CN113782638A - 一种电池背钝化结构及其制作方法、太阳能电池 - Google Patents
一种电池背钝化结构及其制作方法、太阳能电池 Download PDFInfo
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- CN113782638A CN113782638A CN202111056381.1A CN202111056381A CN113782638A CN 113782638 A CN113782638 A CN 113782638A CN 202111056381 A CN202111056381 A CN 202111056381A CN 113782638 A CN113782638 A CN 113782638A
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- 238000002161 passivation Methods 0.000 title claims abstract description 148
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 24
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 118
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 118
- 239000010703 silicon Substances 0.000 claims abstract description 118
- 238000000151 deposition Methods 0.000 claims abstract description 50
- 239000007789 gas Substances 0.000 claims abstract description 47
- 238000000034 method Methods 0.000 claims abstract description 35
- 239000012495 reaction gas Substances 0.000 claims abstract description 29
- 239000011248 coating agent Substances 0.000 claims abstract description 17
- 238000000576 coating method Methods 0.000 claims abstract description 17
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 40
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical group N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 40
- 238000005498 polishing Methods 0.000 claims description 10
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims description 7
- 239000002253 acid Substances 0.000 claims description 7
- 239000007888 film coating Substances 0.000 claims description 5
- 238000009501 film coating Methods 0.000 claims description 5
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 4
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims description 4
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
- 229910052796 boron Inorganic materials 0.000 claims description 4
- 229910052733 gallium Inorganic materials 0.000 claims description 4
- 229910052738 indium Inorganic materials 0.000 claims description 4
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 4
- 229910052698 phosphorus Inorganic materials 0.000 claims description 4
- 239000011574 phosphorus Substances 0.000 claims description 4
- 239000003513 alkali Substances 0.000 claims description 3
- 230000003247 decreasing effect Effects 0.000 claims 1
- 239000000376 reactant Substances 0.000 claims 1
- 230000008021 deposition Effects 0.000 abstract description 13
- 238000002360 preparation method Methods 0.000 abstract description 13
- 238000009792 diffusion process Methods 0.000 abstract description 8
- 238000005468 ion implantation Methods 0.000 abstract description 8
- 230000007547 defect Effects 0.000 abstract description 7
- 238000007747 plating Methods 0.000 abstract description 7
- 239000010410 layer Substances 0.000 description 217
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 12
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 6
- 238000005530 etching Methods 0.000 description 4
- 239000002356 single layer Substances 0.000 description 4
- 239000002019 doping agent Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- XCZXGTMEAKBVPV-UHFFFAOYSA-N trimethylgallium Chemical compound C[Ga](C)C XCZXGTMEAKBVPV-UHFFFAOYSA-N 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000000137 annealing Methods 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 238000000231 atomic layer deposition Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 239000011265 semifinished product Substances 0.000 description 1
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/186—Particular post-treatment for the devices, e.g. annealing, impurity gettering, short-circuit elimination, recrystallisation
- H01L31/1868—Passivation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
- H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/02167—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/042—PV modules or arrays of single PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Sustainable Development (AREA)
- Sustainable Energy (AREA)
- Life Sciences & Earth Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Formation Of Insulating Films (AREA)
- Photovoltaic Devices (AREA)
Abstract
Description
Claims (10)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
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CN202111056381.1A CN113782638A (zh) | 2021-09-09 | 2021-09-09 | 一种电池背钝化结构及其制作方法、太阳能电池 |
PCT/CN2022/117237 WO2023036121A1 (zh) | 2021-09-09 | 2022-09-06 | 一种电池背钝化结构及其制作方法、太阳能电池 |
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CN202111056381.1A CN113782638A (zh) | 2021-09-09 | 2021-09-09 | 一种电池背钝化结构及其制作方法、太阳能电池 |
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CN113782638A true CN113782638A (zh) | 2021-12-10 |
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CN202111056381.1A Pending CN113782638A (zh) | 2021-09-09 | 2021-09-09 | 一种电池背钝化结构及其制作方法、太阳能电池 |
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CN (1) | CN113782638A (zh) |
WO (1) | WO2023036121A1 (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114583016A (zh) * | 2022-05-09 | 2022-06-03 | 正泰新能科技有限公司 | 一种TOPCon电池及其制备方法 |
WO2023036121A1 (zh) * | 2021-09-09 | 2023-03-16 | 正泰新能科技有限公司 | 一种电池背钝化结构及其制作方法、太阳能电池 |
Citations (11)
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KR20090110029A (ko) * | 2008-04-17 | 2009-10-21 | 엘지전자 주식회사 | 태양전지 및 그 제조방법 |
CN102097534A (zh) * | 2010-11-18 | 2011-06-15 | 中国科学院宁波材料技术与工程研究所 | 同时形成晶体硅太阳能电池pn结和氮化硅减反射膜的方法 |
CN102197497A (zh) * | 2008-10-23 | 2011-09-21 | 应用材料公司 | 半导体组件制造方法、半导体组件及半导体组件制造设备 |
CN102332495A (zh) * | 2011-09-26 | 2012-01-25 | 中国科学院宁波材料技术与工程研究所 | 一种晶体硅太阳能电池的制作方法 |
CN104241403A (zh) * | 2014-09-01 | 2014-12-24 | 奥特斯维能源(太仓)有限公司 | 一种晶硅电池多层钝化减反膜及其制作方法 |
CN104425633A (zh) * | 2013-08-30 | 2015-03-18 | 中国科学院宁波材料技术与工程研究所 | 一种介质钝化膜和太阳能电池及其制备方法 |
CN110416324A (zh) * | 2019-08-22 | 2019-11-05 | 浙江正泰太阳能科技有限公司 | 一种太阳能电池及其制备方法 |
CN111668318A (zh) * | 2020-05-29 | 2020-09-15 | 晶科绿能(上海)管理有限公司 | 一种光伏组件、太阳能电池及其制备方法 |
CN112670352A (zh) * | 2020-12-16 | 2021-04-16 | 浙江正泰太阳能科技有限公司 | 一种应用于接触钝化电池的钝化结构及其制备方法 |
CN112820783A (zh) * | 2021-02-25 | 2021-05-18 | 横店集团东磁股份有限公司 | 一种氮氧化硅perc电池背钝化结构、其制备方法及包括其的perc电池 |
CN113097346A (zh) * | 2021-04-20 | 2021-07-09 | 山西潞安太阳能科技有限责任公司 | 一种适用于硅电池背面叠层膜钝化结构 |
Family Cites Families (3)
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DE102009044052A1 (de) * | 2009-09-18 | 2011-03-24 | Schott Solar Ag | Kristalline Solarzelle, Verfahren zur Herstellung einer solchen sowie Verfahren zur Herstellung eines Solarzellenmoduls |
CN110690296A (zh) * | 2019-10-12 | 2020-01-14 | 通威太阳能(眉山)有限公司 | 一种高效背钝化晶硅太阳能电池及其制备方法 |
CN113782638A (zh) * | 2021-09-09 | 2021-12-10 | 海宁正泰新能源科技有限公司 | 一种电池背钝化结构及其制作方法、太阳能电池 |
-
2021
- 2021-09-09 CN CN202111056381.1A patent/CN113782638A/zh active Pending
-
2022
- 2022-09-06 WO PCT/CN2022/117237 patent/WO2023036121A1/zh active Application Filing
Patent Citations (11)
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KR20090110029A (ko) * | 2008-04-17 | 2009-10-21 | 엘지전자 주식회사 | 태양전지 및 그 제조방법 |
CN102197497A (zh) * | 2008-10-23 | 2011-09-21 | 应用材料公司 | 半导体组件制造方法、半导体组件及半导体组件制造设备 |
CN102097534A (zh) * | 2010-11-18 | 2011-06-15 | 中国科学院宁波材料技术与工程研究所 | 同时形成晶体硅太阳能电池pn结和氮化硅减反射膜的方法 |
CN102332495A (zh) * | 2011-09-26 | 2012-01-25 | 中国科学院宁波材料技术与工程研究所 | 一种晶体硅太阳能电池的制作方法 |
CN104425633A (zh) * | 2013-08-30 | 2015-03-18 | 中国科学院宁波材料技术与工程研究所 | 一种介质钝化膜和太阳能电池及其制备方法 |
CN104241403A (zh) * | 2014-09-01 | 2014-12-24 | 奥特斯维能源(太仓)有限公司 | 一种晶硅电池多层钝化减反膜及其制作方法 |
CN110416324A (zh) * | 2019-08-22 | 2019-11-05 | 浙江正泰太阳能科技有限公司 | 一种太阳能电池及其制备方法 |
CN111668318A (zh) * | 2020-05-29 | 2020-09-15 | 晶科绿能(上海)管理有限公司 | 一种光伏组件、太阳能电池及其制备方法 |
CN112670352A (zh) * | 2020-12-16 | 2021-04-16 | 浙江正泰太阳能科技有限公司 | 一种应用于接触钝化电池的钝化结构及其制备方法 |
CN112820783A (zh) * | 2021-02-25 | 2021-05-18 | 横店集团东磁股份有限公司 | 一种氮氧化硅perc电池背钝化结构、其制备方法及包括其的perc电池 |
CN113097346A (zh) * | 2021-04-20 | 2021-07-09 | 山西潞安太阳能科技有限责任公司 | 一种适用于硅电池背面叠层膜钝化结构 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2023036121A1 (zh) * | 2021-09-09 | 2023-03-16 | 正泰新能科技有限公司 | 一种电池背钝化结构及其制作方法、太阳能电池 |
CN114583016A (zh) * | 2022-05-09 | 2022-06-03 | 正泰新能科技有限公司 | 一种TOPCon电池及其制备方法 |
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