CN104002541A - Vacuum processing jointing mechanism and vacuum jointing method - Google Patents
Vacuum processing jointing mechanism and vacuum jointing method Download PDFInfo
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- CN104002541A CN104002541A CN201310058705.4A CN201310058705A CN104002541A CN 104002541 A CN104002541 A CN 104002541A CN 201310058705 A CN201310058705 A CN 201310058705A CN 104002541 A CN104002541 A CN 104002541A
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Abstract
A vacuum processing jointing mechanism is characterized in that a lower holding plate and an airbag are arranged on a baseboard, the air outlet end of an aerating device is connected to the airbag, a vacuum pump is connected with the pumping hole of the lower holding plate, the baseboard is positioned on the joint part of an upper holding plate and the pressing part of the lower holding plate, and the guiding hole of the upper holding plate aligns at and is telescoped in the guiding pillar of the lower holding plate in order to joint the upper holding plate and the lower holding plate; the airbag upward extends by starting the aerating device to fill up a gap between the upper holding plate and the lower holding plate in order to adjust the flatness of the upper holding plate and the lower holding plate; and the airbag is released, the vacuum jointing effect of the upper holding plate and the lower holding plate is realized through the vacuum by using the pressure difference of the pumping hole, and the substrate of the upper holding plate is adhered to the substrate of the lower holding plate due to the vacuum jointing of the upper holding plate and the lower holding plate.
Description
Technical field
The present invention relates to a kind of vacuum manufacture field, refer to that especially a kind of gap of adjusting upper and lower holding plate by air bag is to reach good flatness, and increase the upper and lower holding plate vacuum processing fit body in service life, and vacuum abutted method.
Background technology
Flourish along with high-tech electronic information industry, consumption electronic products have become the necessity in people's daily life, and many consumption electronic products stride forward towards compact trend, particularly in conjunction with showing and the touch control display panel of inputting two kinds of technology, it has the function of liquid crystal display and touch-control input simultaneously, and can significantly promote the Practical Performance of all kinds of consumption electronic products.
Generally speaking, touch control display panel is comprised of contact panel and liquid crystal panel, most engagement means be take gummed as main, it mainly divides two kinds of patterns: that is the plate face of a slice plate is coated with after one deck optics glue therein, by the corresponding laminating of another sheet plate, utilize subsequently ultraviolet light that this optical cement is solidified again; Or adopting the blooming and the plate that scribble viscose directly fits, to complete the preparation of this touch control display panel.
Therefore, industry is constantly put forth effort on the exploitation of the package technique of touch control display panel, to by the mode of automated production, improves similar assembling processing production capacity and the yield that need to carry out plate gummed.In principle, automation plate abutted equipment mainly utilizes conveyer belt in straight-line mode, machining object is transported one by one by outside a series of basic gluings, laminating, the procedure of processing such as dry, more can in the process of laminating, further utilize vacuum negative pressure device to make the plate external environment fitting form a negative pressure state, contribute to the Bas Discharged between plate, guarantee the laminating quality of plate.
Between its upper and lower plate of existing vacuum processing joint tool, using O type ring (O Ring) as obturator, and the effect of buffering is provided while engaging as upper and lower plate; Yet the shortcoming of existing article is: O type ring is made by rubber, after long-time use, can cause the situation of upper and lower plate skew to produce, cause the out-of-flatness of laminating workpiece, and alveolate generation; Moreover for the workpiece flatness of fitting, upper and lower board plane degree needs quite high (approximately ± 0.02mm ~ ± 1 μ m), and the higher machinery of flatness, its frame for movement is got over ambassador's manufacturing cost and is improved; In addition, upper and lower plate engages with high pressure, high impact forces, gets off for a long time to cause unavoidably upper and lower board plane out-of-flatness and service life to shorten.
As can be seen here, above-mentioned existing article still have many disappearances, a real non-kindhearted designer, and urgently improved.
The inventor, in view of above-mentioned existing vacuum processing every shortcoming that joint tool derived, so urgently think of is improved innovation, and after concentrating on studies through taking great pains to attain one's goal for many years, has has successfully researched and developed this part vacuum processing fit body finally.
Summary of the invention
Object of the present invention is to provide a kind of vacuum processing fit body, adjusts the gap of upper and lower holding plate to reach good flatness by air bag, and increases the upper and lower holding plate vacuum processing fit body in service life.
A time object of the present invention is to provide the little and upper and lower holding plate flatness of a kind of volume not need the too high vacuum processing fit body that can reach excellent planar degree.
For reaching above-mentioned purpose, the invention provides a kind of vacuum processing fit body, it comprises:
One base plate;
Holding plate once, be arranged on base plate, this lower holding plate is used for loading and unloading substrate, the central authorities of this lower holding plate are arranged with an enclosed area and a pressure section, four angle points of this lower holding plate are provided with guide pillar and supply holding plate on to be inserted in joint, this lower holding plate is in the other bleeding point arranging with even number and diagonal angle that is provided with of adjacent guide pillar, when vacuum abutted, for vavuum pump, bleeds;
Holding plate on this, be arranged at lower holding plate top, on this, four of holding plate angle points have the guide hole of corresponding guide pillar, holding plate is moved freely on lower holding plate, and on this, bottom surface of holding plate convexes with the junction surface of a corresponding pressure section, substrate pressing use while engaging with lower holding plate, and upper holding plate is also provided with enclosed area substrate handling;
One air bag, is arranged between base plate and lower holding plate, extends upward the gap of filling up upper and lower holding plate, to adjust the flatness of upper and lower holding plate after this airbag aeration;
One aerating device, is arranged on base plate and adjacent to upper holding plate and lower holding plate, and this aerating device outlet side is connected with air bag, and air bag is inflated;
One vavuum pump, be arranged on base plate and adjacent to upper holding plate and lower holding plate, this vavuum pump is bled by the Quick air-discharge end of air bag, assists air bag to lose heart, and after air bag loses heart, by the bleeding point of lower holding plate, bleed, holding plate and lower holding plate are engaged and reach vacuum abutted effect.
Described vacuum processing fit body, wherein, this air bag is arranged at the enclosed area of lower holding plate, and the pressure section of lower holding plate is further provided with a plurality of bleeding point substrates and is loaded and unloaded on described a plurality of bleeding points.
The present invention also provides a kind of vacuum abutted method that is applicable to described vacuum processing fit body, and it includes:
Step 1: lower holding plate and air bag are arranged on base plate, and aerating device outlet side is linked to the bleeding point that air bag, vavuum pump are linked to lower holding plate;
Step 2: substrate is positioned on the junction surface and lower holding plate pressure section of upper holding plate, then upper plate is held to the guide hole of plate and aimed at the guide pillar of lower holding plate and be inserted in, holding plate and lower holding plate are engaged;
Step 3: start the gap that aerating device extends upward air bag to fill up upper and lower holding plate, to adjust the flatness of upper and lower holding plate;
Step 4: air bag is lost heart by vavuum pump, and make upper holding plate and lower holding plate reach vacuum abutted effect by the pressure differential of bleeding point by vavuum pump, meanwhile, be arranged at substrate on holding plate and lower holding plate because of upper holding plate and lower holding plate is vacuum abutted sticks together maintenance;
Step 5: close vavuum pump, substrate is detached.
The present invention separately provides a kind of vacuum abutted method that is applicable to described vacuum processing fit body, and it includes:
Step 1: lower holding plate and air bag are arranged on base plate, and aerating device outlet side is linked to the bleeding point that air bag, vavuum pump are linked to lower holding plate;
Step 2: substrate is positioned on the junction surface and lower holding plate pressure section of upper holding plate, then upper plate is held to the guide hole of plate and aimed at the guide pillar of lower holding plate and be inserted in, holding plate and lower holding plate are engaged;
Step 3: on this, holding plate directly holds down the displacement of plate direction and makes baseplate-laminating, and vavuum pump is vacuumized by bleeding point, now, this aerating device is to airbag aeration, to prevent that substrate from sliding, adjust the gap of lower holding plate, and then the flatness of the upper holding plate of fine setting and lower holding plate simultaneously, be arranged at substrate on holding plate and lower holding plate because of upper holding plate and lower holding plate is vacuum abutted sticks together maintenance simultaneously;
Step 4: close vavuum pump, substrate is detached.
The invention has the beneficial effects as follows: by air bag, adjust the gap of upper and lower holding plate to reach good flatness, and increase upper and lower holding plate service life; Little and the upper and lower holding plate flatness of volume does not need too highly can reach excellent planar degree.
Accompanying drawing explanation
Fig. 1 is the stereogram of vacuum processing fit body of the present invention;
Fig. 2 is three-dimensional exploded view of the present invention;
Fig. 3 is the action schematic diagram of the step 1 of the present invention's the first preferred embodiment; Explanation is arranged at lower holding plate and air bag on base plate, and by aerating device outlet side be linked to air bag, vavuum pump is linked to the bleeding point of lower holding plate and the Quick air-discharge end of air bag;
Fig. 4 is the action schematic diagram of the step 2 of the present invention's the first preferred embodiment; Explanation is positioned over substrate on the junction surface and lower holding plate pressure section of upper holding plate;
Fig. 5 is the action schematic diagram of the step 3 of the present invention's the first preferred embodiment; Illustrate and start the gap that aerating device extends upward air bag to fill up lower holding plate, to adjust the flatness of upper and lower holding plate;
Fig. 6 is the action schematic diagram of the step 4 of the present invention's the first preferred embodiment; Explanation is lost heart air bag by vavuum pump;
Fig. 7 is the action schematic diagram of the step 4 of the present invention's the first preferred embodiment; Explanation makes upper and lower holding plate reach vacuum abutted effect by the pressure differential of bleeding point by vavuum pump, and meanwhile, the substrate being arranged on upper and lower holding plate sticks together maintenance because upper and lower holding plate is vacuum abutted;
Fig. 8 is the action schematic diagram of the step 5 of the present invention's the first preferred embodiment; Close vavuum pump, substrate is detached;
Fig. 9 is the action schematic diagram of the step 3 of the present invention's the second preferred embodiment;
Figure 10 is the action schematic diagram of the step 4 of the present invention's the second preferred embodiment.
Description of reference numerals: 1-base plate; Holding plate under 2-; 21-enclosed area; 22-pressure section; 23-guide pillar; 24-bleeding point; The upper holding plate of 3-; 31-guide hole; 32-junction surface; 33-enclosed area; 4-air bag; 41-Quick air-discharge end; 5-aerating device; 51-outlet side; 6-vavuum pump; A, B-substrate; C-ring-type adhesive agent.
The specific embodiment
Refer to Fig. 1, Fig. 2, Fig. 3 and Fig. 4, vacuum provided by the present invention processing fit body, mainly includes: a base plate 1, once holding plate 3, an air bag 4, an aerating device 5 and a vavuum pump 6 form on holding plate 2.
This base plate 1, is generally the flat board of a rectangle, provides lower holding plate 2, air bag 4, aerating device 5 arrange or are fixed thereon with vavuum pump 6.
This lower holding plate 2, generally the flat board that is a rectangle, be fixedly arranged on base plate 1, provide substrate B handling thereon, the central authorities of this lower holding plate 2 are arranged with an enclosed area 21 and a pressure section 22, be provided with guide pillar 23 keep supplying holding plate 3 and be inserted in joint in four angle points, and this lower holding plate 2 is in the other bleeding point 24 arranging with even number and diagonal angle that is provided with of adjacent guide pillar 23, when vacuum abutted, for vavuum pump 6, bleed.
On this, holding plate 3, be arranged at lower holding plate 2 tops, on this, holding plate 3 has the guide hole 31 of corresponding guide pillar 23 in four angle points, holding plate 3 is moved freely on lower holding plate 2, and on this, bottom surface of holding plate 3 convexes with the junction surface 32 of a corresponding pressure section 22, substrate A, B pressing use while engaging with lower holding plate 2, and upper holding plate 3 is also provided with enclosed area 33 substrate A handling thereon; Further illustrate the feature of holding plate 3 on this, on this, holding plate 3 is a movable end, by the guide pillar 23 of lower holding plate 2 and the guide hole 31 of upper holding plate 3, coordinate, allow holding plate 3 be able to limited range intrinsic displacement, by the junction surface 32 of holding plate on this 3 and the pressure section 22 of lower holding plate 2, engage (matched moulds), substrate A, B laminating is sticked together.
This air bag 4, is arranged between base plate 1 and lower holding plate 2, extends upward and fills up the gap of adjusting lower holding plate 2, to adjust the flatness of upper and lower holding plate 2,3 after its inflation; Further illustrate this air bag 4 features, this air bag 4 is made for rubber, is subject to base plate 1 and lower holding plate 2 configuration modes that air bag 4 only can be extended upward, after these air bag 4 inflations, can fill the gap of lower holding plate 2, and then the flatness of upper and lower holding plate 2,3 is finely tuned; In addition, substrate A, B, during fitting, can not produce the generation of the not normal or bubble of flatness; Moreover this air bag 4 further comprises a Quick air-discharge end 41, when disappointing, vavuum pump 6 is connected to Quick air-discharge end 41, and air bag 4 is bled and then quick air releasing.
This aerating device 5, is arranged on base plate 1 and adjacent to upper and lower holding plate 2,3, and these aerating device 5 outlet sides 51 are connected with air bag 4, and air bag 4 is inflated; Further illustrate the feature of this aerating device 5, this aerating device 5 comprises a gas cylinder (not shown) or is a pump (not shown), after starting aerating device 5, air bag 4 is inserted to air, allows air bag 4 extend upward.
This vavuum pump 6, is arranged on base plate 1 and adjacent to upper and lower holding plate 2,3, and this vavuum pump 6 assists air bag 4 to lose heart, and after air bag 4 loses heart, by the bleeding point 24 of lower holding plate 2, bleeds, and upper and lower holding plate 2,3 is engaged and reach vacuum abutted effect; Further illustrate the feature of this vavuum pump 6, for adapting to high-tech industry to environmental protection and not being subject to the active demand of oil vapour pollution manufacturing process, this vavuum pump 6 is selected dry vacuum pump, make to carry out vacuum abutted during, upper and lower holding plate 2,3 is oil-containing, aqueous vapor not, to obtain clean manufacturing process.
Therefore above-mentioned, be the introduction of a kind of vacuum processing fit body main member provided by the present invention and assembling mode thereof, then used again step to be described below:
Step 1: as shown in Figure 3, first, lower holding plate 2 and air bag 4 are arranged on base plate 1, and by aerating device 5 outlet sides 51 be linked to air bag 4, vavuum pump 6 is linked to the bleeding point 24 of lower holding plate 2 and the Quick air-discharge end 41 of air bag 4, upper holding plate 3 is fixed on fixed mould on (not shown).
Step 2: as shown in Figure 4, by substrate A, B is positioned on the junction surface 32 and lower holding plate 2 pressure sections 22 of holding plate 3, and by substrate A, B is positioned over, lower holding plate 2, 3 enclosed areas 21, 33 and its vacuumize (about about 0.5Pa), by air-breathing mode by substrate A, in B absorption, lower holding plate 2, 3, then upper plate being held to the guide hole 31 of plate aims at the guide pillar 23 of lower holding plate 2 and is inserted in and contraposition, then by the substrate A of upper holding plate 3, B forces to peel off, moment presses solidly in lower holding plate 2 upper substrate A, the ring-type adhesive agent C (glue material) of B, make, lower holding plate 2, substrate A on 3, B is specific gap because draught head is pressurized to.More specifically, the relatively-movable mode of upper and lower holding plate 2,3 modes by lifting (being Z-axis direction) is supported, under atmospheric environment respectively for upper and lower holding plate 2,3 under the state of above-below direction separation, substrate A, B that installation manipulator (not shown) is sent here, the mode by lifting makes upper and lower holding plate 2,3 approach the enclosed area 21,33 of upper and lower holding plate 2,3.
Step 3: as shown in Figure 5, start aerating device 5 and make air bag 4 inflations extend upward the gap of filling up lower holding plate 2, carry out successively coarse adjustment, finely tune the flatness of upper and lower holding plate 2,3.More specifically, by moving horizontally under the running of mode (not shown), wherein any one moves towards the adjustment of XY θ direction another one to make upper and lower holding plate 2,3, and by air bag 4, adjusts the gap of Z-axis direction.
Step 4: as shown in Fig. 6 ~ Fig. 7, by vavuum pump 6, air bag 4 is lost heart, and make upper and lower holding plate 2,3 reach vacuum abutted effect by the pressure differential of bleeding point 24 by vavuum pump 6, meanwhile, the substrate A, the B that are arranged on upper and lower holding plate 2,3 stick together maintenance because upper and lower holding plate 2,3 is vacuum abutted.More specifically, after end step, by vavuum pump 6, make upper and lower holding plate 2,3 reach vacuum abutted effect by the pressure differential of bleeding point 24, simultaneously, this is to producing draught head inside and outside substrate A, B, is squeezed to specific gap and completes product under the state that the ring-type adhesive agent C on substrate A, B is enclosed.
Step 5: as shown in Figure 8, close vavuum pump 6, substrate A, B are detached, the vacuum abutted program of completing substrate A, B.
Impulsive force when slowing down upper and lower holding plate 2,3 and engage due to the design of air bag 4 and existing O type ring are by contrast, increase by 2,3 service lifes of upper and lower holding plate, in addition,, when air bag 4 extends upward, can fill up the gap of upper and lower holding plate 2,3 and O type ring and compare down and there is the larger free degree; Moreover, the gap of the full upper and lower holding plate 2,3 that can fill out when air bag 4 extends upward, therefore upper and lower holding plate 2,3 flatnesses do not need too highly, can reduce manufacturing cost.
Please refer to Fig. 9 ~ Figure 10, vacuum processing fit body for the second preferred embodiment of the present invention, it is identical with the first preferred embodiment includes a base plate 1, once holding plate 3, an air bag 4, an aerating device 5 and a vavuum pump 6 on holding plate 2,, yet its Main Differences is:
In the present embodiment, this air bag 4 is arranged at the enclosed area 21 of lower holding plate 2, and the pressure section 22 of lower holding plate 2 is provided with a plurality of bleeding point 24 substrate B handling thereon.
Moreover, when carrying out vacuum abutted operation, its step is roughly identical with the first preferred embodiment, its difference is step 3,4, on this, holding plate 3 directly holds down plate 2 direction displacements and makes substrate A, B laminating, and vavuum pump 6 is vacuumized by bleeding point 24, now, this aerating device is to air bag 4 inflations, to prevent that substrate A, B from sliding, adjust the gap of lower holding plate 2 simultaneously, and then finely tune the flatness of upper and lower holding plate 2,3, and step is identical with the first preferred embodiment afterwards, therefore do not add to repeat.The second preferred embodiment has advantages of the first preferred embodiment equally, and can avoid the situation that substrate A, B slide to occur.
The announcement system of the above embodiment is in order to the present invention to be described, not in order to limit the present invention, therefore the variation of numerical value and the displacement of equivalence element such as must be subordinate to category of the present invention.
Claims (4)
1. a vacuum processing fit body, is characterized in that, comprising:
One base plate;
Holding plate once, be arranged on base plate, this lower holding plate is used for loading and unloading substrate, the central authorities of this lower holding plate are arranged with an enclosed area and a pressure section, four angle points of this lower holding plate are provided with guide pillar and supply holding plate on to be inserted in joint, this lower holding plate is in the other bleeding point arranging with even number and diagonal angle that is provided with of adjacent guide pillar, when vacuum abutted, for vavuum pump, bleeds;
Holding plate on this, be arranged at lower holding plate top, on this, four of holding plate angle points have the guide hole of corresponding guide pillar, holding plate is moved freely on lower holding plate, and on this, bottom surface of holding plate convexes with the junction surface of a corresponding pressure section, substrate pressing use while engaging with lower holding plate, and upper holding plate is also provided with enclosed area substrate handling;
One air bag, is arranged between base plate and lower holding plate, extends upward the gap of filling up upper and lower holding plate, to adjust the flatness of upper and lower holding plate after this airbag aeration;
One aerating device, is arranged on base plate and adjacent to upper holding plate and lower holding plate, and this aerating device outlet side is connected with air bag, and air bag is inflated;
One vavuum pump, be arranged on base plate and adjacent to upper holding plate and lower holding plate, this vavuum pump is bled by the Quick air-discharge end of air bag, assists air bag to lose heart, and after air bag loses heart, by the bleeding point of lower holding plate, bleed, holding plate and lower holding plate are engaged and reach vacuum abutted effect.
2. vacuum as claimed in claim 1 processing fit body, is characterized in that, this air bag is arranged at the enclosed area of lower holding plate, and the pressure section of lower holding plate is further provided with a plurality of bleeding point substrates and is loaded and unloaded on described a plurality of bleeding points.
3. a vacuum abutted method that is applicable to vacuum processing fit body as claimed in claim 1, is characterized in that, includes:
Step 1: lower holding plate and air bag are arranged on base plate, and aerating device outlet side is linked to the bleeding point that air bag, vavuum pump are linked to lower holding plate;
Step 2: substrate is positioned on the junction surface and lower holding plate pressure section of upper holding plate, then upper plate is held to the guide hole of plate and aimed at the guide pillar of lower holding plate and be inserted in, holding plate and lower holding plate are engaged;
Step 3: start the gap that aerating device extends upward air bag to fill up upper and lower holding plate, to adjust the flatness of upper and lower holding plate;
Step 4: air bag is lost heart by vavuum pump, and make upper holding plate and lower holding plate reach vacuum abutted effect by the pressure differential of bleeding point by vavuum pump, meanwhile, be arranged at substrate on holding plate and lower holding plate because of upper holding plate and lower holding plate is vacuum abutted sticks together maintenance;
Step 5: close vavuum pump, substrate is detached.
4. a vacuum abutted method that is applicable to vacuum processing fit body as claimed in claim 2, is characterized in that, includes:
Step 1: lower holding plate and air bag are arranged on base plate, and aerating device outlet side is linked to the bleeding point that air bag, vavuum pump are linked to lower holding plate;
Step 2: substrate is positioned on the junction surface and lower holding plate pressure section of upper holding plate, then upper plate is held to the guide hole of plate and aimed at the guide pillar of lower holding plate and be inserted in, holding plate and lower holding plate are engaged;
Step 3: on this, holding plate directly holds down the displacement of plate direction and makes baseplate-laminating, and vavuum pump is vacuumized by bleeding point, now, this aerating device is to airbag aeration, to prevent that substrate from sliding, adjust the gap of lower holding plate, and then the flatness of the upper holding plate of fine setting and lower holding plate simultaneously, be arranged at substrate on holding plate and lower holding plate because of upper holding plate and lower holding plate is vacuum abutted sticks together maintenance simultaneously;
Step 4: close vavuum pump, substrate is detached.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310058705.4A CN104002541A (en) | 2013-02-25 | 2013-02-25 | Vacuum processing jointing mechanism and vacuum jointing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310058705.4A CN104002541A (en) | 2013-02-25 | 2013-02-25 | Vacuum processing jointing mechanism and vacuum jointing method |
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| Publication Number | Publication Date |
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| CN104002541A true CN104002541A (en) | 2014-08-27 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201310058705.4A Pending CN104002541A (en) | 2013-02-25 | 2013-02-25 | Vacuum processing jointing mechanism and vacuum jointing method |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107867040A (en) * | 2016-09-26 | 2018-04-03 | 三星显示有限公司 | Laminating apparatus and the laminating method using laminating apparatus |
| CN113805296A (en) * | 2020-05-29 | 2021-12-17 | 上海微电子装备（集团）股份有限公司 | Optical assembly and manufacturing method thereof |
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| CN2681526Y (en) * | 2004-02-24 | 2005-02-23 | 上海朗华科贸有限公司 | Vacuum pressing machine for flexible circuit board |
| US20090294036A1 (en) * | 2008-05-29 | 2009-12-03 | Robert Burkle Gmbh | Press and method for laminating essentially plate-shaped workpieces |
| CN201712237U (en) * | 2010-06-04 | 2011-01-19 | 张振安 | Mechanical pressing workbench |
| US20110083801A1 (en) * | 2008-01-09 | 2011-04-14 | Mitsubishi Heavy Industries, Ltd. | Room temperature bonding machine and room temperature bonding method |
| JP2013000939A (en) * | 2011-06-14 | 2013-01-07 | Murata Mfg Co Ltd | Mechanism for controlling degree of vacuum of vacuum chamber, joining apparatus equipped with the same, method for controlling degree of vacuum of vacuum chamber, and method for controlling degree of vacuum of joining apparatus |
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- 2013-02-25 CN CN201310058705.4A patent/CN104002541A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2681526Y (en) * | 2004-02-24 | 2005-02-23 | 上海朗华科贸有限公司 | Vacuum pressing machine for flexible circuit board |
| US20110083801A1 (en) * | 2008-01-09 | 2011-04-14 | Mitsubishi Heavy Industries, Ltd. | Room temperature bonding machine and room temperature bonding method |
| US20090294036A1 (en) * | 2008-05-29 | 2009-12-03 | Robert Burkle Gmbh | Press and method for laminating essentially plate-shaped workpieces |
| CN201712237U (en) * | 2010-06-04 | 2011-01-19 | 张振安 | Mechanical pressing workbench |
| JP2013000939A (en) * | 2011-06-14 | 2013-01-07 | Murata Mfg Co Ltd | Mechanism for controlling degree of vacuum of vacuum chamber, joining apparatus equipped with the same, method for controlling degree of vacuum of vacuum chamber, and method for controlling degree of vacuum of joining apparatus |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107867040A (en) * | 2016-09-26 | 2018-04-03 | 三星显示有限公司 | Laminating apparatus and the laminating method using laminating apparatus |
| CN113805296A (en) * | 2020-05-29 | 2021-12-17 | 上海微电子装备（集团）股份有限公司 | Optical assembly and manufacturing method thereof |
| CN113805296B (en) * | 2020-05-29 | 2023-02-21 | 上海微电子装备（集团）股份有限公司 | Optical assembly and manufacturing method thereof |
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Application publication date: 20140827 |