CN211859982U - Rhombic double-longitudinal-vibration sandwich type excitation double-foot linear ultrasonic motor and stator thereof - Google Patents
Rhombic double-longitudinal-vibration sandwich type excitation double-foot linear ultrasonic motor and stator thereof Download PDFInfo
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- CN211859982U CN211859982U CN202020706912.1U CN202020706912U CN211859982U CN 211859982 U CN211859982 U CN 211859982U CN 202020706912 U CN202020706912 U CN 202020706912U CN 211859982 U CN211859982 U CN 211859982U
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Abstract
The utility model discloses a rhombic double longitudinal vibration sandwich type excitation biped linear ultrasonic motor and a stator thereof, wherein the stator comprises a symmetrical rod and four groups of piezoelectric ceramic plates, the symmetrical rod comprises a rhombic hollow rod and two end straight rods, and the center of the rhombic hollow rod is provided with a through center through hole; two ridge lines of the rhombic hollow rod are provided with driving feet; the straight rods at the two ends are provided with end cylindrical holes; two metal blocks are also arranged outside each end straight rod, and piezoelectric ceramic sheet groups are clamped between the two metal blocks and between the end surface of each end straight rod and the metal blocks; copper sheets used as electrodes are arranged among the piezoelectric ceramic sheets and between the piezoelectric ceramic sheet group and the symmetrical rods; in addition, a pre-tightening bolt is arranged to penetrate through the metal block, the piezoelectric ceramic piece and the thin copper sheet and is screwed in the straight end rod so as to fixedly connect the metal block, the piezoelectric ceramic piece and the thin copper sheet into a whole; the stator is axially symmetrically arranged relative to two diagonal planes. It has the following advantages: high output efficiency, large driving force, compact structure, good control performance and low cost.
Description
Technical Field
The utility model relates to an supersound motor technology field especially relates to a two sufficient linear ultrasonic motor of sandwich excitation that indulge of rhombus and stator thereof.
Background
The linear ultrasonic motor utilizes the inverse piezoelectric effect of a piezoelectric material to excite the micro-amplitude vibration of an elastic body, and transmits kinetic energy to a rotor through the friction effect between the stator and the rotor so as to output motion. The linear ultrasonic motor has the advantages of good control performance, stepping and servo work, simple structure, low speed, large torque, quick response and the like, and has wide application prospect. In the existing linear ultrasonic motor, a stator structure has two types, namely a patch structure and a sandwich structure according to the assembly mode of piezoelectric ceramics and an elastomer. The sandwich type structure is disclosed as CN101072000A, and the patent application publication document which is named as a single-drive-foot sandwich energy converter type longitudinal-bending linear ultrasonic motor is created, although the problem of idle vibration energy is solved by adopting a quadrangular body with the section gradually becoming thinner from two ends to the middle part for an amplitude transformer, only a single rotor of one drive foot moves and outputs, and the working efficiency is low.
SUMMERY OF THE UTILITY MODEL
The utility model provides a two longitudinal vibration sandwich type excitation biped linear ultrasonic motor of rhombus and stator thereof, it has overcome the not enough that linear ultrasonic motor exists among the background art.
The utility model provides one of the technical scheme who adopts of its technical problem is: a rhombic double-longitudinal-vibration sandwich type excitation biped linear ultrasonic motor comprises a stator, a rotor and a clamping device for connecting the stator and the rotor; the stator comprises a symmetrical rod made of metal materials and four groups of piezoelectric ceramic pieces, wherein the symmetrical rod comprises a rhombic hollow rod and straight rods at two ends, and each group of piezoelectric ceramic pieces comprises four piezoelectric ceramic pieces; the rhombic hollow rod is defined with a first diagonal surface and a second diagonal surface which respectively pass through two diagonals of the rhombic hollow rod, and the first diagonal surface and the second diagonal surface are vertically arranged; the center of the rhombic hollow rod is provided with a through center through hole; the two ridge lines of the rhombic hollow rod positioned on the first diagonal plane are provided with driving feet; the straight rods at the two ends are fixedly arranged at the two sides of the rhombic hollow rod, the straight rods at the two ends are provided with end cylindrical holes which are parallel to the central through hole and penetrate through the straight rods, and the axes of the end cylindrical holes are positioned on a second diagonal plane; two metal blocks which are arranged outside the tail end surface of the end straight rod at intervals are also arranged outside each end straight rod, a group of piezoelectric ceramic piece groups are clamped between the two metal blocks and between the tail end surface of the end straight rod and the metal blocks, the polarization directions of every two adjacent piezoelectric ceramic pieces are opposite, and the piezoelectric ceramic pieces are polarized along the thickness direction; copper sheets used as electrodes are arranged among the piezoelectric ceramic sheets and between the piezoelectric ceramic sheet group and the symmetrical rods; in addition, a pre-tightening bolt is arranged to penetrate through the metal block, the piezoelectric ceramic piece and the thin copper sheet and is screwed in the straight end rod so as to fixedly connect the metal block, the piezoelectric ceramic piece and the thin copper sheet into a whole; the stator is axially symmetric with respect to both the first diagonal plane and the second diagonal plane.
In one embodiment: the first diagonal surface is arranged along the vertical direction, the second diagonal surface is arranged along the left-right direction, and the central through hole and the end cylindrical hole are arranged in a penetrating manner from front to back; the end straight rod and the metal block are of cuboid structures, the peripheral side walls of the end straight rod and the metal block are flush, and the front side wall and the rear side wall of the end straight rod and the rhombic hollow rod are flush.
In one embodiment: the mounting hole that runs through about this metal block, thin copper sheet center all are equipped with, and this end straight-bar is terminal end face center is concave to be equipped with the mounting groove, and this mounting groove leads to tip cylinder hole, this pretension bolted connection this mounting hole and mounting groove.
In one embodiment: the two drive feet are rectangular or circular in cross-section.
In one embodiment: the distance between the center of the driving foot and the center of the symmetric rod is 1/2 longitudinal vibration wavelength.
In one embodiment: the diameter of the end cylindrical hole is smaller than that of the central cylindrical hole.
In one embodiment: the symmetric rod and the driving foot are machined from a single piece of metal material.
In one embodiment: the two-end straight rod is a first end straight rod and a second end straight rod; when sinusoidal voltage is applied to the two piezoelectric ceramic piece groups of the first end straight rod, each pair of longitudinal vibration ceramic pieces synchronously expands or contracts to excite longitudinal vibration; cosine voltages with the same frequency and the phase difference of 90 degrees are applied to the two groups of piezoelectric ceramic sheets of the second end straight rod, and two longitudinal vibration modes excited by the stator are superposed, so that mass points on the contact surface of the stator and the rotor do elliptic motion, and the rotor is pushed to move; when the applied voltage is reversed, the elliptical trajectory is reversed in direction, thereby causing the mover to move bidirectionally.
The utility model provides a second of the technical scheme of its technical problem's adoption: a rhombic double longitudinal vibration sandwich type excitation biped linear ultrasonic motor stator comprises a symmetrical rod and four groups of piezoelectric ceramic sheets, wherein the symmetrical rod is made of a metal material and comprises a rhombic hollow rod and straight rods at two ends, and each group of piezoelectric ceramic sheet groups comprises four piezoelectric ceramic sheets; the rhombic hollow rod is defined with a first diagonal surface and a second diagonal surface which respectively pass through two diagonals of the rhombic hollow rod, and the first diagonal surface and the second diagonal surface are vertically arranged; the center of the rhombic hollow rod is provided with a through center through hole; the two ridge lines of the rhombic hollow rod positioned on the first diagonal plane are provided with driving feet; the straight rods at the two ends are fixedly arranged at the two sides of the rhombic hollow rod, the straight rods at the two ends are provided with end cylindrical holes which are parallel to the central through hole and penetrate through the straight rods, and the axes of the end cylindrical holes are positioned on a second diagonal plane; two metal blocks which are arranged outside the tail end surface of the end straight rod at intervals are also arranged outside each end straight rod, a group of piezoelectric ceramic piece groups are clamped between the two metal blocks and between the tail end surface of the end straight rod and the metal blocks, the polarization directions of every two adjacent piezoelectric ceramic pieces are opposite, and the piezoelectric ceramic pieces are polarized along the thickness direction; copper sheets used as electrodes are arranged among the piezoelectric ceramic sheets and between the piezoelectric ceramic sheet group and the symmetrical rods; in addition, a pre-tightening bolt is arranged to penetrate through the metal block, the piezoelectric ceramic piece and the thin copper sheet and is screwed in the straight end rod so as to fixedly connect the metal block, the piezoelectric ceramic piece and the thin copper sheet into a whole; the stator is axially symmetric with respect to both the first diagonal plane and the second diagonal plane.
Compared with the background technology, the technical scheme has the following advantages: high output efficiency, large driving force, compact structure, good control performance and low cost.
Drawings
The present invention will be further described with reference to the accompanying drawings and the following detailed description.
Fig. 1 is an overall assembly view of a stator according to the present embodiment.
Fig. 2 is a schematic view of the matching structure of the symmetric rod, the ceramic plate and the thin copper sheet of the stator according to the present embodiment.
Fig. 3 is a schematic structural diagram of any two opposite-polarity ceramic plates in each group of piezoelectric ceramic plate groups of the stator according to the embodiment.
Fig. 4 is a modal analysis diagram of the stator of the present embodiment at a frequency of 25.516 kHz.
Fig. 5 is a modal analysis diagram of the stator of the present embodiment at a frequency of 24.328 kHz.
Detailed Description
Referring to fig. 1, the rhombic double longitudinal vibration patch type excitation biped linear ultrasonic motor comprises a stator, a rotor and a clamping device for connecting the stator and the rotor, wherein the rotor and the clamping device can refer to the prior art.
The stator comprises a symmetrical rod 1 made of metal materials and four groups of piezoelectric ceramic plates 3, 4, 5 and 6, wherein the symmetrical rod comprises a rhombic hollow rod 11 and straight rods 12 at two ends. The rhombic hollow rod 11 is defined with a first diagonal surface and a second diagonal surface which respectively pass through two diagonals of the rhombic hollow rod, the first diagonal surface and the second diagonal surface are vertically arranged, the first diagonal surface is arranged along the vertical direction, and the second diagonal surface is arranged along the left-right direction; the diamond hollow rod 11 has a central through hole 111 formed in the center thereof. The two ridge lines of the rhombic hollow rod 11 positioned on the first diagonal plane are provided with the driving feet 13, the sections of the two driving feet 13 are rectangular or circular, and the structure can ensure that the driving feet are fully contacted with the guide rail plane of the clamping part so as to improve the working stability of the linear ultrasonic motor; the distance L between the center of the driving foot and the center of the symmetric rod 1 is 1/2 of the longitudinal vibration wavelength.
The two end straight rods 12 are cuboids, the distance between the thickness (front-back distance) of each cuboid and the thickness (front-back distance) of the rhombic hollow rod 11 is equal, the two end straight rods 12 are symmetrically and fixedly arranged on the left side and the right side of the rhombic hollow rod 11 in a left-right mode and are aligned in a front-back mode, the two end straight rods 12 are respectively provided with an end cylindrical hole 121 which penetrates through the rhombic hollow rod 11 in the front-back direction, and the axis of the end cylindrical hole 121 is located on a second diagonal plane; the straight rods 12 at the two ends are axially and symmetrically arranged relative to the first diagonal plane, and the straight rods 12 at the ends are also axially and symmetrically arranged relative to the second diagonal plane. The end cylindrical hole 121 has a diameter one-half of that of the central cylindrical hole 111, which further reduces the modal frequency difference.
Each end straight rod 12 is also provided with two metal blocks 14 in a cuboid structure, the thickness (front-back distance) of each cuboid is equal to the axial distance of the rhombic hollow rod 11, the two metal blocks 14 are sequentially arranged outside the tail end surface of the end straight rod 12 in an internal-external sequence, installation intervals are formed between the two metal blocks 14 and between the tail end surface of the end straight rod 12 and the metal blocks 14, each installation interval is internally provided with a group of piezoelectric ceramic piece groups, and each group of piezoelectric ceramic piece groups comprises four piezoelectric ceramic pieces 7 which longitudinally vibrate. Thin copper sheets 8 serving as electrodes are arranged between the piezoelectric ceramic sheets 7 of the piezoelectric ceramic sheet groups 3, 4, 5 and 6 and between the piezoelectric ceramic sheet groups and the symmetrical rod 1 (between the piezoelectric ceramic sheet groups and the tail end face of the end straight rod 12 and between the piezoelectric ceramic sheet groups and the end face of the metal block), and the number of grounding copper sheets in the thin copper sheets 8 is ten; in addition, a pre-tightening bolt 2 is arranged to penetrate through the metal block 13, the piezoelectric ceramic piece 7 and the thin copper sheet 8 and is screwed in the end straight rod 12 so as to fixedly connect the metal block 13, the piezoelectric ceramic piece 7, the thin copper sheet 8 and the symmetrical rod 12 to form a whole, and the peripheral side walls of the metal block 13, the piezoelectric ceramic piece 7 and the thin copper sheet 8 are aligned. The polarization directions of every two adjacent piezoelectric ceramic pieces 7 are opposite, each piezoelectric ceramic piece is polarized along the thickness direction, and the electric domain, namely the polarization direction, is represented by "+" - ". Has the structure that: the centers of the metal block 14 and the thin copper sheet 8 are provided with mounting holes which are penetrated left and right, the center of the tail end surface of the end straight rod 12 is concavely provided with a mounting groove, the mounting groove is communicated to the end cylindrical hole 121, and the pre-tightening bolt 2 is connected with the mounting holes and the mounting groove.
The stator is axially symmetrically disposed with respect to both the first reference plane and the second reference plane. This symmetrical pole 1 and drive foot adopt a monoblock metal material processing to form to reduce energy loss, simple structure workable.
Modal analysis using ANSYS (ANSYS is a large universal finite element analysis software developed by ANSYS corporation, usa) is shown in fig. 4 and 5. From the figure, the up-down and left-right movement of the motor stator can be observed, and the stator can be moved left and right by changing the phase difference of the two working modes of the stator to be-pi/2, as shown in fig. 5. According to the frequency 25.516kHz of modal analysis, the up-and-down moving distance of the stator driving foot is maximum, as shown in FIG. 4; the frequency was 24.328kHz and the stator drive foot moved the greatest distance to the left and right as shown in FIG. 5.
The working principle of the ultrasonic motor of the present embodiment is described as follows: the rotor is pushed to output linear displacement by utilizing the longitudinal vibration of the piezoelectric ceramics, as shown in figure 3, when sinusoidal voltage is applied to the piezoelectric ceramic sheet groups 3 and 4, each pair of longitudinal vibration ceramic sheets synchronously expands or contracts to excite the longitudinal vibration; cosine voltages with the phase difference of 90 degrees with the same frequency are applied to the piezoelectric ceramic sheet groups 5 and 6, and two longitudinal vibration modes excited by the stator are superposed, so that mass points on the contact surface of the stator and the rotor do elliptic motion, and the rotor is pushed to move. When the applied voltage is reversed, the elliptical trajectory is reversed in direction, thereby causing the mover to move bidirectionally. The rhombic hollow structure in the middle of the symmetrical rod 1 can improve the amplitude and the vibration speed of the driving foot part, so that the performance of the motor is greatly improved.
This embodiment's ultrasonic motor combines sandwich structure, diamond-shaped structure, cylinder hole structure and symmetrical structure together, wherein: firstly, piezoelectric ceramics of an ultrasonic motor with a sandwich structure are pre-tightened by adopting a threaded structure, the piezoelectric ceramics work in a d33 mode, and the piezoelectric ceramics are always in a compressive stress state in the working process of the motor, so that the motor has the characteristic of pressure resistance, the motor can apply quite large pre-tightening force, the piezoelectric ceramics of the motor can fully exert the advantage of large output density, the output performance of the ultrasonic motor can be effectively improved, and the ultrasonic motor with the sandwich structure can stably work in various extreme environments, such as outer space with vacuum, high and low temperature, strong electromagnetic interference and other extreme environments; secondly, a rhombic structure is matched with a cylindrical hole structure, the contact area of a driving foot of the rhombic structure rotates, the driving foot is suitable for high-resolution driving, the rotor is pushed in a point contact or line contact mode, the rhombic operation positioning is more accurate, and the output density is high; the piezoelectric ceramic is used for exciting the longitudinal vibration mode and the bending vibration mode of the elastic body, wherein the linear ultrasonic motor utilizing the structural longitudinal vibration mode has higher thrust and efficiency; and fourthly, the design that the two longitudinal vibration ultrasonic vibrators are connected and then the double driving feet are excited simultaneously is utilized, the vibration energy is fully utilized, and the working mode distortion caused by asymmetric clamping is avoided due to the strict symmetric structure of the symmetric rod.
The above description is only a preferred embodiment of the present invention, and therefore the scope of the present invention should not be limited by this description, and all equivalent changes and modifications made within the scope and the specification of the present invention should be covered by the present invention.
Claims (9)
1. A rhombic double-longitudinal-vibration sandwich type excitation biped linear ultrasonic motor comprises a stator, a rotor and a clamping device for connecting the stator and the rotor; the method is characterized in that: the stator comprises a symmetrical rod made of metal materials and four groups of piezoelectric ceramic pieces, wherein the symmetrical rod comprises a rhombic hollow rod and straight rods at two ends, and each group of piezoelectric ceramic pieces comprises four piezoelectric ceramic pieces; the rhombic hollow rod is defined with a first diagonal surface and a second diagonal surface which respectively pass through two diagonals of the rhombic hollow rod, and the first diagonal surface and the second diagonal surface are vertically arranged; the center of the rhombic hollow rod is provided with a through center through hole; the two ridge lines of the rhombic hollow rod positioned on the first diagonal plane are provided with driving feet; the straight rods at the two ends are fixedly arranged at the two sides of the rhombic hollow rod, the straight rods at the two ends are provided with end cylindrical holes which are parallel to the central through hole and penetrate through the straight rods, and the axes of the end cylindrical holes are positioned on a second diagonal plane; two metal blocks which are arranged outside the tail end surface of the end straight rod at intervals are also arranged outside each end straight rod, a group of piezoelectric ceramic piece groups are clamped between the two metal blocks and between the tail end surface of the end straight rod and the metal blocks, the polarization directions of every two adjacent piezoelectric ceramic pieces are opposite, and the piezoelectric ceramic pieces are polarized along the thickness direction; copper sheets used as electrodes are arranged among the piezoelectric ceramic sheets and between the piezoelectric ceramic sheet group and the symmetrical rods; in addition, a pre-tightening bolt is arranged to penetrate through the metal block, the piezoelectric ceramic piece and the thin copper sheet and is screwed in the straight end rod so as to fixedly connect the metal block, the piezoelectric ceramic piece and the thin copper sheet into a whole; the stator is axially symmetric with respect to both the first diagonal plane and the second diagonal plane.
2. The rhombic double longitudinal vibration sandwich type excitation biped linear ultrasonic motor according to claim 1, is characterized in that: the first diagonal surface is arranged along the vertical direction, the second diagonal surface is arranged along the left-right direction, and the central through hole and the end cylindrical hole are arranged in a penetrating manner from front to back; the end straight rod and the metal block are of cuboid structures, the peripheral side walls of the end straight rod and the metal block are flush, and the front side wall and the rear side wall of the end straight rod and the rhombic hollow rod are flush.
3. The rhombic double longitudinal vibration sandwich type excitation biped linear ultrasonic motor according to claim 2, characterized in that: the mounting hole that runs through about this metal block, thin copper sheet center all are equipped with, and this end straight-bar is terminal end face center is concave to be equipped with the mounting groove, and this mounting groove leads to tip cylinder hole, this pretension bolted connection this mounting hole and mounting groove.
4. The rhombic double longitudinal vibration sandwich type excitation biped linear ultrasonic motor according to claim 1, is characterized in that: the two drive feet are rectangular or circular in cross-section.
5. The rhombic double longitudinal vibration sandwich type excitation biped linear ultrasonic motor according to claim 1, is characterized in that: the distance between the center of the driving foot and the center of the symmetric rod is 1/2 longitudinal vibration wavelength.
6. The rhombic double longitudinal vibration sandwich type excitation biped linear ultrasonic motor according to claim 1, is characterized in that: the diameter of the end cylindrical hole is smaller than that of the central cylindrical hole.
7. The rhombic double longitudinal vibration sandwich type excitation biped linear ultrasonic motor according to claim 1, is characterized in that: the symmetric rod and the driving foot are machined from a single piece of metal material.
8. The rhombic double longitudinal vibration sandwich type excitation bipedal linear ultrasonic motor according to any one of claims 1 to 7, characterized in that: the two-end straight rod is a first end straight rod and a second end straight rod; when sinusoidal voltage is applied to the two piezoelectric ceramic piece groups of the first end straight rod, each pair of longitudinal vibration ceramic pieces synchronously expands or contracts to excite longitudinal vibration; cosine voltages with the same frequency and the phase difference of 90 degrees are applied to the two groups of piezoelectric ceramic sheets of the second end straight rod, and two longitudinal vibration modes excited by the stator are superposed, so that mass points on the contact surface of the stator and the rotor do elliptic motion, and the rotor is pushed to move; when the applied voltage is reversed, the elliptical trajectory is reversed in direction, thereby causing the mover to move bidirectionally.
9. A rhombic double longitudinal vibration sandwich type excitation double-foot linear ultrasonic motor stator is characterized in that: the device comprises a symmetrical rod made of metal materials and four groups of piezoelectric ceramic pieces, wherein the symmetrical rod comprises a rhombic hollow rod and straight rods at two ends, and each group of piezoelectric ceramic pieces comprises four piezoelectric ceramic pieces; the rhombic hollow rod is defined with a first diagonal surface and a second diagonal surface which respectively pass through two diagonals of the rhombic hollow rod, and the first diagonal surface and the second diagonal surface are vertically arranged; the center of the rhombic hollow rod is provided with a through center through hole; the two ridge lines of the rhombic hollow rod positioned on the first diagonal plane are provided with driving feet; the straight rods at the two ends are fixedly arranged at the two sides of the rhombic hollow rod, the straight rods at the two ends are provided with end cylindrical holes which are parallel to the central through hole and penetrate through the straight rods, and the axes of the end cylindrical holes are positioned on a second diagonal plane; two metal blocks which are arranged outside the tail end surface of the end straight rod at intervals are also arranged outside each end straight rod, a group of piezoelectric ceramic piece groups are clamped between the two metal blocks and between the tail end surface of the end straight rod and the metal blocks, the polarization directions of every two adjacent piezoelectric ceramic pieces are opposite, and the piezoelectric ceramic pieces are polarized along the thickness direction; copper sheets used as electrodes are arranged among the piezoelectric ceramic sheets and between the piezoelectric ceramic sheet group and the symmetrical rods; in addition, a pre-tightening bolt is arranged to penetrate through the metal block, the piezoelectric ceramic piece and the thin copper sheet and is screwed in the straight end rod so as to fixedly connect the metal block, the piezoelectric ceramic piece and the thin copper sheet into a whole; the stator is axially symmetric with respect to both the first diagonal plane and the second diagonal plane.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202020706912.1U CN211859982U (en) | 2020-04-30 | 2020-04-30 | Rhombic double-longitudinal-vibration sandwich type excitation double-foot linear ultrasonic motor and stator thereof |
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| CN202020706912.1U CN211859982U (en) | 2020-04-30 | 2020-04-30 | Rhombic double-longitudinal-vibration sandwich type excitation double-foot linear ultrasonic motor and stator thereof |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113595438A (en) * | 2020-04-30 | 2021-11-02 | 华侨大学 | Rhombic double-longitudinal-vibration sandwich type excitation double-foot linear ultrasonic motor and stator thereof |
| CN113595436A (en) * | 2020-04-30 | 2021-11-02 | 华侨大学 | Circular double-longitudinal-vibration sandwich type excitation double-foot linear ultrasonic motor and stator thereof |
-
2020
- 2020-04-30 CN CN202020706912.1U patent/CN211859982U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113595438A (en) * | 2020-04-30 | 2021-11-02 | 华侨大学 | Rhombic double-longitudinal-vibration sandwich type excitation double-foot linear ultrasonic motor and stator thereof |
| CN113595436A (en) * | 2020-04-30 | 2021-11-02 | 华侨大学 | Circular double-longitudinal-vibration sandwich type excitation double-foot linear ultrasonic motor and stator thereof |
| CN113595436B (en) * | 2020-04-30 | 2024-06-07 | 华侨大学 | Circular double longitudinal vibration sandwich type excitation double-foot linear ultrasonic motor and stator thereof |
| CN113595438B (en) * | 2020-04-30 | 2024-06-07 | 华侨大学 | Rhombic double longitudinal vibration sandwich type excitation bipedal linear ultrasonic motor and stator thereof |
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