CN113634922A

CN113634922A - High-power water-guided laser processing machine tool for variable-curvature focusing light beam lens

Info

Publication number: CN113634922A
Application number: CN202111116200.XA
Authority: CN
Inventors: 赵玉刚; 刘谦; 郑志龙; 王珂; 赵国勇; 李丽; 孟建兵; 张桂香; 张海云; 曹辰; 周海安; 高跃武
Original assignee: Shandong University of Technology
Current assignee: Shandong University of Technology
Priority date: 2021-09-23
Filing date: 2021-09-23
Publication date: 2021-11-12

Abstract

The invention discloses a high-power water-guided laser processing machine tool of a variable-curvature focusing beam lens, which is characterized in that a water-guided laser cutting head is a high-power gas explosion-free water-guided laser water-optical coupling alignment cutting head of the variable-curvature focusing beam lens, laser emitted by a laser forms a focusing beam consisting of a plurality of focusing points along the axial lead of a fine high-pressure water jet column after passing through a focusing beam lens, and the focusing beam is diffused and emitted to the inner surface of the fine high-pressure water jet column and then is transmitted to the surface of a processed workpiece along the fine high-pressure water jet column through total reflection. The machine tool is controlled by a numerical control system to realize the three-coordinate movement and the water-guided laser cutting processing of the processed workpiece. The application of the focusing light column lens avoids the generation of gas explosion of laser in a micro high-pressure water jet water column, obviously improves the laser processing power and efficiency, and is suitable for the high-efficiency precision processing of materials such as carbon fiber composite materials, semiconductors, ceramics, metals and the like.

Description

High-power water-guided laser processing machine tool for variable-curvature focusing light beam lens

Technical Field

The invention belongs to the technical field of water-guided laser processing, and particularly relates to a high-power water-guided laser processing machine tool of a variable-curvature focusing light beam lens.

Background

Compared with the traditional laser cutting, the water-guided laser cutting has the following advantages: (1) thermal damage can not be generated, because the sprayed water flow can cool the material in the laser pulse interval, the thermal deformation and the thermal damage of the material are greatly reduced, and the original structure and the original performance of the material are kept; (2) the working distance of the water jet is large, and focusing is not needed; (3) the sprayed water flow can take away the molten material in the cutting process, so that pollutants are reduced; (4) the processing part has no cone angle, the processing precision is high, and the method is particularly suitable for high-precision processing of thin-wall parts.

The water-guided laser can be used for cutting, punching, slotting, cleaning the surface of a workpiece and the like. Due to the characteristics of water-guided laser processing, the method has important popularization and application prospects in the processing fields of metal materials, semiconductors, glass, ceramics, carbon fiber composite materials and the like.

The traditional water-guide laser processing machine tool has two problems, and the application and popularization of the water-guide laser processing technology are seriously restricted: (1) the single-focus spherical lens is adopted, and because the laser power is concentrated in one focus point, when the laser power is high, the water jet at the focus point generates gas explosion and nozzle damage phenomena, and the water-guided laser processing cannot be continued, so that the single-focus spherical lens is only suitable for occasions with low laser power and has low processing efficiency; (2) the alignment precision is low, and the alignment of the axial lead of the focusing light column and the fine high-pressure water jet water column is difficult to realize quickly and accurately, so that the interference of laser and the surface of a nozzle, the damage of a water jet nozzle and the continuous processing of water-guided laser can not be realized. In order to solve the two problems, the invention provides a variable-curvature focusing light beam lens high-power water-guided laser processing machine tool which can realize no gas explosion under the condition of high laser power and realize quick and accurate alignment of the axial leads of a focusing light beam and a micro high-pressure water jet water column under the condition that one focusing point is changed into a plurality of focusing points.

Disclosure of Invention

The invention aims to provide a variable-curvature focusing light beam lens high-power water-guided laser processing machine tool, which mainly solves the key technical problems that when a high-power laser is used in the traditional water-guided laser processing machine tool, the water jet at a focusing point is subjected to gas explosion and a nozzle is damaged. In order to achieve the purpose, the invention adopts the following technical scheme:

the variable-curvature focusing beam lens high-power water-guided laser machining tool comprises a focusing beam lens water-guided laser cutting head (001), a laser (002), a numerical control system (004), an L-shaped connecting frame (005), a machine tool workbench (006), a backwater filter screen (007), a Y-axis motor (008), a filtered water tank (009), a secondary filtered water tank (010), a backwater pipe (011), a high-pressure deionization water purifying device (012), a high-pressure air source (014), a machine tool base (015), an X-axis motor (016), a Chinese character hui-shaped water tank (017), a machine tool upright column (019), a cutting head connecting plate (020), a Z-axis hanger frame (021), a Z-axis motor (022) and the like;

the water-guided laser cutting head (001) of the focusing light column lens is a high-power gas-explosion-free water-guided laser water-optical coupling alignment cutting head of a variable-curvature focusing light column lens, and comprises a laser fiber connector (301), a beam expanding and collimating lens group component (302), a spectroscope component (303), a variable-curvature focusing light column lens component (304), a CCD camera adjusting knob (305), a holophote component (306), an attenuation sheet component (307), a light filter component (308), a CCD camera (309), a water-optical alignment three-coordinate adjusting component (310) and a water-optical coupling cavity component (311); the optical path of the device comprises a laser (002), an optical fiber laser beam (201), a beam expanding collimating lens group (202), a spectroscope (203), a total reflector (205), an attenuation sheet (206), an optical filter (207), a CCD camera (309), a variable curvature focusing light column lens (204), a water-light coupling cavity (210), a focusing light column (208), a fine high-pressure water jet water column (211), a workpiece to be processed (212) and the like;

the curvature radius of the spherical surface of the variable curvature focusing light column lens (204) changes from large to small from the top to the edge of the spherical surface, the spherical surface with the largest curvature radius is positioned at the intersection point of the lens axis and the spherical surface, namely the top of the spherical surface, the farther the distance from the axis, the smaller the curvature radius of the spherical surface, and the spherical surface with the smallest curvature radius is positioned at the edge of the spherical surface of the lens; the radius of curvature of the spherical surface at the edge position of the lens is minimum, and the laser passes through a focusing point formed by the edge of the variable-curvature focusing light column lens (204) and is closest to the bottom surface of the lens; the spherical curvature radius at the top of the lens is maximum, and the laser passes through a focusing point formed at the top of the variable curvature focusing light column lens (204) and is farthest away from the bottom surface of the lens;

the water light alignment three-coordinate adjusting component (310) consists of a connecting inner cylinder (501), a transmission sliding cylinder (502), an X-direction alignment adjusting knob (503), an X-direction alignment adjusting cylindrical transmission guide rail (504), an outer sliding sleeve (505), an inner sliding sleeve (506), a Y-direction alignment adjusting knob (507), a Y-direction alignment adjusting cylindrical transmission guide rail (508), a laser focusing Z-axis adjusting sleeve (509), an outer sliding sleeve through hole (510), an X-direction alignment adjusting compression spring (511), a Y-direction alignment adjusting compression spring (512) and a sliding guide key (513);

the water optical coupling cavity component (311) comprises a positioning ball (601), a high-pressure water connector (602), a high-pressure gas connector (603), a water cavity sealing mirror support frame (604), a water jet jewel nozzle (605), a water jet jewel nozzle holder (606), a gas inlet ring hole (607), a gas annular buffer area (608), a water optical coupling cavity shell (609), a water cavity sealing mirror (610), an annular buffer area (611), a first sealing ring (612), an annular columnar gas nozzle (613), a gas inlet hole (614), a gas jet nozzle mounting and dismounting hole (615), a second sealing ring (617), a third sealing ring (618) and the like.

The high-power water-guided laser processing machine tool for the variable-curvature focusing beam column lens is characterized in that an optical fiber laser beam (201) emitted by a laser (002) under the control of a numerical control system (004) is transmitted to a laser optical fiber connector (301) of a water-guided laser cutting head (001) of the focusing beam column lens through an optical fiber, and the optical fiber laser beam (201) penetrates through the water-guided laser cutting head (001) of the focusing beam column lens aligned by water-optical coupling; a focusing light column (208) consisting of a plurality of focusing points is formed by the optical fiber laser beam (201) penetrating through the variable curvature focusing light column lens (204) and is emitted into the water optical coupling cavity component (311); the focusing light column (208) is uniformly distributed along the axial lead of the variable-curvature focusing light column lens (204), laser passes through a focusing point and then is diverged and emitted to the inner surface of the micro high-pressure water jet water column (211), and then is transmitted along the inner part of the micro high-pressure water jet water column (211) through total reflection and emitted to a workpiece (212) to be processed; meanwhile, high-pressure gas entering the water optical coupling cavity part (311) is sprayed to a workpiece (212) to be processed through an annular columnar gas nozzle (613); the machine tool carries out water-guided laser processing under the control of a numerical control system (004).

The high-power water-guiding laser processing machine tool for the variable-curvature focusing beam column lens is characterized in that a high-pressure deionization water purifying device (012) is connected to the left side of a machine tool base (015), a filter element, a deionization reverse osmosis membrane and a plunger pump are arranged in the high-pressure deionization water purifying device (012), a high-pressure water outlet is formed in the rear of the high-pressure deionization water purifying device (012), and a water inlet is formed in the front of the high-pressure deionization water purifying device (012); a high-pressure water outlet of the high-pressure deionization water purifying device (012) is connected with a high-pressure water connector (602) in a water-light coupling cavity part (311) of a focusing light column lens water-guide laser cutting head (001) through a water-light coupling cavity water inlet pipe (018); the high-pressure deionization water purifier (012) is connected with a secondary filtered water tank (010) in a machine tool base (015) through a water return pipe (011); a square-shaped water tank (017) is arranged above the machine tool base (015); a backwater filter screen (007) which is distributed left and right is arranged in front of the reversed-square water tank (017), a water outlet is arranged below the backwater filter screen (007), a water filtering water tank (009) is arranged below the water outlet, a handle is arranged in front of the water filtering water tank (009), the water filtering water tank (009) can be pushed and pulled, a water outlet is arranged below the water filtering water tank (009), a secondary water filtering water tank (010) is arranged below the water outlet of the water filtering water tank (009), a water outlet is arranged on the left side of the secondary water filtering water tank (010), and the water outlet is connected with a high-pressure deionized water purifying device (012) through a backwater pipe (011);

the numerical control system (004) is connected to the right side of the machine tool base (015) through an L-shaped connecting frame (005); a water inlet numerical control system (004) is arranged in front of the high-pressure deionization water purifying device (012) to control the movement of a laser switch, power, pulse width and frequency and X Y horizontal coordinate axes of a machine tool workbench (006) and the movement of a Z coordinate axis of a focusing beam lens water guide laser cutting head (001); meanwhile, the numerical control system (004) is connected with the CCD camera (309) through a CCD camera data line, and displays the alignment condition of the focusing light column (208) and the water jet gem nozzle (605); a cross working sliding table is arranged above the machine tool base (015), the lower layer of the cross working sliding table is a Y-axis sliding table, and a Y-axis motor (008) and a lead screw nut are arranged on the lower layer of the cross working sliding table and used for controlling the Y-axis movement of the machine tool working table (006); the upper layer of the cross working sliding table is an X-axis sliding table which is provided with an X-axis motor (016) and a lead screw nut and used for controlling the X-axis movement of the machine tool working table (006); a machine tool workbench (006) is arranged above the X-axis sliding table; the machine tool upright column (019) is fixedly arranged at the position deviated from the middle of the machine tool base (015) through a bolt, and a Z-axis hanging plate frame (021) is fixed above the machine tool upright column; a Z-axis sliding table is arranged in front of the Z-axis hanging plate frame (021), a Z-axis motor (022) and a lead screw nut are installed on the Z-axis sliding table, a cutting head connecting plate (020) is fixed on the Z-axis sliding table, and a focusing beam lens water-guide laser cutting head (001) is fixedly installed on the cutting head connecting plate (020); the numerical control system (004) drives the focus beam lens water guide laser cutting head (001) to move in three coordinates relative to X, Y, Z axes of a machine tool workbench (006) by controlling the rotation of an X-axis motor (016), a Y-axis motor (008) and a Z-axis motor (022);

the numerical control system (004) is connected with the laser (002) through a laser control line (003), and the optical fiber of the laser (002) is inserted into the focusing light beam lens water-guided laser cutting head (001); the numerical control system (004) controls the switching, power, pulse width and frequency of the laser (002);

the high-pressure air source (014) is connected with a high-pressure air connector (603) in the water-light coupling cavity part (311) of the focusing light column lens water-guided laser cutting head (001) through a water-light coupling cavity air inlet pipe (013).

According to the high-power water-guided laser processing machine tool for the variable-curvature focusing light beam lens, a laser optical fiber connector (301) is an annular cylinder, a light guide hole for laser transmission is formed in the laser optical fiber connector (301), an optical fiber is connected to the upper end of the laser optical fiber connector (301), and a beam expanding collimating lens group component (302) is connected to the lower portion of the laser optical fiber connector; a light transmission and guide hole for laser transmission and concave and convex lenses which are distributed up and down are arranged in the beam expanding and collimating lens group component (302); a beam splitter component (303) is arranged below the beam expanding and collimating lens component (302), and a beam splitter (203) is arranged in the beam splitter component (303); the variable curvature focusing light column lens component (304) is internally provided with a variable curvature focusing light column lens (204), and the variable curvature focusing light column lens component (304) is arranged below the beam splitting mirror component (303); the lower part of the variable curvature focusing light column lens component (304) is connected with a water light alignment three-coordinate adjusting component (310) through a bolt, and the water light coupling cavity component (311) is connected with the upper water light alignment three-coordinate adjusting component (310) through a buckle structure; the beam splitter (203) and the axis of the variable curvature focusing light column lens (204) form an included angle of 45 degrees; a total reflection mirror part (306) is arranged on the left side of the beam splitter part (303), a total reflection mirror (205) is arranged in the total reflection mirror part (306), and the total reflection mirror (205) and the beam splitter (203) are arranged in parallel; the CCD camera adjusting knob (305) is installed at the lower left of the holophote component (306), a filter component (307) is installed right above the holophote component (306), and a filter (407) is installed in the filter component (307); an attenuation sheet member (308) is arranged above the filter member (307), and an attenuation sheet (408) is arranged in the attenuation sheet member (308); the CCD camera (309) is arranged above the attenuation sheet part (308), the CCD camera (309) is in a square shape, and a connecting port is formed in the upper wall of the CCD camera; the CCD camera (309), the attenuation sheet component (308), the optical filter component (307) and the total reflection mirror component (306) are sequentially arranged on the same vertical line from top to bottom; the device comprises a laser fiber connector (301), a beam expanding and collimating lens group component (302), a beam splitter component (303), a variable curvature focusing light column lens component (304) and a water-light alignment three-coordinate adjusting component (310), wherein a water-light coupling cavity component (311) is sequentially arranged on the same vertical line from top to bottom.

In the water light alignment three-coordinate adjusting component (310), a lower cylinder of a connecting inner cylinder (501), an upper cylinder of a transmission sliding cylinder (502) and a laser focusing Z-axis adjusting sleeve (509) are cylindrical hollow structures, the outer diameter of the upper cylinder of the transmission sliding cylinder (502) is smaller than the inner diameter of the lower cylinder of the connecting inner cylinder (501), the two cylinders are in clearance fit, the upper part of the laser focusing Z-axis adjusting sleeve (509) is connected with an outer cylinder of the inner cylinder (501), and the lower part of the laser focusing Z-axis adjusting sleeve (509) is connected with an outer cylinder of the transmission sliding cylinder (502);

the connecting inner cylinder (501) is connected with a variable-curvature focusing light column lens component (304) at the upper part through a screw at the upper part of the connecting inner cylinder (501), the outer wall of the connecting inner cylinder (501) and the transmission sliding cylinder (502) is provided with a sliding guide key groove, a sliding guide key (513) is arranged in the sliding guide key groove, and the sliding guide key groove and the sliding guide key (513) ensure that the connecting inner cylinder (501) and the transmission sliding cylinder (502) cannot generate relative rotation; the outer wall of the connecting inner cylinder (501) is provided with a forward external thread, the outer wall of the transmission sliding cylinder (502) is provided with a reverse external thread, and the outer sides of the connecting inner cylinder (501) and the transmission sliding cylinder (502) are provided with a laser focusing Z-axis adjusting sleeve (509); the upper part of the inner wall of the laser focusing Z-axis adjusting sleeve (509) is provided with a positive internal thread, and the lower part of the inner wall is provided with a reverse internal thread; the relative movement of the connecting inner cylinder (501) and the transmission sliding cylinder (502) is realized through the rotation of the laser focusing Z-axis adjusting sleeve (509), so that the Z-axis adjustment of the water-light coupling cavity component (311) is realized, and the linear distance between the variable-curvature focusing light column lens (204) and the water-light coupling cavity component (311) is adjusted;

the lower part of the transmission sliding barrel (502), the outer sliding sleeve (505) and the inner sliding sleeve (506) are all cylindrical hollow structures, and two X-direction alignment adjustment cylindrical transmission guide rails (504) pass through the transmission sliding barrel (502), the outer sliding sleeve (505) and the inner sliding sleeve (506) on the same horizontal plane in the X direction and are used as guide rails for relative movement between the transmission sliding barrel (502) and the inner sliding sleeve (506); the X-direction alignment adjustment cylindrical transmission guide rail (504), the transmission sliding barrel (502) and the matching holes of the inner sliding sleeve (506) are in interference fit one and in clearance fit one; a screw rod of the X-direction alignment adjusting knob (503) is positioned on the same horizontal plane with the two X-direction alignment adjusting cylindrical transmission guide rails (504) and the X-direction alignment adjusting compression spring (511) on the other side of the inner sliding sleeve (506); the X-direction alignment adjustment compression spring (511) is arranged between the transmission sliding barrel (502) and the inner sliding sleeve (506); a threaded hole is formed in the transmission sliding barrel (502), and a blind hole is formed in the outer wall of the inner sliding sleeve (506) and used for installing an X-direction alignment adjustment compression spring (511); one side of the inner sliding sleeve (506) is contacted with the front end of a screw rod of the X-direction alignment adjusting knob (503), and the other side presses the X-direction alignment adjusting compression spring (511);

the X-direction alignment adjusting knob (503) is connected with the transmission sliding barrel (502) through a screw rod; rotating an X-direction alignment adjusting knob (503) to control the front end of the screw rod to stretch; when the X direction is clockwise rotated to align with the adjusting knob (503), the inner sliding sleeve (506) moves along the negative direction of the X axis; when the X-direction alignment adjusting knob (503) is rotated anticlockwise, the inner sliding sleeve (506) moves along the positive direction of the X axis under the pushing of the counterforce of the X-direction alignment adjusting compression spring (511), so that the movement of the water optical coupling cavity component (311) along the positive and negative directions of the X axis is controlled;

the four Y-direction alignment adjustment cylindrical transmission guide rails (508) are pairwise parallel on the same horizontal plane in the Y direction, symmetrically penetrate through the transmission sliding barrel (502) and the outer sliding sleeve (505) in a front-back mode, and are used as guide rails for relative movement between the transmission sliding barrel (502) and the outer sliding sleeve (505); the Y-direction alignment adjustment cylindrical transmission guide rail (508) is in interference fit with a matching hole of the outer sliding sleeve (505) and is in clearance fit with a matching hole of the transmission sliding barrel (502); a screw rod of the Y-direction alignment adjusting knob (507) is positioned on the same horizontal plane with the four Y-direction alignment adjusting cylindrical transmission guide rails (508) and a Y-direction alignment adjusting compression spring (512) on the other side of the transmission sliding barrel (502), and the Y-direction alignment adjusting compression spring (512) is arranged between the transmission sliding barrel (502) and the outer sliding sleeve (505); the outer wall of the transmission sliding barrel (502) is provided with a blind hole, and the outer sliding sleeve (505) is provided with a threaded hole for installing a Y-direction alignment adjustment compression spring (512); the outer wall of one side of the transmission sliding barrel (502) is contacted with the front end of a screw rod of a Y-direction alignment adjusting knob (507), and the outer wall of the other side presses a Y-direction alignment adjusting compression spring (512);

the Y-direction alignment adjusting knob (507) is connected with the outer sliding sleeve (505) through a screw rod; the Y-direction alignment adjusting knob (507) controls the front end of the screw to stretch and contract, and controls the transmission sliding barrel (502) to move along the positive and negative directions of the Y axis, so that the movement of the water optical coupling cavity component (311) along the positive and negative directions of the Y axis is controlled; when the Y direction is clockwise rotated to align with the adjusting knob (507), the transmission sliding barrel (502) moves along the positive direction of the Y axis; when the Y-direction alignment adjusting knob (507) is rotated anticlockwise, the transmission sliding barrel (502) moves along the negative direction of the Y axis under the pushing of the counterforce of the Y-direction alignment adjusting compression spring (512); the inner wall of the lower part of the inner sliding sleeve (506) is provided with an annular female buckle for connecting the water optical coupling cavity component (311);

four Y-direction alignment adjusting cylindrical transmission guide rails (508), two X-direction alignment adjusting cylindrical transmission guide rails (504), an X-direction alignment adjusting knob (503), a Y-direction alignment adjusting knob (507), an X-direction alignment adjusting compression spring (511) and a Y-direction alignment adjusting compression spring (512) are positioned in the same plane; the displacement adjustment control of the X axis and the Y axis of the water optical coupling cavity component (311) is realized in the same plane where the X axis and the Y axis are positioned;

in the water optical coupling cavity component (311), a rotary trefoil structure buckle is arranged on the outer side of the upper part of a water cavity sealing mirror support frame (604), and is connected with an annular female buckle on an inner sliding sleeve (506) through the buckle, and the position of the water optical alignment three-coordinate adjusting component (310) is positioned through a positioning ball (601); a water cavity sealing mirror groove is formed below the water cavity sealing mirror support frame (604) and used for mounting a water cavity sealing mirror piece (610); the outer side of the upper part of the water cavity sealing mirror support frame (604) is connected with a water-light coupling cavity shell (609) through threads, and a high-pressure water connector (602) and a high-pressure air connector (603) are installed on the left side plane part of the water-light coupling cavity shell (609); the water jet gem nozzle holder (606) is positioned at the lower part of the water optical coupling cavity shell (609) and is fixed in the water optical coupling cavity shell (609) through threads; a nozzle holder guide hole (616) is formed in the water jet gem nozzle holder (606), a water jet gem nozzle (605) is installed at the top of the nozzle holder guide hole (616), and a cylindrical nozzle is formed in the middle of the water jet gem nozzle (605);

the outer wall of the middle part of the water jet gem nozzle holder (606) is provided with a gas inlet annular hole (607), a high-pressure gas connector (603) is connected with the gas inlet annular hole (607) through a gas inlet channel, the gas inlet annular hole (607) is connected with a gas annular buffer area (608) through 4 gas inlets (614), and an annular columnar gas nozzle (613) is connected below the gas annular buffer area (608);

a water cavity sealing lens groove is formed below the water cavity sealing lens support frame (604), and a sealing ring and a water cavity sealing lens (610) are arranged in the water cavity sealing lens groove; the water jet gem nozzle holder (606) is provided with a water jet gem nozzle (605) mounting blind hole, and the water jet gem nozzle holder (606) and the cylindrical water jet gem nozzle (605) are mounted in an interference fit manner; the circular nozzle of the water jet gem nozzle (605) and the diversion hole below the circular nozzle are on the same axis, the inner diameter of the circular nozzle of the water jet gem nozzle (605) is small, and the inner diameter of the diversion hole below the circular nozzle is large; the water jet gem nozzle holder (606) and the water optical coupling cavity shell (609) are sealed through a second sealing ring (617), and high-pressure water is prevented from leaking from the lower part of the water optical coupling cavity component (311) through a gap between the water jet gem nozzle holder (606) and the water optical coupling cavity shell (609); the water optical coupling cavity shell (609) and the water cavity sealing mirror support frame (604) are sealed through a sealing ring III (618), and high-pressure water is prevented from leaking from the upper part of the water optical coupling cavity component (311) through a gap between the water optical coupling cavity shell (609) and the water cavity sealing mirror support frame (604).

The left side of the water-light coupling cavity shell (609) is provided with a high-pressure water connector (602), deionized water enters an annular buffer area (611) through a water inlet channel, enters the deionized water of the annular buffer area (611), enters a cavity above the water jet gem nozzle holding frame (606) along a flow channel between the side surface of a cylinder at the upper part of the annular buffer area (611) and the inner wall of a hole of the water-light coupling cavity shell (609) under the action of pressure, and then is ejected from a circular nozzle of the water jet gem nozzle (605) to form a fine high-pressure water jet; a high-pressure gas connector (603) is arranged on the left side of the water-light coupling cavity shell (609), high-pressure gas enters a gas inlet ring hole (607) through a gas inlet channel and then enters a gas annular buffer area (608) through 4 gas inlets (614), and is ejected out of an annular columnar gas nozzle (613) under the action of high pressure to blow towards the surface of a workpiece to be processed, so that accumulated water on the processed part of the surface of the workpiece is blown away; the water jet jewel nozzle holder (606) and the water light coupling cavity shell (609) are sealed through a first sealing ring (612), and high-pressure air flow is prevented from leaking from the lower part of the water light coupling cavity component (311) through a gap between the water jet jewel nozzle holder (606) and the water light coupling cavity shell (609).

Secondary filter water tank (010), the pure water wherein passes through inlet tube entering high pressure deionization purifier (012), in the deionized water machine after impurity and mineral substance metal ion of getting rid of, high pressure deionized water gets into water optical coupling chamber part (311) through water optical coupling chamber inlet tube (016), form fine high pressure water jet water column (211) in water jet gem nozzle (605), laser forms the focus light column in fine high pressure water jet water column (211) and processes by processing work piece (212), water after the processing gets into after return water filter screen (007) filters and filters water tank (009), filter through secondary filter and get into secondary filter water tank (010), later get into high pressure deionization purifier (012) and purify, deionization, realize the cyclic utilization of water.

The variable curvature focusing light beam lens high-power water-guided laser processing machine tool has the following advantages and effects:

(1) the variable curvature focusing light column lens is adopted, so that laser penetrates through the lens to form a focusing light column consisting of a plurality of countless focusing points, the energy of the laser is distributed in the countless focusing points of the focusing light column, compared with the traditional spherical lens with only one focusing point, the variable curvature focusing light column lens has the advantages that the energy of the laser penetrating through the variable curvature focusing light column lens is not concentrated in one focusing point but is dispersed in a plurality of focusing points, the laser energy density of each focusing point is obviously reduced, the phenomena of gas explosion, water jet nozzle damage and water-optical coupling interruption of a light guide water jet water column caused by high energy density of a single focusing point are thoroughly eliminated, the power of the laser is obviously improved, and the processing efficiency of the water guide laser processing machine tool is further improved.

(2) According to the water light alignment three-coordinate adjusting component, the fine adjustment X axis and the fine adjustment Y axis are arranged in the same plane, so that the coordinate adjustment of the fine adjustment X axis and the fine adjustment Y axis is carried out in the same plane, the mechanism principle is ingenious, the structure is compact, the laser focusing is facilitated, and the rapid and accurate realization of the alignment of a focusing light beam and a water jet gem nozzle is facilitated;

(3) the numerical control system organically combines the three-coordinate movement track control of the focusing light column lens water-guide laser cutting head relative to the machine tool workbench, the control of parameters such as laser, water pressure, air pressure and the like, the laser focusing water-light alignment display and other functions, and facilitates the operation and automation realization of the machine tool.

Drawings

FIG. 1 is a schematic structural diagram of a high-power water-guided laser processing machine with a variable-curvature focusing beam lens;

FIG. 2 is a schematic diagram of a laser path of a focusing beam lens water-guided laser cutting head;

FIG. 3 is an external view of a focusing beam lens water-guided laser cutting head (001);

FIG. 4 is a schematic front view of FIG. 3;

FIG. 5 is a schematic cross-sectional view of FIG. 4 along direction A-A;

FIG. 6 is an enlarged view of the detail enclosed in the circle of FIG. 5;

FIG. 7 is a schematic sectional structure view along the direction B-B in FIG. 6, which is also a schematic view of an alignment adjustment mechanism for the focusing light column (208) of the focusing light column lens water-guided laser cutting head (001) and the water jet gem nozzle (605) of the water-light alignment three-coordinate adjustment component (310);

FIG. 8 is a schematic structural diagram of the water light alignment three-coordinate adjusting part (310) in FIGS. 3 and 4;

FIG. 9 is an external view of the horizontal fine X-axis and fine Y-axis coordinate adjustment components of the water light alignment three-coordinate adjustment component (310) of FIGS. 3 and 4;

FIG. 10 is a schematic structural view of the cavity block 311 of FIG. 3;

FIG. 11 is a schematic cross-sectional view of the optocoupler component (311) of FIG. 3.

Wherein: 001-focusing light column lens water guide laser cutting head, 002-laser, 003-laser control connecting wire, 004-numerical control system, 005-L-shaped connecting frame, 006-machine tool workbench, 007-backwater filter screen, 008-machine tool Y-axis motor, 009-filtered water tank, 010-secondary filtered water tank, 011-backwater pipe, 012-high pressure deionization water purifying device and 013-water light coupling cavity air inlet pipe; 014-high pressure air source, 015-machine tool base, 016-machine tool X-axis motor, 017-machine tool rectangular square-shaped water baffle, 018-water optical coupling cavity water inlet pipe, 019-machine tool upright post, 020-cutting head fixing connecting plate, 021-Z axis hanging plate frame and 022-machine tool Z-axis motor;

301-laser fiber connector, 302-beam expanding collimation lens group component, 303-beam splitter component, 304-variable curvature focusing light column lens component, 305-CCD camera adjusting knob, 306-holophote component, 307 attenuator component, 308-optical filter component, 309-CCD camera, 310-water light alignment three-coordinate adjusting component, 311-water light coupling cavity component, 201-fiber laser beam, 202-beam expanding collimation lens group, 203-beam splitter, 204-variable curvature focusing light column lens, 205-holophote, 206-attenuator, 207-optical filter, 210-water light coupling cavity, 208-focusing light column, 209-high pressure gas spraying channel, 211-micro high pressure water jet, 212-processed workpiece, 501-connecting inner cylinder, 502-transmission slide cylinder, 503-X direction alignment adjusting knob, 504-X direction alignment adjusting cylindrical transmission guide rail, 505-outer slide sleeve, 506-inner slide sleeve, 507-Y direction alignment adjusting knob, 508-Y direction alignment adjusting cylindrical transmission guide rail, 509-laser focusing Z axis adjusting sleeve, 510-outer slide sleeve through hole, 511-X direction alignment adjusting compression spring, 512-Y direction alignment adjusting compression spring, 513-sliding guide key, 601-positioning ball, 602-high pressure water connector, 603-high pressure air connector, 604-water cavity sealed mirror support frame, 605-water jet gem nozzle, 606-water jet gem nozzle holder, 607-air inlet ring hole, 608-gas ring buffer zone, 609-water optical coupling cavity shell, 610-water cavity sealing lens, 611-annular buffer area, 612-seal ring I, 613-annular columnar air nozzle, 614-air inlet hole, 615-air flow nozzle mounting and dismounting hole, 616-nozzle holder diversion hole, 617-seal ring II and 618-seal ring III.

Detailed Description

The following further describes the embodiments of the present invention with reference to the drawings.

As shown in fig. 1, the high-power water-guided laser processing machine tool with variable curvature focusing beam column lens comprises a water-guided laser cutting head (001) with a focusing beam column lens, a laser (002), a numerical control system (004), an L-shaped connecting frame (005), a machine tool workbench (006), a backwater filter screen (007), a Y-axis motor (008), a filtered water tank (009), a secondary filtered water tank (010), a backwater pipe (011), a high-pressure deionization water purification device (012), a high-pressure air source (014), a machine tool base (015), an X-axis motor (016), a zigzag water tank (017), a cutting head, a machine tool upright column (019), a connecting plate (020), a Z-axis hanger frame (021), a Z-axis motor (022) and the like; the left side of a machine tool base (015) is connected with a high-pressure deionization water purification device (012), a filter element, a deionization reverse osmosis membrane and a plunger pump are arranged in the high-pressure deionization water purification device (012), a high-pressure water outlet is formed in the rear of the high-pressure deionization water purification device (012), and a water inlet is formed in the front of the high-pressure deionization water purification device (012); a high-pressure water outlet of the high-pressure deionization water purifying device (012) is connected with a high-pressure water connector (602) in a water-light coupling cavity part (311) of a focusing light column lens water-guide laser cutting head (001) through a water-light coupling cavity water inlet pipe (018); the high-pressure deionization water purifier (012) is connected with a machine tool base (015) secondary filtered water tank (010) through a water return pipe (011); the top of the machine tool base (015) is provided with a square-shaped water tank (017); a backwater filter screen (007) which is distributed left and right is arranged in front of the reversed-square-shaped water tank (017), a water outlet is arranged below the backwater filter screen (007), a water filtering tank (009) is arranged below the water outlet, the water filtering tank (009) is of a cuboid structure, a handle is arranged in front of the water filtering tank, the water filtering tank (009) can be pushed and pulled, the water outlet is arranged below the water filtering tank (009), a secondary water filtering tank (010) is arranged below the water outlet of the water filtering tank (009), the secondary water filtering tank (010) is identical to the water filtering tank (009) in structure, a water inlet connecting port is arranged at the upper part of the secondary water filtering tank (010), and a water outlet connecting port is arranged at the left side of the secondary water filtering tank (010);

the numerical control system (004) is connected with the laser (002) through a laser control line, and the laser (002) is connected to an optical fiber connector of the focusing light column lens water-guide laser cutting head (001) through an optical fiber; the high-pressure gas source (014) is connected with a high-pressure gas connector (603) in a water-light coupling cavity part (311) of the focusing light column lens water-guided laser cutting head (001) through a water-light coupling cavity water inlet pipe (018);

2-4, the right side of the focusing beam-focusing lens water-guided laser cutting head (001) comprises a laser fiber connector (301), a beam-expanding collimating lens assembly (302), a beam splitter assembly (303), a variable-curvature focusing beam-focusing lens assembly (204), a water-light alignment three-coordinate adjusting assembly (310), and a water-light coupling cavity assembly (311) which are sequentially arranged from top to bottom; the left part comprises a CCD camera (309), a filter component (308), an attenuation piece component (307) and a holophote component (306) which are arranged from top to bottom in sequence; the laser optical fiber connector (301) is an annular cylinder, a laser optical fiber connector light guide hole for laser transmission is formed in the laser optical fiber connector (301), an optical fiber is connected to the upper end of the laser optical fiber connector (301), the beam expanding and collimating lens group component (302) is connected to the lower portion of the laser optical fiber connector, a beam expanding and collimating lens group light guide hole for laser transmission is formed in the beam expanding and collimating lens group component (302), and a beam splitter component (303) is installed below the beam expanding and collimating lens group component; the variable curvature focusing light column lens component (204) is internally provided with a variable curvature focusing light column lens (204), and the variable curvature focusing light column lens component (204) is arranged below the beam splitting mirror component (303); a beam splitter (203) in a beam splitter component (303) and the axis of a variable curvature focusing light column lens (204) form an included angle of 45 degrees, the beam splitter (203) and a total reflector (205) are installed in parallel, a CCD camera adjusting knob (305) is installed at the lower left of the total reflector component (306), a filter component (307) is installed right above the total reflector component (306), and a filter (407) is installed in the filter component (307); an attenuation sheet member (308) is arranged above the filter member (307), and an attenuation sheet (408) is arranged in the attenuation sheet member (308); the CCD camera (309) is arranged above the attenuation sheet component (308); the CCD camera (309) is in a square shape, and a connecting port is formed in the upper wall of the CCD camera; the CCD camera (309), the attenuation sheet component (308), the filter component (307) and the total reflection mirror component (306) are sequentially arranged on the same vertical line from top to bottom.

As shown in fig. 5, laser emitted by a laser (002) enters an optical fiber to form an optical fiber laser beam (201), passes through a beam expanding collimating lens group (202) and a beam splitter (203), reaches a curvature-variable focusing light column lens (204), passes through the curvature-variable focusing light column lens (204), enters a water optical coupling cavity component (311), is focused into a focusing light column (208) consisting of a plurality of countless focusing points from top to bottom along the axial lead of a fine high-pressure water jet column (211), is diffused and emitted to the inner surface of the fine high-pressure water jet column (211), and is transmitted to the surface of a workpiece to be processed (212) along the fine high-pressure water jet column (211) through total reflection, so that the workpiece to be processed (212) is processed; when the focusing light column (208) is aligned with the water jet gem nozzle (605), laser spot light on the upper surface of the water jet gem nozzle (605) is reflected back through the curvature-variable focusing light column lens (204), reflected by the spectroscope (203) and the total reflector (205), then passes through the optical filter (206) and the attenuation sheet (207), reaches the CCD camera (309), is subjected to fine adjustment through the CCD camera adjusting knob (305), and meanwhile, the clear alignment condition of the focusing light column (208) and the water jet gem nozzle (605), namely the alignment condition of the focusing light column (208) and the fine high-pressure water jet water column (211), can be seen on a display screen of a numerical control system (004).

As shown in fig. 6-9, the water light alignment three-coordinate adjusting component (310) comprises a connecting inner cylinder (501), a transmission sliding cylinder (502), an X-direction alignment adjusting knob (503), an X-direction alignment adjusting cylindrical transmission guide rail (504), an outer sliding sleeve (505), an inner sliding sleeve (506), a Y-direction alignment adjusting knob (507), a Y-direction alignment adjusting cylindrical transmission guide rail (508), a laser focusing Z-axis adjusting sleeve (509), an X-direction alignment adjusting compression spring (511), a Y-direction alignment adjusting compression spring (512), a sliding guide key (513), and the like; the lower cylinder of the connecting inner cylinder (501), the upper cylinder of the transmission sliding cylinder (502) and the laser focusing Z-axis adjusting sleeve (509) are of cylindrical hollow structures, the outer diameter of the upper cylinder of the transmission sliding cylinder (502) is smaller than the inner diameter of the lower cylinder of the connecting inner cylinder (501), the upper cylinder of the transmission sliding cylinder (502) and the lower cylinder of the laser focusing Z-axis adjusting sleeve (509) are in clearance fit, the upper part of the laser focusing Z-axis adjusting sleeve (509) is connected with the outer cylinder of the inner cylinder (501), and the lower part of the laser focusing Z-axis adjusting sleeve is connected with the outer cylinder of the transmission sliding cylinder (502); the connecting inner cylinder (501) is connected with a variable-curvature focusing light column lens component (204) at the upper part through a screw at the upper part of the connecting inner cylinder (501), the outer wall of the connecting inner cylinder (501) and the transmission sliding cylinder (502) is provided with a sliding guide key slot, a sliding guide key (513) is arranged in the sliding guide key slot, and the sliding guide key slot and the sliding guide key (513) ensure that the connecting inner cylinder (501) and the transmission sliding cylinder (502) cannot generate relative rotation; the outer wall of the connecting inner cylinder (501) is provided with a forward external thread, the outer wall of the transmission sliding cylinder (502) is provided with a reverse external thread, and the outer sides of the connecting inner cylinder (501) and the transmission sliding cylinder (502) are provided with a laser focusing Z-axis adjusting sleeve (509); the upper part of the inner wall of the laser focusing Z-axis adjusting sleeve (509) is provided with a positive internal thread, and the lower part of the inner wall is provided with a reverse internal thread; the relative movement of the connecting inner cylinder (501) and the transmission sliding cylinder (502) is realized through the rotation of the laser focusing Z-axis adjusting sleeve (509), so that the Z-axis adjustment of the water-light coupling cavity component (311) is realized, and the linear distance between the variable-curvature focusing light column lens (204) and the water-light coupling cavity component (311) is adjusted; the lower part of the transmission sliding barrel (502), the outer sliding sleeve (505) and the inner sliding sleeve (506) are all cylindrical hollow structures, and two X-direction alignment adjustment cylindrical transmission guide rails (504) pass through the transmission sliding barrel (502), the outer sliding sleeve (505) and the inner sliding sleeve (506) on the same horizontal plane in the X direction and are used as guide rails for relative movement between the transmission sliding barrel (502) and the inner sliding sleeve (506); the X-direction alignment adjustment cylindrical transmission guide rail (504), the transmission sliding barrel (502) and the matching holes of the inner sliding sleeve (506) are in interference fit one and in clearance fit one; a screw rod of the X-direction alignment adjusting knob (503) is positioned on the same horizontal plane with the two X-direction alignment adjusting cylindrical transmission guide rails (504) and an X-direction alignment adjusting compression spring (511) on the other side of the inner sliding sleeve (506), and the X-direction alignment adjusting compression spring (511) is arranged between the transmission sliding sleeve (502) and the inner sliding sleeve (506); a threaded hole is formed in the transmission sliding barrel (502), and a blind hole is formed in the outer wall of the inner sliding sleeve (506) and used for installing an X-direction alignment adjustment compression spring (511); one side of the inner sliding sleeve (506) is contacted with the front end of a screw rod of the X-direction alignment adjusting knob (503), and the other side presses the X-direction alignment adjusting compression spring (511); the X-direction alignment adjusting knob (503) is connected with the transmission sliding barrel (502) through a screw rod; rotating an X-direction alignment adjusting knob (503) to control the front end of the screw rod to stretch; when the X direction is clockwise rotated to align with the adjusting knob (503), the inner sliding sleeve (506) moves along the negative direction of the X axis; when the X-direction alignment adjusting knob (503) is rotated anticlockwise, the inner sliding sleeve (506) moves along the positive direction of the X axis under the pushing of the counterforce of the X-direction alignment adjusting compression spring (511), so that the movement of the water optical coupling cavity component (311) along the positive and negative directions of the X axis is controlled; the four Y-direction alignment adjustment cylindrical transmission guide rails (508) are pairwise parallel on the same horizontal plane in the Y direction, symmetrically penetrate through the transmission sliding barrel (502) and the outer sliding sleeve (505) in a front-back mode, and are used as guide rails for relative movement between the transmission sliding barrel (502) and the outer sliding sleeve (505); the Y-direction alignment adjustment cylindrical transmission guide rail (508) is in interference fit with a matching hole of the outer sliding sleeve (505) and is in clearance fit with a matching hole of the transmission sliding barrel (502); a screw rod of the Y-direction alignment adjusting knob (507) is positioned on the same horizontal plane with the four Y-direction alignment adjusting cylindrical transmission guide rails (508) and a Y-direction alignment adjusting compression spring (512) on the other side of the transmission sliding barrel (502), and the Y-direction alignment adjusting compression spring (512) is arranged between the transmission sliding barrel (502) and the outer sliding sleeve (505); the outer wall of the transmission sliding barrel (502) is provided with a blind hole, and the outer sliding sleeve (505) is provided with a threaded hole for installing a Y-direction alignment adjustment compression spring (512); the outer wall of one side of the transmission sliding barrel (502) is contacted with the front end of a screw rod of a Y-direction alignment adjusting knob (507), and the outer wall of the other side presses a Y-direction alignment adjusting compression spring (512); the Y-direction alignment adjusting knob (507) is connected with the outer sliding sleeve (505) through a screw rod; the Y-direction alignment adjusting knob (507) controls the front end of the screw to stretch and contract, and controls the transmission sliding barrel (502) to move along the positive and negative directions of the Y axis, so that the movement of the water optical coupling cavity component (311) along the positive and negative directions of the Y axis is controlled; when the Y direction is clockwise rotated to align with the adjusting knob (507), the transmission sliding barrel (502) moves along the positive direction of the Y axis; when the Y-direction alignment adjusting knob (507) is rotated anticlockwise, the transmission sliding barrel (502) moves along the negative direction of the Y axis under the pushing of the counterforce of the Y-direction alignment adjusting compression spring (512); the inner wall of the lower part of the inner sliding sleeve (506) is provided with an annular female buckle for connecting the water optical coupling cavity component (311); four Y-direction alignment adjusting cylindrical transmission guide rails (508), two X-direction alignment adjusting cylindrical transmission guide rails (504), an X-direction alignment adjusting knob (503), a Y-direction alignment adjusting knob (507), an X-direction alignment adjusting compression spring (511) and a Y-direction alignment adjusting compression spring (512) are positioned in the same plane; the displacement adjustment control of the X axis and the Y axis of the water optical coupling cavity component (311) is realized in the same plane where the X axis and the Y axis are positioned;

as shown in fig. 10-11, the water optical coupling cavity component (311) includes a positioning ball (601), a high-pressure water connector (602), a high-pressure gas connector (603), a water cavity sealing mirror support frame (604), a water jet jewel nozzle (605), a water jet jewel nozzle holder (606), a gas inlet ring hole (607), a gas annular buffer area (608), a water optical coupling cavity housing (609), a water cavity sealing lens (610), a first sealing ring (612), an annular columnar gas nozzle (613), a gas jet nozzle mounting and dismounting hole (615), a second sealing ring (617), a third sealing ring (618), and the like; a rotary trefoil structure buckle is arranged on the outer side of the upper part of the water cavity sealing mirror support frame (604), and is connected with an annular female buckle on the inner sliding sleeve (506) through the buckle, and the position of the three-coordinate adjusting component (310) aligned with water light is positioned through a positioning ball (601); a water cavity sealing mirror groove is formed below the water cavity sealing mirror support frame (604) and used for mounting a water cavity sealing mirror piece (610); the outer side of the upper part of the water cavity sealing mirror support frame (604) is connected with a water-light coupling cavity shell (609) through threads, and a high-pressure water connector (602) and a high-pressure air connector (603) are installed on the left side plane part of the water-light coupling cavity shell (609); the right side of the high-pressure water connector (602) is connected with the annular buffer area (611) through a water inlet channel; the water jet gem nozzle holder (606) is positioned at the lower part of the water optical coupling cavity shell (609) and is fixed in the water optical coupling cavity shell (609) through threads; a nozzle holder guide hole (616) is formed in the water jet gem nozzle holder (606), a water jet gem nozzle (605) is installed at the top of the nozzle holder guide hole (616), and a cylindrical nozzle is formed in the middle of the water jet gem nozzle (605); the outer wall of the middle part of the water jet gem nozzle holder (606) is provided with a gas inlet annular hole (607), the high-pressure gas connector (603) is connected with the gas inlet annular hole (607) through a gas inlet channel, the gas inlet annular hole (607) is connected with a gas annular buffer area (608) through 4 gas inlets (614), and an annular columnar gas nozzle (613) is connected below the gas annular buffer area (608).

The debugging and processing steps of the power water-guided laser processing machine tool of the variable-curvature focusing light beam lens are as follows:

1. programming: determining technological parameters such as laser processing power, pulse width, pulse frequency, feeding speed, processing cycle times, micro high-pressure water jet pressure and the like, compiling a processing program aiming at the processing requirement and the processing track of the processed workpiece according to the programming rule of the numerical control system (004), and inputting the processing program into the numerical control system after checking to be correct.

2. Water light alignment: controlling a laser to emit a micro-power laser beam, finely adjusting an adjusting knob (305) of the CCD camera until the center of a water jet gem nozzle (605) on the CCD camera is positioned at the center of a cross line of a display screen of a numerical control system (004); the laser focusing Z-axis adjusting sleeve (509) of the water light alignment three-coordinate adjusting component (310) is rotationally adjusted to realize the upper end plane of the water jet gem nozzle (605) at the upper end of the focusing light column (208) to be level, and the focusing adjustment of the laser is completed; the adjusting knob for aligning the X direction and the adjusting knob for aligning the Y direction are rotated to ensure that the center of the focusing light column (208) is also positioned at the central position of the cross line of the display screen of the numerical control system (004), thereby ensuring that the focusing light column (208) is concentric with the water jet gem nozzle (605).

3. Numerical control machining: controlling the X axis, the Y axis and the Z axis of the numerical control machine tool to return to zero positions; clamping a workpiece (212) to be processed on a machine tool working platform (006), and adjusting high-pressure water to set pressure to enable a water jet gem nozzle (605) to spray a fine high-pressure water jet (211); opening a high-pressure gas source (014) and jetting high-pressure gas flow from the annular columnar gas jet port (613); and operating the water guide laser processing program programmed by the numerical control system (004), thereby realizing the water guide laser processing of the processed workpiece (212) by the machine tool.

Modifications, equivalent changes, modifications and substitutions of the technical solutions without departing from the contents, principles and spirit of the technical solutions of the present invention still belong to the protection scope of the technical solutions of the present invention.

Claims

1. The high-power water of variable camber focus light beam lens leads laser machine tool, its characterized in that: the device comprises a focusing light beam lens water guide laser cutting head (001), a laser (002), a numerical control system (004), an L-shaped connecting frame (005), a machine tool workbench (006), a backwater filter screen (007), a Y-axis motor (008), a filtered water tank (009), a secondary filtered water tank (010), a backwater pipe (011), a high-pressure deionization water purifying device (012), a high-pressure air source (014), a machine tool base (015), an X-axis motor (016), a Chinese character hui-shaped water tank (017), a machine tool upright post (019), a cutting head connecting plate (020), a Z-axis hanging plate frame (021), a Z-axis motor (022) and the like; the water-guided laser cutting head (001) of the focusing light column lens is a high-power gas-explosion-free water-guided laser water-optical coupling alignment cutting head of a variable-curvature focusing light column lens, and comprises a laser fiber connector (301), a beam expanding and collimating lens group component (302), a spectroscope component (303), a variable-curvature focusing light column lens component (304), a CCD camera adjusting knob (305), a holophote component (306), an attenuation sheet component (307), a light filter component (308), a CCD camera (309), a water-optical alignment three-coordinate adjusting component (310) and a water-optical coupling cavity component (311); the optical path of the device comprises a laser (002), an optical fiber laser beam (201), a beam expanding collimating lens group (202), a spectroscope (203), a total reflector (205), an attenuation sheet (206), an optical filter (207), a CCD camera (309), a variable curvature focusing light column lens (204), a water-light coupling cavity (210), a focusing light column (208), a fine high-pressure water jet water column (211), a workpiece to be processed (212) and the like;

the curvature radius of the spherical surface of the variable curvature focusing light column lens (204) changes from large to small from the top to the edge of the spherical surface, the spherical surface with the largest curvature radius is positioned at the intersection point position of the lens axis and the spherical surface, namely the top position of the spherical surface, the farther the distance from the axis, the smaller the curvature radius of the spherical surface, and the spherical surface with the smallest curvature radius is positioned at the edge position of the spherical surface of the lens; the radius of curvature of the spherical surface at the edge position of the lens is minimum, and the laser passes through a focusing point formed by the edge of the variable-curvature focusing light column lens (204) and is closest to the bottom surface of the lens; the spherical curvature radius at the top of the lens is maximum, and the laser passes through a focusing point formed at the top of the variable curvature focusing light column lens (204) and is farthest away from the bottom surface of the lens; the water light alignment three-coordinate adjusting component (310) consists of a connecting inner cylinder (501), a transmission sliding cylinder (502), an X-direction alignment adjusting knob (503), an X-direction alignment adjusting cylindrical transmission guide rail (504), an outer sliding sleeve (505), an inner sliding sleeve (506), a Y-direction alignment adjusting knob (507), a Y-direction alignment adjusting cylindrical transmission guide rail (508), a laser focusing Z-axis adjusting sleeve (509), an outer sliding sleeve through hole (510), an X-direction alignment adjusting compression spring (511), a Y-direction alignment adjusting compression spring (512) and a sliding guide key (513); the water optical coupling cavity component (311) comprises a positioning ball (601), a high-pressure water connector (602), a high-pressure gas connector (603), a water cavity sealing mirror support frame (604), a water jet jewel nozzle (605), a water jet jewel nozzle holder (606), a gas inlet ring hole (607), a gas annular buffer area (608), a water optical coupling cavity shell (609), a water cavity sealing mirror (610), an annular buffer area (611), a first sealing ring (612), an annular columnar gas nozzle (613), a gas inlet hole (614), a gas jet nozzle mounting and dismounting hole (615), a second sealing ring (617), a third sealing ring (618) and the like.

2. The variable curvature focusing beam lens high power water-guided laser processing machine tool according to claim 1, characterized in that: an optical fiber laser beam (201) emitted by a laser (002) under the control of a numerical control system (004) is transmitted to a laser optical fiber connector (301) of a focusing beam column lens water guide laser cutting head (001) through an optical fiber, and the optical fiber laser beam (201) penetrates through the focusing beam column lens water guide laser cutting head (001) which is aligned by water-optical coupling; a focusing light column (208) consisting of a plurality of focusing points is formed by the optical fiber laser beam (201) penetrating through the variable curvature focusing light column lens (204) and is emitted into the water optical coupling cavity component (311); the focusing light column (208) is uniformly distributed along the axial lead of the variable-curvature focusing light column lens (204), laser passes through a focusing point and then is diverged and emitted to the inner surface of the micro high-pressure water jet water column (211), and then is transmitted along the inner part of the micro high-pressure water jet water column (211) through total reflection and emitted to a workpiece (212) to be processed; meanwhile, high-pressure gas entering the water optical coupling cavity part (311) is sprayed to a workpiece (212) to be processed through an annular columnar gas nozzle (613); the machine tool carries out water-guided laser processing under the control of a numerical control system (004).

3. The variable curvature focusing beam lens high power water-guided laser processing machine tool according to claim 1, characterized in that: the left side of a machine tool base (015) is connected with a high-pressure deionization water purification device (012), a filter element, a deionization reverse osmosis membrane and a plunger pump are arranged in the high-pressure deionization water purification device (012), a high-pressure water outlet is formed in the rear of the high-pressure deionization water purification device (012), and a water inlet is formed in the front of the high-pressure deionization water purification device (012); a high-pressure water outlet of the high-pressure deionization water purifying device (012) is connected with a high-pressure water connector (602) in a water-light coupling cavity part (311) of a focusing light column lens water-guide laser cutting head (001) through a water-light coupling cavity water inlet pipe (018); the high-pressure deionization water purifier (012) is connected with a secondary filtered water tank (010) in a machine tool base (015) through a water return pipe (011); a square-shaped water tank (017) is arranged above the machine tool base (015); a backwater filter screen (007) which is distributed left and right is arranged in front of the reversed-square water tank (017), a water outlet is arranged below the backwater filter screen (007), a water filtering water tank (009) is arranged below the water outlet, a handle is arranged in front of the water filtering water tank (009), the water filtering water tank (009) can be pushed and pulled, a water outlet is arranged below the water filtering water tank (009), a secondary water filtering water tank (010) is arranged below the water outlet of the water filtering water tank (009), a water outlet is arranged on the left side of the secondary water filtering water tank (010), and the water outlet is connected with a high-pressure deionized water purifying device (012) through a backwater pipe (011); the numerical control system (004) is connected to the right side of the machine tool base (015) through an L-shaped connecting frame (005); a water inlet numerical control system (004) is arranged in front of the high-pressure deionization water purifying device (012) to control the movement of a laser switch, power, pulse width and frequency and X Y horizontal coordinate axes of a machine tool workbench (006) and the movement of a Z coordinate axis of a focusing beam lens water guide laser cutting head (001); meanwhile, the numerical control system (004) is connected with the CCD camera (309) through a CCD camera data line, and displays the alignment condition of the focusing light column (208) and the water jet gem nozzle (605); a cross working sliding table is arranged above the machine tool base (015), the lower layer of the cross working sliding table is a Y-axis sliding table, and a Y-axis motor (008) and a lead screw nut are arranged on the lower layer of the cross working sliding table and used for controlling the Y-axis movement of the machine tool working table (006); the upper layer of the cross working sliding table is an X-axis sliding table which is provided with an X-axis motor (016) and a lead screw nut and used for controlling the X-axis movement of the machine tool working table (006); a machine tool workbench (006) is arranged above the X-axis sliding table; the machine tool upright column (019) is fixedly arranged at the position deviated from the middle of the machine tool base (015) through a bolt, and a Z-axis hanging plate frame (021) is fixed above the machine tool upright column; a Z-axis sliding table is arranged in front of the Z-axis hanging plate frame (021), a Z-axis motor (022) and a lead screw nut are installed on the Z-axis sliding table, a cutting head connecting plate (020) is fixed on the Z-axis sliding table, and a focusing beam lens water-guide laser cutting head (001) is fixedly installed on the cutting head connecting plate (020); the numerical control system (004) drives the focus beam lens water guide laser cutting head (001) to move in three coordinates relative to X, Y, Z axes of a machine tool workbench (006) by controlling the rotation of an X-axis motor (016), a Y-axis motor (008) and a Z-axis motor (022);

the numerical control system (004) is connected with the laser (002) through a laser control line (003), and the optical fiber of the laser (002) is inserted into the focusing light beam lens water-guided laser cutting head (001); the numerical control system (004) controls the switching, power, pulse width and frequency of the laser (002); the high-pressure air source (014) is connected with a high-pressure air connector (603) in a water-light coupling cavity part (311) of the focusing light column lens water-guided laser cutting head (001) through a water-light coupling cavity air inlet pipe (013).

4. The variable curvature focusing beam lens high power water-guided laser processing machine tool according to claim 1, characterized in that: the laser optical fiber connector (301) is an annular cylinder, a light guide hole for laser transmission is formed in the laser optical fiber connector (301), an optical fiber is connected to the upper end of the laser optical fiber connector (301), and a beam expanding collimating lens group component (302) is connected to the lower portion of the laser optical fiber connector; a light transmission and guide hole for laser transmission and concave and convex lenses which are distributed up and down are arranged in the beam expanding and collimating lens group component (302); a beam splitter component (303) is arranged below the beam expanding and collimating lens component (302), and a beam splitter (203) is arranged in the beam splitter component (303); the variable curvature focusing light column lens component (304) is internally provided with a variable curvature focusing light column lens (204), and the variable curvature focusing light column lens component (304) is arranged below the beam splitting mirror component (303); the lower part of the variable curvature focusing light column lens component (304) is connected with a water light alignment three-coordinate adjusting component (310) through a bolt, and the water light coupling cavity component (311) is connected with the upper water light alignment three-coordinate adjusting component (310) through a buckle structure; the beam splitter (203) and the axis of the variable curvature focusing light column lens (204) form an included angle of 45 degrees; a total reflection mirror part (306) is arranged on the left side of the beam splitter part (303), a total reflection mirror (205) is arranged in the total reflection mirror part (306), and the total reflection mirror (205) and the beam splitter (203) are arranged in parallel; the CCD camera adjusting knob (305) is installed at the lower left of the holophote component (306), a filter component (307) is installed right above the holophote component (306), and a filter (407) is installed in the filter component (307); an attenuation sheet member (308) is arranged above the filter member (307), and an attenuation sheet (408) is arranged in the attenuation sheet member (308); the CCD camera (309) is arranged above the attenuation sheet part (308), the CCD camera (309) is in a square shape, and a connecting port is formed in the upper wall of the CCD camera; the CCD camera (309), the attenuation sheet component (308), the optical filter component (307) and the total reflection mirror component (306) are sequentially arranged on the same vertical line from top to bottom; the device comprises a laser fiber connector (301), a beam expanding and collimating lens group component (302), a beam splitter component (303), a variable curvature focusing light column lens component (304) and a water-light alignment three-coordinate adjusting component (310), wherein a water-light coupling cavity component (311) is sequentially arranged on the same vertical line from top to bottom; in the water light alignment three-coordinate adjusting component (310), a lower cylinder of a connecting inner cylinder (501), an upper cylinder of a transmission sliding cylinder (502) and a laser focusing Z-axis adjusting sleeve (509) are cylindrical hollow structures, the outer diameter of the upper cylinder of the transmission sliding cylinder (502) is smaller than the inner diameter of the lower cylinder of the connecting inner cylinder (501), the two cylinders are in clearance fit, the upper part of the laser focusing Z-axis adjusting sleeve (509) is connected with an outer cylinder of the inner cylinder (501), and the lower part of the laser focusing Z-axis adjusting sleeve (509) is connected with an outer cylinder of the transmission sliding cylinder (502); the connecting inner cylinder (501) is connected with a variable-curvature focusing light column lens component (304) at the upper part through a screw at the upper part of the connecting inner cylinder (501), the outer wall of the connecting inner cylinder (501) and the transmission sliding cylinder (502) is provided with a sliding guide key groove, a sliding guide key (513) is arranged in the sliding guide key groove, and the sliding guide key groove and the sliding guide key (513) ensure that the connecting inner cylinder (501) and the transmission sliding cylinder (502) cannot generate relative rotation; the outer wall of the connecting inner cylinder (501) is provided with a forward external thread, the outer wall of the transmission sliding cylinder (502) is provided with a reverse external thread, and the outer sides of the connecting inner cylinder (501) and the transmission sliding cylinder (502) are provided with a laser focusing Z-axis adjusting sleeve (509); the upper part of the inner wall of the laser focusing Z-axis adjusting sleeve (509) is provided with a positive internal thread, and the lower part of the inner wall is provided with a reverse internal thread; the relative movement of the connecting inner cylinder (501) and the transmission sliding cylinder (502) is realized through the rotation of the laser focusing Z-axis adjusting sleeve (509), so that the Z-axis adjustment of the water-light coupling cavity component (311) is realized, and the linear distance between the variable-curvature focusing light column lens (204) and the water-light coupling cavity component (311) is adjusted; the lower part of the transmission sliding barrel (502), the outer sliding sleeve (505) and the inner sliding sleeve (506) are all cylindrical hollow structures, and two X-direction alignment adjustment cylindrical transmission guide rails (504) pass through the transmission sliding barrel (502), the outer sliding sleeve (505) and the inner sliding sleeve (506) on the same horizontal plane in the X direction and are used as guide rails for relative movement between the transmission sliding barrel (502) and the inner sliding sleeve (506); the X-direction alignment adjustment cylindrical transmission guide rail (504), the transmission sliding barrel (502) and the matching holes of the inner sliding sleeve (506) are in interference fit one and in clearance fit one; a screw rod of the X-direction alignment adjusting knob (503) is positioned on the same horizontal plane with the two X-direction alignment adjusting cylindrical transmission guide rails (504) and the X-direction alignment adjusting compression spring (511) on the other side of the inner sliding sleeve (506); the X-direction alignment adjustment compression spring (511) is arranged between the transmission sliding barrel (502) and the inner sliding sleeve (506); a threaded hole is formed in the transmission sliding barrel (502), and a blind hole is formed in the outer wall of the inner sliding sleeve (506) and used for installing an X-direction alignment adjustment compression spring (511); one side of the inner sliding sleeve (506) is contacted with the front end of a screw rod of the X-direction alignment adjusting knob (503), and the other side presses the X-direction alignment adjusting compression spring (511); the X-direction alignment adjusting knob (503) is connected with the transmission sliding barrel (502) through a screw rod; rotating an X-direction alignment adjusting knob (503) to control the front end of the screw rod to stretch; when the X direction is clockwise rotated to align with the adjusting knob (503), the inner sliding sleeve (506) moves along the negative direction of the X axis; when the X-direction alignment adjusting knob (503) is rotated anticlockwise, the inner sliding sleeve (506) moves along the positive direction of the X axis under the pushing of the counterforce of the X-direction alignment adjusting compression spring (511), so that the movement of the water optical coupling cavity component (311) along the positive and negative directions of the X axis is controlled; the four Y-direction alignment adjustment cylindrical transmission guide rails (508) are pairwise parallel on the same horizontal plane in the Y direction, symmetrically penetrate through the transmission sliding barrel (502) and the outer sliding sleeve (505) in a front-back mode, and are used as guide rails for relative movement between the transmission sliding barrel (502) and the outer sliding sleeve (505); the Y-direction alignment adjustment cylindrical transmission guide rail (508) is in interference fit with a matching hole of the outer sliding sleeve (505) and is in clearance fit with a matching hole of the transmission sliding barrel (502); a screw rod of the Y-direction alignment adjusting knob (507) is positioned on the same horizontal plane with the four Y-direction alignment adjusting cylindrical transmission guide rails (508) and a Y-direction alignment adjusting compression spring (512) on the other side of the transmission sliding barrel (502), and the Y-direction alignment adjusting compression spring (512) is arranged between the transmission sliding barrel (502) and the outer sliding sleeve (505); the outer wall of the transmission sliding barrel (502) is provided with a blind hole, and the outer sliding sleeve (505) is provided with a threaded hole for installing a Y-direction alignment adjustment compression spring (512); the outer wall of one side of the transmission sliding barrel (502) is contacted with the front end of a screw rod of a Y-direction alignment adjusting knob (507), and the outer wall of the other side presses a Y-direction alignment adjusting compression spring (512); the Y-direction alignment adjusting knob (507) is connected with the outer sliding sleeve (505) through a screw rod; the Y-direction alignment adjusting knob (507) controls the front end of the screw to stretch and contract, and controls the transmission sliding barrel (502) to move along the positive and negative directions of the Y axis, so that the movement of the water optical coupling cavity component (311) along the positive and negative directions of the Y axis is controlled; when the Y direction is clockwise rotated to align with the adjusting knob (507), the transmission sliding barrel (502) moves along the positive direction of the Y axis; when the Y-direction alignment adjusting knob (507) is rotated anticlockwise, the transmission sliding barrel (502) moves along the negative direction of the Y axis under the pushing of the counterforce of the Y-direction alignment adjusting compression spring (512); the inner wall of the lower part of the inner sliding sleeve (506) is provided with an annular female buckle for connecting the water optical coupling cavity component (311); four Y-direction alignment adjusting cylindrical transmission guide rails (508), two X-direction alignment adjusting cylindrical transmission guide rails (504), an X-direction alignment adjusting knob (503), a Y-direction alignment adjusting knob (507), an X-direction alignment adjusting compression spring (511) and a Y-direction alignment adjusting compression spring (512) are positioned in the same plane; the displacement adjustment control of the X axis and the Y axis of the water optical coupling cavity component (311) is realized in the same plane where the X axis and the Y axis are positioned; in the water optical coupling cavity component (311), a rotary trefoil structure buckle is arranged on the outer side of the upper part of a water cavity sealing mirror support frame (604), and is connected with an annular female buckle on an inner sliding sleeve (506) through the buckle, and the position of the water optical alignment three-coordinate adjusting component (310) is positioned through a positioning ball (601); a water cavity sealing mirror groove is formed below the water cavity sealing mirror support frame (604) and used for mounting a water cavity sealing mirror piece (610); the outer side of the upper part of the water cavity sealing mirror support frame (604) is connected with a water-light coupling cavity shell (609) through threads, and a high-pressure water connector (602) and a high-pressure air connector (603) are installed on the left side plane part of the water-light coupling cavity shell (609); the water jet gem nozzle holder (606) is positioned at the lower part of the water optical coupling cavity shell (609) and is fixed in the water optical coupling cavity shell (609) through threads; a nozzle holder guide hole (616) is formed in the water jet gem nozzle holder (606), a water jet gem nozzle (605) is installed at the top of the nozzle holder guide hole (616), and a cylindrical nozzle is formed in the middle of the water jet gem nozzle (605); the outer wall of the middle part of the water jet gem nozzle holder (606) is provided with a gas inlet annular hole (607), the high-pressure gas connector (603) is connected with the gas inlet annular hole (607) through a gas inlet channel, the gas inlet annular hole (607) is connected with a gas annular buffer area (608) through 4 gas inlets (614), and an annular columnar gas nozzle (613) is connected below the gas annular buffer area (608).

5. The variable curvature focusing beam lens high power water-guided laser processing machine tool according to claim 1, characterized in that: a water cavity sealing mirror groove is formed below the water cavity sealing mirror support frame (604), and a sealing ring and a water cavity sealing mirror piece (610) are arranged in the water cavity sealing mirror groove; the water jet gem nozzle holder (606) is provided with a water jet gem nozzle (605) mounting blind hole, and the water jet gem nozzle holder (606) and the cylindrical water jet gem nozzle (605) are mounted in an interference fit manner; the circular nozzle of the water jet gem nozzle (605) and the diversion hole below the circular nozzle are on the same axis, the inner diameter of the circular nozzle of the water jet gem nozzle (605) is small, and the inner diameter of the diversion hole below the circular nozzle is large; the water jet gem nozzle holder (606) and the water optical coupling cavity shell (609) are sealed through a second sealing ring (617), and high-pressure water is prevented from leaking from the lower part of the water optical coupling cavity component (311) through a gap between the water jet gem nozzle holder (606) and the water optical coupling cavity shell (609); the water optical coupling cavity shell (609) and the water cavity sealing mirror support frame (604) are sealed through a sealing ring III (618), and high-pressure water is prevented from leaking from the upper part of the water optical coupling cavity component (311) through a gap between the water optical coupling cavity shell (609) and the water cavity sealing mirror support frame (604).

6. The variable curvature focusing beam lens high power water-guided laser processing machine tool according to claim 1, characterized in that: the left side of the water-light coupling cavity shell (609) is provided with a high-pressure water connector (602), deionized water enters an annular buffer area (611) through a water inlet channel, enters the deionized water of the annular buffer area (611), enters a cavity above the water jet gem nozzle holding frame (606) along a flow channel between the side surface of a cylinder at the upper part of the annular buffer area (611) and the inner wall of a hole of the water-light coupling cavity shell (609) under the action of pressure, and then is ejected from a circular nozzle of the water jet gem nozzle (605) to form a fine high-pressure water jet; a high-pressure gas connector (603) is arranged on the left side of the water-light coupling cavity shell (609), high-pressure gas enters a gas inlet ring hole (607) through a gas inlet channel and then enters a gas annular buffer area (608) through 4 gas inlets (614), and is ejected out of an annular columnar gas nozzle (613) under the action of high pressure to blow towards the surface of a workpiece to be processed, so that accumulated water on the processed part of the surface of the workpiece is blown away; the water jet jewel nozzle holder (606) and the water light coupling cavity shell (609) are sealed through a first sealing ring (612), and high-pressure air flow is prevented from leaking from the lower part of the water light coupling cavity component (311) through a gap between the water jet jewel nozzle holder (606) and the water light coupling cavity shell (609).

7. The variable curvature focusing beam lens high power water-guided laser processing machine tool according to claim 1, characterized in that: purified water in the secondary filtering water tank (010) enters a high-pressure deionization water purifying device (012) through a water inlet pipe, after impurities and mineral metal ions are removed in a deionization machine, high-pressure deionized water enters a water optical coupling cavity part (311) through a water optical coupling cavity water inlet pipe (016), a fine high-pressure water jet water column (211) is formed in a water jet jewel nozzle (605), laser forms a focusing light column in the fine high-pressure water jet water column (211) to process a processed workpiece (212), the processed water enters the filtering water tank (009) after being filtered by a water return filter screen (007), and then enters the secondary filtering water tank (010) through the secondary filtering device, and then enters the high-pressure deionization water purifying device (012) for purification and deionization, so that the water can be recycled.