CN113805296B - Optical assembly and manufacturing method thereof - Google Patents
Optical assembly and manufacturing method thereof Download PDFInfo
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- CN113805296B CN113805296B CN202010479428.4A CN202010479428A CN113805296B CN 113805296 B CN113805296 B CN 113805296B CN 202010479428 A CN202010479428 A CN 202010479428A CN 113805296 B CN113805296 B CN 113805296B
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
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Abstract
The embodiment of the invention provides an optical assembly and a manufacturing method thereof, wherein the optical assembly comprises a first optical piece and at least one second optical piece, wherein the first optical piece comprises at least one throttling hole; when the optical assembly is formed, the second optical element is absorbed by generating negative pressure through at least one throttling hole, and the first optical element and the second optical element are glued together. The embodiment of the invention provides an optical assembly and a manufacturing method thereof, which are used for providing a non-contact external force for a second optical element to cause surface shape change of a first optical element and the second optical element, so that optical cement gluing of the first optical element and the second optical element is caused, and the risk that the second optical element is damaged by contact is avoided.
Description
Technical Field
The invention relates to an optical cement technology, in particular to an optical component and a manufacturing method thereof.
Background
The measurement stroke requirement of the immersion lithography machine on a plane grating measurement system determines the necessity of using a large-area grating, and the high-precision and large-area grating has the difficulties of high manufacturing difficulty, high cost and the like. The small-area grating made of glass material is glued with a large-area glass bottom plate by adopting an optical cement technology, so that the integration and the use of the large-area grating become possible.
The optical cement is a technological process of adsorbing the surfaces of two clean, smooth and consistent-surface-shape optical parts together by slight pressure without using an adhesive. The essence of the optical glue technology is van der waals force action, i.e. molecular force adhesion. Compared with glue layer bonding, the thickness of the bonding layer of the optical cement technology can be ignored, deformation in the bonding process is avoided, and therefore a more stable surface shape can be obtained.
The traditional optical cement technology is generally used for glass devices with the size smaller than 200 mm in diameter. In summary, two adhesive pieces are bonded together by applying external pressure during the process of bringing two clean flat surfaces into close contact with each other, and the adhesive joint rapidly spreads from the initial contact point to the entire adhesive surface. Due to the external force application and almost no posture correction operation time, the method is difficult to meet the requirement of bonding precision and the integration of a large-area grating measuring surface.
Aiming at the large-area optical cement technology, because the requirement on the surface shape of the large-area optical cement is high, air is easily sealed between two optical parts with lower surface shapes, and an air gap is reserved in the middle part, the two optical parts are difficult to cause optical cement gluing spontaneously; the large-area grating is integrated by adopting an optical cement technology, and the surface of the grating is not contactable, so that the pressure cannot be applied by using a contact external force, and the optical cement cannot be triggered to be completed on the whole surface.
Disclosure of Invention
The embodiment of the invention provides an optical assembly and a manufacturing method thereof, which are used for providing a non-contact external force for a second optical element to cause surface shape change of a first optical element and the second optical element, so that optical cement gluing of the first optical element and the second optical element is caused, and the risk that the second optical element is damaged by contact is avoided.
In a first aspect, embodiments of the present invention provide an optical assembly comprising a first optical element and at least one second optical element,
the first optic includes at least one orifice;
when the optical assembly is formed, the second optical element is absorbed by generating negative pressure through at least one throttling hole, and the first optical element and the second optical element are glued together.
Optionally, the device further comprises at least one sealing element, the number of the sealing elements is the same as that of the throttling holes, and the sealing elements are located in the throttling holes.
Optionally, the at least one orifice includes at least one positive pressure orifice for passing gas and generating positive pressure to support the second optical member and at least one negative pressure orifice for passing gas and generating negative pressure to adsorb the second optical member.
Optionally, the optical assembly comprises M of said second optical pieces;
the first optical piece comprises M gluing areas, M second optical pieces are respectively glued in the M gluing areas of the first optical piece, and M is a positive integer larger than 1.
Optionally, the shape of the glued area is the same as the shape of the second optical piece;
the at least one orifice includes at least one positive pressure orifice for passing gas and generating positive pressure to support the second optical member and at least one negative pressure orifice for passing gas and generating negative pressure to adsorb the second optical member;
and each gluing area is provided with one negative pressure throttling hole and a plurality of positive pressure throttling holes, and the negative pressure throttling hole is positioned at the geometric center of the gluing area.
Optionally, the orifice includes a thin tube and an air cavity communicating with each other, the air cavity being located between the thin tube and the second optical member.
Optionally, the first optical element comprises a backplane and the second optical element comprises a grating.
Optionally, the grating has a low-aperture optical cement profile.
In a second aspect, an embodiment of the present invention provides a method for manufacturing an optical assembly, where the optical assembly includes a first optical element and at least one second optical element, and the method includes:
forming at least one orifice on the first optical member;
creating a positive pressure through at least one of the orifices to form a gas film between the first optic and the second optic;
and generating negative pressure through at least one throttling hole to adsorb the second optical element, and gluing the first optical element and the second optical element.
Optionally, before the step of sucking the second optical element by generating negative pressure through at least one of the throttle holes to optically glue the first optical element and the second optical element, the method further comprises:
and detecting and adjusting the posture of the second optical piece.
Optionally, after the second optical element is sucked by negative pressure generated by at least one of the throttle holes to enable the first optical element and the second optical element to be glued together by optical cement, the method further comprises the following steps:
all of the orifices are sealed with the same number of seals as the orifices.
Optionally, the gas passing through the orifice comprises ozone and/or plasma.
The optical assembly provided by the embodiment of the invention comprises a first optical element and a second optical element, wherein the first optical element comprises at least one throttling hole, when the optical assembly is formed, the second optical element is adsorbed by generating negative pressure through the at least one throttling hole, and the first optical element and the second optical element are glued optically, so that the second optical element is not required to be pressed by external mechanical force, non-contact external force is provided for the second optical element, the surface shape change of the first optical element and the second optical element is caused, the gluing of the first optical element and the second optical element is caused, and the risk that the second optical element is damaged by contact is avoided.
Drawings
FIG. 1 is a schematic diagram of an optical assembly according to an embodiment of the present invention before formation;
fig. 2 is a schematic perspective view of an optical assembly according to an embodiment of the present invention;
FIG. 3 is a schematic top view of the optical assembly shown in FIG. 2;
FIG. 4 is a schematic cross-sectional view along AA' in FIG. 3;
FIG. 5 is a schematic perspective view of another optical assembly according to an embodiment of the present invention;
FIG. 6 is a schematic top view of the optical assembly shown in FIG. 5;
FIG. 7 is a schematic top view of a first optical member of the optical assembly shown in FIG. 5;
FIG. 8 is a flow chart of a method of fabricating an optical assembly according to an embodiment of the present invention;
FIGS. 9-12 are schematic views illustrating a process for fabricating an optical assembly according to an embodiment of the present invention;
FIG. 13 is a diagram of a numerical simulation finite element simulation according to an embodiment of the present invention;
FIG. 14 is a top view of a pressure distribution of a first optic adjacent a surface of a second optic when a positive pressure is created by an orifice;
FIG. 15 is a perspective view of the pressure distribution when positive pressure is generated at the orifice;
FIG. 16 is a top view of a pressure distribution of the second optic adjacent the surface of the first optic when a positive pressure is created by the orifice;
FIG. 17 is a cross-sectional view of the vertical pressure distribution when positive pressure is generated at the orifice;
FIG. 18 is a sectional view showing the gas flow rate distribution when positive pressure is generated in the orifice;
FIG. 19 is a partial enlarged view of a portion of FIG. 18;
FIG. 20 is a perspective view showing the pressure distribution when the supply air pressure is increased by 9% and the orifice generates a positive pressure;
FIG. 21 is a top view of the pressure distribution of the first optic adjacent the surface of the second optic with the supply air pressure increasing by 9% and the orifice creating a positive pressure;
FIG. 22 is a perspective view showing the pressure distribution when the supply air pressure is reduced by 9% and the orifice generates a positive pressure;
FIG. 23 is a top view of the pressure distribution of the first optic adjacent the surface of the second optic with the supply air pressure reduced by 9% and the orifice creating a positive pressure;
FIG. 24 is a perspective view of the pressure distribution when the orifice generates negative pressure;
FIG. 25 is a top view of a pressure distribution of a first optic adjacent a surface of a second optic when a negative pressure is created by an orifice;
FIG. 26 is a schematic view showing the deformation of the first optic profile when a first negative pressure is generated in the orifice;
fig. 27 is a schematic view showing the deformation of the surface shape of the first optical member when the second negative pressure is generated in the orifice.
Detailed Description
The present invention will be described in further detail with reference to the drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting of the invention. It should be further noted that, for the convenience of description, only some structures related to the present invention are shown in the drawings, not all of them.
The surface morphology is one of the important factors affecting optical cement, and is generally divided into three categories: macroscopic geometric deviations (pitch greater than 10 mm), surface waviness (pitch about 1-10 mm), and surface roughness (pitch less than 1 mm).
In terms of the category of macroscopic geometric deviation, because a large-surface-shaped bonding surface is not absolutely flat, when two bonding surfaces are subjected to stress and completely glued, the bonding piece is bound to be elastically deformed, but the surface shape of the bonding surface of the bonding piece cannot be too poor, namely, the warping degree cannot be too large. For example, for a 10 mm thick glass sheet having a diameter in excess of 550 mm, a peak to valley difference (PV value) of less than 5 microns is required. The smaller the warping degree of the bonding piece is, the smoother the surface is, the smaller the work done for overcoming the elastic strain is, and the easier the optical cement gluing is realized under the condition that the adsorption energy of the bonding surface is certain.
When the warping degree of the bonding piece is large and the surface energy of the bonding interface cannot overcome the elastic strain energy generated by the deformation of the bonding piece, the gap between the two bonding surfaces is larger than the working distance of van der waals force due to the existence of the micron-submicron hollow gap, and the expansion of the optical cement area is further hindered by the elastic deformation, so that the spontaneous and complete optical cement bonding cannot be realized.
Fig. 1 is a schematic diagram of an optical assembly provided by an embodiment of the present invention before forming, and referring to fig. 1, the optical assembly includes a first optical member 101 and at least one second optical member 102. The surfaces of the first optical member 101 and the second optical member 102 are not perfectly smooth surfaces, and the first optical member 101 and the second optical member 102 have certain surface topography. Illustratively, the first optical element 101 comprises a base plate, the second optical element 102 comprises a grating, and the surface topography of the grating and the base plate falls within the category of macroscopic geometrical deviations.
Referring to fig. 1, when the difference between the peaks and valleys of the surface waviness is relatively large, a void, i.e., an air gap 103, is left in the local bonding region. The first optical member 101 and the second optical member 102 can be completely optical cemented only when the difference between the peak and valley of the surface waviness matches the size of the area. In essence, the optical cement bonding of the first optical member 101 and the second optical member 102 is related to the adhesion surface adsorption force, van der waals force adhesion working distance, elastic strain energy of the material itself, and the like. Since the first optical element 101 and the second optical element 102 cannot achieve self-complete optical cement gluing, a certain external pressure is required to obtain a good optical cement gluing quality.
In the existing design, mechanical pressure is usually applied to the first optical element 101 or the second optical element 102 to glue the first optical element 101 and the second optical element 102 together, but the applied mechanical pressure is liable to damage the first optical element 101 and the second optical element 102. In particular, the second optical element 102 is a thin plate having a smaller thickness than the first optical element 101, and the second optical element 102 is particularly easily damaged when mechanical pressure is applied to the second optical element 102.
Fig. 2 is a schematic perspective view of an optical assembly according to an embodiment of the present invention, fig. 3 is a schematic top view of the optical assembly shown in fig. 2, fig. 4 is a schematic cross-sectional view along AA' of fig. 3, and referring to fig. 2, fig. 3 and fig. 4, it should be noted that the optical assembly includes a first optical element 101 and at least one second optical element 102 (the second optical element 102 is illustrated in fig. 2 and is not a limitation of the present invention), and after the first optical element 101 and the second optical element 102 are optically bonded, an adhesive layer 100 is formed, a thickness of the adhesive layer 100 is very thin, and a thickness of the adhesive layer 100 is negligible. The first optic 101 includes at least one orifice 300. The orifice 300 is a through hole formed in the first optical member 101, and the orifice 300 extends from one side surface of the first optical member 101 to the other side surface of the first optical member 101. When the optical assembly is formed, the second optical member 102 is sucked by negative pressure generated by the at least one orifice 300, and the first optical member 101 and the second optical member 102 are optically glued.
The optical assembly provided by the embodiment of the invention comprises a first optical element 101 and a second optical element 102, wherein the first optical element 101 comprises at least one throttling hole 300, and when the optical assembly is formed, the second optical element 102 is adsorbed by generating negative pressure through the at least one throttling hole 300, so that the first optical element 101 and the second optical element 102 are optically glued, and therefore, the second optical element 102 does not need to be pressed through external mechanical force, non-contact external force is provided for the second optical element 102, surface shape changes of the first optical element 101 and the second optical element 102 are caused, optical gluing of the first optical element 101 and the second optical element 102 is caused, and the risk that the second optical element 102 is damaged by contact is avoided.
Optionally, referring to fig. 2, 3 and 4, the optical assembly further comprises at least one seal 401, the number of seals 401 being the same as the number of orifices 300, the seals 401 being located within the orifices. In the embodiment of the present invention, a sealing member 401 is further disposed in the orifice 300, and the sealing member 401 seals the orifice 300, so that moisture is prevented from entering between the first optical element 101 and the second optical element 102 through the orifice 300, and the moisture is prevented from invading.
Illustratively, the outer diameter of seal 401 is equal to the inner diameter of orifice 300, and seal 401 completely seals orifice 300. In some possible embodiments, the seal 401 may be formed, for example, by glue after it has set. In other possible embodiments, the sealing member 401 may be made of a solid material, for example, and the invention is not limited thereto.
Alternatively, referring to fig. 2, 3 and 4, the at least one orifice 300 includes at least one positive pressure orifice 311 and at least one negative pressure orifice 312, the positive pressure orifice 311 being for passing gas and generating positive pressure to support the second optical member 102, and the negative pressure orifice 312 being for passing gas and generating negative pressure to attract the second optical member 102. In other embodiments, a positive pressure supporting the second optical member 102 may be generated through the at least one orifice 300 when detecting and adjusting the attitude of the second optical member 102. When the second optical member 102 needs to be sucked to the first optical member 101 for optical cement, a negative pressure for sucking the second optical member 102 can be generated through the at least one orifice 300. That is, positive pressure and negative pressure are generated at different stages through the same orifice 300.
Alternatively, referring to fig. 4, the orifice 300 includes a tubule 321 and an air chamber 322 communicating with each other, the air chamber 322 being located between the tubule 321 and the second optical member 102. The maximum distance between any two points on the edge of the pattern formed by the vertical projection of the tubule 321 on the plane of the first optical element 101 is a first distance, the maximum distance between any two points on the edge of the pattern formed by the vertical projection of the air cavity 322 on the plane of the first optical element 101 is a second distance, and the first distance is smaller than the second distance. Illustratively, the perpendicular projections of the tubule 321 and the air cavity 322 on the plane of the first optical element 101 are both circular, and the diameter of the tubule 321 is smaller than that of the air cavity 322. In the embodiment of the present invention, a gas source (not shown in fig. 4) ejects a compressed gas with positive pressure through the tubule 321, and the gas ejected from the tubule 321 flows into the gas cavity 322, so as to generate an upward pressure, i.e. a pressure far away from the first optical element 101, and a pressure distribution in the gas film gap between the first optical element 101 and the second optical element 102 is a source of the bearing capacity. A gas source (not shown in fig. 4) sucks gas through the capillary 321, the gas chamber 322 generates a negative pressure, and the gas flows from the gas chamber 322 into the capillary 321, thereby generating a downward pressure, i.e. a pressure towards the first optical element 101, thereby generating a non-contact force for attracting the second optical element 102.
Illustratively, referring to fig. 3 and 4, the first optical member 101 and the second optical member 102 are optically glued, the first optical member 101 includes four positive pressure orifices 311 and one negative pressure orifice 312, the four positive pressure orifices 311 form a square, and the negative pressure orifice 312 is located at the geometric center of the square formed by the four positive pressure orifices 311. Further, a negative pressure orifice may also be provided at the geometric center of the first optical member 101. Here, the geometric center of the first optical member 101 refers to a geometric center of the edge of the first optical member 101 around the plane (i.e., in a plan view) where the formed pattern is located in the first optical member 101.
Fig. 5 is a schematic perspective view of another optical assembly according to an embodiment of the present invention, fig. 6 is a schematic top view of the optical assembly shown in fig. 5, fig. 7 is a schematic top view of a first optical element of the optical assembly shown in fig. 5, and referring to fig. 5, fig. 6 and fig. 7, the optical assembly includes M (for example, M =4 in fig. 5, fig. 6 and fig. 7, and not limiting the present invention) second optical elements 102, the first optical element 101 includes M gluing areas 1011, the M second optical elements 102 are respectively glued in the M gluing areas 1011 of the first optical element 101, and M is a positive integer greater than 1. In the embodiment of the present invention, one first optical element 101 is optically bonded to a plurality of second optical elements 102, and the plurality of second optical elements 102 are respectively optically bonded to a plurality of different bonding areas 1011 of the first optical element 101, so that a plurality of small-area second optical elements 102 can be spliced to form a large-area optical element.
Exemplarily, referring to fig. 5, 6, and 7, each gluing region 1011 is provided with at least one negative pressure orifice 312 and at least one positive pressure orifice 311. In detecting and adjusting the posture of the second optical member 102, a positive pressure supporting the second optical member 102 may be generated through the at least one positive pressure orifice 311. When the second optical member 102 is attracted to the corresponding gluing area 1011 of the first optical member 101 for the optical glue gluing, the negative pressure attracting the second optical member 102 can also be generated through the at least one negative pressure orifice 312.
Alternatively, referring to fig. 5, 6 and 7, the shape of the glue area 1011 is the same as the shape of the second optical member 102. One negative pressure orifice 312 and a plurality of positive pressure orifices 311 are provided for each gluing area 1011, the negative pressure orifice 312 being located at the geometric center of the gluing area 1011. In the embodiment of the present invention, the negative pressure restriction hole 312 is disposed at the geometric center of the gluing area 1011, so as to reduce the number of the negative pressure restriction holes 312, and ensure that the negative pressure restriction holes 312 can generate uniform suction force to the positions of the second optical element 102, for example, the suction force generated to the left edge of the second optical element 102 is the same as the suction force generated to the right edge of the second optical element 102, and the suction force generated to the front edge of the second optical element 102 is the same as the suction force generated to the rear edge of the second optical element 102, so as to be beneficial for keeping the surface of the second optical element 102 substantially parallel to the surface of the first optical element 101, and to prevent the first optical element 101 from warping and keep the surface shape of the first optical element 101.
It should be noted that, in some possible embodiments, when the posture of the second optical element 102 is detected and adjusted, the negative pressure orifice 312 and the plurality of positive pressure orifices 311 may be opened simultaneously, and positive pressure (buoyancy) and negative pressure (suction) exist simultaneously in different areas between the first optical element 101 and the second optical element 102, where the positive pressure is beneficial to increase the thickness of the air film, and the negative pressure is beneficial to decrease the thickness of the air film. By adjusting the positive pressure and negative pressure distribution, an extremely stable air film is formed between the first optical element 101 and the second optical element 102, which is beneficial to maintaining the stability of the second optical element 102 and is beneficial to detecting and adjusting the posture of the second optical element 102.
Exemplarily, referring to fig. 6 and 7, for convenience of distinction, the plurality of second optical members 102 are named a first sub-optical member 201, a second sub-optical member 202, a third sub-optical member 203, and a fourth sub-optical member 204, respectively. The first sub-optic 201, the second sub-optic 202, the third sub-optic 203 and the fourth sub-optic 204 are optically glued in 4 gluing areas 1011 of the first optic 101, respectively. The first sub-optical member 201, the second sub-optical member 202, the third sub-optical member 203 and the fourth sub-optical member 204 are all in an "L" shape, that is, the first sub-optical member 201, the second sub-optical member 202, the third sub-optical member 203 and the fourth sub-optical member 204 are surrounded together to form a "square".
Illustratively, referring to fig. 6 and 7, each glue area 1011 is provided with four positive pressure orifices 311 and one negative pressure orifice 312, the negative pressure orifice 312 being located at the geometric center of the "L" shaped glue area 1011. At this time, the support floating and suction of the second optical member 102 can be achieved with the minimum number of the orifices 311. In other embodiments, other numbers of negative pressure orifices 312 of other numbers of positive pressure orifices 311 may also be provided in glue area 1011.
Alternatively, referring to fig. 5, 6 and 7, the first optical member 101 includes a base plate and the second optical member 102 includes a grating. The optical cement gluing process of the first optical element 101 and the second optical element 102 is the optical cement gluing process of the base plate and the grating. When one or more gratings are photo-bonded to the backplane, a negative pressure suction grating may be generated through at least one orifice 300 provided in the backplane.
Exemplarily, the planar grating ruler measurement system has high requirement on repeatability indexes, belongs to an extremely high-precision displacement measurement system, and aims at the problems that the measurement stroke of the planar grating ruler measurement system of the workpiece table is large, a read head and a grating are switched to use in the continuous motion control process of the workpiece table, and the consistency of the scribing directions among multiple gratings needs to be strictly controlled in terms of the grating. Therefore, besides the integration of the bottom plate and the single grating, the method also relates to attitude detection and rotation control before optical cement gluing among a plurality of gratings so as to ensure that the grating directions of the glued gratings are kept consistent. Therefore, the grating direction detecting and adjusting device is involved, and the two devices need to avoid interference with a force application object. Although in the integration process of the attitude adjustment of the grating, the grating and the bottom plate which are horizontally arranged can be operated within tens of seconds initially due to the gap lubrication function of the air gap, the adjustment and the positioning of the whole attitude are brought with great challenges within a short time. Therefore, the optical assembly provided by the embodiment of the invention at least has the following effects:
1. external force is provided by the blowing and sucking nozzles (namely the positive pressure throttling hole and the negative pressure throttling hole) to cause surface shape change of the optical piece, and optical cement bonding is initiated. The time of the grating photoresist integration process is shortened, the accuracy of the grating splicing process is controllable, and the integration quality and reliability of the planar grating ruler on the whole machine are ensured.
2. The external force provided by the blowing suction nozzle from the grating bonding bottom plate avoids the risk of damaging the grating by contact. The grating surface force application component and the grating attitude detection and adjustment device are prevented from interfering.
3. External force is provided by the blowing and sucking nozzle, so that a stable air gap exists between the grating and the integrated base plate with a larger area, and the gap lubrication function is achieved. The method has the advantages that the relative position of the grating and the bottom plate can be adjusted sufficiently, and the risk that the surface shape is scratched due to the relative movement of the two optical cement bonding surfaces due to the small air gap under the traditional condition is avoided. Namely, the risk of scratching due to a small air gap when the grating and the bottom plate move horizontally relative to each other is avoided.
Optionally, the grating has a low-aperture optical cement profile. Low aperture means that the template is in contact with the edge of the workpiece. That is to say, the grating of low light ring is concave shape, and in the gluey veneer of bottom plate and grating, the center of grating at first contacts with the bottom plate and gluey veneer, and the edge of grating contacts with the bottom plate and gluey veneer at last to avoid sealing the air between grating and bottom plate, improved the caking degree, the firmness of bottom plate and grating gluey veneer.
Fig. 8 is a flowchart of a method for manufacturing an optical assembly according to an embodiment of the present invention, for forming the optical assembly according to the above embodiment, fig. 9-12 are schematic diagrams of a manufacturing process of an optical assembly according to an embodiment of the present invention, and referring to fig. 8 and fig. 9-12, the optical assembly includes a first optical component 101 and at least one second optical component 102, and the method for manufacturing an optical assembly includes the following steps:
s101, at least one orifice 300 is formed in the first optical member 101.
In this step, at least one throttle hole 300 may be formed in the first optical member 101 by, for example, dry etching or wet etching.
S102, generating a positive pressure through the at least one orifice 300 to form a gas film between the first optical member 101 and the second optical member 102.
In this step, exemplarily, referring to fig. 10, the at least one orifice 300 includes a positive pressure orifice 311, and the positive pressure orifice 311 is used to pass gas and generate positive pressure to support the second optical member 102.
In other embodiments, the at least one orifice 300 further comprises a negative pressure orifice 312, the negative pressure orifice 312 being configured to pass gas and generate a negative pressure to attract the second optical element 102. When the second optical element 102 is supported, the positive pressure orifice 311 and the negative pressure orifice 312 can be simultaneously opened (i.e. air passes through the positive pressure orifice 311 and the negative pressure orifice 312), and a very stable air film is formed between the first optical element 101 and the second optical element 102 by adjusting the distribution of positive pressure and negative pressure, which is beneficial to maintaining the stability of the second optical element 102 and detecting and adjusting the posture of the second optical element 102.
S103, generating negative pressure through at least one throttle hole 300 to suck the second optical element 102, and gluing the first optical element 101 and the second optical element 102.
In this step, for example, referring to fig. 11, when it is necessary to suck the second optical member 102 to the first optical member 101 for optical cement gluing, a negative pressure for sucking the second optical member 102 may be generated through the negative pressure orifice 312, the second optical member 102 moves toward the first optical member 101 by the suction force, and the second optical member 102 is brought into close contact with the first optical member 101 by the suction force and is glued by the optical cement.
When the optical assembly is formed, the negative pressure generated by the at least one throttling hole 300 adsorbs the second optical element 102, so that the first optical element 101 and the second optical element 102 are optically glued, the second optical element 102 does not need to be pressed by external mechanical force, non-contact external force is provided for the second optical element 102, the surface shape change of the first optical element 101 and the second optical element 102 is caused, the optical gluing of the first optical element 101 and the second optical element 102 is caused, and the risk that the second optical element 102 is damaged by contact is avoided.
Optionally, before the sucking of the second optical element 102 by the negative pressure generated by the at least one throttle hole 300 and the optical gluing of the first optical element 101 and the second optical element 102 (i.e. step S103), the manufacturing method of the optical assembly further comprises: the attitude of the second optical member 102 is detected and adjusted. In the embodiment of the present invention, the posture of the second optical element 102 is detected and adjusted before the first optical element 101 and the second optical element 102 are optically glued, so that the first optical element 101 and the second optical element 102 are optically glued according to the preset posture and the preset gluing position, thereby improving the quality of optical gluing. When there are a plurality of second optical members 102 that need to be optically glued, if the splicing manner of the plurality of second optical members 102 is changed, the optical performance of the optical assembly after optically glued will be changed, and the optical performance of the optical assembly after optically glued will deviate from the preset performance, so that it is especially important to detect and adjust the posture of the second optical member 102 when the plurality of second optical members 102 are optically glued to the first optical member 101.
Alternatively, referring to fig. 12, after the second optical member 102 is sucked by generating a negative pressure through the at least one orifice 300, and the first optical member 101 and the second optical member 102 are optically glued (i.e., step S103), the manufacturing method of the optical assembly further includes: all the orifices 300 are sealed with the same number of seals 401 as the orifices 300. In the embodiment of the present invention, a sealing member 401 is further disposed in the throttle hole 300, and the sealing member 401 seals the throttle hole 300, so that moisture is prevented from entering between the first optical element 101 and the second optical element 102 through the throttle hole 300, and the moisture is prevented from invading. The seal 401 may be removed when peeling the second optic 102 from the first optic 101 and then a positive pressure may be provided through the at least one orifice 300 (e.g., through the positive pressure orifice 311) to assist in the de-bonding process.
Optionally, the gas passing through the orifice 300 includes ozone and/or plasma. Ozone and plasma are strong oxidizing gas, and the strong oxidizing gas is favorable for removing organic matters on the surfaces of the first optical element 101 and the second optical element 102, so that the adsorption energy between the surfaces of the first optical element 101 and the second optical element 102 is improved, and the bonding strength of the first optical element 101 and the second optical element 102 is enhanced. In other embodiments, other strongly oxidizing gases may be used, and the invention is not limited in this respect.
The embodiment of the invention also simulates the non-contact bearing situation through simulation software ANSYS Workbench. Fig. 13 is a view of a numerical simulation finite element simulation of an embodiment of the present invention, the simulation diagram of fig. 13 corresponding to the optical assembly shown in fig. 3, and referring to fig. 3, 4 and 13, orifices 300 were arranged on a 200 mm x 200 mm area of the first optical member 101 using an equally spaced uniform array scheme. The length of the thin tube 321 is 45 mm, the diameter of the thin tube 321 is 2 mm, the length of the air cavity 322 is 20 mm, and the diameter of the air cavity 322 is 10 mm. In the following simulation, the thickness of the air film between the first optical element 101 and the second optical element 102 is 120 micrometers, when the air inlet hole is closed, the periphery of the air film is an inlet boundary, the inlet is at standard atmospheric pressure, and the rest is at wall surface conditions.
Fig. 14 is a plan view showing a pressure distribution of the first optical member in proximity to the surface of the second optical member when a positive pressure is generated in the orifice, fig. 15 is a perspective view showing a pressure distribution of the orifice when a positive pressure is generated in the orifice, fig. 16 is a plan view showing a pressure distribution of the second optical member in proximity to the surface of the first optical member when a positive pressure is generated in the orifice, and fig. 17 is a cross-sectional view showing a vertical pressure distribution of the orifice when a positive pressure is generated, referring to fig. 14 to 17, where the unit of pressure is Pa. For example in FIG. 14, the minimum pressure is 3.785e +000 (i.e., 3.785) and the maximum pressure is 3.117e +003 (i.e., 3117). As can be seen from fig. 14, the pressure distribution generated on the surface of the first optical member 101 by the 4 positive pressure orifices 311 is relatively uniform. As can be seen from fig. 16, the pressure distribution generated by the 4 positive pressure orifices 311 on the surface of the second optical member 102 is relatively uniform.
FIG. 18 is a cross-sectional view of the gas flow rate distribution when positive pressure is generated at the orifice, and FIG. 19 is a partial enlarged view of a portion of FIG. 18, with reference to FIGS. 18 and 19, where the gas flow rate is given in m/s (i.e., ms ^ -1 in FIGS. 18 and 19). The minimum air flow rate is 0.000e +000 (i.e., 0) and the maximum air flow rate is 8.375e +001 (i.e., 83.75). As can be seen from fig. 18 and 19, the airflow rate distribution generated by the 4 positive pressure orifices 311 on the surface of the first optical element 101 is relatively uniform.
Fig. 20 is a perspective view of the pressure distribution when the supply air pressure is increased by 9% and the orifice generates a positive pressure, fig. 21 is a top view of the pressure distribution when the supply air pressure is increased by 9% and the orifice generates a positive pressure, fig. 22 is a perspective view of the pressure distribution when the supply air pressure is decreased by 9% and the orifice generates a positive pressure, fig. 23 is a top view of the pressure distribution when the supply air pressure is decreased by 9% and the orifice generates a positive pressure and the first optical member is adjacent to the second optical member, fig. 20-fig. 23 show that when the supply air pressure fluctuates by ± 9% (i.e., by 18%), the pressure distribution on the surface of the first optical member 101 remains uniform and can still support the second optical member 102 (e.g., a grating 10 mm thick, the material of the grating is microcrystalline glass).
Fig. 24 is a perspective view showing the pressure distribution when negative pressure is generated in the orifice, fig. 25 is a plan view showing the pressure distribution when negative pressure is generated in the orifice, the first optical member being in proximity to the surface of the second optical member, and referring to fig. 3, 4, 24 and 25, the positive pressure orifice 311 is kept closed, and the negative pressure orifice 312 sucks in negative pressure to suck the second optical member 102. The narrow tube 321 with the negative pressure orifice 312 is an air suction port, the rest are wall surface conditions, the inlet boundary adopts a pressure inlet, and the wall surface and the inlet are respectively set to be standard atmospheric pressure and 10 times of standard atmospheric pressure. As can be seen from fig. 24 and 25, the air pressure on the surface of the first optical element 101 is consistent with the shape of the negative pressure orifice 312, the isopressure line is substantially circular, and the air pressure distribution is uniform.
Fig. 26 is a schematic diagram showing the deformation of the first optical member surface shape when the first negative pressure is generated in the orifice, fig. 27 is a schematic diagram showing the deformation of the first optical member surface shape when the second negative pressure is generated in the orifice, and referring to fig. 26 and fig. 27, fig. 3, fig. 4, fig. 26, and fig. 27, the suction force under the first negative pressure is smaller than the suction force under the second negative pressure, and therefore the thin tubes 321 of the first negative pressure orifice 312 deform less than the thin tubes 321 of the second negative pressure orifice 312. The different negative pressures can cause the diameter of the tubule 321 of the negative pressure orifice 312 to vary from 0.1 microns to 37 microns. The negative pressure generated by the structure of the device can provide non-contact external force and change the surface shape to a certain extent so as to meet the optical cement condition.
It is to be noted that the foregoing is only illustrative of the preferred embodiments of the present invention and the technical principles employed. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious modifications, rearrangements, combinations and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, although the present invention has been described in greater detail by the above embodiments, the present invention is not limited to the above embodiments, and may include other equivalent embodiments without departing from the spirit of the present invention, and the scope of the present invention is determined by the scope of the appended claims.
Claims (10)
1. An optical assembly comprising a first optical element and at least one second optical element,
the first optic includes at least one orifice;
when the optical assembly is formed, the second optical element is absorbed by generating negative pressure through at least one throttling hole, and the first optical element and the second optical element are glued;
the throttling hole comprises a thin tube and an air cavity which are communicated with each other, and the air cavity is positioned between the thin tube and the second optical piece;
the at least one orifice includes at least one positive pressure orifice for passing gas and generating positive pressure to support the second optical member and at least one negative pressure orifice for passing gas and generating negative pressure to adsorb the second optical member;
the air source sprays positive pressure compressed air out through the thin tube, and the air sprayed out from the thin tube flows into the air cavity, so that upward pressure is generated, namely the pressure far away from the first optical piece is generated;
the air source sucks air through the thin tube, the air cavity generates negative pressure, and air flows into the thin tube from the air cavity, so that downward pressure is generated, namely the pressure towards the first optical piece is generated, and the non-contact force for adsorbing the second optical piece is generated.
2. The optical assembly of claim 1, further comprising at least one seal, the number of seals being the same as the number of orifices, the seal being located within the orifice.
3. An optical assembly according to claim 1, comprising M of said second optical elements;
the first optical piece comprises M gluing areas, M second optical pieces are respectively glued in the M gluing areas of the first optical piece, and M is a positive integer larger than 1.
4. An optical assembly according to claim 3, wherein the shape of the glue area is the same as the shape of the second optical element;
the at least one orifice includes at least one positive pressure orifice for passing gas and generating positive pressure to support the second optical member and at least one negative pressure orifice for passing gas and generating negative pressure to adsorb the second optical member;
and each gluing area is provided with one negative pressure throttling hole and a plurality of positive pressure throttling holes, and the negative pressure throttling hole is positioned at the geometric center of the gluing area.
5. The optical assembly of claim 1, wherein the first optical element comprises a backplane and the second optical element comprises a grating.
6. The optical assembly of claim 5, wherein the grating has a low-f-stop optical cement profile.
7. A method of manufacturing an optical assembly comprising a first optical element and at least one second optical element, the method comprising:
forming at least one orifice in the first optic;
generating a positive pressure through at least one of the orifices to form a gas film between the first optical member and the second optical member;
and generating negative pressure through at least one throttling hole to adsorb the second optical element, so that the first optical element and the second optical element are glued together by optical cement.
8. The method according to claim 7, wherein before the step of adhering the first optical member and the second optical member together by sucking the second optical member through the at least one orifice to generate negative pressure, the method further comprises:
and detecting and adjusting the posture of the second optical piece.
9. The method of claim 7, wherein after the step of adhering the first optical member and the second optical member together by sucking the second optical member through the at least one orifice to generate negative pressure, further comprises:
all of the orifices are sealed with the same number of seals as the orifices.
10. The method of claim 7, wherein the gas passing through the orifice hole comprises ozone and/or plasma.
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Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3140061U (en) * | 2007-09-12 | 2008-03-13 | 宸鴻光電科技股▲分▼有限公司 | Substrate bonding equipment |
| CN102116917A (en) * | 2011-01-19 | 2011-07-06 | 四川欧瑞特光电科技有限公司 | Optical cement method for optical element and implementation thereof in pyramid array |
| CN104002541A (en) * | 2013-02-25 | 2014-08-27 | 全研科技有限公司 | Vacuum processing jointing mechanism and vacuum jointing method |
| CN105015136A (en) * | 2015-08-04 | 2015-11-04 | 苏州市博奥塑胶电子有限公司 | Plastic cement product surface film pasting jig |
| CN106739424A (en) * | 2015-11-20 | 2017-05-31 | 财团法人工业技术研究院 | Taking-down and bonding device, taking-down method and bonding method using same |
| CN208506441U (en) * | 2018-07-19 | 2019-02-15 | 广州视源电子科技股份有限公司 | Electromagnetic membrane mounting structure, backlight display mould group and display equipment |
| KR20190070660A (en) * | 2017-12-13 | 2019-06-21 | 단국대학교 천안캠퍼스 산학협력단 | Lamination apparatus and lamination method using the same for reducing the incidence of oca scratches |
| CN110588131A (en) * | 2019-10-21 | 2019-12-20 | 业成科技（成都）有限公司 | Non-contact type pressure-equalizing and pasting mechanism |
| CN210294732U (en) * | 2019-07-23 | 2020-04-10 | 深圳市友联亨达光电有限公司 | Liquid crystal glue filling full-laminating device for negative-pressure capillary tube |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101961945B (en) * | 2009-07-24 | 2014-03-26 | 鸿富锦精密工业（深圳）有限公司 | Absorption device and jointing equipment having the same |
| CN102173238A (en) * | 2010-12-29 | 2011-09-07 | 友达光电股份有限公司 | Vacuum imprinting device, vacuum laminating device and manufacturing method of laminated optical assembly |
| JP2014213572A (en) * | 2013-04-26 | 2014-11-17 | スリーエム イノベイティブプロパティズカンパニー | Method for producing laminate including cured pressure sensitive adhesive sheet |
-
2020
- 2020-05-29 CN CN202010479428.4A patent/CN113805296B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3140061U (en) * | 2007-09-12 | 2008-03-13 | 宸鴻光電科技股▲分▼有限公司 | Substrate bonding equipment |
| CN102116917A (en) * | 2011-01-19 | 2011-07-06 | 四川欧瑞特光电科技有限公司 | Optical cement method for optical element and implementation thereof in pyramid array |
| CN104002541A (en) * | 2013-02-25 | 2014-08-27 | 全研科技有限公司 | Vacuum processing jointing mechanism and vacuum jointing method |
| CN105015136A (en) * | 2015-08-04 | 2015-11-04 | 苏州市博奥塑胶电子有限公司 | Plastic cement product surface film pasting jig |
| CN106739424A (en) * | 2015-11-20 | 2017-05-31 | 财团法人工业技术研究院 | Taking-down and bonding device, taking-down method and bonding method using same |
| KR20190070660A (en) * | 2017-12-13 | 2019-06-21 | 단국대학교 천안캠퍼스 산학협력단 | Lamination apparatus and lamination method using the same for reducing the incidence of oca scratches |
| CN208506441U (en) * | 2018-07-19 | 2019-02-15 | 广州视源电子科技股份有限公司 | Electromagnetic membrane mounting structure, backlight display mould group and display equipment |
| CN210294732U (en) * | 2019-07-23 | 2020-04-10 | 深圳市友联亨达光电有限公司 | Liquid crystal glue filling full-laminating device for negative-pressure capillary tube |
| CN110588131A (en) * | 2019-10-21 | 2019-12-20 | 业成科技（成都）有限公司 | Non-contact type pressure-equalizing and pasting mechanism |
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