CN103376262B - Optical detection apparatus - Google Patents

Optical detection apparatus Download PDF

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Publication number
CN103376262B
CN103376262B CN201210465046.1A CN201210465046A CN103376262B CN 103376262 B CN103376262 B CN 103376262B CN 201210465046 A CN201210465046 A CN 201210465046A CN 103376262 B CN103376262 B CN 103376262B
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CN
China
Prior art keywords
detection
mentioned
objective
lug
detection lug
Prior art date
Application number
CN201210465046.1A
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Chinese (zh)
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CN103376262A (en
Inventor
李载升
金德禹
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技佳唯斯股份有限公司
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Priority to KR1020120044005A priority Critical patent/KR101325761B1/en
Priority to KR10-2012-0044005 priority
Application filed by 技佳唯斯股份有限公司 filed Critical 技佳唯斯股份有限公司
Publication of CN103376262A publication Critical patent/CN103376262A/en
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Publication of CN103376262B publication Critical patent/CN103376262B/en

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Abstract

The present invention relates to optical detection apparatus, in the process of image obtaining the detection lug formed by flexible material, by spraying pressurized air from the top of detection lug by minimizing deformation, maintenance smoothness, make it possible to detect more accurately, comprise: detect objective table, it is formed by photopermeability material, loads for detection lug; Fixed cell, it is formed at above-mentioned detection objective table, fixing above-mentioned detection lug; Fixed frame, it supports side or the lower surface of above-mentioned detection objective table; Back light unit, it is from the below of above-mentioned detection objective table, irradiates light to the detection lug detected on objective table; Shooting unit, it is configured at the top of above-mentioned detection objective table, obtains the image of the detection lug be loaded on above-mentioned detection objective table; Gas injection portion, its in the below of above-mentioned shooting unit with above-mentioned shooting cell location on identical axle, spray pressurized air to above-mentioned detection lug, make detection lug be close to detection objective table.

Description

Optical detection apparatus
Technical field
The present invention relates to optical detection apparatus, relate in more detail in the process of the image obtaining the detection lug formed by flexible material, by spraying the optical detection apparatus that pressurized air makes minimizing deformation, maintains smoothness can detect more accurately on the top of detection lug.
Background technology
In general, various display device is in the trend kept the large-scale development gradually, and the thickness of product is but thinning gradually by contrast.Display device as above is usually by utilizing the vision-based detection of optical camera (VisionInspection) whether badly to detect.
In order to perform vision-based detection as above, the transfer unit of transfer detected object thing just must be set and detect and the fixed cell of fixed test object for carrying out.
Especially, namely having soft film to membraneous material, form porose substrate etc. when carrying out Surface testing and metering, smoothness is carried as very important item.As at the fixed cell carrying out the smoothness guaranteeing detection lug in the process detected, there is configuration detection sheet between two-layer transparent glass substrate in the past, or apply vacuum adsorption force to above described holes adsorb the method for fixed test sheet at peripheral machining hole.But, in situations as mentioned above, exist because of detection lug distortion or tilt phenomenon and produce the problem in the region that cannot detect.
And, have 10 ~ 80 microns thickness film, formed in the Surface testing of porose substrate, paper, cloth, thin plate etc., surface due to product is distorted and is difficult to guarantee uniform flatness, especially, to the surface of sheet material being formed with multiple minute aperture, be the optical detection picture that cannot obtain making to obtain the instantaneously accurately value consistent with size in kind with vacuum suction or based on the method for contact pressing, thereby produce the region that cannot detect caused because of the distortion of sheet or tilting phenomenon.
Summary of the invention
The present invention is for solving above-mentioned the problems of the prior art, its object is to, there is provided by critically fixing the detection lug formed by yielding material, and carry out vision-based detection according to the state that detection lug to be crimped into plane by the area spray pressurized air of detected detection lug, thus can detection speed be improved, realize optical detection apparatus that is more stable, that detect accurately.
For the optical detection apparatus of one embodiment of the invention solved the problem, according to one embodiment of the invention, comprising: detect objective table, it is formed by photopermeability material, loads for detection lug; Fixed cell, it is formed at above-mentioned detection objective table, fixing above-mentioned detection lug; Fixed frame, it supports side or the lower surface of above-mentioned detection objective table; Back light unit, it is from the below of above-mentioned detection objective table, irradiates light to the detection lug detected on objective table; Shooting unit, it is configured at the top of above-mentioned detection objective table, obtains the image of the detection lug be loaded on above-mentioned detection objective table; And gas injection portion, its in the below of above-mentioned shooting unit with above-mentioned shooting cell location on identical axle, spray pressurized air to above-mentioned detection lug, make detection lug be close to detection objective table.
According to a preferred embodiment of the present invention, above-mentioned gas injection portion comprises: pressurized air generation unit, and it generates pressurized air; And nozzle, it is injected in the pressurized air generated in above-mentioned pressurized air generation unit, and said nozzle in the both sides of above-mentioned shooting unit and row arrangement, is concentrated to above-mentioned detection lug and sprayed.
According to a preferred embodiment of the present invention, above-mentioned gas injection portion comprises: width adjusting portion, and it regulates the interval of said nozzle; Jet angle adjusting portion, it regulates the spray angle of said nozzle; And height adjusting part, it regulates the height of said nozzle.
According to a preferred embodiment of the present invention, above-mentioned gas injection portion also comprises valve, the compressed-air actuated amount that this valve regulated exports from said nozzle.
According to a preferred embodiment of the present invention, optical detection apparatus is also provided with sensor, and this sensor detects the pressurized air sprayed from above-mentioned gas injection portion and whether is accurately ejected into the region detected above-mentioned detection lug.
According to a preferred embodiment of the present invention, optical detection apparatus also comprises secondary light source, and this secondary light source, from the top of above-mentioned detection objective table, irradiates light to the detection lug on above-mentioned detection objective table.
Optical detection apparatus of the present invention, by critically fixing the detection lug formed by yielding material, according to the area spray pressurized air that will carry out the detection lug detected, state detection lug being crimped into plane carries out vision-based detection, thus has and improve detection speed and realize the effect that detects more accurately.
Further, the physical shock being applied to detection lug is minimized, absorption bed knife can be increased, thus have and can prevent detection lug from being undermined distortion, the effect that detection is carried out more stable can be made.
Accompanying drawing explanation
Fig. 1 is the cut-open view of the optical detection apparatus according to one embodiment of the invention.
Fig. 2 is the stereographic map in the gas injection portion representing Fig. 1.
Fig. 3 is the structural drawing of optical detection apparatus according to another embodiment of the present invention.
Fig. 4 represents that mensuration does not spray the chart of the data of the X-axis of compressed-air actuated detection lug and the distortion of Y-axis and height tolerance.
Fig. 5 represents to measure to utilize a nozzle to spray the chart of the data of the X-axis of compressed-air actuated detection lug and the distortion of Y-axis and height tolerance.
Fig. 6 represents to measure to utilize the nozzle of both sides to spray the chart of the data of the X-axis of compressed-air actuated detection lug and the distortion of Y-axis and height tolerance.
Reference numeral
100: detect objective table
200: fixed cell
300: fixed frame
400: back light unit
500: shooting unit
600: gas injection portion
620: nozzle
630: width adjusting portion
640: jet angle adjusting portion
650: height adjusting part
700: sensor
800: secondary light source
Embodiment
With reference to accompanying drawing, the present invention is described in detail., identical Reference numeral is used to identical structure here, and the repetitive description thereof will be omitted, to the detailed description likely unnecessarily making the indefinite known function of main idea of the present invention and structure.Example of the present invention provides to more completely the present invention is described to general technical staff of the technical field of the invention.Therefore, in order to definitely illustrate, explanation can be exaggerated to the shape of the key element in accompanying drawing and size etc.
Fig. 1 is the cut-open view of the optical detection apparatus according to one embodiment of the invention, and Fig. 2 is the stereographic map in the gas injection portion representing Fig. 1.
According to the optical detection apparatus of one embodiment of the invention, comprising: detect objective table 100, it is formed by photopermeability material, loads for detection lug 10; Fixed cell 200, it is formed at above-mentioned detection objective table 100, for fixing above-mentioned detection lug 10; Fixed frame 300, it supports side or the lower surface of above-mentioned detection objective table 100; Back light unit 400, it is from the below of above-mentioned detection objective table 100, irradiates light to the detection lug 10 detected on objective table 100; Shooting unit 500, it is configured at the top of above-mentioned detection objective table 100, for obtaining the image of the detection lug 10 be loaded on above-mentioned detection objective table 100; Gas injection portion 600, it is configured on identical axle with above-mentioned shooting unit 500 in the below of above-mentioned shooting unit 500, and sprays pressurized air to above-mentioned detection lug 10, detection lug 10 is close to and detects objective table 100.
The detection lug 10 of indication can be equivalent to film, form the known plurality of plate-shape materials such as porose substrate, paper, cloth, thin plate, film in the present invention.
Detect objective table 100 to be made up of the such as photopermeability such as glass, acrylic acid material, with enable the light of the back light unit 500 of the below being configured at above-mentioned detection objective table 100 through.Further, preferably, the shape of above-mentioned detection objective table 100 comprises square, rectangle, circle etc., corresponding with the shape will carrying out the detection lug 10 detected.As an example, when detection lug 10 is square shape, above-mentioned detection objective table 100 is formed with square shape equally.
Fixed cell 200 is formed at above-mentioned detection objective table 100, plays the effect of fixing above-mentioned detection lug 10.Above-mentioned fixed cell 200 is can in the scope of detection lug 10 on fixed test objective table 100, and can adopt known multiple fixing means, as an example, above-mentioned fixed cell 200 can be vacuum suction mode.
At this moment, above-mentioned fixed cell 200 can comprise absorption panel and vacuum subassembly.Absorption panel can be formed by porous ceramic film material, by sucking air to the fine space be formed on pottery, makes the upper surface of absorption panel produce absorption affinity, by above-mentioned absorption affinity, and can fixed test sheet 10.On the other hand, vacuum subassembly plays applying Vacuum Pressure, adsorbs the function of the detection lug 10 on above-mentioned absorption panel.
Fixed frame 300 side or lower surface of playing by supporting above-mentioned detection objective table 100 supports the effect of above-mentioned detection objective table 100.Fixed frame 300 is formed with the form of estrade, can form the space of inserting for above-mentioned detection objective table 100 at central part.
Back light unit 400 is configured at the below of above-mentioned detection objective table 100, plays the effect of irradiating the light source of light to the detection lug 10 on above-mentioned detection objective table 100.
Therefore, from the light that above-mentioned back light unit 400 irradiates, by detecting objective table 100, inputing to shooting unit 500 through being loaded into the detection lug 10 detecting objective table 100 upper surface, whether can there is bad detection to detection lug 10 thus.As an example, when offering multiple hole at above-mentioned detection lug 10, above described holes can be detected and whether be opened in correct position exactly.
Shooting unit 500 is configured at the top of above-mentioned detection objective table 100, obtains the image of the detection lug 10 be loaded on above-mentioned detection objective table 100, comprises camera.Carry out graphical analysis by the image obtained in above-mentioned shooting unit 500, whether badly can differentiate.
Gas injection portion 600 is configured on identical axle with above-mentioned shooting unit 500 in the below of above-mentioned shooting unit 500, plays and sprays pressurized air to the effect making detection lug 10 be close to detection objective table 100 to above-mentioned detection lug 10.Above-mentioned gas injection portion 600 is formed as the circular or linear structure of multiple nozzle arrangement, by applying uniform air pressure to the detection lug 10 detected on objective table 100, detection lug 10 being close to and detecting objective table 100 to form plane.As a reference, the pressurized air sprayed from above-mentioned gas injection portion 600 is through the pure air (cleanair) that dust etc. carries out being separated by purification process.As mentioned above, by the effect in gas injection portion 600, that be formed with multiple minute aperture, thin thin plate detection lug 10 is positioned over and detects on objective table 100, phenomenon is tilted to the surface at the position that will detect or measure and evenly sprays pure air by utilizing gas injection portion 600, make detection lug 10 be close to the upper surface detecting objective table 100, form uniform smoothness.
According to a preferred embodiment of the present invention, above-mentioned gas injection portion 600 comprises: pressurized air generation unit (not shown), and it generates pressurized air, nozzle 620, and it is injected in the pressurized air generated in above-mentioned pressurized air generation unit (not shown); Said nozzle 620 in the both sides of above-mentioned shooting unit 500 and row arrangement, and is concentrated to above-mentioned detection lug 10 and is sprayed.
Pressurized air generation unit utilizes the compression cell compression such as pump to supply to said nozzle 620 through the pure air of the purification process removal dust of filter etc. etc.Above-mentioned pressurized air generation unit obtains compressed-air actuated supply with nozzle 620 by being connected with flexible pipe etc.
Said nozzle 620 is configured to linear form, sprays pressurized air in the mode of air curtain to detection lug 10.At this moment, when direction is oblique towards a certain lateral deviation, detection lug 10 may be produced and be not close to detection objective table 100, and the phenomenon tilted.Therefore, spray pressurized air from relative direction to one of the detection lug 10 just carrying out detecting, prevent from tilting phenomenon as above, detection lug 10 is fixed on and detects objective table 100.
Fig. 4 represents under the state at the only edge of fixed test sheet 10, measures the chart not spraying the data of the compressed-air actuated X-axis of detection lug 10 and the distortion of Y-axis and height tolerance.
Fig. 5 represents under the state at the only edge of fixed test sheet 10, after utilizing a nozzle 620 to spray pressurized air to detection lug 10, measures the chart of the data of the X-axis of detection lug 10 and the distortion of Y-axis and height tolerance.
Fig. 6 represents under the state at the only edge of fixed test sheet 10, utilizes the nozzle 620 of both sides to after detection lug 10 sprays pressurized air, measures the chart of the data of the X-axis of detection lug 10 and the distortion of Y-axis and height tolerance.
With reference to above-mentioned Fig. 4 to Fig. 6, height tolerance is 324um not spraying in compressed-air actuated situation, show as the highest, be 96um under compressed-air actuated situation is all sprayed in both sides, show as minimum, result can confirm that especially under all spraying compressed-air actuated situation from both sides, the smoothness of the detection lug 10 be measured to is outstanding in the compressed-air actuated situation of injection.Further, equally, the distortion phenomenon of X-axis and Y-axis, is not spraying in compressed-air actuated situation, X-axis is being 650um, Y-axis is being 659um, showing as maximum, under all spraying compressed-air actuated situation from both sides, X-axis is 119um, Y-axis is being 123um, showing as minimum.Therefore, can confirm under all spraying compressed-air actuated situation from both sides, the distortion of detected detection lug 10 is minimum.
According to a preferred embodiment of the present invention, above-mentioned gas injection portion 600 comprises: width adjusting portion 630, and it regulates the interval of said nozzle 620; Jet angle adjusting portion 640, it regulates the spray angle of said nozzle 620; Height adjusting part 650, it regulates the height of said nozzle 620.First, above-mentioned width adjusting portion 630 regulates the interval between the nozzle 620 of also row arrangement mutually according to the area size of the detection lug 10 that will detect.Further, the spray angle of jet angle adjusting portion 640 adjustable nozzles 620.Height adjusting part 650, for regulating the height of nozzle 620, preferably, regulates the interval of nozzle 620 and detection objective table 100.But, only operate any one in above-mentioned width adjusting portion 630, jet angle adjusting portion 640 and 650, also can regulate spray angle.
According to a preferred embodiment of the present invention, above-mentioned gas injection portion 600 also comprises valve (not shown), the compressed-air actuated amount that this valve regulated exports from said nozzle 620.
The compressed-air actuated amount that above-mentioned valve regulated is sprayed, from result, regulates the pressure being applied to detection lug 10.Therefore, if detection lug 10 is thin and yielding material, just reduce the compressed-air actuated amount that will spray, if the thickness of detection lug 10 is thick and be indeformable material, just increase compressed-air actuated amount, can be close to make detection lug 10 and detect objective table 100.
Fig. 3 is the structural drawing of optical detection apparatus according to another embodiment of the present invention.
According to a preferred embodiment of the present invention, optical detection apparatus of the present invention is also provided with sensor 700, and this sensor 700 detects the pressurized air sprayed from above-mentioned gas injection portion 600 and whether is accurately ejected into the region detected above-mentioned detection lug 10.
The sensor 700 can be the displacement transducer utilizing laser.Thus, sensor 700 is by measuring and carrying out the interval between the detection lug 10 that detects, grasp detection lug 10 whether be close to detection objective table 100 and become level and smooth, and can detect whether be ejected into correct position from the pressurized air of above-mentioned gas injection portion 600 injection.
According to a preferred embodiment of the present invention, optical detection apparatus of the present invention also comprises secondary light source 800, and this secondary light source 800, above above-mentioned detection objective table 100, irradiates light to the detection lug 10 on above-mentioned detection objective table 100.
Above-mentioned secondary light source 800 is the lighting unit irradiating light from the top of above-mentioned detection lug 10 to detection lug 10, that light in order to tackle the back light unit 400 irradiated from the below of above-mentioned detection objective table 100 is blocked by above-mentioned gas injection portion 600, make above-mentioned shooting unit 500 cannot photograph the situation of the image clearly of detection lug 10, thus add on the top of detection lug 10 and secondary light source 800 is set.
Optical detection apparatus of the present invention as above, by critically fixing the detection lug 10 formed by yielding material, according to the area spray pressurized air of detected detection lug 10, detection lug is crimped into the state of plane, carry out vision-based detection, thus there is detection speed improve, the advantage that detects more accurately can be realized.
Further, the physical impact being applied to detection lug 10 is minimized, absorption bed knife can be increased, thus have and can prevent detection lug 10 from being undermined distortion, the advantage that detection is carried out more stable can be made.
More than illustrate it is only describe technological thought of the present invention illustratively, various amendment, change and displacement can be carried out in the scope not departing from essential characteristic of the present invention general technical staff of the technical field of the invention.Therefore, disclosed embodiment and accompanying drawing are for illustration of the present invention in the present invention, instead of limit technological thought of the present invention, and the scope of technological thought of the present invention is not limited to this embodiment and accompanying drawing.Protection scope of the present invention should be explained by right, all technological thoughts in the scope equal with it, should be interpreted as including in right of the present invention.

Claims (4)

1. an optical detection apparatus, is characterized in that, comprising:
Detect objective table, it is formed by photopermeability material, loads for detection lug;
Fixed cell, it is formed at above-mentioned detection objective table, fixing above-mentioned detection lug;
Fixed frame, it supports side or the lower surface of above-mentioned detection objective table;
Back light unit, it is from the below of above-mentioned detection objective table, irradiates light to the detection lug detected on objective table;
Shooting unit, it is configured at the top of above-mentioned detection objective table, obtains the image of the detection lug be loaded on above-mentioned detection objective table; And
Gas injection portion, its in the below of above-mentioned shooting unit with above-mentioned shooting cell location on identical axle, spray pressurized air to above-mentioned detection lug, make detection lug be close to detection objective table,
Above-mentioned gas injection portion comprises:
Pressurized air generation unit, it generates pressurized air;
Nozzle, it is injected in the pressurized air generated in above-mentioned pressurized air generation unit, and said nozzle in the both sides of above-mentioned shooting unit and row arrangement, is concentrated to above-mentioned detection lug and sprayed;
Width adjusting portion, it regulates the interval of said nozzle;
Jet angle adjusting portion, it regulates the spray angle of said nozzle; And
Height adjusting part, it regulates the height of said nozzle.
2. optical detection apparatus according to claim 1, is characterized in that,
Above-mentioned gas injection portion also comprises valve, the compressed-air actuated amount that this valve regulated exports from said nozzle.
3. optical detection apparatus according to claim 1, is characterized in that,
Also be provided with sensor, this sensor detects the pressurized air sprayed from above-mentioned gas injection portion and whether is accurately ejected into the region detected above-mentioned detection lug.
4. optical detection apparatus according to claim 1, is characterized in that,
Also comprise secondary light source, this secondary light source, from the top of above-mentioned detection objective table, irradiates light to the detection lug on above-mentioned detection objective table.
CN201210465046.1A 2012-04-26 2012-11-16 Optical detection apparatus CN103376262B (en)

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KR10-2012-0044005 2012-04-26

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KR101325761B1 (en) 2013-11-08
CN103376262A (en) 2013-10-30
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JP2013228358A (en) 2013-11-07
JP5650708B2 (en) 2015-01-07
TWI498547B (en) 2015-09-01

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