CN102350591B - Rectangular water waveguide laser processing device - Google Patents
Rectangular water waveguide laser processing device Download PDFInfo
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- CN102350591B CN102350591B CN201110192792.3A CN201110192792A CN102350591B CN 102350591 B CN102350591 B CN 102350591B CN 201110192792 A CN201110192792 A CN 201110192792A CN 102350591 B CN102350591 B CN 102350591B
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 title claims abstract description 129
- 238000012545 processing Methods 0.000 title claims abstract description 75
- 239000005357 flat glass Substances 0.000 claims abstract description 9
- 239000008367 deionised water Substances 0.000 claims description 4
- 229910021641 deionized water Inorganic materials 0.000 claims description 4
- 238000006073 displacement reaction Methods 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 238000005520 cutting process Methods 0.000 abstract description 10
- 230000008878 coupling Effects 0.000 abstract description 6
- 238000010168 coupling process Methods 0.000 abstract description 6
- 238000005859 coupling reaction Methods 0.000 abstract description 6
- 230000007547 defect Effects 0.000 abstract description 3
- 238000003466 welding Methods 0.000 abstract description 2
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- 238000005516 engineering process Methods 0.000 description 13
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- 230000005540 biological transmission Effects 0.000 description 5
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- 230000008901 benefit Effects 0.000 description 3
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- 230000003287 optical effect Effects 0.000 description 3
- 238000013461 design Methods 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 239000013307 optical fiber Substances 0.000 description 2
- 238000007493 shaping process Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000012153 distilled water Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004146 energy storage Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000008398 formation water Substances 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000003698 laser cutting Methods 0.000 description 1
- 238000003913 materials processing Methods 0.000 description 1
- 238000005065 mining Methods 0.000 description 1
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- 238000011112 process operation Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
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- 230000000087 stabilizing effect Effects 0.000 description 1
- 230000026676 system process Effects 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
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- Laser Beam Processing (AREA)
Abstract
The invention discloses a rectangular water waveguide laser processing device, which relates to a laser processing device and is provided with a laser, an inverted telescope, a lens cone, a reflector, a focusing cylindrical prism, a nozzle body, a support with a lantern ring, a support, a workpiece to be processed, a water collector with a filter, a fixture, a numerical control platform, a vidicon, a water circulation system, a computer numerical control device, an observation laser, a second reflector, a pipe joint and a water cavity, wherein the water cavity is provided with a water cavity shell, a compression sheet, plate glass and a compression ring. The processing efficiency is high; to pulse laser processing, the coupling processing precision is high; and the system is easy to control, the adjustability is high, the functions of laser boring, cutting, welding, and the like are fulfilled, the problem of two dimensional cutting is solved in a certain range, the defect that during laser processing, edges cannot be smoothly cut under the constraint of longitudinal shift of a laser platform is broken through, and the shortcomings that the water waveguide laser processing range is restricted to a single point and the efficiency is low are solved.
Description
Technical field
The present invention relates to a kind of laser processing device, especially relate to a kind of rectangular water waveguide laser processing device.
Background technology
At present, as an important branch of laser technology, laser processing technology has been widely used in the every field of materials processing.By combining with computer numerical control technology, laser processing technology has become the key technology of industrial production automation, have the advantage that Common machining techniques can not be compared, be embodied in that process velocity is fast, precision is high, can flexible processing complex-shaped workpieces, without cutting force, without cutter loss, without the need to changing cutter, without processing noise etc., but it is limited also to there is cutting thickness, focal shift, the defect that processing end face is not too neat.In fluidics, under pressure, one section of stable laminar jet can be formed in closed cavity, and be flexible optical fibre as transmission processing laser.
1997, based on the principle of water waveguide Laser Transmission, Switzerland Richerzhagen Bernold develops a kind of water waveguide laser assisted microprocessing technology combined with fluidics based on laser technology, and applies to become an international monopoly technology (WO95/32834).This technology obtains application at some manufacture field and promotes, and traditional laser technology utilizes the laser of the laser transmitting set of different principle and generation different capacity and wavelength for different industrial application.
Summary of the invention
The constraint that when the object of the invention is to there is Laser Processing for existing water waveguide Laser Processing, Stimulated Light platform movement vertically moves and the cutting of flush edge cannot be carried out, water waveguide Laser Processing limit, in single-point and the shortcoming such as efficiency is low, provides a kind of rectangular water waveguide laser processing device.
The present invention is provided with laser instrument, inverted telescope, lens barrel, speculum, focusing post prism, nozzle body, band ferrule holder, support, workpiece to be processed, the water collector of band filter, fixture, digital control platform, video camera, water circulation system, computer numerical control device, observation laser instrument, the 2nd speculum, pipe joint and water chamber, and described water chamber is provided with water chamber housing, compressing tablet, plate glass and pressure ring;
Described inverted telescope is installed on the dead ahead of the processing laser beam that laser instrument sends, and described inverted telescope is located on lens barrel, and lens barrel is fixed on above water chamber; Focusing on post prism is installed on lens barrel; Band ferrule holder is located on support, and support installing is above the firm banking of digital control platform; Water collector with filter is arranged on water-flow circuit as water circulation system provides the deionized water of water waveguide laser processing device; Fixture for fixing workpiece to be processed to be fixed on digital control platform and to move together with digital control platform; Digital control platform drives workpiece to be processed to move in the plane perpendicular to processing laser axis; Video camera is arranged on the observation laser front that observation laser instrument sends; Described water circulation system is fixed on ground; Computer numerical control device is connected with digital control platform; Observation laser instrument and laser instrument send to be processed laser coaxial and is coupled and installs; 2nd speculum is installed between observation laser instrument and laser instrument; Pipe joint is connected with water chamber and lens barrel, and compressing tablet to be arranged on lens barrel and to be connected with the 1st reflector threads, laser beam is introduced the nozzle of nozzle body; Plate glass is installed on below lens barrel and above water chamber, described water chamber is fixed in band ferrule holder, and pressure ring is located at water chamber housing upper.
Described inverted telescope by thread connection on lens barrel.Lens barrel is fixed on above water chamber by screw thread, and adjustable.Described focusing post prism is by being threaded on lens barrel.Described water circulation system can adopt the plunger displacement pump of high pressure low discharge.
Below provide operation principle of the present invention:
The principle less according to the loss of the larger then Laser Transmission of Fresnel number during laser resonance, and stable rectangle water jet formation applies certain hydraulic pressure on device, design meets the rectangular nozzle (Liu Ping of certain Aspect Ratio relation, open east speed, the visual research of Chen Rui .FLUENT software in rectangular nozzle jet flow field and application [J]. mining machinery, 2006, 34 (5)), with ensure can be formed in certain distance distribute similar Gauss's flow velocity rectangle water jet (Zhao Xin. the experimental study of special-shaped nozzle jet characteristics. University Of Science and Technology Of Tianjin. Master's thesis 2005:14), in the nozzle of definite shape, production cross section shape is the fine stably stratified flow water jet of rectangle, the effective Laser Processing from point to the two dimension in certain limit can be realized within the specific limits, thus the two dimension processing realized among a small circle.Simultaneously, processing laser coupled is focused on nozzle pore openings, meeting under laser guided-wave conditions, utilize the total reflection of laser in the contact surface of water and air two media, thus guide laser beam to act on workpiece to be machined, this patent overcomes such as not easily focusing in conventional laser processing, hot-zone impact is large, machined burrs and easily produce the shortcomings such as harmful processing gas, first, and the waveguide transmission that the laser carrying out beam shaping processing can realize in rectangle water jet in certain limit; Secondly, in certain nozzle form (as the shape that the circular cone that designs herein and rectangle combine) cavity coupling, certain stable water jet can be formed and be supplied to processing laser and carry out waveguide transmission.The laser expanding, collimate that processing laser is produced by corresponding optical system, the waveguide water bundle fiber array of the generation that is coupled by this device.Its principle is the total reflection condition of beam splitting condition according to laser and laser water bundle inside of optical fibre, corresponding every Shu Guang is produced on the interface of air and stable water bundle be totally reflected, by stable water jet array, and then processing laser energy is directed on workpiece to be processed.Realize the object of water waveguide laser parallel processing.Within the specific limits, workpiece can realize the parallel cutting operation of large scale and without the need to travelling workpiece or sample platform, efficiency and crudy can both be improved greatly.
Compared with existing water waveguide laser processing device, the present invention has following outstanding advantages:
1) working (machining) efficiency is high.Be different from single Shu Shuibo and guide laser-processing system, high power laser light can be coupled in in multiple laser Machining head in wire water jet by the present invention, thus laser energy can be directed to sample by multi beam water waveguide, forms parallel machine system, process on a large scale, improve efficiency.
2) for pulse laser machining, coupling machining accuracy is high.The present invention adopts high power laser system to combine the optical system in inventing, and can improve the precision of processing according to processing request.
3) system is easy to control, adjustability good.Light path of the present invention and workbench can carry out real-time adjustment, and can also carry out monitoring the flexibility that adjustment improves processing with regard to the situation of processing according to the data that surveillance provides.
4) the present invention has the functions such as laser boring, cutting and welding.
5) the present invention solves two dimension cutting within the specific limits, the constraint that when breaching Laser Processing, Stimulated Light platform movement vertically moves and cannot carry out the defect of the cutting of flush edge, solves the Laser Processing of water waveguide described in background technology limit in single-point and inefficient shortcoming.
Accompanying drawing explanation
Fig. 1 is the structure composition schematic diagram of the embodiment of the present invention (rectangular water waveguide laser processing device).
Fig. 2 is the lens barrel of the embodiment of the present invention (rectangular water waveguide laser processing device) and the structural representation of water chamber.
Fig. 3 is the plan structure schematic diagram of Fig. 2.
Fig. 4 is the structural representation of the nozzle body of the embodiment of the present invention (rectangular water waveguide laser processing device).
Fig. 5 is the plan structure schematic diagram of Fig. 4.
Detailed description of the invention
Following examples will the present invention is further illustrated by reference to the accompanying drawings.
See Fig. 1 ~ 5, the embodiment of the present invention is provided with laser instrument 1, inverted telescope 2, lens barrel 3, speculum 4, focuses on post prism 5, nozzle body 6, band ferrule holder 7, support 8, workpiece to be processed 9, the water collector 10 being with filter, fixture 11, digital control platform 12, video camera 13, water circulation system 14, computer numerical control device 15, observation laser instrument 16, the 2nd speculum 17, pipe joint 30 and water chamber 37, compressing tablet 31, compressing tablet 32, plate glass 33 and pressure ring 38.Described inverted telescope 2 is installed on the dead ahead of the processing laser beam that laser instrument 1 sends, and described inverted telescope 2 is located on lens barrel 3, and lens barrel 3 is fixed on above water chamber 37; Focusing on post prism 5 is installed on lens barrel 3; Band ferrule holder 7 is located on support 8, and support 8 is installed on above the firm banking of digital control platform 12; Water collector 10 with filter is arranged on water-flow circuit as water circulation system 14 provides the deionized water of water waveguide laser processing device; Fixture 11 for fixing workpiece to be processed to be fixed on digital control platform 12 and to move together with digital control platform 12; Digital control platform 12 drives workpiece to be processed 9 to move in the plane perpendicular to processing laser axis; Video camera 13 is arranged on the observation laser front that observation laser instrument 17 sends; Described water circulation system 14 is fixed on ground; Computer numerical control device 15 is connected with digital control platform 12; Observation laser instrument 17 and laser instrument 1 send to be processed laser coaxial and is coupled and installs; 2nd speculum 16 is installed between observation laser instrument 17 and laser instrument 1; Pipe joint 30 is connected with water chamber 37 and lens barrel 3, and compressing tablet 31 to be arranged on lens barrel 3 and to be threaded with the 1st speculum 4, laser beam is introduced the nozzle of nozzle body 6; Plate glass 33 is installed on below lens barrel 3 and above water chamber 37, described water chamber 37 is fixed in band ferrule holder 7, and pressure ring 38 is located at water chamber 37 top.
Observation laser instrument 17, launches observation laser, for observing processing laser with the coupling condition of (operating) water nozzle, sending the coupling of processing laser coaxial install with laser instrument 1;
Speculum 16, being adjusted to the observation laser that observation laser instrument 17 sends with processing laser coaxial, can being independently installed between observation laser 17 and laser 1.
Described inverted telescope 2 by thread connection on lens barrel 3.Lens barrel 3 is fixed on above water chamber 37 by screw thread, and adjustable.Described focusing post prism 5 is by being threaded on lens barrel 3.Described water circulation system 14 can adopt the plunger displacement pump of high pressure low discharge.
Laser instrument 1 is for sending processing laser; Inverted telescope 2 is for the effect expanding, collimate to processing laser beam; Lens barrel 3 is for holding the optical element after the change of processing laser delivery optics, and lens barrel 3 is fixed on above water chamber 37 by screw thread, and adjustable.
Do not changing under processing laser beam, plate glass 33 seals formation water jet space, is installed on below lens barrel 3, above water chamber 37, is located by being threaded between lens barrel 3 with water chamber 37.
Sealing ring 34, for the sealing between plate glass 33 and lens barrel 3, forms the space of sealing between water chamber 37 and nozzle 6, be arranged on water chamber 37, and is satisfied with in the gap between lens barrel 3.Sealing ring 35, for sealed-in nozzles body 6 and water chamber 37, is arranged between the convex shoulder of nozzle body 6 and water chamber 37.Sealing ring 36, for sealed fitting 30 and water chamber 37, is placed in the groove between pipe joint 30 and water chamber 37.
Water chamber 37, for holding nozzle body 6 and lens barrel 3, to form jet, is threaded with lens barrel 3, is fixed in band ferrule holder 7.Pressure ring 38 for fixing (operating) water nozzle body 6, and bears water pressure, and pressure ring 38 thread connection is on water chamber 37.
Processing laser, for adjusting processing laser delivery optics direction, is adjusted to perpendicular to piece surface to be processed by speculum 4, coordinates below compressing tablet 31 thread connection retainer and installs speculum 4, processing laser is introduced nozzle body 6.
Focusing on post prism 5 is rectangular light spot by processing laser shaping, focuses on post prism 5 and compressing tablet 32 can be coordinated to be threaded connection on lens barrel 3.
Computer numerical control device 15 can control digital control platform 12, makes the Sequence motion that digital control platform 12 weaves according to computer numerical control device 15, to process the shape of needs, its distance should connect digital control platform 12 in the scope of distance station about 5m.Observation laser launched by observation laser instrument 17, through speculum 16, will observe laser coaxial in processing laser, and processing laser with the coupling condition of (operating) water nozzle for observing, and sends process laser coaxial and be coupled and install with laser instrument 1.
Laser by focusing on post prism 5, then enters nozzle 6; The laser entering coupled system exports with the recirculated water that water circulation system 14 is formed the array water waveguide laser carrying out being coupled and formed and process at nozzle 6, thus laser energy is finally finally led to sample 9 to be processed by the water waveguide of array carries out various process operation; Water collector 10 and water circulation system 14 are responsible for the water that whole system of processing provides required.Water circulation system 14 specifically can be made up of booster pump and flowmeter and voltage stabilizing and filtration and energy storage device.Video camera 13 non-computer parametric controller 15 in processing and adjustment System process provides the information of input and then can monitor whole process, and parametric controller 12 adjusts workpiece to be processed 9 by computer parametric controller 15 from the information that video camera 12 obtains to adjust process with the position relationship of nozzle 6.
The present invention not only solves burr, the hot-zone impact in conventional laser processing and needs the technical problems such as fine adjustment, efficiency are low, the most important thing is by multiple lens and many group Transflective mirrors high power laser light to be converted to multiple laser and be coupled with multi beam water jet respectively to form water waveguide laser parallel system of processing; Thus there is the advantages such as high efficiency, high accuracy, high-quality.At some meticulous slits of cutting, there is in groove application more at a high speed.
Below provide installation method of the present invention:
1) position of digital control platform 12 and lens barrel 3 is adjusted.If rectangular water waveguide laser aid according to processing request respectively accurate adjustment laser cutting head workpiece to be processed 9 is fixed by fixture 11 on request;
2) array water waveguide is produced: produced the array water waveguide be accurately coupled for same laser by water circulation system 14 and (operating) water nozzle 6;
3) generate high power laser light: after being opened by laser instrument 1, laser is successively by inverted telescope 2 and speculum 4, and then laser is respectively by focusing post prism 5;
4) by focusing on post prism 5, laser being carried out being coupled with water jet at nozzle body 6 and guiding and processes laser and process accordingly to workpiece to be processed 9;
5) carry out tracking and monitoring by computer numerical control device 15 and video camera 13 pairs of process and ensure crudy.
The described laser produced by high power laser system 1 is by inverted telescope 2, and laser arrives Transflective mirror 4, then through condenser lens 5, is then coupled into (operating) water nozzle 6.
The concrete steps of described generation rectangular water waveguide laser also comprise: the stable water jet that the nozzle body 6 that the distilled water (or deionized water) processed arrives laser coupled by water circle device 14 is formed, and then are coupled with Laser Focusing at nozzle place and guide laser to process to workpiece to be processed 9.
The concrete steps that described rectangular water waveguide laser aid runs also comprise: the detection that the overall process of the position of video camera 13 pairs of workpieces to be processed 9 is real-time, and image and processing situation are transferred in computer system 15 and assess.
Rectangular water waveguide laser process equipment, comprise the laser instrument 1 that can produce high power laser light, the control platform 12 fixing sample to be processed and fixture 11 and video camera 13, computer numerical control device 15, be successively set on laser beam transmit direction, inverted telescope 2, speculum 4, and for generation of the focusing post prismatic lens 5 of Laser Focusing, nozzle array 6 and water circulation system 14; Can be used for the support 7 regulating lens barrel 3.
As adopted the Nd:YAG solid state laser of 1064nm wavelength, above-mentioned inverted telescope 2 can be selected to omit or Kepler's structural shape in gal according to specific needs.
Claims (5)
1. rectangular water waveguide laser processing device, it is characterized in that being provided with laser instrument, inverted telescope, lens barrel, speculum, focusing post prism, nozzle body, band ferrule holder, support, workpiece to be processed, the water collector of band filter, fixture, digital control platform, video camera, water circulation system, computer numerical control device, observation laser instrument, the 2nd speculum, pipe joint and water chamber, described water chamber is provided with water chamber housing, compressing tablet, plate glass and pressure ring;
Described inverted telescope is installed on the dead ahead of the processing laser beam that laser instrument sends, and described inverted telescope is located on lens barrel, and lens barrel is fixed on above water chamber; Focusing on post prism is installed on lens barrel; Band ferrule holder is located on support, and support installing is above the firm banking of digital control platform; Water collector with filter is arranged on water-flow circuit as water circulation system provides the deionized water of water waveguide laser processing device; Fixture for fixing workpiece to be processed to be fixed on digital control platform and to move together with digital control platform; Digital control platform drives workpiece to be processed to move in the plane perpendicular to processing laser axis; Video camera is arranged on the observation laser front that observation laser instrument sends; Described water circulation system is fixed on ground; Computer numerical control device is connected with digital control platform; Observation laser instrument and laser instrument send to be processed laser coaxial and is coupled and installs; 2nd speculum is installed between observation laser instrument and laser instrument; Pipe joint is connected with water chamber and lens barrel, and compressing tablet to be arranged on lens barrel and to be connected with the 1st reflector threads, laser beam is introduced the nozzle of nozzle body, can production cross section shape be the water jet of rectangle by nozzle body; Plate glass is installed on below lens barrel and above water chamber, described water chamber is fixed in band ferrule holder, and pressure ring is located at water chamber housing upper.
2. rectangular water waveguide laser processing device as claimed in claim 1, is characterized in that described inverted telescope by thread connection on lens barrel.
3. rectangular water waveguide laser processing device as claimed in claim 1, is characterized in that lens barrel is fixed on above water chamber by screw thread.
4. rectangular water waveguide laser processing device as claimed in claim 1, is characterized in that described focusing post prism is threaded connection on lens barrel.
5. rectangular water waveguide laser processing device as claimed in claim 1, is characterized in that described water circulation system adopts the plunger displacement pump of high pressure low discharge.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201110192792.3A CN102350591B (en) | 2011-07-08 | 2011-07-08 | Rectangular water waveguide laser processing device |
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| CN201110192792.3A CN102350591B (en) | 2011-07-08 | 2011-07-08 | Rectangular water waveguide laser processing device |
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| CN102350591A CN102350591A (en) | 2012-02-15 |
| CN102350591B true CN102350591B (en) | 2015-01-28 |
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| CN106735871B (en) * | 2017-01-19 | 2019-05-17 | 中国科学院宁波材料技术与工程研究所 | Liquid auxiliary laser processing method and device |
| CN107457482A (en) * | 2017-09-13 | 2017-12-12 | 华中科技大学 | A kind of array type optical waveguide liquid jet device and method |
| CN107876976A (en) * | 2017-12-20 | 2018-04-06 | 华中科技大学 | Liquid film jet guides laser processing device |
| CN112605528A (en) * | 2020-12-09 | 2021-04-06 | 淮阴工学院 | Micro-nano structure laser forming device and forming method |
| CN114425663A (en) * | 2022-01-25 | 2022-05-03 | 广州大学 | Water-based jet laser strengthening processing equipment |
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| TW552645B (en) * | 2001-08-03 | 2003-09-11 | Semiconductor Energy Lab | Laser irradiating device, laser irradiating method and manufacturing method of semiconductor device |
| JP2004066327A (en) * | 2002-08-09 | 2004-03-04 | Tdk Corp | Laser machining apparatus, machining method, and method of manufacturing circuit board using this machining method |
| CN2703602Y (en) * | 2004-05-12 | 2005-06-08 | 武汉楚天激光（集团）股份有限公司 | Multifunction laser processing machine |
| JP4844715B2 (en) * | 2005-08-25 | 2011-12-28 | 澁谷工業株式会社 | Hybrid laser processing equipment |
| JP5147445B2 (en) * | 2007-09-28 | 2013-02-20 | 株式会社スギノマシン | Laser processing equipment using laser light guided into the jet column |
| JP2009241119A (en) * | 2008-03-31 | 2009-10-22 | Shibuya Kogyo Co Ltd | Dividing method of crystalline material, and its apparatus |
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