CN102350591B - Rectangular water waveguide laser processing device - Google Patents

Rectangular water waveguide laser processing device Download PDF

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CN102350591B
CN102350591B CN201110192792.3A CN201110192792A CN102350591B CN 102350591 B CN102350591 B CN 102350591B CN 201110192792 A CN201110192792 A CN 201110192792A CN 102350591 B CN102350591 B CN 102350591B
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laser
water
laser processing
processing apparatus
barrel
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CN102350591A (en
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黄元庆
卢希钊
林春
谢海鹤
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厦门大学
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Abstract

矩形水波导激光加工装置,涉及一种激光加工装置。 Water rectangular waveguide laser processing apparatus, relates to a laser processing apparatus. 设有激光器、倒置望远镜、镜筒、反射镜、聚焦柱棱镜、喷嘴体、带套环支架、支架、待加工工件、带过滤器的水收集器、夹具、数控平台、摄像机、水循环系统、计算机数控装置、观测激光器、第2反射镜、管接头和水腔体,水腔体设有水腔体壳体、压片、平板玻璃和压环,加工效率高,对于脉冲激光加工而言,耦合加工精度高,系统易控制、可调性好,具有激光打孔、切割以及焊接等功能。 With a laser, the inverted telescope, the lens barrel, a mirror, a prism focusing column, a nozzle body, a collar with a bracket, a workpiece to be machined, with a water trap filter, clip, NC platform, a camera, a water circulation system, the computer numerical control apparatus, the observation laser, a second mirror, and the water pipe joint cavity, the cavity is provided with water aqueous cavity of the housing, tableting, pressure ring and plate glass, high efficiency, pulsed laser machining for the coupling high precision, the system is easy to control, adjustability good, with laser drilling, cutting and welding functions. 在一定范围内解决了二维切割,突破了激光加工时受激光平台移动纵向移动的约束而无法进行边缘平整的切割的缺陷,解决了所述水波导激光加工范围局限于单点和效率低的缺点。 Within a certain range to solve a two-dimensional cutting, breaking defect laser platform constrained to move longitudinally moving the laser processing can not be performed when the edges are even cut, the aqueous solution of the waveguide laser machining range is limited to a single point and low efficiency shortcomings.

Description

矩形水波导激光加工装置 Water rectangular waveguide laser processing apparatus

技术领域 FIELD

[0001] 本发明涉及一种激光加工装置,尤其是涉及一种矩形水波导激光加工装置。 [0001] The present invention relates to a laser processing apparatus, particularly relates to a water-rectangular waveguide laser processing apparatus.

背景技术 Background technique

[0002]目前,作为激光技术的一个重要分支,激光加工技术已广泛应用于材料加工的各个领域。 [0002] Currently, as an important branch of laser technology, laser processing technology has been widely used in material processing. 通过与计算机数控技术相结合,激光加工技术已成为工业生产自动化的关键技术,拥有普通加工技术所不能比拟的优势,体现在加工速度快、精度高、可灵活加工复杂形状工件、无切削力、无刀具损耗、无需更换刀具、无加工噪声等,但也存在着切割厚度有限,焦点偏移,加工端面不太齐整的缺陷。 By combination with computer numerical control technology, laser processing technology has become the key technology of industrial automation, with ordinary processing techniques can not match advantages, reflected in the processing speed, high precision machining of complex shapes of the workpiece flexible, no cutting force, no tool wear and tear, without changing the tool, no processing noise, but there are cutting finite thickness, the focus shift, the end face machining defects not neat. 在射流技术中,在一定的压力下,在封闭腔体内可以形成一段稳定的层流射流,并以之为做为传输加工激光的柔性光纤。 In jet technology, under a certain pressure, the cavity may be formed in a closed section of the jet stable laminar flow, and as the transmission as a flexible fiber laser processing.

[0003] 1997年,基于水波导激光传输的原理,瑞士Richerzhagen Bernold开发出一种基于激光技术与射流技术相结合的水波导激光微细加工技术,并申请成为一项国际专利技术(W095/32834)。 [0003] In 1997, based on the principle of laser transmission waveguide water, Switzerland developed a water Richerzhagen Bernold waveguide laser micromachining technology based on laser technology and combining jet technology, and to become an international patent application (W095 / 32834) . 该技术在某些加工领域得到了应用和推广,传统的激光技术利用不同原理的激光发射设备和产生不同功率和波长的激光用于不同的工业应用领域。 This technique has been applied in some processing field and promotion, the conventional technique utilizes a different principle laser emission laser device and generating different laser power and wavelength for different industrial applications.

发明内容 SUMMARY

[0004] 本发明的目的是针对现有的水波导激光加工存在激光加工时受激光平台移动纵向移动的约束而无法进行边缘平整的切割,水波导激光加工范围局限于单点和效率低等缺点,提供一种矩形水波导激光加工装置。 [0004] The object of the present invention, the laser platform is constrained to move longitudinally moving the laser processing for the presence of a conventional waveguide laser processing water can not flat edge cutting, water waveguide laser machining limit the scope of a single point and low efficiency provided a rectangular water-waveguide laser processing apparatus.

[0005] 本发明设有激光器、倒置望远镜、镜筒、反射镜、聚焦柱棱镜、喷嘴体、带套环支架、支架、待加工工件、带过滤器的水收集器、夹具、数控平台、摄像机、水循环系统、计算机数控装置、观测激光器、第2反射镜、管接头和水腔体,所述水腔体设有水腔体壳体、压片、平板玻璃和压环; [0005] The present invention is provided with a laser, the inverted telescope, the lens barrel, a mirror, a prism focusing column, a nozzle body, a collar with a bracket, a workpiece to be machined, with a water trap filter, clip, NC platform, the camera , water system, a computer numerical control device, the observation laser, a second mirror, and the water pipe joint cavity, said water chamber is provided with a cavity housing the water, tableting, pressing ring and flat glass;

[0006] 所述倒置望远镜安装于激光器发出的加工激光光束的正前方,所述倒置望远镜设于镜筒上,镜筒固定在水腔体上方;聚焦柱棱镜安装于镜筒上;带套环支架设在支架上,支架安装于数控平台的固定底座上方;带过滤器的水收集器安装在水循环回路上为水循环系统提供水波导激光加工装置的去离子水;用于固定待加工工件的夹具固定在数控平台上并与数控平台一起运动;数控平台带动待加工工件在垂直于加工激光轴的平面上运动;摄像机安装在观测激光器发出的观测激光前方;所述水循环系统固定于地基上;计算机数控装置与数控平台连接;观测激光器与激光器发出加工激光同轴耦合安装;第2反射镜安装于观测激光器与激光器之间;管接头与水腔体和镜筒连接,压片安装在镜筒上并与第I反射镜螺纹连接,以便将激光光束引入喷嘴体的喷嘴;平 [0006] The telescope is mounted upside down on the front of the processing laser beam emitted by a laser, the inverted telescope provided on the lens barrel, the lens barrel is fixed in the chamber above the water; focusing column prism mounted on the barrel; with the collar holder mounted on the bracket, the bracket is fixed above the base is attached to the numerical control platform; water trap provided with filter mounting water deionized waveguide laser processing apparatus for the water circulation system in the circulation loop; workpiece to be machined for fixing jig and fixed motion in the NC and CNC internet platform together; NC internet driven movement of the workpiece to be machined on the plane perpendicular to the axis of the laser processing; observation cameras mounted in front of the observation laser light emitted by the laser; the water circulation system is fixed to the ground; computer NC and CNC internet connection means; observed with laser processing laser emits laser coupled coaxially mounted; a second reflector mounted between the laser and the observation laser; water pipe joint and a tube connected to the chamber, mounted on the barrel tablet and I connected to the second mirror threads, the laser beam is introduced so that the nozzles of the nozzle body; level 玻璃安装于镜筒下方和水腔体上方,所述水腔体固定在带套环支架上,压环设在水腔体壳体上部。 Glass barrel mounted above and below the water chamber, the water chamber is fixed on the ring support belt sleeve, the pressure ring provided in the upper water chamber housing.

[0007] 所述倒置望远镜可通过螺纹联接于镜筒上。 [0007] The inverted telescope threadably coupled to the barrel. 镜筒可通过螺纹固定在水腔体上方,并可调节。 Barrel can be screwed over the water chamber, can be adjusted by. 所述聚焦柱棱镜可通过螺纹连接在镜筒上。 The prism focusing column by screwing on the barrel. 所述水循环系统可采用高压低流量的柱塞泵。 The water circulation system may employ a high-pressure low-flow plunger pump.

[0008] 以下给出本发明的工作原理: [0008] The following presents the principle of the present invention:

[0009] 根据激光谐振时菲涅耳数越大则激光传输损耗越小的原理,以及稳定的矩形水射流形成是在装置上施加一定的水压,设计满足一定长宽比例关系的矩形喷嘴(刘萍,张东速,陈瑞.FLUENT软件在矩形喷嘴射流流场中的可视化研究与应用[J].矿山机械,2006,34(5)),以保证在一定的距离上可以形成分布相似高斯流速矩形的水射流(赵欣.异形喷嘴射流特性的实验研究.天津科技大学.硕士论文2005:14),从一定形状的喷嘴内产生截面形状为矩形的微细稳定层流水射流,即可在一定范围内实现从点到一定范围内的二维的有效激光加工,从而实现小范围的二维加工。 [0009] Fresnel number larger the smaller the transmission loss of the principle of laser, water jet and a stable rectangular form of the laser resonator in accordance with a certain pressure is exerted on the device, designed to meet certain rectangular aspect ratio between the nozzle ( visualization and application Liu Ping, Zhangdong speed, Sui .FLUENT software flow field in the rectangular jet nozzle [J]. mining machinery, 2006, 34 (5)), may be formed to ensure the distribution over a certain distance similar Gaussian velocity water jet rectangle (Zhao experimental Study profiled nozzle jets Tianjin University of Science thesis 2005:... 14), generated from a nozzle shaped as a rectangular cross-sectional shape of a fine jet flow stabilizing layer, can be in effective from the point to the two-dimensional laser processing within a certain range within a certain range, in order to achieve a small range of dimensional processing. 同时,将加工激光耦合聚焦于喷嘴微孔出口,在满足激光波导条件下,利用激光在水和空气两种介质的接触面内的全反射,从而引导激光束作用于被加工工件,该专利克服了传统激光加工中的诸如不易调焦、热区影响大、加工毛刺、以及易产生有害加工气体等缺点,首先,进行光束整形加工的激光可在一定范围实现在矩形水射流中的波导传输;其次,在一定的喷嘴形状(如本文设计的圆锥和矩形结合的形状)腔体耦合中,可以形成一定的稳定水射流提供给加工激光进行波导传输。 Meanwhile, the laser processing nozzle coupling focused on the microporous outlet in the laser waveguide satisfy the conditions, using a laser is totally reflected in the contact surface of the two media water and air so as to guide the laser beam is applied to the workpiece, which overcome the patent conventional laser processing such as focusing easy, high-impact thermal zone, processing glitches, and laser machining is easy to produce harmful gases disadvantages, first, the beam shaping process may be implemented in a rectangular waveguide transmission waterjet in a certain range; Secondly, in a certain nozzle shape (e.g., conical and rectangular design herein incorporated shapes) coupling cavities may be formed in a certain processing to provide a stable water jet laser waveguide transmission. 加工激光通过相应的光学系统产生的扩束、准直的激光,通过该装置相耦合产生的波导水束光纤阵列。 By a corresponding processing laser beam expander optical system generates quasi-laser straight waveguide through which water generating means coupled to an optical fiber array beam. 其原理是根据激光的分束条件以及激光水束光纤内部的全反射条件,使得相应的每束光在空气与稳定的水束的分界面上产生全反射,通过稳定的水射流阵列,进而将加工激光能量导引至待加工工件上。 The principle is that the total reflection condition inside the beam splitter optical fiber according to the conditions of the laser and the laser water, such that each respective beam totally reflected at the interface of air and water jets stable, by stabilizing the water jet array, in turn processing laser energy directed to the workpiece to be machined. 实现水波导激光并行加工的目的。 Achieve the purpose of water waveguide parallel laser processing. 在一定范围内,工件可以实现大尺度的并行切割操作而无需移动工件或品台,效率和加工质量都能够得到很大地提高。 Within a certain range, the workpiece may be achieved large-scale parallel cutting operation without moving the workpiece or product stage, and the efficiency of machining quality can be greatly improved.

[0010] 与现有的水波导激光加工装置相比,本发明具有以下突出优点: [0010] Compared with the conventional water-waveguide laser processing apparatus, the present invention has the following outstanding advantages:

[0011] I)加工效率高。 [0011] I) a high processing efficiency. 不同于单束水波导引激光加工系统,本发明可以将高功率激光耦合于线状水射流中和多个激光加工头中,从而能够将激光能量通过多束水波导导引至样品,形成并行加工系统,进行大范围的加工,提闻了效率。 Unlike single beam of the wave guide laser processing system, the present invention can be a high power laser coupled to a plurality of linear water jet and laser processing head, thereby enabling multi-beam laser energy through the waveguide guiding water to the sample, is formed in parallel processing system for processing a wide range, mention smell efficiency.

[0012] 2)对于脉冲激光加工而言,耦合加工精度高。 [0012] 2) For the laser processing pulsed, coupling high precision machining. 本发明采用高功率激光系统结合发明中的光学系统,可以根据加工要求来提高加工的精度。 The present invention uses a high power laser systems in combination with the optical system of the present invention, can improve the accuracy of processing according to processing requirements.

[0013] 3)系统易控制、可调性好。 [0013] 3) The system is easy to control, good adjustability. 本发明的光路和工作台都可以进行实时的调整,而根据监视系统提供的数据还可以就加工的情况进行监控调整提高了加工的灵活性。 Optical path and the stage of the present invention can be adjusted in real time, while monitoring adjusted increased processing flexibility according to the situation data monitoring system may also be provided on the processing.

[0014] 4)本发明具有激光打孔、切割以及焊接等功能。 [0014] 4) The present invention has laser drilling, cutting and welding functions.

[0015] 5)本发明在一定范围内解决了二维切割,突破了激光加工时受激光平台移动纵向移动的约束而无法进行边缘平整的切割的缺陷,解决了背景技术中所述水波导激光加工范围局限于单点和效率低的缺点。 [0015] 5) The present invention addresses within a certain range in a two-dimensional cutting, breaking defect laser platform constrained to move longitudinally moving the laser processing can not be cut flat edge, to solve the background art water waveguide laser single point machining limit the scope and low efficiency.

附图说明 BRIEF DESCRIPTION

[0016] 图1为本发明实施例(矩形水波导激光加工装置)的结构组成示意图。 [0016] The embodiment of FIG. 1 configuration (rectangular waveguide laser processing apparatus aqueous) composition schematic embodiment of the present invention.

[0017] 图2为本发明实施例(矩形水波导激光加工装置)的镜筒及水腔体的结构示意图。 [0017] FIG. 2 is a schematic structure of the lens barrel and water Example cavities (aqueous rectangular waveguide laser processing apparatus) of the embodiment of the present invention.

[0018] 图3为图2的俯视结构示意图。 [0018] FIG. 3 is a top view of the structure of FIG.

[0019] 图4为本发明实施例(矩形水波导激光加工装置)的喷嘴体的结构示意图。 [0019] FIG. 4 is a schematic structural embodiment of the nozzle body (aqueous rectangular waveguide laser processing apparatus) of the embodiment of the present invention.

[0020] 图5为图4的俯视结构示意图。 [0020] FIG. 5 is a schematic top view of the structure of FIG.

具体实施方式 Detailed ways

[0021] 以下实施例将结合附图对本发明作进一步的说明。 [0021] The following examples in conjunction with the accompanying drawings of the present invention will be further described.

[0022] 参见图1〜5,本发明实施例设有激光器1、倒置望远镜2、镜筒3、反射镜4、聚焦柱棱镜5、喷嘴体6、带套环支架7、支架8、待加工工件9、带过滤器的水收集器10、夹具11、数控平台12、摄像机13、水循环系统14、计算机数控装置15、观测激光器16、第2反射镜17、管接头30和水腔体37、压片31、压片32、平板玻璃33和压环38。 [0022] Referring to FIG. 1 ~ 5, embodiments of the present invention is provided with a laser 1, 2 inverted telescope, the lens barrel 3, a mirror 4, a prism focusing column 5, the nozzle member 6, 7 with the collar stents, the stent 8, to be processed workpiece 9, the water collecting belt filter 10, the clamp 11, the NC platform 12, camera 13, water circulation system 14, a computer numerical control device 15, the observation laser 16, the second reflecting mirror 17, the pipe joint 30 and the water chamber 37, 31 tablets, tablet 32, pressure ring 38 and flat glass 33. 所述倒置望远镜2安装于激光器I发出的加工激光光束的正前方,所述倒置望远镜2设于镜筒3上,镜筒3固定在水腔体37上方;聚焦柱棱镜5安装于镜筒3上;带套环支架7设在支架8上,支架8安装于数控平台12的固定底座上方;带过滤器的水收集器10安装在水循环回路上为水循环系统14提供水波导激光加工装置的去离子水;用于固定待加工工件的夹具11固定在数控平台12上并与数控平台12 —起运动;数控平台12带动待加工工件9在垂直于加工激光轴的平面上运动;摄像机13安装在观测激光器17发出的观测激光前方;所述水循环系统14固定于地基上;计算机数控装置15与数控平台12连接;观测激光器17与激光器I发出加工激光同轴耦合安装;第2反射镜16安装于观测激光器17与激光器I之间;管接头30与水腔体37和镜筒3连接,压片31安装在镜筒3上并与第I反射镜4螺纹连接,以便 2 of the inverted telescope is attached to the front of the processing laser beam emitted from the laser I, the inverted telescope 2 is provided on the lens barrel 3, the barrel 3 is fixed above the water chamber 37; focusing column of the prism 5 is mounted on the lens barrel 3 on; 7 is provided with a collar holder on the holder 8, the holder 8 is attached to the fixed above the base CNC platform 12; water trap with filter 10 is mounted in the water circulation loop water circulation system 14 to provide water waveguide laser processing apparatus according to DI water; jig for fixing a workpiece 11 to be secured to the platform 12 and NC and CNC internet 12-- from moving; NC platform 12 to be driven by movement of the workpiece 9 in a plane perpendicular to the axis of the laser processing; camera 13 is mounted a front observation laser 17 emitted laser observed; the water circulation system 14 is fixed to the ground; computer numerical control device 15 is connected to the internet 12 NC; I observed laser 17 emits the laser processing by the laser is coupled coaxially mounted; the second reflecting mirror 16 is attached to the observation of the laser between the laser 17 I; 30 with the pipe joint body 37 and the water chamber connected to the lens barrel 3, tablet 31 is mounted on the lens barrel 3 and the mirror 4 I of a threaded connection, in order to 将激光光束引入喷嘴体6的喷嘴;平板玻璃33安装于镜筒3下方和水腔体37上方,所述水腔体37固定在带套环支架7上,压环38设在水腔体37上部。 The laser beam is introduced into the nozzle body of the nozzle 6; plate glass 33 is attached to the lens barrel 3 and the bottom member 37 above the water chamber, the water chamber 37 with a collar fixed to the bracket 7, the water pressure ring 38 provided in the cavity 37 the upper part.

[0023] 观测激光器17,发射观测激光,用于观测加工激光同水喷嘴的耦合情况,同激光器I发出加工激光同轴耦合安装; [0023] Observation laser 17, a laser emitting observation, the observed situation for coupling a laser processing nozzle with water, the machining laser emits laser coupled coaxially mounted with I;

[0024] 反射镜16,将观测激光器17发出的观测激光调整至同加工激光同轴,可以独立安装于观测激光17与激光I之间。 [0024] The mirror 16, the laser 17 emitted laser light observation observation was adjusted to coaxial with processing laser, the laser may be independently mounted between the laser 17 and the I observed.

[0025] 所述倒置望远镜2可通过螺纹联接于镜筒3上。 [0025] 2 of the inverted telescope threadably coupled to the barrel 3. 镜筒3可通过螺纹固定在水腔体37上方,并可调节。 The lens barrel 3 can be screwed to the top of the water chamber 37, can be adjusted. 所述聚焦柱棱镜5可通过螺纹连接在镜筒3上。 The focusing column prism 5 may be attached to the lens barrel 3 by screwing. 所述水循环系统14可采用高压低流量的柱塞泵。 The water circulation system 14 may employ a high-pressure low-flow plunger pump.

[0026] 激光器I用于发出加工激光;倒置望远镜2用于对加工激光束的扩束、准直之作用;镜筒3用于容纳加工激光传输光路改变后的光学元件,镜筒3可通过螺纹固定在水腔体37上方,并可调节。 [0026] I lasers for emitting laser processing; 2 for processing an inverted telescope beam expander of the laser beam, the collimation effect; barrel 3 for receiving and processing the optical element after laser delivery optical path change, the lens barrel 3 can be threadably fixed above the water chamber 37, can be adjusted.

[0027] 在不改变加工激光光束下,平板玻璃33对形成水射流空间进行密封,安装于镜筒3下方,水腔体37上方,通过镜筒3与水腔体37之间的螺纹连接来定位。 [0027] In the laser beam machining is not changed, the 33 pairs of flat glass sealed space formed water jet, the lens barrel 3 is mounted on the bottom, the water chamber 37 above the body of water through the barrel with the cavity 3 a threaded connection 37 between the positioning.

[0028] 密封圈34用于平板玻璃33与镜筒3之间的密封,水腔体37与喷嘴6之间形成密封的空间,安装在水腔体37上,并安于镜筒3之间的间隙中。 [0028] The gasket 34 for sealing between the glass sheet 33 and the lens barrel 3, the water chamber forming a seal between the spaces 3 between the body 37 and the nozzle 6, is mounted on a water chamber 37, and content with barrel the gap. 密封圈35用于密封喷嘴体6和水腔体37,安装在喷嘴体6的凸肩与水腔体37之间。 Ring 35 for sealing the nozzle body 6 and the water chamber 37, between the mounting body 37 with the water chamber in the shoulder of the nozzle body 6. 密封圈36用于密封管接头30和水腔体37,置于管接头30与水腔体37之间的凹槽内。 Ring 36 for sealing the pipe joint 30 and the water chamber 37, the pipe joint 30 and placed in the groove between the water chamber 37 thereof.

[0029] 水腔体37用于容纳喷嘴体6以及镜筒3,以便形成射流,与镜筒3螺纹连接,固定在带套环支架7上。 [0029] The water cavity 37 for receiving the nozzle member 6 and the lens barrel 3, so as to form the jet, the thread is connected to the lens barrel 3 is fixed to the bracket 7 with a collar. 压环38用于固定水喷嘴体6,并承受水压力,压环38螺纹联接于水腔体37上。 Water pressure ring 38 for fixing the nozzle body 6, and subjected to water pressure, the pressure ring 38 screw-coupled to the body 37 of the water chamber.

[0030] 反射镜4用于调整加工激光传输光路方向,将加工激光调整至垂直于待加工零件表面,配合压片31螺纹联接保持架下面安装反射镜4,以便把加工激光引入喷嘴体6。 [0030] The reflecting mirror 4 for adjusting the processing laser transmission optical path direction, the processing laser to adjust to the vertical to be part surface machining, with tabletting 31 screw-coupled holder installed below the mirror 4, so that the processing laser beam introduced into the nozzle body 6.

[0031] 聚焦柱棱镜5将加工激光整形为矩形光斑,聚焦柱棱镜5可配合压片32通过螺纹连接在镜筒3上。 [0031] The focusing column 5 of the prism is rectangular beam shaping laser machining, can be used with focusing column prism 5 by a threaded connection piece 32 on the barrel 3.

[0032] 计算机数控装置15可以控制数控平台12,使得数控平台12按照计算机数控装置15编制好的程序运动,以便加工出需要的形状,其距离应该在距离工位5m左右的范围内连接数控平台12。 [0032] Computer numerical control apparatus 15 may control the NC platform 12, the platform 12 so that the numerical control program of programmed computer numerical control device 15 according to movement in order to machine the desired shape, which distance should be connected to a control platform in the range of about 5m from the station 12. 观测激光器17发射观测激光,经过反射镜16,将观测激光同轴于加工激光,用于观测加工激光同水喷嘴的耦合情况,与激光器I发出加工激光同轴耦合安装。 Observation laser emitting observation laser 17, mirror 16 through the observation laser beam coaxial to the laser processing, processing for coupling the case of observing a laser nozzle with water, emits laser machining mounted coaxially coupled to the laser I.

[0033] 激光通过聚焦柱棱镜5,再进入喷嘴6 ;进入耦合系统的激光与水循环系统14形成的循环水在喷嘴6出口进行耦合形成加工用的阵列水波导激光,从而激光能量最终被阵列的水波导最终被导引至待加工样品9进行各种加工操作;水收集器10和水循环系统14负责为整个加工系统提供所需要的水。 [0033] The laser beam passes through the focusing column of the prism 5, and then into the nozzle 6; circulating water entering the coupling system of a laser and water circulation system 14 is formed coupled to form an array of water waveguide laser machining at the nozzle exit 6, whereby the laser energy is eventually array finally the waveguide is directed to the water to be processed sample 9 performs various processing operations; water collector 10 and a water circulation system 14 is responsible for providing the required water for the entire processing system. 水循环系统14具体可以由增压泵和流量计以及稳压和过滤以及储能设备组成。 DETAILED water circulation system 14 may be comprised of a booster pump and a flow meter and regulator and filter and an energy storage device. 摄像机13在加工和调整系统过程中未计算机控制平台15提供输入的信息进而可以监视整个加工过程,控制平台12是通过计算机控制平台15从摄像机12获取的信息来调整待加工工件9与喷嘴6的位置关系来调整加工过程。 Camera 13 in the processing and adjustment system process is not computer-controlled platform 15 to provide the information input in turn can monitor the entire process, control stage 12 is 15 information camera 12 acquired from the adjusted workpiece to be processed by a computer control platform 9 and nozzle 6 positional relationship adjustment process.

[0034] 本发明不但解决了传统激光加工中的毛刺、热区影响以及需精确调节、效率低等技术问题,最重要的是通过多个透镜以及多组透射反射镜将高功率激光转换成多束激光并分别与多束水射流相耦合形成水波导激光并行加工系统;从而具有高效率、高精度、高质量等优点。 [0034] The present invention not only solves the conventional laser machining burrs, and the need to affect the precise adjustment of the hot zone, low efficiency technical problems, most importantly through the plurality of lenses and a plurality of sets of transmission mirror converted into a plurality of high power laser and the plurality of laser beams are respectively coupled to the beam forming aqueous water jet laser waveguide parallel processing system; so as to have high efficiency, high-precision, high-quality advantages. 在切割一些精细的狭缝,凹槽中具有更加高速的应用。 In a number of fine cutting slits, grooves having a higher speed applications.

[0035] 以下给出本发明的安装方法: [0035] The installation method of the present invention are given below of:

[0036] I)调整好数控平台12与镜筒3的位置。 [0036] I) adjusting the position of the lens barrel 12 and the NC internet 3. 若为矩形水波导激光装置根据加工要求分别精确调整激光切割头将待加工工件9按要求通过夹具11固定; If water is a rectangular waveguide laser device are precisely adjust the laser cutting head in accordance with the processing requirements of the workpiece to be machined is fixed by a clamp 9 according to claim 11;

[0037] 2)产生阵列水波导:由水循环系统14和水喷嘴6产生用于同激光精确耦合的阵列水波导; [0037] 2) generating an array of waveguides of water: the water circulation system 14 and the water nozzle 6 generates a laser array with water precise coupling waveguide;

[0038] 3)生成高功率激光:将激光器I打开后,激光依次通过倒置望远镜2和反射镜4,然后激光分别通过聚焦柱棱镜5 ; [0038] 3) generating a high-power laser: I opens after laser, laser light passes through a telescope 2 and the inverted mirror 4, the laser and focusing column by the prism 5, respectively;

[0039] 4)通过聚焦柱棱镜5,将激光同水射流在喷嘴体6进行耦合并引导加工激光至待加工工件9进行相应的加工; [0039] 4) focusing column by the prism 5, the laser light is coupled with the water jets 6 and the nozzle body to be guided laser machining the workpiece 9 corresponding processing;

[0040] 5)通过计算机数控装置15和摄像机13对加工过程进行跟踪监测保证加工质量。 [0040] 5) the process of tracking and monitoring of the quality assurance process by a computer numerical control device 15 and the camera 13.

[0041] 所述将高功率激光系统I产生的激光通过倒置望远镜2,激光到达透射反射镜4,再经过聚焦透镜5,然后耦合进入水喷嘴6。 [0041] The laser system is a high power laser telescope I 2 generated by inversion, laser light reaches transmissive mirror 4, and then through the focusing lens 5, 6 and then coupled into the water nozzle.

[0042] 所述生成矩形水波导激光的具体步骤还包括:处理过的蒸馏水(或去离子水)通过水循环装置14到达激光耦合的喷嘴体6形成的稳定的水射流,进而在喷嘴处同激光聚焦耦合并引导激光至待加工工件9进行加工。 DETAILED Step [0042] The water generates a rectangular waveguide laser further comprises: a treated distilled water (or deionized water) reached a steady water jet nozzle body coupled to the laser 6 is formed by water circulation means 14, further with a laser at the nozzle focusing and directing the laser is coupled to the workpiece 9 to be machined.

[0043] 所述矩形水波导激光装置运行的具体步骤还包括:摄像机13对待加工工件9的位置的全过程实时的检测,并将图像和加工情况传输到计算机系统15上进行评估。 [0043] In particular steps of the rectangular waveguide laser device according water run further comprising: treating the whole process of the camera 13 position of the workpiece 9 real-time detection, and transmits to the image processing conditions and evaluated on a computer system 15.

[0044] 矩形水波导激光加工设备,包括可产生高功率激光的激光器1、固定待加工样品的控制制台12和夹具11和摄像机13、计算机数控装置15,依次设置在激光光束发射方向上的,倒置望远镜2、反射镜4,以及用于产生激光聚焦的聚焦柱棱镜透镜5,喷嘴阵列6和水循环系统14 ;可用于调节镜筒3的支架7。 [0044] Rectangular water waveguide laser processing apparatus, comprising generating a high power laser of the laser 1, the control is fixed to be processed sample console 12 and the jig 11 and the camera 13, a computer numerical control device 15 are sequentially disposed on the emission direction of the laser beam , 2 inverted telescope, the mirror 4, and a prism lens for generating a focusing column focusing the laser beam 5, 6 and the nozzle arrays 14 water circulation system; can be used to adjust the lens barrel 73 of the bracket.

[0045] 如可采用1064nm波长的NchYAG固体激光器,上述倒置望远镜2可以根据具体需要选择伽里略或开普勒结构型式。 [0045] As employed 1064nm wavelength solid laser NchYAG the telescope 2 can be inverted Galilean or Keplerian structure type selected according to specific needs.

Claims (5)

1.矩形水波导激光加工装置,其特征在于设有激光器、倒置望远镜、镜筒、反射镜、聚焦柱棱镜、喷嘴体、带套环支架、支架、待加工工件、带过滤器的水收集器、夹具、数控平台、摄像机、水循环系统、计算机数控装置、观测激光器、第2反射镜、管接头和水腔体,所述水腔体设有水腔体壳体、压片、平板玻璃和压环; 所述倒置望远镜安装于激光器发出的加工激光光束的正前方,所述倒置望远镜设于镜筒上,镜筒固定在水腔体上方;聚焦柱棱镜安装于镜筒上;带套环支架设在支架上,支架安装于数控平台的固定底座上方;带过滤器的水收集器安装在水循环回路上为水循环系统提供水波导激光加工装置的去离子水;用于固定待加工工件的夹具固定在数控平台上并与数控平台一起运动;数控平台带动待加工工件在垂直于加工激光轴的平面上运动;摄像 1. Water rectangular waveguide laser processing apparatus, wherein the laser is provided, an inverted telescope, the lens barrel, a mirror, a prism focusing column, a nozzle body, a collar with a bracket, a workpiece to be machined, with a water trap filter , clamp, NC platform, a camera, a water circulation system, a computer numerical control device, the observation laser, a second mirror, and the water pipe joint cavity, said water chamber is provided with a cavity housing the water, tableting, pressing, and flat glass ring; in front of the inverted telescope is attached to the processing of the laser beam emitted by a laser, the inverted telescope provided on the lens barrel, the lens barrel is fixed in the chamber above the water; focusing column prism mounted on the barrel; belt loop holder provided on a bracket attached to the NC platform above the fixed base; water trap provided with filter mounting water deionized waveguide laser processing apparatus for the water circulation system in the circulation loop; jig for fixing a workpiece to be secured and movement in the internet with NC and CNC platform; NC internet driven movement of the workpiece to be machined on the plane perpendicular to the axis of the laser processing; imaging 机安装在观测激光器发出的观测激光前方;所述水循环系统固定于地基上;计算机数控装置与数控平台连接;观测激光器与激光器发出加工激光同轴耦合安装•'第2反射镜安装于观测激光器与激光器之间;管接头与水腔体和镜筒连接,压片安装在镜筒上并与第I反射镜螺纹连接,以便将激光光束引入喷嘴体的喷嘴,通过喷嘴体能够产生截面形状为矩形的水射流;平板玻璃安装于镜筒下方和水腔体上方,所述水腔体固定在带套环支架上,压环设在水腔体壳体上部。 Installed in front of the observation laser light emitted by the laser observed; the water circulation system fixed on the ground; NC and CNC internet connection means; observed with laser processing laser emits laser coupled coaxially mounted • 'the second laser mirror is mounted on the observation between the laser; and the pipe joint and a tube connected to the water chamber, tableting mounted on the first barrel and I screwing mirror, the laser beam introduced into the nozzle so that the nozzle body, the nozzle can be generated by cross-sectional shape is rectangular in shape water jet; plate glass tube attached to the upper and the lower water chamber, the water chamber is fixed to the holder with a collar, pressure ring provided in the upper water chamber housing.
2.如权利要求1所述的矩形水波导激光加工装置,其特征在于所述倒置望远镜通过螺纹联接于镜筒上。 2. The water of claim 1 rectangular waveguide laser processing apparatus as claimed in claim, characterized in that the inverted telescope is threaded on the barrel.
3.如权利要求1所述的矩形水波导激光加工装置,其特征在于镜筒通过螺纹固定在水腔体上方。 Water rectangular waveguide of the laser processing apparatus 1 as claimed in claim 3, characterized in that the barrel is fixed by a screw in the upper water chamber.
4.如权利要求1所述的矩形水波导激光加工装置,其特征在于所述聚焦柱棱镜通过螺纹连接在镜筒上。 4. Water rectangular waveguide of the laser processing apparatus of claim 1, characterized in that said prism focusing column by screwing on the barrel.
5.如权利要求1所述的矩形水波导激光加工装置,其特征在于所述水循环系统采用高压低流量的柱塞泵。 5. Water rectangular waveguide laser processing apparatus according to claim 1, wherein said water circulation system using a high pressure piston pump of low flow.
CN201110192792.3A 2011-07-08 2011-07-08 Rectangular water waveguide laser processing device CN102350591B (en)

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