CN113595437B - Rhombic patch type bipedal linear ultrasonic motor and stator thereof - Google Patents
Rhombic patch type bipedal linear ultrasonic motor and stator thereof Download PDFInfo
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- CN113595437B CN113595437B CN202010366823.1A CN202010366823A CN113595437B CN 113595437 B CN113595437 B CN 113595437B CN 202010366823 A CN202010366823 A CN 202010366823A CN 113595437 B CN113595437 B CN 113595437B
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- QNRATNLHPGXHMA-XZHTYLCXSA-N (r)-(6-ethoxyquinolin-4-yl)-[(2s,4s,5r)-5-ethyl-1-azabicyclo[2.2.2]octan-2-yl]methanol;hydrochloride Chemical compound Cl.C([C@H]([C@H](C1)CC)C2)CN1[C@@H]2[C@H](O)C1=CC=NC2=CC=C(OCC)C=C21 QNRATNLHPGXHMA-XZHTYLCXSA-N 0.000 title description 2
- 239000000919 ceramic Substances 0.000 claims abstract description 59
- 230000010287 polarization Effects 0.000 claims abstract description 18
- 230000000149 penetrating effect Effects 0.000 claims description 12
- 239000007769 metal material Substances 0.000 claims description 5
- 239000002245 particle Substances 0.000 claims description 3
- 229910003460 diamond Inorganic materials 0.000 abstract description 14
- 239000010432 diamond Substances 0.000 abstract description 14
- 230000005284 excitation Effects 0.000 description 6
- 230000000694 effects Effects 0.000 description 3
- 239000002131 composite material Substances 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000003292 glue Substances 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 239000000806 elastomer Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/001—Driving devices, e.g. vibrators
- H02N2/002—Driving devices, e.g. vibrators using only longitudinal or radial modes
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/06—Drive circuits; Control arrangements or methods
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- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The invention discloses a diamond patch type bipedal linear ultrasonic motor and a stator thereof, wherein the stator comprises a symmetrical rod and a piezoelectric ceramic piece; the symmetrical rod comprises a diamond-shaped hollow rod, the diamond-shaped hollow rod is provided with a diamond-shaped column, the center of the diamond-shaped column is provided with a central cylindrical hole, the diamond-shaped column is provided with two diagonal surfaces, and the edge line of the diamond-shaped column is provided with a driving foot; root parts are fixedly arranged on two sides of the diamond-shaped column respectively, end parts rods are fixedly arranged at the tail ends of the root parts, and end part cylindrical holes are formed in the two root parts; the two pairs of piezoelectric ceramic plates are respectively connected with the two end rods, the two piezoelectric ceramic plates of each pair are respectively attached to the two side walls of the end rods, the piezoelectric ceramic plates of each pair are polarized along the thickness direction, and the polarization directions of the two piezoelectric ceramic plates of each pair are opposite; the stator is axially symmetrically arranged relative to the first diagonal surface and the second diagonal surface. It has the following advantages: high output efficiency, stable working mode, large driving force, simple structure, good control performance and low cost.
Description
Technical Field
The invention relates to the technical field of ultrasonic motors, in particular to a diamond double-longitudinal vibration patch type excitation bipedal straight ultrasonic motor and a stator thereof.
Background
The linear ultrasonic motor excites the micro vibration of the elastic body by using the inverse piezoelectric effect of the piezoelectric material, and transmits kinetic energy to the rotor through the friction between the stator and the rotor so as to output motion. The linear ultrasonic motor has the advantages of good control performance, stepping and servo operation, simple structure, low speed, large torque, quick response and the like, and has wide application prospect.
In the existing linear ultrasonic motor, a stator structure is provided with a patch structure and a sandwich structure according to the assembly mode of piezoelectric ceramics and an elastomer, wherein the patch structure stator has the characteristics of simplicity in processing and assembly and easiness in realization of microminiaturization. The invention discloses a patch type structure stator, such as a publication number CN103746598A, and creates a patch type longitudinal vibration composite biped piezoelectric ultrasonic motor vibrator, which realizes biped linear actuation by utilizing longitudinal vibration composite of a horizontal beam and two vertical beams.
Disclosure of Invention
The invention provides a diamond-shaped patch type bipedal linear ultrasonic motor and a stator thereof, which overcome the defects of the linear ultrasonic motor in the background technology.
One of the adopted technical schemes for solving the technical problems is as follows: the diamond-shaped patch type bipedal linear ultrasonic motor comprises a stator and a clamping device connected with the stator; the stator comprises a symmetrical rod and two pairs of piezoelectric ceramic plates; the symmetrical rod comprises a diamond-shaped hollow rod and two end rods, wherein the diamond-shaped hollow rod is provided with a diamond-shaped column, the center of the diamond-shaped column is provided with a central cylindrical hole which is arranged along the center in a penetrating way, the diamond-shaped column is provided with a first diagonal surface and a second diagonal surface, and the edge lines of the diamond-shaped column, which are symmetrically positioned at two sides of the second diagonal surface, are provided with driving feet; the two sides of the diamond-shaped column are fixedly provided with root parts respectively, the two root parts are respectively positioned at the two sides of the first diagonal surface, the end parts of the root parts are fixedly provided with the end part rods, and the two root parts are provided with end part cylindrical holes which are parallel to the central cylindrical holes and are arranged in a penetrating way; the two pairs of piezoelectric ceramic plates are respectively connected with the two end rods, the two piezoelectric ceramic plates of each pair are respectively stuck to the two side walls of the end rods, which are respectively positioned at the two sides of the second diagonal surface, each pair of piezoelectric ceramic plates polarize along the thickness direction, and the polarization directions of the two piezoelectric ceramic plates of each pair of piezoelectric ceramic plates are opposite; the stator is axially symmetrically arranged relative to the first diagonal surface and the second diagonal surface.
In one embodiment: the symmetrical bars and the driving feet of the stator are manufactured by adopting a whole piece of metal material.
In one embodiment: the first diagonal surface is arranged in the left-right direction, the second diagonal surface is arranged in the up-down direction, and the central cylindrical hole and the end cylindrical holes are all arranged in a front-back penetrating mode.
In one embodiment: the end cylindrical bore axis is located on the second diagonal.
In one embodiment: the cross section of the driving foot is a circular or rectangular shape with unchanged size.
In one embodiment: the central cylindrical bore diameter is greater than the end cylindrical bore diameter.
In one embodiment: the two end rods are a first end rod and a second end rod respectively; a pair of piezoelectric ceramic plates on the first end rod apply sinusoidal voltage, and the polarization direction of one side of the piezoelectric ceramic plates far away from the symmetrical rod is "+", and the polarization direction of one side close to the symmetrical rod is "-"; a pair of piezoelectric ceramic plates on the second end rod apply cosine voltage with the same-frequency phase difference of pi/2, and the polarization direction of each piezoelectric ceramic plate is the same as that of each piezoelectric ceramic plate of the first end rod; the two longitudinal vibration modes excited by the stator are overlapped, so that the particles at the contact surface of the stator and the mover do elliptical motion, thereby pushing the mover to move.
The second technical scheme adopted for solving the technical problems is as follows: the diamond-shaped patch type bipedal linear ultrasonic motor stator comprises a symmetrical rod and two pairs of piezoelectric ceramic plates; the symmetrical rod comprises a diamond-shaped hollow rod and two end rods, wherein the diamond-shaped hollow rod is provided with a diamond-shaped column, the center of the diamond-shaped column is provided with a central cylindrical hole which is arranged along the center in a penetrating way, the diamond-shaped column is provided with a first diagonal surface and a second diagonal surface, and the edge lines of the diamond-shaped column, which are symmetrically positioned at two sides of the second diagonal surface, are provided with driving feet; the two sides of the diamond-shaped column are fixedly provided with root parts respectively, the two root parts are respectively positioned at the two sides of the first diagonal surface, the end parts of the root parts are fixedly provided with the end part rods, and the two root parts are provided with end part cylindrical holes which are parallel to the central cylindrical holes and are arranged in a penetrating way; the two pairs of piezoelectric ceramic plates are respectively connected with the two end rods, the two piezoelectric ceramic plates of each pair are respectively stuck to the two side walls of the end rods, which are respectively positioned at the two sides of the second diagonal surface, each pair of piezoelectric ceramic plates polarize along the thickness direction, and the polarization directions of the two piezoelectric ceramic plates of each pair of piezoelectric ceramic plates are opposite; the stator is axially symmetrically arranged relative to the first diagonal surface and the second diagonal surface.
Compared with the background technology, the technical proposal has the following advantages:
The stator is relative first diagonal, the equal axial symmetry of second diagonal arranges, the symmetry pole includes rhombus cavity pole and both ends pole, the rhombus cavity pole has the diamond column, the crest line of diamond column is equipped with the drive foot, the diamond column center is equipped with central cylinder hole, the root is equipped with the tip cylinder hole, two piezoceramics piece of every pair glues respectively and establishes at tip pole both sides wall, every is to piezoceramics piece all along thickness direction polarization, every two piezoceramics piece polarization opposite directions to piezoceramics piece, consequently can produce following technological effect: 1. the ultrasonic motor has the advantages of high output efficiency, stable working mode, large driving force, simple structure, good control performance and low cost; 2. the patch type motor is adopted, the assembly structure is simple, the longitudinal dimension is small, the linear ultrasonic motor can be designed to be short, small, light and thin, the linear ultrasonic motor is suitable for microminiaturization development, and the linear ultrasonic motor is particularly suitable for small motors, has low excitation frequency and can better reach working conditions; 3. the diamond edge driving foot can be accurately driven, the range is more accurate, the diamond edge driving foot is fine to point, the efficiency is higher, the work positioning is more accurate, and the output density is high; 4. through the design of exciting the double-drive foot simultaneously after connecting two longitudinal vibration ultrasonic vibrators, vibration energy is fully utilized, and the strictly symmetrical structure of the symmetrical rod avoids working mode distortion caused by asymmetrical clamping.
Drawings
The invention is further described below with reference to the drawings and the detailed description.
Fig. 1 is a schematic structural view of a stator of the present embodiment.
Fig. 2 is a graph of a modal analysis of the stator of this embodiment at a frequency of 30.984 kHz.
Fig. 3 is a graph of a modal analysis of the stator of this embodiment at a frequency 32.513 kHz.
Detailed Description
Referring to fig. 1, a diamond-shaped double-longitudinal vibration patch-type excitation bipedal linear ultrasonic motor comprises a stator and a clamping device connected with the stator, wherein the clamping device can refer to the prior art.
The stator comprises a symmetrical rod made of a metal material and two pairs of piezoceramic sheets 31 and 32, the symmetrical rod comprising a diamond-shaped hollow rod 1 and two end rods 2.
The diamond-shaped hollow rod 1 is provided with a diamond-shaped column, the diamond-shaped column is provided with a first diagonal surface and a second diagonal surface, the first diagonal surface is arranged along the up-down direction, the second diagonal surface is arranged along the left-right direction, the left side and the right side of the diamond-shaped column are respectively fixedly provided with a root, and the tail end of the root is fixedly provided with the end rod 2. The center of the diamond-shaped column is provided with a central cylindrical hole 11 which is arranged in a front-back penetrating way, the two root parts are provided with end cylindrical holes 12 which are arranged in a front-back penetrating way, and the axis of each end cylindrical hole 12 is positioned on the second diagonal surface. The driving feet 13 are arranged on the upper and lower edge lines of the diamond-shaped column, the driving feet 13 are of a long and narrow matrix structure, and the section of each driving foot 13 is rectangular or circular, so that the driving feet 11 are fully contacted with the guide rail plane of the clamping device, and the working stability of the linear ultrasonic motor is improved. The stator is axially symmetrically arranged relative to the first diagonal surface and the second diagonal surface.
Each pair of piezoelectric ceramic plates 31 and 32 comprises two piezoelectric ceramic plates, the two pairs of piezoelectric ceramic plates 31 and 32 are respectively connected with the two end rods 2, the two piezoelectric ceramic plates of each pair are respectively adhered on the upper surface and the lower surface of the end rod 2, wherein each pair of piezoelectric ceramic plates 31 and 32 are polarized along the thickness direction, as shown by arrows in fig. 1, and the polarization directions of the two piezoelectric ceramic plates of each pair of piezoelectric ceramic plates 31 and 32 are opposite, such as the upper ceramic plate is positive and the lower ceramic plate is negative, and the lower ceramic plate is positive and negative. The bonding position of the pair of piezoelectric ceramic plates is the position with the largest strain of the symmetrical rod. Wherein, the piezoelectric ceramic plate can be directly adhered on the surface of the end rod 2 through glue.
In the specific embodiment, the symmetrical rods and the driving feet of the stator are made of a whole piece of metal material, so that energy loss is reduced, and the stator is simple in structure and easy to process.
In this embodiment, as shown in fig. 2 and 3, the mode analysis performed by ANSYS (ANSYS is large-scale general finite element analysis software developed by ANSYS corporation in usa) can observe the up-down and left-right movement of the motor stator from fig. 2 and 3, and the stator can be moved left-right by changing the phase difference between two working modes of the stator to-pi/2. According to the frequency 30.984kHz of the modal analysis, the up-and-down movement distance of the stator driving foot is the largest, as shown in figure 2; the frequency according to the modal analysis was 32.513kHz, and the left-right movement distance of the stator driving foot was the largest, as shown in fig. 3. Since the operating frequency of the driving foot is close to the maximum position of the vertical and horizontal movement, elliptical movement of the driving foot can be generated by superposing the two longitudinal vibration states.
The excitation mode of the diamond patch type bipedal linear ultrasonic motor in this embodiment is shown in fig. 1, sinusoidal voltage is applied to two piezoelectric ceramic plates 31 of one pair of left end rods 2, longitudinal vibration modes of the left end rods are excited, the polarization direction of the ceramic plates on the side far from the symmetrical rods is "+", the polarization direction on the side close to the symmetrical rods is "-", and the polarization direction is shown by an arrow in fig. 1; cosine voltage with the same frequency phase difference of pi/2 is applied to the two piezoelectric ceramic plates 32 positioned on one pair of the right end rods, so that the longitudinal vibration mode of the right end rods is excited, and the polarization direction of each piezoelectric ceramic plate is the same as that of each piezoelectric ceramic plate on the left end. The two longitudinal vibration modes excited by the stator are overlapped, so that the particles at the contact surface of the stator and the mover do elliptical motion, thereby pushing the mover to move. Further, by adjusting the phase difference of the two-phase excitation signals to-90 °, the reverse driving can be realized.
The diamond patch type bipedal linear ultrasonic motor of the specific embodiment can have the following technical effects: 1. the patch type and the diamond hollow structure are matched, 1, the patch type is adopted, on one hand, the assembly structure of the linear ultrasonic motor is simple, the longitudinal dimension is small, the linear ultrasonic motor can be designed to be short, small, light and thin, and the linear ultrasonic motor is suitable for microminiaturization development of the linear ultrasonic motor, and is particularly suitable for small motors; on the other hand, the excitation frequency is lower, and the working condition can be better achieved; 2. the diamond edge driving foot can be accurately driven, on one hand, the range is more accurate, the diamond edge driving foot is fine to the point, and the efficiency is higher; on the other hand, the diamond work positioning is more accurate, and the output density is high. 2. The diamond and hollow structure in the middle of the symmetrical rod can improve the amplitude and vibration speed of the driving foot part, so that the motor performance is greatly improved. 3. The piezoelectric ceramic plate has a longitudinal vibration mode and a bending vibration mode for exciting the elastic body, and the linear ultrasonic motor utilizes the longitudinal vibration mode of the structure, so that the piezoelectric ceramic plate has higher thrust and efficiency. 4. Through the design of exciting the double-drive foot simultaneously after connecting two longitudinal vibration ultrasonic vibrators, vibration energy is fully utilized, and the strictly symmetrical structure of the symmetrical rod avoids working mode distortion caused by asymmetrical clamping.
The foregoing description is only illustrative of the preferred embodiments of the present invention, and therefore should not be taken as limiting the scope of the invention, for all changes and modifications that come within the meaning and range of equivalency of the claims and specification are therefore intended to be embraced therein.
Claims (6)
1. The utility model provides a rhombus paster formula biped linear ultrasonic motor, includes stator and the clamping device who connects the stator, its characterized in that: the stator comprises a symmetrical rod and two pairs of piezoelectric ceramic plates; the symmetrical rod comprises a diamond-shaped hollow rod and two end rods, wherein the diamond-shaped hollow rod is provided with a diamond-shaped column, the center of the diamond-shaped column is provided with a central cylindrical hole which is arranged along the center in a penetrating way, the diamond-shaped column is provided with a first diagonal surface and a second diagonal surface, and the edge lines of the diamond-shaped column, which are symmetrically positioned at two sides of the second diagonal surface, are provided with driving feet; the two sides of the diamond-shaped column are fixedly provided with root parts respectively, the two root parts are respectively positioned at the two sides of the first diagonal surface, the end parts of the root parts are fixedly provided with the end part rods, and the two root parts are provided with end part cylindrical holes which are parallel to the central cylindrical holes and are arranged in a penetrating way; the two pairs of piezoelectric ceramic plates are respectively connected with the two end rods, the two piezoelectric ceramic plates of each pair are respectively stuck to the two side walls of the end rods, which are respectively positioned at the two sides of the second diagonal surface, each pair of piezoelectric ceramic plates polarize along the thickness direction, and the polarization directions of the two piezoelectric ceramic plates of each pair of piezoelectric ceramic plates are opposite; the stator is axially symmetrically arranged relative to the first diagonal surface and the second diagonal surface; the symmetrical rod and the driving foot of the stator are manufactured by adopting a whole piece of metal material; the first diagonal surface is arranged along the up-down direction, the second diagonal surface is arranged along the left-right direction, and the central cylindrical hole and the end cylindrical holes are all arranged in a front-back penetrating mode.
2. The diamond-type double-foot linear ultrasonic motor according to claim 1, wherein: the end cylindrical bore axis is located on the second diagonal.
3. The diamond-type double-foot linear ultrasonic motor according to claim 1, wherein: the cross section of the driving foot is a circular or rectangular shape with unchanged size.
4. The diamond-type double-foot linear ultrasonic motor according to claim 1, wherein: the central cylindrical bore diameter is greater than the end cylindrical bore diameter.
5. The diamond-type double-foot linear ultrasonic motor according to claim 1, wherein: the two end rods are a first end rod and a second end rod respectively;
a pair of piezoelectric ceramic plates on the first end rod apply sinusoidal voltage, and the polarization direction of one side of the piezoelectric ceramic plates far away from the symmetrical rod is "+", and the polarization direction of one side close to the symmetrical rod is "-";
A pair of piezoelectric ceramic plates on the second end rod apply cosine voltage with the same-frequency phase difference of pi/2, and the polarization direction of each piezoelectric ceramic plate is the same as that of each piezoelectric ceramic plate of the first end rod;
The two longitudinal vibration modes excited by the stator are overlapped, so that the particles at the contact surface of the stator and the mover do elliptical motion, thereby pushing the mover to move.
6. The diamond-shaped patch type biped linear ultrasonic motor stator is characterized in that: comprises a symmetrical rod and two pairs of piezoelectric ceramic plates; the symmetrical rod comprises a diamond-shaped hollow rod and two end rods, wherein the diamond-shaped hollow rod is provided with a diamond-shaped column, the center of the diamond-shaped column is provided with a central cylindrical hole which is arranged along the center in a penetrating way, the diamond-shaped column is provided with a first diagonal surface and a second diagonal surface, and the edge lines of the diamond-shaped column, which are symmetrically positioned at two sides of the second diagonal surface, are provided with driving feet; the two sides of the diamond-shaped column are fixedly provided with root parts respectively, the two root parts are respectively positioned at the two sides of the first diagonal surface, the end parts of the root parts are fixedly provided with the end part rods, and the two root parts are provided with end part cylindrical holes which are parallel to the central cylindrical holes and are arranged in a penetrating way; the two pairs of piezoelectric ceramic plates are respectively connected with the two end rods, the two piezoelectric ceramic plates of each pair are respectively stuck to the two side walls of the end rods, which are respectively positioned at the two sides of the second diagonal surface, each pair of piezoelectric ceramic plates polarize along the thickness direction, and the polarization directions of the two piezoelectric ceramic plates of each pair of piezoelectric ceramic plates are opposite; the stator is axially symmetrically arranged relative to the first diagonal surface and the second diagonal surface; the symmetrical bars and the driving feet of the stator are manufactured by adopting a whole piece of metal material.
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CN102355160A (en) * | 2011-10-19 | 2012-02-15 | 哈尔滨工业大学 | Longitudinal and bending composite mode sandwich two-foot ultrasonic linear motor oscillator with elastic support |
CN102868316A (en) * | 2012-10-12 | 2013-01-09 | 哈尔滨工业大学 | Paster-type dual-feet ultrasound motor oscillator |
CN103326615A (en) * | 2013-06-09 | 2013-09-25 | 上海大学 | Triangular-prism-shaped linear ultrasonic motor based on asymmetric vibration modes |
CN108322086A (en) * | 2018-01-09 | 2018-07-24 | 长春理工大学 | Piezoelectric vibrator |
CN211859980U (en) * | 2020-04-30 | 2020-11-03 | 华侨大学 | Diamond patch type double-foot linear ultrasonic motor and stator thereof |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7095160B2 (en) * | 2003-05-27 | 2006-08-22 | The Penn State Research Foundation | Piezoelectric motor and method of exciting an ultrasonic traveling wave to drive the motor |
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Patent Citations (5)
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CN102355160A (en) * | 2011-10-19 | 2012-02-15 | 哈尔滨工业大学 | Longitudinal and bending composite mode sandwich two-foot ultrasonic linear motor oscillator with elastic support |
CN102868316A (en) * | 2012-10-12 | 2013-01-09 | 哈尔滨工业大学 | Paster-type dual-feet ultrasound motor oscillator |
CN103326615A (en) * | 2013-06-09 | 2013-09-25 | 上海大学 | Triangular-prism-shaped linear ultrasonic motor based on asymmetric vibration modes |
CN108322086A (en) * | 2018-01-09 | 2018-07-24 | 长春理工大学 | Piezoelectric vibrator |
CN211859980U (en) * | 2020-04-30 | 2020-11-03 | 华侨大学 | Diamond patch type double-foot linear ultrasonic motor and stator thereof |
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