can't adjust the focal length of industry looks along with the thickness of product, causes the counterpoint precision not high. Furthermore, the main body frames of the existing flying probe test equipment are all of steel structures, and the overall accuracy of the equipment cannot be guaranteed due to the fact that the steel has high elasticity. Meanwhile, the whole vibration/shaking of the flying probe test equipment is larger in the movement process, and the test precision is influenced.
Disclosure of Invention
The technical problem to be solved by the invention is to provide the flying probe test equipment which can provide higher-precision test for the printed circuit board and can adapt to the printed circuit boards with different sizes and thicknesses.
In order to solve the technical problems, the invention provides flying probe testing equipment, which comprises a base, a frame arranged on the base, a positioning unit arranged on the frame, a measuring unit and a carrier plate unit, wherein the frame is made of marble materials, the measuring unit comprises two measuring modules which are arranged in bilateral symmetry, each measuring module comprises an X linear motor consisting of an X linear motor stator and an X linear motor rotor, the X linear motor rotor is connected with a Y stepping motor, the output end of the Y stepping motor is connected with a Z linear motor, the stator of the Z linear motor is connected to the output end of the Y stepping motor, a testing arm is arranged on the rotor of the Z linear motor, and a testing probe is arranged on the testing arm.
Further, the flying probe test equipment comprises an even number of measurement units, and the even number of measurement units are arranged symmetrically up and down.
Further, the X linear motor is provided with an X grating ruler, the Y stepping motor is provided with a Y-axis rotary encoder, and the Z linear motor is provided with a Z grating ruler.
Further, each measuring module is correspondingly provided with a positioning unit, and the positioning units are arranged above the test arms.
Further, the positioning unit comprises a camera support, a camera module is arranged on the camera support, a cemented lens module is arranged in front of the camera module, a reflector which forms an included angle of 45 degrees with the horizontal direction is arranged in front of the cemented lens module, and the camera module and the cemented lens module are provided with a focal length adjusting module.
Further, the focal length adjusting module is arranged on the camera support, the camera module and the cemented lens module are arranged on the focal length adjusting module, and the distance between the camera module and/or the cemented lens module and the reflector is adjusted through the focal length adjusting module.
Further, at least one side of the camera module is provided with a light source, the front of the light source is provided with a light guide tube, and the front of the light guide tube is provided with a light guide sheet with an included angle of 45 degrees with the horizontal direction.
Further, the carrier plate unit is including setting up the slide rail on the frame, slide on the slide rail and be provided with the balladeur train, be provided with the air pocket on the balladeur train, be provided with air inlet and gas vent on the air pocket, the air inlet is connected with the air supply.
Further, the two carriages are provided, the air bags are respectively arranged on the opposite sides of the two carriages, and a space for a product to be tested is formed between the air bags on the two carriages.
Further, a clamping plate is arranged on one side, facing the tested product, of the air bag.
According to the flying probe test equipment, marble materials are used as the frame, vibration or shaking hardly occurs in the working process of the flying probe test equipment, and the test precision is greatly improved by reasonably arranging the driving structures in the X, Y, Z directions, so that the flying probe test equipment can be suitable for printed circuit boards with different sizes and thicknesses.
Drawings
FIG. 1 is a schematic overall structure of an embodiment of the flying probe testing device of the present invention.
FIG. 2 is a perspective view of the measurement module and the positioning unit of the embodiment shown in FIG. 1.
Fig. 3 is a perspective view of the positioning unit of the embodiment shown in fig. 1.
Fig. 4 is a side view of the positioning unit of the embodiment of fig. 1.
Fig. 5 is a top view of the carrier plate unit in the embodiment shown in fig. 1.
In the figure: 1. base, 2, frame, 3, carrier plate unit, 4, measuring unit, 5, positioning unit, 6.X linear motor stator, 7.X linear motor mover, 8.Y stepper motor, 9, test arm, 10, test probe, 31, carriage, 32, air bag, 33, slide rail, 34, cleat, 51, camera bracket, 52, light source, 53, light guide tube, 54, reflector, 55, light guide sheet, 56, camera module, 57, focal length adjustment module.
Detailed Description
The present invention will be further described with reference to the accompanying drawings and specific examples, which are not intended to be limiting, so that those skilled in the art will better understand the invention and practice it.
As shown in fig. 1, an embodiment of the flying probe testing device of the present invention includes a base 1, a frame 2 disposed on the base 1, a positioning unit 5 disposed on the frame 2, a measuring unit 4 and a carrier unit 3. Wherein the frame 2 is made of marble material. The marble frame mainly comprises two horizontal marbles and four columnar marbles, and is mainly used for providing a motion platform for the measuring unit 4 and the carrier plate unit 3. The invention adopts marble as the reference surface of the flying probe testing equipment main body, and the marble has the advantages of small thermal expansion coefficient, difficult deformation, extremely tiny temperature influence, good rigidity, large internal damping coefficient and the like, and the internal resistance coefficient of the marble is 15 times larger than that of steel. Therefore, the invention adopts marble as the frame 2, has good shockproof and damping effects, is non-conductive and non-magnetic, has stable field position, and greatly improves the test precision of the equipment. In addition, the invention adopts marble as a frame, and has the advantages of stable chemical property, difficult weathering, acid and alkali resistance, corrosion resistance of corrosive gas and the like, the service life can reach 200 years, and the maintenance is quite simple and convenient.
Each measuring unit 4 in the invention comprises two measuring modules which are symmetrically arranged left and right, and each measuring module comprises a measuring part and a moving part. The measuring part applies/receives electric signals through the test probes, transmits the electric signals to the measuring analysis unit through the data line, and analyzes the measuring result. The motion part consists of an X-axis motor, a Y-axis motor and a Z-axis motor, and the three parts are integrated in one measurement module. As shown in the embodiment of fig. 2, the measuring module comprises an X linear motor composed of an X linear motor stator 6 and an X linear motor rotor 7, a Y stepper motor 8 is connected to the X linear motor rotor 7, an output end of the Y stepper motor 8 is connected to a Z linear motor, a stator of the Z linear motor is connected to an output end of the Y stepper motor, a test arm 9 is disposed on the rotor of the Z linear motor, and a test probe 10 is disposed on the test arm 9. According to the invention, the X, Y, Z motors in three directions are integrated in the same module, so that the movement efficiency is improved, and the space of equipment is saved.
When the test device works, the measurement module firstly moves the test arm 9 to the corresponding position of the test point by using the X linear motor, then rotates the test arm 9 by using the Y stepping motor 8 to enable the test probe 10 on the test arm 9 to be aligned with the test point, and then drives the test arm 9 and the test probe 10 to move in the Z direction to contact the test point by using the Z linear motor so as to finish the test.
The invention adopts the linear motor for the movement in the X direction and the Z direction, and adopts the stepping motor for the movement in the Y direction to lead the test arm 9 to execute the rotary movement so as to aim at different test points.
As a preferred embodiment, the flying probe testing device comprises two measuring units, wherein the two measuring units are arranged symmetrically up and down. The upper measuring unit is responsible for detecting the electrical property of the front surface of the measured product, and the lower measuring unit is responsible for detecting the electrical property of the back surface of the measured product, so that the full detection of the front surface and the back surface of the measured product is realized at the same time, and the detection efficiency is improved. In other embodiments, the flying probe test equipment includes a greater number of even measurement units, such as four, six, eight, etc., with the even measurement units being symmetrically disposed up and down.
An X grating scale is arranged on the X linear motor, a Y-axis rotary encoder is arranged on the Y stepping motor, and a Z grating scale is arranged on the Z linear motor. The X-axis grating ruler, the Y-axis rotary encoder and the Z-axis grating ruler can be used for accurately controlling the positions of the X-direction, the Y-direction and the Z-direction.
Each measuring module is correspondingly provided with a positioning unit 5, and the positioning unit 5 is arranged above the test arm 9. As shown in fig. 3 and 4, each positioning unit 5 includes a camera bracket 51, a camera module 56 is provided on the camera bracket 51, a cemented lens module is provided in front of the camera module 56, a reflector 54 having an angle of 45 degrees with the horizontal direction is provided in front of the cemented lens module, and the camera module 56 and the cemented lens module are configured with a focal length adjusting module 57. Wherein, the focal length adjusting module 57 is arranged on the camera bracket 51, the camera module 56 and the cemented lens module are arranged on the focal length adjusting module 57, and the distance between the camera module 56 and/or the cemented lens module and the reflector 54 is adjusted by the focal length adjusting module 57. The reflected light on the surface of the tested product is transmitted to the camera module 56 through the reflector 54 and the cemented lens, a light shielding plate can be arranged between the cemented lens and the camera module 56, a small hole for light to pass through is arranged on the light shielding plate, and the light entering into the camera module 56 can be controlled by adjusting the aperture of the small hole. The distance between the camera module 56 and the mirror 54 can be adjusted by the focal length adjusting module 57, and the distance between the cemented lens and the camera module 56 can also be adjusted. The distance from the camera module 56 to the reflector 54 is adjusted by the focal length adjusting module 57, so that the camera module is suitable for tested products with different thicknesses. When the thickness of the measured product is large, adjusting and increasing the distance from the camera module 56 to the reflector 54; when the measured product thickness is large, the adjustment reduces the distance from the camera module 56 to the mirror 54. By adjusting the distance between the cemented lens and the camera module 54, accurate focusing can be achieved. The positioning unit 5 solves the problems that the definition of an industrial camera is insufficient, the focal length cannot be adjusted, and the product with different thicknesses cannot be measured.
In order to ensure that enough light enters the camera module 56 to obtain a clear image, a light source 52 may be disposed on at least one side of the camera module 56, a light guide tube 53 is disposed in front of the light source 52, and a light guide sheet 55 having an angle of 45 degrees with respect to the horizontal direction is disposed in front of the light guide tube 53. The light emitted from the light source 52 is guided by the light guide tube 53 to be irradiated onto the light guide sheet 55, and the light guide sheet 55 refracts or reflects the light to the area below the test probe 9 to illuminate the area to be tested on the product to be tested. Preferably, the light guide 55 and the reflector 54 are integrated. In this embodiment, both side portions of the reflecting mirror 54 are used to reflect the light guided by the light guide tube 53 onto the product under test, and the middle portion of the reflecting mirror 54 is used to reflect the light reflected by the product under test to the cemented lens.
As shown in fig. 5, the carrier plate unit 3 includes a sliding rail 33 disposed on the frame 2, a sliding frame 31 is slidably disposed on the sliding rail 33, an air bag 32 is disposed on the sliding frame 31, an air inlet and an air outlet are disposed on the air bag 32, and the air inlet is connected with an air source. The fixing and releasing of the tested product is achieved by inflating the air bag 32 and discharging the air in the air bag 32. Preferably, there are two carriages 31 and two air bags 32 respectively arranged on opposite sides of the two carriages 31, and a space for placing the tested product is formed between the air bags 32 on the two carriages 31. It is further preferred that a clamping plate 34 is also provided on the side of the air bag 32 facing the product under test.
When the device works, two sliding frames 31 are adjusted to a proper position and fixed according to the size of a product to be measured, air in an air bag 32 is discharged, clamping plates 34 are pushed to the sliding frames, the distance between the two clamping plates 34 is increased, and the product to be measured is positioned between the two clamping plates 34 according to the position; then, the air bag 32 is inflated, so that the air bag 32 is inflated, and the air bag 32 pushes the two clamping plates 34 to be close to each other, so that the tested product is clamped. And the carrier plate unit 3 is pushed into a test area, and the carrier plate unit 3 is fixed through an air cylinder or other structures, so that the carrier plate unit can not shake in the front and back, left and right, up and down directions in the test process, and the stability of a tested product is ensured. The invention clamps the tested product through the air bag structure, is convenient to assemble and disassemble, has certain elasticity in clamping force, ensures stable clamping and does not damage the tested product.
The base 1 is used for bearing a marble frame 2, and in one embodiment of the invention, the base 1 consists of a steel main body, four supporting feet with adjustable height, four universal wheels for moving, four shockproof rubber pads and two main cabinets. The shockproof rubber pad is used for absorbing high-frequency vibration generated by the motor in the testing process, testing precision is guaranteed, the foundation is used for supporting the testing base and adjusting equipment level, the universal wheel is used for moving whole equipment, and the mainframe cabinet is used for placing an industrial personal computer.
Compared with the existing test equipment, the test equipment provided by the invention has the advantages that the test efficiency can be improved by 2.5 times, and the test minimum bonding pad can reach 25um.
The above-described embodiments are merely preferred embodiments for fully explaining the present invention, and the scope of the present invention is not limited thereto. Equivalent substitutions and modifications will occur to those skilled in the art based on the present invention, and are intended to be within the scope of the present invention. The protection scope of the invention is subject to the claims.
Claims (10)
1. The utility model provides a fly needle test equipment, its characterized in that, including the base, set up the frame on the base, set up the positioning unit on the frame, measure unit and support plate unit, the frame is made by marble material, it includes two measurement modules that bilateral symmetry set up to measure the unit, it includes the X linear motor that comprises X linear motor stator and X linear motor active cell to measure the module, be connected with Y step motor on the X linear motor active cell, Y step motor's output is connected with Z linear motor, wherein Z linear motor's stator is connected to Y step motor's output, Z linear motor's active cell is last to set up test arm, is provided with test probe on the test arm.
2. The flying probe testing device of claim 1, wherein the flying probe testing device comprises an even number of measurement units, the even number of measurement units being arranged symmetrically up and down.
3. The flying probe testing device of claim 1 wherein said X linear motor is configured with an X grating scale, said Y stepper motor is configured with a Y-axis rotary encoder, and said Z linear motor is configured with a Z grating scale.
4. The flying probe testing device according to claim 1, wherein each measurement module is correspondingly provided with a positioning unit, and the positioning unit is arranged above the testing arm.
5. The flying probe testing device according to claim 1, wherein the positioning unit comprises a camera support, a camera module is arranged on the camera support, a cemented lens module is arranged in front of the camera module, a reflector forming an included angle of 45 degrees with the horizontal direction is arranged in front of the cemented lens module, and the camera module and the cemented lens module are provided with a focal length adjusting module.
6. The flying probe testing device according to claim 5, wherein the focal length adjustment module is disposed on a camera support, the camera module and the cemented lens module are disposed on the focal length adjustment module, and a distance between the camera module and/or the cemented lens module and the mirror is adjusted by the focal length adjustment module.
7. The flying probe testing device according to claim 5, wherein at least one side of the camera module is provided with a light source, a light guide tube is arranged in front of the light source, and a light guide sheet having an angle of 45 degrees with the horizontal direction is arranged in front of the light guide tube.
8. The flying probe testing device according to claim 1, wherein the carrier plate unit comprises a sliding rail arranged on the frame, a sliding frame is slidably arranged on the sliding rail, an air bag is arranged on the sliding frame, an air inlet and an air outlet are arranged on the air bag, and the air inlet is connected with an air source.
9. The flying probe testing device according to claim 8, wherein there are two carriages, the air pockets being disposed on opposite sides of the two carriages, respectively, and a space for the product under test being formed between the air pockets on the two carriages.
10. The flying probe testing device according to claim 9, wherein a clamping plate is further provided on the air bag on a side facing the product under test.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310670353.1A CN116930559A (en) | 2023-06-07 | 2023-06-07 | Flying probe test equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310670353.1A CN116930559A (en) | 2023-06-07 | 2023-06-07 | Flying probe test equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN116930559A true CN116930559A (en) | 2023-10-24 |
Family
ID=88385356
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310670353.1A Pending CN116930559A (en) | 2023-06-07 | 2023-06-07 | Flying probe test equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN116930559A (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104198938A (en) * | 2014-09-02 | 2014-12-10 | 吉林恒隆控股集团有限公司 | Dynamic testing system for permanent-magnetic synchronous linear motor |
| CN110426630A (en) * | 2019-09-06 | 2019-11-08 | 哈尔滨工业大学 | Single slide carriage is to towed linear motor test platform |
| CN110726669A (en) * | 2019-08-31 | 2020-01-24 | 苏州国科测试科技有限公司 | Flying probe is camera subassembly and flying probe test equipment for test equipment |
| CN210720602U (en) * | 2019-08-22 | 2020-06-09 | 巨柯自动化设备(东莞)有限公司 | Keyboard test instrument |
| CN113589130A (en) * | 2021-08-27 | 2021-11-02 | 合肥米亚科技有限公司 | Wafer performance test sample application all-in-one |
| CN113866587A (en) * | 2021-08-20 | 2021-12-31 | 苏州恒测电子科技有限公司 | Flying probe test equipment |
| CN115224339A (en) * | 2022-08-09 | 2022-10-21 | 深圳市中基自动化股份有限公司 | Servo rolling mechanism of laminate polymer battery |
| CN217943673U (en) * | 2022-08-30 | 2022-12-02 | 杭州优忆科技有限公司 | Air bag hold-down mechanism |
-
2023
- 2023-06-07 CN CN202310670353.1A patent/CN116930559A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104198938A (en) * | 2014-09-02 | 2014-12-10 | 吉林恒隆控股集团有限公司 | Dynamic testing system for permanent-magnetic synchronous linear motor |
| CN210720602U (en) * | 2019-08-22 | 2020-06-09 | 巨柯自动化设备(东莞)有限公司 | Keyboard test instrument |
| CN110726669A (en) * | 2019-08-31 | 2020-01-24 | 苏州国科测试科技有限公司 | Flying probe is camera subassembly and flying probe test equipment for test equipment |
| CN110426630A (en) * | 2019-09-06 | 2019-11-08 | 哈尔滨工业大学 | Single slide carriage is to towed linear motor test platform |
| CN113866587A (en) * | 2021-08-20 | 2021-12-31 | 苏州恒测电子科技有限公司 | Flying probe test equipment |
| CN113589130A (en) * | 2021-08-27 | 2021-11-02 | 合肥米亚科技有限公司 | Wafer performance test sample application all-in-one |
| CN115224339A (en) * | 2022-08-09 | 2022-10-21 | 深圳市中基自动化股份有限公司 | Servo rolling mechanism of laminate polymer battery |
| CN217943673U (en) * | 2022-08-30 | 2022-12-02 | 杭州优忆科技有限公司 | Air bag hold-down mechanism |
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