CN113595439A - Circular patch type double-foot linear ultrasonic motor and stator thereof - Google Patents
Circular patch type double-foot linear ultrasonic motor and stator thereof Download PDFInfo
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- CN113595439A CN113595439A CN202010368070.8A CN202010368070A CN113595439A CN 113595439 A CN113595439 A CN 113595439A CN 202010368070 A CN202010368070 A CN 202010368070A CN 113595439 A CN113595439 A CN 113595439A
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- 239000000919 ceramic Substances 0.000 claims abstract description 65
- 230000010287 polarization Effects 0.000 claims abstract description 14
- 230000002093 peripheral effect Effects 0.000 claims abstract description 8
- 230000000149 penetrating effect Effects 0.000 claims description 8
- 239000007769 metal material Substances 0.000 claims description 4
- 230000005284 excitation Effects 0.000 description 7
- 230000000694 effects Effects 0.000 description 4
- 239000002131 composite material Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 230000003245 working effect Effects 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 239000000806 elastomer Substances 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/001—Driving devices, e.g. vibrators
- H02N2/002—Driving devices, e.g. vibrators using only longitudinal or radial modes
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/06—Drive circuits; Control arrangements or methods
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Abstract
The invention discloses a circular patch type double-foot linear ultrasonic motor and a stator thereof, wherein the stator comprises a symmetric rod and a piezoelectric ceramic piece; the symmetrical rod comprises a middle seat, the middle seat is provided with a cylindrical seat, the cylindrical seat is provided with two reference surfaces, a central cylindrical hole is formed in the axis of the cylindrical seat, and driving feet are arranged at the upper lateral line and the lower lateral line of the peripheral wall of the cylindrical seat; the two sides of the cylindrical seat are respectively fixedly provided with a root part, the tail end of the root part is fixedly provided with an end part rod, and the root part is provided with an end part cylindrical hole; the two pairs of piezoelectric ceramic pieces are respectively connected with the two end part rods, the two piezoelectric ceramic pieces of each pair are respectively attached to two side walls of the end part rods, which are respectively positioned on two sides of the second reference surface, each pair of piezoelectric ceramic pieces are polarized along the thickness direction, and the polarization directions of the two piezoelectric ceramic pieces of each pair of piezoelectric ceramic pieces are opposite; the stator is arranged axially symmetrically with respect to both the first reference plane and the second reference plane. It has the following advantages: high output efficiency, stable working mode, large driving force, simple structure, good control performance and low cost.
Description
Technical Field
The invention relates to the technical field of ultrasonic motors, in particular to a circular double-longitudinal-vibration collinear patch-type excitation biped linear ultrasonic motor and a stator thereof.
Background
The linear ultrasonic motor utilizes the inverse piezoelectric effect of a piezoelectric material to excite the micro-amplitude vibration of an elastic body, and transmits kinetic energy to a rotor through the friction effect between the stator and the rotor so as to output motion. The linear ultrasonic motor has the advantages of good control performance, stepping and servo work, simple structure, low speed, large torque, quick response and the like, and has wide application prospect.
In the existing linear ultrasonic motor, a stator structure has a patch structure and a sandwich structure according to the assembly mode of piezoelectric ceramics and an elastomer, wherein the patch structure stator has the characteristics of simple processing and assembly and easy realization of miniaturization. The conventional patch type structure stator is named as a patch type longitudinal vibration composite double-foot piezoelectric ultrasonic motor oscillator as CN103746598A, and the patch type longitudinal vibration composite double-foot piezoelectric ultrasonic motor oscillator realizes linear double-foot actuation by utilizing the longitudinal vibration composition of a horizontal beam and two vertical beams.
Disclosure of Invention
The invention provides a circular patch type double-foot linear ultrasonic motor and a stator thereof, which overcome the defects of a linear ultrasonic motor in the background technology.
One of the technical schemes adopted by the invention for solving the technical problems is as follows: the circular patch type double-foot linear ultrasonic motor comprises a stator and a clamping device connected with the stator; the stator comprises a symmetrical rod and two pairs of piezoelectric ceramic plates; the symmetrical rod comprises a middle seat and two end part rods, the middle seat is provided with a cylindrical seat, the cylindrical seat is provided with a first reference surface and a second reference surface, the first reference surface and the second reference surface pass through the axis of the cylindrical seat and are perpendicular to each other, a central cylindrical hole which penetrates through the axis is formed in the axis of the cylindrical seat, and driving feet are arranged at the upper side line and the lower side line of the outer peripheral wall of the cylindrical seat, which are positioned on the first reference surface; a root part is fixedly arranged on each of two sides of the cylindrical seat, the two parts are respectively positioned on two sides of the first datum plane, the end part rod is fixedly arranged at the tail end of the root part, and the two parts are respectively provided with an end part cylindrical hole which is parallel to the central cylindrical hole and is arranged in a penetrating way; the two pairs of piezoelectric ceramic pieces are respectively connected with the two end part rods, the two piezoelectric ceramic pieces of each pair are respectively attached to two side walls of the end part rods, which are respectively positioned on two sides of the second reference surface, each pair of piezoelectric ceramic pieces are polarized along the thickness direction, and the polarization directions of the two piezoelectric ceramic pieces of each pair of piezoelectric ceramic pieces are opposite; the stator is arranged axially symmetrically with respect to both the first reference plane and the second reference plane.
In one embodiment: the symmetric rod and the driving foot of the stator are made of a whole metal material.
In one embodiment: the first reference surface is arranged along the vertical direction, the second reference surface is arranged along the left-right direction, and the central cylindrical hole and the end cylindrical holes are arranged in a penetrating manner from front to back; the two parts are axially symmetrically arranged relative to the first datum plane, the two end part rods are axially symmetrically arranged relative to the first datum plane, and the root part and the end part rods are axially symmetrically arranged relative to the second datum plane.
In one embodiment: the end cylindrical bore axis lies on a second datum plane.
In one embodiment: the cross section of the driving foot is circular or rectangular with constant size.
In one embodiment: the ratio of the diameter of the central cylindrical hole to the diameter of the end cylindrical hole is 1 (1.5-2.5).
In one embodiment: the piezoelectric ceramic plate is attached to the maximum strain of the symmetric rod.
In one embodiment: the two end part rods are respectively a first end part rod and a second end part rod;
a sinusoidal voltage is applied to a pair of piezoelectric ceramic plates on the first end rod, the polarization direction of one side of each piezoelectric ceramic plate, which is far away from the corresponding symmetric rod, is plus, and the polarization direction of one side of each piezoelectric ceramic plate, which is close to the corresponding symmetric rod, is minus;
a pair of piezoelectric ceramic pieces on the second end rod applies cosine voltage with same frequency phase difference of pi/2, and the polarization direction of each piezoelectric ceramic piece is the same as that of each piezoelectric ceramic piece on the first end rod;
the excited longitudinal vibration modes of the stator are superposed, so that the mass point of the contact surface of the stator and the rotor does elliptic motion, and the rotor is pushed to move.
The second technical scheme adopted by the invention for solving the technical problems is as follows: the circular patch type double-foot linear ultrasonic motor stator comprises a symmetric rod and two pairs of piezoelectric ceramic plates; the symmetrical rod comprises a middle seat and two end part rods, the middle seat is provided with a cylindrical seat, the cylindrical seat is provided with a first reference surface and a second reference surface, the first reference surface and the second reference surface pass through the axis of the cylindrical seat and are perpendicular to each other, a central cylindrical hole which penetrates through the axis is formed in the axis of the cylindrical seat, and driving feet are arranged at the upper side line and the lower side line of the outer peripheral wall of the cylindrical seat, which are positioned on the first reference surface; a root part is fixedly arranged on each of two sides of the cylindrical seat, the two parts are respectively positioned on two sides of the first datum plane, the end part rod is fixedly arranged at the tail end of the root part, and the two parts are respectively provided with an end part cylindrical hole which is parallel to the central cylindrical hole and is arranged in a penetrating way; the two pairs of piezoelectric ceramic pieces are respectively connected with the two end part rods, the two piezoelectric ceramic pieces of each pair are respectively attached to two side walls of the end part rods, which are respectively positioned on two sides of the second reference surface, each pair of piezoelectric ceramic pieces are polarized along the thickness direction, and the polarization directions of the two piezoelectric ceramic pieces of each pair of piezoelectric ceramic pieces are opposite; the stator is arranged axially symmetrically with respect to both the first reference plane and the second reference plane.
Compared with the background technology, the technical scheme has the following advantages:
through the design of simultaneously exciting the double driving feet after the two longitudinal vibration ultrasonic vibrators are connected, vibration energy is fully utilized, and the working mode distortion caused by asymmetric clamping is avoided due to the strict symmetric structure of the symmetric rod. The middle seat has the cylinder seat, and cylinder seat axis department is equipped with along the central cylinder hole that the axis runs through to be arranged, and cooperation symmetrical structure can produce following technological effect: 1. the amplitude and the vibration speed of the driving foot part can be improved, and the modal frequency difference is further reduced by the end cylindrical hole structures at the two ends of the driving foot part, so that the ultrasonic motor has the advantages of high output efficiency, stable working mode, large driving force, simple structure, good control performance and low cost; 2. by adopting a patch type mode, the linear ultrasonic motor has a simple assembly structure and small longitudinal size, can be designed to be short, small, light and thin, is suitable for the miniaturization development of the linear ultrasonic motor, and is particularly suitable for a small motor; the excitation frequency is lower, so that the working condition can be better achieved; 3. the base is arranged into a cylindrical seat, the upper side line and the lower side line of the peripheral wall of the cylindrical seat are respectively provided with the driving feet, the circular symmetrical structure is better, the work is more stable, the driving feet are in smooth transition, and the damage to the driven rotor is less; the circular working effect is more gentle, and the damage to the rotor is slightly small.
Drawings
The invention is further described with reference to the following figures and detailed description.
Fig. 1 is a schematic structural view of a stator according to the present embodiment.
Fig. 2 is a modal analysis diagram of the stator of the present embodiment at a frequency of 30.608 kHz.
Fig. 3 is a diagram showing a modal analysis of the stator of the present embodiment at a frequency of 30.83 kHz.
Detailed Description
Referring to fig. 1, the circular double longitudinal vibration collinear patch-type excitation biped linear ultrasonic motor includes a stator and a clamping device connected to the stator, and the clamping device may refer to the prior art.
The stator comprises a symmetrical bar made of metallic material comprising a central seat 1 and two end bars 2, and two pairs of piezoceramic plates 31 and 32.
The middle seat 1 is provided with a cylindrical seat, the cylindrical seat is provided with a first reference surface and a second reference surface, the first reference surface and the second reference surface pass through the axis of the cylindrical seat and are perpendicular to each other, the first reference surface is arranged in the vertical direction, the second reference surface is arranged in the left-right direction, the left side and the right side of the cylindrical seat are respectively fixedly provided with a root, and the tail end of the root is fixedly provided with the end rod 2. The center of the cylindrical seat is provided with a central cylindrical hole 11 which is arranged in a penetrating manner along the front and the back, the two parts are provided with end cylindrical holes 12 which are arranged in a penetrating manner along the front and the back, and the axes of the end cylindrical holes 12 are positioned on a second reference surface. The two root and end rods are axially symmetrically arranged relative to the first reference plane and the two root and end rods are axially symmetrically arranged relative to the second reference plane. The diameter of the central cylindrical hole 11 is one half of the diameter of the central cylindrical hole 11, and this structure can further reduce the modal frequency difference. The peripheral wall of the cylindrical seat is provided with an upper lateral line and a lower lateral line which are positioned on a first reference surface, driving feet 13 are arranged at the upper lateral line and the lower lateral line, the driving feet 13 are in a long and narrow matrix structure, the cross section of each driving foot 13 is rectangular or circular, so that the driving feet 11 are in full contact with the guide rail plane of the clamping device, and the working stability of the linear ultrasonic motor is improved. The stator is arranged axially symmetrically with respect to both the first reference plane and the second reference plane.
Each pair of piezoelectric ceramic pieces 31 and 32 includes two piezoelectric ceramic pieces, the two pairs of piezoelectric ceramic pieces 31 and 32 are respectively connected to the two end rods 2, the two piezoelectric ceramic pieces of each pair are respectively attached to the upper and lower surfaces of the end rods 2, wherein each pair of piezoelectric ceramic pieces 31 and 32 is polarized along the thickness direction, as shown by arrows in fig. 1, and the two piezoelectric ceramic pieces of each pair of piezoelectric ceramic pieces 31 and 32 are polarized in opposite directions, and if the upper ceramic piece is positive and the lower ceramic piece is negative, the lower ceramic piece is negative and the upper ceramic piece is positive. The piezoelectric ceramic plates are attached to the maximum strain of the symmetric rod. Wherein, the piezoelectric ceramic plate can be directly pasted on the surface of the end rod 2 through glue.
In the present embodiment, the symmetrical rods and the driving legs of the stator are made of a single metal material to reduce energy loss, and the stator has a simple structure and is easy to process.
In this embodiment, mode analysis is performed by ANSYS (ANSYS is large-scale general finite element analysis software developed by ANSYS corporation, usa) as shown in fig. 2 and 3, and the up-down and left-right movement of the stator of the motor can be observed from fig. 2 and 3, and the stator can be moved left and right by changing the phase difference between two working modes of the stator to-pi/2. According to the frequency 30.608kHz of modal analysis, the up-and-down moving distance of the stator driving foot is maximum, as shown in FIG. 2; the frequency is 30.83kHz and the distance from the stator driving foot to the left and right is the largest, as shown in figure 3. According to the frequencies of the two working modes of fig. 2 and 3, since the working frequencies of the driving foot at the maximum positions of the up-down, left-right movement are close to each other, the two longitudinal vibration states can be superimposed, so that the driving foot generates the elliptical movement.
In the present embodiment, an excitation manner of a circular double longitudinal vibration collinear patch type circular patch type biped linear ultrasonic motor is shown in fig. 1, in which a sinusoidal voltage is applied to two piezoelectric ceramic plates 2 on the left side to excite a longitudinal vibration mode of a rod 2 at the left end, a polarization direction of one side of the ceramic plate away from the symmetric rod is "+", and a polarization direction of one side of the ceramic plate close to the symmetric rod is "-"; cosine voltages with the same frequency and phase difference of pi/2 are applied to the two piezoelectric ceramic pieces 2 on the right side, the longitudinal vibration mode of the right end rod 2 is excited, and the polarization direction of each pair of piezoelectric ceramic pieces is the same as that of each pair of piezoelectric ceramic pieces on the left side. Two longitudinal vibration modes excited by the stator are superposed, so that mass points on the contact surface of the stator and the rotor do elliptic motion, and the rotor is pushed to move. The reverse drive can be achieved by adjusting the phase difference of the two-phase excitation signals to-90 °. The symmetrical rod adopts a cylindrical seat and is provided with a hollow central cylindrical hole structure, so that the amplitude and the vibration speed of the driving foot part can be improved, and the modal frequency difference is further reduced by the cylindrical hole structures at the two ends of the symmetrical rod, so that the performance of the motor is greatly improved.
The circular double longitudinal vibration collinear patch-type excitation biped linear ultrasonic motor of the embodiment can produce the following technical effects: firstly, a patch type mode and a circular hollow structure are matched, and 1, the patch type mode is adopted, so that on one hand, the linear ultrasonic motor is simple in assembly structure, small in longitudinal size, short, small, light and thin in design, suitable for miniaturization development of the linear ultrasonic motor and especially suitable for a small motor; on the other hand, the excitation frequency is lower, so that the working condition can be better achieved; 2. the base is arranged into a cylindrical seat, and the upper side line and the lower side line of the peripheral wall of the cylindrical seat are respectively provided with the driving feet, so that on one hand, the circular symmetrical structure is better, the work is more stable, the driving feet are in smooth transition, and the damage to the driven rotor is less; on the other hand, the circular working effect is more gentle, and the damage to the rotor is slightly small; the piezoelectric ceramic plate has a longitudinal vibration mode and a bending vibration mode for exciting the elastic body, and the linear ultrasonic motor utilizes the structural longitudinal vibration mode, so that the linear ultrasonic motor has higher thrust and efficiency. And by utilizing the design that two longitudinal vibration ultrasonic vibrators are connected and then the double driving feet are excited simultaneously, vibration energy is fully utilized, and the working mode distortion caused by asymmetric clamping is avoided due to the strict symmetric structure of the symmetric rod.
The above description is only a preferred embodiment of the present invention, and therefore should not be taken as limiting the scope of the invention, which is defined by the appended claims and their equivalents.
Claims (9)
1. Circular SMD biped linear ultrasonic motor, including stator and the clamping device who connects the stator, its characterized in that: the stator comprises a symmetrical rod and two pairs of piezoelectric ceramic plates; the symmetrical rod comprises a middle seat and two end part rods, the middle seat is provided with a cylindrical seat, the cylindrical seat is provided with a first reference surface and a second reference surface, the first reference surface and the second reference surface pass through the axis of the cylindrical seat and are perpendicular to each other, a central cylindrical hole which penetrates through the axis is formed in the axis of the cylindrical seat, and driving feet are arranged at the upper side line and the lower side line of the outer peripheral wall of the cylindrical seat, which are positioned on the first reference surface; a root part is fixedly arranged on each of two sides of the cylindrical seat, the two parts are respectively positioned on two sides of the first datum plane, the end part rod is fixedly arranged at the tail end of the root part, and the two parts are respectively provided with an end part cylindrical hole which is parallel to the central cylindrical hole and is arranged in a penetrating way; the two pairs of piezoelectric ceramic pieces are respectively connected with the two end part rods, the two piezoelectric ceramic pieces of each pair are respectively attached to two side walls of the end part rods, which are respectively positioned on two sides of the second reference surface, each pair of piezoelectric ceramic pieces are polarized along the thickness direction, and the polarization directions of the two piezoelectric ceramic pieces of each pair of piezoelectric ceramic pieces are opposite; the stator is arranged axially symmetrically with respect to both the first reference plane and the second reference plane.
2. The circular patch type biped linear ultrasonic motor according to claim 1, wherein: the symmetric rod and the driving foot of the stator are made of a whole metal material.
3. The circular patch type biped linear ultrasonic motor according to claim 1, wherein: the first reference surface is arranged along the vertical direction, the second reference surface is arranged along the left-right direction, and the central cylindrical hole and the end cylindrical holes are arranged in a penetrating manner from front to back; the two parts are axially symmetrically arranged relative to the first datum plane, the two end part rods are axially symmetrically arranged relative to the first datum plane, and the root part and the end part rods are axially symmetrically arranged relative to the second datum plane.
4. The circular patch type biped linear ultrasonic motor according to claim 1, wherein: the end cylindrical bore axis lies on a second datum plane.
5. The circular patch type biped linear ultrasonic motor according to claim 1, wherein: the cross section of the driving foot is circular or rectangular with constant size.
6. The circular patch type biped linear ultrasonic motor according to claim 1, wherein: the ratio of the diameter of the central cylindrical hole to the diameter of the end cylindrical hole is 1 (1.5-2.5).
7. The circular patch type biped linear ultrasonic motor according to claim 1, wherein: the piezoelectric ceramic plate is attached to the maximum strain of the symmetric rod.
8. The circular patch type biped linear ultrasonic motor according to claim 1, wherein: the two end part rods are respectively a first end part rod and a second end part rod;
a sinusoidal voltage is applied to a pair of piezoelectric ceramic plates on the first end rod, the polarization direction of one side of each piezoelectric ceramic plate, which is far away from the corresponding symmetric rod, is plus, and the polarization direction of one side of each piezoelectric ceramic plate, which is close to the corresponding symmetric rod, is minus;
a pair of piezoelectric ceramic pieces on the second end rod applies cosine voltage with same frequency phase difference of pi/2, and the polarization direction of each piezoelectric ceramic piece is the same as that of each piezoelectric ceramic piece on the first end rod;
the excited longitudinal vibration modes of the stator are superposed, so that the mass point of the contact surface of the stator and the rotor does elliptic motion, and the rotor is pushed to move.
9. Circular SMD biped linear ultrasonic motor stator, its characterized in that: comprises a symmetrical rod and two pairs of piezoelectric ceramic plates; the symmetrical rod comprises a middle seat and two end part rods, the middle seat is provided with a cylindrical seat, the cylindrical seat is provided with a first reference surface and a second reference surface, the first reference surface and the second reference surface pass through the axis of the cylindrical seat and are perpendicular to each other, a central cylindrical hole which penetrates through the axis is formed in the axis of the cylindrical seat, and driving feet are arranged at the upper side line and the lower side line of the outer peripheral wall of the cylindrical seat, which are positioned on the first reference surface; a root part is fixedly arranged on each of two sides of the cylindrical seat, the two parts are respectively positioned on two sides of the first datum plane, the end part rod is fixedly arranged at the tail end of the root part, and the two parts are respectively provided with an end part cylindrical hole which is parallel to the central cylindrical hole and is arranged in a penetrating way; the two pairs of piezoelectric ceramic pieces are respectively connected with the two end part rods, the two piezoelectric ceramic pieces of each pair are respectively attached to two side walls of the end part rods, which are respectively positioned on two sides of the second reference surface, each pair of piezoelectric ceramic pieces are polarized along the thickness direction, and the polarization directions of the two piezoelectric ceramic pieces of each pair of piezoelectric ceramic pieces are opposite; the stator is arranged axially symmetrically with respect to both the first reference plane and the second reference plane.
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| CN202010368070.8A CN113595439B (en) | 2020-04-30 | 2020-04-30 | Circular patch type bipedal linear ultrasonic motor and stator thereof |
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| CN202010368070.8A CN113595439B (en) | 2020-04-30 | 2020-04-30 | Circular patch type bipedal linear ultrasonic motor and stator thereof |
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| CN113595439B CN113595439B (en) | 2024-06-07 |
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| CN101626203A (en) * | 2009-08-19 | 2010-01-13 | 哈尔滨工业大学 | Vibrator of beam type linear ultrasonic motor using bending vibration modes |
| CN101694974A (en) * | 2009-10-16 | 2010-04-14 | 南京航空航天大学 | Tower-shaped linear ultrasonic motor and electric excitation mode |
| CN201854204U (en) * | 2010-11-25 | 2011-06-01 | 南京航空航天大学 | Linear ultrasonic motor based on alternating force |
| CN103746597A (en) * | 2014-01-27 | 2014-04-23 | 哈尔滨工业大学 | Paster T-shaped dual-feet linear piezoelectric supersonic motor vibrator |
| CN211859981U (en) * | 2020-04-30 | 2020-11-03 | 华侨大学 | Circular patch type double-foot linear ultrasonic motor and stator thereof |
-
2020
- 2020-04-30 CN CN202010368070.8A patent/CN113595439B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006340424A (en) * | 2005-05-31 | 2006-12-14 | Ngk Insulators Ltd | Piezoelectric stator element and micro ultrasonic motor employing it |
| US20080290759A1 (en) * | 2006-02-08 | 2008-11-27 | Murata Manufacturing Co., Ltd. | Piezoelectric vibrator |
| CN101626206A (en) * | 2009-08-19 | 2010-01-13 | 哈尔滨工业大学 | Longitudinal and flexural composite transducer type double cylinder-shaped traveling wave ultrasonic motor vibrator |
| CN101626203A (en) * | 2009-08-19 | 2010-01-13 | 哈尔滨工业大学 | Vibrator of beam type linear ultrasonic motor using bending vibration modes |
| CN101694974A (en) * | 2009-10-16 | 2010-04-14 | 南京航空航天大学 | Tower-shaped linear ultrasonic motor and electric excitation mode |
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